JP2010102600A - Stop control method of servo system, stop control device and functional droplet discharging device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stop control method of a servo system or the like which proceeds to the next operation regardless whether a current position of the servo system is put in an imposition width or not. <P>SOLUTION: The stop control method of the servo system which stops the movement object at the imposition width 102 which is deviation at a target position by an instruction from a sequence controller 80 includes: an imposition width setting process to set an imposition width 102 with respect to an damping oscillation operation in the transient state of a stop response of a movement object; a passage frequency setting process to set the passage frequency of the damping oscillation operation which passes the set imposition width 102; a passages frequency count process 112 to count a passage frequency; a completion signal output process 113 which outputs a stop operation completion signal the a sequence controller 80 when the counted passage frequency reaches a preset passage frequency. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a servo system stop control method, a stop control device, and a functional liquid droplet ejection device including the same, which stop a moving object at a target position in response to a command from a sequence controller.

Conventionally, when the position deviation of the first motor falls within a preset first in-position width, a command signal for the next operation of the second motor is distributed, and the position deviation of the first motor is set to a preset second value. The output of the command signal of the second motor is delayed until it is within the in-position width, and when the position deviation of the first motor enters the second in-position width, the delayed command signal is output to the servo amplifier of the second motor. A position control method is known (see Patent Document 1).
In this position control method, when the position control of the second motor is performed as the next operation of the position control of the first motor, the command signal for the operation of the second motor is distributed and stored earlier than the actual operation timing. As soon as the second in-position width is entered, it is possible to output immediately and shift to the next operation. That is, it is possible to shorten the waiting time for the start of operations of the axis operation (X axis) by the first motor and the axis operation (Z axis) by the second motor.
JP 2002-278630 A

  In such a position control method, it is assumed that the stop of the X-axis operation by the first motor stops within the second in-position width within a certain time after starting a series of stop control. In the stop control by such a timer, when the damped vibration operation changes in the transient state of the shaft operation stop response, the change is not noticed, and the next operation start is delayed or not within the second in-position range. There were problems such as starting the next operation.

  The present invention relates to a stop control method, a stop control device, and a stop control device for a servo system that can cope with a change in a damped vibration operation in a transient state of a stop response of an axis operation (moving object) and can shift to a next operation without delay. It is an object of the present invention to provide a functional droplet discharge device provided.

  A stop control method for a servo system according to the present invention is a stop control method for a servo system that stops a moving object within an in-position range that is a deviation at a target position in response to a command from a sequence controller. The in-position width setting step for setting the in-position width, the passage number setting step for setting the number of times of the damping vibration operation that passes the set in-position width, and the passage A passing frequency counting step for counting the number of times, and a completion signal output step for outputting a stop operation completion signal to the sequence controller when the counted number of passing times reaches the set number of passing times. .

  A stop control device for a servo system according to the present invention is a stop control device for a servo system that stops a moving object within an in-position range that is a deviation at a target position in response to a command from a sequence controller. An in-position width setting means for setting an in-position width, a passing frequency setting means for setting the number of times of a damping vibration action passing through the set in-position width, and a passing A passage number counting means for counting the number of times, and a completion signal output means for outputting a stop operation completion signal to the sequence controller when the counted number of passages reaches the set number of passages. .

  According to these configurations, the damped vibration operation can be regarded as the completion of the stop operation of the moving object when the set in-position width has passed the set number of passes. In this case, an appropriate in-position width and an appropriate number of passages are experimentally obtained in advance. Further, when the set in-position width is not within the set number of passes, it can be recognized that the damped vibration operation (attenuation rate) has changed. As a result, for example, it becomes easy to grasp the change in the damping vibration operation (attenuation rate) due to the change in characteristics of the drive device (motor, etc.) that moves the moving object over time. The relationship with the number of times can be changed according to the characteristic change.

  In these cases, the in-position width and the number of times of passage are preferably configured to be set for each movement operation of the moving object.

  According to this configuration, for example, a plurality of stop operation settings such as a high accuracy setting and a high speed setting can be performed. Settings that take into account can be made. In other words, a narrow in-position width and a large number of passes are set when high-accuracy positioning is desired over time. On the other hand, when a shorter stop time is required than positioning accuracy, a wide in-position is set. Set the position width and small number of passes. Thereby, stop control of a moving object can be performed with arbitrary time and accuracy, and optimization of stop control with respect to various movement patterns can be achieved.

  In this case, it is preferable to further include a control gain setting step of setting a control gain in the stop response of the moving object.

  In this case, it is preferable to further include control gain setting means for setting a control gain in the stop response of the moving object.

  According to these configurations, the stop response sensitivity of the moving object can be arbitrarily set. Thereby, the characteristic of the damped vibration operation of the moving object can be arbitrarily changed.

  Another servo system stop control method is a servo system stop control method that stops a moving object within an in-position range that is a deviation at a target position in response to a command from a sequence controller. With respect to the damped vibration operation in the transient state of the stop response of the object, a vibration frequency setting step for setting the timing of the stop operation completion by the vibration frequency of the damped vibration operation, a vibration frequency counting step for counting the vibration frequency of the damped vibration operation, A completion signal output step of outputting a stop operation completion signal to the sequence controller when the counted number of vibrations reaches the set number of vibrations.

  Furthermore, another servo system stop control device is a servo system stop control device that stops a moving object within an in-position range that is a deviation at a target position in response to a command from a sequence controller. With respect to the damped vibration operation in the transient state of the stop response of the object, the vibration frequency setting means for setting the stop operation completion timing by the vibration frequency of the damped vibration operation, And a completion signal output means for outputting a stop operation completion signal to the sequence controller when the counted number of vibrations reaches the set number of vibrations.

According to these structures, it can be considered that the stop operation of the moving object is completed only by counting the number of vibrations of the damped vibration operation. For example, based on the point (turning point) where the forward / reverse (+/−) movement is switched that appears in the damped vibration of the moving object, the first turning point is set to zero after the stop control is started, and the second Count the number of turning points after the first and count up one by one. However, considering the time between turning points, only turning points that occur within a predetermined time are counted effectively. The number of vibrations that can be regarded as completion of the stop operation is experimentally obtained in advance.
Moreover, the level of positioning accuracy to the target position can be set according to the set number of vibrations. That is, when it is desired to perform highly accurate positioning over time, a large number of vibrations is set. On the other hand, when it is desired to perform positioning with a predetermined accuracy in a short time, a small number of vibrations is set. Thereby, stop control of a moving object can be performed with arbitrary time and accuracy, and optimization of stop control with respect to various movement patterns can be achieved.

  In this case, the moving object is configured to be movable by a plurality of movement axes, and the plurality of movement axes are driven by a plurality of servo systems, and each servo system has an in-position width setting means and a passage number setting means, respectively. It is preferable that a passage number counting means and a completion signal output means are provided.

  According to this configuration, since individual parameters (in-position width, number of passes, etc.) can be set for the servo system of each moving axis, each moving axis can be individually controlled. Thereby, stop control, such as positioning according to the movement characteristic of each movement axis, can be performed.

  The functional liquid droplet ejection apparatus according to the present invention moves the set stage on which the work is set and aligns the work, and then moves the work through the set stage while discharging the functional liquid droplets from the functional liquid droplet ejection head. A functional liquid droplet ejection apparatus that ejects and draws on a workpiece, the θ-axis table body configured to support the set stage and be movable in the θ-axis direction, and the θ-axis that drives the θ-axis table body A θ-axis moving table comprising a servo system, a Y-axis table main body configured to support the θ-axis table main body and move the set stage in the Y-axis direction via the θ-axis table main body, and the Y-axis table main body are driven. A Y-axis moving table comprising a Y-axis servo system, a Y-axis table main body and a Y-axis table book as well as supporting the Y-axis table main body X-axis moving table comprising X-axis table main body configured to move set stage in X-axis direction through body, X-axis servo system driving X-axis table main body, θ-axis servo system, Y-axis servo system And a sequence controller that performs overall control of the X-axis servo system, a set stage as a moving object, a θ-axis table body, a Y-axis table body, and an X-axis table body as a plurality of moving axes, a θ-axis servo system, a Y-axis servo And a stop control device for the servo system described above, wherein the system and the X-axis servo system are a plurality of servo systems.

  In this case, the stop control device can drive the θ-axis servo system, the Y-axis servo system, and the X-axis servo system when aligning the workpiece, and can drive only the X-axis servo system when drawing on the workpiece. preferable.

According to these configurations, it is possible to individually perform stop control on the servo systems of the respective movement axes (X, Y, θ). Thereby, a workpiece | work can be accurately positioned in arbitrary positions.
In addition, for example, two kinds of stop operation settings can be set, such as high-precision setting during alignment processing and high-speed setting during drawing processing. Therefore, proper stop operation control can be performed separately in alignment processing and drawing processing. it can.

  Hereinafter, a droplet discharge device to which a stop control device for a servo system of the present invention is applied will be described with reference to the accompanying drawings (first embodiment). This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a functional droplet discharge head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced. A light emitting layer to be a pixel, a filter element of a color filter, and the like are formed.

  As shown in FIGS. 1 to 3, the droplet discharge device 1 is disposed on an X-axis support base 21 (stone surface plate) and extends in the X-axis direction, which is the main scanning direction. An X-axis main table 2 that is moved in the axial direction, and a pair of Y-axis support bases 3a that are spanned across the X-axis main table 2 via a plurality of support columns 11, Y-axis main table 3 extending in the Y-axis direction, and 13 carriage units 4 suspended in a movable manner on the Y-axis main table 3 and mounted with a plurality of (12) functional liquid droplet ejection heads 31. And is composed of. Furthermore, the droplet discharge device 1 includes a chamber 5 that houses these devices in an atmosphere in which temperature and humidity are controlled, and a functional liquid that passes through the chamber 5 and supplies the functional liquid to the functional droplet discharge head 31. A supply device 6 and a control device 78 that performs overall control of the entire device are provided. A tank cabinet 50 for storing a main tank 6 a and the like that forms the main body of the functional liquid supply device 6 is provided in a part of the side wall of the chamber 5. The droplet discharge device 1 discharges the functional liquid supplied from the functional liquid supply device 6 by driving the droplet discharge head 31 in synchronization with the driving of the X-axis main table 2 and the Y-axis main table 3. Thus, a predetermined drawing pattern is drawn on the workpiece W.

  Further, the droplet discharge device 1 is provided with a maintenance device 7 including a flushing unit 15, a suction unit 16, a wiping unit 17, and a discharge performance inspection unit 18, and each unit is used for maintenance of the functional droplet discharge head 31. Thus, the function of the functional liquid droplet ejection head 31 is maintained and recovered. In the droplet discharge device 1 of the present embodiment, the workpiece W is drawn with the carriage unit 4 facing the portion where the X-axis main table 2 and the Y-axis main table 3 intersect, and the Y-axis main table 3 and the maintenance device 7 are drawn. The carriage unit 4 is allowed to face the portion where the (suction unit 16 and wiping unit 17) intersect to perform function maintenance / recovery of the functional liquid droplet ejection head 31.

  The flushing unit 15 includes a pre-drawing flushing unit 15a and a regular flushing unit 15b. The pre-drawing flushing unit 15a receives a discharge from the functional liquid droplet ejection head 31 immediately before the drawing process, and the regular flushing unit 15b It receives the discarded discharge of the functional liquid droplet discharge head 31 which is performed at the time of non-drawing processing such as re-loading. The suction unit 16 has 13 cap units 160, forcibly sucks the functional liquid from the discharge nozzles 37 of the respective functional liquid droplet discharge heads 31 and performs capping. The wiping unit 17 wipes the nozzle surface of the functional liquid droplet ejection head 31 after suction. The ejection performance inspection unit 18 inspects the presence / absence of ejection from the functional droplet ejection head 31 and the flight bend, and measures the ejection amount (weight) from the diameter of the landing dot of the functional droplet.

  The Y-axis main table 3 includes 13 bridge plates 3b each of which has 13 carriage units 4 suspended, and 13 sets of Y-axis main sliders (not shown) that support the 13 bridge plates 3b by both ends. And a pair of Y-axis main linear motors (not shown) that are installed on the pair of Y-axis support bases 3a and move the bridge plate 3b in the Y-axis direction. Further, the Y-axis main table 3 performs sub-scanning of the functional liquid droplet ejection head 31 at the time of drawing via each carriage unit 4 and makes the functional liquid droplet ejection head 31 face the suction unit 16 and the wiping unit 17. In this case, the carriage units 4 can be moved independently and individually, or the 13 carriage units 4 can be moved together.

  Each carriage unit 4 has six colors of R, G, B, C, M, and Y, each of two (total 12) functional droplet ejection heads 31 and six functional droplet ejection heads 31 And a head unit 4b composed of a head plate 4a supported in two groups (see FIG. 4A). Each carriage unit 4 includes a θ rotation mechanism 4c that supports the head unit 4b so as to be capable of θ correction (θ rotation), and a suspension member 4d that supports the head unit 4b on the bridge plate 3b via the θ rotation mechanism 4c. And. In addition, each of the carriage units 4 is provided with a sub-tank 6b (in reality, on the bridge plate 3b). The sub-tank 6b utilizes a natural water head and a pressure regulating valve (not shown). The functional liquid is supplied to each functional liquid droplet ejection head 31 through (omitted).

  As shown in FIG. 4B, the functional liquid droplet ejection head 31 is a so-called double ink jet head, and a functional liquid is introduced via a head substrate 33 and a functional liquid introduction part 32 having two connection needles 35. A head main body 34 that is connected to the lower side of the introduction portion 32 and discharges functional liquid droplets. A large number of ejection nozzles 37 are arranged on the nozzle plate 36 of the head body 34 in parallel with each other and at a half nozzle pitch position.

  Here, the X-axis main table 2 will be described in detail with reference to FIGS. 2 and 3. The X-axis main table 2 supports a set stage 22 for sucking and setting the workpiece W, a θ-axis moving table 23 for supporting the set stage 22 so as to be movable in the θ-axis direction, and a set stage 22 being freely movable in the Y-axis direction. The Y-axis sub-table 24, the X-axis sub-table 25 for supporting the set stage 22 so as to be movable in the X-axis direction, and the X-axis for supporting the periodic flushing unit 15b and the discharge performance inspection unit 18 slidably in the X-axis direction. And a maintenance slider 26.

As shown in FIG. 5, the set stage 22 is formed of a thick plate-like stone surface plate and is formed in a substantially square shape in plan view, and a plurality of suction grooves 27 for sucking the workpiece W are formed on the surface thereof. Is formed. Each suction groove 27 is formed with a suction hole (not shown) connected to suction means (not shown) such as an ejector, and a sufficient suction force is applied to the workpiece W via the suction groove 27. Can be done.
Further, the set stage 22 supports the pre-drawing flushing unit 15a, and a functional liquid droplet ejection head that has started to move for drawing immediately before drawing on a pair of sides parallel to the Y-axis direction of the set stage 22 A pair of pre-drawing flushing boxes 15 c that receive the discarded discharge (pre-drawing flushing) from 31 are attached.

  2 is the alignment position (feeding / dispensing material position) of the workpiece W, and when the unprocessed workpiece W is fed to the set stage 22 or the processed workpiece W is removed. When making the material, the set stage 22 is moved to this position. Then, the workpiece W is fed or unloaded with respect to the set stage 22 by a robot arm (not shown). 3 is a workpiece alignment camera 12 for recognizing the position of the workpiece W. Based on the imaging result of the workpiece alignment camera 12, a θ-axis moving linear motor 45, a Y-axis sub-linear motor 55, and An X-axis moving linear motor 65 (all described later) is driven, and corrections in the X-axis direction, the Y-axis direction, and the θ-axis direction are performed (alignment processing).

  The θ-axis moving table 23 includes a θ-axis table main body 41 that supports the set stage 22 and is configured to be movable in the θ-axis direction, and a θ-axis servo system 42 that drives the θ-axis table main body 41. It is configured. The θ-axis table body 41 includes a θ-axis movable member 43 that supports the set stage 22 and a θ-axis base member 44 that rotatably supports the θ-axis movable member 43.

  The θ-axis servo system 42 is disposed between the θ-axis movable member 43 and the θ-axis base member 44, and includes a θ-axis movement linear motor 45 that rotates the θ-axis movable member 43, and a θ-axis movement linear motor 45. A θ-axis servo driver 46 for controlling the drive torque and a θ-axis encoder 47 incorporated in a symmetrical position with the θ-axis moving linear motor 45 (see FIG. 6).

  The Y-axis sub-table 24 (Y-axis moving table) supports the θ-axis table main body 41 and also has a Y-axis table main body 51 configured to move the set stage 22 in the Y-axis direction via the θ-axis table main body 41; And a Y-axis servo system 52 for driving the Y-axis table main body 51. The Y-axis table body 51 includes a Y-axis movable member 53 that supports the θ-axis base member 44 and a Y-axis base member 54 that supports the Y-axis movable member 53 so as to be movable in the Y-axis direction.

  The Y-axis servo system 52 is disposed between the Y-axis movable member 53 and the Y-axis base member 54, and moves a Y-axis movable member 53 in the Y-axis direction. A Y-axis servo driver 56 that controls the drive torque of the motor 55 and a Y-axis encoder 57 that is incorporated in parallel with the Y-axis sub-linear motor 55 are configured (see FIG. 6).

  The X-axis sub-table 25 (X-axis moving table) supports the Y-axis table main body 51 and is configured so that the set stage 22 is movable in the X-axis direction via the θ-axis table main body 41 and the Y-axis table main body 51. The shaft table main body 61 and an X-axis servo system 62 that drives the X-axis table main body 61 are configured. The X-axis table body 61 includes an X-axis movable member 63 that supports the Y-axis base member 54 and an X-axis base member 64 that supports the X-axis movable member 63 so as to be movable in the X-axis direction.

  The X-axis servo system 62 is disposed between the X-axis movable member 63 and the X-axis base member 64, and moves along the X-axis movable member 63 in the X-axis direction. An X-axis servo driver 66 that controls the driving torque of the motor 65 and an X-axis encoder 67 that is incorporated in parallel with the X-axis moving linear motor 65 are configured (see FIG. 6).

  The θ-axis encoder 47, the Y-axis encoder 57, and the X-axis encoder 67 are driven and controlled by signals from a glass scale and a sensor (not shown) that reads the glass scale.

  Next, the main control system of the droplet discharge device 1 will be described with reference to FIG. The droplet discharge device 1 includes a droplet discharge unit 71 having a head unit 4b (functional droplet discharge head 31) and an X-axis main table 2, and moves a workpiece W in each axial direction (X, Y, θ). A work moving unit 72 for moving, a head moving unit 73 having the Y-axis main table 3 and moving the head unit 4b in the Y-axis direction, a maintenance unit 74 having each unit of the maintenance device 7, and a functional liquid It has a supply device 6 and has a functional liquid supply unit 75 that supplies a functional liquid to the functional liquid droplet ejection head 31, a detection unit 76 that has various sensors and performs various detections, and various drivers that drive and control the respective units. A drive unit 77 and a control unit (control device 78) connected to each unit and controlling the entire droplet discharge device 1 are provided.

  The control unit (control device 78) receives the sequence controller 80 that controls the operation procedure during the alignment process and the drawing process, and the operation instruction from the sequence controller 80, and controls the positioning control of each linear motor 45, 55, 65. And a stop control device 90.

  Here, the positioning of each linear motor 45, 55, 65 means that the set stage 22 on which the workpiece W is set is moved into the in-position width 102 which is a deviation from the stop target position 101, and the stop operation is completed. Point to. The positioning accuracy differs depending on the type of processing performed in the droplet discharge device 1. For example, very high positioning accuracy is required during the alignment processing, but during the drawing processing, the positioning accuracy is as high as during the alignment processing. I don't need it. In general, when highly accurate positioning control is performed, it takes time to complete the stop operation. Therefore, it is necessary to optimize the time required for the positioning operation by changing the positioning accuracy according to various processes. Therefore, in the control device 78 according to the present embodiment, a user can arbitrarily change a set value (parameter) related to positioning accuracy from the sequence controller 80.

The sequence controller 80 is composed of a personal computer (PC), receives various parameters from the user using an input means such as a keyboard, and changes the state of the droplet discharge device 1 by an output means such as a monitor. (See FIG. 1).
The sequence controller 80 has an interface 81 for connecting each means, a storage area that can be temporarily stored, a RAM 82 that is used as a work area for control processing, and various storage areas. ROM 83 for storing control programs and control data; drawing data for drawing a predetermined drawing pattern on the work W; various data from each means; and a program for processing various data A hard disk 84, a CPU 86 that performs arithmetic processing on various data in accordance with programs stored in the ROM 83 and the hard disk 84, and a bus 85 that connects them to each other.

  The sequence controller 80 inputs various data from each means through the interface 81 and causes the CPU 86 to perform arithmetic processing according to a program stored in the hard disk 84 (or sequentially read out by a CD-ROM drive or the like). The processing result is output to each means via the drive unit 77 (various drivers). Thereby, the whole apparatus is controlled and various processes of the droplet discharge apparatus 1 are performed.

  The stop control device 90 is connected via the interface 81 of the sequence controller 80, and positions the set stage 22 to the stop target position 101 according to a command from the sequence controller 80. This positioning is performed by controlling the head movement driver 79, the θ-axis servo driver 46, the Y-axis servo driver 56, and the X-axis servo driver 66 based on information from the θ-axis encoder 47, the Y-axis encoder 57, and the X-axis encoder 67. The Y-axis main linear motor (Y-axis main table 3), the θ-axis movement linear motor 45, the Y-axis sub-linear motor 55, and the X-axis movement linear motor 65 are drive-controlled (full-closed control). In addition, the drive control of each linear motor 45, 55, 65 may drive 3 axes | shafts (X * Y * (theta)) simultaneously, and may drive individually 1 axis | shaft separately.

  The stop control device 90 has a stop control interface 91 for connecting the servo drivers 46, 56, 66 and encoders 47, 57, 67, and a memory capable of temporarily storing various parameters input from the sequence controller 80. A stop control RAM 92 having an area and used as a work area for control processing, a stop control ROM 93 having various storage areas for storing a control program and control data, a program stored in the stop control ROM 93, and the like Accordingly, a stop control CPU 94 that performs arithmetic processing on various data and a stop control bus 95 that connects them to each other are provided.

  As shown in FIG. 7A, the stop control RAM 92 has an input that is a deviation between the stop target position 101 of the set stage 22 and the stop target position 101 of the damped vibration operation in the transient state of the stop response of the set stage 22. The position width 102, the passing frequency value 103 of the damped vibration operation passing through the set in-position width 102, the control gain 104 in the stop response of the set stage 22, and the counter 105 holding the value obtained by counting the passing number Temporarily stored. In this embodiment, only control parameters for the θ-axis servo driver 46, the Y-axis servo driver 56, and the X-axis servo driver 66 are set, but a head moving unit that moves the head unit 4b in the Y-axis direction. Control parameters for 73 (head movement driver 79) may be set.

  In the present embodiment, two different parameters can be set for each parameter (excluding the counter 105). As a result, for example, two kinds of stop operation settings, that is, high-accuracy setting (parameter (1)) and high-speed setting (parameter (2)) can be performed. The accuracy and positioning time can be set. Note that the number of parameters that can be set is arbitrary, and the user inputs an arbitrary value for each parameter using an input unit such as a keyboard of the sequence controller 80. Further, “in-position width setting means”, “passing number setting means” and “control gain setting means” in the claims refer to the stop control RAM 92.

  As shown in FIG. 7B, individual parameters may be set for each movement axis (X · Y · θ). Since individual parameters (in-position width 102, passage number value 103, etc.) can be set for each servo system 42, 52, 62, each servo system 42, 52, 62 can be controlled individually. it can. Thereby, positioning according to the movement characteristic of each movement axis can be performed.

During a damped vibration operation in a stop response transient state, the position of each linear motor 45, 55, 65 (set stage 22) vibrates in both positive / negative (+/−) directions with the stop target position 101 as the center. The in-position width 102 sets an absolute value of a positive or negative position deviation with the stop target position 101 as the center.
In the passage number value 103, the number of passages that can be regarded as completion of the stop operation (the current position is within the in-position width 102) is set. The passage of the in-position width 102 means a case where the current position of the set stage 22 exceeds (positive) or negative of the set in-position width 102. This is counted as one time and added to the counter 105 ( Increment).
Moreover, since the stop response sensitivity of the set stage 22 (work W) can be arbitrarily set by setting the control gain 104, the characteristics of the damped vibration operation can be arbitrarily changed.
Note that the appropriate in-position width 102 and the appropriate pass count value 103 are experimentally determined in advance.

  The stop control ROM 93 stores programs, data, and the like. In accordance with these programs, the stop control CPU 94 counts the number of times the set in-position width 102 has passed, and a stop operation completion signal to the sequence controller 80. Various calculation processes such as output are performed. The “passage count counting means” and the “completion signal output means” referred to in the claims refer to a program or the like stored in the stop control ROM 93.

  Here, two parameter setting examples (high accuracy setting and high speed setting) will be described with reference to FIG. In this example, the in-position width 102 is set to 1.5 μm and the pass count value 103 is set to 16 times as high-precision setting parameters, while the in-position width 102 is set to 3.5 μm as high-speed setting parameters. The number of times 103 was set to 2 times. In this case, in the high accuracy setting, when the value of the counter 105 becomes the same value as the passage count value 103 (16 times), a stop operation completion signal is issued (see FIG. 8A). Similarly, in the high-speed setting, when the value of the counter 105 reaches twice, a stop operation completion signal is issued (see FIG. 8B). In this example, the stop operation is completed in about 20 msec when the high accuracy is set, and the stop operation is completed in about 5 msec when the high speed is set. In this way, it can be considered that the stop operation of the set stage 22 has been completed when the damped vibration operation has passed through the set in-position width 102 by the set pass count value 103.

  As described above, according to the movement pattern (high accuracy setting, high speed setting, etc.) of the set stage 22, the level of positioning accuracy to the target position can be set. That is, the level of the positioning accuracy to the target position can be set according to the size of the set in-position width 102 and the number of times of passage 103. In other words, when it is desired to perform highly accurate positioning over time, a narrow in-position width 102 and a large number of passage times 103 are set. On the other hand, when it is desired to perform positioning with a predetermined accuracy in a short time. A wide in-position width 102 and a small number of pass values 103 are set. Thereby, the stop control of the moving object can be performed with an arbitrary time and accuracy, and the time associated with the positioning operation of each linear motor 45, 55, 65 can be optimized.

In the above example, the set stage 22 is in the in-position width 102 within the set number of passes, but is stopped when it enters the in-position width 102 without reaching the set number of passes value 103. A stop operation completion signal is output from the control device 90 to the sequence controller 80. When the stop operation completion notification is made without reaching the set pass count value 103, the pass count value 103 is too large with respect to the in-position width 102, that is, the damping vibration operation (attenuation rate) changes from the setting time. Can be recognized. As a result, for example, it becomes easy to grasp a change in the damped vibration operation (attenuation rate) due to a change in characteristics of each servo system 42, 52, 62 that moves the workpiece W over time. And the pass count value 103 can be reviewed and changed according to the characteristic change.
Similarly, when the user has not entered the in-position width 102 when the number-of-passes value 103 is reached, the user can grasp the state, so the settings of the in-position width 102 and the number-of-passes value 103 are reviewed, Settings can be changed.
In the above example, the number of passing times is set and also within the in-position width 102. In this case, a stop operation completion signal is issued based on the passage of the passing number value 103. .

Next, a stop control method for each servo system 42, 52, 62 using the stop control device 90 will be described with reference to FIG. Here, as an example, a series of operations from the introduction of an unprocessed work W to the set stage 22, the alignment process, and the drawing process by the functional liquid droplet ejection head 31 on the work W will be described.
This stop control method includes a parameter setting step 111 for inputting (setting) each parameter, a passing number counting step 112 for counting the number of times that the position during the damped vibration operation has passed the in-position width 102, and the sequence controller 80. And a completion signal output step 113 for outputting a stop operation completion signal.

  First, the user inputs (sets) the in-position width 102, the pass count value 103, and the control gain 104 (parameter setting step 111). In this embodiment, two different types of operation characteristics are set, that is, a parameter for alignment processing (high accuracy setting) and a parameter for drawing processing (high speed setting). Specifically, the in-position width 102 = 1 μm, the pass count value 103 = 100 times, and the control gain 104 = low are set as the high-precision settings, while the in-position width 102 = 10 μm and the pass times are set as the high-speed settings. A numerical value 103 = 1 is set and a control gain 104 = high is set. That is, as described above, the alignment processing requires a very high positioning accuracy and requires a very small movement distance as compared with the drawing processing, and therefore, the in-position width 102 is narrowed, and the number of passage times 103 is increased. In addition, the control gain 104 is set low. As described above, since two kinds of stop operation settings can be performed, appropriate stop operation control can be performed individually in the alignment process and the drawing process. The “in-position width setting step”, “passing number setting step”, and “control gain setting step” in the claims refer to the parameter setting step 111.

When the setting of various parameters is completed, the workpiece W is fed onto the set stage 22, and the sequence controller 80 corrects the position in the X axis direction, the Y axis direction, and the θ axis direction based on the imaging result of the workpiece alignment camera 12. Calculate the amount.
Then, each parameter for alignment processing (high accuracy setting) is transmitted from the sequence controller 80 to the stop control device 90, and an instruction for alignment processing is made. The stop control device 90 drives each linear motor 45, 55, 65 via each servo driver 46, 56, 66 according to the calculated position correction amount (alignment process). Then, based on each parameter for alignment processing, the above-mentioned number of passages of each of the linear motors 45, 55, 65 that are damped and oscillated is counted (passage number counting step 112).

  When the value of the counter 105 becomes the same value as the set pass count value 103 (or when the stop operation completion is notified without reaching the set pass count value 103), it is considered that the alignment process is finished. Then, a stop operation completion signal is output from the stop control device 90 to the sequence controller 80 (completion signal output step 113).

Then, the counter 105 is reset, and each parameter for drawing processing (high-speed setting) is sent from the sequence controller 80 to the stop control device 90, and other units are instructed to perform drawing processing. The stop control device 90 now drives the X-axis moving linear motor 65 via the X-axis servo driver 66 based on each parameter for drawing processing, and moves the workpiece W forward and backward. (In FIG. 2, the downward movement is forward and the upward movement is backward). In the drawing process, only the X-axis servo system 62 is driven and controlled.
When a series of drawing processes is completed, the workpiece W is removed at the alignment position (feeding / dispensing material position).

  According to the above configuration, the damping vibration operation can be regarded as the completion of the stop operation of the set stage 22 when the set in-position width 102 has passed the set number of passes. In addition, when the in-position width 102 is not within the set number of passes, it can be recognized that the damped vibration operation (attenuation rate) has changed, and the relationship between the in-position width 102 and the number of passes is determined. The setting can be changed according to the characteristic change. Furthermore, the level of positioning accuracy to the target position can be set according to the size of the set in-position width 102 and passage number value 103, and the time required for the positioning operation can be optimized.

  Next, the stop control device 90 according to the second embodiment will be described. Only the configuration different from the stop control device 90 of the first embodiment will be described below.

  As shown in FIG. 10A, in the second embodiment, in the stop control RAM 92 of the first embodiment, the setting of the in-position width 102 is omitted, and the stop response of the set stage 22 is substituted for the passage number value 103. The vibration frequency value 109 of the damped vibration operation in the transient state is set. The counter 105 holds the counted number of vibrations.

  The number of vibrations is based on, for example, the point (turning point) where the forward / reverse (+/−) movement is switched, which appears in the damped vibration of each linear motor 45, 55, 65 acquired from each servo driver 46, 56, 66. After the stop control is started, the first turning point is set to zero, the second and subsequent turning points are counted one by one, and the counter 105 is incremented (A and B in FIG. 10B). However, considering the time between turning points, only turning points that occur within a predetermined time are counted effectively. The number of vibrations that can be regarded as completion of the stop operation is experimentally obtained in advance. The “vibration frequency setting means” in the claims refers to the stop control RAM 92.

  In the second embodiment, a program for counting the number of vibrations of the damped vibration operation (“vibration number counting means” in the claims) is stored in the stop control ROM 93 and damped and oscillated based on each set parameter. The number of vibrations of each linear motor 45, 55, 65 is counted (vibration number counting step). Further, the number of vibrations of the damped vibration operation is counted, and when the value of the counter 105 reaches the set vibration number value 109, the stop operation completion signal of the set stage 22 is regarded as completion, and a stop operation completion signal is sent to the sequence controller 80. return. The “vibration frequency setting step” and “control gain setting step” in the claims refer to the parameter setting step 111.

  According to the above configuration, the stop operation of the set stage 22 can be regarded as being completed only by counting the number of vibrations of the damped vibration operation. Further, the level of positioning accuracy to the target position can be set according to the set number of vibrations, and the time required for the positioning operation of each servo system 42, 52, 62 can be optimized.

1 is a perspective view of a droplet discharge device according to an embodiment of the present invention. It is a top view of a droplet discharge device concerning an embodiment of the present invention. 1 is a side view of a droplet discharge device according to an embodiment of the present invention. FIG. 2A is a plan view schematically showing a head unit on which a functional liquid droplet ejection head is mounted, and a front and back external perspective view of the functional liquid droplet ejection head. It is an external appearance perspective view of a suction table. It is the block diagram explaining the main control system of the droplet discharge apparatus. It is a conceptual diagram of the stop control RAM of a stop control apparatus. It is explanatory drawing about the example of parameter setting. It is a flowchart of the stop control method of each servo system. It is the conceptual diagram (a) of stop control RAM of the stop control apparatus which concerns on 2nd Embodiment, and explanatory drawing (b) of the turning point of a damped vibration.

Explanation of symbols

  1: droplet ejection device, 22: set stage, 23: θ-axis movement table, 24: Y-axis sub-table, 25: X-axis sub-table, 31: functional droplet ejection head, 41: θ-axis table main body, 42: θ-axis servo system, 45: θ-axis moving linear motor, 51: Y-axis table body, 52: Y-axis servo system, 55: Y-axis sub-linear motor, 61: X-axis table body, 62: X-axis servo system, 65 : X-axis movement linear motor, 80: Sequence controller, 90: Stop control device, 92: Stop control RAM, 102: In-position width, 103: Pass count value, 104: Control gain, W: Workpiece

Claims (11)

According to a command from a sequence controller, a stop control method for a servo system that stops a moving object within an in-position width that is a deviation at a target position,
An in-position width setting step for setting the in-position width for a damped vibration operation in a transient state of a stop response of the moving object;
A pass count setting step for setting the pass count of the damped vibration operation passing through the set in-position width;
A pass count counting step for counting the pass count;
A servo system stop control method comprising: a completion signal output step of outputting a stop operation completion signal to the sequence controller when the counted number of passes reaches the set number of passes.   The servo system stop control method according to claim 1, wherein the in-position width and the number of passes are configured to be set for each movement operation of the moving object.   The servo system stop control method according to claim 1, further comprising a control gain setting step of setting a control gain in the stop response of the moving object. According to a command from a sequence controller, a stop control method for a servo system that stops a moving object within an in-position width that is a deviation at a target position,
With respect to the damped vibration operation in the transient state of the stop response of the moving object, a vibration frequency setting step for setting the timing of completion of the stop operation by the vibration frequency of the damped vibration operation;
A vibration frequency counting step of counting the vibration frequency of the damped vibration operation;
And a completion signal output step of outputting a stop operation completion signal to the sequence controller when the counted number of vibrations reaches the set number of vibrations. A stop control device for a servo system that stops a moving object within an in-position width that is a deviation at a target position by a command from a sequence controller,
An in-position width setting means for setting the in-position width for a damped vibration operation in a transient state of a stop response of the moving object;
Passage number setting means for setting the number of passages of the damped vibration operation passing through the set in-position width;
A passage number counting means for counting the number of passages;
A stop control device for a servo system, comprising: a completion signal output means for outputting a stop operation completion signal to the sequence controller when the counted number of passages reaches the set number of passages.   6. The servo system stop control device according to claim 5, wherein the in-position width and the number of times of passage are settable for each movement operation of the moving object.   The servo system stop control device according to claim 5 or 6, further comprising control gain setting means for setting a control gain in the stop response of the moving object. A stop control device for a servo system that stops a moving object within an in-position width that is a deviation at a target position by a command from a sequence controller,
Vibration frequency setting means for setting the timing of stop operation completion with the number of vibrations of the damped vibration operation with respect to the damped vibration operation in a transient state of the stop response of the moving object;
Vibration number counting means for counting the number of vibrations of the damped vibration operation;
And a completion signal output means for outputting a stop operation completion signal to the sequence controller when the counted number of vibrations reaches the set number of vibrations. The moving object is configured to be movable by a plurality of moving axes, and the plurality of moving axes are driven by the plurality of servo systems,
6. The servo system stop control according to claim 5, wherein each servo system includes the in-position width setting means, the passage number setting means, the passage number counting means, and the completion signal output means. apparatus. After aligning the workpiece by moving the set stage on which the workpiece is set, the functional droplet is ejected from the functional droplet ejection head while the workpiece is moved through the set stage, and drawing is performed on the workpiece. A functional liquid droplet ejection device,
A θ-axis moving table comprising a θ-axis table main body configured to support the set stage and to be movable in the θ-axis direction, and a θ-axis servo system that drives the θ-axis table main body;
It comprises a Y-axis table body configured to support the θ-axis table body and move the set stage in the Y-axis direction via the θ-axis table body, and a Y-axis servo system for driving the Y-axis table body. A Y-axis moving table;
An X-axis table body configured to support the Y-axis table body and to move the set stage in the X-axis direction via the θ-axis table body and the Y-axis table body, and to drive the X-axis table body. An X-axis moving table comprising an X-axis servo system;
A sequence controller that performs overall control of the θ-axis servo system, the Y-axis servo system, and the X-axis servo system;
The set stage as the moving object, the θ-axis table body, the Y-axis table body and the X-axis table body as the plurality of moving axes, the θ-axis servo system, the Y-axis servo system and the X-axis A functional liquid droplet ejection apparatus comprising: the servo system stop control device according to claim 9, wherein the servo system is the plurality of servo systems. When aligning the workpiece, the θ-axis servo system, the Y-axis servo system, and the X-axis servo system are driven,
The functional liquid droplet ejection apparatus according to claim 10, wherein when performing drawing on the workpiece, only the X-axis servo system is driven.

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