JP2010091791A - Optical scanner, image forming apparatus and method of manufacturing optical scanner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical scanner in which the variation in the eigenvalue of the resonant frequency or the like of an optical scanning body is suppressed by reducing a compressive stress by an adhesive member, and to provide an image forming apparatus and a method of manufacturing the optical scanner. <P>SOLUTION: The optical scanning body includes: a reflecting mirror which reflects incident light; a pair of beams which extend in the opposite directions from the reflecting mirror; fixing parts which support the pair of beams; and a driving body which drives to rock the reflecting mirror. The optical scanner includes: the optical scanning body; and a base which is bonded to the fixing parts of the optical scanning body with an adhesive member and supports the optical scanning body. Recessed parts for releasing the adhesive member is formed in the bonding region of the fixing parts of the optical scanning body to the base or in the bonding region of the base to the fixing part of the optical scanning body. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an optical scanning device, an image forming apparatus, and an optical scanning device manufacturing method, and in particular, an optical scanning body having a reflection mirror that reflects incident light, and an optical scanning body that is bonded with an adhesive member. The present invention relates to an optical scanning apparatus, an image forming apparatus, and a method for manufacturing the optical scanning apparatus, each including a pedestal that supports an optical scanning body.

  2. Description of the Related Art Conventionally, an image display device for displaying an image includes an optical scanning device for scanning light in two dimensions to obtain scanned image light. Further, such an optical scanning device includes an optical scanner that scans the light by controlling the swinging of the reflecting mirror surface that reflects the light, and displays the image as scanning light. Let

  In this image display device, a reflecting mirror having a reflecting mirror surface for reflecting incident light, a pair of beams extending in opposite directions from the reflecting mirror, and a fixed portion that supports the pair of beams are integrated as an optical scanning body. The base which supports them is arrange | positioned under the fixed part mentioned above.

In such an image display device, for example, as shown in Patent Document 1, the optical scanning body and the pedestal are fixed by an adhesive member, and a pair of beams are energized by energizing the driving body in the optical scanning body. A device that scans light by swinging and driving a reflection mirror centering on a portion is disclosed.
Japanese Patent Laid-Open No. 2002-221686

  However, in the image display device as described above, the characteristic value such as the resonance frequency of the optical scanning body may change due to the compressive stress caused by the volume change in the curing process of the adhesive member that bonds the optical scanning body and the pedestal. was there.

  The present invention has been made in view of the above-described problems, and an optical scanning device capable of suppressing changes in eigenvalues such as a resonance frequency of an optical scanning body by reducing compressive stress due to an adhesive member, An object of the present invention is to provide an image forming apparatus and a method of manufacturing an optical scanning device.

  In order to achieve the above object, the present invention provides the following.

  That is, according to the first aspect of the present invention, the reflecting mirror for reflecting the incident light, the pair of beams extending in the opposite directions from the reflecting mirror, the fixing portion for supporting the pair of beams, and the reflecting mirror are provided. An optical scanning body having a driving body that is driven to swing, and a pedestal that is bonded to the fixing portion of the optical scanning body with an adhesive member and supports the optical scanning body. A recess for allowing the adhesive member to escape is formed in an adhesion area to the base or an adhesion area to the fixing portion of the optical scanning body in the base.

  Further, in the present invention according to claim 2, in the invention according to claim 1, a plurality of grooves are formed in the adhesion region of the pedestal to the fixing portion of the optical scanning body as a recess for allowing the adhesive member to escape. It is characterized by this.

  According to a third aspect of the present invention, in the first aspect of the present invention, a plurality of through-holes are formed in the adhesive region to the pedestal in the fixing portion of the optical scanning body as concave portions for allowing the adhesive member to escape. It is characterized by that.

  According to a fourth aspect of the present invention, in the third aspect of the present invention, the fixing portion of the optical scanning body includes a first fixing portion coupled to the pair of beams, and the first fixing portion. And a second fixing part bonded to the pedestal, wherein the plurality of through holes are formed in the second fixing part.

  According to a fifth aspect of the present invention, in the third aspect of the invention, the fixing portion of the optical scanning body includes a first fixing portion coupled to the pair of beams, and the first fixing portion. And a second fixing portion bonded to the pedestal, wherein a plurality of through holes are formed in the first fixing portion and the second fixing portion, respectively. The plurality of through holes in the part and the plurality of through holes in the second fixing part are formed as recesses that allow the adhesive member to escape.

  According to a sixth aspect of the present invention, in the invention according to the fourth or fifth aspect, the linear expansion coefficients of the first fixed portion and the second fixed portion are substantially equal. is there.

  Further, in the present invention according to claim 7, in the invention according to any one of claims 1 to 6, the adhesive member is an ultraviolet curable resin.

  According to an eighth aspect of the present invention, in the invention according to any one of the third to sixth aspects, the plurality of through holes are formed by a semiconductor process.

  According to a ninth aspect of the present invention, there is provided a light emitting portion that emits light according to an image signal and the optical scanning device according to any one of the first to eighth aspects, and the light is emitted from the light emitting portion. An image is formed by scanning light with the optical scanning device.

  Further, in the present invention of claim 10, the reflecting mirror for reflecting the incident light, a pair of beams extending in opposite directions from the reflecting mirror, a fixing portion for supporting the pair of beams, and the reflecting mirror are provided. In a method of manufacturing an optical scanning device, comprising: an optical scanning body having a driving body that swings; and a pedestal that is bonded to a fixing portion of the optical scanning body with an adhesive member and supports the optical scanning body. Etching to form the reflecting mirror, the pair of beams, and the fixing portion, and further arranging the driving body to manufacture the optical scanning body, and etching the substrate to fix the optical scanning body. A step of manufacturing the pedestal provided with a plurality of grooves for allowing the adhesive member to escape in an adhesion region to the part, and a step of fixing the optical scanning body to the adhesion region of the pedestal with an adhesive member. To do.

  Further, in the present invention according to claim 11, a reflection mirror that reflects incident light, a pair of beams extending in opposite directions from the reflection mirror, a first fixing portion that supports the pair of beams, An optical scanning body having a second fixing portion joined to the first fixing portion, a driving body that swings the reflection mirror, and an adhesive member bonded to the fixing portion of the optical scanning body, In a manufacturing method of an optical scanning device comprising a pedestal for supporting a scanning body, a silicon substrate is etched to manufacture a first member in which the reflection mirror, the pair of beams, and the first fixing portion are formed. And a step of manufacturing the second fixing portion provided with a plurality of through holes for allowing the adhesive member to escape in an adhesion region to the pedestal by etching the glass substrate or performing a microblast process, The first member is attached to the second fixing member. A step of forming the optical scanning body by anodic bonding to a part, a step of manufacturing the pedestal made of ceramic, and an adhesion step of fixing an adhesion region of the optical scanning body to the pedestal with an adhesive member. It is characterized by this.

  In the present invention described in claim 12, in the invention described in claim 10 or 11, the bonding step is performed by interposing a porous member between the optical scanning body and the pedestal. Is.

  According to a thirteenth aspect of the present invention, in the invention according to the eleventh aspect, the step of forming the first fixing portion, the step of etching the silicon substrate to form the communicating through hole, , Characterized by having.

  According to the present invention, it is possible to suppress changes in eigenvalues such as the resonance frequency of the optical scanning body by reducing the compressive stress caused by the adhesive member.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. An embodiment in which the image forming apparatus and the optical scanning device of the present invention are employed in the retinal scanning display 1 will be described below. Further, an embodiment in which the optical scanning body of the present invention is employed in a galvano mirror 42a described later in detail will be described below.

[Electrical Configuration of Image Forming Apparatus]
The electrical configuration of the retinal scanning display 1 in this embodiment will be described with reference to FIG.

  As shown in FIG. 1, the retinal scanning display 1 is provided with a light source unit 10 for processing an image signal S supplied from the outside. The light source unit 10 is provided with an image signal supply circuit 11 that receives an image signal S from the outside and generates each signal as an element for synthesizing video based on the image signal S. An image signal 13 (13r, 13g, 13b), a horizontal drive signal 18, and a vertical drive signal 19 are output. The light source unit 10 functions as a light emitting unit that emits light according to the image signal S.

  The light source unit 10 also has a laser whose intensity is adjusted based on the red (R), green (G), and blue (B) image signals transmitted from the image signal supply circuit 11 as the image signals 13. An R laser 21, a G laser 22, and a B laser 23, an R laser driver 15, a G laser driver 16, and a B laser driver 17 are provided to drive light, respectively. Further, a collimating optical system 24 provided so as to collimate the laser light emitted from each laser into parallel light, a dichroic mirror 25 for combining the collimated laser lights, and the combined laser light as light. A coupling optical system 26 leading to the fiber 30 is provided. A semiconductor laser such as a laser diode or a solid-state laser may be used as the R laser 21, the G laser 22, and the B laser 23.

  The retinal scanning display 1 uses a collimating optical system 41 that guides the laser light propagated from the light source unit 10 to the horizontal scanning system 42 and the collimated laser light using a galvano mirror 42a as an optical scanning element. The horizontal scanning system 42 that scans in the horizontal direction, the first relay optical system 43 that guides the laser light scanned by the horizontal scanning system 42 to the vertical scanning system 44, and the horizontal scanning system 42 that scans the first relay optical A vertical scanning system 44 that scans the laser light incident through the system 43 in the vertical direction by using a galvano mirror 44a as an optical scanning element, and a laser beam scanned by the vertical scanning system 44 in the user's pupil 47 The second relay optical system 45 is provided so as to be incident on.

  As a specific example, the horizontal scanning system 42 is an optical system that horizontally scans a laser beam in the horizontal direction (an example of primary scanning) for each scanning line of an image to be displayed. The horizontal scanning system 42 includes a galvano mirror 42a that scans the laser beam in the horizontal direction, and a horizontal control circuit 42c that controls driving of the galvano mirror 42a.

  On the other hand, the vertical scanning system 44 is an optical system that vertically scans a laser beam vertically from the first scanning line to the last scanning line (an example of secondary scanning) for each frame of an image to be displayed. is there. The vertical scanning system 44 includes a galvano mirror 44a that performs vertical scanning, and a vertical control circuit 44c that controls driving of the galvano mirror 44a.

  The horizontal scanning system 42 is designed to scan the laser beam at a higher speed, that is, at a higher frequency than the vertical scanning system 44. The horizontal scanning system 42 and the vertical scanning system 44 are connected to the image signal supply circuit 11 and scan the laser beam in synchronization with the horizontal drive signal 18 and the vertical drive signal 19 output from the image signal supply circuit 11, respectively. Is configured to do.

  Note that the horizontal scanning system 42 and the vertical scanning system 44 in this embodiment are two-dimensionally scanned by scanning the emitted beam light in the primary direction and the secondary direction substantially orthogonal to the primary direction. 2 is an example of an optical scanning device that sequentially forms one frame of an image.

  In the present embodiment, the galvanometer mirror 42a of the horizontal scanning system 42 and the galvanometer mirror 44a of the vertical scanning system 44 have been described with the same names, but their reflecting surfaces are oscillated so as to scan light. Needless to say, any driving method such as piezoelectric driving, electromagnetic driving, electrostatic driving, or the like may be used as long as it can be moved (rotated). In this embodiment, the horizontal scanning system 42 is a resonance type scanning system and the vertical scanning system 44 is a non-resonant type scanning system. However, the present invention is not limited to this. For example, the vertical scanning system 44 is a resonance type scanning system. A scanning system may be used.

  Next, a process from when the retinal scanning display 1 according to the embodiment of the present invention receives an image signal S from the outside to when an image is projected onto the user's retina will be described with reference to FIG.

  As shown in FIG. 1, in the retinal scanning display 1 according to the present embodiment, when the image signal supply circuit 11 provided in the light source unit 10 receives an external supply of the image signal S, the image signal supply circuit 11 An image signal 13 including an R image signal 13r, a G image signal 13g, and a B image signal 13b for outputting laser beams of red, green, and blue, a horizontal drive signal 18, and a vertical drive signal 19 are output. To do. The R laser driver 15, the G laser driver 16, and the B laser driver 17 are applied to the R laser 21, the G laser 22, and the B laser 23 based on the input R image signal 13r, G image signal 13g, and B image signal 13b, respectively. Each drive signal is output. Based on this drive signal, the R laser 21, the G laser 22, and the B laser 23 generate laser beams whose intensities are adjusted, and output the laser beams to the collimating optical system 24. Further, the image signal supply circuit 11 generates laser light in response to a BD synchronization timing signal (not shown) indicating a driving state of a galvano mirror 42 a of the horizontal scanning system 42 described later, and each of them is supplied to the collimating optical system 24. Control the output timing. That is, such a retinal scanning display 1 (image signal supply circuit 11) controls the timing at which beam light is emitted to the galvanometer mirror 42a or the like. The laser light generated from the point light source is collimated into parallel light by the collimating optical system 24, and is further incident on the dichroic mirror 25 to be combined into one beam light, and then combined by the coupling optical system 26. It is guided to enter the optical fiber 30.

  The laser light propagated through the optical fiber 30 is collimated into parallel light from the optical fiber 30 by the collimating optical system 41 and emitted to the horizontal scanning system 42. The emitted laser light is incident on the reflection mirror 42b of the galvano mirror 42a of the horizontal scanning system 42. Further, the laser light incident on the reflection mirror 42b of the galvano mirror 42a is scanned in the horizontal direction in synchronization with the horizontal drive signal 18, and through the first relay optical system 43, the reflection mirror 44b of the galvano mirror 44a of the vertical scanning system 44. Is incident on. The galvanometer mirror 44a is reciprocally oscillated so that the reflection mirror 44b reflects incident light in the vertical direction in synchronization with the vertical drive signal 19, and the laser light is scanned in the vertical direction by the galvanometer mirror 44a. . The laser beam scanned by the galvanometer mirror 44 a enters the user's pupil 47 via the second relay optical system 45. As a result, the user can recognize the image by the laser light that is two-dimensionally scanned and projected onto the retina. In other words, the retinal scanning display 1 scans and emits light modulated in accordance with an image signal related to an image, thereby projecting an image on the retina of at least one eye of the user and displaying the image. This corresponds to an example of a type image forming apparatus.

[Configuration of Galvano Mirror 42a]
Further, the configuration of the galvano mirror 42a described above will be described below with reference to FIG.

  The galvanometer mirror 42a of the horizontal scanning system 42 in this embodiment is configured to include an optical scanning body 51 and a pedestal 52 as shown in FIG.

  The optical scanning body 51 includes a silicon structure 61 made of silicon and a support member 71 made of glass.

  The silicon structure 61 is an element that is made of silicon, has a reflection mirror 42b that reflects incident light, and scans the light by swinging the reflection mirror 42b.

  An opening 62 is formed in the center of the silicon structure 61. In the center of the opening 62, a reflection mirror 42b of the galvano mirror 42a is provided. A pair of beams 63a and 63b extend from the reflecting mirror 42b in opposite directions. In addition, first ends of the pair of beams 63a and 63b are provided with first fixing portions 64a and 64b that are connected to and support the pair of beams 63a and 63b.

  The first fixing portions 64a and 64b to which the pair of beams 63a and 63b are connected are provided with a piezoelectric body 65, and by applying a voltage to the piezoelectric body 65, the reflection mirror 42b is driven to swing. It will be. The piezoelectric body 65 functions as a drive body that drives the reflection mirror 42b to swing.

  A plurality of through holes 66 are formed in the first fixing portions 64a and 64b. The plurality of through-holes 66 are formed as recesses that allow an adhesive member 76 (see FIG. 4) described later to escape, and communicate with a through-hole 74 of a support member 71 described later.

  The support member 71 supports the silicon structure 61 and is disposed on the pedestal 52. The support member 71 is made of glass to reinforce the silicon structure 61. Further, by installing the support member 71, it is possible to secure a height for driving the reflection mirror 42b to swing. An opening 73 is formed in the center of the support member 71. The first fixing portions 64a and 64b of the silicon structure 61 and the bonding portions 54a and 54b of the pedestal 52 are bonded to the end portion in the longitudinal direction of the support member 71 with an adhesive member. , 72b are formed. A plurality of through holes 74 are formed in the second fixing portions 72a and 72b. The plurality of through holes 74 are formed as recesses for releasing an adhesive member 76 (see FIG. 4) described later, and communicate with the through holes 66 of the silicon structure 61 described above.

  The base 52 is made of ceramic. A recess 53 is formed in the pedestal 52. Adhesive portions 54a and 54b for adhering the second fixing portions 72a and 72b of the support member 71 described above are provided at the ends of the concave portion 53 in the longitudinal direction. The pedestal 52 is bonded to the second fixing portions 72 a and 72 b by an adhesive member 76 and supports the optical scanning body 51.

[Method for Manufacturing Galvano Mirror 42a]
Next, with reference to FIG.3 and FIG.4, the manufacturing method of the galvanometer mirror 42a is demonstrated. 3 and 4 are explanatory views showing a method for manufacturing the galvano mirror of the retinal scanning display 1 in the present embodiment.

  First, as shown in FIG. 3, a silicon structure manufacturing process is performed (step S11). In this step, the silicon structure 61 is formed by KOH wet etching, and the opening 62 is formed. Thus, the silicon substrate 81 (see FIG. 4) is etched to form the reflection mirror 42b, the pair of beams 63a and 63b, and the first fixing portions 64a and 64b. Further, the optical scanning body 51 is manufactured by arranging the piezoelectric body 65 (driving body).

  A plurality of through holes 66 are formed in the first fixing portions 64 a and 64 b of the silicon structure 61. In order to form this through-hole 66, as shown in FIG. 4A, thermal oxidation is performed on the upper and lower surfaces of the silicon substrate 81 to form an oxide film 82. Then, as shown in FIG. 4B, a resist 83 is applied to the upper and lower surfaces of the oxide film 82, exposed, and patterned to form a through hole 66. Next, as shown in FIG. Then, as shown in FIG. 4C, the oxide film 82 is patterned, and as shown in FIG. 4D, the resist 83 is removed by silicon wet etching. Further, as shown in FIG. 4E, the oxide film 82 is removed, and a silicon structure 61 in which a plurality of through holes 66 are formed in the first fixing portions 64a and 64b is manufactured.

  Next, as shown in FIG. 3, a glass support member manufacturing process is performed (step S12). In this step, as shown in FIG. 4 (F), masking 86 is performed on the glass wafer 85, and processing is performed by fluorine-based gas dry etching, so that a plurality of through holes are obtained as shown in FIG. 4 (G). 74 is formed. This step also serves to form the opening 73, and there is no cost increase due to the addition of the step.

  In these steps, the linear expansion coefficients of the silicon structure 61 (first fixed portion) and the support member 71 (second fixed portion) are substantially equal. Accordingly, the thermal history applied when the silicon structure 61 and the support member 71 are joined can prevent problems such as warpage and poor adhesion due to differences in the linear expansion coefficients of each other. Further, for the same reason, it is possible to suppress unnecessary stress from being transmitted to the beams 63a and 63b formed in the silicon structure 61, and to prevent deviation of characteristic values such as resonance frequency from design values.

  Further, the plurality of through holes 66 and 74 are formed by a semiconductor process. Thereby, the through holes 66 and 74 can be formed finely and with high accuracy, and the holes in the silicon structure 61 and the support member 71 can be positioned with higher accuracy. For this reason, the mutual positioning failure is prevented, and there is an effect that the plurality of through holes 66 and 74 are formed in good communication.

  Next, as shown in FIGS. 3 and 4H, the silicon structure 61 and the support member 71 made of glass are anodically bonded to form the optical scanning body 51 (step S13). In this step, the plurality of through holes 66 in the silicon structure 61 (first fixing portions 64a and 64b) and the plurality of through holes 74 in the support member 71 (second fixing portions 72a and 72b) are provided. Join so that they communicate.

  Next, as shown in FIG. 3, dicing is performed (step S14). And the ceramic base 52 is produced (step S15). In this step, the ceramic pedestal 52 is produced by compacting.

  Next, relative positioning with respect to the pedestal 52 is performed (step S16), an adhesive member is dropped (step S17), and dried (step S18). As a result, as shown in FIG. 4 (I), not only the adhesive member 76 is applied between the support member 71 and the pedestal 52 but also the plurality of through holes 66 and 74 communicated with each other are filled. The second fixing portions 72a and 72b (adhesion regions) of the scanning body 51 are fixed to the pedestal 52 with the adhesive member 76. The adhesive member 76 is an ultraviolet curable resin and can be cured by irradiating with ultraviolet rays. In addition, since the ultraviolet curable resin has a relatively low viscosity before curing, it can be applied to a fine portion by capillary action and applied reliably, and the adhesive member 76 can be formed thin, so that the optical scanning body 51 for the pedestal 52 can be formed. The posture error can be reduced. In addition, when using an ultraviolet curable resin, an ultraviolet irradiation process is performed instead of a drying process.

  In this way, when the excess adhesive member escapes to the plurality of through holes 66 and 74, the shrinkage of the adhesive member occurs not only between the support member 71 and the pedestal 52 but also in the part escaped to the through holes 66 and 74. Since this occurs, the compressive stress due to the adhesive member between the support member 71 and the pedestal 52 can be reduced, and changes in the eigenvalues such as the resonance frequency of the optical scanning body can be suppressed. Further, the plurality of through holes 66 in the silicon structure 61 (first fixing portions 64a and 64b) and the plurality of through holes 74 in the support member 71 (second fixing portions 72a and 72b) communicate with each other. The adhesive member can be released efficiently.

[Second Embodiment]
In the above-described embodiment, the through holes 66 and 74 are provided in each of the silicon structure 61 and the support member 71. However, the present invention is not limited to this, and for example, as shown in FIG. A through hole 74 may be provided. In the above-described embodiment, the outer shapes of the silicon structure 61 and the support member 71 are the same size. However, the present invention is not limited to this, and for example, as shown in FIG. 5, the silicon structure 61 and the support member 71. The external shape may be different in size.

[Third embodiment]
In the above-described embodiment, the plurality of through holes 66 and 74 are provided in the longitudinal direction in which the pair of beams 63a and 63b extend. However, the present invention is not limited to this, and for example, as shown in FIG. , 63b may be provided with a plurality of through-holes 67, 75 in the first fixing portions 64c, 64d and the second fixing portions 72c, 72d in the short-side direction instead of the longitudinal direction. In this case, the projection 54c is provided in the recess 53 of the base 52, and the second fixing portions 72c and 72d are bonded. In this configuration as well, the compressive stress is hardly generated. Furthermore, since the adhesion region can be moved away from the pair of beams 63a and 63b and it is difficult to transmit compressive stress to the beam portions 63a and 63b even when the compressive stress is easily generated, the change in the characteristic value of the optical scanning device is minimized. Can be suppressed.

[Fourth embodiment]
In the above-described embodiment, the plurality of through holes 66, 67, 74, 75 are provided in the optical scanning body 51 as the recesses for releasing the adhesive member. However, the present invention is not limited to this, and for example, the recesses are provided in the pedestal 52. May be. An embodiment in this case will be described below with reference to FIGS. In the present embodiment, in order to facilitate understanding of the invention, description of the same configuration and process as those of the above-described embodiment will be omitted, and different configuration and process will be described below.

[Configuration of Galvano Mirror 42a]
The configuration of the above-described galvanometer mirror 42a will be described below with reference to FIG.

  As shown in FIG. 7, a groove 55 extending in the longitudinal direction is formed in the adhesive portions 54 a and 54 b of the pedestal 52. The above-described second fixing portions 72a and 72b are bonded to the bonding portions 54a and 54b.

[Method for Manufacturing Galvano Mirror 42a]
Next, with reference to FIG.8 and FIG.9, the manufacturing method of the galvanometer mirror 42a is demonstrated. 8 and 9 are explanatory views showing a method for manufacturing the galvanometer mirror of the retinal scanning display 1 in the present embodiment.

  First, as shown in FIG. 8, a silicon structure manufacturing process is performed (step S21), and a glass support member manufacturing process is performed (step S22). In these steps, unlike the above-described embodiment, the through holes 66 and 74 are not formed.

  After dicing (cutting) (step S14), a ceramic pedestal is produced (step S25). In this step, the base 52 is produced by compacting a ceramic substrate 87. In this case, a plurality of grooves 55 are also formed as shown in FIG.

  And relative positioning with the base 52 is performed (step S16), an adhesive member is dripped (step S17), and it is made to dry (step S18). As a result, as shown in FIG. 9B, the adhesive member 76 is not only applied between the support member 71 and the pedestal 52 but also filled into the plurality of grooves 55 of the pedestal 52, thereby bonding the pedestal 52. The optical scanning body 51 is fixed to the portions 54a and 54b (adhesion regions) by the adhesive member 76.

  In this way, since the excess adhesive member escapes to the plurality of grooves 55, the shrinkage of the adhesive member occurs not only between the support member 71 and the pedestal 52 but also in the portions escaped to the through holes 66 and 74. The compressive stress due to the adhesive member between the support member 71 and the pedestal 52 can be reduced, and changes in eigenvalues such as the resonance frequency of the optical scanning body can be suppressed.

[Fifth embodiment]
In the above-described embodiment, the groove 55 is provided in the pedestal 52 as a recess for allowing the adhesive member to escape. However, the present invention is not limited to this. For example, a porous member may be interposed between the pedestal 52 and the support member 71. Good. An embodiment in this case will be described below with reference to FIGS. In the present embodiment, in order to facilitate understanding of the invention, description of the same configuration and process as those of the above-described embodiment will be omitted, and different configuration and process will be described below.

[Method for Manufacturing Galvano Mirror 42a]
Next, with reference to FIG.10 and FIG.11, the manufacturing method of the galvanometer mirror 42a is demonstrated. 10 and 11 are explanatory views showing a method for manufacturing the galvanomirror of the retinal scanning display 1 in the present embodiment.

  First, as shown in FIGS. 10 and 11A, a ceramic pedestal in which a recess 56 is formed is produced (step S15). Then, as shown in FIGS. 10 and 11B, a carbon nanotube sheet (CNT sheet) is inserted into the recess 56 (step S19). And relative positioning with the base 52 is performed (step S16), an adhesive member is dripped (step S17), and it is made to dry (step S18). Thus, as shown in FIG. 11C, not only the adhesive member 76 is applied between the support member 71 and the pedestal 52, but also the porous member interposed between the pedestal 52 and the support member 71. The optical scanning body 51 is fixed to the concave portion 56 (adhesion region) of the pedestal 52 with the adhesive member 76.

  Accordingly, the porous member 57 can be interposed between the pedestal 52 and the support member 71, and the excess adhesive member escapes to the porous member 57, so that the shrinkage of the adhesive member causes the support member 71 and the pedestal 52 to contract. As a result, the compressive stress due to the adhesive member between the support member 71 and the pedestal 52 can be reduced, and the resonance frequency of the optical scanning body can be reduced. Changes in the eigenvalue can be suppressed.

[Other Embodiments]
In the above-described embodiment, the concave portion that allows the adhesive member to escape is formed by any of a plurality of through holes, a plurality of grooves, and a porous member. However, the present invention is not limited to this, and a combination thereof may be used. The excess adhesive member can be efficiently released, and the change in eigenvalues such as the resonance frequency of the optical scanning body can be suppressed by further reducing the compressive stress caused by the adhesive member.

  In the embodiment described above, the ceramic pedestal 52 is formed by compacting. However, the present invention is not limited to this. For example, the ceramic pedestal may be formed by performing microblasting. Further, for example, drilling may be performed when forming the groove. Further, for example, the pedestal 52 may be formed of resin instead of ceramic.

  In the above-described embodiment, the present invention is adopted for the horizontal scanning system 42. However, the present invention is not limited to this. For example, the present invention may be adopted for the vertical scanning system 44.

  In the above-described embodiment, the silicon structure 61 and the support member 71 are provided separately as the optical scanning body 51. However, the present invention is not limited to this. For example, the silicon structure 61 and the support member 71 are integrated. May be provided. That is, the first fixing portion and the second fixing portion may be integrated as a fixing portion.

  As described above, some of the embodiments of the present invention have been described in detail with reference to the drawings. The present invention can be implemented in other forms that have been modified or improved. For example, it goes without saying that the optical scanning apparatus to which the present invention is applied can also be applied to an optical scanning apparatus that scans a laser beam in a laser printer. In other words, any device that scans light may be used. For example, it is not necessary to use an image forming apparatus that displays an image by scanning and emitting light modulated in accordance with an image signal related to an image. Even if it is not a retinal scanning type image forming apparatus that projects an image on the retina of at least one eye of a user and displays the image by scanning and emitting light modulated according to an image signal related to the image Absent.

It is explanatory drawing which shows the retinal scanning display in this embodiment. It is a perspective view which shows the structure of the galvanometer mirror of the retinal scanning display in this embodiment. It is explanatory drawing which shows the manufacturing method of the galvanometer mirror of the retinal scanning display in this embodiment. It is explanatory drawing which shows the manufacturing method of the galvanometer mirror of the retinal scanning display in this embodiment. It is a perspective view which shows the structure of the galvanometer mirror of the retinal scanning display in this embodiment. It is a perspective view which shows the structure of the galvanometer mirror of the retinal scanning display in this embodiment. It is a perspective view which shows the structure of the galvanometer mirror of the retinal scanning display in this embodiment. It is explanatory drawing which shows the manufacturing method of the galvanometer mirror of the retinal scanning display in this embodiment. It is explanatory drawing which shows the manufacturing method of the galvanometer mirror of the retinal scanning display in this embodiment. It is explanatory drawing which shows the manufacturing method of the galvanometer mirror of the retinal scanning display in this embodiment. It is explanatory drawing which shows the manufacturing method of the galvanometer mirror of the retinal scanning display in this embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Retina scanning type display 19 Horizontal scanning system 42a Galvano mirror 42b Reflection mirror 51 Optical scanning body 52 Base 54a, 54b Adhesive part 55 Several groove | channel 61 Silicon structure 63a, 63b Beam 64a, 64b, 64c, 64d 1st fixing | fixed part 66, 67, 74, 75 A plurality of through holes 71 Support members 72a, 72b, 72c, 72d Second fixing portion

Claims (13)

Optical scanning having a reflection mirror that reflects incident light, a pair of beams extending in opposite directions from the reflection mirror, a fixing portion that supports the pair of beams, and a driving body that drives the reflection mirror to swing. Body,
A base that is bonded to the fixing portion of the optical scanning body with an adhesive member and supports the optical scanning body,
An optical scanning device characterized in that a concave portion for allowing the adhesive member to escape is formed in an adhesion area to the pedestal in the fixing portion of the optical scanning body or an adhesion area to the fixing portion of the optical scanning body in the pedestal. .   2. The optical scanning device according to claim 1, wherein a plurality of grooves are formed as recesses for allowing the adhesive member to escape in an adhesion region of the pedestal to the fixing portion of the optical scanning body.   2. The optical scanning device according to claim 1, wherein a plurality of through-holes are formed as recesses for allowing the adhesive member to escape in an adhesion region to the base in a fixing portion of the optical scanning body. The fixed part of the optical scanning body is:
A first fixed portion coupled to the pair of beams;
A second fixing part joined to the first fixing part and bonded to the pedestal,
The optical scanning device according to claim 3, wherein the plurality of through holes are formed in the second fixing portion. The fixed part of the optical scanning body is:
A first fixed portion coupled to the pair of beams;
A second fixing portion that is bonded to the first fixing portion and bonded to the pedestal;
A plurality of through holes are formed in each of the first fixing portion and the second fixing portion, and the plurality of through holes of the first fixing portion and the plurality of through holes of the second fixing portion communicate with each other. The optical scanning device according to claim 3, wherein the optical scanning device is formed as a recess that allows the adhesive member to escape.   6. The optical scanning device according to claim 4, wherein linear expansion coefficients of the first fixed portion and the second fixed portion are substantially equal.   The optical scanning device according to claim 1, wherein the adhesive member is an ultraviolet curable resin.   The optical scanning device according to claim 3, wherein the plurality of through holes are formed by a semiconductor process.   A light emitting unit that emits light according to an image signal and the optical scanning device according to any one of claims 1 to 8, wherein light emitted from the light emitting unit is scanned by the optical scanning device to generate an image. Forming an image forming apparatus. Optical scanning having a reflection mirror that reflects incident light, a pair of beams extending in opposite directions from the reflection mirror, a fixing portion that supports the pair of beams, and a driving body that drives the reflection mirror to swing. Body,
In a method of manufacturing an optical scanning device, comprising: a base that is bonded to the fixing portion of the optical scanning body with an adhesive member and supports the optical scanning body;
Etching the substrate to form the reflection mirror, the pair of beams, the fixed portion, and further arranging the driving body to manufacture the optical scanning body;
Etching the substrate, and manufacturing the pedestal having a plurality of grooves for releasing the adhesive member in an adhesive region to the fixing portion of the optical scanning body;
And a step of fixing the optical scanning body to an adhesive region of the pedestal with an adhesive member. A reflecting mirror that reflects incident light; a pair of beams extending in opposite directions from the reflecting mirror; a first fixing portion that supports the pair of beams; and a second that is joined to the first fixing portion. And an optical scanning body having a driving body that swings the reflection mirror,
In a method of manufacturing an optical scanning device, comprising: a base that is bonded to the fixing portion of the optical scanning body with an adhesive member and supports the optical scanning body;
Etching the silicon substrate to produce a first member formed with the reflection mirror, the pair of beams, and the first fixing portion;
Etching the glass substrate or performing microblasting, and manufacturing the second fixing portion provided with a plurality of through holes for releasing the adhesive member in the adhesive region to the pedestal;
Forming the optical scanning body by anodically bonding the first member to the second fixing portion;
Producing the pedestal made of ceramic;
And a bonding step of fixing the bonding region of the optical scanning body to the pedestal with an bonding member.   12. The method of manufacturing an optical scanning device according to claim 10, wherein the bonding step is performed by interposing a porous member between the optical scanning body and the pedestal. Forming the first fixing portion;
The method of manufacturing an optical scanning device according to claim 11, further comprising: etching the silicon substrate to form the communicating through hole.

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