JP2010089028A - Waste liquid treatment apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a waste liquid treatment apparatus which is equipped with a detecting means for detecting whether a waste liquid flows into clear water purified by a filter or not. <P>SOLUTION: The waste liquid treatment apparatus including the filter for filtering the waste liquid to purify it to clear water, and a clear water storage tank for storing the clear water purified by the filter is equipped with a transparency detecting means for detecting the transparency of the clear water stored in the clear water storage tank, and a control means for outputting a trouble message to a display means when the transparency of the clear water detected by the transparency detecting means is equal to or less than a predetermined value. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a waste liquid processing apparatus which is attached to a processing apparatus such as a cutting apparatus for cutting a workpiece such as a semiconductor wafer and which processes a waste liquid such as a processing liquid supplied at the time of processing.

  In the semiconductor device manufacturing process, a plurality of regions are partitioned by dividing lines called streets arranged in a lattice pattern on the surface of a substantially wafer-shaped semiconductor wafer, and devices such as ICs, LSIs, etc. are partitioned in the partitioned regions. Form. By cutting the semiconductor wafer having the device formed on the surface in this way along the street, the region where the device is formed is divided to manufacture individual semiconductor devices. In addition, optical device wafers with gallium nitride compound semiconductors laminated on the surface of a sapphire substrate are also divided into individual optical devices such as light emitting diodes and laser diodes by cutting along the streets, and are widely used in electrical equipment. ing.

  Cutting along the streets of the above-described semiconductor wafer, optical device wafer or the like is usually performed by a cutting device called a dicer. This cutting apparatus includes a chuck table for holding a workpiece such as a semiconductor wafer, a cutting means having a cutting blade for cutting the workpiece held on the chuck table, and supplying cutting water to the cutting blade. A cutting water supply means for cooling the cutting blade by supplying the cutting water to the cutting blade that rotates, and supplying the cutting water to the cutting portion of the workpiece by the cutting blade. Carry out cutting work.

As described above, cutting waste generated by cutting silicon or a gallium nitride compound semiconductor is mixed in the machining fluid supplied at the time of cutting. Since the waste liquid mixed with the cutting waste made of this semiconductor material contaminates the environment, it is reused or discarded after the cutting waste is removed using the waste liquid treatment device. (For example, refer to Patent Document 1.)
Japanese Patent Laid-Open No. 2004-230527

  The waste liquid treatment apparatus includes: a waste liquid storage tank that stores a waste liquid generated by processing with a processing liquid supplied during processing of the processing apparatus; a pump that feeds the waste liquid stored in the waste liquid storage tank; A filter for filtering the waste liquid fed by the pump to purify it into fresh water, a fresh water storage tank for storing the fresh water purified by the filter, and a fresh water feed pump for feeding the fresh water stored in the fresh water storage tank And pure water generating means including ion exchange means for purifying the pure water fed by the fresh water feed pump into pure water, and pure water for adjusting the pure water purified by the pure water generating means to a predetermined temperature. Temperature adjusting means, and is configured to circulate pure water adjusted to a predetermined temperature by the pure water temperature adjusting means to the processing liquid supply means of the processing apparatus.

  Thus, when the filter breaks or the waste liquid flows into the fresh water, there is a problem that the life of the fresh water feed pump, ion exchange means, etc. disposed in the subsequent waste liquid treatment path is significantly reduced.

  The present invention has been made in view of the above-described facts, and a technical problem thereof is to provide a waste liquid treatment apparatus including a detection unit that detects whether or not waste liquid has flowed into fresh water purified by a filter. .

In order to solve the first technical problem, according to the present invention, a waste liquid treatment apparatus comprising: a filter that filters waste liquid to be purified into fresh water; and a fresh water storage tank that stores fresh water purified by the filter. In
Transparency detecting means for detecting the transparency of fresh water stored in the fresh water storage tank, and control means for outputting a trouble message to the display means when the transparency of the fresh water detected by the transparency detecting means is not more than a predetermined value; Comprising
A waste liquid treatment apparatus is provided.

The transparency detecting means is a light emitting means provided with a detection rod inserted into the fresh water storage tank, a light emitting portion arranged at the lower end of the detection rod, and the light emitting portion facing the light emitting portion with a predetermined interval. The light receiving unit includes a light receiving unit disposed, and the light receiving unit outputs a light reception signal corresponding to the received light amount to the control unit.
The transparency detecting means preferably includes a cleaning means for cleaning the light emitting part of the light emitting means and the light receiving part of the light receiving means.

  The waste liquid treatment apparatus according to the present invention includes a transparency detection means for detecting the transparency of fresh water stored in a fresh water storage tank for storing fresh water purified by a filter, and the transparency of the fresh water detected by the transparency detection means is a predetermined value or less. In this case, since the control means for outputting the trouble message to the display means is provided, the operator can detect that the filter is broken by the trouble message. Therefore, by continuing the waste liquid treatment work without knowing that the filter has been damaged, a pure water feed pump for feeding the fresh water stored in the fresh water storage tank and a pure water generating means for purifying the fresh water into pure water are configured. It is possible to prevent the problem of reducing the lifetime of the ion exchange means and the like.

  DESCRIPTION OF EMBODIMENTS Hereinafter, a preferred embodiment of a waste liquid treatment apparatus configured according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view of a waste liquid treatment apparatus according to the present invention disposed adjacent to a cutting apparatus as a processing apparatus.
The cutting device 2 as a processing device includes a device housing 20 having a substantially rectangular parallelepiped shape. A chuck table 21 that holds a workpiece is disposed in the apparatus housing 20 so as to be movable in a direction indicated by an arrow X that is a cutting feed direction. The chuck table 21 sucks and holds a workpiece on a holding surface which is an upper surface by operating a suction means (not shown). Further, the chuck table 21 is configured to be rotatable by a rotation mechanism (not shown). The chuck table 21 is provided with a clamp 211 for fixing an annular frame that supports a wafer, which will be described later, as a workpiece via a dicing tape. The chuck table 21 configured as described above can be moved in a cutting feed direction indicated by an arrow X by a cutting feed means (not shown).

  A cutting apparatus 2 shown in FIG. 1 includes a spindle unit 22 as cutting means. The spindle unit 22 is moved in the index feed direction indicated by an arrow Y in FIG. 1 by an index feed means (not shown), and is moved in the cut feed direction indicated by an arrow Z in FIG. 1 by a notch feed means (not shown). ing. The spindle unit 22 is mounted on a moving base (not shown) and is adjusted to move in a direction indicated by an arrow Y that is an indexing direction and a direction indicated by an arrow Z that is a cutting direction, and the spindle housing 221 is freely rotatable. And a cutting blade 223 attached to the front end portion of the rotating spindle 222. A blade cover 224 that covers the upper half of the cutting blade 223 is attached to the front end of the spindle housing 221, and a machining fluid supply nozzle 225 that injects a machining fluid toward the cutting blade 223 on the blade cover 224. It is arranged. The machining liquid supply nozzle 225 is connected to a machining liquid supply unit (not shown).

  The cutting apparatus 2 shown in FIG. 1 includes an image pickup means 23 for picking up an image of the surface of a workpiece held on the chuck table 21 and detecting a region to be cut by the cutting blade 223. The imaging means 23 is composed of optical means such as a microscope and a CCD camera. A cassette placement table 24 for placing a cassette that accommodates a workpiece is disposed in the cassette placement region 24 a of the apparatus housing 20. This cassette mounting table 24 is configured to be movable in the vertical direction by lifting means (not shown). On the cassette mounting table 24, a cassette 25 for storing a semiconductor wafer W as a workpiece is placed. The semiconductor wafer W accommodated in the cassette 25 has a grid-like street formed on the surface, and devices such as ICs and LSIs are formed in a plurality of rectangular areas partitioned by the grid-like street. The semiconductor wafer W formed in this way is accommodated in the cassette 25 with the back surface adhered to the front surface of the dicing tape T mounted on the annular support frame F.

  Further, the cutting apparatus 2 in the illustrated embodiment is supported by a semiconductor wafer W (an annular frame F supported by a dicing tape T) accommodated in a cassette 25 placed on a cassette placement table 24. ) On the temporary table 26, first conveying means 28 for conveying the semiconductor wafer W carried on the temporary table 26 onto the chuck table 21, and cutting on the chuck table 21. A cleaning means 29 for cleaning the processed semiconductor wafer W and a second transfer means 290 for transferring the semiconductor wafer W cut on the chuck table 21 to the cleaning means 29 are provided.

The cutting device 2 shown in FIG. 1 is configured as described above, and its operation will be briefly described below.
The semiconductor wafer W (supported by the annular frame F via the dicing tape T) accommodated in a predetermined position of the cassette 25 placed on the cassette placement table 24 is transferred to the cassette by an elevating means (not shown). The mounting table 24 is positioned at the carry-out position by moving up and down. Next, the unloading means 27 moves forward and backward to unload the semiconductor wafer W positioned at the unloading position onto the temporary placement table 26. The semiconductor wafer W carried out to the temporary placement table 26 is transferred onto the chuck table 21 by the turning operation of the first transfer means 28. When the semiconductor wafer W is placed on the chuck table 21, suction means (not shown) is operated to suck and hold the semiconductor wafer W on the chuck table 21. The annular frame F that supports the semiconductor wafer W via the dicing tape T is fixed by the clamp 211. In this way, the chuck table 21 holding the semiconductor wafer W is moved to just below the imaging means 23. When the chuck table 21 is positioned immediately below the image pickup means 23, the street formed on the semiconductor wafer W is detected by the image pickup means 23, and the spindle unit 22 is moved and adjusted in the direction of the arrow Y, which is the indexing direction. A precision alignment operation with the blade 223 is performed.

  After that, the cutting blade 223 is cut and fed by a predetermined amount in the direction indicated by the arrow Z and rotated in the predetermined direction, while the chuck table 21 holding the semiconductor wafer W is sucked and held in the direction indicated by the arrow X (cutting blade 223). The semiconductor wafer W held on the chuck table 21 is cut along a predetermined street by the cutting blade 223 (cutting process). In this cutting process, the machining fluid supply means (not shown) is operated to eject the machining fluid from the machining fluid supply nozzle 225 toward the machining portion by the cutting blade 223. When the semiconductor wafer W is cut along a predetermined street in this way, the chuck table 21 is indexed and fed in the direction indicated by the arrow Y by the street interval, and the above-described cutting process is performed. When the cutting process is performed along all the streets extending in a predetermined direction of the semiconductor wafer W, the chuck table 21 is rotated 90 degrees to extend in a direction orthogonal to the predetermined direction of the semiconductor wafer W. By performing the cutting process along the streets, all the streets formed in a lattice shape on the semiconductor wafer W are cut and divided into individual chips. Note that the divided chips do not fall apart due to the action of the dicing tape T, but are supported by the annular frame F to maintain the wafer state.

  As described above, when the cutting process is completed along the street of the semiconductor wafer W, the chuck table 21 holding the semiconductor wafer W is first returned to the position where the semiconductor wafer W is sucked and held. Then, the suction holding of the semiconductor wafer W is released. Next, the semiconductor wafer W is transferred to the cleaning unit 29 by the second transfer unit 290. The semiconductor wafer W conveyed to the cleaning means 29 is cleaned and dried here. The semiconductor wafer W thus cleaned and dried is transferred to the temporary placement table 26 by the first transfer means 28. Then, the semiconductor wafer W is stored in a predetermined position of the cassette 25 by the unloading / loading means 27.

  In the above-described cutting process, the machining fluid sprayed from the machining fluid supply nozzle 225 to the machining portion by the cutting blade 223 by the machining fluid supply means (not shown) is recovered as waste liquid after cooling the cutting blade 223 and the machining portion, and the cutting device 2 is purified to pure water and reused by the waste liquid treatment apparatus 10 disposed adjacent to the water 2. The waste liquid treatment apparatus 10 will be described with reference to FIGS. 1 to 5.

  The waste liquid treatment apparatus 10 in the illustrated embodiment includes an apparatus housing 100, and the components of the waste liquid treatment apparatus are disposed in the apparatus housing 100. One embodiment of the components of the waste liquid treatment apparatus disposed in the apparatus housing 100 will be described with reference to FIG.

  FIG. 2 shows components of a waste liquid treatment apparatus configured according to the present invention in accordance with the flow of waste liquid. The waste liquid treatment apparatus 10 in the illustrated embodiment includes a waste liquid tank 3 that stores the waste liquid generated by machining with the machining liquid supplied from the machining liquid supply nozzle 225 to the machining unit by the cutting blade 223 during machining in the cutting apparatus 2. , A waste liquid feed pump 30 for feeding the waste liquid stored in the waste liquid tank 3 is provided. The waste liquid tank 3 is connected to the waste liquid delivery means provided in the cutting device 2 by a pipe 31. Therefore, the waste liquid sent from the waste liquid sending means equipped in the cutting device 2 is introduced into the waste liquid tank 3 through the pipe 31. A waste liquid feed pump 30 for feeding the waste liquid to the upper wall of the waste liquid tank 3 is disposed.

  The waste liquid fed by the waste liquid feed pump 30 is sent to the waste liquid filtering means 4 through a pipe 32 made of a flexible hose. The waste liquid filtering means 4 includes a fresh water receiving pan 41 and a first filter 42 a and a second filter 42 b disposed on the fresh water receiving pan 41. The first filter 42 a and the second filter 42 b are detachably disposed on the fresh water receiving pan 41. Note that an electromagnetic on-off valve 43a and an electromagnetic on-off valve 43b are disposed on the pipe 32 connecting the waste liquid feed pump 30 to the first filter 42a and the second filter 42b. When the electromagnetic on-off valve 43a is energized (ON) and opened, the waste liquid fed by the waste liquid feed pump 30 is introduced into the first filter 42a, and when the electromagnetic on-off valve 43b is energized (ON) and opened, the waste liquid The waste liquid fed by the feed pump 30 is introduced into the second filter 42b. The waste liquid introduced into the first filter 42a and the second filter 42b is filtered by the first filter 42a and the second filter 42b, and the cutting waste mixed in the waste liquid is captured, purified to fresh water, and received as fresh water. It flows out into the pan 41. The fresh water receiving pan 41 is connected to the fresh water storage tank 5 by a pipe 44 made of a flexible hose. Therefore, the fresh water flowing out to the fresh water receiving pan 41 is sent to the fresh water storage tank 5 through the pipe 44 made of a flexible hose and stored. Is done.

  The pipe 32 is provided with pressure detecting means 33 for detecting the pressure of the waste liquid supplied to the first filter 42a and the second filter 42b of the waste liquid filtering means 4, and the pressure detecting means 33 is A detection signal is sent to the control means described later. For example, if the detection signal from the pressure detection means 33 reaches a predetermined pressure value or more in a state where the electromagnetic on-off valve 43a is energized (ON) and the waste liquid is filtered by the first filter 42a, the following will be described. The control means that judges that processing waste has accumulated on the first filter 42a and has lost its function as a filter, deenergizes the electromagnetic on-off valve 43a (OFF), and energizes the electromagnetic on-off valve 43b (ON). To do. And the control means mentioned later displays on the display means provided in the operation panel mentioned later that it switched from the 1st filter 42a to the 2nd filter 42b. Thus, based on the message displayed on the display means, the operator can sense that the first filter 42a has reached the end of its life and replace the filter. Further, if the detection signal from the pressure detection means 33 reaches a predetermined pressure value or more in a state where the electromagnetic on / off valve 43b is energized (ON) and the waste liquid is filtered by the second filter 42b, it will be described later. The control means that judges that processing waste has accumulated on the second filter 42b and has lost its function as a filter, deenergizes the electromagnetic on-off valve 43b (OFF), and energizes the electromagnetic on-off valve 43a (ON). To do. And the control means mentioned later displays on the display means provided in the operation panel mentioned later that it switched from the 2nd filter 42b to the 1st filter 42a.

  The fresh water sent from the waste liquid filtering means 4 through the pipe 44 made of a flexible hose and stored in the fresh water storage tank 5 is fed by the fresh water feed pump 50 and is supplied with pure water through the pipe 51 made of the flexible hose. 6 is sent. The pure water generating means 6 in the illustrated embodiment includes a support base 61, a partition plate 611 erected on the support base 61, and an ultraviolet irradiation means 62 disposed on the rear side of the partition plate 611 in the support base 61. The first ion exchanging means 63a and the second ion exchanging means 63b provided with an ion exchange resin arranged on the front side of the partition plate 611 in the support base 61, and the rear side of the partition plate 611 in the support base 61. A precision filter 64 is provided. The first ion exchange means 63a, the second ion exchange means 63b, and the precision filter 64 are detachably disposed on the support base 61. The fresh water fed by the fresh water feed pump 50 and sent through the pipe 51 made of a flexible hose is introduced into the ultraviolet irradiation means 62 where it is sterilized by being irradiated with ultraviolet rays (UV). The fresh water sterilized by the ultraviolet irradiation means 62 is introduced into the first ion exchange means 63a or the second ion exchange means 63b via the pipe 65. The pipe 65 is provided with an electromagnetic opening / closing valve 66a and an electromagnetic opening / closing valve 66b. When the electromagnetic on-off valve 66a is energized (ON) and opened, the sterilized fresh water is introduced into the first ion exchange means 63a, and when the electromagnetic on-off valve 66b is energized (ON) and opened, the sterilized fresh water is introduced. Is introduced into the second ion exchange means 63b. The fresh water introduced into the first ion exchange means 63a or the second ion exchange means 63b is purified to pure water by exchanging ions. The purified water purified by ion exchange in this way is mixed with fine substances such as resin waste of ion exchange resin constituting the first ion exchange means 63a and the second ion exchange means 63b. There may be. For this reason, in the illustrated embodiment, the pure water purified by the ion exchange of the fresh water by the first ion exchange means 63a and the second ion exchange means 63b is supplied to the precision filter 64 through the pipe 67 as described above. The fine filter 64 is used to capture fine substances such as resin waste of ion exchange resin mixed in pure water.

  The pipe 67 is provided with a pressure detection means 68 for detecting the pressure of pure water fed from the first ion exchange means 63a and the second ion exchange means 63b to the precision filter 64, The pressure detection means 68 sends a detection signal to the control means described later. For example, if the detection signal from the pressure detection means 68 reaches a predetermined pressure value or more, the control means described later determines that a fine substance such as resin waste has accumulated on the precision filter 64 and the filter function has been lost. And it displays on the display means provided in the operation panel mentioned later. Thus, based on the message displayed on the display means, the operator can sense that the precision filter 64 has reached the end of its life and replace the filter.

  The pipe 67 is provided with a specific resistance meter 69 for detecting the specific resistance of pure water supplied to the precision filter 64 from the first ion exchange means 63a or the second ion exchange means 63b. The specific resistance meter 69 sends a detection signal to the control means described later. In a state where the electromagnetic switching valve 66a is energized (ON) and fresh water is purified to pure water by the first ion exchange means 63a, the control means to be described later has a detection signal from the resistivity meter 69 of a predetermined value. If it has reached (for example, 10 MΩ · cm) or less, the control means described later determines that the pure water purification capacity by the first ion exchange means 63a has declined, and deenergizes (OFF) the electromagnetic on-off valve 66a, The electromagnetic on-off valve 66b is energized (ON). And the control means mentioned later displays on the display means provided in the operation panel mentioned later that it switched from the 1st ion exchange means 63a to the 2nd ion exchange means 63b. Thus, based on the message displayed on the display means, the operator can sense that the first ion exchange means 63a has reached the end of its life, and can exchange the ion exchange resin of the first ion exchange means 63a. In addition, when the electromagnetic on-off valve 66b is energized (ON) and the purified water is purified to pure water by the second ion exchange means 63b, the detection signal from the resistivity meter 69 is a predetermined value (for example, 10 MΩ · cm) or less, the control means to be described later determines that the pure water purifying capacity of the second ion exchange means 63b has declined, and deenergizes (OFF) the electromagnetic on-off valve 66b to turn off the electromagnetic on-off valve 66a. Energize (ON). And the control means mentioned later displays on the display means provided in the operation panel mentioned later that it switched from the 2nd ion exchange means 63b to the 1st ion exchange means 63a.

  The pure water purified by the pure water generating means 6 is sent to the pure water temperature adjusting means 7 through a pipe 60 made of a flexible hose. The pure water sent to the pure water temperature adjusting means 7 is adjusted to a predetermined temperature (for example, 23 ° C.) and circulated through the piping 70 to the machining fluid supply means equipped in the cutting apparatus 2.

  Continuing with reference to FIG. 2, the waste liquid treatment apparatus 10 in the illustrated embodiment includes a drain valve 52 for draining the fresh water stored in the fresh water storage tank 5. Further, the waste liquid treatment apparatus 10 in the illustrated embodiment includes a transparency detection means 53 that detects the transparency of fresh water stored in the fresh water storage tank 5. The transparency detecting means 53 will be described with reference to FIG.

  The transparency detection means 53 shown in FIG. 3 includes a detection rod 531 that is inserted into the fresh water storage tank 5. A mounting plate 532 is attached to the upper end portion of the detection rod 531. The mounting plate 532 is provided with two mounting holes 532 a and 532 b, and fastening bolts 533 and 533 are inserted into the two mounting holes 532 a and 532 b, and are fastened to the fresh water storage tank 5. It is fixed with bolts 533 and 533. A pair of detection portions 531a and 531b having detection surfaces facing each other at a predetermined interval are provided at the lower end portion of the detection rod 531. In addition, the detection rod 531 is provided with two insertion holes 531c and 531d which open at the upper end surface and open opposite to the detection surfaces of the pair of detection portions 531a and 531b. The transparency detecting unit 53 shown in FIG. 3 includes a light emitting unit 534 that emits light for detection from the one detecting unit 531a and a light receiving unit 537 that receives the light emitted from the light emitting unit 534 in the other detecting unit 531b. is doing. The light emitting means 534 includes a light emitting element (LED) 535 and an optical fiber 536 having one end connected to the light emitting element (LED) 535. The optical fiber 536 is disposed so as to be inserted into one insertion hole 531c provided in the detection rod 531, and the light emitting portion 536a which is the other end is exposed to the detection surface of the one detection portion 531a. ing. The light receiving means 537 includes a light receiving element (HD) 538 and an optical fiber 539 having one end connected to the light receiving element (HD) 538. The optical fiber 539 is disposed through the other insertion hole 531d provided in the detection rod 531, and the light receiving portion 539a at the other end constitutes the light emitting means 534 on the detection surface of the other detection portion 531b. The light emitting portion 536a of the optical fiber 536 is exposed so as to face the light emitting portion 536a with a predetermined interval. The transparency detecting means 53 configured as described above is irradiated with light from the light emitting portion 536a of the optical fiber 536 when the light emitting element (LED) 535 of the light emitting means 534 is operated, and the light emitted from the light emitting portion 536a is light receiving means. The light is received by the light receiving portion 539 a of the optical fiber 539 537 and sent to the light receiving element (HD) 538. The light emitting element (LED) 535 and the light receiving element (HD) 538 may be disposed so that the light emitting surface (light emitting unit) and the light receiving surface (light receiving surface) face the detection units 531a and 531b. The light emitting element (LED) 535 configured as described above is operated by a control unit described later, and the light receiving element (HD) 539 outputs a light reception signal (voltage signal) corresponding to the received light amount to the control unit described later.

  The transparency detecting means 53 shown in FIG. 3 includes a cleaning means 540 for cleaning the light emitting portion 536a of the optical fiber 536 constituting the light emitting means 534 and the light receiving portion 539a of the optical fiber 539 constituting the light receiving means 537. Yes. The cleaning unit 540 includes a cleaning bar 541 and a cleaning member 542 made of urethane foam or the like attached to the lower end of the cleaning bar 541. The cleaning bar 541 is disposed through a guide hole 532 c provided in the mounting plate 532 and a guide hole 531 f formed in the guide member 531 e provided in the detection bar 531. The cleaning member 542 attached to the lower end of the cleaning bar 541 has a width slightly thicker than the distance between the detection surfaces of the pair of detection units 531a and 531b, and is thus detected by moving the cleaning bar 541 up and down. The light receiving portion 536a of the optical fiber 536 constituting the light emitting means 534 exposed on the detection surface of the portion 531a and the light receiving portion 539a of the optical fiber 539 constituting the light receiving means 537 exposed on the detection surface of the detection portion 531b can be cleaned. . The upper end of the cleaning rod 541 is connected to the piston rod of the air cylinder 543 mounted on the upper end portion of the detection rod 531. Accordingly, the air cylinder 543 is actuated from the state shown in FIG. 3 to move the cleaning rod 541 downward, the cleaning member 542 is positioned between the light emitting part 536a and the light receiving part 539a, and moved up and down, thereby causing the light emitting part 536a and the light receiving portion 539a can be cleaned. The transparency detecting means 53 configured as described above is provided on the mounting plate 532 by inserting the detecting rod 531 through an insertion hole (not shown) provided on the upper wall of the fresh water storage tank 5 as shown in FIG. The fastening bolts 533 and 533 inserted through the two mounting holes 532a and 532b are screwed into a female screw provided on the upper wall of the fresh water storage tank 5.

  The waste liquid tank 3, the waste liquid filtering means 4, the pure water generating means 6, the pure water temperature adjusting means 7, each pipe and the like are arranged in the apparatus housing 100 shown in FIGS. 1 and 4. 4 is a perspective view of each wall, which will be described later, constituting the apparatus housing 100, and the waste liquid tank 3, the waste liquid filtering means 4, the pure water generating means 6, the pure water temperature adjusting means 7, the respective pipes, etc. The state where is arranged is shown. The apparatus housing 100 in the illustrated embodiment includes a frame 110 that forms a rectangular parallelepiped storage chamber, a bottom wall 121, an upper wall 122, a left wall 123, a right wall 124, and a rear wall 125 that are attached to the frame 110. And an opening / closing door 126 that is mounted on the front side of the frame body 110 and opens and closes the front opening 101 formed on the front side of the frame body 110.

  The waste liquid tank 2, the fresh water storage tank 5, and the pure water generating means 6 are disposed on the bottom wall 121 of the apparatus housing 100 configured as described above. The waste liquid tank 3 is disposed on the rear wall 125 side of the bottom wall 121 of the apparatus housing 100, the fresh water storage tank 5 is disposed in the center of the bottom wall 121 adjacent to the waste liquid tank 3, and the pure water generating means 6 is a fresh water storage unit. Adjacent to the tank 5, the bottom wall 121 is disposed on the front opening 101 side (opening / closing door 126 side).

  In the illustrated embodiment, the pure water generating means 6 is arranged so as to be drawn out through the front opening 101 of the apparatus housing 100. That is, a pair of guide rails 130, 130 arranged opposite to each other and extending in the front-rear direction in parallel with the upper surface of the bottom wall 121 are arranged at the lower ends of the inner surfaces of the left wall 123 and the right wall 124 constituting the apparatus housing 100. It is installed. By placing the support 61 of the pure water generating means 6 on the pair of guide rails 130, 130, the pure water generating means 6 passes through the front opening 101 of the apparatus housing 100 along the pair of guide rails 130, 130. It is supported so that it can be pulled out. Therefore, the first ion exchange disposed on the support base 61 constituting the pure water generating means 6 by pulling the pure water generating means 6 along the pair of guide rails 130 and 130 through the front opening 101 of the apparatus housing 100. The precision filter 64 can be easily replaced with the means 63a and the second ion exchange means 63b.

  In the waste liquid treatment apparatus 10 in the illustrated embodiment, the waste liquid filtering means 4 is disposed so as to be able to be drawn out through the front opening 101 of the apparatus housing 100 above the pure water generating means 6 and the fresh water storage tank 5 in the apparatus housing 100. ing. That is, the inner surfaces of the left wall 123 and the right wall 124 constituting the apparatus housing 100 are arranged opposite to each other and parallel to the upper surface of the bottom wall 121 (parallel to the pair of guide rails 130 and 130). A pair of guide rails 140, 140 extending in the direction are disposed. By placing the fresh water receiving pan 41 of the waste liquid filtering means 4 on the pair of guide rails 140, 140, the waste liquid filtering means 4 is pulled out through the front opening 101 of the apparatus housing 100 along the pair of guide rails 140, 140. Supported as possible. In order to facilitate the operation of pulling out the waste liquid filtering means 4, a handle 411 protruding downward is provided at the front end of the fresh water receiving pan 41 constituting the waste liquid filtering means 4. Accordingly, by pulling out the waste liquid filtering means 4 along the pair of guide rails 140, 140 through the front opening 101 of the apparatus housing 100, the first is disposed detachably on the fresh water receiving pan 41 constituting the waste liquid filtering means 4. The filter 42a and the second filter 42b can be easily replaced. Since the waste liquid filtering means 4 is arranged in such a manner that it can be drawn out, the pipe connecting the fresh water receiving pan 41 of the waste liquid filtering means 4 and the fresh water storage tank 5 is connected by a pipe 44 made of a flexible hose. .

  As described above, in connection with the connection between the fresh water receiving pan 41 of the waste liquid filtering means 4 and the fresh water storage tank 5 by the pipe 44 formed of a flexible hose, the rear wall 125 side of the waste liquid filtering means 4 in the apparatus housing 100 is connected. Is provided with a hose support plate 150 for supporting a pipe 44 made of a flexible hose. The hose support plate 150 is configured to be inclined so as to increase toward the rear wall 125 side and to increase toward the right wall 124 side, and the pipe 44 made of a flexible hose is caused by its own weight. The pipe 44 made of a flexible hose is prevented from being bent downward so that the fresh water receiving pan 41 side is always positioned at a high position. Therefore, the fresh water that has flowed out into the fresh water receiving pan 41 can flow into the fresh water storage tank 5 through the piping 44 made of a flexible hose by its own weight.

  In the waste liquid treatment apparatus 10 in the illustrated embodiment, the pure water temperature adjusting means 7 is disposed above the hose support plate 150 in the apparatus housing 100. That is, the pure water temperature adjusting means 7 is placed on a support member (not shown) mounted on the left side wall 123 and the right side wall 124 constituting the apparatus housing 100 and fixed by an appropriate fixing means.

  The waste liquid treatment apparatus 10 in the illustrated embodiment includes a control means 8 for controlling the operation of each of the above-described constituent means, and an operation panel 9 for inputting processing information such as waste liquid treatment start information to the control means 8. The control means 8 and the operation panel 9 are integrally configured in the illustrated embodiment. The control means 8 and the operation panel 9 configured as described above are arranged above the waste liquid filtering means 4 in the apparatus housing 100. That is, the control means 8, the control means 8 and the operation panel 9 are placed on a support member (not shown) mounted on the left side wall 123 and the right side wall 124 constituting the apparatus housing 100 and fixed by appropriate fixing means. The At this time, the operation panel 9 is positioned on the front side of the device housing 100 (the side disposed on the opening / closing door 126 side). The operation panel 9 is provided with an input unit 91 for inputting processing information and the like, a display unit 92 for displaying processing information by the control unit 8 and the like.

Here, the control means 8 will be described with reference to FIG.
The control means 8 shown in FIG. 4 is constituted by a computer, a central processing unit (CPU) 81 that performs arithmetic processing according to a control program, a read-only memory (ROM) 82 that stores a control program and the like, and a workpiece to be described later. A random access memory (RAM) 83 capable of storing data of X and Y coordinate values of the starting point and ending point of the pulse laser beam, calculation results, and the like, and an input interface 84 and an output interface 85 are provided. The input interface 84 of the control means 8 includes the pressure detection means 33, the light receiving element (HD) 538 of the light emission means 534 constituting the transparency detection means 53, the pressure detection means 68, the resistivity meter 69, the input means 91, and the like. A detection signal and an input signal are input. From the output interface 85 of the control means 8, the light emitting element (LED) of the light receiving means 537 constituting the waste liquid feed pump 30, the electromagnetic on-off valve 43 a, the electromagnetic on-off valve 43 b, the fresh water feed pump 50, and the transparency detecting means 53. 538, the electromagnetic on-off valve 66a, the electromagnetic on-off valve 66b, the air cylinder 539 of the cleaning means 538, the display means 92, etc.

  The waste liquid treatment apparatus in the illustrated embodiment is configured as described above, and when the operator inputs waste liquid treatment start information from the operation panel 9, the control means 8 controls each of the above constituent means to perform waste liquid treatment as described above. Perform work. Then, the control means 8 deenergizes (turns off) the electromagnetic on-off valve 43a of the waste liquid filtering means 4 based on the detection signal from the pressure detecting means 33 as described above when performing the above-described waste liquid treatment work. When the electromagnetic on-off valve 43b is energized (ON) or when the electromagnetic on-off valve 43b is de-energized (OFF) and the electromagnetic on-off valve 43a is energized (ON), the first filter 42a to the second filter The display means 92 of the operation panel 9 displays that the switch from the second filter 42b or the second filter 42b to the first filter 42a is made. Thus, based on the message displayed on the display means 92, the operator senses that the first filter 42a or the second filter 42b has reached the end of its life, opens the open / close door 126 of the apparatus housing 10, and filters the waste liquid. The means 4 is pulled out through the front opening 101 of the device housing 10 along a pair of guide rails 140, 140. At this time, the operator holds and pulls the handle 411 provided on the fresh water receiving pan 41 constituting the waste liquid filtering means 4. Then, the operator replaces the first filter 42a or the second filter 42b according to the message displayed on the display means 92.

  Further, the control means 8 determines that the function of the precision filter 64 has been lost if the detection signal from the pressure detection means 68 reaches a predetermined pressure value or more during execution of the above-described waste liquid treatment work. Are displayed on the display means 92 of the operation panel 9. Based on the message displayed on the display means in this manner, the operator senses that the precision filter 64 has reached the end of its life, opens the door 126 of the apparatus housing 10, and moves the pure water generating means 6 to the pair of guide rails 130. , 130 through the front opening 101 of the device housing 10. At this time, the operator holds and pulls the handle 612 provided on the partition plate 611 standing on the support base 61 constituting the pure water generating means 6. Then, the operator replaces the precision filter 64 according to the message displayed on the display means 92.

  Furthermore, when the waste liquid treatment operation described above is being performed, the control means 8 detects that the detection signal from the resistivity meter 69 has reached a predetermined value (for example, 10 MΩ · cm) or less, and the electromagnetic open / close valve of the pure water generation means 6. If the electromagnetic on-off valve 66b is energized (ON) by de-energizing 66a or the electromagnetic on-off valve 66a is energized (ON) by de-energizing (OFF) the electromagnetic on-off valve 66b, The display means 92 of the operation panel 9 displays that the switch from the first ion exchange means 63a to the second ion exchange means 63b or the second ion exchange means 63b to the first ion exchange means 63a. Thus, based on the message displayed on the display means 92, the operator senses that the first ion exchange means 63a or the second ion exchange means 63b has reached the end of its life, and opens the door 126 of the apparatus housing 10. The pure water generating means 6 is pulled out through the front opening 101 of the apparatus housing 10 along the pair of guide rails 130 and 130. At this time, the operator grasps and pulls the handle 612 provided on the partition plate 611 erected on the support base 61 constituting the pure water generating means 6 as described above. Then, the operator replaces the ion exchange resin of the first ion exchange means 63a or the second ion exchange means 63b in accordance with the message displayed on the display means 92.

When the first filter 42a or the second filter 42b is damaged during the above-described waste liquid treatment operation and the waste liquid flows into the fresh water, the fresh water feed pump disposed in the subsequent waste liquid treatment path 50, the first ion exchange means 63a and the second ion exchange means 63b constituting the pure water production means 6 have a problem of significantly reducing the service life.
Therefore, in the waste liquid treatment apparatus in the illustrated embodiment, the first filter 42a and the second filter 42b of the waste liquid filtering means 4 are filtered by the first filter 42a and the second filter 42b to detect the transparency of the fresh water flowing into the fresh water storage tank 6. It is detected whether or not a failure such as breakage has occurred in the filter 42a or the second filter 42b. That is, the clear water in which the waste liquid is normally filtered by the first filter 42a or the second filter 42b has high transparency, and the waste liquid that is not normally filtered due to the breakage of the first filter 42a or the second filter 42b becomes the clear water. When mixed, the transparency becomes low. In the waste liquid treatment apparatus in the illustrated embodiment, the transparency detection means 53 detects the transparency of fresh water stored in the fresh water storage tank 6. As described above, the transparency detecting unit 53 emits light emitted from the light emitting element (LED) 535 of the light emitting unit 534 from the light emitting unit 536a of the optical fiber 536, and the light emitted from the light emitting unit 536a is emitted from the light receiving unit 537. The light is received by the light receiving portion 539 a of the optical fiber 538 and sent to the light receiving element (HD) 538. The amount of light received by the light receiving unit 539a varies depending on the transparency of fresh water existing between the light emitting unit 536a and the light receiving unit 539a. Therefore, when the light received by the light receiving unit 539 a is sent to the light receiving element (HD) 538, the light receiving element (HD) 538 outputs a light receiving signal (voltage signal) corresponding to the amount of light to the control means 8. When the light receiving signal (voltage signal) input from the light receiving element (HD) 538 is less than a predetermined value (for example, 5 mV), the control means 8 determines that the waste liquid is mixed in the fresh water and operates the trouble message. It outputs to the display means 92 of the board 9. Based on the message displayed on the display means 92 in this manner, the operator senses that the first filter 42a or the second filter 42b is damaged, opens the door 126 of the apparatus housing 10 and opens the waste liquid filtering means 4. Is pulled out through the front opening 101 of the apparatus housing 10 along the pair of guide rails 140, 140. At this time, the operator holds and pulls the handle 411 provided on the fresh water receiving pan 41 constituting the waste liquid filtering means 4. Then, the operator checks the first filter 42a or the second filter 42b and replaces the damaged first filter 42a or the second filter 42b. The operator opens the drain valve 52 and drains the fresh water mixed with the waste liquid stored in the fresh water storage tank 5. Since the trouble message may be output due to contamination of the light emitting unit 536a and the light receiving unit 539a, when the trouble message is displayed, the cleaning unit 540 is activated and the cleaning member 542 causes the light emitting unit 536a and the light receiving unit to operate. Clean and check 539a.

  As described above, the waste liquid treatment apparatus in the illustrated embodiment detects the transparency of fresh water stored in the fresh water storage tank 6 by the transparency detection means 53, and when the transparency is a predetermined value or less, the waste liquid is mixed into the fresh water. Since the failure message is output to the display means 92 of the operation panel 9, the operator can detect that the first filter 42a or the second filter 42b is damaged. Accordingly, by continuing the waste liquid treatment operation without knowing that the first filter 42a or the second filter 42b has been damaged, the fresh water feed pump 50, the first ion exchange means 63a, and the second ion exchange means 63b. It is possible to prevent the problem of reducing the lifetime. In the illustrated embodiment, a cleaning means 540 for cleaning the light emitting portion 536a of the optical fiber 536 of the light emitting means 534 and the light receiving portion 539a of the optical fiber 539 of the light receiving means 537 constituting the transparency detecting means 53 is provided. Therefore, by periodically operating the cleaning unit 540 to clean the light emitting unit 536a and the light receiving unit 539a, erroneous detection due to contamination of the light emitting unit 536a and the light receiving unit 539a can be prevented.

  As mentioned above, although the example which applied the waste-liquid processing apparatus comprised according to this invention to the cutting device was shown, the same effect is obtained even if the waste-liquid processing apparatus by this invention is applied to other processing apparatuses, such as a grinding device. .

The perspective view which shows the state which has arrange | positioned the waste-liquid processing apparatus comprised according to this invention adjacent to the cutting device as a processing apparatus. Explanatory drawing which shows one Embodiment of the component of the waste-liquid processing apparatus comprised according to this invention according to the flow of processing waste liquid. The perspective view of the transparency detection means which detects the transparency of the fresh water stored in the fresh water storage tank which comprises the waste-liquid processing apparatus shown in FIG. FIG. 3 is a perspective view showing a state in which constituent walls of the waste liquid treatment apparatus are arranged in the apparatus housing through the walls constituting the apparatus housing shown in FIG. 2. The block diagram of the structure of the control means with which the waste liquid processing apparatus comprised according to this invention is equipped.

Explanation of symbols

2: Cutting device 21: Chuck table 22: Spindle unit 221: Spindle housing 222: Rotating spindle 223: Cutting blade 225: Processing liquid supply nozzle 3: Waste liquid tank 31: Waste liquid feed pump 4: Waste liquid filtering means 42a: First Filter 42b: Second filter 5: Fresh water storage tank 50: Fresh water feed pump 53: Transparency detection means 531: Detection rod 534: Light emission means 537: Light reception means 540: Cleaning means 6: Pure water generation means 7: Pure water temperature Adjustment means 8: Control means 9: Operation panel 10: Waste liquid treatment device 100: Device housing

Claims (3)

In a waste liquid treatment apparatus comprising: a filter that filters waste liquid to be purified into fresh water; and a fresh water storage tank that stores fresh water purified by the filter.
Transparency detecting means for detecting the transparency of fresh water stored in the fresh water storage tank, and control means for outputting a trouble message to the display means when the transparency of the fresh water detected by the transparency detecting means is not more than a predetermined value; Comprising
A waste liquid treatment apparatus characterized by that.   The transparency detecting means is opposed to the light emitting means having a detection rod inserted and disposed in the fresh water storage tank, a light emitting portion disposed at the lower end of the detection rod, and the light emitting portion with a predetermined interval. The waste liquid processing apparatus according to claim 1, further comprising: a light receiving unit including a light receiving unit disposed in a position, wherein the light receiving unit outputs a light reception signal corresponding to the amount of received light to the control unit.   The waste liquid treatment apparatus according to claim 1 or 2, wherein the transparency detection means includes a cleaning means for cleaning the light emitting part of the light emitting means and the light receiving part light receiving part.

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