JP2010087048A - Support structure for optical element, aligner using the same, and method of manufacturing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a support structure for an optical element that reduces deformation of the optical element due to variation in ambient temperature or an influence of a processing error or assembling error of a constituent member. <P>SOLUTION: The support structure for the optical element includes a first support member 2 which supports an optical element 1, a second support member 3 which supports the first support member 2 on an internal-diameter side, and an elastic member 4 which is disposed between the first support member 2 and second support member 3 in a diameter direction and has its inner-diameter side coupled with the first support member 2 and can elastically deform in the diameter direction, and the second support member 3 is in point contact with an outer-diameter side surface portion of the elastic member 4 in the diameter direction at a plurality of places. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a support structure for an optical element, an exposure apparatus using the same, and a device manufacturing method.

  The semiconductor exposure apparatus is an apparatus that transfers an original (reticle) having a circuit pattern to a substrate (silicon wafer). When transferring, an optical device is used to form an image of the reticle pattern on the wafer. However, in order to create a highly integrated circuit, the optical device is required to have a high resolving power. Therefore, an optical apparatus for a semiconductor exposure apparatus needs to suppress optical aberration to a small value.

  For this reason, in an optical apparatus for a semiconductor exposure apparatus, the uniformity of various characteristics relating to the material and film of the optical element such as the lens and mirror constituting the optical apparatus, and the processing accuracy of the optical surface shape of the optical element, Assembly accuracy is required.

  The support member for holding the optical element used in the optical device is generally formed of metal or the like, and a material different from the optical element is used.

  However, since the optical element and the support member change in shape due to changes in the environmental temperature and the like, the aberration between the optical element and the support member may change. Therefore, in recent years, for the purpose of reducing the deformation of the lens surface due to changes in environmental temperature and further distortion generated during assembly, support of an optical device capable of obtaining high resolution with low aberrations. A structure has been proposed.

For example, the support structure of Patent Document 1 includes an elastic member that is elastically deformable in a radial direction between a first support member that supports an optical element and a second support member that supports the first support member. I have. In this support structure, when the environmental temperature changes, the plate-like spring portion of the elastic member undergoes bending deformation, and the deformation generated in the optical element is reduced.
JP 2001-343576 A

  However, in the conventional optical element support structure to which Patent Document 1 is applied, if each component member has a processing error or an assembly error, the first support member or the first support member is attached to the first support member at the time of assembly. There is a problem that the held optical element is deformed.

  First, attention is paid to the influence of machining errors and assembly errors in the radial direction. In the radial direction, the elastic member in Patent Document 1 is coupled to the second support member by surface contact at the center of the plate constituting the elastic member. Therefore, when a processing error occurs in the elastic member, or when an assembly error occurs when the elastic member is attached, if the elastic member is in surface contact with the second support member, the above various errors may occur. Directly affecting the deformation of the first support member associated with the. Such deformation of the first support member can cause deformation of the optical element supported by the first support member.

  Furthermore, attention is paid to the influence of processing errors and assembly errors in the optical axis direction. The elastic member in Patent Document 1 is supported by the second support member by surface contact in the optical axis direction. Hereinafter, the influence of the machining error in the optical axis direction of the elastic member will be described in detail.

  FIG. 9 is a schematic diagram (side view) showing the deformation of the optical element when there is a processing error in the elastic member in Patent Document 1. The conventional optical element support structure 100 includes an optical element (projection lens) 111 and a first support member 112 that supports the optical element 111. The optical element support structure 100 includes a second support member 113 that supports the first support member 112 on the inner diameter side, an inner diameter side coupled to the first support member 112, and an outer diameter side that corresponds to the second support member. 113 and an elastic member 114 that is elastically deformable in the radial direction.

  Here, for example, as shown in FIG. 9A, in one elastic member 114, the elastic member 114 is configured, and the coupling portion 114 b coupled to the second support member 113 is inclined with respect to the horizontal direction. Assume that a machining error having an angle θ has occurred. In this case, when the first support member 112 and the second support member 113 are connected, as shown in FIG. 9B, the first support member 112 bends due to the inclination of the coupling portion 114b. As a result, the optical element 111 is deformed.

  Such a problem of deformation of the optical element deteriorates the accuracy of the optical surface of the optical element and degrades the optical performance. In addition, the conventional optical element support structure to which Patent Document 1 is applied needs to increase the processing accuracy and assembly accuracy of each constituent member in order to obtain good optical performance, which increases costs. .

  The present invention has been made in view of such a situation, and an object of the present invention is to provide a support structure for an optical element in which deformation of the optical element due to an influence of a processing error or an assembly error of a component member in at least a radial direction is reduced. And It is another object of the present invention to provide an optical apparatus such as an exposure apparatus with little optical aberration using the support structure, and to provide a method for manufacturing a semiconductor device or the like using the apparatus.

  In order to solve the above problems, a first support member that supports the optical element, a second support member that supports the first support member on the inner diameter side, and the first support member and the second support member in the radial direction. An elastic member that is elastically deformable in a radial direction and is located between the support members, the inner diameter side of which is coupled to the first support member; and the second support member is a radially outer side surface of the elastic member in the radial direction It is point-contacted with the part in several places.

According to the present invention, the following effects can be obtained.
(1) It is possible to reduce the deformation of the optical element caused by the influence of the processing error of the optical element and the structural member such as a support member of the optical element, and the assembly error.
(2) By adopting the optical element support structure of the present invention, optical aberration due to deformation of the optical element is reduced, so that a high-performance exposure apparatus can be provided and a high-quality semiconductor device can be manufactured. it can.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

(First embodiment)
FIG. 1 is a schematic diagram of a support structure for an optical element according to the present invention, and is a three-dimensional sectional view cut in half from the center of the optical element. Further, FIG. 2 is a development view of the support structure of the optical element. The optical element support structure 10 of the present invention includes an optical element 1, a first support member 2, a second support member 3, and an elastic member 4.

  The optical element 1 is an optical element such as a lens or a mirror. In the present embodiment, the optical element 1 is a lens, and the material of the lens is preferably quartz glass or meteorite glass.

  The first support member 2 is a ring-shaped member and supports the optical element 1 on the inner diameter side. On the inner diameter side of the support member 2, there is an inverted L-shaped groove portion with respect to the center of the ring over the entire inner circumference so as to accommodate the outer diameter portion of the optical element 1. On the horizontal surface of the groove, a plurality of, for example, three protrusions 2a, which are convex in the shape of a square or hemisphere, protruding upward in the axial direction are provided at substantially equal intervals in the circumferential direction. Furthermore, on the outer diameter side of the first support member 2, a plurality of, for example, three notches for accommodating an elastic member 4 described later are provided at substantially equal intervals in the circumferential direction. In addition, the installation number of the projection part 2a and the said notch part is not specifically limited.

  The material of the first support member 2 has a thermal expansion coefficient close to that of the optical element 1. For example, when the material of the optical element 1 is quartz glass, the material of the first support member 2 is preferably a cordierite ceramic material made of nickel alloy, magnesium oxide, silicon oxide, or the like. Alternatively, the material of the first support member 2 is preferably a ceramic material such as alumina or silicon nitride, and further, Zero Joule (registered trademark) which is a low thermal expansion glass. For example, when the material of the optical element 1 is meteorite glass, the material of the first support member 2 is a copper alloy such as brass, an alloy such as 18-8 stainless steel, chromium, nickel, or the like. An alloy containing aluminum as a main component is suitable.

  The second support member 3 is a ring-shaped member, and supports the first support member 2 on the inner diameter side. On the inner diameter side of the second support member 3, there is an inverted L-shaped groove portion with respect to the center of the ring over the entire inner circumference so as to accommodate the outer diameter portion of the first support member 2. On the horizontal surface of the groove, there are provided three protrusions 3a which are square or hemispherical protrusions protruding upward in the axial direction at substantially equal intervals in the circumferential direction. Further, on the vertical surface (inner diameter side surface portion) of the groove portion, three protrusions (projections) 3b, which are hemispherical protrusions protruding in the center direction of the ring, are provided at substantially equal intervals in the circumferential direction. ing. The protrusion 3a and the protrusion 3b are located at the same interval in the circumferential direction corresponding to the connection position with the elastic member 4 described later. In addition, the installation number of the projection part 3a and the projection part 3b is not specifically limited. The material of the second support member 3 is an iron material, preferably an alloy such as 18-8 stainless steel.

  The elastic member 4 is provided in a plate-like spring member (plate spring portion), a fixing portion 4a coupled to the first support member 2 provided at both ends of the leaf spring portion, and a central portion of the leaf spring portion. This is an elastically deformable member comprising a contact portion 4b in contact with the second support member 3 (see FIG. 3 described later). That is, the elastic member 4 has a structure having a low elastic force in the radial direction of the ring in the support structure 10. The material of the elastic member 4 is preferably the same material as that of the first support member 2, but other materials such as a spring metal material such as stainless steel and a non-metal material such as zirconium may be used. In the present embodiment, the leaf spring portion, the fixing portion 4a, and the contact portion 4b that constitute the elastic member 4 are integrally formed. However, the elastic member 4 is formed separately and bonded to each other by bonding or bolting. It may be formed.

  Next, the connection of each member which comprises the support structure 10 of an optical element is demonstrated. Here, the optical element 1 is arranged so that the optical axis coincides with the direction of gravity.

  First, the optical element 1 has its lower surface in the optical axis direction (gravity direction) in FIG. 2 in contact with the protrusion 2a of the first support member 2 by point contact, and the outer diameter portion of the optical element 1 on the inner diameter side of the first support member 2 It is fixed to the first support member 2 by adhering to the side surface.

  FIG. 3 is an enlarged view of the periphery of the cross section of the elastic member 4 in the cross-sectional three-dimensional view of FIG. As shown in FIG. 3, the first support member 2 is supported by point contact with the protrusion 3 a of the second support member 3 on the lower surface in the optical axis direction. In addition, an elastic member 4 is installed between the first support member 2 and the second support member 3 in the radial direction. The first support member 2 causes the outer diameter side surface portion of the contact portion 4b of the elastic member 4 to make point contact in the radial direction with the protruding portion 3b of the second support member 3 facing the outer diameter side surface portion. Thus, the second support member 3 is supported. Here, the elastic member 4 is screwed to the first support member 2 at the fixing portion 4a. Further, when the first support member 2 is incorporated into the second support member 3, the elastic member 4 is pushed and deformed by the protrusion 3 b of the second support member 3, and the protrusion 3 b is deformed to the outer diameter. Generates a pushing force to the side. As a result, the first support member 2 is restricted from moving in the horizontal direction by the force generated by the elastic member 4, and restricted from moving in the gravitational direction by the frictional force generated by gravity and the force generated by the elastic member 4.

  Next, the operation and effect of the support structure 10 for optical elements will be described.

  In the present embodiment, the optical element 1 and the material of the first support member 2 that supports the optical element 1 have approximate thermal expansion coefficients, respectively. Furthermore, the optical element 1 is provided at three locations in the optical axis direction. It is supported by the protrusion 2a. Therefore, even if expansion or contraction occurs in the optical element 1 and the first support member 2 due to a change in environmental temperature, the optical element 1 becomes a shape change close to simple expansion or simple contraction, which is harmful to optical performance. Changes in shape can be suppressed.

  In addition, when the first support member 2 and the second support member 3 are formed of materials having different thermal expansion coefficients, different expansion or contraction may occur due to a change in environmental temperature. In this case, according to the present invention, the plate spring portion of the elastic member 4 is bent and deformed, so that these thermal expansion differences can be absorbed. Further, the first support member 2 is not directly coupled to the second support member 3 and is supported by point contact at the three protrusions 3a and the three protrusions 3b. Accordingly, slip occurs at the contact portion between the protruding portion 3a and the protruding portion 3b, and the first support member 2 undergoes deformation close to simple expansion or simple contraction. Therefore, the first support member 2 and the second support member 3 are deformed. Can minimize the effects of shape changes on each other.

  In addition, when the second support member 3 is deformed by an external force or the like, the first support member 2 and the first support member 2 are caused by bending deformation of the leaf spring portion of the elastic member 4. The deformation transmitted to the optical element 1 supported on the substrate is reduced. Therefore, it is possible to suppress changes in the surface shape that are harmful to the optical performance of the optical element 1.

  Furthermore, since the first support member 2 and the second support member 3 are simply supported by point contact at the protrusion 3a and the protrusion 3b, the assembly is caused by the effects of processing accuracy and assembly accuracy of each member. The deformation of the first support member 2 can be reduced. Therefore, the deformation of the optical element 1 supported by the first support member 2 can be suppressed, and the deterioration of the optical performance due to the deterioration of the accuracy of the optical surface of the optical element 1 can be reduced.

(Second Embodiment)
FIG. 4 is a diagram showing a support structure for an optical element according to the second embodiment of the present invention, and is an enlarged view of the periphery of the cross section of the elastic member 4. 4, the same members as those shown in FIG. 3 are denoted by the same reference numerals, and the description thereof is omitted.

  The feature of this embodiment is that the shape of the second support member 13 is different from the shape of the second support member 3 of the first embodiment. That is, an inverted L-shaped groove is formed on the inner diameter of the second support member 13 over the entire inner circumference so as to accommodate the outer diameter of the first support member 2. The points are the same. However, the horizontal surface of the groove that supports the first support member 2 is formed to be short in the horizontal direction, and the square or hemispherical protrusion 13a protruding upward in the axial direction is in direct contact with the first support member 2. Instead, the elastic member 4 coupled to the first support member 2 is supported by point contact. As a result, the first support member 2 and the second support member 13 are not in contact with each other in the optical axis direction and the horizontal direction, and the weight of the first support member 2 is received by the elastic member 4.

  Therefore, when the first support member 2 and the second support member 13 are formed of materials having different thermal expansion coefficients, different expansion or contraction occurs due to a change in environmental temperature. The plate spring portion 4 absorbs the thermal expansion difference by causing bending deformation. In addition, in the present embodiment, since the first support member 2 is not in direct contact with the second support member 13, the first support member 2 is more efficient and simple compared to the first embodiment. Causes deformation close to expansion or simple contraction. As a result, the first support member 2 and the second support member 13 can minimize the influence of the shape change received on each other.

(Third embodiment)
5 and 6 are views showing a support structure for an optical element according to the third embodiment of the present invention, and are enlarged views of the cross-sectional periphery of the elastic member 4. 5 and 6, the same members as those shown in FIG. 3 are denoted by the same reference numerals, and the description thereof is omitted.

  The feature of the present embodiment is that the protrusion (projection body) provided on the vertical surface (inner diameter side surface portion) of the groove portion in the above embodiment is configured by the screw member 30.

  First, in FIG. 5, the protrusion 33 a of the second support member 33 supports the first support member 2 in a point-contact manner, similarly to the protrusion 3 a of FIG. 3 in the first embodiment. Similarly, in FIG. 6, the protrusion 34 a of the second support member 34 supports the elastic member 4 in a point-contact manner in the same manner as the protrusion 13 a of FIG. 4 in the second embodiment.

  Further, the second support members 33 and 34 are provided with screw holes 33b and 34b penetrating in a radial direction from the outer diameter side to the inner diameter side, and are engaged with the screw portions 30a provided in the screw member 30, respectively. ing. The tip portion 30 b of the screw member 30 is formed in a hemispherical shape, and is in point contact with the outer diameter side surface portion of the contact portion 4 b of the elastic member 4. Further, the screw member 30 can be rotated by a tool or the like from the outside of the outer diameter of the second support members 33 and 34. When the screw member 30 is rotated, the screw member 33 moves in the radial direction along the screw holes 33b and 34b of the second support member, and the amount by which the tip portion 30b of the screw member 30 pushes the contact portion 4b of the elastic member 4 changes. When the elastic member 4 is being pressed, the screw member 30 receives a force in the direction of the rotation axis of the screw member 30 and holds the rotational position by the frictional force generated by the screw portion 30a. In addition, you may add the lock structure which fixes the rotation position of the screw member 30 separately.

  Therefore, in this embodiment, in a state where the rotational position of the screw member 30 is maintained, the support structure shown in FIG. 5 is the same as that of the first embodiment, and the support structure shown in FIG. The form and the structure are substantially the same, and the same effect as described above can be obtained.

  Here, in the first and second embodiments, the optical element 1 supported by the first support member 2 is in a plane perpendicular to the optical axis of the optical element 1 when the support structure is assembled. It stops at a position where the forces of all the elastic members 4 configured in the support structure are balanced. That is, after the support structure is assembled, the position of the optical element 1 cannot be changed from the outside.

  On the other hand, in this embodiment, after the assembly of the support structure, the screw member 30 is rotated from the outside of the outer diameter of the second support members 33 and 34, and the tip portion 30 b of the screw member 30 is the contact portion of the elastic member 4. It is possible to change the amount of pressing 4b. Thereby, the balance state of the force of all the elastic members 4 constituting the support structure is broken, and the optical element 1 supported by the first support member 2 moves to a position where a new equilibrium state is obtained. That is, the position of the optical element 1 can be changed by rotating the screw member 30 from the outside.

  As described above, in the present embodiment, in addition to the effects of the above-described embodiments, after the support structure is assembled, the optical element 1 can be moved from the outside in a plane orthogonal to the optical axis. Optical performance deterioration can be corrected.

(Fourth embodiment)
(Exposure equipment)
FIG. 7 is a schematic view of a semiconductor exposure apparatus to which the optical element support structure 10 of the present invention is applied.

  The semiconductor exposure apparatus 60 generally includes a reticle stage 51 on which a reticle 50 is mounted and a wafer stage 53 on which a wafer 55 is mounted. The semiconductor exposure apparatus 60 further includes an illumination optical system 54 that irradiates exposure illumination light, a projection optical system 52 that projects the illumination light onto the wafer 55, and a frame 56 that supports the projection optical system 52. Prepare.

  First, the illumination light for exposure is irradiated from the illumination optical system 54 to the reticle 50 mounted on the reticle stage 51. The illumination light source is, for example, excimer laser light having a wavelength of 193 nm. The irradiation area has a slit shape and covers a part of the pattern area of the reticle 50. The pattern corresponding to the slit portion is reduced to 1/4, for example, and projected onto the wafer 55 by the projection optical system 52 mounted on the frame 56. By scanning the reticle 50 and the wafer 55 with respect to the projection optical system 52, the pattern area of the reticle 50 is transferred to the photosensitive agent on the wafer 55. This scanning exposure is repeatedly performed on a plurality of transfer regions (shots) on the wafer 55.

  Here, in order to obtain a highly accurate semiconductor product, the projection optical system 52 needs high resolution performance. Therefore, by applying the optical element support structure 10 of the present invention to the projection optical system 52, the optical element 1 can be affected by changes in environmental temperature and the effects of processing accuracy and assembly accuracy of each member. It is possible to provide a semiconductor exposure apparatus that minimizes deformation and hardly deteriorates in optical performance. Further, even when the projection optical system 52 is deformed due to the deformation of the frame 56, the optical performance of the optical element 1 is hardly deteriorated due to the deterioration of the optical surface accuracy. Can be provided. Even if the optical element support structure 10 of the present invention is applied to the illumination optical system 54, the same effect can be obtained.

(Fifth embodiment)
(Device manufacturing method)
Next, an embodiment of a device manufacturing method using the above-described exposure apparatus will be described.

  Devices such as semiconductor elements, liquid crystal display elements, image sensors (CCDs, etc.), thin film magnetic heads, etc., expose a substrate (wafer, glass plate, etc.) coated with a resist (photosensitive agent) using the above-described exposure apparatus. The process goes through first. Subsequently, a device is manufactured by performing a process of developing the exposed substrate and other known processes. The known process includes at least one process such as oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, dicing, bonding, and packaging.

(Other embodiments)
In the above embodiment, the first support member 2 is point-contacted and supported by the hemispherical protrusion 3b of the second support member 3 via the elastic member 4, but the present invention is not limited to this. It is not limited to.

  FIG. 8 is an enlarged view of a support structure for an optical element according to another embodiment of the present invention. For example, as an alternative to the hemispherical protrusion 3b of the second support member, a similar effect can be obtained by embedding a ball (sphere) 20 and rolling support via the ball 20 as shown in FIG. In the ball 20, a hemispherical concave portion is formed by cutting on a vertical surface of the groove portion of the second support member 3, and a part of the ball 20 is bonded to the concave portion by adhesion. Here, the material of the ball 20 is preferably the same as that of the second support member 3, but is not particularly limited.

  Further, the hemispherical protrusion 3b is provided not on the second support member 3 but on the outer diameter side surface of the contact portion 4b of the elastic member 4 facing the inner diameter side surface of the second support member 3. There can also be a configuration. Even in this case, the same effect as the above-described embodiment can be obtained.

  The present invention can be implemented in various forms without departing from the spirit or main features thereof. Accordingly, the above-described embodiment is merely an example in all respects and should not be interpreted in a limited manner.

It is a schematic diagram of the support structure of the optical element which is the 1st Embodiment of this invention. It is an expanded view of the support structure of the optical element which is the 1st Embodiment of this invention. It is an enlarged view of the support structure of the optical element which is the 1st Embodiment of this invention. It is an enlarged view of the support structure of the optical element which is the 2nd Embodiment of this invention. It is an enlarged view of the support structure of the optical element which is the 3rd Embodiment of this invention. It is an enlarged view of the support structure of the optical element which is the 3rd Embodiment of this invention. It is the schematic of the semiconductor exposure apparatus to which the support structure of the optical element of this invention is applied. It is an enlarged view of the support structure of the optical element which is other embodiment of this invention. It is a schematic diagram (side view) which shows the support structure of the conventional optical element.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Optical element 2 1st support member 2a Projection part 3 2nd support member 3a Projection part 3b Projection part (projection body)
4 Elastic Member 10 Optical Element Support Structure 13 Second Support Member 13a Protrusion 13b Protrusion (Protrusion)
20 balls (projections)
30 Screw member 30a Screw portion 30b Contact portion 33 Second support member 33a Protrusion portion 33b Screw hole 34 Second support member 34a Protrusion portion 34b Screw hole 50 Reticle 52 Projection optical system 54 Illumination optical system 55 Substrate

Claims (14)

A first support member that supports the optical element;
A second support member for supporting the first support member on the inner diameter side;
An elastic member which is located between the first support member and the second support member in the radial direction and whose inner diameter side is coupled to the first support member and which is elastically deformable in the radial direction;
The support structure for an optical element, wherein the second support member is in point contact with the outer diameter side surface portion of the elastic member in a plurality of locations in the radial direction.   The elastic member is composed of a plurality of plate-like spring members whose both ends are coupled to the first support member and whose outer-diameter side surface portion is in point contact with the second support member. The support structure for an optical element according to claim 1. The inner diameter side surface portion of the second support member facing the outer diameter side surface portion of the elastic member in the radial direction, or the elastic member facing the inner diameter side surface portion of the second support member in the radial direction. Having a plurality of protrusions on any of the outer diameter side surfaces,
The said 2nd support member supports the said 1st support member by making point contact with the side part which the said several protrusion body opposes this some protrusion body, The said 1st support member is characterized by the above-mentioned. 2. A support structure for the optical element according to 1.   The optical element supporting structure according to claim 3, wherein the protrusion is a hemispherical convex portion.   The optical element support structure according to claim 3, wherein the protrusion is a sphere, and a part of the sphere is embedded in the second support member.   The optical element supporting structure according to claim 3, wherein the protrusion is movable in a radial direction.   The optical element support structure according to claim 6, wherein the protrusion is a screw member that engages with a screw hole provided on an inner diameter side surface portion of the second support member.   The optical element support according to any one of claims 1 to 7, wherein the second support member is in point contact with the first support member at a plurality of locations in the optical axis direction. Construction.   9. The second support member according to claim 8, wherein the second support member has a surface provided with a plurality of protrusions that make point contact with the first support member at a plurality of locations in the optical axis direction. Support structure for optical elements.   The optical element support structure according to claim 1, wherein the second support member is in point contact with the elastic member at a plurality of locations in the optical axis direction.   11. The optical device according to claim 10, wherein the second support member has a surface provided with a plurality of protrusions that make point contact with the first support member at a plurality of locations in the optical axis direction. Element support structure.   The optical element supporting structure according to claim 9, wherein the protrusion is a square or hemispherical convex portion. An exposure apparatus comprising: an illumination optical system that illuminates a reticle with light from a light source; and a projection optical system that projects a pattern of the reticle onto a substrate,
An exposure apparatus, wherein at least one of the illumination optical system and the projection optical system has the optical element support structure according to any one of claims 1 to 12. Exposing the substrate using the exposure apparatus according to claim 13;
Developing the substrate;
A device manufacturing method characterized by comprising:

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