JP2003241051A - Support means for optical element, optical system relying on the support means for the optical element, exposure device, and device manufacturing method - Google Patents

Support means for optical element, optical system relying on the support means for the optical element, exposure device, and device manufacturing method

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JP2003241051A
JP2003241051A JP2002038151A JP2002038151A JP2003241051A JP 2003241051 A JP2003241051 A JP 2003241051A JP 2002038151 A JP2002038151 A JP 2002038151A JP 2002038151 A JP2002038151 A JP 2002038151A JP 2003241051 A JP2003241051 A JP 2003241051A
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optical element
optical
support means
member
spherical member
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JP2002038151A
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Japanese (ja)
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Yuji Sudo
裕次 須藤
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Canon Inc
キヤノン株式会社
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/022Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread

Abstract

PROBLEM TO BE SOLVED: To provide a support means for an optical element which can hold the optical element without applying any external force to the optical element or using any material which emits harmful gas, an optical system relying on the support means for the optical element, an exposure device, and a device manufacturing method.
SOLUTION: The support means for the optical element which supports the optical element is provided with a support member which supports the circumferential part of the optical element. The support member is equipped with a spherical member which engages a groove part formed on the outer circumferential part of the optical element. The spherical member comes into contact with the groove part at two different points, and the optical-axial components of a force that is applied to the optical element from the spherical member at the two contact positions are directed in mutually opposite directions.
COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】 【0001】 【発明の属する技術分野】本発明は、光学素子の支持手段、該光学素子の支持手段による光学系、露光装置、デバイス製造方法に関するものである。 BACKGROUND OF THE INVENTION [0001] [Technical Field of the Invention The present invention, the support means of the optical element, an optical system by the support means of the optical element, an exposure apparatus, a device manufacturing method. 【0002】 【従来の技術】半導体露光装置は、回路パターンを有する原板(レチクル)を基板(シリコンウエハ)に転写する装置である。 [0002] semiconductor exposure apparatus is an apparatus for transferring original plate (the reticle) onto a substrate (silicon wafer) having a circuit pattern. 転写する際には、レチクルのパターンをウエハ−上に結像させるために投影レンズが用いられるが、高集積な回路を作成するために、投影レンズには高い解像力が要求される。 In transferring the pattern of the reticle wafer - but the projection lens is used to image the top, in order to create a highly integrated circuit, high resolution is required for the projection lens. そのために、半導体露光装置用のレンズは、収差が小さく抑えられている。 Therefore, the lens for a semiconductor exposure apparatus are aberration is suppressed small. このようなことから、半導体露光装置用のレンズ等においては、ガラス材質や膜に関する諸特性の均一性や、ガラスの面形状の加工精度、組立精度が必要である。 For this reason, in the lens or the like for a semiconductor exposure apparatus, uniformity and various characteristics relating to the glass material and film, processing accuracy of the surface shape of the glass is required assembly precision. 【0003】レンズに用いられるガラスを保持する鏡筒は、金属などで形成されるのが一般的であり、ガラスと異なる材質のものが使用される。 [0003] barrel that holds the glass used for lenses, being formed like a metal is generally of a different glass materials are used. 図6は、従来の半導体露光装置用の光学系の一部であり、鏡筒構造の概念を示したものである。 Figure 6 is a part of an optical system for a conventional semiconductor exposure apparatus, and shows the concept of a lens barrel structure. 同図において、複数のレンズ101, In the figure, a plurality of lenses 101,
102がそれぞれレンズを支持する金枠103,104 Metal frame 103, 104 102 to support a lens respectively
に固定され、さらに、空気間隔調整用スペーサ106を挟んで、この金枠が筒状の支持部材105の中に積み立てられ、上部から押えネジ環107,108によって押圧固定されている。 Is secured to, further across the air gap adjusting spacer 106, the metal frame is funded in the tubular support member 105, and is pressed and fixed by the pressing screw ring 107 from above. 【0004】 【発明が解決しようとする課題】半導体露光装置に用いられる投影光学系など、高性能な光学特性が必要とされる機器において、光学系を構成する各レンズは、外力を受けて素子が変形することによる光学性能の劣化を極力減らすために、硬化収縮の小さな接着剤などによって、 [0004] such as a projection optical system used in a semiconductor exposure apparatus [0005] In the device high-performance optical properties are required, the lenses constituting the optical system, by an external force device by but in order to reduce as much as possible the degradation of optical performance due to deformation, and small adhesive curing shrinkage,
素子に外力を加えることなく金枠に固定されることが一般的である。 It is common to be fixed to the metal frame without applying an external force to the element. 【0005】しかしながら短波長のレーザーを使用して露光を行うと、接着剤からのガス放出が促され、そのため光学素子表面が汚染され、透過率および光学特性の劣化を引き起こすことが懸念される。 [0005] However, if the exposure is performed using a laser of short wavelength, it prompted outgassing from the adhesive, therefore the optical element surface is contaminated, there is a fear of causing deterioration of the transmittance and optical properties. また、露光装置製造およびメンテナンス過程で光学素子単体を交換する必要がある場合など、接着剤剥離の工程が必要となり、歩留まりを悪化させる一因となっている。 Also, if you need to replace the optical element alone in an exposure apparatus manufacturing and maintenance process, the steps of adhesive release is required, it has contributed to deteriorate the yield. 【0006】また、接着剤を使用せずに光学素子を固定する方法としては、実開平3−96609号公報に開示されている方法などが挙げられるが、前記考案によれば、ガラスに形成された溝と、溝に当接する球状部材のみでは、レンズを光軸方向に拘束することができないため、レンズ上面から力を加える必要があり、結果としてレンズに歪みを伝えてしまう。 [0006] As a method for fixing the optical element without using an adhesive, although a method disclosed in real-Open 3-96609 discloses the like, according to the invention, formed on the glass and groove, only in contact with the spherical member in the groove, it is not possible to restrain the lens in the optical axis direction, it is necessary to apply a force from the lens top, would convey the distortion in the lens as a result. 【0007】さらに、前記考案では、レンズ有効径の外側に溝の形成と押圧部確保のために広いスペースが必要であり、高価な硝材を使用する場合は、装置コストが大幅にアップしてしまうという問題がある。 Furthermore, in the invention, the lens is a broad space for outside formation of the groove and the pressing part ensuring the effective diameter must, if the use of expensive glass materials, the apparatus cost is greatly increased there is a problem in that. 【0008】そこで、本発明は、前記従来のものにおける課題を解決し、光学素子に外力を加えることなく、また接着剤などの有害なガスを発生させる材料を使用することなく光学素子を保持することができる光学素子の支持手段、該光学素子の支持手段による光学系、露光装置、デバイス製造方法を提供することを目的とするものである。 [0008] Accordingly, present invention is to solve the problems in the conventional, without applying an external force to the optical element, also it holds the optical element without the use of materials which generates harmful gas such as adhesive it support means of the optical element can, optical system according to the support means of the optical element, an exposure apparatus, it is an object to provide a device manufacturing method. 【0009】 【課題を解決するための手段】本発明は、上記課題を達成するために、次の(1)〜(8)のように構成した光学素子の支持手段、該光学素子の支持手段による光学系、露光装置、デバイス製造方法を提供するものである。 [0009] According to an aspect of the present invention, in order to achieve the above object, the supporting means configured optical elements as follows: (1) to (8), the support means of the optical element optical system, an exposure apparatus according to, there is provided a device manufacturing method. (1)光学素子を支持する光学素子の支持手段であって、前記光学素子の周辺部を支持する支持部材を有し、 (1) a support means of an optical element which supports the optical element, a supporting member for supporting the peripheral portion of the optical element,
該支持部材は前記光学素子の外周部に形成された溝部と係合する球状部材を備え、該球状部材は2点の異なる部位で該溝部と接触し、その2点の接触部位において該光学素子が該球状部材から受ける力の光軸方向の分力は、 The support member comprises a spherical member which groove engages formed in the outer peripheral portion of the optical element, spherical member contacts the groove portion at different sites two points, the optical element at the contact site of the two points There is an optical axis direction of the component force of the force received from the spherical member,
互いに逆方向となるように構成されていることを特徴とする光学素子の支持手段。 Support means of the optical element characterized by being configured so as to be opposite to each other. (2)前記球状部材は、光軸に対してほぼ垂直な面内の3か所に配置されていることを特徴とする上記(1)に記載の光学素子の支持手段。 (2) the spherical member, the support means of the optical element according to the above (1), characterized in that it is arranged in three positions substantially in a plane perpendicular to the optical axis. (3)前記球状部材は、前記溝部においてその溝形状が光軸を中心とし光軸に対してほぼ垂直な円に接する直線形状とされている該溝部と係合するように構成されていることを特徴とする上記(1)または上記(2)に記載の光学素子の支持手段。 (3) the spherical member, that is configured to engage the groove portion which is a linear shape in contact with the substantially vertical circle the groove shape with respect to the optical axis around the optical axis in the groove support means of the optical element according to the above (1) or (2), characterized in. (4)前記球状部材は、前記光学素子の外周部の任意の箇所に形成されたVノッチによって位置決めされるように構成されていることを特徴とする上記(1)〜(3) (4) the spherical member, the above characterized in that it is configured to be positioned by the V-notch formed in any portion of the outer peripheral portion of the optical element (1) to (3)
のいずれかに記載の光学素子の支持手段。 Support means of the optical element according to any one of. (5)前記球状部材は、前記光軸方向及び前記光軸に対してほぼ垂直な面内の方向に、弾性を有する固定部材を介して支持部材に取り付けられていることを特徴とする上記(1)〜(4)のいずれかに記載の光学素子の支持手段。 (5) the spherical member in a direction substantially within a plane perpendicular to the optical axis and the optical axis, characterized in that attached to the support member through a fixing member having elasticity above ( support means of the optical device according to any one of 1) to (4). (6)複数の光学素子を有する光学系において、該複数の光学素子が上記(1)〜(5)のいずれかに記載の光学素子の支持手段によって支持されていることを特徴とする光学系。 (6) In the optical system having a plurality of optical elements, an optical system, wherein the optical elements of said plurality of being supported by the support means of the optical device according to any one of (1) to (5) . (7)上記(6)に記載の光学系を有することを特徴とする露光装置。 (7) exposure apparatus comprising an optical system according to the above (6). (8)上記(7)に記載の露光装置を用いてデバイスを製造することを特徴とするデバイス製造方法。 (8) a device manufacturing method characterized by manufacturing a device using the exposure apparatus according to (7). 【0010】 【発明の実施の形態】上記構成を適用することによって、光学素子に外力を加えることなく、かつ接着剤などの有害なガスを発生させる材料を使用することなく光学素子を所望の姿勢で保持することが可能となる。 [0010] By applying the Detailed Description of the Invention The structure, the desired orientation of the optical element without the use of materials which generates harmful gas such as without and adhesive applying an external force to the optical element in it is possible to hold. また、 Also,
これを半導体露光装置などの投影光学系に適用することで、安定で、収差の小さい露光が実現でき、解像力の高い転写を行うことができる。 By applying this to the projection optical system such as a semiconductor exposure apparatus, a stable, can be realized a small exposure aberration, it is possible to perform high transfer resolving power. このことによって微細な半導体を製造することが可能になる。 It is possible to manufacture fine semiconductor by this. さらに、装置製造およびメンテナンスの過程において、単レンズの交換を行う場合にも、作業を短時間で行うことが可能となり、歩留まりを向上させることができる。 Furthermore, in the course of device fabrication and maintenance, even when the replacement of the single lens, it is possible to perform in a short time to work, it is possible to improve the yield. 【0011】 【実施例】以下に、本発明の実施例について説明する。 [0011] [Example] Hereinafter, a description will be given of an embodiment of the present invention. [実施例1]本発明の実施例1について、図1〜図3を用いて説明する。 For Example 1 of Embodiment 1 the present invention will be described with reference to FIGS. 図1は本発明の実施例1に係る投影光学系の構成を示す概略図であり、また図2はレンズ及び支持部材の接触部の詳細図である。 Figure 1 is a schematic diagram showing a configuration of a projection optical system according to Example 1 of the present invention, and FIG. 2 is a detailed view of a contact portion of the lens and the support member. これらにおいて、重力方向は光軸と一致している。 In these, the direction of gravity coincides with the optical axis. 【0012】図1において、1は石英のレンズ、2は各レンズを光軸方向に所定の間隔で配置するための鏡筒、 [0012] In FIG. 1, 1 is a quartz lens, 2 is a lens barrel for arranging at a predetermined interval each lens in the optical axis direction,
3は空気間隔を調節するためのスペーサである。 3 is a spacer for adjusting the air gap. 11はレンズ1を支持する支持部材であり、押え環4によって鏡筒2内に固定される。 11 is a supporting member for supporting the lens 1 is fixed to the barrel 2 by pressing ring 4. 本実施例では、支持部材11はレンズの線膨張係数に合わせて熱膨張係数の極めて小さいインバー材が用いられている。 In this embodiment, the supporting member 11 is extremely small Invar thermal expansion coefficient is used in accordance with the linear expansion coefficient of the lens. 【0013】12は支持部材11の周上3個所に固定され、球状部材13を一面に埋め込んだブロックである。 [0013] 12 is secured to the peripheral on the three locations of the support member 11, the spherical member 13 is embedded block on one side.
本実施例では、球状部材13はブロック12にロウ接されているが、脱ガス量の少ないエポキシ系の接着剤などによって固定することも可能である。 In this embodiment, the spherical member 13 has been brazed to the block 12, it is also possible to fix the like degassing a small amount of epoxy adhesive. レンズ1のコバ部には、図2に示すように断面がV字形状をした溝(以下V溝と記す)が全周にわたって加工されている。 The edge portion of the lens 1 is cross-section as shown in FIG. 2 (hereinafter referred to as V-grooves) grooves of the V-shape is machined over the entire circumference. 【0014】各球状部材13は、前記V溝の上下2面ともに当接し、かつレンズ1の半径方向に圧力をかけないよう位置調整され、支持部材11上の周上3個所に等間隔で固定されている。 [0014] Each spherical member 13 contacts the upper and lower surfaces of both of the V-groove, and the radial direction of the lens 1 is positioned adjusted so as not to apply pressure, fixed at equal intervals in the circumferential on three locations on the support member 11 It is. これらの構成によれば各レンズ1 Each According to these configurations lens 1
は3個所の支持点において、外力としてのモーメントをほとんど受けることがない。 In support points 3 points, it does not receive little moment as an external force. 【0015】また、各々の球状部材13は溝部内面2個所で接触しているが、接触点においてレンズ1が球状部材13から受ける力の光軸方向分力のベクトルが、互いに180度の角度をなすため、レンズ1の位置および姿勢が一義的に決定され、鏡筒内に固定できる。 Further, although each of the spherical member 13 is in contact with the groove inner surface two positions, the lens 1 is the vector of the optical axis direction force component of the force received from the spherical member 13 at the contact point, an angle of 180 degrees from each other eggplant, the position and orientation of the lens 1 is uniquely determined, can be fixed in the lens barrel. さらに、 further,
接着剤を使用していないため、脱ガスによる透過率および光学性能の劣化がなく、かつ支持部材11からの脱着が容易で、単レンズの交換にかかる工数を減らすことができる。 Since no adhesive is used, there is no deterioration of the transmittance and optical performance by degassing, and is easy to desorb from the support member 11, it is possible to reduce the number of steps according to the replacement of a single lens. 【0016】本実施例ではレンズ1が光軸回りに回転する方向に拘束機構は設けていないが、レンズ1の自重により、レンズ1と球状部材13の接触部に摩擦が生じるため、装置運搬時などの外力によってレンズが回転しないことは、実験により確認した。 [0016] restraint mechanism in a direction in which the lens 1 is rotated about the optical axis in this embodiment is not provided, by the weight of the lens 1, the lens 1 and the friction occurs in the contact portion of the spherical member 13, when the apparatus is transported the lens by an external force, such as not rotated, and confirmed by experiments. 但し、光軸回りの方向に、より大きな外力(回転力)が加わる場合には、図3 However, the direction of the optical axis, when a larger force (rotational force) is applied, the 3
に示すように、レンズの外周に3個所に直線の溝を配置することで、レンズの回転を拘束することができる。 As shown in, in three positions on the outer periphery of the lens by arranging the grooves of the linear, it is possible to restrain the rotation of the lens. 【0017】また、図3に示した構成では、不図示のガイドにより、ブロック12はレンズ1の半径方向にのみ移動可能となっている。 [0017] In the configuration shown in FIG. 3, the guide (not shown), the block 12 has a movable only in the radial direction of the lens 1. レンズ脱着時には3個のブロック12のうち、1つのみを支持部材11から着脱し、レンズ1の着脱を行うようにすることで、レンズ1と支持部材11の位置関係を所望の精度で再現させることが可能である。 Of the lenses at the time of desorption three blocks 12, and removable only one of the support member 11, is possible to perform the attachment and detachment of the lens 1, to reproduce the positional relationship between the lens 1 and the supporting member 11 at a desired accuracy It is possible. さらに、レンズ外周部の任意の場所に、Vノッチを形成し球状部材を位置決めすることで、溝を直線形状にした場合と同様に、レンズの回転を拘束することも可能である。 Furthermore, anywhere lens outer peripheral portion, by positioning the spherical member to form a V-notch, as in the case where the groove in a linear shape, it is possible to restrain the rotation of the lens. 【0018】[実施例2]本発明の実施例2について、 [0018] For Example 2 [Example 2] The present invention,
図4を用いて説明する。 It will be described with reference to FIG. 図4は本実施例に係る投影光学系の構成を示す概略図である。 Figure 4 is a schematic diagram showing the configuration of a projection optical system according to this embodiment. 図4において、先の実施例1と同一の符号は同一の部材を示す。 4, the same reference numerals as in Example 1 described above denote the same members. 21は球状部材13を固定するためのブロックであるが、球状部材13 21 is a block for fixing the spherical member 13, but the spherical members 13
の固定部は光軸方向に弾性をもち、微小距離の変位が可能である。 Fixing part of has elasticity in the direction of the optical axis, it is displaceable in a minute distance. また、支持部材11にブロック21を固定する際、レンズ1の光学性能に影響がない程度の半径方向の与圧が、球状部材13にかけられている。 Furthermore, when fixing the block 21 to the support member 11, pressurization of the radial extent does not affect the optical performance of the lens 1 has been subjected to the spherical member 13. 【0019】先の実施例1では、温度変化時にレンズに歪みが伝わらないように、支持部材11はレンズ1とほぼ等しい線膨張率を持つ部材を使用したが、光学素子の材質によっては、支持部材と線膨張率を合わせることが困難となる場合がある。 [0019] In the previous example 1, so as not transmitted distortion on the lens at the time of temperature change, it was used a support member 11 member having a substantially equal linear expansion coefficient between the lens 1, depending on the material of the optical element, the support it may be combined with members and coefficient of linear expansion becomes difficult. 本実施例によれば、レンズを支持部材の線膨張率が異なる場合も、温度変化によるレンズと支持部材の相対的な寸法変化を、前記の弾性を有するブロックが吸収するため、レンズに加わる外力が小さく、光学特性の劣化を防ぐことが可能である。 According to this embodiment, even if the coefficient of linear expansion of the supporting member of the lens are different, the relative dimensional changes of the lens and the supporting member due to temperature changes, since the block absorbs an elastic of the external force applied to the lens is small, it is possible to prevent the deterioration of optical properties. 【0020】本実施例では半径方向に弾性をもったブロック21を周上3箇所に配置し、温度変化時に光軸が移動しない構造をとったが、高精度に温調された環境でのみ装置を使用するような場合は、ブロック21は3個所のうち1箇所にのみ設置し、他の2箇所は実施例1で用いたブロック12を使用してもよい。 [0020] In this embodiment arranged blocks 21 having elasticity radially on the circumference three, but took a structure in which the optical axis does not move when the temperature changes, device only temperature-controlled environment with high precision the case to use the block 21 is installed only in one position of the three positions, the other two places may be used block 12 used in example 1. その場合は装置使用環境と、本支持機構の組立環境を同じくすることで、 A device use environment in case, by also the assembly environment of the support mechanism,
装置使用時には組立時と同一の光軸に復元することが可能である。 Apparatus in use can be restored to the same optical axis during assembly. 【0021】以上の各実施例においては、半導体露光装置の投影レンズシステムに適用した構成例として説明したが、光学素子としてはレンズ以外にミラーに適用しても良い。 In each of the embodiments [0021] has been described as a configuration example of application to a projection lens system for semiconductor exposure apparatus may be applied to the mirror in addition to the lens as an optical element. また、回折を応用した光学素子など、変形や脱ガスによる光学性能劣化を問題とする光学素子に適用することが可能である。 Moreover, such an optical element using the diffraction, it is possible to apply the optical element according to the problem optical performance deterioration due to deformation and degassing. 【0022】 【発明の効果】本発明によれば、光学素子に外力を加えることなく、また接着剤などの有害なガスを発生させる材料を使用することなく光学素子を保持することができる光学素子の支持手段、該光学素子の支持手段による光学系、露光装置、デバイス製造方法を実現することができる。 According to the present invention, an optical element that can hold an optical element without using a material which generates harmful gas such as without, also adhesive applying an external force to the optical element of the support means, an optical system by the support means of the optical element, an exposure apparatus, it is possible to realize a device manufacturing method.

【図面の簡単な説明】 【図1】本発明の実施例1における投影光学系の構成を示す概略図。 Schematic view showing the arrangement of a projection optical system in Example 1 BRIEF DESCRIPTION OF THE DRAWINGS [Figure 1] present invention. 【図2】本発明の実施例1におけるレンズと支持部材との接触部の詳細図。 [2] detailed view of the contact portion of the lens and the support member in the first embodiment of the present invention. 【図3】本発明の実施例1におけるレンズに外周部3個所に直線のV溝を加工した場合の詳細図。 Detailed view of a case of processing a V groove of the straight on the outer peripheral portion 3 points in the lens of Example 1 of the present invention; FIG. 【図4】本発明の実施例2における投影光学系の構成を示す概略図。 Schematic view showing the arrangement of a projection optical system as Example 2 of the present invention; FIG. 【図5】本発明が適用された半導体露光装置の構成を示す概略図。 Schematic view showing the arrangement of Figure 5. The semiconductor exposure apparatus to which the present invention is applied. 【図6】従来例における鏡筒構造の概略図。 Figure 6 is a schematic view of a lens barrel structure in a conventional example. 【符号の説明】 1:石英のレンズ2:鏡筒3:スペーサ4:押え環11:支持部材12:ブロック13:球状部材21:ブロック50:レチクル51:レチクルステージ52:投影光学系53:ウエハーステージ54:照明光学系55:ウエハー56:露光装置のフレーム101:レンズ102:レンズ103:金枠104:金枠105:支持部材106:スペーサ107:ネジ環108:ネジ環 [Description of Reference Numerals] 1: quartz lens 2: barrel 3: spacer 4: pressing ring 11: supporting member 12: Block 13: the spherical member 21: Block 50: reticle 51: reticle stage 52: the projection optical system 53: Wafer stage 54: the illumination optical system 55: wafer 56: exposing apparatus frame 101 of: lens 102: lens 103: metal frame 104: a metal frame 105: supporting member 106: spacer 107: screw ring 108: screw ring

Claims (1)

  1. 【特許請求の範囲】 【請求項1】光学素子を支持する光学素子の支持手段であって、 前記光学素子の周辺部を支持する支持部材を有し、該支持部材は前記光学素子の外周部に形成された溝部と係合する球状部材を備え、該球状部材は2点の異なる部位で該溝部と接触し、その2点の接触部位において該光学素子が該球状部材から受ける力の光軸方向の分力は、互いに逆方向となるように構成されていることを特徴とする光学素子の支持手段。 Patent Claims: 1. A support means of the optical element which supports the optical element, a supporting member for supporting the peripheral portion of the optical element, the support member is an outer peripheral portion of the optical element comprises a spherical member which groove engages formed, spherical member contacts the groove portion at different sites two points, the optical axis of the force received optical element from the spherical member at the contact site of the two points direction component force, the support means of the optical element characterized by being configured so as to be opposite to each other. 【請求項2】前記球状部材は、光軸に対してほぼ垂直な面内の3か所に配置されていることを特徴とする請求項1に記載の光学素子の支持手段。 Wherein said spherical member, the support means of the optical element according to claim 1, characterized in that it is arranged in three positions substantially in a plane perpendicular to the optical axis. 【請求項3】前記球状部材は、前記溝部においてその溝形状が光軸を中心とし光軸に対してほぼ垂直な円に接する直線形状とされている該溝部と係合するように構成されていることを特徴とする請求項1または請求項2に記載の光学素子の支持手段。 Wherein said spherical member, said configured to engage the groove portion which is a linear shape in contact with the substantially vertical circle the groove shape with respect to the optical axis around the optical axis in the groove support means of the optical element according to claim 1 or claim 2, characterized in that there. 【請求項4】前記球状部材は、前記光学素子の外周部の任意の箇所に形成されたVノッチによって位置決めされるように構成されていることを特徴とする請求項1〜3 Wherein said spherical member, claims 1 to 3, characterized in that it is configured to be positioned by the V-notch formed in any portion of the outer peripheral portion of the optical element
    のいずれか1項に記載の光学素子の支持手段。 Support means of the optical element according to any one of. 【請求項5】前記球状部材は、前記光軸方向及び前記光軸に対してほぼ垂直な面内の方向に、弾性を有する固定部材を介して支持部材に取り付けられていることを特徴とする請求項1〜4のいずれか1項に記載の光学素子の支持手段。 Wherein said spherical member in a direction substantially within a plane perpendicular to the optical axis and the optical axis, characterized in that attached to the support member through a fixing member having elasticity support means of the optical element according to any one of claims 1 to 4. 【請求項6】複数の光学素子を有する光学系において、 6. An optical system having a plurality of optical elements,
    該複数の光学素子が請求項1〜5のいずれか1項に記載の光学素子の支持手段によって支持されていることを特徴とする光学系。 An optical system wherein the optical elements of said plurality of being supported by the support means of the optical element according to any one of claims 1 to 5. 【請求項7】請求項6に記載の光学系を有することを特徴とする露光装置。 7. An exposure apparatus comprising an optical system according to claim 6. 【請求項8】請求項7に記載の露光装置を用いてデバイスを製造することを特徴とするデバイス製造方法。 8. A device manufacturing method characterized by manufacturing a device using the exposure apparatus according to claim 7.
JP2002038151A 2002-02-15 2002-02-15 Support means for optical element, optical system relying on the support means for the optical element, exposure device, and device manufacturing method Pending JP2003241051A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
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JP2005191204A (en) * 2003-12-25 2005-07-14 Kyocera Corp Optical element assembling body, assembling method, and electron beam apparatus using the same
EP1898241A1 (en) * 2005-06-14 2008-03-12 Nikon Corporation Optical element, optical element holding apparatus, exposure apparatus and device manufacturing method
JP2009502034A (en) * 2005-07-19 2009-01-22 カール・ツァイス・エスエムティー・アーゲー Optical imaging apparatus
JP2010034075A (en) * 2009-11-09 2010-02-12 Kyocera Corp Method of assembling optical element assembly
JP2011170161A (en) * 2010-02-19 2011-09-01 Fujifilm Corp Lens device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005191204A (en) * 2003-12-25 2005-07-14 Kyocera Corp Optical element assembling body, assembling method, and electron beam apparatus using the same
EP1898241A1 (en) * 2005-06-14 2008-03-12 Nikon Corporation Optical element, optical element holding apparatus, exposure apparatus and device manufacturing method
EP1898241A4 (en) * 2005-06-14 2010-11-03 Nikon Corp Optical element, optical element holding apparatus, exposure apparatus and device manufacturing method
JP2009502034A (en) * 2005-07-19 2009-01-22 カール・ツァイス・エスエムティー・アーゲー Optical imaging apparatus
JP2010034075A (en) * 2009-11-09 2010-02-12 Kyocera Corp Method of assembling optical element assembly
JP2011170161A (en) * 2010-02-19 2011-09-01 Fujifilm Corp Lens device

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