JP2010085904A - Alkali-developable photosensitive resin composition, and display element barrier rib formed by using the same, and display element - Google Patents
Alkali-developable photosensitive resin composition, and display element barrier rib formed by using the same, and display element Download PDFInfo
- Publication number
- JP2010085904A JP2010085904A JP2008257275A JP2008257275A JP2010085904A JP 2010085904 A JP2010085904 A JP 2010085904A JP 2008257275 A JP2008257275 A JP 2008257275A JP 2008257275 A JP2008257275 A JP 2008257275A JP 2010085904 A JP2010085904 A JP 2010085904A
- Authority
- JP
- Japan
- Prior art keywords
- group
- alkali
- photosensitive resin
- resin composition
- fluorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 56
- 230000004888 barrier function Effects 0.000 title description 4
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 54
- 239000011737 fluorine Substances 0.000 claims abstract description 43
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 41
- 229920005989 resin Polymers 0.000 claims abstract description 38
- 239000011347 resin Substances 0.000 claims abstract description 38
- 239000000203 mixture Substances 0.000 claims abstract description 31
- 239000002253 acid Substances 0.000 claims abstract description 18
- 239000002904 solvent Substances 0.000 claims abstract description 17
- 229920001577 copolymer Polymers 0.000 claims abstract description 14
- 230000002378 acidificating effect Effects 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 52
- 239000000178 monomer Substances 0.000 claims description 37
- 238000005192 partition Methods 0.000 claims description 33
- 238000011161 development Methods 0.000 claims description 31
- 150000001875 compounds Chemical class 0.000 claims description 30
- 239000003513 alkali Substances 0.000 claims description 22
- 239000007787 solid Substances 0.000 claims description 22
- 239000004593 Epoxy Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 17
- 230000015572 biosynthetic process Effects 0.000 claims description 16
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 15
- 125000001153 fluoro group Chemical group F* 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 14
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 claims description 11
- 229930185605 Bisphenol Natural products 0.000 claims description 11
- 125000001424 substituent group Chemical group 0.000 claims description 11
- 239000006185 dispersion Substances 0.000 claims description 9
- 125000000217 alkyl group Chemical group 0.000 claims description 8
- 125000003118 aryl group Chemical group 0.000 claims description 8
- 125000000962 organic group Chemical group 0.000 claims description 8
- 239000012860 organic pigment Substances 0.000 claims description 8
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 7
- 239000003999 initiator Substances 0.000 claims description 7
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- 150000008064 anhydrides Chemical class 0.000 claims description 6
- 239000007864 aqueous solution Substances 0.000 claims description 6
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical group C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 238000007641 inkjet printing Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- 150000007519 polyprotic acids Polymers 0.000 claims description 5
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- 239000007795 chemical reaction product Substances 0.000 claims description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 claims description 3
- 125000003342 alkenyl group Chemical group 0.000 claims description 3
- 229920001400 block copolymer Polymers 0.000 claims description 3
- 150000001735 carboxylic acids Chemical class 0.000 claims description 3
- 125000004185 ester group Chemical group 0.000 claims description 3
- 125000005843 halogen group Chemical group 0.000 claims description 3
- 229920005604 random copolymer Polymers 0.000 claims description 3
- 239000003795 chemical substances by application Substances 0.000 abstract description 11
- 238000004140 cleaning Methods 0.000 abstract description 2
- 230000001846 repelling effect Effects 0.000 abstract 3
- 230000002349 favourable effect Effects 0.000 abstract 1
- 239000000976 ink Substances 0.000 description 52
- 230000018109 developmental process Effects 0.000 description 29
- 239000010408 film Substances 0.000 description 24
- 239000000243 solution Substances 0.000 description 22
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 18
- 238000000576 coating method Methods 0.000 description 17
- -1 fluorine organic compound Chemical class 0.000 description 16
- 239000011159 matrix material Substances 0.000 description 16
- 239000011248 coating agent Substances 0.000 description 15
- 229920000642 polymer Polymers 0.000 description 15
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 12
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 11
- 239000005871 repellent Substances 0.000 description 11
- 230000002940 repellent Effects 0.000 description 10
- 238000003786 synthesis reaction Methods 0.000 description 10
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 9
- 238000002156 mixing Methods 0.000 description 9
- RLUCXJBHKHIDSP-UHFFFAOYSA-N propane-1,2-diol;propanoic acid Chemical compound CCC(O)=O.CC(O)CO RLUCXJBHKHIDSP-UHFFFAOYSA-N 0.000 description 9
- 239000011521 glass Substances 0.000 description 8
- 239000000049 pigment Substances 0.000 description 8
- 150000008065 acid anhydrides Chemical class 0.000 description 7
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 6
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 4
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 4
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 4
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 4
- 125000005647 linker group Chemical group 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- IAXXETNIOYFMLW-UHFFFAOYSA-N (4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl) 2-methylprop-2-enoate Chemical compound C1CC2(C)C(OC(=O)C(=C)C)CC1C2(C)C IAXXETNIOYFMLW-UHFFFAOYSA-N 0.000 description 3
- QGKMIGUHVLGJBR-UHFFFAOYSA-M (4z)-1-(3-methylbutyl)-4-[[1-(3-methylbutyl)quinolin-1-ium-4-yl]methylidene]quinoline;iodide Chemical compound [I-].C12=CC=CC=C2N(CCC(C)C)C=CC1=CC1=CC=[N+](CCC(C)C)C2=CC=CC=C12 QGKMIGUHVLGJBR-UHFFFAOYSA-M 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- DPNXHTDWGGVXID-UHFFFAOYSA-N 2-isocyanatoethyl prop-2-enoate Chemical compound C=CC(=O)OCCN=C=O DPNXHTDWGGVXID-UHFFFAOYSA-N 0.000 description 3
- OZAIFHULBGXAKX-VAWYXSNFSA-N AIBN Substances N#CC(C)(C)\N=N\C(C)(C)C#N OZAIFHULBGXAKX-VAWYXSNFSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 125000004018 acid anhydride group Chemical group 0.000 description 3
- 239000002518 antifoaming agent Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005227 gel permeation chromatography Methods 0.000 description 3
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 3
- 230000001771 impaired effect Effects 0.000 description 3
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 230000007261 regionalization Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- FTTATHOUSOIFOQ-UHFFFAOYSA-N 1,2,3,4,6,7,8,8a-octahydropyrrolo[1,2-a]pyrazine Chemical compound C1NCCN2CCCC21 FTTATHOUSOIFOQ-UHFFFAOYSA-N 0.000 description 2
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- YKXAYLPDMSGWEV-UHFFFAOYSA-N 4-hydroxybutyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCO YKXAYLPDMSGWEV-UHFFFAOYSA-N 0.000 description 2
- FUGYGGDSWSUORM-UHFFFAOYSA-N 4-hydroxystyrene Chemical compound OC1=CC=C(C=C)C=C1 FUGYGGDSWSUORM-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 2
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical group C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- GHAZCVNUKKZTLG-UHFFFAOYSA-N N-ethyl-succinimide Natural products CCN1C(=O)CCC1=O GHAZCVNUKKZTLG-UHFFFAOYSA-N 0.000 description 2
- HDFGOPSGAURCEO-UHFFFAOYSA-N N-ethylmaleimide Chemical compound CCN1C(=O)C=CC1=O HDFGOPSGAURCEO-UHFFFAOYSA-N 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- GCTPMLUUWLLESL-UHFFFAOYSA-N benzyl prop-2-enoate Chemical compound C=CC(=O)OCC1=CC=CC=C1 GCTPMLUUWLLESL-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 2
- 239000012986 chain transfer agent Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000007334 copolymerization reaction Methods 0.000 description 2
- 239000003431 cross linking reagent Substances 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 2
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 2
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 2
- 239000011976 maleic acid Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 2
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- HMZGPNHSPWNGEP-UHFFFAOYSA-N octadecyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCCCCCCCCCOC(=O)C(C)=C HMZGPNHSPWNGEP-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 2
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 2
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000003505 polymerization initiator Substances 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 239000001294 propane Substances 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 238000012719 thermal polymerization Methods 0.000 description 2
- ARCGXLSVLAOJQL-UHFFFAOYSA-N trimellitic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 ARCGXLSVLAOJQL-UHFFFAOYSA-N 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 1
- DJKGDNKYTKCJKD-BPOCMEKLSA-N (1s,4r,5s,6r)-1,2,3,4,7,7-hexachlorobicyclo[2.2.1]hept-2-ene-5,6-dicarboxylic acid Chemical compound ClC1=C(Cl)[C@]2(Cl)[C@H](C(=O)O)[C@H](C(O)=O)[C@@]1(Cl)C2(Cl)Cl DJKGDNKYTKCJKD-BPOCMEKLSA-N 0.000 description 1
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 1
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 1
- RUJPNZNXGCHGID-UHFFFAOYSA-N (Z)-beta-Terpineol Natural products CC(=C)C1CCC(C)(O)CC1 RUJPNZNXGCHGID-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
- QWOZZTWBWQMEPD-UHFFFAOYSA-N 1-(2-ethoxypropoxy)propan-2-ol Chemical compound CCOC(C)COCC(C)O QWOZZTWBWQMEPD-UHFFFAOYSA-N 0.000 description 1
- LMGYOBQJBQAZKC-UHFFFAOYSA-N 1-(2-ethylphenyl)-2-hydroxy-2-phenylethanone Chemical compound CCC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 LMGYOBQJBQAZKC-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- HIDBROSJWZYGSZ-UHFFFAOYSA-N 1-phenylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC=C1 HIDBROSJWZYGSZ-UHFFFAOYSA-N 0.000 description 1
- WJFKNYWRSNBZNX-UHFFFAOYSA-N 10H-phenothiazine Chemical compound C1=CC=C2NC3=CC=CC=C3SC2=C1 WJFKNYWRSNBZNX-UHFFFAOYSA-N 0.000 description 1
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 1
- VEUMBMHMMCOFAG-UHFFFAOYSA-N 2,3-dihydrooxadiazole Chemical compound N1NC=CO1 VEUMBMHMMCOFAG-UHFFFAOYSA-N 0.000 description 1
- DXUMYHZTYVPBEZ-UHFFFAOYSA-N 2,4,6-tris(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 DXUMYHZTYVPBEZ-UHFFFAOYSA-N 0.000 description 1
- JJPKWNXRUDKBQT-UHFFFAOYSA-N 2,4-bis(trichloromethyl)-6-[2-(3,4,5-trimethoxyphenyl)ethenyl]-1,3,5-triazine Chemical compound COC1=C(OC)C(OC)=CC(C=CC=2N=C(N=C(N=2)C(Cl)(Cl)Cl)C(Cl)(Cl)Cl)=C1 JJPKWNXRUDKBQT-UHFFFAOYSA-N 0.000 description 1
- WPZJSWWEEJJSIZ-UHFFFAOYSA-N 2,6-dibromo-4-[(3,5-dibromo-4-hydroxyphenyl)methyl]phenol Chemical compound C1=C(Br)C(O)=C(Br)C=C1CC1=CC(Br)=C(O)C(Br)=C1 WPZJSWWEEJJSIZ-UHFFFAOYSA-N 0.000 description 1
- VYTXKAABSCYYEU-UHFFFAOYSA-N 2,6-dibromo-4-[9-(3,5-dibromo-4-hydroxyphenyl)fluoren-9-yl]phenol Chemical compound C1=C(Br)C(O)=C(Br)C=C1C1(C=2C=C(Br)C(O)=C(Br)C=2)C2=CC=CC=C2C2=CC=CC=C21 VYTXKAABSCYYEU-UHFFFAOYSA-N 0.000 description 1
- TXYQFJWVHVYIHB-UHFFFAOYSA-N 2,6-dichloro-4-(3,5-dichloro-4-hydroxyphenoxy)phenol Chemical compound C1=C(Cl)C(O)=C(Cl)C=C1OC1=CC(Cl)=C(O)C(Cl)=C1 TXYQFJWVHVYIHB-UHFFFAOYSA-N 0.000 description 1
- YYDJTJGFHTVGGF-UHFFFAOYSA-N 2,6-dichloro-4-(3,5-dichloro-4-hydroxyphenyl)sulfonylphenol Chemical compound C1=C(Cl)C(O)=C(Cl)C=C1S(=O)(=O)C1=CC(Cl)=C(O)C(Cl)=C1 YYDJTJGFHTVGGF-UHFFFAOYSA-N 0.000 description 1
- ADPNKEKOIMXCQW-UHFFFAOYSA-N 2,6-dichloro-4-[(3,5-dichloro-4-hydroxyphenyl)-dimethylsilyl]phenol Chemical compound C=1C(Cl)=C(O)C(Cl)=CC=1[Si](C)(C)C1=CC(Cl)=C(O)C(Cl)=C1 ADPNKEKOIMXCQW-UHFFFAOYSA-N 0.000 description 1
- WIFDRXSVRSCMMY-UHFFFAOYSA-N 2,6-dichloro-4-[(3,5-dichloro-4-hydroxyphenyl)methyl]phenol Chemical compound C1=C(Cl)C(O)=C(Cl)C=C1CC1=CC(Cl)=C(O)C(Cl)=C1 WIFDRXSVRSCMMY-UHFFFAOYSA-N 0.000 description 1
- SKFDITTYPIDHIH-UHFFFAOYSA-N 2,6-dichloro-4-[2-(3,5-dichloro-4-hydroxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]phenol Chemical compound C1=C(Cl)C(O)=C(Cl)C=C1C(C(F)(F)F)(C(F)(F)F)C1=CC(Cl)=C(O)C(Cl)=C1 SKFDITTYPIDHIH-UHFFFAOYSA-N 0.000 description 1
- FTPMONYMJKJWHO-UHFFFAOYSA-N 2,6-dichloro-4-[9-(3,5-dichloro-4-hydroxyphenyl)fluoren-9-yl]phenol Chemical compound C1=C(Cl)C(O)=C(Cl)C=C1C1(C=2C=C(Cl)C(O)=C(Cl)C=2)C2=CC=CC=C2C2=CC=CC=C21 FTPMONYMJKJWHO-UHFFFAOYSA-N 0.000 description 1
- STMDPCBYJCIZOD-UHFFFAOYSA-N 2-(2,4-dinitroanilino)-4-methylpentanoic acid Chemical compound CC(C)CC(C(O)=O)NC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O STMDPCBYJCIZOD-UHFFFAOYSA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- RXAYEPUDXSKVHS-UHFFFAOYSA-N 2-(2-chlorophenyl)-4,5-bis(3-methoxyphenyl)-1h-imidazole Chemical class COC1=CC=CC(C2=C(NC(=N2)C=2C(=CC=CC=2)Cl)C=2C=C(OC)C=CC=2)=C1 RXAYEPUDXSKVHS-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- UIHRWPYOTGCOJP-UHFFFAOYSA-N 2-(2-fluorophenyl)-4,5-diphenyl-1h-imidazole Chemical class FC1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 UIHRWPYOTGCOJP-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- XIOGJAPOAUEYJO-UHFFFAOYSA-N 2-(2-methoxyphenyl)-4,5-diphenyl-1h-imidazole Chemical class COC1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 XIOGJAPOAUEYJO-UHFFFAOYSA-N 0.000 description 1
- LQZDDWKUQKQXGC-UHFFFAOYSA-N 2-(2-methylprop-2-enoxymethyl)oxirane Chemical compound CC(=C)COCC1CO1 LQZDDWKUQKQXGC-UHFFFAOYSA-N 0.000 description 1
- NNZJWOOLGPPUKX-UHFFFAOYSA-N 2-(2-phenylethenyl)-5-(trichloromethyl)-1,3,4-oxadiazole Chemical compound O1C(C(Cl)(Cl)Cl)=NN=C1C=CC1=CC=CC=C1 NNZJWOOLGPPUKX-UHFFFAOYSA-N 0.000 description 1
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 1
- QRHHZFRCJDAUNA-UHFFFAOYSA-N 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(OC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 QRHHZFRCJDAUNA-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- FWLHAQYOFMQTHQ-UHFFFAOYSA-N 2-N-[8-[[8-(4-aminoanilino)-10-phenylphenazin-10-ium-2-yl]amino]-10-phenylphenazin-10-ium-2-yl]-8-N,10-diphenylphenazin-10-ium-2,8-diamine hydroxy-oxido-dioxochromium Chemical compound O[Cr]([O-])(=O)=O.O[Cr]([O-])(=O)=O.O[Cr]([O-])(=O)=O.Nc1ccc(Nc2ccc3nc4ccc(Nc5ccc6nc7ccc(Nc8ccc9nc%10ccc(Nc%11ccccc%11)cc%10[n+](-c%10ccccc%10)c9c8)cc7[n+](-c7ccccc7)c6c5)cc4[n+](-c4ccccc4)c3c2)cc1 FWLHAQYOFMQTHQ-UHFFFAOYSA-N 0.000 description 1
- IUVCFHHAEHNCFT-INIZCTEOSA-N 2-[(1s)-1-[4-amino-3-(3-fluoro-4-propan-2-yloxyphenyl)pyrazolo[3,4-d]pyrimidin-1-yl]ethyl]-6-fluoro-3-(3-fluorophenyl)chromen-4-one Chemical compound C1=C(F)C(OC(C)C)=CC=C1C(C1=C(N)N=CN=C11)=NN1[C@@H](C)C1=C(C=2C=C(F)C=CC=2)C(=O)C2=CC(F)=CC=C2O1 IUVCFHHAEHNCFT-INIZCTEOSA-N 0.000 description 1
- MCNPOZMLKGDJGP-QPJJXVBHSA-N 2-[(e)-2-(4-methoxyphenyl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(OC)=CC=C1\C=C\C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 MCNPOZMLKGDJGP-QPJJXVBHSA-N 0.000 description 1
- JCJIZBQZPSZIBI-UHFFFAOYSA-N 2-[2,6-di(propan-2-yl)phenyl]benzo[de]isoquinoline-1,3-dione Chemical compound CC(C)C1=CC=CC(C(C)C)=C1N(C1=O)C(=O)C2=C3C1=CC=CC3=CC=C2 JCJIZBQZPSZIBI-UHFFFAOYSA-N 0.000 description 1
- WFSMVVDJSNMRAR-UHFFFAOYSA-N 2-[2-(2-ethoxyethoxy)ethoxy]ethanol Chemical compound CCOCCOCCOCCO WFSMVVDJSNMRAR-UHFFFAOYSA-N 0.000 description 1
- JIKJXWFVPDDJNU-UHFFFAOYSA-N 2-[2-(4-methoxyphenyl)ethenyl]-5-(trichloromethyl)-1,3,4-oxadiazole Chemical compound C1=CC(OC)=CC=C1C=CC1=NN=C(C(Cl)(Cl)Cl)O1 JIKJXWFVPDDJNU-UHFFFAOYSA-N 0.000 description 1
- CKJNFRSSXCVECF-UHFFFAOYSA-N 2-[2-(4-methylsulfanylphenyl)ethenyl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(SC)=CC=C1C=CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 CKJNFRSSXCVECF-UHFFFAOYSA-N 0.000 description 1
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 1
- QLIBJPGWWSHWBF-UHFFFAOYSA-N 2-aminoethyl methacrylate Chemical compound CC(=C)C(=O)OCCN QLIBJPGWWSHWBF-UHFFFAOYSA-N 0.000 description 1
- UGIJCMNGQCUTPI-UHFFFAOYSA-N 2-aminoethyl prop-2-enoate Chemical compound NCCOC(=O)C=C UGIJCMNGQCUTPI-UHFFFAOYSA-N 0.000 description 1
- ZKTNABJAOZQJCM-UHFFFAOYSA-N 2-bromo-4-[9-(3-bromo-4-hydroxyphenyl)fluoren-9-yl]phenol Chemical compound C1=C(Br)C(O)=CC=C1C1(C=2C=C(Br)C(O)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 ZKTNABJAOZQJCM-UHFFFAOYSA-N 0.000 description 1
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 1
- XBQRPFBBTWXIFI-UHFFFAOYSA-N 2-chloro-4-[2-(3-chloro-4-hydroxyphenyl)propan-2-yl]phenol Chemical compound C=1C=C(O)C(Cl)=CC=1C(C)(C)C1=CC=C(O)C(Cl)=C1 XBQRPFBBTWXIFI-UHFFFAOYSA-N 0.000 description 1
- USYCYUZCESSCGY-UHFFFAOYSA-N 2-chloro-4-[9-(3-chloro-4-hydroxyphenyl)fluoren-9-yl]phenol Chemical compound C1=C(Cl)C(O)=CC=C1C1(C=2C=C(Cl)C(O)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 USYCYUZCESSCGY-UHFFFAOYSA-N 0.000 description 1
- SZTBMYHIYNGYIA-UHFFFAOYSA-N 2-chloroacrylic acid Chemical compound OC(=O)C(Cl)=C SZTBMYHIYNGYIA-UHFFFAOYSA-N 0.000 description 1
- ONIKNECPXCLUHT-UHFFFAOYSA-N 2-chlorobenzoyl chloride Chemical compound ClC(=O)C1=CC=CC=C1Cl ONIKNECPXCLUHT-UHFFFAOYSA-N 0.000 description 1
- SBYMUDUGTIKLCR-UHFFFAOYSA-N 2-chloroethenylbenzene Chemical compound ClC=CC1=CC=CC=C1 SBYMUDUGTIKLCR-UHFFFAOYSA-N 0.000 description 1
- 125000004182 2-chlorophenyl group Chemical group [H]C1=C([H])C(Cl)=C(*)C([H])=C1[H] 0.000 description 1
- YBXYCBGDIALKAK-UHFFFAOYSA-N 2-chloroprop-2-enamide Chemical compound NC(=O)C(Cl)=C YBXYCBGDIALKAK-UHFFFAOYSA-N 0.000 description 1
- OYUNTGBISCIYPW-UHFFFAOYSA-N 2-chloroprop-2-enenitrile Chemical compound ClC(=C)C#N OYUNTGBISCIYPW-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- WROUWQQRXUBECT-UHFFFAOYSA-N 2-ethylacrylic acid Chemical compound CCC(=C)C(O)=O WROUWQQRXUBECT-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- KYQXCPBNIIFERU-UHFFFAOYSA-N 2-fluoro-4-[9-(3-fluoro-4-hydroxyphenyl)fluoren-9-yl]phenol Chemical compound C1=C(F)C(O)=CC=C1C1(C=2C=C(F)C(O)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 KYQXCPBNIIFERU-UHFFFAOYSA-N 0.000 description 1
- VZMLJEYQUZKERO-UHFFFAOYSA-N 2-hydroxy-1-(2-methylphenyl)-2-phenylethanone Chemical compound CC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 VZMLJEYQUZKERO-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- CTHJQRHPNQEPAB-UHFFFAOYSA-N 2-methoxyethenylbenzene Chemical compound COC=CC1=CC=CC=C1 CTHJQRHPNQEPAB-UHFFFAOYSA-N 0.000 description 1
- LETDRANQSOEVCX-UHFFFAOYSA-N 2-methyl-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 LETDRANQSOEVCX-UHFFFAOYSA-N 0.000 description 1
- ODGCZQFTJDEYNI-UHFFFAOYSA-N 2-methylcyclohex-3-ene-1,2-dicarboxylic acid Chemical compound OC(=O)C1(C)C=CCCC1C(O)=O ODGCZQFTJDEYNI-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- AXYQEGMSGMXGGK-UHFFFAOYSA-N 2-phenoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(=O)C(C=1C=CC=CC=1)OC1=CC=CC=C1 AXYQEGMSGMXGGK-UHFFFAOYSA-N 0.000 description 1
- VZQSBJKDSWXLKX-UHFFFAOYSA-N 3-(3-hydroxyphenyl)phenol Chemical compound OC1=CC=CC(C=2C=C(O)C=CC=2)=C1 VZQSBJKDSWXLKX-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- SNCMCDMEYCLVBO-UHFFFAOYSA-N 3-aminopropyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCN SNCMCDMEYCLVBO-UHFFFAOYSA-N 0.000 description 1
- OTKLRHWBZHQJOP-UHFFFAOYSA-N 3-aminopropyl prop-2-enoate Chemical compound NCCCOC(=O)C=C OTKLRHWBZHQJOP-UHFFFAOYSA-N 0.000 description 1
- AYKYXWQEBUNJCN-UHFFFAOYSA-N 3-methylfuran-2,5-dione Chemical compound CC1=CC(=O)OC1=O AYKYXWQEBUNJCN-UHFFFAOYSA-N 0.000 description 1
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 1
- JIGUICYYOYEXFS-UHFFFAOYSA-N 3-tert-butylbenzene-1,2-diol Chemical compound CC(C)(C)C1=CC=CC(O)=C1O JIGUICYYOYEXFS-UHFFFAOYSA-N 0.000 description 1
- RXNYJUSEXLAVNQ-UHFFFAOYSA-N 4,4'-Dihydroxybenzophenone Chemical compound C1=CC(O)=CC=C1C(=O)C1=CC=C(O)C=C1 RXNYJUSEXLAVNQ-UHFFFAOYSA-N 0.000 description 1
- UITKHKNFVCYWNG-UHFFFAOYSA-N 4-(3,4-dicarboxybenzoyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 UITKHKNFVCYWNG-UHFFFAOYSA-N 0.000 description 1
- KQSIVRHDEPHUII-UHFFFAOYSA-N 4-(4-hydroxy-3,5-dimethylphenoxy)-2,6-dimethylphenol Chemical compound CC1=C(O)C(C)=CC(OC=2C=C(C)C(O)=C(C)C=2)=C1 KQSIVRHDEPHUII-UHFFFAOYSA-N 0.000 description 1
- SUCTVKDVODFXFX-UHFFFAOYSA-N 4-(4-hydroxy-3,5-dimethylphenyl)sulfonyl-2,6-dimethylphenol Chemical compound CC1=C(O)C(C)=CC(S(=O)(=O)C=2C=C(C)C(O)=C(C)C=2)=C1 SUCTVKDVODFXFX-UHFFFAOYSA-N 0.000 description 1
- NZGQHKSLKRFZFL-UHFFFAOYSA-N 4-(4-hydroxyphenoxy)phenol Chemical compound C1=CC(O)=CC=C1OC1=CC=C(O)C=C1 NZGQHKSLKRFZFL-UHFFFAOYSA-N 0.000 description 1
- YJAQDSUXGOUHLT-UHFFFAOYSA-N 4-[(4-hydroxy-3,5-dimethylphenyl)-dimethylsilyl]-2,6-dimethylphenol Chemical compound CC1=C(O)C(C)=CC([Si](C)(C)C=2C=C(C)C(O)=C(C)C=2)=C1 YJAQDSUXGOUHLT-UHFFFAOYSA-N 0.000 description 1
- AAABNODEAACFII-UHFFFAOYSA-N 4-[(4-hydroxyphenyl)-dimethylsilyl]phenol Chemical compound C=1C=C(O)C=CC=1[Si](C)(C)C1=CC=C(O)C=C1 AAABNODEAACFII-UHFFFAOYSA-N 0.000 description 1
- QIOCFZAEFQTCSO-UHFFFAOYSA-N 4-[1,1,1,3,3,3-hexafluoro-2-(4-hydroxy-3,5-dimethylphenyl)propan-2-yl]-2,6-dimethylphenol Chemical compound CC1=C(O)C(C)=CC(C(C=2C=C(C)C(O)=C(C)C=2)(C(F)(F)F)C(F)(F)F)=C1 QIOCFZAEFQTCSO-UHFFFAOYSA-N 0.000 description 1
- ODJUOZPKKHIEOZ-UHFFFAOYSA-N 4-[2-(4-hydroxy-3,5-dimethylphenyl)propan-2-yl]-2,6-dimethylphenol Chemical compound CC1=C(O)C(C)=CC(C(C)(C)C=2C=C(C)C(O)=C(C)C=2)=C1 ODJUOZPKKHIEOZ-UHFFFAOYSA-N 0.000 description 1
- NUDSREQIJYWLRA-UHFFFAOYSA-N 4-[9-(4-hydroxy-3-methylphenyl)fluoren-9-yl]-2-methylphenol Chemical compound C1=C(O)C(C)=CC(C2(C3=CC=CC=C3C3=CC=CC=C32)C=2C=C(C)C(O)=CC=2)=C1 NUDSREQIJYWLRA-UHFFFAOYSA-N 0.000 description 1
- 125000004203 4-hydroxyphenyl group Chemical group [H]OC1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- XHLKOHSAWQPOFO-UHFFFAOYSA-N 5-phenyl-1h-imidazole Chemical class N1C=NC=C1C1=CC=CC=C1 XHLKOHSAWQPOFO-UHFFFAOYSA-N 0.000 description 1
- JVERADGGGBYHNP-UHFFFAOYSA-N 5-phenylbenzene-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C(C(=O)O)=CC(C=2C=CC=CC=2)=C1C(O)=O JVERADGGGBYHNP-UHFFFAOYSA-N 0.000 description 1
- YWFPGFJLYRKYJZ-UHFFFAOYSA-N 9,9-bis(4-hydroxyphenyl)fluorene Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 YWFPGFJLYRKYJZ-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 1
- JNMFFGIHTINAEX-UHFFFAOYSA-N ClC1=CC=C(C=C1)C1=NC(=NC(=N1)C(Cl)(Cl)Cl)C(Cl)(Cl)Cl.C1(=CC=CC=C1)C1=NC(=NC(=N1)C(Cl)(Cl)Cl)C(Cl)(Cl)Cl Chemical compound ClC1=CC=C(C=C1)C1=NC(=NC(=N1)C(Cl)(Cl)Cl)C(Cl)(Cl)Cl.C1(=CC=CC=C1)C1=NC(=NC(=N1)C(Cl)(Cl)Cl)C(Cl)(Cl)Cl JNMFFGIHTINAEX-UHFFFAOYSA-N 0.000 description 1
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 description 1
- GYCMBHHDWRMZGG-UHFFFAOYSA-N Methylacrylonitrile Chemical compound CC(=C)C#N GYCMBHHDWRMZGG-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- XLPPOMVUGQCGRD-UHFFFAOYSA-N OC1=C(C=C(C=C1C)C1(C2=CC=CC=C2C=2C=CC=CC12)C1=CC(=C(C(=C1)C)O)C)C.OC1=C(C=C(C=C1)C1(C2=CC=CC=C2C=2C=CC=CC12)C1=CC(=C(C=C1)O)OC)OC Chemical compound OC1=C(C=C(C=C1C)C1(C2=CC=CC=C2C=2C=CC=CC12)C1=CC(=C(C(=C1)C)O)C)C.OC1=C(C=C(C=C1)C1(C2=CC=CC=C2C=2C=CC=CC12)C1=CC(=C(C=C1)O)OC)OC XLPPOMVUGQCGRD-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical group OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- KYPYTERUKNKOLP-UHFFFAOYSA-N Tetrachlorobisphenol A Chemical compound C=1C(Cl)=C(O)C(Cl)=CC=1C(C)(C)C1=CC(Cl)=C(O)C(Cl)=C1 KYPYTERUKNKOLP-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- IAXXETNIOYFMLW-COPLHBTASA-N [(1s,3s,4s)-4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl] 2-methylprop-2-enoate Chemical compound C1C[C@]2(C)[C@@H](OC(=O)C(=C)C)C[C@H]1C2(C)C IAXXETNIOYFMLW-COPLHBTASA-N 0.000 description 1
- SEEVRZDUPHZSOX-WPWMEQJKSA-N [(e)-1-[9-ethyl-6-(2-methylbenzoyl)carbazol-3-yl]ethylideneamino] acetate Chemical compound C=1C=C2N(CC)C3=CC=C(C(\C)=N\OC(C)=O)C=C3C2=CC=1C(=O)C1=CC=CC=C1C SEEVRZDUPHZSOX-WPWMEQJKSA-N 0.000 description 1
- ARNIZPSLPHFDED-UHFFFAOYSA-N [4-(dimethylamino)phenyl]-(4-methoxyphenyl)methanone Chemical compound C1=CC(OC)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 ARNIZPSLPHFDED-UHFFFAOYSA-N 0.000 description 1
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 125000005396 acrylic acid ester group Chemical group 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical group C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 125000003158 alcohol group Chemical group 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 150000008365 aromatic ketones Chemical class 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- ZCILODAAHLISPY-UHFFFAOYSA-N biphenyl ether Natural products C1=C(CC=C)C(O)=CC(OC=2C(=CC(CC=C)=CC=2)O)=C1 ZCILODAAHLISPY-UHFFFAOYSA-N 0.000 description 1
- VCCBEIPGXKNHFW-UHFFFAOYSA-N biphenyl-4,4'-diol Chemical compound C1=CC(O)=CC=C1C1=CC=C(O)C=C1 VCCBEIPGXKNHFW-UHFFFAOYSA-N 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- CNASVLXXMGAQGK-UHFFFAOYSA-N bis(3,5-dichloro-4-hydroxyphenyl)methanone Chemical compound C1=C(Cl)C(O)=C(Cl)C=C1C(=O)C1=CC(Cl)=C(O)C(Cl)=C1 CNASVLXXMGAQGK-UHFFFAOYSA-N 0.000 description 1
- JWAPUVVSOVJCJB-UHFFFAOYSA-N bis(4-hydroxy-3,5-dimethylphenyl)methanone Chemical compound CC1=C(O)C(C)=CC(C(=O)C=2C=C(C)C(O)=C(C)C=2)=C1 JWAPUVVSOVJCJB-UHFFFAOYSA-N 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- QDVNNDYBCWZVTI-UHFFFAOYSA-N bis[4-(ethylamino)phenyl]methanone Chemical compound C1=CC(NCC)=CC=C1C(=O)C1=CC=C(NCC)C=C1 QDVNNDYBCWZVTI-UHFFFAOYSA-N 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- ZFVMWEVVKGLCIJ-UHFFFAOYSA-N bisphenol AF Chemical compound C1=CC(O)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(O)C=C1 ZFVMWEVVKGLCIJ-UHFFFAOYSA-N 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 description 1
- YACLQRRMGMJLJV-UHFFFAOYSA-N chloroprene Chemical compound ClC(=C)C=C YACLQRRMGMJLJV-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 229930016911 cinnamic acid Natural products 0.000 description 1
- 235000013985 cinnamic acid Nutrition 0.000 description 1
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 1
- 229940018557 citraconic acid Drugs 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- IFDVQVHZEKPUSC-UHFFFAOYSA-N cyclohex-3-ene-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCC=CC1C(O)=O IFDVQVHZEKPUSC-UHFFFAOYSA-N 0.000 description 1
- QSAWQNUELGIYBC-UHFFFAOYSA-N cyclohexane-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCCCC1C(O)=O QSAWQNUELGIYBC-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 125000006159 dianhydride group Chemical group 0.000 description 1
- 150000001993 dienes Chemical class 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- OCDWICPYKQMQSQ-UHFFFAOYSA-N docosyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCCCCCCCCCCCCCOC(=O)C(C)=C OCDWICPYKQMQSQ-UHFFFAOYSA-N 0.000 description 1
- WNAHIZMDSQCWRP-UHFFFAOYSA-N dodecane-1-thiol Chemical compound CCCCCCCCCCCCS WNAHIZMDSQCWRP-UHFFFAOYSA-N 0.000 description 1
- GMSCBRSQMRDRCD-UHFFFAOYSA-N dodecyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCCCOC(=O)C(C)=C GMSCBRSQMRDRCD-UHFFFAOYSA-N 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 150000002168 ethanoic acid esters Chemical class 0.000 description 1
- MEGHWIAOTJPCHQ-UHFFFAOYSA-N ethenyl butanoate Chemical compound CCCC(=O)OC=C MEGHWIAOTJPCHQ-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000001815 facial effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- 125000003709 fluoroalkyl group Chemical group 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 125000003827 glycol group Chemical group 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- ZNAOFAIBVOMLPV-UHFFFAOYSA-N hexadecyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCCCCCCCOC(=O)C(C)=C ZNAOFAIBVOMLPV-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 125000004356 hydroxy functional group Chemical group O* 0.000 description 1
- CFBXDFZIDLWOSO-UHFFFAOYSA-N icosyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCCCCCCCCCCCOC(=O)C(C)=C CFBXDFZIDLWOSO-UHFFFAOYSA-N 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229940119545 isobornyl methacrylate Drugs 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 125000000040 m-tolyl group Chemical group [H]C1=C([H])C(*)=C([H])C(=C1[H])C([H])([H])[H] 0.000 description 1
- 150000002689 maleic acids Chemical class 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- HNEGQIOMVPPMNR-NSCUHMNNSA-N mesaconic acid Chemical compound OC(=O)C(/C)=C/C(O)=O HNEGQIOMVPPMNR-NSCUHMNNSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 1
- 229940086559 methyl benzoin Drugs 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- XJRBAMWJDBPFIM-UHFFFAOYSA-N methyl vinyl ether Chemical compound COC=C XJRBAMWJDBPFIM-UHFFFAOYSA-N 0.000 description 1
- HNEGQIOMVPPMNR-UHFFFAOYSA-N methylfumaric acid Natural products OC(=O)C(C)=CC(O)=O HNEGQIOMVPPMNR-UHFFFAOYSA-N 0.000 description 1
- 125000002816 methylsulfanyl group Chemical group [H]C([H])([H])S[*] 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 150000002763 monocarboxylic acids Chemical class 0.000 description 1
- BSCJIBOZTKGXQP-UHFFFAOYSA-N n-(2-hydroxyethyl)-2-methylprop-2-enamide Chemical compound CC(=C)C(=O)NCCO BSCJIBOZTKGXQP-UHFFFAOYSA-N 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 238000000424 optical density measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 230000002688 persistence Effects 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- JXRQWZOCXXIAIA-UHFFFAOYSA-N prop-2-enenitrile cyanide Chemical class C(C=C)#N.[C-]#N JXRQWZOCXXIAIA-UHFFFAOYSA-N 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- NHARPDSAXCBDDR-UHFFFAOYSA-N propyl 2-methylprop-2-enoate Chemical compound CCCOC(=O)C(C)=C NHARPDSAXCBDDR-UHFFFAOYSA-N 0.000 description 1
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 150000003440 styrenes Chemical class 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- QJVXKWHHAMZTBY-GCPOEHJPSA-N syringin Chemical compound COC1=CC(\C=C\CO)=CC(OC)=C1O[C@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 QJVXKWHHAMZTBY-GCPOEHJPSA-N 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 150000000000 tetracarboxylic acids Chemical class 0.000 description 1
- ATZHWSYYKQKSSY-UHFFFAOYSA-N tetradecyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCCCCCOC(=O)C(C)=C ATZHWSYYKQKSSY-UHFFFAOYSA-N 0.000 description 1
- UFDHBDMSHIXOKF-UHFFFAOYSA-N tetrahydrophthalic acid Natural products OC(=O)C1=C(C(O)=O)CCCC1 UFDHBDMSHIXOKF-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Optical Filters (AREA)
- Liquid Crystal (AREA)
- Materials For Photolithography (AREA)
Abstract
Description
本発明は、アルカリ現像感光性樹脂組成物及びこれを用いて形成した隔壁並びに表示素子に関し、詳しくはインクジェット印刷法での表示素子の隔壁形成に適したアルカリ現像感光性樹脂組成物及びこれを用いて形成した隔壁並びに表示素子に関するものである。 The present invention relates to an alkali-developable photosensitive resin composition, partition walls formed using the same, and a display element, and more particularly, an alkali-developable photosensitive resin composition suitable for forming partition walls of a display element in an ink jet printing method and the same. And a display element.
カラーフィルターは、通常、ガラス、プラスチックシート等の透明基板の表面に黒色のマトリックスを形成し、続いて、赤、緑、青等の3種以上の異なる色相を順次、ストライプ状あるいはモザイク状等の色パターンで形成される。パターンサイズはカラーフィルターの用途並びにそれぞれの色により異なるが5〜700μm程度である。また、重ね合わせの位置精度は数μm〜数十μmであり、寸法精度の高い微細加工技術により製造されている。 A color filter usually forms a black matrix on the surface of a transparent substrate such as glass or plastic sheet, and then sequentially applies three or more different hues such as red, green and blue in a striped or mosaic shape. It is formed with a color pattern. The pattern size varies depending on the use of the color filter and each color, but is about 5 to 700 μm. Further, the positional accuracy of superposition is several μm to several tens of μm, and it is manufactured by a fine processing technique with high dimensional accuracy.
カラーフィルターの代表的な製造方法としては、染色法、印刷法、顔料分散法、電着法等がある。これらのうち、特に、色材料を含有する光重合性組成物を透明基板上に塗布し、画像露光、現像、必要により硬化を繰り返すことでカラーフィルター画像を形成する顔料分散法は、カラーフィルター画素の位置、膜厚等の精度が高く、耐光性・耐熱性等の耐久性に優れ、ピンホール等の欠陥が少ないため、広く採用されている。 Typical methods for producing a color filter include a dyeing method, a printing method, a pigment dispersion method, and an electrodeposition method. Among these, in particular, a pigment dispersion method for forming a color filter image by applying a photopolymerizable composition containing a color material on a transparent substrate and repeating image exposure, development, and curing as necessary is a color filter pixel. Is widely used because of its high accuracy of position, film thickness, etc., excellent durability such as light resistance and heat resistance, and few defects such as pinholes.
一方、ブラックマトリックスは赤、緑、青の色パターンの間に格子状、ストライプ状又はモザイク状に配置するのが一般的であり、各色間の混色抑制によるコントラスト向上あるいは光漏れによるTFTの誤動作を防ぐ役割を果たしている。このため、ブラックマトリックスには高い遮光性が要求される。従来、ブラックマトリクスはクロム等の金属膜で形成するか、遮光材を含有した感光性樹脂を用いてフォトリソ法で形成するのが一般的である。 On the other hand, a black matrix is generally arranged in a grid, stripe, or mosaic pattern between red, green, and blue color patterns. This improves contrast by suppressing color mixing between colors or prevents TFT malfunction due to light leakage. It plays a role to prevent. For this reason, the black matrix is required to have high light shielding properties. Conventionally, the black matrix is generally formed of a metal film such as chromium, or is formed by a photolithography method using a photosensitive resin containing a light shielding material.
しかしながら、上記方法を用いて色パターンを形成すると、各色ごとに露光と現像の工程を行わなければならないため、少なくとも3回のフォト工程を必要として、コストがかかる。ゆえに、低コストでカラーフィルターを提供できるインクジェット法が提案されている。これは、画素が構成される領域に、赤、青、緑のインキをそれぞれ必要な画素のみに同時に噴射塗布し硬化させて画素形成する方法であり、あらかじめフォト工程で隔壁を形成し、その画素部にインキを吐出する方法が提案されている。ところが、この方法では、各色領域の滲みや隣り合う領域間の混色が起こりうる。したがって、この隔壁を構成する材料には、着色剤の着色目的領域外への拡がりが抑制される特性が求められている。例えば、特許文献2にはインキと隔壁表面との静的接触角が40〜55°であれば混色を効果的に避けることができるとの例示がある。一方、動的接触角を考えるときは、そのインキと隔壁表面との前進角が大きいことが好ましいと考えられる。 However, when a color pattern is formed using the above-described method, an exposure and development process must be performed for each color, which requires at least three photo processes and is expensive. Therefore, an inkjet method that can provide a color filter at low cost has been proposed. This is a method in which red, blue and green inks are sprayed and applied to only the necessary pixels at the same time, and cured to form the pixels. There has been proposed a method of discharging ink to the portion. However, with this method, bleeding of each color region and color mixing between adjacent regions can occur. Therefore, the material that constitutes the partition walls is required to have a property that suppresses the spread of the colorant outside the coloring target region. For example, Patent Document 2 exemplifies that color mixing can be effectively avoided if the static contact angle between the ink and the partition wall surface is 40 to 55 °. On the other hand, when considering the dynamic contact angle, it is considered preferable that the advancing angle between the ink and the partition wall surface is large.
また、インクジェットヘッドより吐出されたインキが画素内と共に隔壁上に重なった場合、その隔壁表面のインキが、表面撥インキ性によって画素内に戻る、自己修復作用が求められている。特に、画素が微細化される高精細化要求においてはインクジェットから吐出された液滴がブラックマトリクスに重なる頻度が高くなること、各色領域におけるコーナー部においてインキの展開性を補うために隔壁部と重ね打ちすることも検討されている(特許文献7参照)。隔壁部に重なったインキが画素内に戻る場合は、インキの転落角が小さいことが好ましいことが予測される。同様に塗布型有機EL材料を使用した表示素子を形成する際に、フォトプロセスで隔壁を形成した後に、塗布型有機EL材料をインクジェット塗布法で隔壁内に塗工する手段が提案されている。 In addition, when the ink ejected from the ink jet head overlaps with the inside of the pixel and on the partition wall, a self-repairing action is required in which the ink on the surface of the partition wall returns to the pixel due to surface ink repellency. In particular, in the demand for higher definition where pixels are miniaturized, the frequency of droplets ejected from the inkjet overlapping the black matrix increases, and in order to compensate for the ink spreadability at the corners in each color region, they overlap with the partition walls. It is also considered to strike (see Patent Document 7). When the ink that has overlapped the partition wall returns to the inside of the pixel, it is predicted that it is preferable that the falling angle of the ink is small. Similarly, when forming a display element using a coating type organic EL material, a means for coating the coating type organic EL material in the partitioning by an ink jet coating method after forming the partitioning by a photo process has been proposed.
このような目的における隔壁材料を与えるフォトレジスト組成物として、撥インキ性を付与する成分としてフッ素系もしくはシリコン系の化合物を混合する方法が提案されている。例えば特許文献1にはフルオロアルキル基含有(メタ)アクリレート単量体とシリコーン鎖含有エチレン性不飽和単量体との共重合体を含有するフォトレジスト組成物が開示されている。しかしながら、前記共重合体の添加量はフォトレジスト組成物固形分に対して0.001〜0.05重量%であり、このような低含有量では撥インキ性が不足する。 As a photoresist composition for providing a partition material for such purposes, a method of mixing a fluorine-based or silicon-based compound as a component imparting ink repellency has been proposed. For example, Patent Document 1 discloses a photoresist composition containing a copolymer of a fluoroalkyl group-containing (meth) acrylate monomer and a silicone chain-containing ethylenically unsaturated monomer. However, the addition amount of the copolymer is 0.001 to 0.05% by weight with respect to the solid content of the photoresist composition, and ink repellency is insufficient at such a low content.
特許文献2には、ヘキサフルオロプロピレンと不飽和カルボン酸及び/又は不飽和カルボン酸無水物との共重合体とフッ素有機化合物との組成物が例示されている。しかしながら、ヘキサフルオロプロピレンの重合体を得るには高圧での重合が不可欠であり、その分子量も2000以下と小さい。また、これを補助するフッ素有機化合物も界面活性剤系であって、その撥インキ性持続に問題が生じる。 Patent Document 2 exemplifies a composition of a copolymer of hexafluoropropylene, an unsaturated carboxylic acid and / or an unsaturated carboxylic acid anhydride, and a fluorine organic compound. However, in order to obtain a polymer of hexafluoropropylene, polymerization at high pressure is indispensable, and its molecular weight is as small as 2000 or less. Moreover, the fluorine organic compound which assists this is also a surfactant system, and a problem arises in its ink repellency persistence.
特許文献3には、CH2=CH(R1)COOXRf(Rfは炭素数4〜6のパーフルオロアルキル基を示す)を単量体としてフッ素原子含有率が7〜35重量%である含フッ素樹脂を特徴とするレジスト組成物が例示されている。この場合、R1基は、H、CH3もしくはCF3に限定されている。また、特許文献4には、酸性基および分子内に3個以上のエチレン性二重結合を有するアルカリ可溶の感光性樹脂と、水素原子の少なくとも1つがフッ素原子に置換された炭素数20以下のアルキル基を有する重合単位、及びエチレン性二重結合を有する重合単位を共重合した重合体からなる撥インキ剤とを含有するネガ型感光性樹脂組成物が述べられている。この撥インキ剤におけるフッ素含有重合単位も前述特許文献3と同等のものである。いずれの場合も、フォトレジスト固形分中の含フッ素化合物の割合が増すと、支持基板に対する密着性の低下ならびに表面平滑性の悪化が指摘されている。 Patent Document 3 discloses that CH 2 = CH (R 1 ) COOXR f (R f represents a perfluoroalkyl group having 4 to 6 carbon atoms) as a monomer and a fluorine atom content of 7 to 35% by weight. The resist composition characterized by the fluorine-containing resin is illustrated. In this case, the R 1 group is limited to H, CH 3 or CF 3 . Further, Patent Document 4 discloses an alkali-soluble photosensitive resin having an acidic group and three or more ethylenic double bonds in the molecule, and a carbon number of 20 or less in which at least one hydrogen atom is substituted with a fluorine atom. A negative photosensitive resin composition containing a polymer unit having an alkyl group and an ink repellent agent comprising a polymer obtained by copolymerizing a polymer unit having an ethylenic double bond is described. The fluorine-containing polymer unit in this ink repellent is also equivalent to that of Patent Document 3. In either case, when the ratio of the fluorine-containing compound in the photoresist solid content is increased, it is pointed out that the adhesion to the support substrate is lowered and the surface smoothness is deteriorated.
特許文献5には、ブラックマトリクスに含まれる樹脂と親和性の少ないケイ素及び/又はフッ素の原子を含む撥インキ剤を用い、現像後にブラックマトリクスを150〜230℃で焼成することで撥インキ剤を表面に移行させて着色インキとの接触角を30〜60°に制御する表面撥インキ性ブラックマトリクスの製造方法が述べられている。このうち、撥インキ剤の具体例として、主鎖または側鎖に有機シリコーンを有するもの、フッ化ビニリデン等とのフッ素含有モノマーとの共重合によるフッ素樹脂を例示している。ところが、界面活性剤等の含シリコーンオリゴマーならびにフッ素系オリゴマーは、焼成後に表面に移行してきてもその撥インキ性は、その後の洗浄や時間の経過とともに低下することが問題である。 In Patent Document 5, an ink repellent agent containing silicon and / or fluorine atoms having a low affinity with a resin contained in a black matrix is used, and the black matrix is baked at 150 to 230 ° C. after development to obtain the ink repellent agent. A method for producing a surface ink-repellent black matrix is described in which the contact angle with the colored ink is controlled to 30 to 60 ° by transferring to the surface. Among these, specific examples of the ink repellent agent include those having an organic silicone in the main chain or side chain, and a fluororesin by copolymerization with a fluorine-containing monomer such as vinylidene fluoride. However, silicone-containing oligomers such as surfactants and fluorine-based oligomers have a problem that even if they move to the surface after firing, their ink repellency decreases with subsequent washing and the passage of time.
また、遮光性樹脂マトリクスを形成するのに適したフォトレジストとして、特許文献6では、特定の芳香族エポキシ化合物と(メタ)アクリル酸との反応物を更に多塩基酸カルボン酸又はその無水物と反応させて得られた不飽和基含有化合物を樹脂主成分として含むブラックレジストが、高遮光率を有し、フォトリソグラフィー法によるファインパターンの形成が容易であって、しかも、絶縁性、耐熱性、密着性、室温保存安定性にも優れた遮光性薄膜形成用組成物となることを報告している。しかしながら、この特許文献6では、その撥インキ特性について触れられておらず、相溶性に関する言及もない。
従って、本発明の目的は、上記の問題を解決し、すなわち紫外光(300nm〜450nm)に反応する感光性成分を含んだレジスト組成物(感光性樹脂組成物)において撥インキ剤の相溶性に優れ、製膜後の表面外観ならびにパターン形状が良好であり、また、表面撥インキ性に優れる一方で、通常の洗浄や時間が経過しても表面撥インキ性を維持することができる表示素子向け隔壁形成に適した感光性樹脂組成物を与えるものである。 Therefore, the object of the present invention is to solve the above-mentioned problems, that is, to make the ink repellent agent compatible in a resist composition (photosensitive resin composition) containing a photosensitive component that reacts with ultraviolet light (300 nm to 450 nm). For display elements that have excellent surface appearance and pattern shape after film formation, and excellent surface ink repellency, while maintaining surface ink repellency even after normal cleaning and time. The present invention provides a photosensitive resin composition suitable for partition wall formation.
すなわち、本発明は、次のとおりである。 That is, the present invention is as follows.
(1)酸性基、及び下記式(1)で示される構造の置換基を有した共重合体からなる含フッ素樹脂(A)と、紫外光(300nm〜450nm)に反応するアルカリ現像感光性成分とを少なくとも含有したアルカリ現像感光性樹脂組成物であって、含フッ素樹脂(A)は、式(1)で示される構造の置換基の占める重量割合が15〜50重量%であり、尚且つ、酸価が10〜100mgKOH/gであると共に、平均分子量が2000〜20000の範囲であり、
(2)前記含フッ素樹脂(A)のほかに下記(B)〜(D)成分;(B)一分子中に酸性基と2つ以上のエチレン性二重結合とを有するアルカリ現像性オリゴマー、(C)少なくとも1分子中に3個以上のエチレン性二重結合を有する光重合性モノマー、及び(D)光重合開始剤;を必須成分として含む上記(1)項記載のアルカリ現像感光性樹脂組成物。 (2) In addition to the fluororesin (A), the following components (B) to (D); (B) an alkali-developable oligomer having an acidic group and two or more ethylenic double bonds in one molecule; The alkali-developable photosensitive resin according to the above item (1), comprising (C) a photopolymerizable monomer having at least 3 ethylenic double bonds in one molecule, and (D) a photopolymerization initiator as essential components. Composition.
(3)前記含フッ素樹脂(A)がエチレン性二重結合を有することを特徴とする上記(1)又は(2)項に記載のアルカリ現像感光性樹脂組成物。 (3) The alkali-developable photosensitive resin composition as described in (1) or (2) above, wherein the fluororesin (A) has an ethylenic double bond.
(4)前記含フッ素樹脂(A)が、下記一般式(2)で表される単量体の少なくとも1種30〜80重量部と、アルカリ可溶性基を有する単量体の少なくとも1種1〜30重量部とを共重合させてなることを特徴とする上記(1)〜(3)項のいずれかに記載のアルカリ現像感光性樹脂組成物。
CH2=C(Rn)−COO−Y−O-Rf (2)
(式中、Rnは水素またはメチル基を示し、Yはフッ素原子を含まない2価の有機基を示し、Rfは式(1)に示す含フッ素基である)
(4) The fluororesin (A) is 30 to 80 parts by weight of at least one monomer represented by the following general formula (2), and at least one 1 to 1 monomer having an alkali-soluble group. The alkali-developable photosensitive resin composition according to any one of (1) to (3) above, wherein 30 parts by weight are copolymerized.
CH 2 = C (Rn) -COO-Y-O-Rf (2)
(In the formula, Rn represents hydrogen or a methyl group, Y represents a divalent organic group containing no fluorine atom, and Rf represents a fluorine-containing group represented by the formula (1)).
(5)前記含フッ素樹脂(A)が、下記一般式(3)で表されるランダム又はブロック共重合体であることを特徴とする上記(1)〜(4)項のいずれかに記載のアルカリ現像感光性樹脂組成物。
(6)前記(B)成分は、下記一般式(4)で表されるビスフェノール類から誘導される2個のグリシジルエーテル基を有するエポキシ化合物と(メタ)アクリル酸との反応物を更に多塩基酸カルボン酸又はその無水物と反応させて得られたアルカリ現像性不飽和基含有オリゴマーである上記(2)項記載のアルカリ現像感光性樹脂組成物。
(7)上記(1)〜(6)項のいずれかのアルカリ現像感光性樹脂組成物に対して、(E)黒色有機顔料、混色有機顔料及び遮光材からなる群から選ばれた少なくとも1種を分散してなる遮光性分散液を添加すると共に、全固形分100重量部に対して(E)成分が25〜60重量部配合されていることを特徴とする遮光性の感光性樹脂組成物。 (7) At least one selected from the group consisting of (E) a black organic pigment, a mixed color organic pigment, and a light-shielding material with respect to the alkali development photosensitive resin composition according to any one of (1) to (6) above A light-shielding photosensitive resin composition, wherein a light-shielding dispersion liquid is added and 25 to 60 parts by weight of component (E) is blended with respect to 100 parts by weight of the total solid content .
(8)上記(7)項に記載の表示素子向け隔壁形成用感光性樹脂組成物。 (8) The photosensitive resin composition for partition formation for display elements as described in said (7) term.
(9)上記(8)項に記載のカラーフィルター隔壁形成用感光性樹脂組成物。 (9) The photosensitive resin composition for forming color filter partition walls as described in (8) above.
(10)上記(8)又は(9)項に記載の感光性樹脂組成物を基板上に塗布し、乾燥した後、(a)紫外線露光装置による露光、(b)アルカリ水溶液による現像、及び(c)熱焼成の各工程を必須として得られる隔壁であって、膜厚が1.5〜3μmであることを特徴とする表示素子向け隔壁。 (10) The photosensitive resin composition described in the above item (8) or (9) is applied on a substrate and dried, then (a) exposure with an ultraviolet exposure device, (b) development with an aqueous alkaline solution, and ( c) A partition wall for a display element, which is obtained by using each step of thermal baking as essential, and has a film thickness of 1.5 to 3 μm.
(11)上記(10)項記載の隔壁内にインクジェット印刷法により画素を形成した表示素子。 (11) A display element in which pixels are formed in the partition wall according to the above (10) by an ink jet printing method.
本発明によれば、紫外光(300nm〜450nm)に反応する感光性成分を含んだレジスト組成物において撥インキ剤の相溶性に優れ、製膜後の表面外観ならびにパターン形状が良好であり、表面撥インキ性に優れる、表示素子向け隔壁形成に適した感光性樹脂組成物を与えることができる。このため、例えばインクジェットプロセスによる表示素子の製造法において、大気圧プラズマによる表面撥インキ処理の設備を必要としない低コスト化を達成でき、かつ歩留まり向上に貢献する材料を好適に提供することができる。特にインクジェット印刷法で作成する液晶表示装置用及び有機EL用カラーフィルターにおいて好適に用いることができ、その他、流体駆動電子ペーパー用途においても適用可能ある。 According to the present invention, in a resist composition containing a photosensitive component that reacts with ultraviolet light (300 nm to 450 nm), the ink repellent agent has excellent compatibility, and the surface appearance and pattern shape after film formation are good. A photosensitive resin composition having excellent ink repellency and suitable for forming barrier ribs for display elements can be provided. For this reason, for example, in a method for manufacturing a display element by an inkjet process, it is possible to achieve a reduction in cost that does not require a facility for surface ink repellency treatment using atmospheric pressure plasma, and to suitably provide a material that contributes to an improvement in yield. . In particular, it can be suitably used in liquid crystal display devices and organic EL color filters prepared by ink jet printing, and can also be applied to fluid-driven electronic paper applications.
以下、本発明を詳細に説明する。
本発明の感光性樹脂組成物における含フッ素樹脂(A)は撥インキ剤であり、下記式(1)構造の置換基を有する含フッ素樹脂(A)である。
The fluorine-containing resin (A) in the photosensitive resin composition of the present invention is an ink repellent and is a fluorine-containing resin (A) having a substituent having the structure of the following formula (1).
式(1)に示す置換基の導入方法は公知の手段を利用することができるが、具体的には、下記式(5)に示す手段を用いることができる。
通常、上記式(5)に示した含フッ素生成物には、以下の異性体骨格(1b)が含有されることがあるが、式(1)に示した構造の置換基と同様な効果を示すことから、同一にフッ素含有基として本発明での含有量として効果を扱える。
式(5)におけるP-OHは、一級ヒドロキシル基もしくはフェノール基を有する化合物である。したがって、目的とする含フッ素樹脂(A)を得るには、方法(i):一級ヒドロキシル基またはフェノール基を側鎖に有する重合体を前駆体とし、これに式(5)に示す手段で目的とする含フッ素置換基を導入する方法、又は、方法(ii):式(1)に示す含フッ素置換基を有する単量体と他単量体と共重合する方法が挙げられる。このうち、方法(ii)は、方法(i)に比較して分子鎖に定量的にフッ素基を導入するに好ましい。 P—OH in the formula (5) is a compound having a primary hydroxyl group or a phenol group. Therefore, in order to obtain the desired fluororesin (A), method (i): a polymer having a primary hydroxyl group or phenol group in the side chain is used as a precursor, and this is achieved by means shown in formula (5). And a method (ii): a method of copolymerizing a monomer having a fluorine-containing substituent represented by the formula (1) with another monomer. Among these, the method (ii) is preferable for introducing a fluorine group quantitatively into the molecular chain as compared with the method (i).
方法(i)の具体例として、2−ヒドロキシエチルメタクリレート、4−ヒドロキシブチルメタクリレート、6−ヒドロキシブチルメタクリレート等の(メタ)アクリル酸エステル誘導体との共重合体を前駆体とする方法、p-ヒドロキシスチレン等のフェノール基を有するビニル化合物との共重合体を例示できる。 Specific examples of the method (i) include a method in which a copolymer with a (meth) acrylic acid ester derivative such as 2-hydroxyethyl methacrylate, 4-hydroxybutyl methacrylate, and 6-hydroxybutyl methacrylate is used as a precursor, p-hydroxy Examples thereof include a copolymer with a vinyl compound having a phenol group such as styrene.
方法(ii)の具体例としては、p-ヒドロキシスチレンに対して予め式(5)によりフッ素基を導入した後に他の単量体と共重合させる方法、または下記一般式(2)で表される(メタ)アクリレート単量体から形成される単量体単位を他の単量体と共重合させる方法が挙げられる。
CH2=C(Rn)−COO−Y−O-Rf (2)
(式中、Rnは水素またはメチル基を示し、Yはフッ素原子を含まない2価の有機基を示し、Rfは、式(1)のフッ素含有基である)
Specific examples of the method (ii) include a method in which a fluorine group is previously introduced into p-hydroxystyrene by the formula (5) and then copolymerized with another monomer, or represented by the following general formula (2). And a method in which a monomer unit formed from a (meth) acrylate monomer is copolymerized with another monomer.
CH 2 = C (Rn) -COO-Y-O-Rf (2)
(In the formula, Rn represents hydrogen or a methyl group, Y represents a divalent organic group not containing a fluorine atom, and Rf represents a fluorine-containing group of formula (1)).
一般式(2)で表される単量体は、スペーサー的な役割をする有機基YによりRfがα位置換基(Rn)を有する重合体主鎖に繋がれたものである。有機基Yはアルキル基、ポリエチレングリコール基、フェニル基などを例示できる。さらにこのような含フッ素単量体と非フッ素含有単量体とを共重合させることで含フッ素樹脂(A)成分を調製する。 The monomer represented by the general formula (2) is one in which Rf is linked to a polymer main chain having an α-position substituent (Rn) by an organic group Y that functions as a spacer. Examples of the organic group Y include an alkyl group, a polyethylene glycol group, and a phenyl group. Further, the fluorine-containing resin (A) component is prepared by copolymerizing such a fluorine-containing monomer and a non-fluorine-containing monomer.
方法(i)又は(ii)を用いることによって、例えば、下記一般式(3)で表されるランダム又はブロック共重合体からなる含フッ素樹脂(A)を得ることができる。
含フッ素樹脂(A)中には式(1)構造の置換基を15〜50重量%の範囲で含有する必要がある。15重量%未満であると、アルカリ現像感光性樹脂組成物を硬化した後も十分な撥インキ作用が得られないか、所望の撥インキ作用を得ようとすると(A)成分添加量が多くなって組成物のアルカリ現像性を損なうこととなる。 The fluorine-containing resin (A) needs to contain a substituent having the structure of the formula (1) in the range of 15 to 50% by weight. If it is less than 15% by weight, a sufficient ink repellency cannot be obtained even after the alkali-developable photosensitive resin composition is cured, or if the desired ink repellency is obtained, the amount of component (A) added is increased. Thus, the alkali developability of the composition is impaired.
また、含フッ素樹脂(A)は酸性基を持ち、酸価にして10〜100mgKOH/gとなるようにする。酸価が10mgKOH/gを下回ると現像後基板上に残渣が残りやすく、また100mgKOH/gを越えると、現像後の撥インキ性能が安定しない。なお、この(A)成分の酸価は、樹脂1g中の酸性基を中和するに必要なKOHのmg数として表される。 Further, the fluororesin (A) has an acidic group and has an acid value of 10 to 100 mgKOH / g. If the acid value is less than 10 mg KOH / g, a residue tends to remain on the substrate after development, and if it exceeds 100 mg KOH / g, the ink repellency after development is not stable. In addition, the acid value of this (A) component is represented as mg number of KOH required in order to neutralize the acidic group in 1 g of resin.
酸性基を導入する手段としては、カルボキシル基もしくは酸無水物基を有するビニル単量体を共重合させるか、予め水酸基を側鎖に有する重合体を調製しておいて酸無水物を付加させる方法がある。このような事例としては、メタアクリル酸、無水マレイン酸などの酸性単量体、酸無水物として無水マレイン酸、無水フタル酸、テトラヒドロ無水フタル酸があげられる。 As a means for introducing an acidic group, a vinyl monomer having a carboxyl group or an acid anhydride group is copolymerized, or a polymer having a hydroxyl group in the side chain is prepared in advance and an acid anhydride is added. There is. Examples of this include acidic monomers such as methacrylic acid and maleic anhydride, and maleic anhydride, phthalic anhydride, and tetrahydrophthalic anhydride as acid anhydrides.
このような含フッ素単量体及び酸性基含有単量体と、非フッ素含有単量体とを共重合させることで含フッ素樹脂(A)成分を調製することができる。このような非フッ素含有単量体としては、通常のアクリル酸エステル、メタクリル酸エステル、スチレン誘導体、マレイン酸エステル等を例示できる。アルカリ現像性樹脂との相溶性及び撥インキ性維持の観点から、メタクリル酸エステルとの共重合が好ましく、また側鎖のアルコール残基はベンジル基、イソボルニル基、アダマンタン基などの嵩高いものが好ましい。含フッ素樹脂(A)に用いる含フッ素重量の割合は30重量%以上がよい。30重量%未満であると、十分な撥インキ性が発揮されず、またブラックマトリクス形成時ならびにインクジェットインキ塗布直前までにその撥インキ性が消失してしまう場合がある。また、80重量%を超えると得られた共重合体がレジスト調製に用いられる溶媒または(B)、(C)成分との相溶性が悪く、ゲル物発生の原因となる。 The fluorine-containing resin (A) component can be prepared by copolymerizing such a fluorine-containing monomer and an acidic group-containing monomer with a non-fluorine-containing monomer. Examples of such non-fluorine-containing monomers include ordinary acrylic acid esters, methacrylic acid esters, styrene derivatives, maleic acid esters, and the like. From the viewpoint of maintaining compatibility with an alkali-developable resin and maintaining ink repellency, it is preferable to copolymerize with a methacrylic acid ester, and the side chain alcohol residue is preferably a bulky group such as a benzyl group, an isobornyl group or an adamantane group . The proportion of the fluorine-containing weight used in the fluorine-containing resin (A) is preferably 30% by weight or more. If it is less than 30% by weight, sufficient ink repellency is not exhibited, and the ink repellency may be lost at the time of forming the black matrix and immediately before applying the inkjet ink. On the other hand, when the content exceeds 80% by weight, the obtained copolymer is poorly compatible with the solvent used for preparing the resist or the components (B) and (C), and causes the generation of a gel product.
さらに、含フッ素樹脂(A)の分子鎖中に必要に応じてビニル基を導入できるような官能基、例えばヒドロキシル基やカルボキシル基を存在させておくとよい。ビニル基を導入することで、フォトリソグラフィー法による隔壁形成時に現像後の露光部表面の撥インキ性維持に寄与でき、特に強い現像液を用いる場合に好ましい。具体的な導入手段としては、イソシアネート基や酸無水物基、エチレンオキシド基等を結合基として有するアクリレート、メタクリレート化合物を前記含フッ素樹脂中のヒドロキシル基やカルボキシル基と反応させるという公知の手段を例示できる。例えばイソシアネート基を結合基とする場合は、事前に得た含フッ素樹脂(A)中のヒドロキシル基に対して同当量未満とする。なぜならば、残存する結合基が組成物の保存安定性を損なう可能性がある。エチレンオキシド基を結合基とする場合は、事前に得た含フッ素樹脂(A)中のカルボキシル基に対して反応するので、含フッ素樹脂(A)の酸価が10〜100mgとなるように調整する。 Furthermore, a functional group that can introduce a vinyl group into the molecular chain of the fluororesin (A) as required, for example, a hydroxyl group or a carboxyl group is preferably present. By introducing a vinyl group, it is possible to contribute to maintaining the ink repellency on the surface of the exposed area after development at the time of forming a partition by a photolithography method, which is preferable when a particularly strong developer is used. Specific examples of the introducing means include known means for reacting an acrylate or methacrylate compound having an isocyanate group, an acid anhydride group, an ethylene oxide group or the like as a bonding group with a hydroxyl group or a carboxyl group in the fluororesin. . For example, when an isocyanate group is used as a linking group, the amount is less than the same equivalent to the hydroxyl group in the fluorine-containing resin (A) obtained in advance. This is because the remaining linking group may impair the storage stability of the composition. When the ethylene oxide group is used as a linking group, it reacts with the carboxyl group in the fluororesin (A) obtained in advance, so that the acid value of the fluororesin (A) is adjusted to 10 to 100 mg. .
この含フッ素樹脂(A)成分の重量平均分子量は、ゲルパーミエーションクロマト(GPC)法で求めたポリエチレングリコール換算重量平均分子量(Mw)が2000〜20000の範囲にあるようにする。この分子量が2000以下であると、隔壁形成プロセスにおいて撥インキ作用が低下したり、撥インキ作用の継続が困難になる。分子量(Mw)が20000を超えると、アルカリ現像液に対する溶解遅延のため好ましくない。 The weight average molecular weight of this fluororesin (A) component is set so that the polyethylene glycol equivalent weight average molecular weight (Mw) determined by gel permeation chromatography (GPC) method is in the range of 2000-20000. When the molecular weight is 2000 or less, the ink repellency is lowered in the partition forming process, or it is difficult to continue the ink repellency. When the molecular weight (Mw) exceeds 20000, it is not preferable because of dissolution delay in an alkaline developer.
また、溶剤を除くアルカリ現像感光性樹脂組成物の全固形分100重量部に対する含フッ素樹脂(A)の割合が0.05〜10重量部となるようにする。含フッ素樹脂(A)の割合が0.05重量部より少ないと撥インキ性が不十分となり、反対に10重量部を超えると元来のアルカリ現像感光性樹脂組成物の持つパターン形成に影響を及ぼすおそれがある。 In addition, the ratio of the fluororesin (A) to 0.05 to 10 parts by weight with respect to 100 parts by weight of the total solid content of the alkali-developable photosensitive resin composition excluding the solvent is adjusted to be 0.05 to 10 parts by weight. If the proportion of the fluorine-containing resin (A) is less than 0.05 parts by weight, the ink repellency becomes insufficient. Conversely, if it exceeds 10 parts by weight, the pattern formation of the original alkali development photosensitive resin composition is affected. There is a risk.
次に、紫外光(300nm〜450nm)に反応する感光性成分を含む、感光性樹脂組成物(ネガ型レジスト組成物)に使用される(B)〜(E)成分について述べる。 Next, the components (B) to (E) used in the photosensitive resin composition (negative resist composition) containing a photosensitive component that reacts with ultraviolet light (300 nm to 450 nm) will be described.
(B)成分である、一分子中に酸性基と2つ以上のエチレン性二重結合とを有するアルカリ現像性オリゴマーの例としては、ビスフェノール類から誘導される2個のグリシジルエーテル基を有するエポキシ化合物と(メタ)アクリル酸との反応物を更に多塩基酸カルボン酸又はその無水物と反応させて得られたアルカリ現像性不飽和基含有オリゴマーを挙げることができる。 Examples of the alkali-developable oligomer having an acidic group and two or more ethylenic double bonds in one molecule as component (B) are epoxy having two glycidyl ether groups derived from bisphenols. Mention may be made of alkali-developable unsaturated group-containing oligomers obtained by further reacting a reaction product of a compound with (meth) acrylic acid with a polybasic carboxylic acid or its anhydride.
ここで、ビスフェノール類から誘導される2個のグリシジルエーテル基を有するエポキシ化合物としては、下記一般式(4)で表されるエポキシ化合物が好ましく挙げられる。
これらのビスフェノール類から誘導される2個のグリシジルエーテル基を有するエポキシ化合物に、(メタ)アクリル酸(これは「アクリル酸及び/又はメタクリル酸」の意味である)を反応させ、得られたヒドロキシ基を有する化合物に多塩基酸カルボン酸又はその無水物を反応させて得られるエポキシ(メタ)アクリレート酸付加物を、本発明の(B)成分であるアルカリ現像性不飽和基含有オリゴマーとして使用することができる。 An epoxy compound having two glycidyl ether groups derived from these bisphenols is reacted with (meth) acrylic acid (which means “acrylic acid and / or methacrylic acid”), and the resulting hydroxy An epoxy (meth) acrylate acid adduct obtained by reacting a compound having a group with a polybasic acid carboxylic acid or an anhydride thereof is used as an alkali-developable unsaturated group-containing oligomer as component (B) of the present invention. be able to.
(B)成分であるエチレン性二重結合を有するアルカリ現像性オリゴマーは、エチレン性不飽和二重結合と、カルボキシル基、水酸基、スルホン酸基、リン酸基等の酸性基とを併せ持つため、カラーフィルター隔壁形成用感光性樹脂組成物に優れた光硬化性、良現像性、パターニング特性を与え、遮光性隔壁の物性向上をもたらす。 Since the alkali-developable oligomer having an ethylenic double bond as the component (B) has both an ethylenically unsaturated double bond and an acidic group such as a carboxyl group, a hydroxyl group, a sulfonic acid group, and a phosphoric acid group, color The photosensitive resin composition for forming filter barrier ribs is provided with excellent photocurability, good developability, and patterning characteristics, and improves the physical properties of the light-shielding barrier ribs.
(B)成分であるエチレン性二重結合を有するアルカリ現像性オリゴマーは、好ましくは、上記式(4)で表されるエポキシ化合物から誘導される。このエポキシ化合物はビスフェノール類から誘導される。したがって、ビスフェノール類を説明することによって、アルカリ現像性不飽和基含有オリゴマーが理解されるので、好ましい具体例をビスフェノール類により説明する。 The alkali-developable oligomer having an ethylenic double bond as component (B) is preferably derived from an epoxy compound represented by the above formula (4). This epoxy compound is derived from bisphenols. Therefore, by explaining bisphenols, an alkali-developable unsaturated group-containing oligomer can be understood, and preferred specific examples will be explained using bisphenols.
好ましいアルカリ現像性不飽和基含有オリゴマーを与えるビスフェノール類としては、次のようなものが挙げられる。ビス(4−ヒドロキシフェニル)ケトン、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)ケトン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)ケトン、ビス(4−ヒドロキシフェニル)スルホン、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)スルホン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)スルホン、ビス(4−ヒドロキシフェニル)ヘキサフルオロプロパン、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)ヘキサフルオロプロパン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)ヘキサフルオロプロパン、ビス(4−ヒドロキシフェニル)ジメチルシラン、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)ジメチルシラン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)ジメチルシラン、ビス(4−ヒドロキシフェニル)メタン、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)メタン、ビス(4−ヒドロキシ−3,5−ジブロモフェニル)メタン、2,2−ビス(4−ヒドロキシフェニル)プロパン、2,2−ビス(4−ヒドロキシ−3,5−ジメチルフェニル)プロパン、2,2−ビス(4−ヒドロキシ−3,5−ジクロロフェニル)プロパン、2,2−ビス(4−ヒドロキシ−3−メチルフェニル)プロパン、2,2−ビス(4−ヒドロキシ−3−クロロフェニル)プロパン、ビス(4−ヒドロキシフェニル)エーテル、ビス(4−ヒドロキシ−3,5−ジメチルフェニル)エーテル、ビス(4−ヒドロキシ−3,5−ジクロロフェニル)エーテル等を含む化合物や、式(4)中のXが前記の9,9−フルオレニル基である9,9−ビス(4−ヒドロキシフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−メチルフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−クロロフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−ブロモフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−フルオロフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3−メトキシフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3,5−ジメチルフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3,5−ジクロロフェニル)フルオレン、9,9−ビス(4−ヒドロキシ−3,5−ジブロモフェニル)フルオレン等や、更には4,4'−ビフェノール、3,3'−ビフェノール等の化合物が挙げられる。 Examples of bisphenols that give preferred alkali-developable unsaturated group-containing oligomers include the following. Bis (4-hydroxyphenyl) ketone, bis (4-hydroxy-3,5-dimethylphenyl) ketone, bis (4-hydroxy-3,5-dichlorophenyl) ketone, bis (4-hydroxyphenyl) sulfone, bis (4 -Hydroxy-3,5-dimethylphenyl) sulfone, bis (4-hydroxy-3,5-dichlorophenyl) sulfone, bis (4-hydroxyphenyl) hexafluoropropane, bis (4-hydroxy-3,5-dimethylphenyl) Hexafluoropropane, bis (4-hydroxy-3,5-dichlorophenyl) hexafluoropropane, bis (4-hydroxyphenyl) dimethylsilane, bis (4-hydroxy-3,5-dimethylphenyl) dimethylsilane, bis (4- Hydroxy-3,5-dichlorophenyl) dimethyl Silane, bis (4-hydroxyphenyl) methane, bis (4-hydroxy-3,5-dichlorophenyl) methane, bis (4-hydroxy-3,5-dibromophenyl) methane, 2,2-bis (4-hydroxyphenyl) ) Propane, 2,2-bis (4-hydroxy-3,5-dimethylphenyl) propane, 2,2-bis (4-hydroxy-3,5-dichlorophenyl) propane, 2,2-bis (4-hydroxy-) 3-methylphenyl) propane, 2,2-bis (4-hydroxy-3-chlorophenyl) propane, bis (4-hydroxyphenyl) ether, bis (4-hydroxy-3,5-dimethylphenyl) ether, bis (4 -Hydroxy-3,5-dichlorophenyl) ether or the like, or X in the formula (4) is the 9,9-fur 9,9-bis (4-hydroxyphenyl) fluorene, 9,9-bis (4-hydroxy-3-methylphenyl) fluorene, 9,9-bis (4-hydroxy-3-chlorophenyl) fluorene which is a rhenyl group, 9,9-bis (4-hydroxy-3-bromophenyl) fluorene, 9,9-bis (4-hydroxy-3-fluorophenyl) fluorene, 9,9-bis (4-hydroxy-3-methoxyphenyl) fluorene 9,9-bis (4-hydroxy-3,5-dimethylphenyl) fluorene, 9,9-bis (4-hydroxy-3,5-dichlorophenyl) fluorene, 9,9-bis (4-hydroxy-3, 5-dibromophenyl) fluorene and the like, and compounds such as 4,4′-biphenol, 3,3′-biphenol, and the like.
(B)成分であるエチレン性二重結合を有するアルカリ現像性オリゴマーは、上記のようなビスフェノール類から誘導されるエポキシ化合物から得ることができるが、かかるエポキシ化合物の他にフェノールノボラック型エポキシ化合物や、クレゾールノボラック型エポキシ化合物等も2個のグリシジルエーテル基を有する化合物を有意に含むものであれば使用することができる。また、ビスフェノール類をグリシジルエーテル化する際に、オリゴマー単位が混入することになるが、一般式(4)におけるnの平均値が0〜10、好ましくは0〜2の範囲であれば、本樹脂組成物の性能には問題はない。 The alkali-developable oligomer having an ethylenic double bond as the component (B) can be obtained from an epoxy compound derived from bisphenols as described above, but in addition to such an epoxy compound, a phenol novolac-type epoxy compound or Also, a cresol novolac type epoxy compound can be used as long as it contains a compound having two glycidyl ether groups significantly. Further, when the bisphenols are glycidyl etherized, oligomer units are mixed. If the average value of n in the general formula (4) is in the range of 0 to 10, preferably 0 to 2, the present resin There is no problem with the performance of the composition.
また、このようなエポキシ化合物と(メタ)アクリル酸とを反応させて得られたエポキシ(メタ)アクリレート分子中のヒドロキシ基と反応し得る多塩基酸カルボン酸又はその酸無水物としては、例えば、マレイン酸、コハク酸、イタコン酸、フタル酸、テトラヒドロフタル酸、ヘキサヒドロフタル酸、メチルエンドメチレンテトラヒドロフタル酸、クロレンド酸、メチルテトラヒドロフタル酸、トリメリット酸、ピロメリット酸等やその酸無水物、更には、ベンゾフェノンテトラカルボン酸、ビフェニルテトラカルボン酸、ビフェニルエーテルテトラカルボン酸、等の芳香族多価カルボン酸やその酸二無水物等が挙げられる。そして、酸無水物と酸二無水物の使用割合については、露光、アルカリ現像操作によって微細なパターンを形成するのに適した割合を選択することができる。 In addition, as the polybasic acid carboxylic acid or its acid anhydride that can react with the hydroxy group in the epoxy (meth) acrylate molecule obtained by reacting such an epoxy compound with (meth) acrylic acid, for example, Maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, methylendomethylenetetrahydrophthalic acid, chlorendic acid, methyltetrahydrophthalic acid, trimellitic acid, pyromellitic acid and the acid anhydride thereof, Furthermore, aromatic polyvalent carboxylic acids such as benzophenone tetracarboxylic acid, biphenyl tetracarboxylic acid, biphenyl ether tetracarboxylic acid, and acid dianhydrides thereof can be used. And about the usage-amount of an acid anhydride and an acid dianhydride, the ratio suitable for forming a fine pattern by exposure and alkali image development operation can be selected.
(B)成分のエチレン性二重結合を有するアルカリ現像性オリゴマーについては、その1種のみを使用しても、2種以上の混合物を使用することもできる。また、エポキシ化合物と(メタ)アクリル酸との反応、この反応で得られたエポキシ(メタ)アクリレートと多塩基酸又はその酸無水物との反応は、上記特許文献6等で公知の方法を採用することができるが、特に限定されるものではない。 About the alkali developable oligomer which has an ethylenic double bond of (B) component, even if it uses only 1 type, it can also use 2 or more types of mixtures. Moreover, reaction with an epoxy compound and (meth) acrylic acid, reaction with the epoxy (meth) acrylate obtained by this reaction, and a polybasic acid or its acid anhydride employ | adopt a well-known method by the said patent document 6 grade | etc.,. However, it is not particularly limited.
また、(B)成分を得るための別法としては、1)カルボキシル基を1個以上有するエチレン性不飽和単量体、2)重合後に不飽和基を導入可能なヒドロキシ基、酸無水物基、グリシジル基などを側鎖に有するエチレン性不飽和単量体及び3)他のエチレン性不飽和単量体、を含有するモノマー混合物を過酸化物ならびに連鎖移動剤が共存する溶剤中にてラジカル共重合することより得られる共重合体を、さらに2)の側鎖に付加可能な官能基を有する一不飽和化合物を付加させたバインダー樹脂とすることでエチレン性二重結合を有するアルカリ現像性オリゴマーとすることもできる。 As another method for obtaining the component (B), 1) an ethylenically unsaturated monomer having one or more carboxyl groups, 2) a hydroxy group or an acid anhydride group capable of introducing an unsaturated group after polymerization. , A monomer mixture containing an ethylenically unsaturated monomer having a glycidyl group in the side chain and 3) another ethylenically unsaturated monomer in a solvent in which a peroxide and a chain transfer agent coexist. Alkali developability having an ethylenic double bond by using a copolymer obtained by copolymerization as a binder resin to which a monounsaturated compound having a functional group that can be added to the side chain of 2) is further added. It can also be an oligomer.
前記モノマー混合物として用いることができる、1)カルボキシル基を1個以上有するエチレン性不飽和単量体としては、例えばアクリル酸、メタクリル酸、クロトン酸、α−クロルアクリル酸、エタクリル酸、けい皮酸などの不飽和モノカルボン酸類;マレイン酸、無水マレイン酸、フマル酸、イタコン酸、無水イタコン酸、シトラコン酸、無水シトラコン酸、メサコン酸などの不飽和ジカルボン酸(無水物)類;3価以上の不飽和多価カルボン酸(無水物)類などを挙げることができる。中でも、アクリル酸、メタクリル酸が好ましい。これらカルボキシル基含有のエチレン性不飽和単量体は、単独で又は2種以上を併用してもよい。 Examples of the ethylenically unsaturated monomer having at least one carboxyl group that can be used as the monomer mixture include acrylic acid, methacrylic acid, crotonic acid, α-chloroacrylic acid, ethacrylic acid, and cinnamic acid. Unsaturated monocarboxylic acids such as maleic acid, maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, mesaconic acid and the like; Examples include unsaturated polycarboxylic acids (anhydrides). Of these, acrylic acid and methacrylic acid are preferable. These carboxyl group-containing ethylenically unsaturated monomers may be used alone or in combination of two or more.
モノマー混合物のもう一つの成分である3)他のエチレン性不飽和単量体としては、例えばスチレン、α−メチルスチレン、ビニルトルエン、クロルスチレン、メトキシスチレンなどの芳香族ビニル化合物;メチルアクリレート、メチルメタクリレート、エチルアクリレート、エチルメタクリレート、プロピルアクリレート、プロピルメタクリレート、ブチルアクリレート、ブチルメタクリレート、2−ヒドロキシエチルアクリレート、2−ヒドロキシエチルメタクリレート、ベンジルアクリレート、ベンジルメタクリレート、ラウリルメタクリレート、テトラデシルメタクリレート、セチルメタクリレート、ステアリルメタクリレート、オクタデシルメタクリレート、ドコシルメタクリレート、エイコシルメタクリレートなどの不飽和カルボン酸エステル類;アミノエチルアクリレート、アミノエチルメタクリレート、アミノプロピルアクリレート、アミノプロピルメタクリレートなどの不飽和カルボン酸アミノアルキルエステル類;グリシジルアクリレート、グリシジルメタクリレートなどの不飽和カルボン酸グリシジルエステル類;酢酸ビニル、プロピオン酸ビニル、酪酸ビニル、安息香酸ビニルなどのカルボン酸ビニルエステル類;ビニルメチルエーテル、ビニルエチルエーテル、アリルグリシジルエーテル、メタリルグリシジルエーテルなどの不飽和エーテル類;アクリロニトリル、メタクリロニトリル、α−クロロアクリロニトリル、シアン化ビニリデンなどのシアン化ビニル化合物;アクリルアミド、メタクリルアミド、α−クロロアクリルアミド、N−ヒドロキシエチルアクリルアミド、N−ヒドロキシエチルメタクリルアミド、マレイミドなどの不飽和アミド或いは不飽和イミド類;1,3−ブタジエン、イソプレン、クロロプレンなどの脂肪族共役ジエン類などを挙げることができる。中でも、メチルアクリレート、メチルメタクリレート、エチルアクリレート、エチルメタクリレート、2−ヒドロキシエチルアクリレート、2−ヒドロキシエチルメタクリレート、ベンジルアクリレート、ベンジルメタクリレートが好ましい。これらの他の不飽和単量体は、単独で又は2種以上を併用してもよい。 3) Other ethylenically unsaturated monomers which are another component of the monomer mixture include aromatic vinyl compounds such as styrene, α-methylstyrene, vinyltoluene, chlorostyrene, methoxystyrene; methyl acrylate, methyl Methacrylate, ethyl acrylate, ethyl methacrylate, propyl acrylate, propyl methacrylate, butyl acrylate, butyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, benzyl acrylate, benzyl methacrylate, lauryl methacrylate, tetradecyl methacrylate, cetyl methacrylate, stearyl methacrylate , Unsaturated carboxylic acids such as octadecyl methacrylate, docosyl methacrylate, eicosyl methacrylate Stealth; Unsaturated carboxylic acid aminoalkyl esters such as aminoethyl acrylate, aminoethyl methacrylate, aminopropyl acrylate, and aminopropyl methacrylate; Unsaturated carboxylic acid glycidyl esters such as glycidyl acrylate and glycidyl methacrylate; Vinyl acetate and vinyl propionate Carboxylic acid vinyl esters such as vinyl butyrate and vinyl benzoate; unsaturated ethers such as vinyl methyl ether, vinyl ethyl ether, allyl glycidyl ether and methallyl glycidyl ether; acrylonitrile, methacrylonitrile, α-chloroacrylonitrile, cyanide Vinyl cyanide compounds such as vinylidene chloride; acrylamide, methacrylamide, α-chloroacrylamide, N-hydroxyethyl acetate Examples thereof include unsaturated amides or unsaturated imides such as rilamide, N-hydroxyethylmethacrylamide and maleimide; aliphatic conjugated dienes such as 1,3-butadiene, isoprene and chloroprene. Of these, methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, benzyl acrylate, and benzyl methacrylate are preferable. These other unsaturated monomers may be used alone or in combination of two or more.
また、この(B)成分の酸価は、樹脂1g中のカルボキシル基を中和するに必要なKOHのmg数として表され、画像パターン形成時の現像処理時間やパターン形状、硬化膜の密着性の観点から50〜150(KOHmg/g)であるのがよい。50を下回るとアルカリ現像液によるパターン形成ができなくなり、また、架橋剤を用いる場合は、架橋剤とするエポキシ樹脂との架橋が不十分になり、耐熱性の低下、有機溶剤中での密着性不良などが生じる。そして、酸価が150を超えると、アルカリ現像時の表面荒れ、細線パターンの現像密着不良並びに硬化膜の耐湿性が問題となる。 The acid value of this component (B) is expressed as the number of mg of KOH necessary to neutralize the carboxyl group in 1 g of resin, and the development processing time and pattern shape at the time of image pattern formation, the adhesion of the cured film From the viewpoint of the above, it is preferable to be 50 to 150 (KOHmg / g). If it is less than 50, pattern formation with an alkali developer becomes impossible, and when a crosslinking agent is used, crosslinking with an epoxy resin as a crosslinking agent becomes insufficient, resulting in a decrease in heat resistance and adhesion in an organic solvent. Defects occur. If the acid value exceeds 150, surface roughness during alkali development, poor development adhesion of the fine line pattern, and moisture resistance of the cured film become problems.
(C)成分である少なくとも1分子中に3個以上のエチレン性不飽和結合を有する光重合性モノマーとしては、例えばトリメチロールプロパントリ(メタ)アクリレート、トリメチロールエタントリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート等の(メタ)アクリル酸エステル類を挙げることができ、これらの化合物はその1種のみを単独で使用できるほか、2種以上を併用して使用することもできる。 Examples of the photopolymerizable monomer having three or more ethylenically unsaturated bonds in at least one molecule as component (C) include trimethylolpropane tri (meth) acrylate, trimethylolethanetri (meth) acrylate, and pentaerythritol. (Meth) acrylates such as tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, and the like, Only one of them can be used alone, or two or more can be used in combination.
本発明のアルカリ現像感光性樹脂組成物には、(B)成分、(C)成分等の光重合性の化合物を含むものであるが、これを光硬化させるために(D)成分として光重合開始剤を含むようにしてもよい。(D)成分は紫外線光照射、特に300〜450nmの紫外線照射によりラジカル種を発生し、光重合性の化合物に付加してラジカル重合を開始させ、樹脂組成物を硬化させる。 The alkali-developable photosensitive resin composition of the present invention contains a photopolymerizable compound such as component (B) or component (C). In order to photocur this, a photopolymerization initiator is used as component (D). May be included. Component (D) generates radical species upon irradiation with ultraviolet light, particularly 300 to 450 nm, and is added to a photopolymerizable compound to initiate radical polymerization and cure the resin composition.
(D)成分の光重合開始剤としては、ベンゾフェノン、ミヒラーケトン、N,N’テトラメチル-4,4’-ジアミノベンゾフェノン、4-メトキシ-4'-ジメチルアミノベンゾフェノン、4,4'-ジエチルアミノベンゾフェノン、2-エチルアントラキノン、フェナントレン等の芳香族ケトン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインフェニルエーテル等のベンゾインエーテル類、メチルベンゾイン、エチルベンゾイン等のベンゾイン、2-(o-クロロフェニル)-4,5-フェニルイミダゾール2量体、2-(o-クロロフェニル)-4,5-ジ(m-メトキシフェニル)イミダゾール2量体、2-(o-フルオロフェニル)-4,5-ジフェニルイミダゾール2量体、2-(o-メトキシフェニル)-4,5-ジフェニルイミダゾール2量体、2、4,5-トリアリールイミダゾール2量体、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)−ブタノン、2-トリクロロメチル−5−スチリル−1,3,4−オキサジアゾール、2−トリクロロメチル-5-(p-シアノスチリル)-1,3,4-オキサジアゾール、2-トリクロロメチル-5-(p-メトキシスチリル)-1,3,4-オキサジアゾール等のハロメチルチアゾール化合物、2,4,6-トリス(トリクロロメチル)-1,3,5-トリアジン、2-メチル−4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-フェニル-4、6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-クロロフェニル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-メトキシフェニル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-メトキシナフチル)-4,6-ビス(トリクロロRメチル)-1,3,5-トリアジン、2-(4-メトキシスチリル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(3,4,5-トリメトキシスチリル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-メチルチオスチリル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン等のハロメチル−S−トリアジン系化合物、2,2-ジメトキシ-1,2-ジフェニルエタン-1-オン、2-メチル-1-[4-(メチルチオ)フェニル]-2-モルフォリノプロパノン、2-ベンジル-2-ジメチルアミノ-1-[4-モルフォリノフェニル]-ブタノン-1,1-ヒドロキシ-シクロヘキシル-フェニルケトン等が挙げられる。 As the photopolymerization initiator of component (D), benzophenone, Michler ketone, N, N′tetramethyl-4,4′-diaminobenzophenone, 4-methoxy-4′-dimethylaminobenzophenone, 4,4′-diethylaminobenzophenone, Aromatic ketones such as 2-ethylanthraquinone and phenanthrene, benzoin ethers such as benzoin methyl ether, benzoin ethyl ether and benzoin phenyl ether, benzoin such as methyl benzoin and ethyl benzoin, 2- (o-chlorophenyl) -4,5- Phenylimidazole dimer, 2- (o-chlorophenyl) -4,5-di (m-methoxyphenyl) imidazole dimer, 2- (o-fluorophenyl) -4,5-diphenylimidazole dimer, 2 -(o-methoxyphenyl) -4,5-diphenylimidazole dimer, 2,4,5-triarylimidazole dimer, 2-benzyl-2-dimethyl Tylamino-1- (4-morpholinophenyl) -butanone, 2-trichloromethyl-5-styryl-1,3,4-oxadiazole, 2-trichloromethyl-5- (p-cyanostyryl) -1,3 Halomethylthiazole compounds such as 2,4-oxadiazole, 2-trichloromethyl-5- (p-methoxystyryl) -1,3,4-oxadiazole, 2,4,6-tris (trichloromethyl) -1 , 3,5-triazine, 2-methyl-4,6-bis (trichloromethyl) -1,3,5-triazine, 2-phenyl-4, 6-bis (trichloromethyl) -1,3,5-triazine 2- (4-chlorophenyl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -1,3, 5-triazine, 2- (4-methoxynaphthyl) -4,6-bis (trichloroR methyl) -1,3,5-triazine, 2- (4-methoxystyryl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (3,4,5 -Trimethoxystyryl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methylthiostyryl) -4,6-bis (trichloromethyl) -1,3,5-triazine Halomethyl-S-triazine compounds such as 2,2-dimethoxy-1,2-diphenylethane-1-one, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropanone, 2- And benzyl-2-dimethylamino-1- [4-morpholinophenyl] -butanone-1,1-hydroxy-cyclohexyl-phenyl ketone.
これらの光重合開始剤は、単独又は2種以上を混合して使用することができる。また、それ自体では光重合開始剤や増感剤として作用しないが、上記の化合物と組み合わせて用いることにより、光重合開始剤や増感剤の能力を増大させ得るような化合物を添加することもできる。このような化合物としては、例えばベンゾフェノンと組み合わせて使用すると効果のあるトリエタノールアミン等の第3級アミンを挙げることができる。 These photoinitiators can be used individually or in mixture of 2 or more types. In addition, although it does not act as a photopolymerization initiator or sensitizer by itself, it is also possible to add a compound that can increase the ability of the photopolymerization initiator or sensitizer by using in combination with the above compound. it can. Examples of such compounds include tertiary amines such as triethanolamine which are effective when used in combination with benzophenone.
(D)成分の光重合開始剤の使用量は、(A)、(B)及び(C)の各成分の合計100重量部を基準として5〜40重量部が適している。(D)成分の配合割合が5重量部未満の場合には、光重合の速度が遅くなって、感度が低下し、一方、40重量部を超える場合には、感度が強すぎて、パターン線幅がパターンマスクに対して太った状態になり、マスクに対して忠実な線幅が再現できない、又は、パターンエッジがぎざつきシャープにならないといった問題が生じるおそれがある。 The amount of the photopolymerization initiator used as the component (D) is suitably 5 to 40 parts by weight based on the total of 100 parts by weight of the components (A), (B) and (C). When the blending ratio of component (D) is less than 5 parts by weight, the rate of photopolymerization becomes slow and the sensitivity is lowered. On the other hand, when it exceeds 40 parts by weight, the sensitivity is too strong and the pattern line The width becomes thicker than the pattern mask, and there is a possibility that a line width that is faithful to the mask cannot be reproduced, or that the pattern edge does not become jagged and sharp.
以上の(A)〜(D)成分を含有するアルカリ現像感光性樹脂組成物に対して目的に応じて顔料等を添加することで、表示素子向けの隔壁形成用感光性樹脂組成物とすることができる。特にカラーフィルター用隔壁の場合は、TFT素子の遮光を目的に遮光性分散液(E成分)を好ましく用いることができる。 By adding a pigment or the like to the alkali developing photosensitive resin composition containing the components (A) to (D) according to the purpose, a photosensitive resin composition for forming a partition for a display element is obtained. Can do. Particularly in the case of color filter partition walls, a light-shielding dispersion (component E) can be preferably used for the purpose of shielding the TFT element.
(E)成分である遮光性分散液に含まれる黒色有機顔料、混色有機顔料及び遮光材としては、耐熱性、耐光性及び耐溶剤性に優れたものであることが好ましい。ここで、黒色有機顔料としては、例えばペリレンブラック、シアニンブラック等が挙げられる。混色有機顔料としては、赤、青、緑、紫、黄色、シアニン、マゼンタ等から選ばれる少なくとも2種以上の顔料を混合して擬似黒色化されたものが挙げられる。遮光材としては、カーボンブラック、酸化クロム、酸化鉄、チタンブラック、アニリンブラック、シアニンブラックを挙げることができ、2種以上を適宜選択して用いることもできるが、特にカーボンブラックが、遮光性、表面平滑性、分散安定性、樹脂との相溶性が良好な点で好ましい。これらの顔料又は遮光材から選ばれた1種以上を必要により分散剤、分散助剤と伴に有機溶媒中に分散させることで遮光性分散顔液とすることができる。 The black organic pigment, mixed color organic pigment, and light-shielding material contained in the light-shielding dispersion liquid as component (E) are preferably excellent in heat resistance, light resistance, and solvent resistance. Here, examples of the black organic pigment include perylene black and cyanine black. Examples of mixed color organic pigments include those obtained by mixing at least two pigments selected from red, blue, green, purple, yellow, cyanine, magenta and the like into a pseudo black color. Examples of the light shielding material include carbon black, chromium oxide, iron oxide, titanium black, aniline black, and cyanine black. Two or more types can be appropriately selected and used. The surface smoothness, dispersion stability, and compatibility with the resin are preferable. One or more selected from these pigments or light-shielding materials can be dispersed in an organic solvent with a dispersant and a dispersion aid as required to obtain a light-shielding dispersed facial liquid.
(E)成分の配合割合については、(E)成分に含まれる顔料又は遮光材の割合が感光性樹脂組成物の全固形分100重量部に対して25〜60重量部配合されていることが好ましい。25重量部より少ないと、遮光性が十分でなくなる。60重量部を超えると、本来のバインダーとなる感光性樹脂の含有量が減少するため、現像特性を損なうと共に膜形成能が損なわれるという好ましくない問題が生じる。 (E) About the mixture ratio of a component, the ratio of the pigment or light-shielding material contained in (E) component may be mix | blended 25-60 weight part with respect to 100 weight part of total solid of the photosensitive resin composition. preferable. When the amount is less than 25 parts by weight, the light shielding property is not sufficient. When the amount exceeds 60 parts by weight, the content of the photosensitive resin as the original binder is decreased, so that an undesired problem that the development characteristics are impaired and the film forming ability is impaired.
本発明の表示素子隔壁形成用感光性樹脂組成物においては、上記(A)〜(E)成分に含まれる溶剤の他に別途溶剤を使用するのがよい。ここで言う別の溶剤としては、例えばメタノール、エタノール、n−プロパノール、イソプロパノール、エチレングリコール、プロピレングリコール等のアルコール類、α−もしくはβ−テルピネオール等のテルペン類等、アセトン、メチルエチルケトン、シクロヘキサノン、N−メチル−2−ピロリドン等のケトン類、トルエン、キシレン、テトラメチルベンゼン等の芳香族炭化水素類、セロソルブ、メチルセロソルブ、エチルセロソルブ、カルビトール、メチルカルビトール、エチルカルビトール、ブチルカルビトール、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールモノエチルエーテル、トリエチレングリコールモノメチルエーテル、トリエチレングリコールモノエチルエーテル等のグリコールエーテル類、酢酸エチル、酢酸ブチル、セロソルブアセテート、エチルセロソルブアセテート、ブチルセロソルブアセテート、カルビトールアセテート、エチルカルビトールアセテート、ブチルカルビトールアセテート、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート等の酢酸エステル類等が挙げられ、これらを用いて溶解、混合させることにより、均一な溶液状の組成物とすることができる。 In the photosensitive resin composition for forming a display element partition according to the present invention, it is preferable to use a solvent separately from the solvents contained in the components (A) to (E). Examples of other solvents used herein include alcohols such as methanol, ethanol, n-propanol, isopropanol, ethylene glycol, and propylene glycol, terpenes such as α- or β-terpineol, acetone, methyl ethyl ketone, cyclohexanone, N- Ketones such as methyl-2-pyrrolidone, aromatic hydrocarbons such as toluene, xylene, tetramethylbenzene, cellosolve, methylcellosolve, ethylcellosolve, carbitol, methylcarbitol, ethylcarbitol, butylcarbitol, propylene glycol Monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl Glycol ethers such as ether and triethylene glycol monoethyl ether, ethyl acetate, butyl acetate, cellosolve acetate, ethyl cellosolve acetate, butyl cellosolve acetate, carbitol acetate, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, Examples include acetic acid esters such as propylene glycol monoethyl ether acetate, and a uniform solution-like composition can be obtained by dissolving and mixing them.
また、本発明の表示素子隔壁形成用感光性樹脂組成物には、必要に応じて硬化促進剤、熱重合禁止剤、可塑剤、充填材、ベリング剤、消泡剤等の添加剤を配合することができる。このうち、熱重合禁止剤としては、ハイドロキノン、ハイドロキノンモノメチルエーテル、ピロガロール、tert-ブチルカテコール、フェノチアジン等を挙げることができ、可塑剤としては、ジブチルフタレート、ジオクチルフタレート、トリクレジル等を挙げることができ、充填材としては、グラスファイバー、シリカ、マイカ、アルミナ等を挙げることができ、また、消泡剤やレベリング剤としては、例えば、シリコン系、フッ素系、アクリル系の化合物を挙げることができる。 Moreover, the photosensitive resin composition for forming a display element partition according to the present invention is blended with additives such as a curing accelerator, a thermal polymerization inhibitor, a plasticizer, a filler, a belling agent, and an antifoaming agent as necessary. be able to. Among these, the thermal polymerization inhibitor can include hydroquinone, hydroquinone monomethyl ether, pyrogallol, tert-butylcatechol, phenothiazine, etc., and the plasticizer can include dibutyl phthalate, dioctyl phthalate, tricresyl, etc. Examples of the filler include glass fiber, silica, mica, and alumina. Examples of the antifoaming agent and leveling agent include silicon-based, fluorine-based, and acrylic-based compounds.
特に表面特性改善に用いるレベリング剤、消泡剤などの界面活性作用を有する材料を添加する際は、硬化後の表面撥インキ性を損なわない程度に加える必要があり、好ましくは組成物中全固形分に対する濃度で撥インキ剤より少ない含有量で添加する。 In particular, when adding materials having surface activity such as leveling agents and antifoaming agents used for improving surface properties, it is necessary to add them to the extent that they do not impair the surface ink repellency after curing, preferably all solids in the composition It is added at a lower content than the ink repellent at a concentration relative to the minute.
本発明の表示素子向けの隔壁形成用感光性樹脂組成物は、上記(A)〜(E)成分又はこれらと溶剤を主成分として含有する。溶剤を除いた固形分(固形分には硬化後に固形分となるモノマーを含む)中に、(A)〜(E)成分が合計で70wt%以上、好ましくは80wt%、より好ましくは90wt%以上含むことが望ましい。溶剤の量は、塗布方式に依存する目標とする粘度によって変化するが、30〜90wt%の範囲が望ましい。 The partition-forming photosensitive resin composition for display elements of the present invention contains the above components (A) to (E) or these and a solvent as main components. In the solid content excluding the solvent (the solid content includes monomers that become solid content after curing), the total of components (A) to (E) is 70 wt% or more, preferably 80 wt%, more preferably 90 wt% or more It is desirable to include. The amount of the solvent varies depending on the target viscosity depending on the coating method, but is preferably in the range of 30 to 90 wt%.
本発明の表示素子用隔壁又はカラーフィルター隔壁等を形成するためには、上述した本発明のアルカリ現像感光性樹脂組成物を用いてフォトリソグラフィー法により形成される。その製造工程としては、先ず、感光性樹脂組成物を溶液にして基板表面に塗布し、次いで溶媒を乾燥させた(プリベーク)後、このようにして得られた被膜の上にフォトマスクをあて、紫外線を照射して露光部を硬化させ、更にアルカリ水溶液を用いて未露光部を溶出させる現像を行ってパターンを形成し、更に後乾燥としてポストベークを行う方法が挙げられる。 In order to form the partition for display elements or the color filter partition of the present invention, it is formed by the photolithography method using the above-described alkali development photosensitive resin composition of the present invention. As the manufacturing process, first, the photosensitive resin composition is applied to the substrate surface as a solution, and then the solvent is dried (prebaked), and then a photomask is applied on the coating thus obtained, Examples include a method in which an exposed portion is cured by irradiating ultraviolet rays, a pattern is formed by performing development in which an unexposed portion is eluted with an alkaline aqueous solution, and post-baking is performed as post-drying.
感光性樹脂組成物の溶液を塗布する基板としては、ガラス、透明フィルム(例えば、ポリカーボネート、ポリエチレンテレフタレート、ポリエーテルスルフォン等)上にITO、金等の透明電極が蒸着あるいはパターニングされたもの等が用いられる。 As a substrate on which the solution of the photosensitive resin composition is applied, a glass, a transparent film (for example, polycarbonate, polyethylene terephthalate, polyether sulfone, etc.) on which a transparent electrode such as ITO or gold is deposited or patterned is used. It is done.
この感光性樹脂組成物の溶液を基板に塗布する方法としては、公知の溶液浸漬法、スプレー法の他、ローラーコーター機、ランドコーター機やスピナー機を用いる方法等の何れの方法をも採用することができる。これらの方法によって、所望の厚さに塗布した後、溶剤を除去する(プリベーク)ことにより、被膜が形成される。プリベークはオーブン、ホットプレート等により加熱することによって行われる。プリベークにおける加熱温度及び加熱時間は使用する溶剤に応じて適宜選択され、例えば60〜120℃の温度で1〜10分間行われる。 As a method for applying the solution of the photosensitive resin composition to the substrate, any method such as a method using a roller coater machine, a land coater machine, or a spinner machine as well as a known solution dipping method and spray method can be adopted. be able to. After applying to a desired thickness by these methods, the film is formed by removing the solvent (pre-baking). Pre-baking is performed by heating with an oven, a hot plate or the like. The heating temperature and heating time in the pre-baking are appropriately selected according to the solvent to be used, for example, at a temperature of 60 to 120 ° C. for 1 to 10 minutes.
プリベーク後に行われる露光は、露光機によって行なわれ、フォトマスクを介して露光することによりパターンに対応した部分のレジストのみを感光させる。露光機及びその露光照射条件は適宜選択され、超高圧水銀灯、高圧水銀ランプ、メタルハライドランプ、遠紫外線灯等の光源を用いて露光を行い、塗膜中のブラックレジスト用樹脂組成物を光硬化させる。 The exposure performed after pre-baking is performed by an exposure machine, and only the resist corresponding to the pattern is exposed by exposing through a photomask. The exposure machine and the exposure irradiation conditions are appropriately selected, and light exposure is performed using a light source such as an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a metal halide lamp, a deep ultraviolet lamp, and the resin composition for black resist in the coating film is photocured. .
露光後のアルカリ現像は、露光されない部分のレジストを除去する目的で行われ、この現像によって所望のパターンが形成される。このアルカリ現像に適した現像液としては、例えば、アルカリ金属やアルカリ土類金属の炭酸塩の水溶液、アルカリ金属の水酸化物の水溶液等を挙げることができるが、特に炭酸ナトリウム、炭酸カリウム、炭酸リチウム等の炭酸塩を0.05〜3重量%含有する弱アルカリ性水溶液を用いて20〜30℃の温度で現像するのがよく、市販の現像機や超音波洗浄機等を用いて微細な画像を精密に形成することができる。 The alkali development after the exposure is performed for the purpose of removing the resist in the unexposed portion, and a desired pattern is formed by this development. Examples of the developer suitable for the alkali development include, for example, an aqueous solution of an alkali metal or alkaline earth metal carbonate, an aqueous solution of an alkali metal hydroxide, and the like. Particularly, sodium carbonate, potassium carbonate, carbonate It is preferable to develop at a temperature of 20 to 30 ° C. using a weakly alkaline aqueous solution containing 0.05 to 3% by weight of a carbonate such as lithium, and a fine image using a commercially available developing machine or ultrasonic cleaner. Can be formed precisely.
このようにして現像した後、160〜250℃の温度、及び20〜100分の条件で熱処理(ポストベーク)が行われる。このポストベークは、パターニングされた遮光膜と基板との密着性を高めるため等の目的で行われる。これはプリベークと同様に、オーブン、ホットプレート等により加熱することによって行われる。本発明のパターニングされた遮光膜は、以上のフォトリソグラフィー法による各工程を経て形成される。 After the development as described above, a heat treatment (post-bake) is performed at a temperature of 160 to 250 ° C. and a condition of 20 to 100 minutes. This post-baking is performed for the purpose of improving the adhesion between the patterned light-shielding film and the substrate. This is performed by heating with an oven, a hot plate or the like, as in the pre-baking. The patterned light-shielding film of the present invention is formed through each step by the above photolithography method.
また、本発明の隔壁形成用感光性樹脂組成物は、例えば上記の方法等により遮光性カラーフィルター隔壁とした上で、種々の手段で画素を設けて所定の色パターンを形成すれば、カラーフィルターを得ることができる。特に、本発明の感光性樹脂組成物を用いて形成したカラーフィルター隔壁は、基板に対する密着性に優れると共に撥インキ性に優れることから、得られた遮光性カラーフィルター隔壁内にインクジェット法印刷法により画素を形成してカラーフィルターを得るのに好適である。 In addition, the photosensitive resin composition for forming a partition of the present invention can be used as a color filter by forming a predetermined color pattern by providing pixels by various means after forming a light-shielding color filter partition by, for example, the above method. Can be obtained. In particular, since the color filter partition formed using the photosensitive resin composition of the present invention has excellent adhesion to the substrate and excellent ink repellency, the ink-jet printing method is used in the obtained light-shielding color filter partition. It is suitable for forming a pixel to obtain a color filter.
以下、実施例及び比較例に基づいて、本発明の実施形態を具体的に説明する。なお、表中記載の化合物略号を以下に示す。
CF9BuMA:CH2=C(CH3)COOCH2CH2CH2CH2OC9F17
CF9PEMA:CH2=C(CH3)COOCH2CH2OCOC6H4OC9F17
CFnMA:CH2=C(CH3)COOCH2CH2(CF2)nCF3 n=4〜10の混合物
CF9PHSt:CH2=CHC6H4OC9F17
PHSt:パラヒドロキシスチレン
IBMA:イソボルニルメタクリレート
2−HEMA:2−ヒドロキシエチルメタクリレート
GMA:グリシジルメタクリレート
4-HBMA:4−ヒドロキシブチルメタクリレート
MA: メタクリル酸
NPMI:n−フェニルマレイミド
BzMA:ベンジルメタクリレート
AIBN:アゾビスイソブチロニトリル
LM:ラウリルメルカプタン
Embodiments of the present invention will be specifically described below based on examples and comparative examples. The compound abbreviations listed in the table are shown below.
CF9BuMA: CH 2 = C (CH 3 ) COOCH 2 CH 2 CH 2 CH 2 OC 9 F 17
CF9PEMA: CH 2 = C (CH 3 ) COOCH 2 CH 2 OCOC 6 H 4 OC 9 F 17
CFnMA: CH 2 = C (CH 3) COOCH 2 CH 2 (CF 2) a mixture of n CF 3 n = 4~10
CF9PHSt: CH 2 = CHC 6 H 4 OC 9 F 17
PHSt: Parahydroxystyrene
IBMA: Isobornyl methacrylate 2-HEMA: 2-hydroxyethyl methacrylate
GMA: Glycidyl methacrylate
4-HBMA: 4-hydroxybutyl methacrylate
MA: Methacrylic acid
NPMI: n-phenylmaleimide
BzMA: benzyl methacrylate
AIBN: Azobisisobutyronitrile
LM: Lauryl mercaptan
<合成例A1> 含フッ素樹脂 A-1
攪拌機を備えた内容積1リットルの反応機にCF9PEMA(60.0g)、IBMA(18.45g)、4-HBMA(18.45g)、MA(3.10g)、重合開始剤AIBN(0.69g)、及び連鎖移動剤LM(1.70g)を仕込み、さらに固形分濃度が40wt%となるようにプロピレングリコールモノメチルアセテート(PGMEA)を加え、窒素雰囲気下に攪拌しながら、90℃にて14時間重合させた。降温後、固形分濃度が20wt%になるようにPGMEAにて希釈して、含フッ素樹脂A-1の溶液を得た。この溶液は室温に放置しておいても均一な溶液を呈していた。また、含フッ素樹脂A-1の重量平均分子量は8400であり、酸価は20mgKOH/1gポリマーであった。ただし、重量平均分子量は、THFを展開溶媒としたGPCにより求めた(ポリエチレングリコール換算)。
<Synthesis example A1> Fluorine-containing resin A-1
CF9PEMA (60.0 g), IBMA (18.45 g), 4-HBMA (18.45 g), MA (3.10 g), polymerization initiator AIBN (0.69 g), and chain transfer to a 1 liter reactor equipped with a stirrer Agent LM (1.70 g) was charged, and propylene glycol monomethyl acetate (PGMEA) was further added so that the solid content concentration was 40 wt%, and polymerization was performed at 90 ° C. for 14 hours while stirring in a nitrogen atmosphere. After cooling, the solution was diluted with PGMEA so that the solid content concentration was 20 wt% to obtain a solution of fluororesin A-1. This solution exhibited a uniform solution even when left at room temperature. The weight average molecular weight of the fluororesin A-1 was 8400, and the acid value was 20 mgKOH / 1g polymer. However, the weight average molecular weight was determined by GPC using THF as a developing solvent (in terms of polyethylene glycol).
<合成例A2〜A14及び比較合成例a1〜a2>
含フッ素樹脂A-1の合成において、原料の配合量を表1及び表2のように変更したほかは同様にして、含フッ素樹脂A-2〜A-14およびa-1〜a-4を得た。いずれの含フッ素樹脂Aにおいても式(1)に示した構造の置換基の含有量は20〜50重量%である。なお、表1及び表2に示した各成分の欄に記した数値の単位は「g」である。特性は、合成例1と同様にして重量平均分子量、酸価、ならびにPGMEA溶解性(20℃)を示した。
<Synthesis Examples A2 to A14 and Comparative Synthesis Examples a1 to a2>
In the synthesis of fluorinated resin A-1, the fluorinated resins A-2 to A-14 and a-1 to a-4 were prepared in the same manner except that the amount of raw materials was changed as shown in Tables 1 and 2. Obtained. In any fluorine-containing resin A, the content of the substituent having the structure shown in Formula (1) is 20 to 50% by weight. In addition, the unit of the numerical value described in the column of each component shown in Table 1 and Table 2 is “g”. The properties were the same as in Synthesis Example 1 and showed the weight average molecular weight, acid value, and PGMEA solubility (20 ° C.).
<合成例A-15> 含フッ素樹脂 A-15の調製
攪拌機を備えた内容積1リットルの反応機にIBMA(27.4g)、4-HBMA(13.5g)、MA(4.60g)、重合開始剤AIBN(0.69g)、及び連鎖移動剤LM(1.70g)を仕込み、さらに固形分濃度が40wt%となるようにプロピレングリコールモノメチルアセテート(PGMEA)を加え、窒素雰囲気下に攪拌しながら、90℃にて14時間重合させた。降温後、[(CF3)2CF]2C=CFCF3を19.1gとトリエチルアミン4gを加えて、さらに40℃にて12時間攪拌した。恒温後、溶液をメタノール中に投入し、減圧濾過により含フッ素樹脂A-15を50g得た。
<Synthesis Example A-15> Preparation of fluorinated resin A-15 In a 1 liter reactor equipped with a stirrer, IBMA (27.4 g), 4-HBMA (13.5 g), MA (4.60 g), polymerization initiator Charge AIBN (0.69 g) and chain transfer agent LM (1.70 g), add propylene glycol monomethyl acetate (PGMEA) to a solid content of 40 wt%, and stir in a nitrogen atmosphere at 90 ° C. For 14 hours. After cooling, 19.1 g of [(CF 3 ) 2 CF] 2 C═CFCF 3 and 4 g of triethylamine were added, and the mixture was further stirred at 40 ° C. for 12 hours. After the constant temperature, the solution was poured into methanol, and 50 g of fluororesin A-15 was obtained by filtration under reduced pressure.
<合成例A-1s> 二重結合の導入 (含フッ素樹脂 A-1s溶液の調製)
前述A-1の20wt%PGMEA溶液100gと2−アクリロイルオキシエチルイソシアネート1.64g(MW=141.12、イソシアネート基/A-1中のヒドロキシル基=0.5mol/mol)、1,4-ジアザビシクロ[2,2,2]オクタ0.03gとを混合し、50℃にて12時間攪拌し、室温へ冷却した。このポリマー溶液A-1sは、IRによりNCO吸収(2730nm)の消失を確認した。
<Synthesis Example A-1s> Introduction of double bond (Preparation of fluororesin A-1s solution)
100 g of 20 wt% PGMEA solution of A-1 and 1.64 g of 2-acryloyloxyethyl isocyanate (MW = 141.12, isocyanate group / hydroxyl group in A-1 = 0.5 mol / mol), 1,4-diazabicyclo [2 , 2,2] octa 0.03 g, and stirred at 50 ° C. for 12 hours and cooled to room temperature. This polymer solution A-1s was confirmed to have lost NCO absorption (2730 nm) by IR.
<合成例A-2s〜A-15s> 含フッ素樹脂 A-2s〜A-15s溶液の調製
前述したA-2〜A-14各ポリマーの20wt%PGMEA溶液100gを用い、各ポリマーのヒドロキシル基に対して0.5mol/molとなるように2−アクリロイルオキシエチルイソシアネートを仕込んだ他は、合成例A-1sと同様に行い、ポリマーA-2s〜A-14sの各溶液を得た。
<Synthesis Examples A-2s to A-15s> Preparation of fluororesin A-2s to A-15s solution Using 100 g of the 20 wt% PGMEA solution of each of the aforementioned A-2 to A-14 polymers, the hydroxyl groups of each polymer Each solution of polymers A-2s to A-14s was obtained in the same manner as in Synthesis Example A-1s except that 2-acryloyloxyethyl isocyanate was charged so as to be 0.5 mol / mol.
<合成例A-2s2> 二重結合の導入−2 (含フッ素樹脂 A-2s2溶液の調製)
前述A-1の20wt%PGMEA溶液100gと2−アクリロイルオキシエチルイソシアネート4.1g(MW=141.12、イソシアネート基/A-1中のヒドロキシル基=1mol/mol)、1,4-ジアザビシクロ[2,2,2]オクタ0.03gとを混合し、50℃にて12時間攪拌し、室温へ冷却した。このポリマー溶液A-2s2は、IRによりNCO吸収(2730nm)の消失を確認した。
<Synthesis example A-2s2> Introduction of double bond-2 (Preparation of fluororesin A-2s2 solution)
100 g of 20 wt% PGMEA solution of A-1 and 4.1 g of 2-acryloyloxyethyl isocyanate (MW = 141.12, isocyanate group / hydroxyl group in A-1 = 1 mol / mol), 1,4-diazabicyclo [2,2 , 2] Octa 0.03 g was mixed, stirred at 50 ° C. for 12 hours, and cooled to room temperature. This polymer solution A-2s2 was confirmed to have lost NCO absorption (2730 nm) by IR.
<実施例1〜25及び比較例1〜4>
まず(A)成分を除く(B)〜(F)成分を表3及び4に記載した割合(重量部)で混合し、プロピレングリコールモノメチルエーテルアセテートを加えて固形分濃度20重量%となるようにした。引き続き、表3及び4記載の重量部で(A)成分溶液を加えた。次いで、2μmのポリプロピレン製メンブレンフィルターを用いて0.2kg/cm2加圧にてろ過し、アルカリ現像感光性樹脂組成物を調製した。表3及び4において、(A)成分及び(B)成分の( )内に、全固形分に対する配合割合をwt%で示した。(E)成分の配合割合については全固形分に対する(顔料/全固形分)wt%として別欄に示した。
<Examples 1 to 25 and Comparative Examples 1 to 4>
First, the components (B) to (F) excluding the component (A) are mixed in the proportions (parts by weight) described in Tables 3 and 4, and propylene glycol monomethyl ether acetate is added so that the solid content concentration becomes 20% by weight. did. Subsequently, component solution (A) was added in parts by weight shown in Tables 3 and 4. Subsequently, it filtered by 0.2 kg / cm < 2 > pressurization using a 2 micrometer polypropylene membrane filter, and prepared alkali development photosensitive resin composition. In Tables 3 and 4, the blending ratio with respect to the total solid content is shown in wt% in () of the component (A) and the component (B). The blending ratio of component (E) is shown in the separate column as (pigment / total solids) wt% with respect to the total solids.
ここで、実施例及び比較例のアルカリ現像感光性樹脂組成物の製造で用いた配合成分は以下の通りである。
(B)-1:フルオレン骨格を有するエポキシアクリレートの酸無水物重縮合物のプロピレングリコールモノメチルエーテルアセテート溶液(樹脂固形分濃度=56.1重量%、新日鐵化学社製 商品名V259ME)
(B)-2:重量平均分子量30000、酸価100(KOHmg/g)のN−エチルマレイミド/メタクリル酸/ベンジルメタクリレート共重合体のプロピレングリコールモノメチルエーテルアセテート溶液(樹脂固形分濃度=36.7重量%)(N−エチルマレイミド:メタクリル酸:ベンジルメタクリレート=29:20:51mol%)
(C)-1:ジペンタエリスリトールヘキサアクリレートとジペンタエリスリトールペンタアクリレートとの混合物(日本化薬社製 商品名 DPHA)
(D)-1:IRGACURE OXE-01 (チバ・スペシャルティ・ケミカルズ社製)
(D)-2:IRGACURE OXE-02 (チバ・スペシャルティ・ケミカルズ社製)
(E)-1:カーボンブラック濃度20重量%、高分子分散剤濃度5重量%のプロピレングリコールモノメチルエーテルアセテート分散液(固形分25%)
(F)-1:シランカップリング剤 S-510 (信越化学(株)製)
Here, the compounding component used by manufacture of the alkali image development photosensitive resin composition of an Example and a comparative example is as follows.
(B) -1: propylene glycol monomethyl ether acetate solution of an acid anhydride polycondensate of an epoxy acrylate having a fluorene skeleton (resin solid content concentration = 56.1% by weight, trade name V259ME manufactured by Nippon Steel Chemical Co., Ltd.)
(B) -2: N-ethylmaleimide / methacrylic acid / benzyl methacrylate copolymer propylene glycol monomethyl ether acetate solution having a weight average molecular weight of 30,000 and an acid value of 100 (KOHmg / g) (resin solid content concentration = 36.7% by weight) (N-ethylmaleimide: methacrylic acid: benzyl methacrylate = 29: 20: 51 mol%)
(C) -1: Mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate (trade name DPHA, manufactured by Nippon Kayaku Co., Ltd.)
(D) -1: IRGACURE OXE-01 (Ciba Specialty Chemicals)
(D) -2: IRGACURE OXE-02 (Ciba Specialty Chemicals)
(E) -1: Propylene glycol monomethyl ether acetate dispersion with a carbon black concentration of 20% by weight and a polymer dispersant concentration of 5% by weight (solid content 25%)
(F) -1: Silane coupling agent S-510 (manufactured by Shin-Etsu Chemical Co., Ltd.)
上記実施例及び比較例で得られたアルカリ現像性感光性樹脂組成物を、スピンコーターを用いて125mm×125mmのガラス基板上にポストベーク後の膜厚が2.1μmとなるように塗布し、80℃で1分間乾燥した。その後、露光ギャップを150μmに調整し、乾燥塗膜の上に、ネガ型フォトマスクを被せ、I線照度30mW/cm2の超高圧水銀ランプで100mj/cm2の紫外線を照射し感光部分の光硬化反応を行った。用いたフォトマスクは、x方向50μmライン+350μm開口、y方向20μmライン+180μm開口となるマトリックスを形成するものである。 The alkali-developable photosensitive resin compositions obtained in the above examples and comparative examples were applied on a 125 mm × 125 mm glass substrate using a spin coater so that the film thickness after post-baking was 2.1 μm, Dry at 80 ° C. for 1 minute. After that, the exposure gap is adjusted to 150 μm, a negative photomask is put on the dried coating film, and 100 mj / cm 2 of ultraviolet light is irradiated with an ultrahigh pressure mercury lamp with an I-line illuminance of 30 mW / cm 2. A curing reaction was performed. The photomask used forms a matrix with x-direction 50 μm lines + 350 μm openings and y-direction 20 μm lines + 180 μm openings.
次に、この露光済み塗板を0.05%水酸化カリウム水溶液中、23℃にて60秒又は80秒の1kgf/cm2圧シャワー現像及び5kgf/cm2圧のスプレー水洗を行い、塗膜の未露光部を除去しガラス基板上に画素パターンを形成し、その後、熱風乾燥機を用いて230℃にて30分間熱ポストベークした。実施例及び比較例における評価項目と方法は以下の通りである。 Next, this exposed coated plate is subjected to 1 kgf / cm 2 pressure shower development at 23 ° C. for 60 seconds or 80 seconds and 5 kgf / cm 2 pressure spray water washing in an aqueous solution of 0.05% potassium hydroxide. The unexposed portion was removed to form a pixel pattern on the glass substrate, and then heat post-baked at 230 ° C. for 30 minutes using a hot air dryer. Evaluation items and methods in Examples and Comparative Examples are as follows.
膜厚:触針式膜厚計(東京精密社製 商品名サーフコム)を用いて測定した。
塗布異物:スピンコート後の塗膜に放射状スジが観察された場合を×<不良>、観察されなかった場合を○<良好>とした。
現像性:現像後の画素パターンを顕微鏡観察し、基板に対する剥離やパターンエッジ部分のギザツキが認められないものを○<良好>、認められるものを×<不良>と評価した。
塗膜表面粗度:現像、熱焼成後の塗膜の表面粗度(Ra)の値が、150Å未満を○<良好>、150Å以上を×<不良>と評価した。
パターン密着性:ピーリングテストで20μmパターンの剥がれが認められないものを○<良好>、認められるものを×<不良>と評価した。
PCT密着性:ポストベーク実施済みのパターン形成基板を、121℃、100%RH、2atm、及び24時間の条件下においてPCT(プレッシャー・クッカー)テストを実施後、20μmパターン部にセロハンテープを貼り付けピーリングテストを行うことでパターン密着性を評価した。
Film thickness: measured using a stylus film thickness meter (trade name Surfcom, manufactured by Tokyo Seimitsu Co., Ltd.).
Coated foreign matter: A case where radial streaks were observed in the coating film after spin coating was evaluated as x <defect>, and a case where no radial streaks were observed was evaluated as o <good>.
Developability: The pixel pattern after development was observed with a microscope, and the case where peeling to the substrate and the pattern edge portion were not observed was evaluated as ◯ <good>, and the case where it was recognized was evaluated as x <bad>.
Coated surface roughness: The surface roughness (Ra) of the coated film after development and thermal baking was evaluated as ○ <good> when the surface roughness was less than 150 mm and x <bad> when the value was 150 mm or more.
Pattern adhesion: A case where peeling of a 20 μm pattern was not recognized in a peeling test was evaluated as “good”, and a case where it was recognized was evaluated as “poor”.
PCT adhesion: A post-baked pattern-formed substrate is subjected to a PCT (pressure cooker) test under conditions of 121 ° C, 100% RH, 2 atm, and 24 hours, and then cellophane tape is applied to the 20 µm pattern. Pattern adhesion was evaluated by performing a peeling test.
OD測定:(E)成分として黒色顔料を混合した場合、ポストベーク後2.1μmの塗膜を用いて、大塚電子社製OD計を用いて測定し、1μmあたりのOD値として記載した。
接触角測定:前述した同様の方法により、現像後にガラス基板上に黒色の10mm×10mm×2.1μmの四角パターンを形成した。この塗膜上ではブチルカルビトールアセテート(BCA)を用いて、または現像で抜けたガラス面上では水の静的接触角を測定した。
IJ(インクジェット)インキ塗布特性:この得られたマトリックス中にむかって、東芝テック製インクジェットヘッドを用い、粘度10mPa.sec、固形分濃度20%のカラーフィルター用グリーンインキを以下のように打ち込み、80℃にて1分間乾燥後、さらに230℃にてポストベークを行い、光学顕微鏡で塗工状態を観察した。
描画条件1;350×180μm画素ガラス上の中央部に42plのグリーンインキを滴下した。この時、撥インキ剤が無添加の比較例と同等のガラス面上での液広がりを示すものを○とした。
描画条件2;ポストベーク後平均膜厚保が1.8μmとなるようにグレーンインキをマトリックス中に滴下し、ポストベーク後に、マトリックス近くで光漏れが発生しているか、またはマトリックス上にインキ乾燥残りがあるか観察した。
OD measurement: When a black pigment was mixed as the component (E), it was measured using an OD meter manufactured by Otsuka Electronics Co., Ltd. using a 2.1 μm coating film after post-baking and described as an OD value per 1 μm.
Contact angle measurement: A black square pattern of 10 mm × 10 mm × 2.1 μm was formed on the glass substrate after development by the same method as described above. The static contact angle of water was measured using butyl carbitol acetate (BCA) on this coating film or on the glass surface which was removed by development.
IJ (inkjet) ink coating characteristics: Into the obtained matrix, using a TOSHIBA TEC inkjet head, a green ink for a color filter having a viscosity of 10 mPa.sec and a solid content concentration of 20% was applied as follows. After drying at ° C for 1 minute, post-baking was further carried out at 230 ° C, and the coating state was observed with an optical microscope.
Drawing condition 1; 42 pl of green ink was dropped onto the center of 350 × 180 μm pixel glass. At this time, a sample exhibiting a liquid spread on the glass surface equivalent to that of the comparative example to which no ink repellent was added was marked with ◯.
Drawing condition 2: Grain ink is dropped into the matrix so that the average film thickness after post-baking is 1.8 μm. After post-baking, light leakage occurs near the matrix, or ink drying residue remains on the matrix. I observed it.
上記の結果、実施例ではいずれも遮光性カラーフィルター隔壁としての諸特性を満たし、且つ静的接触角はブチルカルビトールアセテート(BCA)においても40°以上を示した。一方、比較例では、得られた含フッ素樹脂の溶解性が低く、平滑な塗膜を得ることが難しかった。比較例2ならびに比較例4では十分な接触角が得られず、またIJ塗工時にBMからインキが漏れ出す現象が見られた。比較例3では現像後に基板上に残渣が見られ、IJ塗工時にはインキ展開性に課題が見られた。 As a result, in the examples, all the characteristics as the light-shielding color filter partition were satisfied, and the static contact angle was 40 ° or more even in butyl carbitol acetate (BCA). On the other hand, in the comparative example, the obtained fluororesin had low solubility, and it was difficult to obtain a smooth coating film. In Comparative Example 2 and Comparative Example 4, a sufficient contact angle could not be obtained, and a phenomenon in which ink leaked from BM during IJ coating was observed. In Comparative Example 3, a residue was observed on the substrate after development, and a problem was observed in ink spreadability during IJ coating.
<実施例26〜30>
まず(A)成分を除く(B)〜(D)成分ならびにYX-4000H(昭和シェル製;テトラメチルジフェニルエポキシ樹脂)を表5に記載した割合(重量部)で混合し、プロピレングリコールモノメチルエーテルアセテートを加えて固形分濃度20重量%となるようにした。引き続き、表5記載の重量部で(A)成分溶液を加えた。次いで、2μmのポリプロピレン製メンブレンフィルターを用いて0.2kg/cm2加圧にてろ過し、アルカリ現像感光性樹脂組成物を調製した。
<Examples 26 to 30>
First, components (B) to (D) excluding component (A) and YX-4000H (manufactured by Showa Shell; tetramethyldiphenyl epoxy resin) are mixed in the proportions (parts by weight) shown in Table 5 to produce propylene glycol monomethyl ether acetate. To a solid content concentration of 20% by weight. Subsequently, the component solution (A) was added in parts by weight shown in Table 5. Subsequently, it filtered by 0.2 kg / cm < 2 > pressurization using a 2 micrometer polypropylene membrane filter, and prepared alkali development photosensitive resin composition.
続いて前述実施例と同様にして、開口部が300μm×100μmならびにBMライン30μm、膜厚2.1μmのマトリックスを形成し、同様な評価を行った。この隔壁も十分なブチルカルビトールアセテートにおける静的接触角を示し、IJ塗工特性も良好であった。 Subsequently, a matrix having openings of 300 μm × 100 μm, a BM line of 30 μm, and a film thickness of 2.1 μm was formed in the same manner as in the previous example, and the same evaluation was performed. This partition also showed a sufficient static contact angle in butyl carbitol acetate, and the IJ coating characteristics were also good.
Claims (11)
含フッ素樹脂(A)は、式(1)で示される構造の置換基の占める重量割合が15〜50重量%であり、尚且つ、酸価が10〜100mgKOH/gであると共に、平均分子量が2000〜20000の範囲であり、
The fluorine-containing resin (A) has a weight ratio of 15 to 50% by weight of the substituent having the structure represented by the formula (1), an acid value of 10 to 100 mgKOH / g, and an average molecular weight. In the range of 2000 to 20000,
(B)一分子中に酸性基と2つ以上のエチレン性二重結合とを有するアルカリ現像性オリゴマー、
(C)少なくとも1分子中に3個以上のエチレン性二重結合を有する光重合性モノマー、及び
(D)光重合開始剤、
を必須成分として含む請求項1記載のアルカリ現像感光性樹脂組成物。 In addition to the fluororesin (A), the following components (B) to (D):
(B) an alkali-developable oligomer having an acidic group and two or more ethylenic double bonds in one molecule;
(C) a photopolymerizable monomer having three or more ethylenic double bonds in at least one molecule, and (D) a photopolymerization initiator,
The alkali developing photosensitive resin composition according to claim 1, comprising:
CH2=C(Rn)−COO−Y−O-Rf (2)
(式中、Rnは水素またはメチル基を示し、Yはフッ素原子を含まない2価の有機基を示し、Rfは式(1)に示す含フッ素基である) The fluororesin (A) is 30 to 80 parts by weight of at least one monomer represented by the following general formula (2) and 1 to 30 parts by weight of at least one monomer having an alkali-soluble group. The alkali-developable photosensitive resin composition according to any one of claims 1 to 3, wherein
CH 2 = C (Rn) -COO-Y-O-Rf (2)
(In the formula, Rn represents hydrogen or a methyl group, Y represents a divalent organic group containing no fluorine atom, and Rf represents a fluorine-containing group represented by the formula (1)).
(E)黒色有機顔料、混色有機顔料及び遮光材からなる群から選ばれた少なくとも1種を分散してなる遮光性分散液を添加すると共に、全固形分100重量部に対して(E)成分が25〜60重量部配合されていることを特徴とする遮光性の感光性樹脂組成物。 For the alkali-developable photosensitive resin composition according to claim 1,
(E) A light-shielding dispersion liquid in which at least one selected from the group consisting of black organic pigments, mixed color organic pigments and light-shielding materials is dispersed is added, and component (E) is added to 100 parts by weight of the total solid content. Is blended in an amount of 25 to 60 parts by weight, a light-shielding photosensitive resin composition.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008257275A JP5180765B2 (en) | 2008-10-02 | 2008-10-02 | Alkali-developable photosensitive resin composition, display element partition and display element formed using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008257275A JP5180765B2 (en) | 2008-10-02 | 2008-10-02 | Alkali-developable photosensitive resin composition, display element partition and display element formed using the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010085904A true JP2010085904A (en) | 2010-04-15 |
JP5180765B2 JP5180765B2 (en) | 2013-04-10 |
Family
ID=42249891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008257275A Active JP5180765B2 (en) | 2008-10-02 | 2008-10-02 | Alkali-developable photosensitive resin composition, display element partition and display element formed using the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5180765B2 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010128129A (en) * | 2008-11-27 | 2010-06-10 | Tokyo Ohka Kogyo Co Ltd | Photosensitive resin composition |
JP2011209443A (en) * | 2010-03-29 | 2011-10-20 | Nippon Steel Chem Co Ltd | Alkali-developable photosensitive resin composition, barrier rib for display element formed using the same, and display element |
JP2012031260A (en) * | 2010-07-29 | 2012-02-16 | Nippon Synthetic Chem Ind Co Ltd:The | Active energy ray curable resin composition, coating agent composition using the same, and cured coating film |
WO2013069789A1 (en) * | 2011-11-11 | 2013-05-16 | 旭硝子株式会社 | Negative-type photosensitive resin composition, partition wall, black matrix, and optical element |
CN103838082A (en) * | 2012-11-21 | 2014-06-04 | 新日铁住金化学株式会社 | Treating agent for inkjet substrate |
JP2014122152A (en) * | 2012-11-21 | 2014-07-03 | Nippon Steel & Sumikin Chemical Co Ltd | Treatment agent for an inkjet base |
JP2020125404A (en) * | 2019-02-05 | 2020-08-20 | 太陽インキ製造株式会社 | Curable resin composition, dry film, cured product, and electronic component |
JP2020125403A (en) * | 2019-02-05 | 2020-08-20 | 太陽インキ製造株式会社 | Curable resin composition, dry film, cured product, and electronic component |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0728230A (en) * | 1993-07-07 | 1995-01-31 | Japan Synthetic Rubber Co Ltd | Radiation sensitive resist composition |
JP2004361736A (en) * | 2003-06-05 | 2004-12-24 | Nippon Steel Chem Co Ltd | Photosensitive resin composition for black resist and light shielding film formed using the same |
WO2007061115A1 (en) * | 2005-11-28 | 2007-05-31 | Asahi Glass Company, Limited | Process for producing organic el, color filter and diaphragm |
JP2007304534A (en) * | 2006-04-11 | 2007-11-22 | Fujifilm Corp | Photosensitive transfer material, partition and method for forming the same, optical element and method for manufacturing the same, and display device |
JP2009037233A (en) * | 2007-07-10 | 2009-02-19 | Nippon Steel Chem Co Ltd | Photosensitive resin composition for forming color filter barrier plate, and light shielding color filter barrier plate and color filter formed using it |
-
2008
- 2008-10-02 JP JP2008257275A patent/JP5180765B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0728230A (en) * | 1993-07-07 | 1995-01-31 | Japan Synthetic Rubber Co Ltd | Radiation sensitive resist composition |
JP2004361736A (en) * | 2003-06-05 | 2004-12-24 | Nippon Steel Chem Co Ltd | Photosensitive resin composition for black resist and light shielding film formed using the same |
WO2007061115A1 (en) * | 2005-11-28 | 2007-05-31 | Asahi Glass Company, Limited | Process for producing organic el, color filter and diaphragm |
JP2007304534A (en) * | 2006-04-11 | 2007-11-22 | Fujifilm Corp | Photosensitive transfer material, partition and method for forming the same, optical element and method for manufacturing the same, and display device |
JP2009037233A (en) * | 2007-07-10 | 2009-02-19 | Nippon Steel Chem Co Ltd | Photosensitive resin composition for forming color filter barrier plate, and light shielding color filter barrier plate and color filter formed using it |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010128129A (en) * | 2008-11-27 | 2010-06-10 | Tokyo Ohka Kogyo Co Ltd | Photosensitive resin composition |
JP2011209443A (en) * | 2010-03-29 | 2011-10-20 | Nippon Steel Chem Co Ltd | Alkali-developable photosensitive resin composition, barrier rib for display element formed using the same, and display element |
JP2012031260A (en) * | 2010-07-29 | 2012-02-16 | Nippon Synthetic Chem Ind Co Ltd:The | Active energy ray curable resin composition, coating agent composition using the same, and cured coating film |
CN103946747A (en) * | 2011-11-11 | 2014-07-23 | 旭硝子株式会社 | Negative-type photosensitive resin composition, partition wall, black matrix, and optical element |
WO2013069789A1 (en) * | 2011-11-11 | 2013-05-16 | 旭硝子株式会社 | Negative-type photosensitive resin composition, partition wall, black matrix, and optical element |
KR20140097117A (en) * | 2011-11-11 | 2014-08-06 | 아사히 가라스 가부시키가이샤 | Negative-type photosensitive resin composition, partition wall, black matrix, and optical element |
JPWO2013069789A1 (en) * | 2011-11-11 | 2015-04-02 | 旭硝子株式会社 | Negative photosensitive resin composition, partition, black matrix, and optical element |
CN103946747B (en) * | 2011-11-11 | 2018-06-05 | 旭硝子株式会社 | Negative light-sensitive resin combination, partition wall, black matrix" and optical element |
KR101921368B1 (en) * | 2011-11-11 | 2018-11-22 | 에이지씨 가부시키가이샤 | Negative-type photosensitive resin composition, partition wall, black matrix, and optical element |
CN103838082A (en) * | 2012-11-21 | 2014-06-04 | 新日铁住金化学株式会社 | Treating agent for inkjet substrate |
JP2014122152A (en) * | 2012-11-21 | 2014-07-03 | Nippon Steel & Sumikin Chemical Co Ltd | Treatment agent for an inkjet base |
JP2020125404A (en) * | 2019-02-05 | 2020-08-20 | 太陽インキ製造株式会社 | Curable resin composition, dry film, cured product, and electronic component |
JP2020125403A (en) * | 2019-02-05 | 2020-08-20 | 太陽インキ製造株式会社 | Curable resin composition, dry film, cured product, and electronic component |
JP7289666B2 (en) | 2019-02-05 | 2023-06-12 | 太陽インキ製造株式会社 | Curable resin composition, dry film, cured product and electronic parts |
JP7298079B2 (en) | 2019-02-05 | 2023-06-27 | 太陽ホールディングス株式会社 | Curable resin composition, dry film, cured product and electronic parts |
Also Published As
Publication number | Publication date |
---|---|
JP5180765B2 (en) | 2013-04-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5431225B2 (en) | Alkali-developable photosensitive resin composition, partition wall for display element formed using the same, and display element | |
JP5270113B2 (en) | Photosensitive resin composition for black resist, light shielding film and color filter using the same | |
JP5180765B2 (en) | Alkali-developable photosensitive resin composition, display element partition and display element formed using the same | |
JP4437651B2 (en) | Photosensitive resin composition and color filter using the same | |
JP5346509B2 (en) | Photosensitive resin composition for forming color filter partition walls, light-shielding color filter partition walls and color filters formed using the same | |
JP4290483B2 (en) | Photosensitive resin composition for black resist and light-shielding film formed using the same | |
JP4489564B2 (en) | Photosensitive resin composition and color filter using the same | |
JP2010256589A (en) | Photosensitive resin composition and cured film, and partition | |
JP6136928B2 (en) | Negative photosensitive resin composition, method for producing partition wall, and method for producing optical element | |
JP2017102431A (en) | Colored photosensitive resin composition, and color filter and image display device manufactured by using the same | |
JP2008298859A (en) | Photosensitive composition, partition using the same, method for producing partition, method for producing color filter, method for producing organic el display element and method for producing organic tft array | |
JP2013050549A (en) | Negative photosensitive resin composition, partition wall, optical element | |
KR20160112640A (en) | A color photosensitive resin composition, color filter and display device comprising the same | |
KR101981373B1 (en) | A green photosensitive resin composition, color filter and display device comprising the same | |
JP5346508B2 (en) | Photosensitive resin composition for forming color filter partition walls, light-shielding color filter partition walls and color filters formed using the same | |
JP2017062467A (en) | Green photosensitive resin composition, and color filter and display device comprising the same | |
TWI440903B (en) | Photosensitive resin composition for forming partition of color filter and partition of color filter formed by using the same as well as color filter and manufacturing method for color filter | |
TW201627764A (en) | Photosensitive resin composition, photocurable pattern formed from the same and image display comprising the pattern | |
JP5108300B2 (en) | Photosensitive resin composition and color filter using the same | |
TW202105060A (en) | Structure for a quantum dot barrier rib and process for preparing the same | |
JP2014038345A (en) | Photosensitive resin composition and cured film | |
JP2016051176A (en) | Colored photosensitive resin composition | |
JP2003255120A (en) | Resin composition for color filter | |
JP4833324B2 (en) | Photosensitive resin composition and color filter using the same | |
JP2009053415A (en) | Method for manufacturing color filter by ink-jet printing method, and color filter |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110809 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20121221 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130108 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130111 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5180765 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |