JP2010084202A - Member coated with hard film and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a member coated with a hard film which has adequate wear resistance and seizure resistance, is also superior in adhesiveness to a substrate and durability, and has high hardness, and to provide a method for manufacturing the same. <P>SOLUTION: The member has a chromium film functioning as an underlayer 2 formed on the substrate 1, has a plurality of chromium films and a plurality of nitrogen-containing chromium films formed on the underlayer 2 so that the chromium films functioning as stress relaxation layers 3 having an approximately same thickness of 40 nm or more and the nitrogen-containing chromium films functioning as hard layers 4 having an approximately same thickness of 250 nm or less are alternately arranged. The underlayer 2, the stress relaxation layer 3 and the hard layer 4 are continuously formed in a treatment chamber of an apparatus which sputters a chromium target therein. When the underlayer 2 and the stress relaxation layer 3 are formed, the treatment chamber is set at argon gas atmosphere, and when the hard layer 4 is formed, the treatment chamber is set at an atmosphere containing argon gas and nitrogen gas. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a hard film-coated member and a method for producing the same, and more particularly to a member having a nitrogen-containing chromium film formed on the surface as a hard film and a method for producing the same.

  Conventionally, nitrogen-containing chromium is produced by physical vapor deposition such as sputtering on the surfaces of sliding parts and machine parts such as automobiles that require wear resistance and seizure resistance, as well as dies used under high surface pressure. A method is known in which a film is formed to improve wear resistance and seizure resistance. However, when a hard film such as a nitrogen-containing chromium film is formed on a metal substrate by physical vapor deposition such as sputtering, it is difficult to thicken the film due to the compressive stress of the film itself, and the internal stress of the film increases. There is a problem that the adhesion to the base material is deteriorated.

  As a method for solving such a problem, by changing the nitrogen concentration in the nitrogen-containing chromium film formed on the surface of the substrate by the sputtering method between the substrate side and the surface side, good wear resistance and There has been proposed a method for producing a nitrogen-containing chromium film that has seizure resistance and the like, and also has excellent adhesion to a base material and toughness (see, for example, Patent Document 1). In addition, the step of forming the composite nitride for a certain period of time with a high bias voltage capable of forming columnar crystals by the ion plating method and the step of forming the composite nitride for a certain period of time with a low bias voltage capable of preventing columnar crystals are alternately repeated. In addition, by interposing a stress relaxation layer of a composite nitride having a structure that is not a columnar crystal with a certain thickness at regular intervals in the hard film of the columnar composite nitride, the internal stress is reduced and the adhesive strength is high A method for producing a hard thick film has been proposed (see, for example, Patent Document 2).

JP 2007-92112 A (paragraph number 0008-0013) Japanese Patent Laying-Open No. 2005-187859 (paragraph numbers 0011-0013)

  However, in the method of Patent Document 1, although the hardness of the outermost surface is high, the hardness decreases from the outermost surface toward the base material. Therefore, the amount of wear during sliding of the base material on which the nitrogen-containing chromium film is formed on the surface Increases exponentially, and durability may not be good when used under high surface pressure. Further, the method of Patent Document 2 has problems that productivity is poor, the surface becomes rough, and the hardness is reduced as compared with the case where a single layer film of composite nitride is formed.

  Therefore, in view of such conventional problems, the present invention is coated with a hard film having a high hardness having excellent wear resistance and seizure resistance, and excellent adhesion and durability to a substrate. An object of the present invention is to provide a hard coating member and a method for producing the same.

  As a result of diligent research to solve the above problems, the present inventors have found that a plurality of chromium films are arranged so that a chromium film having a thickness of 40 nm or more and a nitrogen-containing chromium film having a thickness of 250 nm or less are alternately arranged on a substrate. Hard film coated with a hard film with excellent wear resistance and seizure resistance as well as excellent adhesion and durability to the substrate by forming a film and multiple nitrogen-containing chromium films The present inventors have found that a covering member can be produced and have completed the present invention.

  That is, the hard coating member according to the present invention includes a plurality of chromium coatings and a plurality of nitrogen-containing chromium such that a chromium coating having a thickness of 40 nm or more and a nitrogen-containing chromium coating having a thickness of 250 nm or less are alternately arranged on a substrate. A film is formed. In this hard film covering member, it is preferable that a chromium film is formed as a base layer on the substrate, and a plurality of chromium films and a plurality of nitrogen-containing chromium films are formed on the base layer. Moreover, it is preferable that the thickness of each of the plurality of chromium films is substantially the same, and the thickness of each of the plurality of nitrogen-containing chromium films is approximately the same.

  In addition, the method for manufacturing a hard coating member according to the present invention includes a plurality of chromium coatings and a plurality of chromium coatings such that a chromium coating having a thickness of 40 nm or more and a nitrogen-containing chromium coating having a thickness of 250 nm or less are alternately arranged on a substrate. A nitrogen-containing chromium film is formed. In this method of manufacturing a hard coating member, when a plurality of chromium coatings and a plurality of nitrogen-containing chromium coatings are continuously formed in a processing chamber of an apparatus for sputtering using a chromium target to form a plurality of chromium coatings. In this case, it is preferable that the processing chamber is set to an argon gas atmosphere, and when the plurality of nitrogen-containing chromium films are formed, the processing chamber is set to an atmosphere containing argon gas and nitrogen gas. In addition, before forming multiple chromium films and multiple nitrogen-containing chromium films, a chromium film is formed on the substrate as an underlayer, and multiple chromium films and multiple nitrogen-containing chromium films are formed on the underlayer. It is preferable to do this. In this case, the base layer, the plurality of chromium films, and the plurality of nitrogen-containing chromium films are continuously formed in the processing chamber of the apparatus that performs sputtering using the chromium target, and the base layer and the plurality of chromium films are formed. Is preferably an argon gas atmosphere in the processing chamber, and when forming a plurality of nitrogen-containing chromium films, the processing chamber is preferably an atmosphere containing argon gas and nitrogen gas. Moreover, it is preferable that the thickness of each of the plurality of chromium films is substantially the same, and the thickness of each of the plurality of nitrogen-containing chromium films is approximately the same.

  In the present specification, the “nitrogen-containing chromium film” refers to a film in which at least one of nitrogen and chromium nitride is dispersed in the chromium film.

  According to the present invention, it is possible to produce a hard film-coated member that is coated with a high-hardness hard film that has good wear resistance and seizure resistance, and has excellent adhesion to the base material and durability. . This hard film covering member can be used for molds, machine parts, automobile parts and the like.

  Embodiments of a hard film covering member and a method for manufacturing the same according to the present invention will be described below in detail with reference to the accompanying drawings.

  As shown in FIG. 1, an embodiment of a hard film covering member according to the present invention includes a base material 1, a chromium film as a base layer 2 formed on the base material 1, and 40 nm on the base layer 2. A plurality of nitrogen-containing chromium films formed such that the chromium film as the stress relaxation layer having substantially the same thickness and the nitrogen-containing chromium film as the hard layer having substantially the same thickness of 250 nm or less are alternately arranged. 4 and a plurality of chromium coatings 3.

  In this way, a nitrogen-containing chromium film (hard layer) having substantially the same thickness of 250 nm or less and a chromium film (stress relaxation layer having a hardness lower than that of the hard layer) of 40 nm or more are alternately (periodic). (Ii) By forming the laminated multilayer film on the base material, a hard film-coated member coated with a hard film having a high hardness and excellent adhesion and durability to the base material can be produced. That is, the film formed on the base material has a multilayer structure, the thickness of each hard layer is set to 250 nm or less, and the thickness of each stress relaxation layer is set to 40 nm or more. It is possible to prevent cracks from propagating at the interface of the layers and to relieve stress by the stress relieving layer while ensuring high hardness, thereby ensuring sufficient adhesion.

  The thickness of each nitrogen-containing chromium film of the multilayer film is 250 nm or less, preferably 20 to 240 nm, and more preferably 40 to 240 nm. The thickness of each chromium film of the multilayer film is 40 nm or more, preferably 40 to 100 nm, and more preferably 40 to 80 nm. The number of chromium films and nitrogen-containing chromium films in the multilayer film is preferably 20 layers or more, and more preferably 30 layers or more. In order to further improve the adhesion between the base material and the multilayer film, it is preferable to form a chromium film of 100 nm or less on the base material as a base layer. Furthermore, the thickness of the entire multilayer film excluding the base layer is preferably 5 to 30 μm, more preferably 5 to 20 μm, and most preferably 5 to 15 μm.

  The underlayer, the plurality of chromium films, and the plurality of nitrogen-containing chromium films can be continuously formed in a processing chamber of an apparatus that performs sputtering using a chromium target. That is, when forming the base layer and the plurality of chromium films, an argon gas atmosphere is formed in the processing chamber, and when forming a plurality of nitrogen-containing chromium films, the processing chamber is set to an atmosphere containing argon gas and nitrogen gas. The underlayer, the plurality of chromium films, and the plurality of nitrogen-containing chromium films can be formed continuously.

  Since this sputtering can be performed by a DC magnetron sputtering method, it is possible to form a film at a temperature lower than the tempering temperature of the steel material used as the base material, so that softening and thermal strain of the steel material can be suppressed, Moreover, productivity is high compared with other physical vapor deposition. In addition, in this sputtering, since a lump (droplet) in which the material of the film is melted does not occur as in the case of film formation by an ion plating method, a film having a smooth surface can be formed. In addition, since this sputtering forms a chromium film and a nitrogen-containing chromium film, an intermediate layer of other materials can be eliminated. By switching ON / OFF of introducing nitrogen gas, a multi-layered film (a film having a plurality of interfaces formed therein) can be formed. Therefore, crack propagation is prevented at the interface between the nitrogen-containing chromium film as the hard layer and the chromium film as the stress relaxation layer, and stress is relaxed by the stress relaxation layer while ensuring high hardness, and excellent adhesion is achieved. The nitrogen-containing chromium film | membrane which has can be obtained. Further, since sputtering can be performed with a constant bias voltage, it is possible to prevent the film from cracking and to prevent the hardness from being lowered even if the stress relaxation layer is sandwiched.

  The embodiment of the hard film covering member according to the present invention can be manufactured using, for example, the processing apparatus 10 shown in FIG. The processing apparatus 10 includes a vacuum processing chamber 12, a vacuum pump 14 for reducing the pressure in the vacuum processing chamber 12 to form a vacuum, and a rotary table 16 disposed at the center of the bottom of the vacuum processing chamber 12. A substrate 20 as a member to be processed placed on the turntable 16 via a jig 18; a target 22 as an evaporation source disposed so as to surround the substrate 20; and these targets 22 A DC sputtering power source 24 connected to each of these, a DC ion bombard and bias power source 26 connected to the rotary table 16, and a gas introduction pipe 28 for introducing argon gas and nitrogen gas into the vacuum processing chamber 12. And. Hereinafter, a method for producing an embodiment of the hard film covering member according to the present invention using the processing apparatus 10 will be described.

(Ion bombarding process)
First, a chromium target is used as the target 22 of the processing apparatus 10, the vacuum pump 14 is operated to evacuate the vacuum processing chamber 12, and then argon gas is introduced into the vacuum processing chamber 12 through the gas introduction pipe 28. Then, the inside of the vacuum processing chamber 12 is made an argon gas atmosphere, and ion bombarding is performed to activate the surface of the substrate 20.

(Underlayer forming process)
Next, the introduction of the argon gas is temporarily stopped, the inside of the vacuum processing chamber 12 is evacuated, and then the argon gas is introduced into the vacuum processing chamber 12 through the gas introduction pipe 28 so that the inside of the vacuum processing chamber 12 is argon gas. Make the atmosphere. Thereafter, a predetermined voltage of the sputtering power supply 24 is applied to the target 22 to cause glow discharge (low temperature plasma) in the vicinity of the target 22. As a result, the argon gas in the discharge region is ionized and collides with the target 22 at a high speed. As a result of this collision, chromium atoms are knocked out of the target 22, and the chromium atoms are struck against the surface of the substrate 20. A chromium film as an underlayer is formed on the surface of 20.

(Chromium film formation process)
Next, argon gas is introduced into the vacuum processing chamber 12 through the gas introduction pipe 28 to make the inside of the vacuum processing chamber 12 an argon gas atmosphere. Thereafter, a predetermined voltage of the sputtering power supply 24 is applied to the target 22 to cause glow discharge (low temperature plasma) in the vicinity of the target 22. As a result, the argon gas in the discharge region is ionized and collides with the target 22 at a high speed. As a result of this collision, chromium atoms are struck out from the target 22, and the chrome atoms are struck against the surface of the base layer on the substrate 20. Thus, a chromium film as a stress relaxation layer is formed on the surface of the base layer on the substrate 20.

(Nitrogen-containing chromium film forming process)
Next, argon gas and nitrogen gas are introduced into the vacuum processing chamber 12 through the gas introduction pipe 28 to make the inside of the vacuum processing chamber 12 an atmosphere of argon gas and nitrogen gas. Thereafter, a predetermined voltage of the sputtering power supply 24 is applied to the target 22 to cause glow discharge (low temperature plasma) in the vicinity of the target 22. As a result, the argon gas in the discharge region is ionized and collides with the target 22 at a high speed. As a result of this collision, chromium atoms are knocked out of the target 22, and these chromium atoms together with nitrogen atoms in the atmosphere in the vacuum processing chamber 12. A chromium film (hard layer) containing nitrogen is formed on the surface of the chromium film on the substrate 20 by being struck against the surface of the chromium film on the substrate 20.

  Further, the chromium film forming step and the nitrogen-containing chromium film forming step are repeated, so that the chromium film and the nitrogen-containing chromium film having substantially the same thickness are alternately arranged so that the plurality of chromium films and the plurality of nitrogen-containing chromium are provided. Form a film.

  In the above sputtering, in order to make the thickness of the coating uniform and to maintain the temperature of the base material 20 below the tempering temperature, the distance between the target 22 and the base material 20 is set to, for example, 70 to 80 mm. It is preferable to hold.

  Examples of the hard film-coated member and the manufacturing method thereof according to the present invention will be described in detail below.

[Example 1]
The die steel SKD11 was carburized, quenched, and tempered, and then a mirror-polished base material was prepared. This base material is put into a vacuum processing chamber of a processing apparatus (DC magnetron sputtering apparatus) using a chrome target and evacuated to an ultimate vacuum of 5 × 10 ⁻⁴ Pa or less, and then the pressure in the vacuum processing chamber is 5 × 10 ⁻ Argon gas was introduced into a vacuum processing chamber under control of an argon gas atmosphere of ¹ Pa, and ion bombarding was performed at 1000 V × 2 A for about 180 minutes to activate the surface of the substrate.

  Next, after evacuating and vacuuming the vacuum processing chamber, while introducing argon gas into the vacuum processing chamber so that the partial pressure of argon gas in the atmosphere in the vacuum processing chamber becomes 0.061 Pa, the input power is 4 kW, Sputtering was performed for about 40 seconds at a bias voltage of −100 V, and a chromium film having a Vickers hardness of about HV500 and a thickness of about 50 nm was formed on the substrate as an underlayer.

  Next, while introducing argon gas into the vacuum processing chamber so that the partial pressure of argon gas in the atmosphere in the vacuum processing chamber is 0.061 Pa, the bias voltage is set to −100 V, and sputtering is performed for 60 seconds to form an underlayer. A chromium film having a thickness of about 80 nm was formed thereon (chromium film forming step).

  Next, while introducing argon gas into the vacuum processing chamber so that the partial pressure of argon gas in the atmosphere in the vacuum processing chamber is 0.038 Pa, nitrogen gas is introduced so that the partial pressure of nitrogen gas is 0.073 Pa. While introduced into the vacuum processing chamber, sputtering was performed for 180 seconds with an input power of 4 kW and a bias voltage of −100 V to form a nitrogen-containing chromium film having a thickness of about 240 nm on the chromium film (nitrogen-containing chromium film forming step). .

  Further, the above-described chromium film forming step and nitrogen-containing chromium film forming step are repeated, and 30 layers each of a chromium film having a thickness of about 80 nm and a nitrogen-containing chromium film having a thickness of about 240 nm (total 60 layers, total film thickness 9. 6 μm) Alternatingly formed, a hard coating member was obtained.

  The hard film-coated member thus obtained was evaluated for Mayer hardness, Vickers hardness, Young's modulus, HRC indentation, and critical load.

The Meyer hardness, Vickers hardness and Young's modulus as plastic deformation hardness are determined by using a Fischer hardness tester (ultra-micro hardness tester) (FISCHERSCOPEH100C _xy-p manufactured by Fischer Instrument Co., Ltd.) Calculation was performed based on the plastic deformation hardness measured at room temperature by applying measurement loads of 10 mN / 10 s and 100 mN / 10 s with an indenter. As a result, Meyer hardness was 19.7 GPa, Vickers hardness was 1328 HV, and Young's modulus was 245.5 GPa.

  The HRC impression was evaluated based on the HRC impression determination test (DIN 50103/1) by observing the impression on a C scale using a Rockwell testing machine. As a result, the HRC indentation was HF2 (slight cracks were found around the indentation).

  For the critical load Lc, a scratch tester (REVEST made by CSM, scratch tester with AE sensor) is used, minimum load 0.9N, maximum load 90N, load speed 100N / min, scratch speed 10mm / min, scratch A scratch test was performed with a diamond indenter (model Rockwell, serial No. N2-3122) of 0.2 mmR at a distance of 8.91 mm, and the load (critical load Lc) when the coating around the scratch was broken was measured. As a result, the critical load Lc was 90N.

[Example 2]
Sputtering time for forming the chromium film and the nitrogen-containing chromium film was set to 30 seconds each, and 120 layers of chromium film and nitrogen-containing chromium film each having a thickness of about 40 nm (total 240 layers, total film thickness 9.6 μm) ) Except for the formation, a chromium film and a nitrogen-containing chromium film were alternately formed by the same method as in Example 1 to obtain a hard film-coated member.

  The Mayer hardness, Vickers hardness, Young's modulus, HRC indentation, and critical load of the thus obtained hard film-coated member were evaluated by the same method as in Example 1. As a result, the Meyer hardness was 20.8 GPa, the Vickers hardness was 1438 HV, the Young's modulus was 266.5 GPa, the HRC indentation was HF2, and the critical load Lc was 80 N.

[Example 3]
For forming a chromium film and a nitrogen-containing chromium film, the partial pressure of argon gas in the atmosphere in the vacuum processing chamber when forming the nitrogen-containing chromium film is 0.040 Pa and the partial pressure of nitrogen gas is 0.061 Pa. The same method as in Example 1 except that the sputtering time was 60 seconds each, and 60 layers of chromium films and nitrogen-containing chromium films each having a thickness of about 80 nm were formed (total of 120 layers, total film thickness of 9.6 μm). Thus, a hard coating member was obtained by alternately forming a chromium coating and a nitrogen-containing chromium coating.

  The Mayer hardness, Vickers hardness, Young's modulus, HRC indentation, and critical load of the thus obtained hard film-coated member were evaluated by the same method as in Example 1. As a result, the Meyer hardness was 16.5 GPa, the Vickers hardness was 1118 HV, the Young's modulus was 253.0 GPa, the HRC indentation was HF2, and the critical load Lc was 83 N.

[Example 4]
The chromium film was formed in the same manner as in Example 1 except that the partial pressure of argon gas in the atmosphere in the vacuum processing chamber when forming the nitrogen-containing chromium film was 0.040 Pa and the partial pressure of nitrogen gas was 0.061 Pa. And a nitrogen-containing chromium film were alternately formed to obtain a hard film-coated member.

  The Mayer hardness, Vickers hardness, Young's modulus, HRC indentation, and critical load of the thus obtained hard film-coated member were evaluated by the same method as in Example 1. As a result, the Meyer hardness was 17.0 GPa, the Vickers hardness was 1214 HV, the Young's modulus was 241.6 GPa, the HRC indentation was HF2, and the critical load Lc was 90 N.

[Comparative Example 1]
When forming the nitrogen-containing chromium film, the partial pressure of argon gas in the atmosphere in the vacuum processing chamber is 0.042 Pa, the partial pressure of nitrogen gas is 0.054 Pa, and the chromium film and the nitrogen-containing chromium film are alternately formed (multi-layer) Instead of forming a film), the sputtering time for forming a nitrogen-containing chromium film was set to 7200 seconds, and a 10 μm nitrogen-containing chromium film was formed (single-layer film was formed). A hard coating member was obtained by this method.

  The Mayer hardness, Vickers hardness, Young's modulus, HRC indentation, and critical load of the thus obtained hard film-coated member were evaluated by the same method as in Example 1. As a result, the Meyer hardness was 19.8 GPa, the Vickers hardness was 1376 HV, the Young's modulus was 261 GPa, the HRC indentation was HF2, and the critical load Lc was 50 N.

[Comparative Example 2]
Instead of alternately forming a chromium film and a nitrogen-containing chromium film (forming a multilayer film), a sputtering time for forming the nitrogen-containing chromium film is set to 7200 seconds to form a 10 μm nitrogen-containing chromium film (single layer) A hard film-coated member was obtained by the same method as in Example 1 except that a film was formed.

  The Mayer hardness, Vickers hardness, Young's modulus, HRC indentation, and critical load of the thus obtained hard film-coated member were evaluated by the same method as in Example 1. As a result, the Meyer hardness is 27.6 GPa, the Vickers hardness is 1770 HV, the Young's modulus is 279.0 GPa, the HRC indentation is HF3, in which many cracks around the indentation and destruction or peeling of the film are observed, and the critical load Lc Was 30N.

[Comparative Example 3]
Sputtering times for forming the chromium film and the nitrogen-containing chromium film were 210 seconds and 30 seconds, respectively, and a 280 nm-thick nitrogen-containing chromium film and a 40-nm-thick chromium film each were 30 layers (total of 60 layers, all A chrome film and a nitrogen-containing chrome film were alternately formed by the same method as in Example 1 except that the film thickness was 9.6 μm) to obtain a hard film-coated member.

  The Mayer hardness, Vickers hardness, Young's modulus, HRC indentation, and critical load of the thus obtained hard film-coated member were evaluated by the same method as in Example 1. As a result, the Meyer hardness was 24.9 GPa, the Vickers hardness was 1658 HV, the Young's modulus was 279.0 GPa, the HRC indentation was HF3, and the critical load Lc was 50 N.

  Tables 1 to 3 show the production conditions, structures, and characteristics of the hard film-coated members of these examples and comparative examples.

It is sectional drawing which shows the structure of embodiment of the hard film coating | coated member by this invention. It is the schematic of the processing apparatus for manufacturing embodiment of the hard film coating | coated member by this invention.

Explanation of symbols

1 Substrate 2 Underlayer (chrome film)
3 Stress relaxation layer (chrome coating)
4 Hard layer (nitrogen-containing chromium film)
DESCRIPTION OF SYMBOLS 10 Processing apparatus 12 Vacuum processing chamber 14 Vacuum pump 16 Rotary table 18 Jig 20 Base material 22 Target 24 Sputtering power supply 26 Ion bombardment and bias power supply 28 Gas introduction pipe

Claims (8)

A plurality of chromium films and a plurality of nitrogen-containing chromium films are formed on a substrate so that a chromium film having a thickness of 40 nm or more and a nitrogen-containing chromium film having a thickness of 250 nm or less are alternately arranged. , Hard film coated member. The hard film according to claim 1, wherein a chromium film is formed as an underlayer on the base material, and the plurality of chromium films and the plurality of nitrogen-containing chromium films are formed on the underlayer. Film covering member. 3. The hard coating according to claim 1, wherein each of the plurality of chromium coatings has substantially the same thickness, and each of the plurality of nitrogen-containing chromium coatings has substantially the same thickness. Element. Forming a plurality of chromium films and a plurality of nitrogen-containing chromium films so that a chromium film having a thickness of 40 nm or more and a nitrogen-containing chromium film having a thickness of 250 nm or less are alternately arranged on a substrate; A method for producing a film-coated member. Before forming the plurality of chromium films and the plurality of nitrogen-containing chromium films, a chromium film is formed as an underlayer on the substrate, and the plurality of chromium films and the plurality of nitrogen-containing chromium are formed on the underlayer. The method for producing a hard film-coated member according to claim 4, wherein a film is formed. The plurality of chromium coatings and the plurality of nitrogen-containing chromium coatings are continuously formed in a processing chamber of a sputtering apparatus using a chromium target. When forming the plurality of chromium coatings, the processing chamber is filled with argon. 5. The method of manufacturing a hard film-coated member according to claim 4, wherein when forming the plurality of nitrogen-containing chromium films in a gas atmosphere, the process chamber is filled with an atmosphere containing argon gas and nitrogen gas. . The underlayer, the plurality of chromium films, and the plurality of nitrogen-containing chromium films are continuously formed in a processing chamber of a sputtering apparatus using a chromium target to form the underlayer and the plurality of chromium films. In this case, the processing chamber is set to an argon gas atmosphere, and when the plurality of nitrogen-containing chromium films are formed, the processing chamber is set to an atmosphere containing argon gas and nitrogen gas. Manufacturing method of hard film covering member. 8. The thickness of each of the plurality of chromium films is substantially the same, and the thickness of each of the plurality of nitrogen-containing chromium films is substantially the same. Manufacturing method of hard film covering member.

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