JP2010066486A - Large-sized lcos display element and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a large-sized LCOS display element which does not lower the quality of image display by division exposure, and to provide a method for manufacturing the same. <P>SOLUTION: The large-sized LCOS display element has an image display area and a peripheral drive circuit area on the outer periphery of the image display area, wherein the image display area is formed by one time of exposure, and the peripheral drive circuit area on the outer periphery of the image display area is connected by two or more times of exposure. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a large LCOS display element and a manufacturing method thereof.

  Liquid crystal display elements used for liquid crystal televisions and the like have been increased in size and further increased to 40 inches, 50 inches, and 60 inches. Since the liquid crystal display element portion is exposed once by the batch projection exposure method, the size of the batch projection exposure apparatus is also increasing.

  On the other hand, LCOS display elements used in electronic viewfinders and projectors are required to be miniaturized, and the display area is mainly 1 inch or less. Usually, a large number of LCOS display elements are formed on a silicon mother substrate, but a stepper is used for exposure in order to form a high-definition circuit network.

  A stepper has a very high resolving power, can increase the resolution of a small display element, and is used in the manufacture of integrated circuits. It is also suitable for manufacturing an LCOS display element having an image display area and a peripheral drive circuit area on the outer periphery of the image display area.

  However, the exposure area of a stepper with high resolution is as small as about 20 to 30 mm square, and in order to expose an object larger than that, it must be divided and exposed several times. In order to improve the accuracy of joining such pattern areas, a vernier pattern is arranged in the vicinity of the pattern area for alignment. (See Patent Document 1)

  When the LCOS display element is enlarged (for example, the image display area is 1.5 inches), the exposure area of 30 mm square cannot be exposed at one time but must be divided and exposed.

  FIG. 2 is a top view of the display element, and FIG. 3 is a top view showing an example in which the display element is exposed on a silicon substrate in four parts. The image display area 2 and the peripheral drive circuit area 3 are formed on the silicon substrate 1, but the exposure area is divided into P1 to P4 by the dividing line X and the dividing line Y, and the positions of the divided lines are aligned and connected at the time of exposure. Match.

  FIG. 3 schematically shows a state in which the exposure regions P1 to P4 are exposed on the silicon substrate. Although the order is not specified, the exposure of the display element is completed through four steps. Since the LCOS display element has multiple layers, the same exposure is performed on each layer.

JP-A-5-343285

  As described above, when the image display area is divided and the exposure is performed, no matter how accurately the alignment is performed, misalignment occurs due to distortion of the exposure pattern due to temperature.

  Since the wiring is about 0.5 to 5 [mu] m, if the wiring is thinned or the exposure shift occurs due to overlapping double exposure, the wiring is easily cut off at the connecting portion, and the yield is lowered.

  The parasitic capacitance or the like changes at the connection portion, and the drive circuit varies.

  A large LCOS display element having an image display area and a peripheral drive circuit area on the outer periphery of the image display area, and the image display area is a large LCOS display element formed by one exposure.

  A dummy pixel area is provided between the image display area and the peripheral action circuit area, and the image display area and the dummy pixel area are large LCOS display elements formed by one exposure.

  A large LCOS display element in which no drive circuit is provided in an image display region and a peripheral drive circuit region, and a connection portion (overlapping portion) between the peripheral drive circuit region and the peripheral drive circuit region.

  A large LCOS display element is provided in which a drive circuit is not provided in a connection portion (overlapping portion) between the dummy pixel region and the peripheral drive circuit region and between the peripheral drive circuit region and the peripheral drive circuit region.

  A large LCOS display element in which the image display region or dummy pixel region and the peripheral drive circuit region, and the connection between the peripheral drive circuit region and the peripheral drive circuit region (overlapping portion) are thicker than the other portions.

  The dummy pixel region is a large LCOS display element having a pixel-equivalent dummy pixel region in which pixels equivalent to the image display region are arranged and a large pixel dummy region in which a large display electrode is provided.

  A large-scale LCOS display element manufacturing method comprising a step of exposing an image display region at a time and a step of exposing a peripheral drive circuit region on the outer periphery of the image display region a plurality of times.

  Since the image display area is not divided, no deviation occurs in the image display area, and the display looks uniform.

  Since the dummy pixel area is provided on the outer periphery of the image display area, it can be used as a parting by displaying the dummy pixel area in black, and by connecting the dummy pixel area and the peripheral drive circuit area, The influence can be eliminated.

  Since the wiring at the connecting portion of the double exposure portion is thickened, it can cope with the thinning of the wiring due to the double exposure, and it is possible to prevent the wiring from being cut, so that the yield is not lowered.

  The drive circuit is not provided in the dummy pixel area and the peripheral drive circuit area, and the peripheral drive circuit area and the peripheral drive circuit area connecting portion (overlapping portion). The occurrence of defectives is eliminated.

Since the dummy pixel area is provided with a pixel-equivalent dummy pixel area in which pixels equivalent to the image display area are arranged and a large pixel dummy area in which a large display electrode is provided, the large pixel dummy area is set as a solid electrode to display black, By disposing a lower layer overlapping portion under the large pixel dummy region, it can be used as a blindfold of the lower layer overlapping portion, and the overlapping becomes easy.
In addition, the dummy pixel area increases the vertical and horizontal degrees of freedom for aligning the display center when a large LCOS display element is used in a projector or the like. Can be increased.

  A large LCOS display element having an image display area and a peripheral drive circuit area on the outer periphery of the image display area. The image display area is formed by one exposure, and the peripheral drive circuit area on the outer periphery of the image display area is exposed multiple times. A large LCOS display element to be connected is used.

  FIG. 1 is a top view of a large LCOS display element formed according to the present invention, and FIG. 4 is a top view showing an example in which a display element is exposed on a silicon substrate by dividing the display element into five parts. The image display area 2 and the peripheral drive circuit area 3 are formed on the silicon substrate 1, and the exposure area is divided into five parts by dividing the image display area P0 and the peripheral drive circuit area into four P5, P6, P7, and P8. Align and connect the lines.

  FIG. 4 schematically shows a state in which the exposure regions P0, P5, P6, P7, and P8 are exposed on the silicon substrate. For example, the exposure region P0 is first exposed at a predetermined position (28 locations in the figure), and the surroundings are exposed in the order of P5, P6, P7, and P8. Since the LCOS display element has multiple layers, the same exposure is performed on each layer.

  Although not shown in particular, the portion of the wiring that is overlaid and exposed is thicker than the other wiring to prevent wiring thinning due to double exposure. In addition, only the wiring is exposed and the driving circuit network is not formed.

  FIG. 5 is a top view showing a second embodiment of a large LCOS display device according to the present invention. The difference from the first embodiment is that a dummy pixel region 2a is provided between the image display region 2 and the outer peripheral drive circuit region 3, and the other points are the same. The same reference numerals as those in FIG. As the exposure, the image display area 2 and the dummy pixel area 2a are exposed once using a single mask, and the others are exposed in the same manner as in the first embodiment.

  FIG. 6 is a top view showing a third embodiment of a large LCOS display device according to the present invention. The difference from the second embodiment is that the dummy pixel area is a pixel-equivalent dummy pixel area 2b in which pixels equivalent to the image display area are arranged, and a large pixel dummy area 2d in which a large display electrode is provided. The other point is the same as 2c below the large pixel dummy region 2d. The same reference numerals as those in FIG. As the exposure, the image display area 2, the pixel-equivalent dummy pixel area 2b, and the large pixel dummy area 2d provided with a large display electrode are set as a single exposure using one mask, and the others are exposed in the same manner as in the second embodiment.

Top view of a large LCOS display element formed in accordance with the present invention Top view of display element Top view showing an example in which a display element is divided into four parts and exposed on a silicon substrate The top view which shows the example which divides a display element into 5 parts and exposes it to a silicon substrate The top view which shows 2nd Example of the large sized LCOS display element by this invention. The top view which shows 3rd Example of the large sized LCOS display element by this invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Silicon substrate 2 Image display area 2a Dummy pixel area 2b Pixel equivalent dummy pixel area 2c Lower layer joining part 2d Large pixel dummy area 3 Peripheral drive circuit P0 to P8 Exposure area

Claims (7)

  A large LCOS display element having an image display area and a peripheral drive circuit area on an outer periphery of the image display area, wherein the image display area is formed by one exposure.   2. The large LCOS display element according to claim 1, wherein a dummy pixel area is provided between the image display area and the peripheral action circuit area, and the image display area and the dummy pixel area are formed by one exposure.   2. The large LCOS display element according to claim 1, wherein no drive circuit is provided in the image display area and the peripheral drive circuit area, and the peripheral drive circuit area and the peripheral drive circuit area connecting portion (overlapping portion).   3. The large LCOS display element according to claim 2, wherein no driving circuit is provided in the dummy pixel area and the peripheral driving circuit area, and the peripheral driving circuit area and the peripheral driving circuit area connecting portion (overlapping portion).   5. The wiring of an image display area or dummy pixel area and a peripheral drive circuit area, and a connection part (overlapping part) between the peripheral drive circuit area and the peripheral drive circuit area is thicker than other parts. A large LCOS display element according to any one of the above.   6. The dummy pixel region includes a pixel-equivalent dummy pixel region in which pixels equivalent to the image display region are arranged and a large pixel dummy region in which a large display electrode is provided. A large LCOS display element according to any one of the above.   A method for producing a large LCOS display element, comprising: exposing an image display region at a time, and exposing a peripheral drive circuit region on the outer periphery of the image display region a plurality of times.

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