JP2010061850A - Heat treatment device - Google Patents

Heat treatment device Download PDF

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Publication number
JP2010061850A
JP2010061850A JP2008223600A JP2008223600A JP2010061850A JP 2010061850 A JP2010061850 A JP 2010061850A JP 2008223600 A JP2008223600 A JP 2008223600A JP 2008223600 A JP2008223600 A JP 2008223600A JP 2010061850 A JP2010061850 A JP 2010061850A
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Prior art keywords
sheath
furnace body
heater
heat treatment
heat
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JP2008223600A
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JP5411470B2 (en
Inventor
Oudo Fujita
翁堂 藤田
Masayuki Mukai
正行 向井
Tadayoshi Nakamura
忠義 中村
Mitsuyoshi Nakagaki
充喜 中垣
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JTEKT Thermo Systems Corp
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Koyo Thermo Systems Co Ltd
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Priority to JP2008223600A priority Critical patent/JP5411470B2/en
Priority to CN200910163623XA priority patent/CN101666581B/en
Priority to TW098127821A priority patent/TWI463103B/en
Priority to KR1020090081757A priority patent/KR101599899B1/en
Publication of JP2010061850A publication Critical patent/JP2010061850A/en
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B27/00—Tempering or quenching glass products
    • C03B27/012—Tempering or quenching glass products by heat treatment, e.g. for crystallisation; Heat treatment of glass products before tempering by cooling
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Furnace Details (AREA)
  • Drying Of Solid Materials (AREA)
  • Control Of Resistance Heating (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat treatment device capable of preventing generation of a leakage current from a wiring part in a furnace under pressure reduction, while keeping cleanliness in the furnace, with a simple constitution. <P>SOLUTION: A pressure reducing drier 10 has at least a panel heater 18 and a furnace body 12. The panel heater 18 has a single or a plurality of capillary sheath heaters 30 including a sheath part filled in a metallic pipe in a state of insulating a heating wire and a power supply wire. The furnace body 12 is constituted so as to store the panel heater 18 inside, and has a gauge port capable of inserting the sheath part in the sheath heaters 30. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、減圧下で例えば液晶表示パネル用のガラス基板等の平板状ワークに対して熱処理を行うのに好適なように構成された熱処理装置に関する。   The present invention relates to a heat treatment apparatus configured to be suitable for performing heat treatment on a flat workpiece such as a glass substrate for a liquid crystal display panel under reduced pressure.

減圧乾燥装置等の熱処理装置では、例えば図１に示すように、炉体１００の内部に熱源となる加熱部１０２（例えば、電気抵抗ヒータ）が配置される。加熱部１０２には電力供給が必要となる一方で、炉体１００には気密性が要求されるため、炉体１００の内部に加熱部１０２を設置する場合、真空シールに対して有効な中継電源導入端子１０４が炉体１００を貫通して設けられることが多かった。そして、この中継電源導入端子１０４の炉外側の端子が炉外の電源部（図示省略）に接続され、炉内側の端子が渡り配線１０６を介して加熱部１０２に接続されることによって、炉外の電源部から炉体１００内部の加熱部１０２に対して中継電源導入端子１０４を介して電力供給が行われていた。   In a heat treatment apparatus such as a vacuum drying apparatus, for example, as shown in FIG. 1, a heating unit 102 (for example, an electric resistance heater) serving as a heat source is disposed inside a furnace body 100. While the heating unit 102 requires power supply, the furnace body 100 is required to be airtight. Therefore, when the heating unit 102 is installed inside the furnace body 100, an effective relay power supply for the vacuum seal is provided. In many cases, the introduction terminal 104 is provided through the furnace body 100. Then, the terminal outside the furnace of the relay power supply introduction terminal 104 is connected to a power supply unit (not shown) outside the furnace, and the terminal inside the furnace is connected to the heating unit 102 via the crossover wiring 106, so that the outside of the furnace Power is supplied from the power source unit to the heating unit 102 inside the furnace body 100 via the relay power supply introduction terminal 104.

ところが、上述の構成においては、加熱部１０２に対して通電しつつ炉体１００の内部の圧力を下げていく過程で放電が発生し、その結果、漏電が生じることがあった。この漏電は人体や装置に悪影響を与える虞があるため、漏電の防止を図ることが重要視されていた。   However, in the above-described configuration, electric discharge occurs in the process of lowering the pressure inside the furnace body 100 while energizing the heating unit 102, and as a result, electric leakage may occur. Since this electric leakage may adversely affect the human body and the apparatus, it has been regarded as important to prevent electric leakage.

このため、従来技術には、加熱部に対する通電下において炉体１００の内部を減圧することにより発生した漏れ電流を検出し、その漏れ電流の量に応じて加熱部に対する通電のオン／オフ制御を行うように構成された減圧乾燥装置が存在する（例えば、特許文献１参照。）。
特開２００６−１７０５３３号公報 For this reason, in the prior art, a leakage current generated by reducing the pressure inside the furnace body 100 while energizing the heating unit is detected, and on / off control of energization to the heating unit is performed according to the amount of the leakage current. There is a vacuum drying apparatus configured to perform (see, for example, Patent Document 1).
JP 2006-170533 A

上述の特許文献１に係る技術では、配線部分からの漏れ電流の発生自体を抑えることができない。このため、配線部分からの漏れ電流は依然として発生し、その漏れ電流が許容値を超えるたびにヒータへの通電が停止され、加熱処理の処理時間が長引くといった不都合があった。   With the technique according to Patent Document 1 described above, the generation of leakage current from the wiring portion itself cannot be suppressed. For this reason, leakage current from the wiring portion is still generated, and every time the leakage current exceeds an allowable value, energization to the heater is stopped, and there is a disadvantage that the processing time of the heat treatment is prolonged.

また、炉内において渡り配線を利用する構成において漏れ電流自体の発生を抑制しようとする場合には、渡り配線と炉体との間の絶縁距離が大きくなるように炉内の構成を設計したり、被覆付きの電線を採用したりする必要があった。   In addition, when trying to suppress the occurrence of leakage current itself in a configuration that uses crossover wiring in the furnace, the internal configuration of the furnace is designed to increase the insulation distance between the crossover wiring and the furnace body. It was necessary to use a coated electric wire.

しかし、絶縁距離を大きく取ることは炉体の小型化を阻害し、また、被覆付きの電線を採用する場合には、被覆部の耐熱性によって熱処理の最高温度が制限されるといった不都合があった。   However, taking a large insulation distance hinders the downsizing of the furnace body, and when a coated electric wire is used, there is a disadvantage that the maximum temperature of the heat treatment is limited by the heat resistance of the coated portion. .

この発明の目的は、簡易な構成によって、炉内のクリーン度を保ちつつ、減圧下の炉内の配線部分からの漏れ電流の発生を防止することが可能な熱処理装置を提供することである。   An object of the present invention is to provide a heat treatment apparatus capable of preventing generation of leakage current from a wiring portion in a furnace under reduced pressure while maintaining a clean degree in the furnace with a simple configuration.

この発明に係る熱処理装置は、減圧下でワークに対して熱処理を行うように構成される。熱処理装置の例としては、減圧乾燥装置が挙げられる。この熱処理装置は、加熱部および炉体を少なくとも備える。   The heat treatment apparatus according to the present invention is configured to perform heat treatment on a workpiece under reduced pressure. An example of the heat treatment apparatus is a vacuum drying apparatus. This heat treatment apparatus includes at least a heating unit and a furnace body.

加熱部は、発熱線および電源供給線が絶縁された状態で金属管に充填されたシース部を含む単一または複数のシースヒータを有する。加熱部の例としては、板状を呈するパネルヒータが挙げられる。シースヒータの例としては、真空耐圧を有する細管シースヒータが挙げられる。   The heating part has a single or a plurality of sheath heaters including a sheath part filled in a metal tube in a state where the heat generation line and the power supply line are insulated. As an example of a heating part, the panel heater which exhibits plate shape is mentioned. An example of the sheath heater is a thin tube sheath heater having a vacuum pressure resistance.

炉体は、加熱部を内部に収容するように構成される。また、炉体は、シースヒータのシース部が挿通可能な開口部を有する。開口部の例としてゲージポートが挙げられる。   The furnace body is configured to accommodate the heating unit therein. The furnace body has an opening through which the sheath portion of the sheath heater can be inserted. An example of the opening is a gauge port.

熱処理装置は、シースヒータにおけるシース部以外の箇所がすべて炉体の外部に配置された状態で、シース部と開口部との間に真空シール（例えば、Ｏリング）が施されるように構成される。   The heat treatment apparatus is configured such that a vacuum seal (for example, an O-ring) is applied between the sheath portion and the opening portion in a state where all the portions other than the sheath portion in the sheath heater are disposed outside the furnace body. .

この構成においては、加熱部を炉体の中継電源導入端子（例えば、貫通端子）に渡り配線を介して接続するのではなく、加熱部を構成するシースヒータと炉体との間で直接的に真空シールされることにより、炉体の内部には、シースヒータの非絶縁部が露出しなくなる。このため、ヒースヒータに通電した状態で炉体を減圧しても放電が発生しない。また、炉体内部に配置されるシース部に耐熱性を有する金属管（例えば、ステンレス管）を用いているため、炉内を高温にしてもシース部の表面から発塵が生じたり、ガスが発生したりしにくいため、炉体の内部をクリーンな状態に保つことができる。また、シース部に金属を用いているため、樹脂類によって渡り配線を被覆する場合に比較して、処理温度の上限制約を受けにくい。   In this configuration, the heating unit is not directly connected to the relay power supply introduction terminal (for example, the through terminal) of the furnace body via a wiring, but directly vacuumed between the sheath heater constituting the heating unit and the furnace body. By sealing, the non-insulating portion of the sheath heater is not exposed inside the furnace body. For this reason, even if the furnace body is depressurized in a state where the heat heater is energized, no discharge occurs. In addition, since a heat-resistant metal tube (for example, a stainless steel tube) is used for the sheath portion disposed inside the furnace body, dust is generated from the surface of the sheath portion even when the temperature in the furnace is high, and gas is generated. Since it is difficult to generate, the inside of the furnace body can be kept clean. In addition, since a metal is used for the sheath portion, the upper limit of the processing temperature is less likely to be imposed than when the transition wiring is covered with a resin.

上述の構成において、シースヒータは、長さ方向の一端部からのみ電源供給線が露出するように構成されることが好ましい。その理由は、シースヒータの長さ方向の一端部からのみ電源供給線が露出する構成を用いれば、シースヒータの長さ方向の両端部から電源供給線が露出する構成を用いる場合に比較して、真空シールが必要となる箇所の数を減少させることができるからである。   In the above configuration, the sheath heater is preferably configured such that the power supply line is exposed only from one end portion in the length direction. The reason for this is that if a configuration in which the power supply line is exposed only from one end portion in the length direction of the sheath heater is used, a vacuum is used in comparison with a configuration in which the power supply line is exposed from both ends in the length direction of the sheath heater. This is because the number of places where sealing is required can be reduced.

また、シースヒータは、シース部が曲げ加工可能になるようにフレキシブル性を有するように構成されることが好ましい。シース部が自由自在に曲げられると、例えば、面状の加熱源に適した配置とする等のようにシースヒータのレイアウトを自由に設計できるからである。   The sheath heater is preferably configured to have flexibility so that the sheath portion can be bent. This is because when the sheath portion is freely bent, the layout of the sheath heater can be freely designed such as, for example, an arrangement suitable for a planar heating source.

加熱部が、互いに異なる複数の領域をそれぞれ加熱するように配置された複数のシースヒータを有する場合、加熱部における端部に配置される領域は、中央に配置される領域に比較して、単位面積あたりにおけるシースヒータの配置密度が密になるように構成することが好ましい。このように構成することにより、ヒータ電源の制御を複雑にすることなく、放熱が多い端部に対して十分な熱量を供給することが可能になる。   When the heating unit has a plurality of sheath heaters arranged so as to respectively heat a plurality of different regions, the region arranged at the end of the heating unit has a unit area compared to the region arranged at the center. It is preferable to configure so that the arrangement density of the sheath heaters at the periphery is dense. By configuring in this way, it becomes possible to supply a sufficient amount of heat to the end portion where much heat is radiated without complicating the control of the heater power supply.

本発明によれば、簡易な構成によって、処理温度の上限に制約を受けることなく、炉内のクリーン度を保ちつつ、減圧下における炉内の配線部分からの漏れ電流の発生を防止することが可能になる。   According to the present invention, it is possible to prevent the occurrence of leakage current from the wiring portion in the furnace under reduced pressure while maintaining the cleanliness in the furnace without being restricted by the upper limit of the processing temperature by a simple configuration. It becomes possible.

図２は、本発明の実施形態に係る減圧乾燥装置１０の概略を説明する図である。この実施形態では、熱処理装置の例として減圧乾燥装置１０を説明するが、本発明は減圧乾燥装置以外の種類の熱処理装置にも適用することが可能である。   FIG. 2 is a diagram for explaining the outline of the vacuum drying apparatus 10 according to the embodiment of the present invention. In this embodiment, the reduced-pressure drying apparatus 10 will be described as an example of the heat treatment apparatus, but the present invention can be applied to other types of heat treatment apparatuses other than the reduced-pressure drying apparatus.

減圧乾燥装置１０は、炉体１２を備えている。炉体１２内には、板状を呈するパネルヒータ１８が設けられる。パネルヒータ１８の構成については後述する。パネルヒータ１８の上には、複数のプロキシミティピンを有する基板支持部材２０が載置される。   The vacuum drying apparatus 10 includes a furnace body 12. A panel heater 18 having a plate shape is provided in the furnace body 12. The configuration of the panel heater 18 will be described later. A substrate support member 20 having a plurality of proximity pins is placed on the panel heater 18.

パネルヒータ１８を貫通するように、炉体１２に搬入または搬出されるガラス基板１６を下から支持するように構成されたリフターピン１４が配置される。リフターピン１４は、モータ等の駆動部を有するリフターピン駆動装置１４２によって昇降可能に支持されている。   A lifter pin 14 configured to support the glass substrate 16 carried into or out of the furnace body 12 from below is disposed so as to penetrate the panel heater 18. The lifter pin 14 is supported by a lifter pin driving device 142 having a drive unit such as a motor so as to be movable up and down.

図３は、パネルヒータ１８の概略構成を示す図である。パネルヒータ１８には、熱源として複数の細管シースヒータ３０を備える。パネルヒータ１８は、金属製（例えば、アルミニウム）の熱板内に複数の細管シースヒータ３０を収納して構成される。   FIG. 3 is a diagram showing a schematic configuration of the panel heater 18. The panel heater 18 includes a plurality of thin tube sheath heaters 30 as heat sources. The panel heater 18 is configured by housing a plurality of thin tube sheath heaters 30 in a metal (for example, aluminum) hot plate.

図３に示すように、この実施形態では、９つの細管シースヒータ３０が用いられ、各細管シースヒータ３０がパネルヒータ１８の９つの領域のそれぞれを加熱するように構成されているが、細管シースヒータ３０の数や配置はこれに限定されるものではない。細管シースヒータ３０は、炉体１２に設けられた複数の開口部に挿通されるように配置されており、炉体１２の外部の電力供給部から電力供給を受けるように構成される。   As shown in FIG. 3, in this embodiment, nine thin tube sheath heaters 30 are used, and each thin tube sheath heater 30 is configured to heat each of the nine regions of the panel heater 18. The number and arrangement are not limited to this. The thin tube sheath heater 30 is disposed so as to be inserted through a plurality of openings provided in the furnace body 12 and is configured to receive power supply from a power supply unit outside the furnace body 12.

図４（Ａ）および図４（Ｂ）は、細管シースヒータ３０の概略構成を示している。細管シースヒータ３０は、細い金属管（例えば、ＳＵＳ−３１６等のステンレス管）に発熱線４２および絶縁体４４（例えば、酸化マグネシウム）を高密度に充填するように構成された発熱部３２を備える。発熱部３２は、自由に曲げ加工の可能な程度のフレキシブル性を有しており、発熱部３２の金属管を自由に曲げて所望の形状にすることが可能になっている。   4A and 4B show a schematic configuration of the thin tube sheath heater 30. FIG. The thin tube sheath heater 30 includes a heat generating portion 32 configured to fill a thin metal tube (for example, a stainless steel tube such as SUS-316) with high density of heat generating wires 42 and an insulator 44 (for example, magnesium oxide). The heat generating part 32 is flexible enough to be bent freely, and the metal tube of the heat generating part 32 can be freely bent into a desired shape.

この実施形態では、図３に示すように、各細管シースヒータ３０の発熱部３２をそれぞれ面状の渦巻き状に形成している。このとき、各細管シースヒータ３０は、その発熱部３２の密度が、パネルヒータ１８の中央部に配置されるものほど疎になり、パネルヒータ１８の端部に配置されるものほど密になるように構成される。   In this embodiment, as shown in FIG. 3, the heat generating portions 32 of the thin tube sheath heaters 30 are each formed in a planar spiral shape. At this time, the density of the heat generating portion 32 of each thin tube sheath heater 30 becomes sparser as it is arranged at the center of the panel heater 18 and becomes denser as it is arranged at the end of the panel heater 18. Composed.

このように、パネルヒータ１８の各領域における発熱部３２の配置密度を適宜変化させることにより、各細管シースヒータ３０に対するヒータ電源制御を均一にする場合であってもパネルヒータ１８の各領域に所望の発熱特性を持たせることが可能になる。なお、各細管シースヒータ３０の発熱部３２の形状は面状の渦巻き状に限定されるものではなく、ワークの形状等に合わせて適宜変更することが可能である。   As described above, by appropriately changing the arrangement density of the heat generating portions 32 in each region of the panel heater 18, even when heater power control for each thin tube sheath heater 30 is made uniform, a desired value is provided in each region of the panel heater 18. It becomes possible to have heat generation characteristics. Note that the shape of the heat generating portion 32 of each thin tube sheath heater 30 is not limited to a planar spiral shape, and can be appropriately changed according to the shape of the workpiece.

細管シースヒータ３０はさらに、発熱部３２の一端部外周に接合されたスリーブ部３４を備える。スリーブ部３４は金属（例えば、ＳＵＳ−３０４等のステンレス）からなる筒状を呈している。スリーブ部３４の内部には、発熱線４２と電力供給線（例えば、ニッケル等の外部リード線）との接続部が配置される。スリーブ部３４はさらに、発熱部３２の反対側の端部を覆うシール部３６２（例えば、防湿シールガラス）を有する。なお、この実施形態では、発熱部３２およびスリーブ部３４が本発明のシース部に対応する。   The thin tube sheath heater 30 further includes a sleeve portion 34 joined to the outer periphery of one end portion of the heat generating portion 32. The sleeve portion 34 has a cylindrical shape made of metal (for example, stainless steel such as SUS-304). Inside the sleeve portion 34, a connecting portion between the heating wire 42 and a power supply wire (for example, an external lead wire such as nickel) is disposed. The sleeve portion 34 further includes a seal portion 362 (for example, a moisture-proof seal glass) that covers an end portion on the opposite side of the heat generating portion 32. In this embodiment, the heat generating portion 32 and the sleeve portion 34 correspond to the sheath portion of the present invention.

細管シースヒータ３０は、炉体１２に設けられたゲージポート１２２等の開口部に挿通されている。そして、細管シースヒータ３０におけるスリーブ部３４とゲージポート１２２との間にはＯリング３６が配置されており、スリーブ部３４とゲージポート１２２との間が真空シールされ炉体１２内の真空度が保たれている。   The thin tube sheath heater 30 is inserted through an opening such as a gauge port 122 provided in the furnace body 12. An O-ring 36 is disposed between the sleeve portion 34 and the gauge port 122 in the thin tube sheath heater 30, and a vacuum is sealed between the sleeve portion 34 and the gauge port 122 to maintain the degree of vacuum in the furnace body 12. I'm leaning.

この実施形態では、細管シースヒータ３０の真空シール部としてゲージポート１２２およびＯリング３６を用いているが、真空シール部の構成はこれには限定されない。例えば、ゲージポート１２２およびＯリング３６の組み合わせに代えてコンプレッションフィッティングなどを用いることも可能である。   In this embodiment, the gauge port 122 and the O-ring 36 are used as the vacuum seal portion of the thin tube sheath heater 30, but the configuration of the vacuum seal portion is not limited to this. For example, instead of the combination of the gauge port 122 and the O-ring 36, a compression fitting or the like can be used.

以上の構成では、細管シースヒータ３０における炉体１２内に配置される箇所およびゲージポート１２２に真空シールされる箇所のすべてが真空に耐えうる構成になっている。また、耐熱性を有する金属製のシースを用いているため炉体１２内を高温にした場合でも発塵の虞がないため、処理温度にかかわらず炉体１２内部をクリーンな環境に保つことが可能となる。   In the above configuration, all of the locations in the furnace body 12 and the locations where the gauge port 122 is vacuum-sealed in the thin tube sheath heater 30 can withstand vacuum. In addition, since a metal sheath having heat resistance is used, there is no risk of dust generation even when the temperature inside the furnace body 12 is raised, so that the interior of the furnace body 12 can be maintained in a clean environment regardless of the processing temperature. It becomes possible.

そして、発熱線４２と電力供給線が炉体１２の内部において露出することがないため、電気配線からの放電の発生が適正に防止され、その結果、高電圧（例えば、２００Ｖまたは４００Ｖ）を用いた装置の構築が可能となり、省配線化が可能となる。また、処理温度を向上させることができ、処理時間の短縮化が可能となる。   And since the heating wire 42 and the power supply line are not exposed inside the furnace body 12, the occurrence of discharge from the electrical wiring is appropriately prevented, and as a result, a high voltage (for example, 200V or 400V) is used. It is possible to construct a device that has been installed, and to reduce wiring. Further, the processing temperature can be improved, and the processing time can be shortened.

上述の実施形態においては、細管シースヒータ３０は、長さ方向における一端部からのみ電源供給線４０が露出するように構成されることが好ましい。１つの細管シースヒータ３０について、炉体１２の１箇所からのみの電力供給をすることにより、真空シール部の数を減少させることが可能になり、その結果、炉体１２の構成の簡略化が図りやすくなり、また、炉体１２内での真空状態を保ち易くなる。   In the above-described embodiment, the thin tube sheath heater 30 is preferably configured such that the power supply line 40 is exposed only from one end portion in the length direction. By supplying electric power from only one place of the furnace body 12 for one thin tube sheath heater 30, it is possible to reduce the number of vacuum seals, and as a result, the structure of the furnace body 12 can be simplified. It becomes easy to maintain a vacuum state in the furnace body 12.

上述の実施形態において、細管シースヒータ３０はそのシール径が細くなるように（例えば、２〜３ｍｍ）構成することが好ましい。その理由は、経時的にシール性が低下するといった問題を回避し易くなるからである。通常、ヒータ類は加熱させると熱膨張により、位置変動などが発生し、真空シール部に過度のストレスが加わり、シール性低下などの不具合に至る場合があるが、細管シースヒータ３０はその径が小さいためそのような不具合が発生しにくい。   In the above-described embodiment, the thin tube sheath heater 30 is preferably configured so that its seal diameter is small (for example, 2 to 3 mm). The reason is that it becomes easy to avoid the problem that the sealing performance deteriorates with time. Usually, when the heaters are heated, position fluctuations and the like occur due to thermal expansion, and excessive stress is applied to the vacuum seal portion, leading to problems such as a decrease in sealing performance. However, the diameter of the thin tube sheath heater 30 is small. Therefore, such a malfunction is difficult to occur.

さらに、細管シースヒータ３０の発熱部３２はフレキシブル性を有しているため、細管シースヒータ３０を用いることで炉体１２内部での自由なレイアウトが可能となる。このため、ワークの形状に応じてパネルヒータ１８の構成を変更し易い。   Furthermore, since the heat generating portion 32 of the thin tube sheath heater 30 has flexibility, the use of the thin tube sheath heater 30 enables a free layout inside the furnace body 12. For this reason, it is easy to change the configuration of the panel heater 18 according to the shape of the workpiece.

また、ゲージポート１２２にＯリング３６を介して細管シースヒータ３０を取り付けている構造上、炉体１２に対する細管シースヒータ３０の脱着が行い易くなり、メンテナンス性が向上する。   Further, since the thin tube sheath heater 30 is attached to the gauge port 122 via the O-ring 36, the thin tube sheath heater 30 can be easily attached to and detached from the furnace body 12, and the maintainability is improved.

上述の実施形態の説明は、すべての点で例示であって、制限的なものではないと考えられるべきである。本発明の範囲は、上述の実施形態ではなく、特許請求の範囲によって示される。さらに、本発明の範囲には、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。   The above description of the embodiment is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is shown not by the above embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

従来の減圧乾燥装置の構成の概略を示す図である。It is a figure which shows the outline of a structure of the conventional vacuum drying apparatus. 本発明の実施形態に係る減圧乾燥装置の概略を示す図である。It is a figure which shows the outline of the reduced pressure drying apparatus which concerns on embodiment of this invention. ヒータの概略構成を示す図である。It is a figure which shows schematic structure of a heater. ヒータにおける細管シースヒータの配置状態を説明する図である。It is a figure explaining the arrangement | positioning state of the thin tube sheath heater in a heater.

符号の説明Explanation of symbols

１０−減圧乾燥装置
１２−炉体
１８−ヒータ
３０−細管シースヒータ
３２−加熱部
３４−スリーブ部
３６−Ｏリング
４０−電力供給線
１２２−ゲージポート 10-Vacuum drying device 12-Furnace body 18-Heater 30-Capillary sheath heater 32-Heating part 34-Sleeve part 36-O-ring 40-Power supply line 122-Gauge port

Claims (4)

減圧下でワークに対して熱処理を行うように構成された熱処理装置であって、
発熱線および電源供給線が絶縁された状態で金属管に充填されたシース部を含む単一または複数のシースヒータを有する加熱部と、
前記加熱部を内部に収容する炉体であって、前記シースヒータにおける前記シース部が挿通可能な開口部を有する炉体と、
を少なくとも備えており、
前記シースヒータにおける前記シース部以外の箇所がすべて前記炉体の外部に配置された状態で、前記シース部と前記開口部との間に真空シールが施されるように構成された熱処理装置。 A heat treatment apparatus configured to perform heat treatment on a workpiece under reduced pressure,
A heating section having a single or a plurality of sheath heaters including a sheath section filled in a metal tube in a state where the heat generation line and the power supply line are insulated;
A furnace body containing the heating unit therein, the furnace body having an opening through which the sheath part in the sheath heater can be inserted, and
At least,
The heat processing apparatus comprised so that a vacuum seal might be given between the said sheath part and the said opening part in the state by which all locations other than the said sheath part in the said sheath heater are arrange | positioned outside the said furnace body. 前記シースヒータは、長さ方向の一端部からのみ前記電源供給線が露出するように構成された請求項１に記載の熱処理装置。   The heat treatment apparatus according to claim 1, wherein the sheath heater is configured such that the power supply line is exposed only from one end portion in a length direction. 前記シースヒータは、前記シース部が曲げ加工可能なようにフレキシブル性を有するように構成された請求項１に記載の熱処理装置。   The heat treatment apparatus according to claim 1, wherein the sheath heater is configured to have flexibility so that the sheath portion can be bent. 前記加熱部は、互いに異なる複数の領域をそれぞれ加熱するように配置された複数の前記シースヒータを有しており、
前記加熱部の端部に配置される領域は、中央に配置される領域に比較して、単位面積あたりの前記シースヒータの配置密度が密になるように構成された請求項１〜３のいずれか１項に記載の熱処理装置。 The heating unit has a plurality of the sheath heaters arranged to heat a plurality of different regions from each other,
The region arranged at the end of the heating unit is configured so that the arrangement density of the sheath heater per unit area is denser than the region arranged at the center. The heat treatment apparatus according to item 1.
JP2008223600A 2008-09-01 2008-09-01 Heat treatment equipment Expired - Fee Related JP5411470B2 (en)

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TWI601926B (en) * 2014-10-24 2017-10-11 Dong-Ming Li Increase the number of independent temperature control within the pre-baking oven structure
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TW201011245A (en) 2010-03-16
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