JPH0440491U

JPH0440491U -

Info

Publication number: JPH0440491U
Application number: JP8153690U
Authority: JP
Priority date: 1990-07-31
Filing date: 1990-07-31
Publication date: 1992-04-06

Description

[Brief explanation of drawings]

第１図は本考案になる真空雰囲気用ヒータ端子
を示す一部拡大断面図、第２図は上記端子による
シースヒータを採用した真空蒸着装置の基板加熱
構造を説明する内部構造斜視図、第３図及び第４
図は上記基板加熱構造に使用されるシースヒータ
の端子部拡大断面図及びその全体図、第５図は上
記本考案になる端子によるシースヒータを採用し
た他の実施例になる加熱構造を示す一部斜視図、
第６図は本考案の他の実施例になる真空雰囲気用
ヒータ端子を示す一部拡大断面図、そして、第７
図及び第８図は従来技術になるシースヒータの端
子及びそれを利用した真空装置の内部構造を示す
一部拡大断面図及び斜視図である。１０……シースヒータ、１１……シース管、１
２……絶縁材、１３……発熱線、１４……端管部
、１５……絶縁部、１６……貫通孔、１８……棒
状端子、１９……ロート状部材、２０……中央突
出部。 FIG. 1 is a partially enlarged cross-sectional view showing the heater terminal for vacuum atmosphere according to the present invention, FIG. 2 is a perspective view of the internal structure of a vacuum evaporation apparatus that uses a sheath heater using the terminal, and FIG. and fourth
The figure is an enlarged cross-sectional view of the terminal portion of the sheath heater used in the above-mentioned substrate heating structure and its overall view, and FIG. figure,
FIG. 6 is a partially enlarged sectional view showing a vacuum atmosphere heater terminal according to another embodiment of the present invention, and FIG.
8 are a partially enlarged sectional view and a perspective view showing the internal structure of a conventional sheath heater terminal and a vacuum device using the same. 10...Sheath heater, 11...Sheath tube, 1
2...Insulating material, 13...Heating wire, 14...End tube part, 15...Insulating part, 16...Through hole, 18... Rod-shaped terminal, 19... Funnel-shaped member, 20... Center protrusion part .

Claims

[Scope of Claim for Utility Model Registration] (1) A terminal for a vacuum atmosphere heater in which a heating wire is wired inside a metal sheath through an insulating material, which is connected to the heating wire inside the sheath and connected to the outside. 1. A heater terminal for use in a vacuum atmosphere, characterized in that a rod-shaped terminal protruding from the sheath is taken out through a through hole formed in a ceramic member fixed to the sheath. (2) In the heater terminal for a vacuum atmosphere according to claim 1 of the above utility model registration, the ceramic member is further formed into a cylinder, one end of which is fixed to the end of the sheath, and the other end is fixed to the end of the sheath. , a funnel-shaped metal member with a through hole is attached,
A heater terminal for a vacuum atmosphere, characterized in that this funnel-shaped metal member is joined to the protruding rod-shaped terminal. (3) The heater terminal for vacuum atmosphere according to claim 1 of the above utility model registration, characterized in that a plurality of rod-shaped terminals connected to the heating wire and protruding to the outside are attached.