JP2010060341A - Magnetic sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic sensor having a structure that uniformizes temperatures of a plurality of magnetoresistive elements. <P>SOLUTION: Magnetosensitive sections 121-124 forming a magnetoresistive element MR1 and magnetosensitive sections 131-134 forming a magnetoresistive element MR2 are formed on a substrate 11. The magnetosensitive sections 121-124 and 131-134 are includes long semiconductor films. Moreover, on the semiconductor films of the magnetosensitive sections 121-124, short-circuiting electrodes made up of an electrically conductive material are arranged at predetermined intervals in the longitudinal direction. The magnetosensitive sections 121-124 and 131-134 are formed close to each other and arranged so that their respective longitudinal directions are in parallel. In this case, the magnetosensitive sections 121-124 and 131-134 are formed so as to be arranged in the order of the magnetosensitive sections 131 and 132 of the magnetoresistive element MR2, the magnetosensitive sections 121 and 122 of the magnetoresistive element MR1, the magnetosensitive sections 133 and 134 of the magnetoresistive element MR2, and the magnetosensitive sections 123 and 124 of the magnetoresistive element MR1. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a magnetic sensor for detecting magnetic information such as a magnetic pattern provided on a detection object.

  2. Description of the Related Art Conventionally, various magnetic sensors for detecting a magnetic pattern and magnetic information incorporated in a detection object such as a bill have been devised.

  For example, Patent Document 1 discloses a general differential type magnetic sensor in which a meander-shaped magnetoresistive film is formed on a substrate. Patent Document 2 also shows a differential magnetic sensor including a plurality of magnetoresistive elements. More specifically, as shown in FIG. 24 of Patent Document 2, each magnetoresistive element has a plurality of long magnetic sensing portions, and the plurality of magnetic sensing portions are detected by a detection target. They are arranged side by side in one direction and connected in series.

And, by connecting the magnetoresistive elements in series and outputting the divided voltage, that is, by outputting the difference, the influence of the resistance temperature characteristic that the resistance value changes depending on the temperature of the magnetoresistive element is suppressed. Yes.
Japanese Patent Laid-Open No. 2002-84015 JP-A-2005-37337

  However, in the conventional magnetic sensor as described above, the formation positions of a plurality of magnetoresistive elements used for differential output are separated. Here, the magnetic sensor is installed in, for example, a device on which the magnetic sensor is mounted, and heat generated by a heat source in the device is not necessarily transmitted uniformly to the entire magnetic sensor. For this reason, the temperature differs depending on the formation position of each magnetoresistive element, and the effect of suppressing the influence due to the resistance temperature characteristic as described above cannot be obtained. As a result, when the temperatures are different, the resistance value changes greatly between the plurality of magnetoresistive elements, and the differential output fluctuates.

  Therefore, an object of the present invention is to realize a magnetic sensor having a structure capable of making the temperatures of a plurality of magnetoresistive elements uniform.

  In the present invention, a plurality of magnetoresistive elements formed by forming a magnetosensitive part whose resistance value is changed by a passing magnetic flux on a substrate surface are connected in series, and a voltage divided by the plurality of magnetoresistive elements connected in series is obtained. The present invention relates to a magnetic sensor including a magnetic detection unit as an output signal. Each magnetoresistive element of the magnetic sensor has a plurality of magnetic sensing portions each formed in a long shape, and a connection conductor portion connecting the plurality of magnetic sensing portions in series. Further, the plurality of magnetosensitive parts constituting each of the plurality of magnetoresistive elements are arranged in one direction, and at least one magnetosensitive part constituting one magnetoresistive element constitutes the one magnetoresistive element. The magnetic sensitive parts of all the magnetoresistive elements are arranged so as not to be adjacent to the other magnetic sensitive parts from both sides.

  In this configuration, all the magnetosensitive parts constituting the single magnetoresistive element are not collectively formed at one place with respect to all the magnetoresistive elements. For example, when two magnetoresistive elements including a first magnetoresistive element and a second magnetoresistive element have two first and second magnetosensitive parts, respectively, the first sensation of the first magnetoresistive element. The magnetic part, the first magnetosensitive part of the second magnetoresistive element, the second magnetosensitive part of the first magnetoresistive element, and the second magnetosensitive part of the second magnetoresistive element are arranged in this order. For this reason, compared with the case where the magnetosensitive part group which comprises each magnetoresistive element each is installed in a different area | region conventionally, the difference of the temperature sensed by the magnetosensitive part of each magnetoresistive element is different. Reduced.

  In the magnetic sensor of the present invention, a plurality of magnetoresistive elements have different sensitivities, one magnetosensitive part of one magnetoresistive element, and one magnetoresistive element having a different sensitivity from one magnetoresistive element. A plurality of pairs of arrays are formed so that two magnetic sensing portions are adjacent to each other.

  In this configuration, the magnetosensitive parts constituting a plurality of magnetoresistive elements having different sensitivities are adjacent to each other so as to be configured as one magnetosensitive part pair. Then, by arranging the magnetic sensing part pairs composed of the magnetic sensing parts having different sensitivities in sequence, the temperature difference between the magnetic sensitive parts having different sensitivities constituting the respective magnetoresistive elements. Is further reduced.

  In the magnetic sensor of the present invention, the plurality of magnetic sensing parts respectively constituting the plurality of magnetoresistive elements are arranged in parallel along a direction perpendicular to the longitudinal direction.

  In this configuration, the distance between the farthest portions between the adjacent magnetic sensing portions is shorter than that in the case where they are arranged along the longitudinal direction. That is, in the case of being arranged in the longitudinal direction, it is about twice the length in the longitudinal direction of the magnetic sensing part, whereas in the case of being arranged in the direction perpendicular to the longitudinal direction, it is about 2 of the short width of the magnetic sensing part. It is only double. By setting it as such a structure, the temperature sensitivity in the adjacent magnetosensitive part of a different magnetoresistive element becomes substantially the same. Thereby, the temperature of a some magnetoresistive element becomes substantially uniform.

  In the magnetic sensor of the present invention, the longitudinal direction is parallel to the conveyance direction of the detection target.

  In this configuration, the magnetic detection timing from the detection object in each magnetoresistive element matches. For this reason, for example, if the sensitivity is set to be different between the magnetoresistive elements, the output of the magnetoresistive element on the low sensitivity side is canceled by the output of the magnetoresistive element on the high sensitivity side, and a simple waveform is obtained. Is obtained. At this time, the resistance temperature characteristics of the magnetoresistive elements are not different and the temperature is the same, so that the influence of the resistance temperature characteristics can be suppressed.

  In addition, the magnetic sensor of the present invention has a connection electrode for connecting the magnetic sensitive part on the surface of the insulating layer formed to cover the magnetic sensitive part with respect to the surface of the substrate having the magnetic sensitive part. Is formed.

  In this configuration, since it is not necessary to form all the connection electrodes on the surface of the substrate on which the magnetic sensitive portion is formed, the density of the magnetic sensitive portions on the substrate surface can be improved. Thereby, the temperature of a some magnetoresistive element can be made more uniform. Further, the magnetic sensing part and the connection electrode can be easily routed.

  In addition, the magnetic sensor of the present invention includes a plurality of magnetic detection units, and one magnetosensitive unit constituting one magnetoresistive element constitutes the one magnetoresistive element with respect to the plurality of magnetic detection units. The magnetosensitive parts of all the magnetoresistive elements are arranged so as not to be adjacent to the plurality of magnetosensitive parts from both sides.

  In this configuration, the magnetosensitive elements of the magnetoresistive elements constituting the plurality of magnetic detectors are not concentrated for each magnetoresistive element, and as described above, the magnetosensitive elements of the magnetoresistive elements alternate along the arrangement direction. Are arranged in order. Thereby, even if it is the structure which has a some magnetic detection part, the temperature of the magnetic sensing part of the magnetoresistive element which comprises each magnetic detection part becomes uniform.

  According to this invention, since the temperature of the several magnetoresistive element which comprises a magnetic sensor can be made uniform, the influence of the resistance temperature characteristic which a magnetoresistive element has can be suppressed. Thereby, it is not necessary to correct the change of the output signal due to the resistance temperature characteristic, and highly accurate magnetic detection can be realized.

  A magnetic sensor according to a first embodiment of the present invention will be described with reference to the drawings.

  FIG. 1A is a plan view showing the configuration of the magnetic detection unit 10 of the magnetic sensor of this embodiment, and FIG. 1B is an equivalent circuit diagram of the magnetic detection unit 10.

  As shown in FIG. 1A, the magnetic detection unit 10 includes a magnetic sensing unit, a connection line electrode that connects the magnetic sensing unit, and an external connection electrode that is used for voltage input / output and ground connection. By forming on the substrate 11, a circuit as shown in FIG. That is, the magnetoresistive elements MR1 and MR2 are connected in series between the voltage input terminal Vin and the ground terminal GND, and the voltage output terminal Vout is connected to the connection point of the magnetoresistive elements MR1 and MR2. A specific configuration will be described below.

The substrate 11 is made of, for example, a Si substrate, and a magnetically sensitive portion (semiconductor film) and electrodes constituting the above-described circuit are formed on the surface of the Si substrate. As the substrate, a semi-insulating substrate such as GaAs: SiO ₂ can be used in addition to an insulating substrate such as a Si substrate. A voltage input electrode 191 corresponding to the voltage input terminal Vin and a ground terminal GND correspond to one end along the first direction (vertical direction in FIG. 1A) of the formation region of the magnetic detection unit 10 in the substrate 11. A ground connection electrode 192 is formed, and a voltage output electrode 193 corresponding to the voltage output terminal Vout is formed at the other end. The voltage input electrode 191, the ground connection electrode 192, and the voltage output electrode 193 are made of a conductive material. Further, the voltage input electrode 191, the ground connection electrode 192, and the voltage output electrode 193 have a shape extending in a second direction (lateral direction in FIG. 1A) perpendicular to the first direction of the formation region.

  In a region between the voltage input electrode 191 and the ground connection electrode 192 and the voltage output electrode 193 on the substrate 11, the magnetic sensing parts 121 to 124 and the connection line electrodes 141 to 145 constituting the magnetoresistive element MR 1 are provided. Magnetic sensing portions 131 to 134 and connection line electrodes 151 to 155 constituting the magnetoresistive element MR2 are formed.

  The magnetic sensing parts 121 to 124 of the magnetoresistive element MR1 are formed of, for example, a semiconductor film made of InSb, and have a long pattern whose length is larger than the width. In the magnetic sensing parts 121 to 124, short-circuit electrodes made of a conductor are formed on the semiconductor film at predetermined intervals along the longitudinal direction, and the sensitivity to the magnetic field is set by the formation pattern of these short-circuit electrodes. Here, the sensitivity to the magnetic field means a resistance value that changes in accordance with the magnetic flux density that passes through the magnetic sensing portion, and is defined as a higher sensitivity as the resistance value changes greatly when the magnetic flux density changes by a predetermined amount. Is done.

  The magnetic sensitive parts 121 to 124 are arranged so that the longitudinal direction is parallel to the second direction. The magnetic sensitive part 121 and the magnetic sensitive part 122 are arranged close to each other in the first direction, and the magnetic sensitive part 123 and the magnetic sensitive part 124 are also arranged close to each other in the first direction. Further, in the first direction, a magnetoresistive element MR2 is configured between a region where the magnetic sensitive portions 121 and 122 are formed in parallel and a region where the voltage input electrode 191 and the ground connection electrode 192 are formed. The magnetic sensitive parts 131 and 132 to be separated are separated by a distance that can be formed. Further, in the first direction, a magnetic sensing element constituting the magnetoresistive element MR2 is formed between a region in which the magnetic sensing parts 121 and 122 are formed in parallel and a region in which the magnetic sensing parts 123 and 124 are formed in parallel. The parts 133 and 134 are separated by a distance that can be formed. A region where the magnetic sensitive portions 123 and 124 are formed in parallel is close to the voltage output electrode 193.

  The connection line electrodes 141 to 145 of the magnetoresistive element MR1 are formed on the surface of the substrate 11 by the same conductive material as the voltage input electrode 191, the ground connection electrode 192, and the voltage output electrode 193. A pattern is formed simultaneously with the electrode 191, the ground connection electrode 192, and the voltage output electrode 193.

  The connection line electrode 141 has a pattern for electrically connecting the ground connection electrode 192 and the magnetic sensing part 121 which are separated from each other, and the connection line electrode 142 is composed of the magnetic sensing part 121 and the magnetic sensing part 122 which are close to each other. It consists of the pattern which connects electrically. The connection line electrode 143 has a pattern that electrically connects the magnetic sensing part 122 and the magnetic sensing part 123 that are separated from each other, and the connection line electrode 144 connects the magnetic sensing part 123 and the magnetic sensing part 124 that are close to each other. It consists of an electrically connected pattern. Further, the connection line electrode 145 has a pattern for connecting the magnetic sensing part 124 and the voltage output electrode 193 that are close to each other. These connection line electrodes 141 to 145 are formed in regions existing at both ends in the longitudinal direction of the magnetic sensitive portions 121 to 124.

  The magnetic sensitive portions 131 to 134 of the magnetoresistive element MR2 are made of a semiconductor film made of InSb, for example, and are long patterns whose length is larger than the width. In the magnetic sensitive portions 131 to 134, no short-circuit electrode is formed on the semiconductor film. Thereby, the magnetic sensitive parts 131-134 are set to be less sensitive to magnetic flux than the magnetic sensitive parts 121-124.

  The magnetic sensitive parts 131 to 134 are arranged so that the longitudinal direction is parallel to the second direction. The magnetic sensitive part 131 and the magnetic sensitive part 132 are arranged close to each other in the first direction, and the magnetic sensitive part 133 and the magnetic sensitive part 134 are also arranged close to each other in the first direction.

  In the first direction, the magnetic sensitive portions 131 and 132 are formed by dividing the region where the voltage input electrode 191 and the ground connection electrode 192 are formed and the region where the magnetic sensitive portions 121 and 122 of the magnetoresistive element MR1 are formed. In between. At this time, the magnetic sensitive parts 131 and 132 of the magnetoresistive element MR2 and the magnetic sensitive parts 121 to 124 of the magnetoresistive element MR1 are arranged so that their longitudinal directions are parallel to each other. Further, the magnetic sensitive part 132 of the magnetoresistive element MR2 and the magnetic sensitive part 121 of the magnetoresistive element MR1 are arranged close to each other in the first direction.

  In the first direction, the magnetic sensitive parts 133 and 134 are formed by dividing the region where the magnetic sensitive parts 121 and 122 of the magnetoresistive element MR1 are formed and the region where the magnetic sensitive parts 123 and 124 of the magnetoresistive element MR1 are formed. Arranged between. At this time, the magnetic sensitive parts 133 and 134 of the magnetoresistive element MR2 and the magnetic sensitive parts 121 to 124 of the magnetoresistive element MR1 are arranged so that their longitudinal directions are parallel to each other. Further, the magnetic sensing part 133 of the magnetoresistive element MR2 and the magnetic sensitive part 122 of the magnetoresistive element MR1 are arranged close to each other in the first direction, and the magnetic sensitive part 134 of the magnetoresistive element MR2 and the magnetoresistive element MR1 are The magnetic sensitive part 123 is also arranged close to the first direction.

  The connection line electrode 151 has a pattern that electrically connects the voltage input electrode 191 and the magnetic sensing part 131 that are close to each other, and the connection line electrode 152 includes the magnetic sensing part 131 and the magnetic sensing part 132 that are close to each other. It consists of an electrically connected pattern. The connection line electrode 153 has a pattern that electrically connects the magnetic sensing part 132 and the magnetic sensing part 133 that are separated from each other, and the connection line electrode 154 connects the magnetic sensing part 133 and the magnetic sensing part 134 that are close to each other. It consists of an electrically connected pattern. Further, the connection line electrode 155 has a pattern for connecting the magnetic sensing part 134 and the voltage output electrode 193 that are separated from each other. These connection line electrodes 151 to 155 are formed in regions existing at both ends in the longitudinal direction of the magnetic sensitive portions 131 to 134.

  As described above, in the configuration of the present embodiment, in the formation region of the magnetic sensor 10 on the substrate 11, (i) voltage input in order from the one end (the upper end in FIG. 1A) along the first direction. Electrode group 191 and ground connection electrode 192, (ii) magnetosensitive parts 131 and 132 of magnetoresistive element MR2, (iii) magnetosensitive parts 121 and 122 of magnetoresistive element MR1, and (iv) magnetoresistive element MR2. (V) Magnetosensitive parts 123 and 124 of the magnetoresistive element MR1, and (vi) Voltage output electrode 193 are formed close to each other. In other words, the magnetic sensitive element MR1 formation region and the magnetoresistive element MR2 formation region are alternately arranged along the first direction, and they are close to each other. Means that it is arranged. As a result, the formation region of the magnetoresistive element MR1 and the formation region of the magnetoresistive element MR2 are not concentrated and separated from each other, so that the temperature of the magnetoresistive element MR1 and the temperature of the magnetoresistive element MR2 are substantially equal. In particular, as in the present embodiment, the magnetosensitive part of the magnetoresistive element MR1 and the magnetosensitive part of the magnetoresistive element MR2 are alternately and repeatedly arranged a plurality of times, so that the magnetosensitive part of the magnetoresistive element MR1 is simply arranged. And the magnetosensitive element MR2 are arranged adjacent to each other, the temperature can be made equal. With such a configuration, when a differential output voltage signal as shown in FIG. 1B is obtained, the temperature difference between the magnetoresistive element MR1 and the magnetoresistive element MR2 is eliminated. Therefore, it is possible to obtain an accurate output voltage signal corresponding to the magnetosensitive amount of the magnetoresistive elements MR1 and MR2 without being affected by the resistance temperature characteristics of the magnetoresistive elements MR1 and MR2.

  Furthermore, by setting the above-mentioned second direction as the transport direction of the detected object, the arrangement direction of the magnetic sensitive parts 121 to 124 and 131 to 134 constituting the magnetoresistive elements MR1 and MR2 is the transport direction of the detected object. Orthogonal. Thereby, the resistance value change of the magnetoresistive element MR1 and the resistance value change of the magnetoresistive element MR2 according to the change of the passing magnetic flux by the detection object coincide on the time axis. Here, as described above, by making the sensitivity of the magnetoresistive element MR2 lower than the sensitivity of the magnetoresistive element MR1, the change in resistance value of the magnetoresistive element MR2 is canceled by the change in resistance value of the magnetoresistive element MR1.

  FIG. 2 is a diagram for explaining waveforms of output voltage signals from the magnetic detection unit 10 of the magnetic sensor having the configuration of the present embodiment and the magnetic detection unit of the magnetic sensor having the conventional configuration (the configuration of FIG. 24 of Patent Document 2 described above). FIG. 2A shows the case of the magnetic detection unit 10 of the magnetic sensor of the present embodiment, and FIG. 2B shows the case of the magnetic detection unit of the magnetic sensor having the conventional configuration.

  As shown in FIG. 2 (A), by using the configuration of the present embodiment, the output voltage signal has a waveform with only one peak (P0) generated along the passage of the detected object M, and the detected object. M can be detected accurately. At this time, since the temperatures (T °) of the magnetoresistive elements MR1 and MR2 coincide with each other as described above, the influence of the resistance temperature characteristics can be offset, and an accurate output voltage corresponding to the magnitude of the magnetic flux density of the detection target M can be obtained. A signal level is obtained. On the other hand, as shown in FIG. 2B, when the conventional configuration is used, the output voltage signal has a peak (P1) when the detected object M passes the magnetoresistive element MR1, and the detected object is magnetoresistive. It has two peaks, a peak (P2) when passing through the element MR2. For this reason, two peaks will be detected with respect to one to-be-detected body. Since these peaks depend on the temperatures of the formation positions of the magnetoresistive elements MR1 and MR2, if the temperatures of these formation positions are different, even if they are simply added or subtracted or multiplied and divided, The influence cannot be canceled out, and the output voltage signal level corresponding to the magnitude of the magnetic flux density of the detected object cannot be detected accurately.

  Next, a magnetic sensor according to a second embodiment will be described with reference to the drawings.

  FIG. 3A is a plan view showing the configuration of the magnetic detection unit 20 of the magnetic sensor of the present embodiment, and FIG. 3B is an equivalent circuit diagram of the magnetic detection unit 20 of the magnetic sensor.

  Similarly to the magnetic detection unit 10 shown in the first embodiment, the magnetic detection unit 20 shown in the present embodiment also forms a magnetic sensitive part and a conductive electrode on the substrate 21, so that FIG. The circuit shown in FIG. And the material of the board | substrate 21, a magnetic sensing part, and an electroconductive electrode is the same as 1st Embodiment.

  A voltage input electrode 291 and a ground connection electrode 292 are formed at one end along the second direction (lateral direction in FIG. 3A) of the formation region of the magnetic detection unit 20 in the substrate 21, and the other A voltage output electrode 293 is formed at the end.

  In the region between the voltage input electrode 291 and the ground connection electrode 292 and the voltage output electrode 293 on the substrate 21, the magnetic sensing portions 221 to 225 and the connection line electrodes 241 to 246 constituting the magnetoresistive element MR 1 are provided. Magnetic sensing portions 231 to 235 and connection line electrodes 251 to 256 constituting the magnetoresistive element MR2 are formed.

  The magnetosensitive elements 221 to 225 of the magnetoresistive element MR1 are long patterns whose length is larger than the width, and short-circuit electrodes made of a conductor are formed on the semiconductor film at predetermined intervals along the long direction. Has been. The magnetic sensitive parts 221 to 225 are arranged so that the longitudinal direction is parallel to the second direction.

  The magnetic sensitive part 221 and the magnetic sensitive part 222 are arranged close to each other in the first direction, and the magnetic sensitive part 222 and the magnetic sensitive part 223 are distances that the magnetic sensitive parts 232 and 233 of the magnetoresistive element MR2 can form in the first direction. Are only separated. The magnetic sensitive part 223 and the magnetic sensitive part 224 are arranged close to each other in the first direction, and the magnetic sensitive part 224 and the magnetic sensitive part 225 are distances that the magnetic sensitive parts 234 and 235 of the magnetoresistive element MR2 can form in the first direction. Are only separated.

  The magnetic sensitive part 221 and the ground connection electrode 292 are electrically connected by the connection line electrode 241, and the magnetic sensitive parts 221 and 222 are electrically connected by the connection line electrode 242. The magnetic sensitive parts 222 and 223 are electrically connected by the connection line electrode 243, and the magnetic sensitive parts 223 and 224 are electrically connected by the connection line electrode 244. The magnetic sensitive parts 224 and 225 are electrically connected by the connection line electrode 245, and the magnetic sensitive part 225 and the voltage output electrode 293 are electrically connected by the connection line electrode 246.

  The magnetosensitive elements 231 to 235 of the magnetoresistive element MR2 are long patterns whose length is larger than the width, and no short-circuit electrode is formed. Similarly to the magnetic sensing units 221 to 225, the magnetic sensing units 231 to 235 are arranged so that the longitudinal direction is parallel to the second direction.

  The magnetic sensing part 231 is arranged close to the magnetic sensing part 221 on the side facing the magnetic sensing part 222 with respect to the magnetic sensing part 221 of the magnetoresistive element MR1.

  The magnetic sensing part 232 and the magnetic sensing part 233 are arranged in a region between the magnetic sensing part 222 and the magnetic sensing part 223 of the magnetoresistive element MR1 so as to be close to each other in the first direction. The magnetic sensitive part 234 and the magnetic sensitive part 235 are arranged in a region between the magnetic sensitive part 224 and the magnetic sensitive part 225 of the magnetoresistive element MR1 so as to be close to each other in the first direction.

  The magnetic sensing part 231 and the voltage input electrode 291 are electrically connected by the connection line electrode 251, and the magnetic sensing parts 231 and 232 are electrically connected by the connection line electrode 252. The magnetic sensitive parts 232 and 233 are electrically connected by the connection line electrode 253, and the magnetic sensitive parts 233 and 234 are electrically connected by the connection line electrode 254. The magnetic sensitive parts 234 and 235 are electrically connected by the connection line electrode 255, and the magnetic sensitive part 235 and the voltage output electrode 293 are electrically connected by the connection line electrode 256.

  With this configuration, the magnetic sensing parts 221 to 225 of the two magnetoresistive elements MR1 and the magnetic sensing parts 231 to 235 of the magnetoresistive element MR2 are arranged along the first direction. The parts 221, the magnetic sensitive part 222, the magnetic sensitive part 232, the magnetic sensitive part 233, the magnetic sensitive part 223, the magnetic sensitive part 224, the magnetic sensitive part 234, the magnetic sensitive part 235, and the magnetic sensitive part 225 are arranged in this order.

  Here, in the present embodiment, the distance between adjacent magnetic sensing parts composed of different combinations of the magnetoresistive elements, for example, the distance between the magnetic sensitive part 231 and the magnetic sensitive part 221 is the same combination of the constituting magnetoresistive elements. Is set to be shorter than the distance between adjacent magnetic sensing parts, for example, the distance between the magnetic sensing part 221 and the magnetic sensing part 222.

  With such a configuration, the magnetic sensitive parts constituting the different magnetoresistive elements are arranged in close proximity to each other like the magnetic sensitive part 231 of the magnetoresistive element MR2 and the magnetic sensitive part 221 of the magnetoresistive element MR1. Is done. As a result, the temperature difference between the magnetoresistive elements MR1 and MR2 is further eliminated than in the first embodiment, and an output voltage signal in which the influence of the resistance temperature characteristic is more effectively suppressed can be obtained.

  Also in this embodiment, the detection object can be detected accurately by making the arrangement direction of the magnetic sensing parts orthogonal to the detection object conveyance direction.

  Next, a magnetic sensor according to a third embodiment will be described with reference to the drawings.

  FIG. 4A is a plan view showing the configuration of the magnetic detection unit 30 of the magnetic sensor of this embodiment, and FIG. 4B is an equivalent circuit diagram of the magnetic detection unit 30 of the magnetic sensor.

  The magnetic detection unit 30 of the magnetic sensor of the present embodiment is not configured to obtain one output voltage signal as shown in the first and second embodiments described above. In this configuration, an output voltage signal can be obtained. That is, as shown in FIG. 4B, as an equivalent circuit, a series circuit of magnetoresistive elements MR3 and MR1 and a series of magnetoresistive elements MR2 and MR4 are provided between the voltage input terminal Vin and the ground terminal (GND). The circuit is connected in parallel, the connection point of the magnetoresistive elements MR3, MR1 is connected to the voltage output terminal Vout-A, and the connection point of the magnetoresistive elements MR2, MR4 is connected to the voltage output terminal Vout-B.

  The magnetic detection unit 30 shown in the present embodiment also forms a magnetic sensitive part and conductive electrodes on the substrate 31 in the same manner as the magnetic detection units 10 and 20 shown in the first and second embodiments. Thus, the circuit shown in FIG. And the material of the board | substrate 31, a magnetic sensing part, and an electroconductive electrode is also the same as 1st, 2nd embodiment.

  Two voltage input electrodes 3911 and 3912 corresponding to the voltage input terminal Vin are provided at one end along the second direction (lateral direction in FIG. 4A) of the formation region of the magnetic detection unit 30 on the substrate 31. One voltage output electrode 3931 corresponding to the voltage output terminal Vout-A is formed, two ground connection electrodes 3921 and 3922 corresponding to the ground terminal GND and the voltage output terminal Vout-B are formed at the other end. One voltage output electrode 3932 corresponding to is formed.

  In a region between one end and the other end of the substrate 31 in the second direction, magnetic sensitive portions 3211, 3221, 3231 and connection line electrodes 3411, 3421, 3431, 3441 constituting the magnetoresistive element MR1, and a magnetoresistive element Magnetic sensing parts 3312, 3322, 3332 and connection line electrodes 3512, 3522, 3532, 3542 constituting the element MR2, magnetic sensing parts 3311, 3321 and connection line electrodes 3511, 3521, 3441 constituting the magnetoresistive element MR3, Magnetic sensitive portions 3212 and 3222 and connection line electrodes 3412, 3422, and 3542 constituting the magnetoresistive element MR4 are formed. Here, the connection line electrode 3441 connected to the voltage output electrode 3931 is common to the magnetoresistive elements MR1 and MR3, and the connection line electrode 3542 connected to the voltage output electrode 3932 is common to the magnetoresistive elements MR2 and MR4. .

  The magnetic sensitive parts 3211, 3221, 3231 constituting the magnetoresistive element MR1 are long patterns whose length is larger than the width, and are made of a conductor on the semiconductor film at predetermined intervals along the long direction. A short circuit electrode is formed. The magnetic sensitive parts 3211, 3221, 3231 are arranged so that the longitudinal direction is parallel to the second direction.

  In the first direction, the magnetic sensing part 3211 and the magnetic sensing part 3221 are separated by a distance that can be formed by the magnetic sensing parts 3332 and 3322 of the magnetoresistive element MR2 and the magnetic sensitive parts 3222 and 3212 of the magnetoresistive element MR4. The magnetic sensitive part 3221 and the magnetic sensitive part 3231 are separated from each other by a distance in which the magnetic sensitive parts 3311 and 3321 of the magnetoresistive element MR3 can be formed in the first direction.

  The magnetic sensing part 3211 and the ground connection electrode 3921 are electrically connected by a connection line electrode 3411, the magnetic sensing parts 3211 and 3221 are electrically connected by a connection line electrode 3421, and the magnetic sensing parts 3221 and 3231 are connected line electrodes. The magnetic sensing portion 3231 and the voltage output electrode 3931 are electrically connected by the connection line electrode 3441.

  The magnetic sensitive parts 3312, 3322, 3332 constituting the magnetoresistive element MR2 are long patterns whose length is larger than the width, and are made of a conductor on the semiconductor film at predetermined intervals along the long direction. A short circuit electrode is formed. The magnetic sensitive parts 3312, 3322, and 3332 are arranged so that the longitudinal direction is parallel to the second direction.

  The magnetic sensing part 3332 is disposed in the vicinity of the magnetic sensing part 3211 of the magnetoresistive element MR1 between the magnetic sensing parts 3211 and 3221 of the magnetoresistive element MR1. The magnetic sensing part 3322 is disposed in the vicinity of the magnetic sensing part 3221 of the magnetoresistive element MR1 between the magnetic sensing parts 3211 and 3221 of the magnetoresistive element MR1. At this time, the magnetic sensing parts 3332 and 3322 of the magnetoresistive element MR2 are separated by a distance that the magnetic sensitive parts 3212 and 3222 of the magnetoresistive element MR4 can be formed in the first direction.

  The magnetic sensing part 3312 is arranged on the opposite side to the magnetic sensing parts 3221 and 3322 with respect to the magnetic sensing part 3231 of the magnetoresistive element MR1 in the first direction and close to the magnetic sensing part 3231.

  The magnetic sensing portion 3312 and the voltage input electrode 3912 are electrically connected by a connection line electrode 3512, the magnetic sensitivity portions 3312 and 3322 are electrically connected by a connection line electrode 3522, and the magnetic sensitivity portions 3322 and 3332 are connected line electrodes. The magnetic sensing part 3332 and the voltage output electrode 3932 are electrically connected by a connection line electrode 3542.

  The magnetic sensitive parts 3311 and 3321 constituting the magnetoresistive element MR3 are long patterns whose length is larger than the width, and no short-circuit electrode made of a conductor is formed on the semiconductor film. The magnetic sensitive parts 3311 and 3321 are arranged so that the longitudinal direction is parallel to the second direction.

  The magnetic sensitive parts 3311 and 3321 are disposed so as to be close to each other between the magnetic sensitive parts 3221 and 3231 of the magnetoresistive element MR1 in the first direction.

  The magnetic sensing part 3311 and the voltage input electrode 3911 are electrically connected by the connection line electrode 3511, the magnetic sensitivity parts 3311 and 3321 are electrically connected by the connection line electrode 3521, and the magnetic sensing part 3321 and the voltage output electrode 3931 are electrically connected. Are electrically connected by a connection line electrode 3441.

  The magnetic sensitive portions 3212 and 3222 constituting the magnetoresistive element MR4 are long patterns whose length is larger than the width, and no short-circuit electrode made of a conductor is formed on the semiconductor film. The magnetic sensitive parts 3212 and 3222 are arranged so that the longitudinal direction is parallel to the second direction.

  The magnetic sensitive parts 3212 and 3222 are disposed so as to be close to each other between the magnetic sensitive parts 3332 and 3322 of the magnetoresistive element MR2 in the first direction.

  The magnetic sensing part 3212 and the ground connection electrode 3922 are electrically connected by the connection line electrode 3412, the magnetic sensing parts 3212 and 3222 are electrically connected by the connection line electrode 3422, and the magnetic sensing part 3222 and the voltage output electrode 3932 are connected. Are electrically connected by a connection line electrode 3542.

  With such a configuration, along the first direction on the substrate 31, the magnetic sensitive part 3211 of the magnetoresistive element MR1, the magnetic sensitive part 3332 of the magnetoresistive element MR2, the magnetic sensitive part 3222 of the magnetoresistive element MR4, 3212, the magnetic sensing part 3322 of the magnetoresistive element MR2, the magnetic sensitive part 3221 of the magnetoresistive element MR1, the magnetic sensitive parts 3311 and 3321 of the magnetoresistive element MR3, the magnetic sensitive part 3231 of the magnetoresistive element MR1, and the magnetoresistive element MR2. The magnetic parts 3312 are arranged close to each other in order.

  As a result, the magnetosensitive portions of the magnetoresistive elements MR1 to MR4 are not concentrated for each of the magnetoresistive elements MR1 to MR4, and are intricately configured. As a result, even a magnetic sensor that can obtain two output voltages with one input voltage can suppress the influence of the resistance temperature characteristics of the magnetoresistive elements MR1 to MR4 as in the above-described embodiments.

  By utilizing the fact that two output voltage signals whose responses to magnetic flux changes coincide on the time axis are obtained, one of these two output voltage signals is subjected to polarity inversion processing, and the two output voltage signals are By adding, a detection signal having a higher peak level and one peak can be obtained. Thereby, since the level difference of the detection signal according to the difference in magnetic flux density is also increased, the detection resolution with respect to the magnetic flux density can be improved, and a more accurate magnetic sensor can be realized.

  Next, a magnetic sensor according to a fourth embodiment will be described with reference to the drawings.

  FIG. 5A is a plan view showing the configuration of the magnetic detection unit 40 of the magnetic sensor of the present embodiment, and FIG. 5B is an equivalent circuit diagram of the magnetic detection unit 40 of the magnetic sensor.

  In the magnetic detection unit of the magnetic sensor of each embodiment described above, an example in which all of the connection line electrodes are formed directly on the surface of the substrate is shown. However, the magnetic detection unit 40 of the magnetic sensor of the present embodiment is one of the connection line electrodes. The portion is formed on the surface of the protective film 42 formed on the upper surface of the magnetic sensitive portion or the like.

Specifically, the magnetic detection unit 40 has the following configuration.
A voltage input electrode 491 and a ground connection electrode 492 are formed at one end along the first direction (vertical direction in FIG. 5A) of the formation region of the magnetic detection unit 40 in the substrate 41, and the other A voltage output electrode 493 is formed at the end.

  In a region between the voltage input electrode 491 and the ground connection electrode 492 and the voltage output electrode 493 on the substrate 41, the magnetosensitive elements 421 to 424 configuring the magnetoresistive element MR1 and the magnetoresistive element MR2 are configured. Magnetic sensing parts 431 to 434 are formed.

  The magnetic sensing elements 421 to 424 of the magnetoresistive element MR1 are long patterns whose length is larger than the width, and short-circuit electrodes made of a conductor are formed on the semiconductor film at predetermined intervals along the long direction. Has been. The magnetic sensitive parts 421 to 424 are arranged so that the longitudinal direction is parallel to the second direction.

  The magnetosensitive elements 431 to 434 of the magnetoresistive element MR2 are long patterns whose length is larger than the width, and no short-circuit electrode is formed. Similarly to the magnetic sensing units 421 to 424, the magnetic sensing units 431 to 434 are arranged so that the longitudinal direction is parallel to the second direction.

  And these magnetic sensitive parts 421-424,431-434 are arrange | positioned adjacently so that the magnetoresistive element to comprise may change in order along a 1st direction. That is, in order from the formation region side of the voltage input electrode 491 and the ground connection electrode 492, the magnetosensitive part 431 of the magnetoresistive element MR2, the magnetosensitive part 421 of the magnetoresistive element MR1, the magnetosensitive part 432 of the magnetoresistive element MR2, A magnetic sensing part 422 of the magnetoresistive element MR1, a magnetic sensitive part 433 of the magnetoresistive element MR2, a magnetic sensitive part 423 of the magnetoresistive element MR1, a magnetic sensitive part 434 of the magnetoresistive element MR2, and a magnetic sensitive part 424 of the magnetoresistive element MR1. Has been placed.

  In addition, connection line electrodes 441, 442, 443, 445, 451, 455 are formed on the substrate 41. The connection line electrode 441 electrically connects the ground connection electrode 492 and the magnetic sensing part 421, the connection line electrode 442 electrically connects the magnetic sensing parts 421 and 422, and the connection line electrode 443 is the magnetic sensing part 422. , 423 are electrically connected, and the connection line electrode 445 electrically connects the magnetic sensing part 424 and the voltage output electrode 493. The connection line electrode 451 electrically connects the voltage input electrode 491 and the magnetic sensing part 431, and the connection line electrode 455 electrically connects the magnetic sensing part 434 and the voltage output electrode 493.

  A protective film 42 having an insulating property is formed on the surfaces of the magnetic sensitive part group and the connection line electrode group. Connection line electrodes 452, 453, 454, and 444 are formed on the surface of the protective film. The connection line electrode 452 electrically connects the magnetic sensing portions 431 and 432 through via holes (not shown) formed in the protective film 42, and the connection line electrode 453 is sensed through via holes (not shown) formed in the protective film 42. The magnetic portions 432 and 433 are electrically connected, and the connection line electrode 454 electrically connects the magnetic sensitive portions 433 and 434 through via holes (not shown) formed in the protective film 42. The connection line electrode 444 electrically connects the magnetic sensitive portions 423 and 424 through via holes (not shown) formed in the protective film 42.

  By adopting such a configuration, a plurality of magnetosensitive portions that respectively configure different magnetoresistive elements MR1 and MR2 are arranged alternately one by one along the first direction. As a result, the temperatures at the magnetoresistive elements MR1 and MR2 can be matched more accurately.

  Further, by arranging the connection line electrodes in two layers, the electrode routing pattern can be facilitated.

  Next, a magnetic sensor according to a fifth embodiment will be described with reference to the drawings.

  FIG. 6A is a plan view showing the configuration of the magnetic detection unit 50 of the magnetic sensor of this embodiment, and FIG. 5B is an equivalent circuit diagram of the magnetic detection unit 50 of the magnetic sensor.

  The magnetic detection unit 50 of the magnetic sensor according to the present embodiment has the two-layer structure of the connection line electrodes shown in the fourth embodiment as compared with the one-input two-output magnetic sensor as shown in the third embodiment. It is applied.

Specifically, the magnetic detection unit 50 has the following configuration.
Voltage input electrodes 5911 and 5912 and ground connection electrodes 5921 and 5922 are formed at one end along the second direction (lateral direction in FIG. 6A) of the formation region of the magnetic detection unit 50 on the substrate 51. At the other end, voltage output electrodes 5931 and 5932 are formed.

  Further, on the substrate 51, magnetic sensitive parts 5211, 5221, 5231 constituting the magnetoresistive element MR1, magnetic sensitive parts 5312, 5322, 5332 constituting the magnetoresistive element MR2, and a magnetic sensitive part constituting the magnetoresistive element MR3. Portions 5311, 5321, and 5331 and magnetic sensitive portions 5212, 5222, and 5232 forming the magnetoresistive element MR4 are formed.

  The magnetosensitive elements 5211, 5221, 5231, 5312, 5322, and 5332 of the magnetoresistive elements MR 1 and MR 2 are long patterns whose length is larger than the width, no short-circuit electrode is formed, and the long direction Are arranged so as to be parallel to the second direction.

  The magnetic sensitive parts 5311, 5321, 5331, 5212, 5222, and 5232 of the magnetoresistive elements MR3 and MR4 are long patterns whose length is larger than the width, and are arranged on the semiconductor film at predetermined intervals along the long direction. The short-circuit electrode made of a conductor is formed, and is arranged so that the longitudinal direction is parallel to the second direction.

  These magnetic sensitive portions are arranged close to each other so that the magnetoresistive elements constituting the magnetic material change one by one along the first direction. That is, in order from the one end in the first direction (the upper end of FIG. 6A) in the formation region of the magnetic detection unit 50, the magnetic sensing part 5232 of the magnetoresistive element MR4, the magnetic sensing part 5311 of the magnetoresistive element MR3, and the magnetoresistance Magnetic sensing part 5332 of element MR2, magnetic sensing part 5211 of magnetoresistive element MR1, magnetic sensing part 5222 of magnetoresistive element MR4, magnetic sensitive part 5231 of magnetoresistive element MR3, magnetic sensitive part 5322 of magnetoresistive element MR2, magnetic resistance A magnetic sensitive part 5221 of the element MR1, a magnetic sensitive part 5212 of the magnetoresistive element MR4, a magnetic sensitive part 5331 of the magnetoresistive element MR3, a magnetic sensitive part 5312 of the magnetoresistive element MR2, and a magnetic sensitive part 5231 of the magnetoresistive element MR1 are arranged. ing.

  On the substrate 51, connection line electrodes 5411, 5412, 5441, 5442, 5511, 5512, 5541, which connect the magnetoresistive elements MR1 to MR4 to the voltage input electrode, the voltage output electrode, and the ground connection electrode. 5542 is formed.

  The connection line electrode 5411 connects the magnetic sensing part 5211 of the magnetoresistive element MR1 and the ground connection electrode 5921, and the connection line electrode 5412 connects the magnetic sensing part 5212 of the magnetoresistive element MR4 and the ground connection electrode 5922. The connection line electrode 5441 connects the magnetic sensing part 5231 of the magnetoresistive element MR1 and the voltage output electrode 5931, and the connection line electrode 5442 connects the magnetic sensing part 5232 of the magnetoresistive element MR4 and the voltage output electrode 5932. The connection line electrode 5511 connects the magnetic sensing part 5311 of the magnetoresistive element MR3 and the voltage input electrode 5911, and the connection line electrode 5512 connects the magnetic sensing part 5312 of the magnetoresistive element MR2 and the voltage input electrode 5912. The connection line electrode 5541 connects the magnetic sensing part 5331 of the magnetoresistive element MR3 and the voltage output electrode 5931, and the connection line electrode 5542 connects the magnetic sensing part 5332 of the magnetoresistive element MR2 and the voltage output electrode 5932.

  A protective film 52 having an insulating property is formed on the surfaces of the magnetically sensitive portion group and the connection line electrode group. On the surface of the protective film 52, connection line electrodes 5421, 5431, 5522, 5532, 5521, 5531, 5422, and 5432 are formed for connecting a plurality of magnetic sensing portions in the magnetoresistive elements MR1 to MR4.

  The connection line electrode 5421 connects the magnetic sensitive parts 5211 and 5221 of the magnetoresistive element MR1, and the connection line electrode 5431 connects the magnetic sensitive parts 5221 and 5231 of the magnetoresistive element MR1. The connection line electrode 5522 connects the magnetic sensing parts 5312 and 5322 of the magnetoresistive element MR2, and the connection line electrode 5532 connects the magnetic sensing parts 5322 and 5332 of the magnetoresistive element MR2. The connection line electrode 5521 connects the magnetic sensing parts 5311 and 5321 of the magnetoresistive element MR3, and the connection line electrode 5531 connects the magnetic sensing parts 5321 and 5331 of the magnetoresistive element MR3. The connection line electrode 5422 connects the magnetic sensing parts 5212 and 5222 of the magnetoresistive element MR4, and the connection line electrode 5432 connects the magnetic sensing parts 5222 and 5232 of the magnetoresistive element MR4. Although not shown in the drawing, these connection line electrodes are connected to each magnetic sensing portion through via holes formed in the protective film 52.

  By setting it as such a structure, the several magnetic sensing part which each comprises different magnetoresistive elements MR1-MR4 is arrange | positioned by changing one by one along a 1st direction one by one. Thereby, the temperature in magnetoresistive element MR1-MR4 can be matched more correctly.

  Further, by arranging the connection line electrodes in two layers, the electrode routing pattern can be facilitated.

  The magnetic sensor of the present invention may include a magnet (not shown) for applying a bias magnetic field in addition to the above-described magnetic detection unit. By applying the bias magnetic field in this way, it is possible to shift the resistance value change due to the magnetic flux passing through the magnetic sensor to a more sensitive region. An accurate magnetic sensor with low temperature dependence can be configured.

It is the top view and equivalent circuit diagram which show the structure of the magnetic sensor 10 of 1st Embodiment. It is a figure for demonstrating the waveform of the output voltage signal of the magnetic sensor 10 of the structure of 1st Embodiment, and the magnetic sensor of the conventional structure. It is the top view and equivalent circuit diagram which show the structure of the magnetic sensor 20 of 2nd Embodiment. It is the top view and equivalent circuit diagram which show the structure of the magnetic sensor 30 of 3rd Embodiment. It is the top view and equivalent circuit diagram which show the structure of the magnetic sensor 40 of 4th Embodiment. It is the top view and equivalent circuit diagram which show the structure of the magnetic sensor 50 of 5th Embodiment.

Explanation of symbols

10, 20, 30, 40, 50—Magnetic detection part of magnetic sensor, 11, 21, 31, 41, 51—Substrate, 42, 52—Protective film, 121-124, 131-134, 221-225, 231- 235-Magnetic sensing portion, 141-145, 151-155, 241-246, 251-256-connection line electrode, 191,291-voltage input electrode, 192,292-ground connection electrode, 193,293-voltage Output electrode, MR1 to MR4-magnetoresistance element, M-detected body

Claims (6)

A plurality of magnetoresistive elements formed by forming a magnetosensitive part whose resistance value is changed by the passing magnetic flux on the substrate surface are connected in series, and a voltage divided by the plurality of magnetoresistive elements connected in series is used as an output signal. A magnetic sensor including a magnetic detection unit,
Each of the magnetoresistive elements includes a plurality of the magnetically sensitive portions formed in a long shape, and a connection conductor portion that connects the plurality of magnetically sensitive portions in series.
The plurality of magnetic sensing parts that respectively constitute the plurality of magnetoresistive elements are arranged in one direction,
Magnetosensitivity of all magnetoresistive elements so that at least one magnetosensitive part constituting one magnetoresistive element is not adjacent to a plurality of other magnetosensitive parts constituting the one magnetoresistive element from both sides. Magnetic sensor in which the part is arranged. The plurality of magnetoresistive elements have different sensitivities;
A plurality of pairs of arrays in which one magnetosensitive part of the one magnetoresistive element and one magnetosensitive part of another magnetoresistive element having different sensitivity from the one magnetoresistive element are adjacent to each other are formed. The magnetic sensor according to claim 1.   3. The magnetic sensor according to claim 1, wherein the plurality of magnetosensitive portions respectively constituting the plurality of magnetoresistive elements are arranged so as to be parallel along a direction perpendicular to the longitudinal direction. .   The magnetic sensor according to any one of claims 1 to 3, wherein the longitudinal direction is parallel to a conveyance direction of the detection object.   The connection electrode for connecting the magnetic sensitive part is formed on the surface of the substrate having the magnetic sensitive part and also on the surface of the insulating layer formed so as to cover the magnetic sensitive part with respect to the surface. The magnetic sensor in any one of Claims 1-4.   A plurality of the magnetic detection units are provided, and one magnetic sensing unit constituting the one magnetoresistive element corresponds to the plurality of other magnetic sensing units constituting the one magnetoresistive element. 6. The magnetic sensor according to claim 1, wherein the magnetically sensitive portions of all the magnetoresistive elements are arranged so as not to be adjacent from both sides.

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