JP2010047319A - Sheet glass storage lamination package and sheet-shaped object storage tray - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sheet glass storage lamination package which makes a sheet-shaped object such as a cover glass used for a solid photographing element with a small dimension hardly stick to a container caused by static electricity and hardly generates dust at the time of transport and does not reduce operability at the time of opening, and also to provide a sheet-shaped object storage tray used for the sheet glass storage lamination package. <P>SOLUTION: The sheet glass storage lamination package 10 has a structure wherein a plurality of trays 20 for horizontally lining up and storing the sheet-shaped objects 30 on their upper surfaces are laminated. The tray is composed of an antistatic material, and has at least three or more of mutually independent sheet-shaped object movement regulating means 21-23 on an upper surface side and a lower surface side of the tray 20, and the whole laminated trays 20 are integrally covered and packed with an organic film material 40. The sheet-shaped storage tray 20 is laminated inside the sheet-shaped object storage lamination package body 10 with the sheet-shaped object 30 mounted thereon. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a plate-shaped object storage stacked package that stores small-sized plate-shaped objects such as a cover glass for a solid-state imaging device, and a plate-shaped object storage tray used for the plate-shaped object storage stacked package.

  In general, as a window material (cover glass) used for a solid-state imaging device such as a CCD or CMOS, or an airtight package for housing an optical semiconductor such as an LCD, an inorganic oxide having high translucency and stable weather resistance. The plate glass which consists of a thing is used. Such a plate glass is obtained by melting and cooling and solidifying various glass raw materials so as to have a predetermined size, and has high optical homogeneity in order to exhibit desired performance. . Solid-state imaging devices are used in various applications, but in recent years, in addition to applications such as digital cameras, they are also used in mobile phones, personal digital assistants, etc. ing.

  In order to protect solid-state image sensors used in such diverse applications and exhibit stable functions that meet high performance requirements, the plate glass used for the cover glass of solid-state image sensor packages must satisfy many specifications. I must. The surface quality and optical performance of the glass sheet are basically required, but there are other problems such as adhesion of foreign matters that occur when assembling as a package, and alpha rays that affect the performance of the assembled package. There are known issues related to Further, the plate glass is transported to the package assembly line when it is assembled as a package of the solid-state imaging device. The plate glass in the middle of conveyance needs to be protected from impact and the like, and to prevent adhesion of foreign matters. For this reason, sufficient attention is required also from the viewpoint mentioned above also to the packaging material used when conveying manufactured plate glass to a package assembly line.

  From the viewpoints as described above, many inventions have been proposed for the packing member used for storing and transporting the cover glass for the solid-state imaging device. For example, Patent Document 1 discloses a glass substrate transport tray that is less likely to be deformed by a load of a glass substrate and that is less likely to generate dust due to vibration of the glass substrate during transportation. This document relates to a glass substrate carrying tray made of a polyolefin resin foam in which a housing portion for horizontally housing a glass substrate is formed on an upper surface so that vibration of the glass substrate hardly occurs during transportation. An invention is disclosed in which the storage portion of the tray has a bottom surface that accommodates the glass substrate and a side wall that surrounds the bottom surface, constitutes an inner wall surface of the side wall, and has a recess at a corner of the side wall of the storage portion. Has been.

  Patent Document 2 relates to a conductive resin composition used for an electronic component storage container in order to solve problems such as conductive characteristics and dimensional accuracy of the electronic component storage container. In this document, technical means for blending and molding a resin with at least 5 to 50% by weight of zinc oxide whisker, 3 to 30% by weight of conductive filler, and 0 to 30% by weight of a plate-like inorganic filler. Thus, an invention is disclosed in which an electronic component storage container excellent in conductivity, mechanical characteristics, and dimensional accuracy can be obtained.

  Patent Document 3 relates to an optical component packing case in which an optical component is stored in a storage recess on the lower case side and is covered with an upper case. In this document, even when pressure is applied by stacking a plurality of cases, there is a description regarding a packing form that prevents a large pressurizing force from being applied to the optical component storage space from being deformed. . In this document, a storage area having an optical component storage recess on the upper surface, a lower case having an outer peripheral area connected to the outer periphery of the storage area, and a storage covering the storage area by being stacked on the lower case An optical component packing case comprising an area covering region and an upper case having an outer periphery region covering region covering the outer periphery region, and the optical component in a position within the lower case storage region and avoiding the optical component storing recess An invention is disclosed in which a lower rib having a downward projecting length exceeding the downward projecting length of the storage recess is provided and corresponds to the lower rib in the storage region covering region of the upper case.

JP 2007-119071 A JP-A-5-117447 JP 2007-217027 A

  However, the inventions made so far cannot be said to be sufficient as a container for storing fine glass parts or the like corresponding to the progress of a remarkable technical level, or as a transfer tray. Solid-state imaging devices are used in various ways as functions are improved, and in particular, they are often mounted on electronic devices with limited storage space, such as personal digital assistants (PDAs) and mobile phones. In such a new application, the solid-state image sensor has a smaller size than the conventional one. In the case of a solid-state imaging device smaller than the conventional one, the size of the cover glass used is also smaller than before.

When using such a cover glass for a solid-state image sensor having a smaller size than the conventional one, the problem arises that the cover glass, which has not been a problem in the past, adheres to the lid of the packaging container used for transportation or the like. became. That is, this problem relates to static electricity when opening the packaged container and using each cover glass. When one of the stacked trays is lifted at the time of opening, the cover glass stored in the lower tray on the lower surface of the tray is lifted while being attached to the raised tray by static electricity. This phenomenon occurs when the cover glass is charged with static electricity due to minute vibrations during transportation. When the cover glass is attached to the tray by static electricity, the assembling work for assembling the cover glass as a solid-state imaging device cannot be continued as it is, and the workability at the time of manufacturing the package is significantly reduced. For this reason, it has become a problem whether the problem of the cover glass adhering to the tray can be avoided from the viewpoint of improving the production efficiency or saving labor. For this reason, studies have also been made on producing a tray using a conductive material as described in Patent Document 2, but even if a conductive material is used as a tray material, it is highly charged like glass. When the material is stored in the tray, a large improvement cannot be obtained particularly in the case of a small-sized plate glass used for constituting a small package, in which the area of the light-transmitting surface on one side of the plate glass is less than 30 mm ^2. It was. In other words, since the cover glass having easy chargeability is remarkably smaller than the conventional size, charging by static electricity could not be solved at all by changing the material constituting the tray.

  In view of such a situation, the present invention is such that even a plate glass such as a cover glass for a solid-state imaging device having a very small size as described above, the surface of the plate glass is charged by static electricity and hardly adheres to the surface of the container for transportation. A plate-shaped material storage stacked package that does not easily cause adhesion of foreign matters such as dust due to vibration during transportation and does not deteriorate workability when manufacturing a solid-state imaging device package, and this plate-shaped material storage stacked package It is an object to provide a plate-like object storage tray used for a body.

  The present inventors opened a package of plate-shaped objects such as plate glass, and when the plate-shaped objects such as packed glass were taken out from the tray and used, the plate-shaped objects did not adhere to the tray and were smoothly operated. The research to realize the stacking and packaging body of the plate-like material that can realize the performance was repeated. And by making it into a tray that takes into account the structure that houses the plate glass, the plate-like object can reduce the electrostatic charge on the surface of the plate glass and can reduce the adhesion of foreign substances such as dust generated by the contact between the plate-like object and the tray. The present invention provides a storage laminated package and a plate glass storage tray used for the package.

  The plate-shaped object storage stacked package of the present invention is a plate-shaped object storage stacked package having a configuration in which a plurality of trays in which plate-shaped objects are horizontally aligned and stored are stacked on the upper surface, wherein the tray is an antistatic material. The tray upper surface side and the tray lower surface side have at least three or more kinds of plate-like object movement restricting means independent from each other, and the entire stacked trays are integrally covered and packaged.

  Because of the above configuration, the plate-shaped article storage stacked package of the present invention is in a state in which the plate-shaped article is securely held in the tray, and is applied to the plate-like article by various handling during transportation or transportation. In this configuration, the electrical and mechanical influences are suppressed, the laminated body is protected from the intrusion of dust from the outside, and various problems such as adhesion of foreign matters generated inside the laminated body can be continuously reduced.

  The plate-shaped article storage stacked package of the present invention is constituted by a tray made of an antistatic material packed in a stacked state in the package. The tray upper and lower surfaces have three or more types of plate-like object movement restricting means. “There are at least three types of plate-like object movement restricting means that are independent from each other on the tray upper surface side and the tray lower surface side” means that there are at least three structures that prevent the plate-like object from moving in the tray. Therefore, each of the structures relating to the three plate-like object movement restricting means cannot be regarded as being connected to each other, that is, is a structure provided independently at a distant position. These three structures work differently and reliably hold the plate-like object in the packed tray. In other words, the plate-shaped article storage stacked package of the present invention does not require a plurality of different structures that prevent the movement of the plate-shaped objects in the same direction, and the structures provided on the tray in the present invention function differently. It is necessary to be configured as follows. If the same operation control is handled by different structures, the structure of the entire tray must be complicated, and the manufacturing cost of the tray increases, which is not preferable.

  In addition to the above, the plate-shaped object storage stacked package of the present invention supports at least one of the plate-shaped object movement restricting means within the range of the optically effective standard surface of the stored plate-shaped object. .

Here, the plate-shaped object storage stacked package will be described below in that at least one of the plate-shaped object movement restricting means supports within the range of the optical effective standard surface of the stored plate-shaped object. To do. The plate-shaped object stored in the plate-shaped object storage stacked package of the present invention has at least one or more opposing light transmission surfaces. And, the entire area of the opposing light transmitting surfaces, that is, at least two opposing light transmitting surfaces, is not effectively used. The plate-like object according to the present invention is not used alone, but is used in a state of being fixed to other constituent members by various means such as bonding and adhesion. In this case, a part of the light transmission surface is used as a fixed portion by various means such as bonding and adhesion. In the present invention, such a portion is called an optically ineffective standard surface. On the other hand, a light transmitting surface through which light passes, that is, a surface that substantially exhibits the optical function of a plate-like object is referred to as an optically effective standard surface. The optically effective standard surface of the platelet of small size, for transmitting surface of the area is one side, and is less than 30 mm ^2. Therefore, the plate-shaped object storage stacked package of the present invention of the present invention is supported within at least one type of the plate-shaped object movement restricting means within the range of the optically effective standard surface of the plate-shaped object. is there.

  Because of such a configuration, even a plate-like object having a small size does not support the optically ineffective standard surface with the plate-like object movement restricting means, but has a larger area than the optically ineffective standard surface. By supporting the optically effective standard surface without shaking, the plate-like material can be stably held in the tray without being greatly affected by vibrations and shaking that the laminated package receives. It is easy to keep maintaining the state.

In addition to the above, the plate-shaped object storage stacked package of the present invention has a Ra value of the surface roughness of the contact portion with the plate-shaped object of the plate-shaped object movement regulating means that supports the optically effective standard surface within the range of 0. If it is 15 μm or less, it is used for storing a plate-like object having a small outer dimension, specifically, a surface having a transmission surface of less than 30 mm ² on the one side. Even if it is supported within the range of the standard surface, it is difficult to cause undesirable scratches and foreign matter adhesion within the range of the optically effective standard surface of the plate-like object. This is because the optically effective standard surface needs to be monitored so that its surface condition is more strictly controlled and the surface condition falls within a predetermined standard range in order to transmit light.

  The Ra value of the surface roughness of the contact portion with the plate-like object of the plate-like object movement restricting means that supports the optically effective standard surface is 0.15 μm or less means that the tray is in contact with the plate-like object. Ra value which is "arithmetic mean roughness" representing the surface roughness of the contact portion provided is JIS B0601 (2001) "Product Geometrical Specification (GPS)-Surface Properties: Contour Curve Method-Terminology, Definition and Surface It is expressed as the surface roughness based on the “characteristic parameter” and represents 0.15 μm or less.

  When the Ra value of the surface roughness of the contact portion with the plate-like object of the plate-like object movement restricting means that supports the range of the optically effective standard surface exceeds 0.15 μm, it is caused by vibration caused by causes such as conveyance. The tray surface is worn and dust is generated, and the generated dust is liable to adhere to the surface of the plate-like object as dust, that is, foreign matter. From such a viewpoint, the Ra value of the surface roughness of the contact portion with the plate-like object of the plate-like object movement restricting means that supports the range of the optically effective standard surface is more preferably 0.12 μm or less. More preferably, it is 0.10 μm or less.

  In addition, the plate-shaped object storage stacked package of the present invention has the Ra value of the surface roughness of the contact portion with the plate-shaped object of the plate-shaped object movement regulating means supporting the optically effective standard surface in addition to the above. If all the measurement results of 10 different trays are 0.15 μm or less, it is preferable because there are few trays with a short service life and stable quality is maintained. From this point of view, with respect to the support means within the range of the optically effective standard surface, all of the 10-point measurement results of the Ra value of the surface roughness of the contact portion with the plate-like object are more preferably 0.12 μm or less. More preferably, it is 0.10 μm or less.

  With the configuration as described above, the present invention can be used for storing a plate-like object having a reduced outer dimension, and can support a plate-like object within the range of the optically effective standard surface. This is preferable because it is difficult to cause undesirable scratches and foreign matter adhesion to objects.

  In addition to the above, the plate-shaped object storage stacked package of the present invention is provided with a horizontal movement restricting projection, a plate-shaped object, in which the plate-shaped material movement restricting means is provided on the upper surface side of the tray and restricts the horizontal movement of the plate-shaped material. Is a support protrusion that supports the lower side of the tray, and a vertical movement restriction protrusion that restricts the vertical movement of the plate-like object positioned directly below the tray lower surface side when stacked, and the covering packaging is made of an organic film material, The movement of the plate-like object can be surely suppressed, and each projection can have a structure having an optimum surface shape and surface state according to its function.

  Here, the plate-like object movement restricting means is provided on the tray upper surface side to restrict the horizontal movement of the plate-like object, the support protrusion for supporting the plate-like object from below, and the tray lower surface side. A description will be given of the vertical movement restricting protrusion that restricts the vertical movement of the plate-like object located immediately below during the lamination, and that the covering packaging is made of an organic film material. As described above, the plate-shaped object storage stacked package of the present invention is constituted by a tray made of an antistatic material packed in a stacked state in the package, and a plurality of types of plates are provided on the upper and lower surfaces of the tray. It has a projection that is a movement control means. There are two types of protrusions on the top surface of the tray, and the first protrusion is called a horizontal movement restricting protrusion, and the role of this protrusion is to restrict the horizontal movement and vibration of the plate-like object stored in the tray. belongs to. The second protrusion is called a support protrusion, and the role of this protrusion is to support the plate-like object from below. In addition, the vertical movement restricting protrusion provided on the lower surface of the tray restricts the vertical movement of the plate-like object stored on the lower tray when the tray is in a stacked state. It is for regulation. The horizontal movement restricting projection and the support projection described above form a plate-shaped object storage portion. Further, the vertical movement restricting projection constitutes a plate-like object storage space by restricting the movement of the plate-like object in a three-dimensional manner. And in the plate-shaped object accommodation laminated body of this invention, in the state in which the several tray was laminated | stacked, the whole was covered with the organic film material from the outer side, and it integrated by heating.

  Further, the height in the vertical direction from the bottom surface of the support protrusion on the upper surface side of the tray according to the present invention needs to be lower than the height in the vertical direction from the bottom surface of the horizontal movement regulating protrusion. It is preferable that the height of the support protrusion in the vertical direction from the bottom surface of the tray is not more than one half of the height in the vertical direction from the bottom surface of the horizontal movement restriction protrusion.

  The tray may be made of an antistatic material, and the surface of the base material is coated with an antistatic film or a conductive film, or the base material itself is provided with antistatic performance or conductive performance. What is necessary is just to comprise with a property material. In order to achieve such a configuration, for example, a composite material in which a conductive material such as carbon or metal is kneaded may be used even if it is a resin material.

  All of the three types of protrusions, that is, the support protrusion, the horizontal movement restricting protrusion, and the vertical movement restricting protrusion, need to have an R surface, that is, a round surface, instead of a sharply pointed tip. The value of R on the R surface, that is, the value of the radius of curvature is not limited.

  Further, the planar shape of the protrusions provided on the upper surface or the lower surface of the plate-shaped object storage tray of the present invention may be any shape depending on the size of the tray for storing the plate-shaped object of a predetermined size, the material of the tray, and the like. It's okay. For example, the planar shape of the protrusion may be a substantially elliptical shape, a substantially rectangular shape, a substantially polygonal shape, a saddle shape, a cross shape, a star shape, a linear shape, or a shape in which these are connected.

  In the plate-shaped article storage stacked package of the present invention, in the plate-shaped object storage space for storing the plate-shaped object, the surface of the tray that comes into contact with the plate-shaped object by transporting the plate-shaped object storage stacked package is prevented from being charged. It is obtained in accordance with the technical idea that it has performance, further reduces the contact area as much as possible, and limits the amount of movement of the plate-like object in the plate-like object storage space. For this reason, it is necessary for the plate-like object to be supported from the lower side with as little area as possible. With such a limitation, the plate-like object can be supported by a plurality of support protrusions.

  In addition to the above, the plate-like object stacking and packaging body of the present invention is not provided with an unstable support state if the support protrusion is disposed on the tray along the end surface of the plate-like object. It is possible to support.

  Moreover, if the plate-shaped object storage laminated package of the present invention has a configuration in which a heat-shrink material such as a polyolefin film is wound around the outer periphery of the trays laminated as described above and fixed so as to be integrated, It is preferable because fine dust such as dust from the surface does not adhere to the surface of the plate-like material, and an excellent-grade plate-like material can be maintained from the outside.

  If the shortest distance between the upper surface of the plate-like material and the lower surface portion of the upper tray located above the plate-like material is 0.5 mm or less, the plate-like material storage laminated package of the present invention is plate-like. The movement of the object in the vertical direction is suppressed, reducing the risk of contact charging, and also reducing dust generated by the contact.

  Here, if the support protrusion is arranged on the tray along the end surface of the plate-like object, the plate-like object is supported in an unstable support state. When two or more trays are stacked with the end surfaces of the trays in a state in which a plurality of plate-like objects are accommodated, from the lower surface portion of the tray constituting the upper layer, the plate-like objects accommodated on the tray constituting the lower layer It means that the shortest distance to the upper surface is in the range of 0.5 mm to 0 mm.

  If the distance between the lower surface part of the tray and the upper surface of the plate-like object exceeds 0.5 mm, the plate-like object end surface and the protruding part of the storage part are rubbed due to vibration during transportation, etc. It is not preferable because the dust thus deposited adheres to the surface of the plate-like material as a dust and deteriorates the quality of the plate-like material such as glass. From such a viewpoint, it is more preferable that the interval between the lower surface of the tray and the upper surface of the plate is in the range of 0.45 mm or less, and more preferably, The distance between the lower surface and the upper surface of the plate-like object is within a range of 0.40 mm or less, more preferably 0.20 mm or less, and most preferably 0.10 mm or less. However, when the plate-like material has a configuration that does not easily generate dust, for example, when the surface is not coated with a coating or the like and is made of a highly charged glass material, the lower surface of the tray and the plate-like material The distance from the upper surface of the object is preferably 0.001 mm or more, more preferably 0.01 mm or more, and still more preferably 0.02 mm or more.

  In order for the distance between the lower surface of the tray and the upper surface of the plate-like object to be a predetermined size of 0.5 mm or less, a convex portion protruding upward from the vicinity of the outer peripheral edge of the tray is provided, and the height of the convex portion Is set to a predetermined value so that the distance between the lower surface of the tray and the upper surface of the plate-like object is adjusted to a predetermined value.

  In addition to the above, the plate-shaped article storage stacked package of the present invention can be inspected in a state in which the plate-shaped article is stored as long as at least one depression is provided on the end face of the opposite side of the outer periphery of the tray. Therefore, it becomes easy to support by the jig for conveyance when conveying for. In addition, when taking out the plate-like material from the plate-like material storage stacked package in order, after removing the plate-like material stored in the storage unit of the stacked trays, the uppermost tray is removed from the stacked tray. Even when it is difficult to remove the upper and lower trays when they are removed, insert the claw of the disassembly jig into the recesses on the end faces of the opposing sides of the outer periphery of the tray. This is preferable because the operation of dissociating the upper tray from the lower tray can be easily performed.

  Here, that at least one or more depressions are provided on the end faces of the opposite sides of the outer periphery of the tray means that one or more of the opposite sides of the tray having a substantially rectangular outer peripheral shape are respectively two or more in total on the outer periphery. That is, it has a hollow. The number of depressions is arbitrary, but if it is too large, the processing becomes troublesome, but there is also a problem that the tray becomes weak in strength. From such a viewpoint, the depressions on the end faces of the opposite sides of the outer periphery of the tray are preferably 5 or less, and more preferably 3 or less.

  Further, the shape and size of the recess may be of any shape and size as long as the mechanical strength of the tray is not significantly reduced.

  Moreover, the plate-shaped object storage stacked package of the present invention has a case where the plate-shaped object is obtained by laser cutting, and the laser-processed surface of the plate-shaped object has high flatness and may come into contact with the tray. Even if it exists, since it will be in the state where the tray surface wears out in a contact location and the probability that dust will generate | occur | produce will become small, the danger that the dust of tray origin will adhere to a plate-shaped object surface decreases, and is preferable.

  Laser cutting performed in order to obtain a plate-like material in the present invention is not, for example, fusing by laser, but a thermal shock is applied to the surface of the plate-like material by heat generated by the laser, thereby finely cutting the plate-like material. This is due to the method of cleaving by forming a line and then concentrating the stress on the cutting reserve line. More specifically, for example, the second processed surface is formed by pressing the tip of the first processed surface formed by carbon dioxide laser irradiation so that a bending stress is applied directly below the fulcrum so as to be a fulcrum. It is to make it. Here, the first processed surface is formed by irradiating the surface of the plate-like object with a carbon dioxide laser having an elliptical, substantially rectangular, linear, or triangular beam spot shape according to an output condition having a predetermined beam intensity distribution. However, by linearly driving at a constant speed, a notch is formed on the surface of the plate-like object corresponding to the beam driving location. Thus, the newly generated surface becomes the first processed surface.

  In addition, the plate-shaped object storage laminated package of the present invention has a high flatness of the end surface of the plate-shaped object and is in contact with the horizontal movement restricting projection if the laser cutting process forms the end surface of the plate-shaped object. This reduces the generation of dust due to the horizontal movement restricting projection.

  In addition to the above, the plate-shaped material storage laminated package of the present invention is a plate-shaped material that is a plate glass, and has a coating film on at least one of the light-transmitting surfaces facing in the plate thickness direction. It is possible to pack a plate glass provided with a film exhibiting desired optical performance in accordance with various uses in a state where dirt such as dust does not adhere.

  Here, the plate-shaped object is a plate glass and has a coating film on at least one of the light-transmitting surfaces opposed in the plate thickness direction, on one or both of the light-transmitting surfaces of the plate glass. That is, a film made of an organic material or an inorganic material is formed. These coatings include antireflection films (also called AR coatings), infrared reflective films (or infrared cut filters), nonreflective films, conductive films, antistatic films, low-pass filters, high-pass filters, band-pass filters, shielding films, and reinforcing films. A film, a protective film or the like may be selected and adopted as necessary. In particular, the infrared reflecting film has a high sensitivity in the infrared region when the plate glass is used for a CCD. Therefore, the image of the solid-state imaging device is added to the image by the naked eye by suppressing the incidence on the infrared device. Since it can approach, it is preferable. When forming a coating film on both surfaces of plate glass, the same film may be formed and a different film may be formed.

Regarding the coating film, the following materials can be adopted as specific materials for the coating film. For example, silica (SiO ₂ ), alumina (Al ₂ O ₃ ), zirconia (ZrO ₂ ), tantalum oxide (or tantala) (Ta ₂ O ₅ ), magnesium oxide (MgO), niobium oxide (Nb ₂ O ₅ ), oxidation Lanthanum (La ₂ O ₃ ), yttrium oxide (Y ₂ O ₃ ), hafnium oxide (HfO ₂ ), chromium oxide (Cr ₂ O ₃ ), magnesium fluoride (MgF ₂ ), molybdenum oxide (MoO ₃ ), tungsten oxide (WO ₃ ), cerium oxide (CeO ₂ ), vanadium oxide (VO ₂ ), titanium zirconium oxide (ZrTiO ₄ ), zinc sulfide (ZnS), cryolite (Na ₃ AlF ₆ ), thiolite (Na ₅ Al ₃ F1 ₄₎ ), yttrium fluoride _(YF 3), calcium fluoride _(CaF 2), aluminum fluoride AlF _3), barium fluoride _(BaF 2), lithium fluoride (LiF), lanthanum fluoride _(LaF 3), gadolinium fluoride _(GdF 3), dysprosium fluoride _(DyF 3), lead fluoride (PbF ₃ ), strontium fluoride (SrF ₂ ), antimony-containing tin oxide (ATO) film, indium-tin oxide film (ITO film), multilayer film of SiO ₂ and Al ₂ O ₃ , SiO x -TiO x multilayer film, SiO ₂ -ta ₂ O ₅ based multilayer film, SiOx-LaOx-TiOx sequence of the multilayer _{film, in 2 O 3 -Y 2 O} 3 solid solution film, an alumina solid solution film, a metal thin film, colloidal particles dispersed film, polymethyl methacrylate film ( PMMA film), polycarbonate film (PC film), polystyrene film, methyl methacrylate styrene copolymer film, polyacrylate film, etc. Those having a composition can be used.

  In addition, the coating film forming method is not particularly limited as long as predetermined surface accuracy and function can be realized and the cost required for the production is not hindered, and various methods may be adopted. For example, sputtering, vacuum deposition, thermal CVD, laser CVD, plasma CVD, molecular beam epitaxy (MBE), ion plating, laser ablation, metal organic chemical vapor deposition (MOCVD), etc. As a method for forming a coating film according to the present invention, a chemical vapor deposition method (or CVD method), a liquid phase growth method such as a sol-gel method, a spin coating or screen printing coating method, or a plating method is used. can do. However, among these, the CVD method is particularly preferable because it can form a coating film with good adhesion at low temperatures, can be applied to various coating films, and is suitable for forming a coating film of a compound. Is the method.

  In addition to the above, the plate-shaped object storage stacked package of the present invention is a fine dust package that must be avoided when forming a solid-state image sensor package, if the plate glass is used for a solid-state image sensor storage package. The structure reliably prevents the intrusion into the body, and at the same time, the generation of dust caused by the plate glass and the tray generated by the vibration of the plate glass in the package can be suppressed.

  Any material for the cover glass for the solid-state image sensor may be used as long as it satisfies the required optical performance. For example, various glasses such as borosilicate glass, quartz glass, alkali-free glass, aluminosilicate glass, glass substantially free of uranium and thorium, phosphate glass, soda lime glass, high refractive index glass, high strain point glass, etc. The material can be used as appropriate.

  The procedure for forming the plate-shaped article storage stacked package of the present invention is as follows. First, a plate glass having a small area of a translucent surface such as a cover glass for a solid-state image sensor is manufactured by a predetermined manufacturing process. Subsequently, these plate glasses are placed one by one or a plurality of plate glasses at a time by vacuum tweezers, a robot hand or the like on the tray storage portion according to the plate-like material storage stacked package of the present invention. After the plate glass is placed on all of the plurality of storage portions on one tray, another tray with the same direction is placed on the tray, and above the vicinity of the outer peripheral edge of the lower tray. The protruding convex portion is fitted into a meshing portion provided on the lower surface of the upper tray and temporarily fixed. Then, the operation of storing the plate glass in the storage section on the upper tray is repeated. By stacking the plate glass and the tray alternately, a multilayer laminate having a predetermined number of layers can be obtained. Finally, a tray serving as a lid is fitted into a convex portion projecting upward near the outer peripheral edge of the lower tray to form one laminated body, and then an organic film material such as nylon or polyolefin film is formed from the periphery. In that state, the plate-shaped article storage stacked package of the present invention can be obtained by applying reduced pressure packaging with a decompression pump or heat shrink packaging with hot air or the like. As the organic film material used here, for example, a laminated film using nylon as a layer core material may be used. The thickness of the organic film material may be in the range of 0.01 mm to 1.5 mm.

Moreover, the size of one plate-shaped object constituting the plate-shaped object storage stacked package of the present invention is 2-100 mm ² in terms of the size of the area of one surface of the light transmitting surface. is there. If the size exceeds 100 mm ² , it is possible to cope with even a method other than the present invention in order to avoid adhesion with the tray, which is a problem in the present invention. Things will disappear. Moreover, if it is less than 2 mm < ² >, it will become inadequate even if it is this invention.

  Moreover, it is preferable that the thickness dimension of one sheet glass which comprises the plate-shaped object accommodation laminated package of this invention exists in the range of 0.1 mm to 1.0 mm.

  The plate-shaped object storage tray of the present invention is a plate-shaped object storage tray that has a fitting portion that can be arranged and placed in a horizontal direction and that can be stacked on each other, and is made of an antistatic material. The tray upper surface side has a plate-like object storage portion constituted by a horizontal movement restricting protrusion for restricting the movement of the plate-like object in the horizontal direction and a support protrusion for supporting the plate-like object from below. Is characterized in that it has a vertical movement restricting projection for restricting the vertical movement of the plate-like object positioned immediately below at the time of lamination.

  Here, a plate-shaped object storage tray that has a fitting portion that can be arranged and placed in a horizontal direction and that can be stacked on each other, and is made of an antistatic material, And a plate-like object storage portion constituted by a horizontal movement restricting protrusion for restricting the movement of the plate-like object in the horizontal direction and a support protrusion for supporting the plate-like object from below, and the tray lower surface side is directly below at the time of stacking Has a vertical movement restricting protrusion that restricts the vertical movement of the plate-like object located on the tray. As described above, the protrusion having three different roles is formed on the tray surface and stored in the object storing portion. Is held in a state in which movement of the plate-like object to be performed is restricted. Further, since the tray is made of an antistatic material, the plate glass can be held in a state in which contact charging is unlikely to occur, and even when the trays are stacked, the plate-like object is difficult to adhere to the upper tray.

  In addition to the above, the plate-shaped object storage tray of the present invention supports any one of the support protrusion and the vertical movement restricting protrusion within the range of the optically effective standard surface of the stored plate-shaped object. is there.

  Here, any of the support protrusions and the vertical movement restricting protrusions supports within the range of the optically effective standard surface of the stored plate-like object. As described above, the protrusions having three different roles are used. A plate-shaped object having a small size is formed by supporting either the inner support protrusion or the vertical movement restricting protrusion formed on the tray surface within the optically effective standard surface of the stored plate-shaped object. However, the movement in the tray can be appropriately regulated.

  In addition to the above, the plate-shaped object storage tray of the present invention has a fitting convex portion constituting the fitting portion on the tray upper surface side in the vicinity of the outer peripheral edge of the tray, and the height of the fitting projection from the height K of the supporting projection. If the value T obtained by subtracting the height S, the height Z of the vertical movement restricting projection and the thickness B of the plate-like material to be stored is 0.5 mm or less, the plate-like material moves when the trays are stacked. In addition, it can be maintained in a state in which it is difficult to be charged, and generation of dust and the like can be suppressed.

  A fitting convex portion constituting the fitting portion is provided on the tray upper surface side in the vicinity of the outer peripheral edge of the tray. From the height K of the fitting convex portion, the height S of the support projection, the height Z of the vertical movement regulating projection, and the storage The point that the value D obtained by subtracting the thickness B of the plate-like object to be performed is 0.5 mm or less will be described below. The plate-like object storage tray according to the present invention has a fitting convex portion in the vicinity of the outer peripheral edge of the tray on the upper surface side of the tray, that is, a portion configured to have a protruding structure so that the fitting can be performed. By mating with the mating protrusions near the lower outer peripheral edge of the other tray above, and integrating them, by repeating these operations, stacking three or more trays Although it is conveyed by making it a laminated body, when two trays are overlapped, the shortest distance between the plate-like object and the upper lower surface of the tray is as shown in FIG. The value obtained by subtracting the height S of the support protrusion, the height Z of the vertical movement restricting protrusion, and the thickness B of the plate-like object to be stored from the height K of the fitting convex portion, that is, T = (K− (S + Z + B)) Is a value T obtained by the following equation. And this value T is 0.5 mm or less, and if it is such a structure, a plate-shaped object will be fixed firmly and the plate-shaped object accommodation laminated packing body of this invention mentioned above may be comprised. It becomes a suitable structure.

  When the value T is larger than 0.5 mm, there is a greater risk that the protrusion is worn due to vibration or the like. In view of the above, the value T is more preferably 0.45 mm or less, more preferably 0.40 mm or less, and still more preferably 0.20 mm or less, most preferably. It is to be 0.10 mm or less.

  In addition to the above, the plate-like object storage tray of the present invention has a surface roughness Ra of the contact portion with the plate-like material for any one of the support protrusion and the vertical movement restricting protrusion within the range of the optically effective standard surface. If the value is 0.15 μm or less, either the support protrusion or the vertical movement restricting protrusion is configured to suppress the movement of the plate-like object and suppress the generation of dust due to vibration or the like. It is possible to use.

  When the Ra value of the surface roughness of the contact portion with the plate-like material exceeds 0.15 μm, dust is likely to be generated as described above, and the dust adheres to the plate-like material and deteriorates the quality of the stored product. It is not preferable because it leads to things. From such a viewpoint, the Ra value of the surface roughness of the contact portion with the plate-like object is 0.12 μm or less, more preferably 0.10 μm or less, and most preferably 0.90 μm or less. .

  In addition to the above, the plate-shaped object storage tray of the present invention is the surface of the contact portion with the plate-shaped object with respect to any one of the support protrusion and the vertical movement restricting protrusion for the support means within the range of the optically effective standard surface. If the Ra value of roughness is 0.15 μm or less, any of the plurality of trays is not a tray with a short service life, and stable quality is maintained, which is preferable. From such a viewpoint, the Ra value of the surface roughness of the contact portion with the plate-like object is more preferable for the supporting means within the range of the optically effective standard surface and for either the supporting protrusion or the vertical movement restricting protrusion. Is 0.12 μm or less, more preferably 0.10 μm or less.

  Further, in addition to the above, the plate-like object storage tray of the present invention is not limited to the above, and as long as at least one depression is provided on the end face of the opposite side of the outer periphery of the tray, When the tray containing the plate-shaped material is easily grasped, and when the tray is disassembled from the laminated state as described above, the tray is easily disassembled from the laminated state without applying a large stress, and when the tray is assembled into the laminated state. Also, it can be assembled easily.

  Here, the fact that at least one or more depressions are provided on the end faces of the opposing sides of the outer periphery of the tray means that at least one or more of the two opposing sides of the four sides of the tray having a substantially rectangular outer peripheral shape are provided. It means that there is a hollow. The number of depressions is arbitrary, but if it is too large, the processing becomes troublesome, but there is also a problem that the tray becomes weak in strength. From such a viewpoint, the depressions on the end faces of the opposite sides of the outer periphery of the tray are preferably 5 or less, and more preferably 3 or less.

  The plate-shaped object storage tray of the present invention can store, for example, 10 to 300 plate-shaped objects in one tray. And the plate-shaped object accommodation laminated package of this invention can laminate | stack this plate-shaped object storage tray of this invention to 5-50 layers. Therefore, the number of plate-shaped objects stored in one plate-shaped object storage laminate can be stored from 50 to 15000 sheets.

  Further, in addition to the above, the plate-shaped object storage tray of the present invention covers and stacks another tray from above the tray storing a plurality of plate-shaped objects, as long as it has a direction identification portion on the outer periphery of the tray. In this case, it is easy to stack without lowering the position of the lower tray and the upper tray, and it does not take time required for the configuration of the plate-shaped material storage stacked package, improving the work efficiency and being economical. .

  Having a direction identification portion on the outer periphery of the tray is a mark that can provide a specific identification portion at one or more locations on the end surface of the tray and align the identification portions with the trays that are vertically connected when stacking a plurality of trays. It is that it has. As the direction identification part, for example, a predetermined shape is engraved, a cut surface (also referred to as C chamfering) is formed by cutting off the corner of the tray, a protrusion serving as a mark is adhered, and the surface roughness is changed only in a predetermined range to obtain a gloss. It is obtained by processing such as surface modification processing such as polishing or blasting so that the surface, matte surface, or matte surface and glossy surface appear alternately, or coloring with a hard-to-peel paint What is necessary is just a direction identification part.

  Further, in addition to the above, the plate-shaped object storage tray of the present invention is plate-shaped as long as 1 to 20 support protrusions, horizontal movement restricting protrusions or vertical movement restricting protrusions are formed per sheet. Since the movement of the plate-like object can be restricted in a state where the contact area with the object is suppressed, the contact charge of the plate-like object can be suppressed, and the adhesion of the plate-like object to the tray can be made less likely to occur.

  The support protrusions, horizontal movement restricting protrusions or vertical movement restricting protrusions are formed in 1 to 20 per plate-like object. The support protrusions arranged in an aligned state on the upper surface of the tray and the horizontal movement restricting protrusions. That one of the protrusions or the vertical movement restricting protrusions is in contact with the flat surface or the outer peripheral surface of the plate-like object is that one plate-like object has 1 to 20 contact points. I mean. When the number of supporting protrusions, horizontal movement restricting protrusions or vertical movement restricting protrusions exceeds 20 per plate, the structure of the tray becomes complicated and the manufacturing cost of the tray increases. It becomes. Further, uneven distribution of the ease of applying a load may be recognized at the contact point between the plate-like object and the tray, which is not preferable because a contact portion that is easily worn out by vibration or the like may be easily generated. In addition, if there are more than 20 contact points, there is a concern about the problem of tray manufacturing costs or uneven load distribution, which is not preferable.

The contact area of the contact portion between the protrusion and the plate-like object is preferably small, but if it is too small, there may be a problem in that the plate-like object is held horizontally in a stable state. If the contact area is small, the structure is weak in strength against the vibration of the plate-shaped article storage stacked package, and dust may be generated by the vibration. On the other hand, if the contact area between the protrusion and the plate-like object is too large, charging due to contact tends to occur, such being undesirable. Contact area between this point of view from the projection and the plate-like material is ^preferably in the range of 0.05 mm 2 to 10 mm ^2, more preferably in a range of from 0.1 mm ² to 5 mm ^2, More preferably, it is in the range of 0.12 mm ² to 1 mm ² .

  (1) As described above, the plate-shaped object storage stacked package of the present invention is a plate-shaped object storage stacked package having a configuration in which a plurality of trays in which plate-shaped objects are aligned and stored horizontally are stacked on the upper surface. The tray is made of an antistatic material, and has at least three or more types of plate-like object movement restricting means independent from each other on the tray upper surface side and the tray lower surface side, and at least one kind of the plate-like object movement restricting means is , Which supports the optically effective standard surface of the stored plate-like object, and the entire stacked tray is integrally covered and packaged. As a result, the position of the plate-like body is surely restricted, and as a result, the amount of dust generated by the vibration can be suppressed to a small amount, and the amount of charge generated by the vibration can also be reduced. In addition, entry of dust from the outside into the package can be prevented.

(2) In the plate-shaped object storage stacked package of the present invention, if at least one of the plate-shaped object movement restricting means supports the optically effective standard surface of the stored plate-shaped object. For example, even if the surface of the light-transmitting surface is less than 30 mm ^2, it is possible to appropriately suppress the movement of the plate-like material in a state where adhesion due to static electricity due to vibration or the like and generation of foreign matters are suppressed. It is.

  (3) Moreover, the plate-shaped object storage stacked package of the present invention has a Ra value of the surface roughness of the contact portion with the plate-shaped object of the plate-shaped object movement restricting means that supports the optically effective standard surface. Since the thickness is 0.15 μm or less, it is possible to suppress tray-derived dust that is likely to be generated in the contact portion due to vibration caused by conveyance or the like.

  (4) Further, the plate-shaped object storage stacked package according to the present invention has a plate-shaped object movement restricting means provided on the upper surface side of the tray for restricting horizontal movement of the plate-shaped object, and a plate-like object. Is a support protrusion that supports from below, and a vertical movement restricting protrusion that restricts the vertical movement of the plate-like object positioned directly below when stacking on the lower surface of the tray, and the covering packaging is made of an organic film material, Charging due to static electricity can be suppressed, and the risk of generating dust from the tray that can be generated by contact between the plate-like object and the tray can be reduced.

  (5) Further, the plate-shaped object storage stacked package of the present invention is a plate even if an external force such as vibration is applied, as long as the support protrusion is disposed on the tray along the end surface of the plate-shaped object. It is easy to maintain a state in which the shape is supported in a horizontal state without tilting.

  (6) Further, in the plate-shaped article storage stacked package of the present invention, if the shortest distance between the upper surface of the plate-shaped article and the lower surface portion located above the plate-like article of the upper layer tray is 0.5 mm or less. For example, dust generated by vibration during conveyance can be suppressed to a minimum, and a plate of stable quality can be taken out and used at the conveyance destination.

  (7) Furthermore, since the plate-shaped article storage stacked package of the present invention is formed by providing at least one depression on the end face of the opposite side of the outer periphery of the lay, the operation of moving the tray for inspection, transport, etc. By inserting the claw of the jig into the recess, the tray can be reliably supported, and the state in which the tray is supported horizontally can be maintained without tilting. Further, the stacking operation and the dismantling operation of the tray can be easily performed, and an unnecessary stress is applied in the middle of each operation, so that the plate glass stored in the storage portion does not jump out of the storage portion.

  (8) Moreover, if the plate-shaped object storage laminated package of the present invention is obtained by laser cutting, the surface contacting the tray of the plate-shaped object is free from irregularities that wear the tray and is flat. It is easy to obtain a plate-like material, and therefore, generation of dust caused by wear of the tray can be suppressed.

  (9) Further, since the plate-shaped article storage stacked package of the present invention is such that the laser cutting process forms the end face of the plate-shaped article, generation of wear powder on the surface of the horizontal movement restricting projection on the upper surface side of the tray To reduce the risk of

  (10) Further, in the plate-shaped article storage stacked package of the present invention, if the plate-shaped article is a plate glass and has a coating film on at least one of the translucent surfaces opposed in the plate thickness direction. Highly designed optical performance can be achieved because the glass sheet with a coating that exhibits the desired optical performance can be packaged in such a way that dirt such as dust does not adhere to it. It is economically superior because the yield rate is high.

  (11) Further, the plate-shaped object storage stacked package according to the present invention has a stable quality solid-state image sensor cover glass attached to the surface dust, if the plate glass is used for a solid-state image sensor storage package, It can be supplied to customers in a quality that avoids problems such as adhesion to the tray surface.

  (12) The plate-shaped object storage tray of the present invention is a plate-shaped object storage tray that has a fitting portion in which a plurality of plate-shaped objects can be aligned and placed in the horizontal direction and can be stacked on each other. The tray upper surface side has a plate-like object storage portion constituted by a horizontal movement restricting projection that restricts the movement of the plate-like object in the horizontal direction and a support protrusion that supports the plate-like object from below. The lower surface of the tray has a vertical movement restricting projection that restricts the vertical movement of the plate-like object positioned immediately below when laminating, so the amount of dust generated when the plate glass rubs against the tray due to vibration or the like is reduced. In addition, contact charging generated at the contact portion between the plate glass and the tray can be suppressed.

  (13) In the plate-shaped object storage tray of the present invention, if any of the support protrusion and the vertical movement restricting protrusion supports the optically effective standard surface of the stored plate-shaped object. For example, even a plate-shaped object having a small-area transmission surface is suitable because it can realize a stable support state when stored in a tray, and is less likely to cause friction due to vibration that causes static electricity generation due to transportation or the like. is there.

  (14) Further, the plate-like object storage tray of the present invention has a fitting convex portion constituting the fitting portion on the tray upper surface side in the vicinity of the outer peripheral edge of the tray, and the height of the fitting projection from the height K of the supporting projection. If the value obtained by subtracting the height S, the height Z of the vertical movement restricting projections, and the thickness B of the plate-like object to be stored is 0.5 mm or less, there is an appropriate interval between the plate glass and the tray. In this state, a plurality of trays can be stacked.

  (15) In the plate-shaped object storage tray of the present invention, the surface roughness Ra of the contact portion with the plate-shaped object with respect to any one of the support protrusion and the vertical movement restricting protrusion within the range of the optically effective standard surface. If the value is 0.15 μm or less, the generation of dust due to the contact portion can be suppressed for a long time, and the useful life of the tray can be extended.

  (16) Further, the plate-like object storage tray of the present invention is provided with at least one recess on the end face of the opposite side of the outer periphery of the tray, so that the tray is placed before or after forming the laminated state. Even when a moving operation is required, it is possible to prevent an unexpected defect from occurring due to an inadvertent tilt of the tray, and it is easy to reliably hold the tray.

  (17) Moreover, if the plate-shaped object storage tray of the present invention has a direction identification part on the outer periphery of the tray, it is easy to stack a plurality of trays, and the plate-shaped object storage stacked package The time required to configure the can be shortened.

  (18) Further, the plate-like object storage tray of the present invention can stabilize the plate-like object if 1 to 20 supporting protrusions, horizontal movement restricting protrusions or vertical movement restricting protrusions are formed per one plate-like object. It is possible to constitute a plate-like object storage unit that can be held in a state.

BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing regarding the plate-shaped object storage laminated package of this invention, (A) is a perspective whole view of a plate-shaped object storage multilayer package, (B) is a part of the plate-shaped object storage multilayer package of this invention. A cross-sectional view is shown. It is explanatory drawing regarding the principal part of the plate-shaped object storage laminated package of this invention, (A) is an expanded sectional view, (B) is the elements on larger scale of the state which accumulated the plate-shaped object storage tray of this invention. . The partial top view of the plate-shaped object storage tray of this invention.

  Hereinafter, the plate-shaped article storage stacked package of the present invention and the plate-shaped object storage tray will be described in detail based on examples.

  FIG. 1 is an overall view (A), a partial cross-sectional view (B), and a perspective view (C) of a plate-like material housed in a plate-like material-laminated laminated package according to the present invention. Show. In FIG. 1, 10 is a sheet glass storage stacked package, 20 is a plate-shaped object storage tray, 21 is a support protrusion (protrusion on the upper surface of the plate-shaped object storage tray), 21 a is a contact portion of the support protrusion, 22 Is a horizontal movement restricting protrusion (protrusion on the upper surface of the plate glass storage tray), 23 is a vertical movement restricting protrusion (protrusion on the lower surface of the plate-shaped object storage tray), 26 is a fitting convex portion provided on the lower surface of the tray, 27 Is a plate-shaped object storage portion, 29 is a projection of a fitting portion protruding above the vicinity of the outer peripheral edge, 30 is a plate glass, 30a is an optically effective standard surface, 30b is an optically ineffective standard surface, and 31 is a glass plate translucent. A surface 40 represents a shrink film.

This plate glass storage laminated package 10 is for storing a cover glass 30 of a CMOS element which is a solid-state image sensor used for a digital camera or the like mounted on a mobile phone. This cover glass 30 is a film in which an infrared reflecting film (also referred to as an IR film) is formed on a light transmitting surface 31 on one side. SiO ₂ 60%, Al ₂ O ₃ 14.6 in terms of mass percentage in terms of oxide. %, B ₂ O ₃ 11.1%, RO (RO = MgO + BaO) 3%, JO (JO = CaO + SrO) 11.3% borosilicate glass material. The shape of the plate glass (cover glass) 30 is a plate glass 30 having a thickness B of 0.5 mm inserted in the opposing light-transmitting surface 31, and the outer dimensions only on one side of the light-transmitting surface 31 are vertical. It is 2.9 × width 3.1 mm. Therefore, the area of the translucent surface 31 on one side is 8.9 mm ² .

  Further, as shown in FIG. 1C, the light transmitting surface 31 of the plate glass 30 to be accommodated transmits a light beam when assembled as a CMOS element. There are an optically effective standard surface 30a having a shape, and an optically ineffective standard surface 30b that surrounds the optically effective standard surface 30a and is mainly used to fix the plate glass 30 with an adhesive when the plate glass 30 is assembled into a CMOS. . The reason why the shape of the optically effective standard surface 30a is rectangular is that the distance from the end side only needs to be limited and management is easy. The plate glass 30 accommodated in the tray 20 is supported from below by the contact portions 21a of the four support protrusions 21 in the lower tray within the range of the optically effective standard surface 30a. Regarding the light-transmitting surface 31 on one side of one sheet glass 30, the area ratio of the optically effective standard surface 30 a is 90% or more and 99.99% or less with respect to the area of the light-transmitting surface 31 on one side of the sheet glass 30. The area is larger than the optically ineffective standard surface 30b.

  The plate-shaped article storage stacked package 10 has a configuration in which ten sheet glass storage-type articles 20 are arranged with cut-surface-shaped direction identification sections 28 that appear to have cut off the corners of the outer periphery of the tray 20. It has a laminated structure. And the plate-shaped object storage tray 20 in which no plate glass 30 is stored is covered on the uppermost tray 20 of the plate-shaped object storage stacked package 10 as a cover material. The plate-shaped material storage stacked package 10 includes nine plate-shaped material storage trays 20 in which the glass sheets 30 are stored and stacked, and the upper side of the tray 20 placed as a lid from above to the tray 20 such as dust. In order to prevent intrusion and fix the laminated state, the organic film 40 is covered, and then heated and fixed, and the periphery is covered.

  A configuration for preventing the adhesion of the plate glass 20 that is generated when the plate-shaped article storage stacked package 10 is opened will be described below. FIG. 2 (A) shows a structural part adopted for the plate-like article storage stacked package 10 to prevent the stored plate glass 30 from adhering to the lower surface of the tray 20 due to static electricity when the tray 20 is lifted when opened. In order to show in detail, what expanded the principal part of the lamination | stacking cross section of the plate-shaped object accommodation lamination | stacking packaging body 10 is shown. In FIG. 2, in addition to the symbols shown in FIG. 1, the distance between the lower surface portion of the upper tray 20 and the upper surface of the light transmitting surface 31 of the plate glass 30 is indicated as T. In this plate glass storage package 10, even if the area of the light transmission surface 31 of the plate glass 30 is smaller than the conventional one, the distance T between the lower surface portion of the upper tray 20 and the light transmission surface 31 of the plate glass 30 is 0. 0.08 mm, which satisfies the requirements of the present invention. Specifically, since the vertical movement restricting projection 23 is provided on the lower surface of the tray 20, the distance T between the downward projection 23 on the lower surface portion of the tray 20 and the light transmitting surface of the plate glass 30 is 0.08 mm. That's what it means.

  The vertical movement restricting projection 23 on the lower surface portion of the tray 20 collides with the lower surface portion of the upper tray 20 in the storage portion due to vibration, shaking, inclination, etc. during the conveyance of the plate glass 30 placed on the storage portion. It is provided so as not to be damaged or to be scratched by repetition. The height Z of the vertical movement restricting projection 23 shown in FIG. 2 (B) is 1.0 mm.

  The plate glass storage tray 20 constituting the plate-shaped material storage stacked package 10 will be described below. The material constituting the tray 20 is a chargeable resin having the characteristics of polycarbonate (PC) and acrylonitrile butadiene styrene resin (ABS), and more specifically, injection molding of Multilon (registered trademark) manufactured by Teijin Chemicals Ltd. It is formed by. As shown in FIG. 1B, the tray 20 has a structure in which two types of protrusions 21 and 22 are aligned on the upper surface thereof. The first protrusion is a support protrusion 21 provided to support the glass sheet 30 from below. Since the support protrusion 21 supports the plate glass 30 by directly contacting the light-transmitting surface 31 of the plate glass 30, if there is a burr or a sharp part at the tip, the light-transmitting surface 31 of the plate glass 30 is damaged. Alternatively, the tip of the support protrusion 21 of the storage tray 20 rubbed against the plate glass 30 may be worn and become dust, and may adhere to the light-transmitting surface 31 of the plate glass 30 and cause a problem. Therefore, the support protrusion 21 has a contact portion 21 in contact with the plate glass at the tip, and this contact portion 21a has a shape polished so as to be round, and its height S is 0.1 mm.

  Further, the surface roughness of the contact portion 21a is adjusted by subjecting the surface of the mold for injection molding to precise polishing by human power in advance and finishing. By performing such strict surface accuracy management, the surface roughness of the contact portion 21a has a smooth structure with sufficiently small roughness. Specifically, when measured with a stylus type surface texture measuring machine (Surfcoder ET4000AK) in accordance with JIS B0601 (2001), the arithmetic average roughness Ra based on the measurement of 10 different points on the contact portion 21a of the support protrusion 21 of the tray. The value is 0.063 μm, which satisfies the requirement of the present invention of 0.15 μm or less. When 10 different trays are measured in the same manner, the Ra value of the arithmetic average roughness of the contact portion 21a of the support protrusion 21 is 0.022 μm to 0.063 μm, and the 10 different trays are in contact with each other. The Ra value of the surface roughness of each part was 0.15 μm, and it was confirmed that the requirements of the present invention were satisfied.

  As shown in FIG. 2 (B), the second protrusion is provided to constitute a part of a frame for determining the storage position of the plate glass 30 in the plate-like object storage tray 20, and this is arranged horizontally. This is referred to as a movement restricting protrusion 22. A region surrounded by the horizontal movement restricting protrusion 22 is a storage portion 27 of the glass sheet storage tray 20. One of the trays 20 has 81 storage portions 27. The horizontal movement restricting protrusion 22 has a height of 1.1 mm. Therefore, the height of the support protrusion 21 in the vertical direction from the bottom surface of the tray 20 is equal to or less than half of the height of the horizontal movement restricting protrusion 22 from the bottom surface of the tray 20 in the vertical direction.

  In the vicinity of the outer periphery of the upper surface of the tray 20, as shown in FIG. 2 (B), a convex portion 29 protruding above the vicinity of the outer peripheral end is provided, and this portion is provided in the vicinity of the outer periphery of the lower surface of the tray 20. The plurality of trays 20 can be stacked by fitting with the meshing portion 26 thus formed. The height K of the convex portion 29 protruding above the peripheral edge vicinity is 1.68 mm.

  Therefore, from the value 1.68 mm of the height K of the convex portion 29 protruding above the vicinity of the outer peripheral end to the value 0.1 mm of the height S of the supporting projection, the value of 1.0 mm of the height Z of the vertical movement regulating projection, And the value T obtained by subtracting the value 0.5 mm of the thickness B of the plate-like object to be stored is 0.08 mm, which indicates that the configuration satisfies the requirements of the present invention.

  Next, a method for manufacturing the plate-shaped object storage stacked package 10 will be described in order.

First, the glass sheet 30 may be formed by various molding methods. For example, the glass sheet is obtained by various methods such as overflow down-draw molding, slit down-draw molding, and cutting out from an ingot-formed base material. be able to. Next, by using a vacuum vapor deposition apparatus on the surface of this plate glass, 40 or more layers of the above-described SiO ₂ and Ta ₂ O ₅ were alternately laminated by CVD (chemical vapor deposition), thereby forming an infrared reflective film. Thin glass can be obtained.

Next, the plate glass is cut into small pieces of plate glass having a predetermined size. There are various methods, but a laser cutting device is used here. First, using a thermal processing laser cutting device, a laser beam moving speed of 180 ± 5 mm / sec as a split spare line on one uncoated surface of the thin glass up to a thickness of 20% in the thickness direction, or A grid-like first process is performed under the conditions of 220 ± 5 mm / sec and laser output of 120 ± 5 W or 160 ± 5 W. Next, the metal line-shaped head is moved in the operation direction M from the surface on which the film is formed on the opposite side of the first processed surface of the plate glass, and at the same time, the light transmitting surface on the first processed surface side of the plate glass is pressed. Thus, stress is applied to the first processed surface of the plate glass, and the sheet is split at a pressing speed of 1 × 10 ⁻³ m / sec. By carrying out the cleaving of the second processing in this way, a strip-shaped plate glass divided along the planned line that is the origin of the fracture formed by the first processing is obtained. The strip-shaped plate glass that has been cut and split in this way is transported to the next process using vacuum tweezers. And the final cover glass 30 for solid-state image sensors is obtained by carrying out the splitting process of the strip-shaped plate glass again. In addition, although what showed the film-forming only on the single side | surface side of the plate glass 30 was shown here, what was film-formed on both sides can be similarly processed by laser cutting, and is for solid-state image sensors of a desired dimension. A cover glass can be obtained.

  The solid-state image sensor cover glass 30 obtained by the above-described steps is placed in order on one plate-like object storage tray 20 as shown in a partial plan view in FIG. After the storage glass 30 for the solid-state image sensor has been stored in all the storage portions 27 of one tray 20 in this way, another tray 20 is placed from above and protrudes above the vicinity of the outer peripheral edge of the lower tray 20. The upper and lower trays 20 are stacked by fitting the fitting convex portion 29 with the fitting convex portion 26 provided in the vicinity of the outer periphery of the lower surface of the upper tray, that is, by fitting. At this time, since the claw of the robot hand can be fixed to the two recesses 25 provided on the end surfaces of the opposite sides of the outer periphery of the tray 20, it is possible to prevent the claw from slipping by this operation and to stack the tray 20 reliably. Is easy. Further, the solid-state image pickup device cover glass 30 is arranged and stored on the second tray 20 in the same manner as described above, and after the storage of all of them, the third tray is mounted in the same manner as above. Put it on. After the trays 20 are stacked one after another as described above, nine trays are stacked, and after the cover glass 30 for the solid-state image sensor is stored on the ninth tray 20, the empty trays 20 from above are stacked. Cover and fix as a lid. Finally, the organic film material 40 laminated with nylon as a core material is covered from above, the pressure is reduced by a vacuum pump, the organic film material 40 is contracted and brought into close contact with the laminated tray 20, and heat sealed in the state as it is. As a result, the plate-shaped article storage stacked package 10 can be obtained.

  The plate-shaped article storage stacked package 10 manufactured by the above-described process is solid on the lower surface of the tray even when the package is opened and the tray is lifted in the manufacturing process of the solid-state imaging device package after the conveyance. The image pickup device cover glass 30 is not recognized to be attached by static electricity, and the manufacturing process of the solid image pickup device package can be smoothly performed. Further, the solid-state image sensor can be transported in a state in which dust generated due to the contact portion between the cover glass 30 for the solid-state image sensor 30 and the tray 20 due to vibrations in the middle of the transport is suppressed. Therefore, it is possible to supply the solid-state image sensor cover glass 30 having a stable quality without deteriorating the dust adhesion quality of the cover glass 30 for use. Incidentally, the two depressions 25 provided on the end surfaces of the opposing sides of the outer periphery of the tray 20 are very useful structures for smoothly performing the dismantling operation of the stacked trays 20. In addition, when the solid-state image sensor cover glass 30 is transported by the plate-shaped object storage stacked package 10, dust generated by vibration during transport can be reduced, and the solid-state image sensor cover with excellent quality can be reduced. It became possible to supply the glass 30 with the quality at the time of manufacture.

  The plate-shaped object storage stacked package and the plate-shaped object storage tray of the present invention are mainly suitable for a solid-state image sensor cover glass, but other than that, such as a filter glass sheet and a laser diode window glass sheet It is also suitable for plate glass products for various uses such as plate glass for transmission windows, plate glass for solar cell substrates, tempered thin plate glass, etc., and can be applied to optical crystals etc. regardless of glass, and various plate shapes It exhibits its excellent performance in the packaging of things.

DESCRIPTION OF SYMBOLS 10 Plate-shaped object storage laminated package 20 Plate-shaped object storage tray 21 Support protrusion (protrusion on the upper surface of a plate-shaped object storage tray)
21a Contact portion 22 of support protrusion with plate glass Horizontal movement restricting protrusion (protrusion on upper surface of plate-shaped object storage tray)
23 Vertical movement restriction protrusion (protrusion on the bottom of the plate-shaped object storage tray)
25 Indentation 26 provided on the end face of the opposite side of the tray 26 Fitting protrusion 27 provided on the lower surface of the tray near the outer peripheral end Storage portion 28 Direction identification part 29 Fitting protruding above the tray near the outer peripheral end Convex 30 Plate glass (plate, cover glass)
30a Optically effective standard surface 30b Optically ineffective standard surface 31 Sheet glass transparent surface 40 Organic film material K Height of fitting convex part on tray upper surface side in the vicinity of tray outer peripheral edge S Height of supporting protrusion Z Vertical movement restriction Height of protrusion B Thickness of plate-like object T Shortest distance between the lower surface of the tray and the upper surface of the light-transmitting surface of the plate glass

Claims (18)

A plate-shaped object storage stacked package having a configuration in which a plurality of trays in which plate-shaped objects are horizontally aligned and stored on the upper surface are stacked,
The tray is made of an antistatic material, and has at least three or more kinds of plate-like object movement regulating means independent from each other on the tray upper surface side and the tray lower surface side,
A plate-shaped object storage stacked package, wherein the stacked trays are integrally covered and packaged.   2. The plate-shaped object storage stack according to claim 1, wherein at least one of the plate-shaped object movement regulating means supports within the range of the optically effective standard surface of the stored plate-shaped object. Packing body.   The Ra value of the surface roughness of the contact portion between the plate-like object and the plate-like object of the plate-like object movement restricting means supporting the optically effective standard surface is 0.15 μm or less. Item 3. A plate-shaped article storage stacked package according to Item 2. The plate-like object movement restricting means is provided on the upper surface side of the tray to restrict the horizontal movement of the plate-like object, the support protrusion for supporting the plate-like object from below, and the lower side of the tray when directly stacked. It is a vertical movement restriction projection that restricts the movement of the plate-like object located in the vertical direction,
4. The plate-shaped article storage stacked package according to any one of claims 1 to 3, wherein the covering packaging is made of an organic film material.   The plate-shaped object storage stacked package according to any one of claims 1 to 4, wherein the support protrusion is disposed on the tray along an end surface of the plate-shaped object.   6. The shortest distance between the upper surface of the plate-like object and the lower surface portion of the upper tray positioned above the plate-like object is 0.5 mm or less. 6. Plate-shaped object storage stacked package.   The plate-shaped article storage stacked package according to any one of claims 1 to 6, wherein at least one or more depressions are provided on end faces of opposing sides of the outer periphery of the tray.   The plate-shaped article storage stacked package according to any one of claims 1 to 7, wherein the plate-shaped article is obtained by laser cutting.   9. The plate-shaped object storage laminated package according to claim 8, wherein the laser cutting process forms an end face of the plate-shaped object.   The plate-like material according to any one of claims 1 to 9, wherein the plate-like material is plate glass, and has a coating film on at least one of the light-transmitting surfaces facing in the plate thickness direction. Goods storage laminate package.   The plate-shaped object storage stacked package according to claim 10, wherein the plate glass is used for a solid-state image sensor storage package. A plate-shaped object storage tray that has a fitting portion that can be arranged and placed in a horizontal direction and that can be stacked on each other,
A plate-shaped object storage unit is formed of an antistatic material, and includes a horizontal movement restricting protrusion that restricts the movement of the plate-like object in the horizontal direction and a support protrusion that supports the plate-like object from below. And a plate-like object storage tray having a vertical movement restricting protrusion for restricting the movement of the plate-like object located directly below when stacked on the lower surface side of the tray.   The plate-shaped object storage according to claim 12, wherein any one of the support protrusion and the vertical movement restricting protrusion supports the optically effective standard surface of the stored plate-shaped object. tray.   A fitting convex portion constituting the fitting portion is provided on the tray upper surface side in the vicinity of the outer peripheral edge of the tray. From the height K of the fitting convex portion, the height S of the support projection, the height Z of the vertical movement regulating projection, and the storage 14. The plate-shaped object storage tray according to claim 12, wherein a value T obtained by subtracting the thickness B of the sheet-shaped material to be performed is 0.5 mm or less.   The Ra value of the surface roughness of the contact portion with the plate-like object is any one of the supporting protrusion and the vertical movement restricting protrusion within the range of the optically effective standard surface is 0.15 μm or less. The plate-shaped object accommodation stacked package according to claim 12 or claim 13.   The plate-shaped object storage tray according to any one of claims 11 to 15, wherein at least one or more depressions are provided on end faces of opposing sides of the outer periphery of the tray.   The plate-shaped object storage tray according to any one of claims 11 to 16, further comprising a direction identification portion on an outer periphery of the tray. The plate-like object storage according to any one of claims 11 to 17, wherein 1 to 20 support protrusions, horizontal movement restricting protrusions or vertical movement restricting protrusions are formed per one plate-like object. tray.