JP2010047024A5 - - Google Patents

Claims (16)

A substrate on which a discharge liquid storage chamber for storing the discharge liquid is formed;
A nozzle plate that is provided on one surface of the substrate so as to cover the discharge liquid storage chamber, and includes a nozzle hole that discharges the discharge liquid as droplets;
A sealing plate provided on the other surface of the substrate so as to cover the discharge liquid storage chamber;
The substrate and the nozzle plate are bonded via a bonding film,
The bonding film is formed by a plasma polymerization method, and includes a Si skeleton including a siloxane (Si—O) bond and a crystallinity of 45% or less, and a leaving group bonded to the Si skeleton. Including
In the bonding film, energy is applied to at least a part of the region, whereby the leaving group existing in the vicinity of the surface of the bonding film is detached from the Si skeleton and is expressed in the region on the surface of the bonding film. A droplet discharge head characterized in that the substrate and the nozzle plate are bonded to each other by the adhesion.   2. The liquid droplet ejection head according to claim 1, wherein a sum of a content ratio of Si atoms and a content ratio of O atoms among atoms obtained by removing H atoms from all atoms constituting the bonding film is 10 to 90 atomic%. .   3. The droplet discharge head according to claim 1, wherein an abundance ratio of Si atoms to O atoms in the bonding film is 3: 7 to 7: 3. The leaving group includes an H atom, a B atom, a C atom, an N atom, an O atom, a P atom, an S atom, and a halogen atom, or an atomic group arranged so that each of these atoms is bonded to the Si skeleton. It claims 1 to those composed of at least one member selected from the group consisting to the liquid droplet ejection head according to any one of the three. The liquid droplet ejection head according to claim 4 , wherein the leaving group is an alkyl group. In the infrared light absorption spectrum of the bonding film containing a methyl group as the leaving group, when the peak intensity attributed to the siloxane bond is 1, the peak intensity attributed to the methyl group is 0.05 to 0.45. The droplet discharge head according to claim 5 . The bonding film, the liquid droplet ejection head according to any one of claims 1 to 6 is configured polyorganosiloxane as a main material. The liquid droplet ejection head according to claim 7 , wherein the polyorganosiloxane is mainly composed of a polymer of octamethyltrisiloxane. In the plasma polymerization method, the power density of the high frequency at the time of generating plasma, the liquid droplet ejection head according to any one of claims 1 to 8 is 0.01~100W / cm ^2. The average thickness of the bonding film, the liquid droplet ejection head according to any one of claims 1 to 9 is 1 to 1,000 nm. The energy is applied by at least one of a method of irradiating the bonding film with energy rays, a method of heating the bonding film, and a method of applying a compressive force to the bonding film. 11. A droplet discharge head according to any one of items 10 to 10 . The substrate and the a sealing plate, the liquid droplet ejection head according to any one of claims 1 to 11 is bonded through a bonding film similar to the above bonding film. The sealing plate is composed of a laminate formed by laminating a plurality of layers,
The droplet discharge head according to any one of claims 1 to 12 , wherein at least one set of adjacent layers among the layers in the stacked body is bonded via a bonding film similar to the bonding film. . The liquid droplet ejection head is further provided on the opposite side of the sealing plate from the substrate, and has vibration means for vibrating the sealing plate,
The sealing plate and said vibration means, the liquid droplet ejection head according to any one of the bonding film claims 1 are bonded through the same bonding film and 13. The droplet discharge head further includes a case head provided on the opposite side of the sealing plate from the substrate,
Wherein the sealing plate and the case head is the liquid droplet ejection head according to any one of the bonding film claims 1 are bonded through the same bonding film and 14. Droplet discharge apparatus comprising: a liquid droplet ejection head according to any one of claims 1 to 15.