JP2010041059A5 - - Google Patents

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Publication number
JP2010041059A5
JP2010041059A5 JP2009211791A JP2009211791A JP2010041059A5 JP 2010041059 A5 JP2010041059 A5 JP 2010041059A5 JP 2009211791 A JP2009211791 A JP 2009211791A JP 2009211791 A JP2009211791 A JP 2009211791A JP 2010041059 A5 JP2010041059 A5 JP 2010041059A5
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JP
Japan
Prior art keywords
block
unit
substrate
coating
developing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009211791A
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English (en)
Japanese (ja)
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JP2010041059A (ja
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Publication date
Application filed filed Critical
Priority to JP2009211791A priority Critical patent/JP2010041059A/ja
Priority claimed from JP2009211791A external-priority patent/JP2010041059A/ja
Publication of JP2010041059A publication Critical patent/JP2010041059A/ja
Publication of JP2010041059A5 publication Critical patent/JP2010041059A5/ja
Pending legal-status Critical Current

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JP2009211791A 2009-09-14 2009-09-14 塗布、現像装置 Pending JP2010041059A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009211791A JP2010041059A (ja) 2009-09-14 2009-09-14 塗布、現像装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009211791A JP2010041059A (ja) 2009-09-14 2009-09-14 塗布、現像装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2005025509A Division JP4459831B2 (ja) 2005-02-01 2005-02-01 塗布、現像装置

Publications (2)

Publication Number Publication Date
JP2010041059A JP2010041059A (ja) 2010-02-18
JP2010041059A5 true JP2010041059A5 (zh) 2010-11-18

Family

ID=42013200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009211791A Pending JP2010041059A (ja) 2009-09-14 2009-09-14 塗布、現像装置

Country Status (1)

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JP (1) JP2010041059A (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5223897B2 (ja) * 2010-09-02 2013-06-26 東京エレクトロン株式会社 塗布、現像装置、塗布、現像方法及び記憶媒体
JP5590201B2 (ja) * 2013-08-13 2014-09-17 東京エレクトロン株式会社 塗布、現像装置、塗布、現像方法及び記憶媒体
JP2013243406A (ja) * 2013-08-13 2013-12-05 Tokyo Electron Ltd 塗布、現像装置、塗布、現像方法及び記憶媒体
JP5644916B2 (ja) * 2013-08-13 2014-12-24 東京エレクトロン株式会社 塗布、現像装置
CN110943018A (zh) * 2018-09-21 2020-03-31 株式会社斯库林集团 衬底处理装置及衬底处理方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2931820B2 (ja) * 1991-11-05 1999-08-09 東京エレクトロン株式会社 板状体の処理装置及び搬送装置
JP4104828B2 (ja) * 2001-02-22 2008-06-18 東京エレクトロン株式会社 処理装置
JP2004015023A (ja) * 2002-06-11 2004-01-15 Dainippon Screen Mfg Co Ltd 基板処理装置およびその方法

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