JP2010025751A - Characteristic measuring method and substrate - Google Patents

Characteristic measuring method and substrate Download PDF

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JP2010025751A
JP2010025751A JP2008187460A JP2008187460A JP2010025751A JP 2010025751 A JP2010025751 A JP 2010025751A JP 2008187460 A JP2008187460 A JP 2008187460A JP 2008187460 A JP2008187460 A JP 2008187460A JP 2010025751 A JP2010025751 A JP 2010025751A
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substrate
measured
elements
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marking area
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Yuta Furukawa
雄太 古川
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a characteristic measuring method useful for analysis of generation of a defect of an element found after shipping, and a substrate used for this method. <P>SOLUTION: This characteristic measuring method is a method of measuring the characteristic (resistance value) of many elements to be measured (thick resistors 20) disposed on the substrate 11. Many elements to be measured are classified into a plurality of groups (first to seventh groups), and elements to be measured belonging to each group are sequentially measured for each group. A measurement result of the elements to be measured belonging to each group is recorded as markings A-G in a predetermined part of a marking area 25 disposed on the substrate 11. When the measurement result shows a failure, the predetermined part is kept to be blank. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、特性測定方法及び基板、特に、基板に設けられた多数の被測定素子の特性を測定する方法及びこの方法に用いられる基板に関する。   The present invention relates to a characteristic measuring method and a substrate, and more particularly to a method for measuring characteristics of a large number of elements to be measured provided on the substrate and a substrate used in the method.

一般に、回路基板上に高密度に形成された厚膜抵抗体などの素子の抵抗値を測定し、良品と不良品とを識別するには、多数の厚膜抵抗体を複数のグループに分け、各グループに属する厚膜抵抗体ごとに特性を測定していた。そして、厚膜抵抗体の抵抗値が全て良であれば、その基板を良品として出荷していた。   In general, to measure the resistance value of elements such as thick film resistors formed on a circuit board at high density, and to distinguish good products from defective products, a large number of thick film resistors are divided into a plurality of groups, Characteristics were measured for each thick film resistor belonging to each group. If the resistance values of the thick film resistors are all good, the board has been shipped as a good product.

しかしながら、出荷後に欠陥が発見された場合、特性測定を含む製造工程にミスがあったのか、出荷後のトラブルで欠陥を生じたのか判別することは困難であった。   However, when a defect is discovered after shipment, it is difficult to determine whether there is a mistake in the manufacturing process including characteristic measurement or whether a defect has occurred due to a trouble after shipment.

特許文献1には、各測定グループごとに別々のプローブカードを用意し、1枚のプローブカードについて多数個取り基板の全てのピースのトリミングを一巡するごとに、次のプローブカードに移行して同様の動作を繰り返すことが記載されている。そして、あるピースで厚膜抵抗体の不良が検出されたときに、そのピースについてはそれ以降のプローブカードで最初に抵抗値を測定する厚膜抵抗体を断線状態にトリミングするとともに、不良が検出されたピースについては不良が検出された測定グループの残りの厚膜抵抗体のトリミングを行わずに次のピースのトリミングに移るようにしている。   In Patent Document 1, a separate probe card is prepared for each measurement group, and every time one round of trimming of all the pieces of a multi-chip substrate for one probe card is performed, the process proceeds to the next probe card. It is described that the operation is repeated. When a defect in a thick film resistor is detected in a piece, the thick film resistor whose resistance value is first measured with a probe card after that piece is trimmed to a disconnected state, and the defect is detected. The trimming of the next piece is performed without trimming the remaining thick film resistors in the measurement group in which the defect is detected.

特許文献1に記載のトリミング方法では確かにトリミング作業の能率が向上する。全てのトリミングが終了すれば、厚膜抵抗体は全て特性が満たされているものと判断することができる。しかし、出荷後に欠陥が発見された場合、抵抗値の測定を含む製造工程にミスがあったのか、出荷後のトラブルで欠陥を生じたのか判別することが困難であることに変わりはない。
特開2001−307911号公報
The trimming method described in Patent Document 1 certainly improves the efficiency of the trimming operation. If all the trimmings are completed, it can be determined that all the thick film resistors satisfy the characteristics. However, when a defect is found after shipment, it is still difficult to determine whether there is a mistake in the manufacturing process including measurement of the resistance value or whether the defect has occurred due to a trouble after shipment.
JP 2001-307911 A

そこで、本発明の目的は、出荷後に発見された素子の欠陥につき、その欠陥発生の解析に有用な特性測定方法及びこの方法に好適に用いることのできる基板を提供することにある。   SUMMARY OF THE INVENTION An object of the present invention is to provide a characteristic measurement method useful for analyzing the occurrence of a defect of an element discovered after shipment, and a substrate that can be suitably used in this method.

前記目的を達成するため、本発明の第1形態である特性測定方法は、
基板に設けられた多数の被測定素子の特性を測定する方法において、
前記多数の被測定素子を複数のグループに分け、各グループに属する被測定素子を一のグループごとに順次測定する工程と、
各グループに属する被測定素子の測定結果を前記基板に設けたマーキングエリアの所定箇所に記録する工程と、
を備えたことを特徴とする。
In order to achieve the above object, a characteristic measuring method according to the first aspect of the present invention comprises:
In a method for measuring the characteristics of a large number of elements to be measured provided on a substrate,
Dividing the plurality of measured elements into a plurality of groups, and sequentially measuring the measured elements belonging to each group for each group; and
Recording the measurement results of the elements to be measured belonging to each group at a predetermined location in the marking area provided on the substrate;
It is provided with.

本発明の第2形態である基板は、
多数の被測定素子を設けた基板であって、
前記多数の被測定素子を複数のグループに分けて、各グループに属する被測定素子を一のグループごとに順次測定した結果を各グループごとに所定箇所に記録するマーキングエリアを備えたこと、
を特徴とする。
The substrate according to the second embodiment of the present invention is
A substrate provided with a large number of elements to be measured,
Dividing the large number of measured elements into a plurality of groups, and having a marking area for recording the measured elements belonging to each group sequentially for each group in a predetermined location for each group;
It is characterized by.

前記特性測定方法及び前記基板においては、各グループに属する被測定素子の測定結果がマーキングエリアの所定箇所に記録される。マーキングエリアの記録が全て良である基板のみを出荷することになる。それゆえ、出荷後に素子の欠陥が発見された場合、測定までの製造工程にミスは生じていなかったことが直ちに判明し、出荷後のトラブルを解明すればよい。   In the characteristic measurement method and the substrate, the measurement results of the elements to be measured belonging to each group are recorded at predetermined locations in the marking area. Only substrates with good marking area records will be shipped. Therefore, when a defect of an element is discovered after shipment, it is immediately determined that no error has occurred in the manufacturing process until measurement, and the trouble after shipment may be solved.

本発明によれば、複数のグループに属する被測定素子の測定結果がマーキングエリアの所定箇所に記録されているため、良否の判別が容易であるとともに、出荷後に発見された素子の欠陥についてはその欠陥発生の解析が容易になる。   According to the present invention, since the measurement results of the elements to be measured belonging to a plurality of groups are recorded at predetermined locations in the marking area, it is easy to determine whether or not the device is good. Analysis of defect occurrence becomes easy.

以下、本発明に係る特性測定方法及び基板の実施例について添付図面を参照して説明する。   Embodiments of a characteristic measuring method and a substrate according to the present invention will be described below with reference to the accompanying drawings.

図1に、本発明の一実施例である基板について説明する。この基板は点線で示すカットライン12で仕切られた子基板11を含む集合基板10として形成されている。図1は集合基板10の裏面側を示しており、各子基板11の図示しない表面側には所定の電子部品が搭載されている。裏面側には、多数の厚膜抵抗体20が所定のパターンで形成され、所定の範囲に収まる抵抗値にトリミングされている。   FIG. 1 illustrates a substrate according to an embodiment of the present invention. This substrate is formed as a collective substrate 10 including child substrates 11 partitioned by a cut line 12 indicated by a dotted line. FIG. 1 shows the rear surface side of the collective substrate 10, and predetermined electronic components are mounted on the front surface side (not shown) of each child substrate 11. On the back side, a large number of thick film resistors 20 are formed in a predetermined pattern and trimmed to a resistance value that falls within a predetermined range.

図2に、一つの子基板11を拡大して示す。子基板11の外形線は図1に示したカットライン12に相当する。子基板11の裏面に形成されている多数の厚膜抵抗体20は、それぞれ、図3に示すように、子基板11上に形成した一対の電極パッド21,21に跨って印刷されている。この厚膜抵抗体20の抵抗値を測定するには、一対のプローブ32,32の先端を厚膜抵抗体20と電極パッド21,21の接合部付近に当接させて行う。   FIG. 2 shows an enlarged view of one daughter board 11. The outline of the sub board 11 corresponds to the cut line 12 shown in FIG. A large number of thick film resistors 20 formed on the back surface of the sub board 11 are respectively printed across a pair of electrode pads 21 and 21 formed on the sub board 11 as shown in FIG. The resistance value of the thick film resistor 20 is measured by bringing the tips of the pair of probes 32 and 32 into contact with the vicinity of the junction between the thick film resistor 20 and the electrode pads 21 and 21.

子基板11上の多数の厚膜抵抗体20の抵抗値を一度に測定することは不可能であり、厚膜抵抗体20を複数のグループに分け、各グループに属する厚膜抵抗体20を一のグループごとに順次測定する。本実施例においては、厚膜抵抗体20を第1〜第7の七つのグループに分けている。図2においては、各厚膜抵抗体20に付した1〜7の数字が第1〜第7グループの分類を示している。   It is impossible to measure the resistance values of a large number of thick film resistors 20 on the sub board 11 at a time. The thick film resistors 20 are divided into a plurality of groups, and the thick film resistors 20 belonging to each group are assigned to one group. Measure sequentially for each group. In this embodiment, the thick film resistors 20 are divided into seven groups of first to seventh. In FIG. 2, the numbers 1 to 7 attached to the thick film resistors 20 indicate the classifications of the first to seventh groups.

抵抗値の測定具30は、図4に示すように、前記第1〜第7グループに属する厚膜抵抗体20の抵抗値を測定するための専用プローブ32,32を枠体31に設けたものである。図4(A)に示す測定具30は第1グループに属する厚膜抵抗体20をまとめて測定するためのものであり、図4(B)に示す測定具30は第2グループに属する厚膜抵抗体20をまとめて測定するためのものである。第3〜第7グループに属する厚膜抵抗体20を測定するための測定具は図示しないが、図4(A),(B)と基本的には同様である。   As shown in FIG. 4, the resistance value measuring tool 30 is provided with dedicated probes 32 and 32 for measuring the resistance values of the thick film resistors 20 belonging to the first to seventh groups in the frame 31. It is. The measuring tool 30 shown in FIG. 4 (A) is for collectively measuring the thick film resistors 20 belonging to the first group, and the measuring tool 30 shown in FIG. 4 (B) is a thick film belonging to the second group. It is for measuring the resistor 20 collectively. Although a measuring tool for measuring the thick film resistor 20 belonging to the third to seventh groups is not shown, it is basically the same as FIGS. 4 (A) and 4 (B).

一方、各子基板11にはマーキングエリア25が設けられており、第1〜第7グループに属する厚膜抵抗体20の測定結果を該マーキングエリア25の所定箇所に記録する。マーキングエリア25はAgを主成分とする導体膜からなり、レーザによって所定箇所にマーキングA〜Gを記録していく。   On the other hand, each child substrate 11 is provided with a marking area 25, and the measurement results of the thick film resistors 20 belonging to the first to seventh groups are recorded in a predetermined location of the marking area 25. The marking area 25 is made of a conductor film containing Ag as a main component, and markings A to G are recorded at predetermined positions by a laser.

マーキングAは第1グループの測定結果が良であれば記録され(図6のステップS1,S2参照)、マーキングBは第2グループの測定結果が良であれば記録され(図6のステップS3,S4参照)、以下同様にマーキングCは第3グループ、マーキングDは第4グループ、マーキングEは第5グループ、マーキングFは第6グループの測定結果が良であれば記録され、マーキングGは第7グループの測定結果が良であれば記録される(図6のステップS13,S14参照)。各グループの測定において抵抗値の不良が一つでもあれば、そのグループ全体を不良としてマーキング箇所を空欄にしておく。   Marking A is recorded if the measurement result of the first group is good (see steps S1 and S2 in FIG. 6), and marking B is recorded if the measurement result of the second group is good (steps S3 and S3 in FIG. 6). In the same manner, the marking C is recorded in the third group, the marking D is in the fourth group, the marking E is recorded in the fifth group, and the marking F is recorded in the sixth group if the measurement results are good. If the measurement result of the group is good, it is recorded (see steps S13 and S14 in FIG. 6). If there is at least one defective resistance value in the measurement of each group, the entire group is regarded as defective and the marking portion is left blank.

なお、第1〜第7グループに属する厚膜抵抗体20をそれぞれ測定した結果をメモリに記憶しておき、全ての測定が終了した後に、まとめてマーキングエリア25に記録を行ってもよい。   Note that the measurement results of the thick film resistors 20 belonging to the first to seventh groups may be stored in a memory, and the recording may be performed collectively in the marking area 25 after all the measurements are completed.

図5(A)はマーキングA〜Gが全て記録されている場合を示し、全ての厚膜抵抗体20の測定結果が良であることを示している。図5(B)はマーキングA〜Fが記録されているが、マーキングGは空欄である場合を示し、第7グループに属する厚膜抵抗体20のいずれかに不良が生じていることを示している。また、図5(C)はマーキングCを除いて記録されている場合を示し、第3グループに属する厚膜抵抗体20のいずれかに不良を生じていることを示している。   FIG. 5A shows a case where all of the markings A to G are recorded, and shows that the measurement results of all the thick film resistors 20 are good. FIG. 5B shows a case where the markings A to F are recorded, but the marking G is blank, indicating that any of the thick film resistors 20 belonging to the seventh group is defective. Yes. FIG. 5C shows a case where recording is performed excluding the marking C, and indicates that any of the thick film resistors 20 belonging to the third group has a defect.

前記マーキングA〜Gは、それが記録されていること及び空欄で残されていることが目視可能であり、出荷時の目視検査で良否を容易に判別することができ、全てのマーキングA〜Gが付されている集合基板10あるいは子基板11のみが出荷される。   The markings A to G can be visually confirmed that they are recorded and left blank, and can be easily judged by visual inspection at the time of shipment. Only the collective board 10 or the sub board 11 marked with is shipped.

本実施例によれば、集合基板10又は子基板11を出荷した後に、厚膜抵抗体20の欠陥が発見された場合、測定までの製造工程にミスは生じていなかったことが直ちに判明する。従って、出荷後のトラブルを解明すればよい。また、特定のグループに欠陥が数多く測定されるのであれば、そのグループに属する厚膜抵抗体20の製造工程に瑕疵があると推測することもできる。   According to the present embodiment, when a defect of the thick film resistor 20 is discovered after the collective substrate 10 or the sub substrate 11 is shipped, it is immediately determined that no error has occurred in the manufacturing process up to the measurement. Therefore, the trouble after shipment should be solved. Further, if a large number of defects are measured in a specific group, it can be estimated that there is a flaw in the manufacturing process of the thick film resistor 20 belonging to the group.

図7は集合基板10の他の例を示し、この集合基板10では、マーキングエリア25が各子基板11ではなく、集合基板10自体に設けられている。従って、全ての子基板11において第1〜第7グループのそれぞれに属する厚膜抵抗体20の測定結果が良であるときに、マーキングエリア25の所定箇所に記録が行われていく。   FIG. 7 shows another example of the collective substrate 10. In the collective substrate 10, the marking area 25 is provided on the collective substrate 10 itself instead of each child substrate 11. Accordingly, when the measurement results of the thick film resistors 20 belonging to each of the first to seventh groups in all the sub-boards 11 are good, recording is performed at a predetermined location in the marking area 25.

(他の実施例)
なお、本発明に係る特性測定方法及び基板は前記実施例に限定するものではなく、その要旨の範囲内で種々に変更することができる。
(Other examples)
The characteristic measurement method and the substrate according to the present invention are not limited to the above-described embodiments, and can be variously modified within the scope of the gist.

特に、マーキングエリア25は導体膜上にレーザで記録する以外に種々の手法を採用することができ、例えば、油性インキなど容易に消えないマーキングであってもよい。また、マーキングは必ずしも目視可能である必要はなく、光学的な手法で検出可能であってもよい。測定結果が不良の場合、当該マーキング箇所を空欄としておくのではなく、×印などを記録してもよい。   In particular, the marking area 25 may employ various methods other than recording on the conductor film with a laser, and may be a marking that does not easily disappear, such as oil-based ink. Further, the marking is not necessarily visible, and may be detectable by an optical technique. If the measurement result is defective, the marking portion may not be left blank, but an x mark or the like may be recorded.

さらに、被測定素子としては、厚膜抵抗体20に限らず、コンデンサであってもよく、この場合には容量値を測定することになる。それ以外の素子及び特性が測定対象となってもよい。   Furthermore, the element to be measured is not limited to the thick film resistor 20, but may be a capacitor. In this case, the capacitance value is measured. Other elements and characteristics may be measured.

本発明の一実施例である集合基板を示す平面図である。It is a top view which shows the aggregate substrate which is one Example of this invention. 前記集合基板から分割された子基板を示す平面図である。It is a top view which shows the sub board | substrate divided | segmented from the said collective board. 子基板に形成された厚膜抵抗体とその特性測定状態を示す断面図である。It is sectional drawing which shows the thick film resistor formed in the child substrate, and its characteristic measurement state. プローブを備えた測定具を示す平面図である。It is a top view which shows the measuring tool provided with the probe. 測定結果が記録されたマーキングエリアを示す平面図である。It is a top view which shows the marking area where the measurement result was recorded. 特性測定の手順を示すフローチャート図である。It is a flowchart figure which shows the procedure of a characteristic measurement. 本発明の他の実施例である集合基板を示す平面図である。It is a top view which shows the aggregate substrate which is the other Example of this invention.

符号の説明Explanation of symbols

10…集合基板
11…子基板
20…厚膜抵抗体
25…マーキングエリア
30…測定具
32…プローブ
A〜G…マーキング
DESCRIPTION OF SYMBOLS 10 ... Assembly board | substrate 11 ... Sub board | substrate 20 ... Thick film resistor 25 ... Marking area 30 ... Measuring tool 32 ... Probe AG ... Marking

Claims (10)

基板に設けられた多数の被測定素子の特性を測定する方法において、
前記多数の被測定素子を複数のグループに分け、各グループに属する被測定素子を一のグループごとに順次測定する工程と、
各グループに属する被測定素子の測定結果を前記基板に設けたマーキングエリアの所定箇所に記録する工程と、
を備えたことを特徴とする特性測定方法。
In a method for measuring the characteristics of a large number of measured elements provided on a substrate,
Dividing the large number of measured elements into a plurality of groups and sequentially measuring the measured elements belonging to each group for each group; and
Recording the measurement results of the elements to be measured belonging to each group at a predetermined location in the marking area provided on the substrate;
A characteristic measuring method comprising:
一のグループに属する被測定素子の特性を測定するとともに、その測定結果を前記マーキングエリアの所定箇所に記録し、次に他のグループに属する被測定素子の特性を測定するとともに、その測定結果を前記マーキングエリアの所定箇所に記録すること、を特徴とする請求項1に記載の特性測定方法。   Measure the characteristics of the elements to be measured belonging to one group, record the measurement results at a predetermined location in the marking area, and then measure the characteristics of the elements to be measured that belong to another group. The characteristic measurement method according to claim 1, wherein recording is performed at a predetermined location in the marking area. 前記基板は、多数の被測定素子を備えた複数の子基板が配列された集合基板であり、前記マーキングエリアは子基板にそれぞれ設けられていること、を特徴とする請求項1又は請求項2に記載の特性測定方法。   3. The substrate according to claim 1, wherein the substrate is a collective substrate in which a plurality of child substrates each having a large number of elements to be measured are arranged, and the marking area is provided on each of the child substrates. The characteristic measuring method described in 1. 前記基板は、多数の被測定素子を備えた複数の子基板が配列された集合基板であり、前記マーキングエリアは集合基板に設けられていること、を特徴とする請求項1又は請求項2に記載の特性測定方法。   3. The substrate according to claim 1, wherein the substrate is a collective substrate in which a plurality of sub-substrates having a large number of elements to be measured are arranged, and the marking area is provided on the collective substrate. The characteristic measurement method described. 前記測定結果を前記マーキングエリアに目視可能に記録することを特徴とする請求項1ないし請求項4のいずれかに記載の特性測定方法。   The characteristic measurement method according to claim 1, wherein the measurement result is recorded in the marking area so as to be visible. 各グループに属する被測定素子の測定結果が良である場合は前記マーキングエリアの所定箇所にその旨を記録し、不良の場合は前記所定箇所を空欄にしておくこと、を特徴とする請求項1ないし請求項5のいずれかに記載の特性測定方法。   2. When the measurement result of the element to be measured belonging to each group is good, the fact is recorded in a predetermined portion of the marking area, and when the measurement result is defective, the predetermined portion is left blank. The method for measuring characteristics according to claim 5. 前記被測定素子は厚膜抵抗体であり、該厚膜抵抗体の抵抗値を測定することを特徴とする請求項1ないし請求項6のいずれかに記載の特性測定方法。   7. The characteristic measuring method according to claim 1, wherein the element to be measured is a thick film resistor, and a resistance value of the thick film resistor is measured. 多数の被測定素子を設けた基板であって、
前記多数の被測定素子を複数のグループに分けて、各グループに属する被測定素子を一のグループごとに順次測定した結果を各グループごとに所定箇所に記録するマーキングエリアを備えたこと、
を特徴とする基板。
A substrate provided with a large number of elements to be measured,
Dividing the large number of measured elements into a plurality of groups, and having a marking area for recording the measured elements belonging to each group sequentially for each group in a predetermined location for each group;
A substrate characterized by.
多数の被測定素子を備えた複数の子基板が配列された集合基板であって、前記マーキングエリアは子基板にそれぞれ設けられていること、を特徴とする請求項8に記載の基板。   9. The substrate according to claim 8, wherein the substrate is a collective substrate in which a plurality of child substrates each having a large number of elements to be measured are arranged, and the marking area is provided on each child substrate. 多数の被測定素子を備えた複数の子基板が配列された集合基板であって、前記マーキングエリアは集合基板に設けられていること、を特徴とする請求項8に記載の基板。   9. The substrate according to claim 8, wherein the substrate is a collective substrate in which a plurality of sub-substrates having a large number of elements to be measured are arranged, and the marking area is provided on the collective substrate.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102129964A (en) * 2010-12-13 2011-07-20 华东光电集成器件研究所 Method for manufacturing resistor end effect curves of thick-film integrated circuit

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Publication number Priority date Publication date Assignee Title
JPH03119783A (en) * 1989-09-30 1991-05-22 Taiyo Yuden Co Ltd Hybrid integrated circuit device, manufacture thereof and discrimination thereof
JP2001307911A (en) * 2000-04-24 2001-11-02 Sumitomo Metal Electronics Devices Inc Method and device for trimming thick film resistor
JP2004031556A (en) * 2002-06-25 2004-01-29 Nec Corp Multiple face imposision printed circuit board sheet

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03119783A (en) * 1989-09-30 1991-05-22 Taiyo Yuden Co Ltd Hybrid integrated circuit device, manufacture thereof and discrimination thereof
JP2001307911A (en) * 2000-04-24 2001-11-02 Sumitomo Metal Electronics Devices Inc Method and device for trimming thick film resistor
JP2004031556A (en) * 2002-06-25 2004-01-29 Nec Corp Multiple face imposision printed circuit board sheet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102129964A (en) * 2010-12-13 2011-07-20 华东光电集成器件研究所 Method for manufacturing resistor end effect curves of thick-film integrated circuit

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