JP2010014701A - Array-type magnetic sensor substrate - Google Patents

Array-type magnetic sensor substrate Download PDF

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JP2010014701A
JP2010014701A JP2009055538A JP2009055538A JP2010014701A JP 2010014701 A JP2010014701 A JP 2010014701A JP 2009055538 A JP2009055538 A JP 2009055538A JP 2009055538 A JP2009055538 A JP 2009055538A JP 2010014701 A JP2010014701 A JP 2010014701A
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magnetic sensor
type magnetic
array type
array
calibration
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Yoshinori Watanabe
慶典 渡邊
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Toshiba Corp
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Toshiba Corp
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Priority to TW99105958A priority patent/TW201100791A/en
Priority to KR20100019657A priority patent/KR101169383B1/en
Priority to CN 201010127494 priority patent/CN101832969A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an array-type magnetic sensor substrate that does not require a large system for calibration of dynamic detection sensitivity and is easily calibrated. <P>SOLUTION: This array-type magnetic sensor substrate 10 includes a printed board 1, an array-type magnetic sensor 2 arranged linearly on one surface of the printed board, a pattern line 4 printed and molded on the plane of the printed board, on one side or both sides of right and left string axes of the array-type magnetic sensor, in parallel with the string axes, and at a predetermined interval, and a pulsed current generating circuit 3 for making a predetermined pulsed current flow to the pattern line. A reference magnetic field during calibration is generated by making the pulsed current flow to the pattern line, and the detection sensitivity of the array type magnetic sensor is calibrated. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、薄鋼板の欠陥によって生じる漏洩磁束から、欠陥の有無を検出するアレイ型磁気探傷装置等に用いられるアレイ型磁気センサ基板に係り、特に、アレイ型磁気センサの校正を容易にするアレイ型磁気センサ基板に関する。   The present invention relates to an array-type magnetic sensor substrate used in an array-type magnetic flaw detector or the like that detects the presence or absence of a defect from a leakage magnetic flux generated by a defect in a thin steel plate, and in particular, an array that facilitates calibration of the array-type magnetic sensor. The present invention relates to a type magnetic sensor substrate.

従来、食缶等の材料となるブリキ板等のストリップ(ここでは薄鋼と言う)の表層,及び内部に存在する微小な欠陥の検出装置として、複数個のアレイ型磁気センサを薄鋼板の幅方向に配列して、その欠陥によって生じる漏洩磁束を検出して欠陥の有無を判定するアレイ型磁気探傷装置がある(例えば、特許文献1参照。)。   Conventionally, as a device for detecting the surface layer of a tin plate (herein referred to as thin steel), which is a material for food cans, and the like, and a minute defect existing inside, a plurality of array-type magnetic sensors are used. There is an array-type magnetic flaw detector that is arranged in the direction and detects the leakage magnetic flux generated by the defect to determine the presence or absence of the defect (for example, see Patent Document 1).

このアレイ型磁気探傷装置の磁気センサヘッド30の構成を図3に示す。図3(a)に示すように、磁気センサヘッド30は、非磁性ロール11面に圧接されて矢印方向に搬送される薄鋼板13の表面と近接する逆U字型の磁化ヨーク24の開口部に、薄鋼板10と所定のギャップ(ここではリフトオフと言う)を設けて、磁化ヨーク24と磁化ヨーク24に巻かれた磁化コイル22とから成る磁化器によって薄鋼板13をその走行方向に磁化するための磁場を成形する。   The configuration of the magnetic sensor head 30 of this array type magnetic flaw detector is shown in FIG. As shown in FIG. 3A, the magnetic sensor head 30 has an opening portion of an inverted U-shaped magnetizing yoke 24 that is in close contact with the surface of the thin steel plate 13 that is pressed against the surface of the nonmagnetic roll 11 and conveyed in the direction of the arrow. Further, a predetermined gap (herein referred to as lift-off) is provided with the thin steel plate 10, and the thin steel plate 13 is magnetized in the traveling direction by a magnetizer including a magnetizing yoke 24 and a magnetizing coil 22 wound around the magnetizing yoke 24. For shaping the magnetic field.

そして、この開口部において、薄鋼板13に予め設定されるリフトオフで近接させ、薄鋼板13の欠陥部で発生する漏洩磁束を検出するホール素子等の半導体磁気センサ12と、この半導体磁気センサ12の感度を改善するための軟質磁性体14とを設け、薄鋼板13からの漏洩磁束が半導体磁気センサ12の感受面を垂直な方向に集中的に横切るようにして、微小な欠陥の有無を高感度で検出している。   And in this opening part, it is made to adjoin to the thin steel plate 13 by the preset lift-off, and the semiconductor magnetic sensor 12 such as a Hall element for detecting the leakage magnetic flux generated in the defective portion of the thin steel plate 13, and the semiconductor magnetic sensor 12 A soft magnetic body 14 for improving sensitivity is provided, and the leakage magnetic flux from the thin steel plate 13 intensively crosses the sensitive surface of the semiconductor magnetic sensor 12 in the vertical direction so that the presence or absence of minute defects is highly sensitive. It is detected by.

この半導体磁気センサ12は、例えば、図3(b)に示すように、薄鋼板13の幅方向に直線状に、予め設定される幅方向の分解能を確保できるように多数の磁気センサ(素子)が直線状に等間隔で並べられている。   For example, as shown in FIG. 3B, the semiconductor magnetic sensor 12 has a large number of magnetic sensors (elements) so as to ensure a predetermined resolution in the width direction linearly in the width direction of the thin steel plate 13. Are arranged in a straight line at equal intervals.

この半導体磁気センサ12は、個々の磁気センサ(素子)の幅方向の検出感度を均一にして、欠陥の検出精度を確保するために定期的な校正が行われる。   The semiconductor magnetic sensor 12 is periodically calibrated in order to make the detection sensitivity in the width direction of each magnetic sensor (element) uniform and to ensure defect detection accuracy.

このようなアレイ型磁気センサを用いた磁気センサヘッド30においては、従来、図4(a)に示すような校正装置20が使用されていた(例えば、特許文献2参照。)。   In the magnetic sensor head 30 using such an array type magnetic sensor, a calibration device 20 as shown in FIG. 4A has been conventionally used (for example, refer to Patent Document 2).

この校正装置20では、半導体磁気センサ12を校正する場合、半導体磁気センサ12の配列方向と、非磁性ロール11aの接線面を対向させて配置し、この非磁性ロール11aの対向する表面に導線11bを巻き付け、この導線に電流発生器15を印加して所定の磁界を発生させる。   In the calibration device 20, when the semiconductor magnetic sensor 12 is calibrated, the arrangement direction of the semiconductor magnetic sensor 12 and the tangential surface of the nonmagnetic roll 11a are arranged to face each other, and the conducting wire 11b is arranged on the surface facing the nonmagnetic roll 11a. And a current generator 15 is applied to the conducting wire to generate a predetermined magnetic field.

そして、この状態で非磁性ロール11aに連結されたモータ11bを駆動して、図4(b)に示すように、非磁性ロール11aを回転し、印加した電流に基づく当該磁界を基準磁界として半導体磁気センサ12の校正を行うようにしている。   Then, in this state, the motor 11b connected to the nonmagnetic roll 11a is driven to rotate the nonmagnetic roll 11a as shown in FIG. 4B, and the semiconductor based on the magnetic field based on the applied current as a reference magnetic field. The magnetic sensor 12 is calibrated.

しかしながら、特許文献2で示された校正では、導線11bを半導体磁気センサ12の列と対面させるため、導線からの磁場は、半導体磁気センサ12の感磁面と平行となる。   However, in the calibration shown in Patent Document 2, since the conducting wire 11 b faces the row of the semiconductor magnetic sensors 12, the magnetic field from the conducting wire is parallel to the magnetic sensitive surface of the semiconductor magnetic sensor 12.

このため、半導体磁気センサ12の感磁面に垂直な磁場を用いて検出感度を校正しようとする場合には、実際に使用する垂直方向の磁場を半導体磁気センサ12に与えることが出来ないという問題、さらに、大型の回転ロールを用意するなど校正装置11が大規模なものとなってしまう問題がある。(以後、半導体磁気センサ12は、ここでは、アレイ型磁気センサと称す。)。   For this reason, when trying to calibrate the detection sensitivity using a magnetic field perpendicular to the magnetic sensitive surface of the semiconductor magnetic sensor 12, the problem is that the magnetic field in the vertical direction that is actually used cannot be applied to the semiconductor magnetic sensor 12. Furthermore, there is a problem that the calibration device 11 becomes large-scale, such as preparing a large rotating roll. (Hereinafter, the semiconductor magnetic sensor 12 is referred to as an array type magnetic sensor herein.)

そのため、複数個のアレイ型磁気センサの列を、一つまたは複数列有するアレイ型磁気センサを校正する場合、導体を、アレイ型磁気センサ列の中心線とアレイ型磁気センサの感磁面の法線とでなす平面上以外の位置に、アレイ型磁気センサ列に対して平行に配置して、当該導体に所定の電流を流して磁界を発生させて、当該磁界を基準磁界として用いたアレイ型磁気センサの校正方法が開示されている(例えば、特許文献3。)。   Therefore, when calibrating an array type magnetic sensor having one or more columns of a plurality of array type magnetic sensors, the conductor is a method of the center line of the array type magnetic sensor column and the magnetic sensitive surface of the array type magnetic sensor. An array type that is arranged in parallel to the array type magnetic sensor array at a position other than the plane formed by the line, generates a magnetic field by flowing a predetermined current through the conductor, and uses the magnetic field as a reference magnetic field A magnetic sensor calibration method is disclosed (for example, Patent Document 3).

しかしながら、特許文献3における校正装置においては、磁気センサの感磁面に対して、垂直磁化を効率的に印加することは出来るものの、薄鋼板の微小な欠陥に対する動的な検出感度、即ち、薄鋼板の走行状態における検出感度の校正ができない問題がある。   However, in the calibration device in Patent Document 3, although the perpendicular magnetization can be efficiently applied to the magnetic sensitive surface of the magnetic sensor, the dynamic detection sensitivity for a minute defect of the thin steel plate, that is, the thin There is a problem that the detection sensitivity cannot be calibrated in the running state of the steel plate.

そのため、個々の磁気センサの微小欠陥に対する動的な(薄鋼板の最大移動速度での)検出感度を校正しようとする場合には、やはり、特許文献2に示すような大型の校正装置が必要となる問題がある。   Therefore, when trying to calibrate the dynamic detection sensitivity (at the maximum moving speed of the thin steel plate) for minute defects of individual magnetic sensors, a large calibration device as shown in Patent Document 2 is still necessary. There is a problem.

そこで、本願の発明者は、図5に示すように、非磁性体板に1周回、直線状に巻き付けられる導体を備える校正用サンプル板32と、当該アレイ型磁気センサ12の感磁面に対し所定のリフトオフで、当該感磁面に対し平行な平面上で校正用サンプル板32の位置を薄鋼板の移動方向に微調整する移動機構を備えるサンプル支持台33と、導体32aにパルス電流を流すパルス電流発生器34とを備え、導体32aにパルス幅Pw、パルス波高値Phのパルス電流を流し、アレイ型磁気センサ12にパルス磁界を印加して、動的な磁気センサの検出感度の校正を行うようにしたアレイ型磁気探傷装置の校正装置40を開示した(例えば、特許文献4参照。)。   Therefore, as shown in FIG. 5, the inventor of the present application applies a calibration sample plate 32 having a conductor wound around a non-magnetic material plate once in a straight line, and a magnetic sensing surface of the array type magnetic sensor 12. With a predetermined lift-off, a pulse current is applied to the sample support 33 having a moving mechanism for finely adjusting the position of the calibration sample plate 32 in the moving direction of the thin steel plate on a plane parallel to the magnetosensitive surface and the conductor 32a. A pulse current generator 34, a pulse current having a pulse width Pw and a pulse peak value Ph is passed through the conductor 32a, a pulse magnetic field is applied to the array type magnetic sensor 12, and the detection sensitivity of the dynamic magnetic sensor is calibrated. An array-type magnetic flaw detection apparatus calibration apparatus 40 is disclosed (see, for example, Patent Document 4).

特許第3811039号公報(図1、第1頁)Japanese Patent No. 3811039 (FIG. 1, page 1) 特開平9−229905号公報(図1、第1頁)Japanese Patent Laid-Open No. 9-229905 (FIG. 1, page 1) 特開2005−61940号公報(図1、第1頁)Japanese Patent Laying-Open No. 2005-61940 (FIG. 1, page 1) 特開2009−14678号公報(図1、第1頁)Japanese Patent Laying-Open No. 2009-14678 (FIG. 1, page 1)

特許文献4における校正装置においては、アレイ型磁気センサ12の感磁面にパルス電流を印加することで、薄鋼板の動的な検出感度の校正が可能となった。   In the calibration device in Patent Document 4, the dynamic detection sensitivity of a thin steel plate can be calibrated by applying a pulse current to the magnetic sensitive surface of the array type magnetic sensor 12.

しかしながら、非磁性体板に1周回、直線状に巻き付けられる導体を備える校正用サンプル板や、当該アレイ型磁気センサの感磁面に対し所定のリフトオフで、当該感磁面に対し平行な平面上で前記校正用サンプル板の位置を薄鋼板の移動方向に微調整する移動機構を備えるサンプル支持台が必要で、装置の大型化が避けられない問題があった。   However, on a flat plate parallel to the magnetic sensitive surface with a predetermined lift-off relative to the magnetic sensitive surface of the array type magnetic sensor, or a calibration sample plate having a conductor wound around the non-magnetic material plate once in a straight line. Therefore, there is a problem that a sample support base having a moving mechanism for finely adjusting the position of the calibration sample plate in the moving direction of the thin steel plate is necessary, and the size of the apparatus cannot be avoided.

本発明は、上記問題点を解決するためになされたもので、アレイ型磁気センサをプリント基板上に、一つ、または複数有するアレイ型磁気センサ基板であって、動的な検出感度の校正のために大型装置を不要とし、校正が容易に行えるアレイ型磁気センサ基板を提供することを目的とする。   The present invention has been made to solve the above problems, and is an array type magnetic sensor substrate having one or a plurality of array type magnetic sensors on a printed circuit board. Therefore, it is an object of the present invention to provide an array type magnetic sensor substrate that does not require a large apparatus and can be easily calibrated.

上記目的を達成するために、本発明によるアレイ型磁気センサ基板は、複数個の磁気センサを一列に配置してなるアレイ型磁気センサをプリント基板上に、一つ、または複数有するアレイ型磁気センサ基板であって、前記アレイ型磁気センサ基板は、前記プリント基板と、前記プリント基板の一方の面に直線状に配列されるアレイ型磁気センサと、前記アレイ型磁気センサの列軸の左右のいずれか片側、または、両側において、当該列軸と平行に所定の間隔で、前記プリント基板の固定される導体と、前記導体に所定のパルス電流を流すパルス電流発生回路とを備え、前記導体に前記パルス電流を流して校正時の基準磁界を生成し、当該アレイ型磁気センサの検出感度校正を行なう様にしたことを特徴とする。   In order to achieve the above object, an array type magnetic sensor substrate according to the present invention includes an array type magnetic sensor having a plurality of magnetic sensors arranged in a line on a printed circuit board. The array-type magnetic sensor substrate includes: the printed circuit board; an array-type magnetic sensor arranged linearly on one surface of the printed circuit board; On one side or both sides, a conductor fixed to the printed circuit board at a predetermined interval in parallel with the column axis, and a pulse current generating circuit for supplying a predetermined pulse current to the conductor, the conductor including the A reference magnetic field at the time of calibration is generated by flowing a pulse current, and detection sensitivity calibration of the array type magnetic sensor is performed.

本発明によれば、アレイ型磁気センサをプリント基板上に、一つ、または複数有するアレイ型磁気センサ基板であって、動的な検出感度の校正のために大型装置を不要とし、校正が容易に行えるアレイ型磁気センサ基板を提供することが出来る。   According to the present invention, an array type magnetic sensor substrate having one or a plurality of array type magnetic sensors on a printed circuit board, which eliminates the need for a large-sized device for dynamic detection sensitivity calibration and facilitates calibration. It is possible to provide an array type magnetic sensor substrate that can be used in a simple manner.

本発明のアレイ型磁気センサ基板。The array type magnetic sensor substrate of the present invention. 本発明のパルス電流の設定原理を説明する図。The figure explaining the setting principle of the pulse current of this invention. 従来の磁気センサヘッドを説明する図。The figure explaining the conventional magnetic sensor head. 従来の校正装置を説明する図。The figure explaining the conventional calibration apparatus. 従来のアレイ型磁気探傷装置の校正装置を説明する図。The figure explaining the calibration device of the conventional array type magnetic flaw detector.

以下、本発明の実施例について図面を参照して説明する。   Embodiments of the present invention will be described below with reference to the drawings.

図1は、アレイ型磁気センサ基板10の構成を示す。図1(a)はその平面図で、図1(b)は、y−y’矢印に示す方向からみた断面図である。   FIG. 1 shows a configuration of an array type magnetic sensor substrate 10. FIG. 1A is a plan view, and FIG. 1B is a cross-sectional view as seen from the direction indicated by the arrow y-y ′.

アレイ型磁気センサ基板10は、プリント基板1と、プリント基板1の一方の面に直線状に配列された複数の磁気センサからなるアレイ型磁気センサ2と、アレイ型磁気センサ2の列軸の左右のいずれか片側、または、両側において、当該列軸と平行に所定の間隔で、プリント基板1の平面上に印刷・成形されたパターン線4と、パターン線4に所定のパルス電流を流すパルス電流発生回路3とを備える。   The array type magnetic sensor substrate 10 includes a printed circuit board 1, an array type magnetic sensor 2 including a plurality of magnetic sensors arranged linearly on one surface of the printed circuit board 1, and the left and right sides of the column axis of the array type magnetic sensor 2. The pattern line 4 printed and formed on the plane of the printed circuit board 1 at a predetermined interval in parallel with the column axis on either one side or both sides of the pattern line 4 and a pulse current for applying a predetermined pulse current to the pattern line 4 And a generation circuit 3.

このパルス電流の設定について、図2を参照して説明する。有限長のパターン線4に電流Iを流した時、パターン線4から垂直距離R離れたP点に生成される磁束密度Bは、図2(a)に示すような幾何学的位置関係の場合、ビオサバールの法則から下記式で求められる。   The setting of the pulse current will be described with reference to FIG. When the current I is applied to the finite-length pattern line 4, the magnetic flux density B generated at the point P that is separated from the pattern line 4 by the vertical distance R is in the case of a geometrical positional relationship as shown in FIG. From the Biosavall's law, the following formula is obtained.

B=μ・I・(cosθ+cosθ)/(4π・R)
したがって、基準磁界の磁束密度Bを与える導体電流は、
I=B・4πI・R/[μ・(cosθ+cosθ)]
で求められる。
B = μ 0 · I · (cos θ 1 + cos θ 2 ) / (4π · R)
Therefore, the conductor current giving the magnetic flux density B of the reference magnetic field is
I = B · 4πI · R / [μ 0 · (cos θ 1 + cos θ 2 )]
Is required.

ここで、μは真空の透磁率、θは、パターン線4に対してP点とパターン線4の左端とを結ぶ直線が成す角度、θは、パターン線4に対してP点とパターン線4の右端とを結ぶ直線が成す角度である。 Here, μ 0 is the magnetic permeability of vacuum, θ 1 is an angle formed by a straight line connecting the point P and the left end of the pattern line 4 with respect to the pattern line 4, and θ 2 is a point P with respect to the pattern line 4. This is an angle formed by a straight line connecting the right end of the pattern line 4.

実際には、パターン線4は有限の長さなので、アレイ型磁気センサの両端部において中央部と同様の磁界を供給するには、図2(b)に示すように、過大な電流が必要となる。したがって、パターン線4は、許容される磁界強度のバラツキ内となるように、アレイ型磁気センサ2より充分長くしておく。   Actually, since the pattern line 4 has a finite length, as shown in FIG. 2B, an excessive current is required to supply a magnetic field similar to that at the central portion at both ends of the array type magnetic sensor. Become. Therefore, the pattern line 4 is made sufficiently longer than the array type magnetic sensor 2 so as to be within the variation of the allowable magnetic field intensity.

例えば、薄鋼板における微小欠陥の探傷に用いる場合には、アレイ型磁気センサ2を市販のホール素子で構成し、このホール素子の感磁面とパターン線4との平面距離Rを2mmとし、この時、与える校正時の磁束密度Bが1mTとする場合の印加する電流は10A程度となる。   For example, when used for flaw detection of minute defects in a thin steel plate, the array type magnetic sensor 2 is composed of a commercially available Hall element, and the plane distance R between the magnetic sensitive surface of the Hall element and the pattern line 4 is 2 mm. When the magnetic flux density B at the time of calibration is 1 mT, the applied current is about 10A.

図1に示すような、アレイ型磁気センサ2の列軸の両側に2本の導体を設け、互いに逆方向に電流を流して印加する磁界を加算すると、電流は導体一本あたり5A程度になる。この電流値は、校正する磁界の印加時間が数ms程度のパルス電流でよいので、パターン線4には特別の放熱対策を講じなくても、プリント基板上のパターン線のみで供給することが可能である。   When two conductors are provided on both sides of the column axis of the array type magnetic sensor 2 as shown in FIG. 1 and currents applied in opposite directions are added to each other, the current becomes about 5 A per conductor. . This current value can be a pulse current with a magnetic field to be calibrated of about several milliseconds, so that the pattern line 4 can be supplied only by the pattern line on the printed circuit board without taking any special heat dissipation measures. It is.

また、アレイ型磁気センサ2と印加する磁界を生成する導体4とを、プリント基板1上で正確に位置が予め固定できるので、従来のように、アレイ型磁気センサ2に一様な校正磁界を印加するため、磁界の発生装置とアレイ型磁気センサ2の感磁面との位置の微調整機構や、動的な磁界を生成するための大型回転機構などを備える校正装置が不要となる。   In addition, since the position of the array type magnetic sensor 2 and the conductor 4 that generates the magnetic field to be applied can be accurately fixed in advance on the printed circuit board 1, a uniform calibration magnetic field can be applied to the array type magnetic sensor 2 as in the past. Therefore, a calibration device including a fine adjustment mechanism for the position of the magnetic field generation device and the magnetic sensitive surface of the array type magnetic sensor 2 or a large rotation mechanism for generating a dynamic magnetic field is not necessary.

大電流が必要となる場合は、パターン線に替えてアレイ型磁気センサ2と位置が正確に固定される銅等の金属で成形されるバスバー等の導体をプリント基板上に固定するようにしても良い。   When a large current is required, a conductor such as a bus bar formed of a metal such as copper whose position is accurately fixed to the array type magnetic sensor 2 instead of the pattern line may be fixed on the printed circuit board. good.

また、校正装置が小型化されるだけでなく、アレイ型磁気センサ2の夫々に同時に動的な磁界を印加することが可能となるので、精度の良い校正が、短時間で可能となる。   In addition to downsizing the calibration device, it is possible to apply a dynamic magnetic field to each of the array type magnetic sensors 2 at the same time, so that accurate calibration can be performed in a short time.

尚、本発明は上述したような実施例に何ら限定されるものでなく、アレイ型磁気センサを複数列設けても良く、パルス電流を流すパターン線4は、要求される校正磁界の条件により最適な断面形状のものを、また、要求される校正磁界の波形は、パルス電流波形を任意に生成すれば良く、対象となる検出磁界に要求される条件によって本発明の趣旨を逸脱しない範囲で適宜変えることが可能である。   The present invention is not limited to the embodiment described above, and a plurality of array type magnetic sensors may be provided, and the pattern line 4 through which the pulse current flows is optimal depending on the required calibration magnetic field conditions. The cross-sectional shape and the waveform of the required calibration magnetic field may be arbitrarily generated as a pulse current waveform, and as appropriate within the scope of the present invention depending on the conditions required for the target detection magnetic field. It is possible to change.

1 プリント基板
2 アレイ型磁気センサ
3 パルス電流発生回路
4 パターン線
10 アレイ型磁気センサ基板
11、11a 非磁性ロール
11b 導線
11c モータ
15 電流発生器
20 校正装置
12 (半導体磁気センサ)アレイ型磁気センサ
13 ストリップ
14 軟磁性体
15 薄鋼板
22 磁化コイル
24 磁化ヨーク
30 磁気センサヘッド
32 校正サンプル板
32a 導体
33 サンプル支持台
33a 移動機構
34 パルス電流発生器
40 校正装置
DESCRIPTION OF SYMBOLS 1 Printed circuit board 2 Array type magnetic sensor 3 Pulse current generation circuit 4 Pattern line 10 Array type magnetic sensor board | substrate 11, 11a Nonmagnetic roll 11b Conductor 11c Motor 15 Current generator 20 Calibration apparatus 12 (Semiconductor magnetic sensor) Array type magnetic sensor 13 Strip 14 Soft magnetic material 15 Thin steel plate 22 Magnetizing coil 24 Magnetizing yoke 30 Magnetic sensor head 32 Calibration sample plate 32a Conductor 33 Sample support 33a Moving mechanism 34 Pulse current generator 40 Calibration device

Claims (3)

複数個の磁気センサを一列に配置してなるアレイ型磁気センサをプリント基板上に、一つ、または複数有するアレイ型磁気センサ基板であって、
前記アレイ型磁気センサ基板は、前記プリント基板と、
前記プリント基板の一方の面に直線状に配列されるアレイ型磁気センサと、
前記アレイ型磁気センサの列軸の左右のいずれか片側、または、両側において、当該列軸と平行に所定の間隔で、前記プリント基板の固定される導体と、
前記導体に所定のパルス電流を流すパルス電流発生回路と
を備え、
前記導体に前記パルス電流を流して校正時の基準磁界を生成し、当該アレイ型磁気センサの検出感度校正を行なう様にしたことを特徴とするアレイ型磁気センサ基板。
An array type magnetic sensor substrate having one or a plurality of array type magnetic sensors formed by arranging a plurality of magnetic sensors in a line on a printed circuit board,
The array type magnetic sensor substrate includes the printed circuit board,
An array type magnetic sensor arranged linearly on one surface of the printed circuit board;
A conductor fixed to the printed circuit board at a predetermined interval in parallel with the column axis on either one of the left and right sides of the column axis of the array type magnetic sensor, or both sides,
A pulse current generation circuit for supplying a predetermined pulse current to the conductor;
An array type magnetic sensor substrate, wherein the pulse current is passed through the conductor to generate a reference magnetic field at the time of calibration, and the detection sensitivity of the array type magnetic sensor is calibrated.
前記導体は、前記アレイ型磁気センサの列軸の左右のいずれか片側、または、両側において、当該列軸と平行に所定の間隔で、前記プリント基板の平面上に印刷・成形されたパターン線とし、
前記パターン線に前記パルス電流を流して校正時の基準磁界を生成し、当該アレイ型磁気センサの検出感度校正を行なう様にした請求項1に記載のアレイ型磁気センサ基板。
The conductor is a pattern line printed and formed on the plane of the printed circuit board at a predetermined interval in parallel with the column axis on either one or both sides of the column axis of the array type magnetic sensor. ,
2. The array type magnetic sensor substrate according to claim 1, wherein the pulse current is passed through the pattern line to generate a reference magnetic field at the time of calibration, and detection sensitivity calibration of the array type magnetic sensor is performed.
前記導体は、前記アレイ型磁気センサの列軸中心から等距離の左右位置に配置し、且つ、互いに逆方向のパルス電流を流すようにした請求項1に記載のアレイ型磁気センサ基板。 The array type magnetic sensor substrate according to claim 1, wherein the conductors are arranged at left and right positions equidistant from the column axis center of the array type magnetic sensor, and pulse currents in opposite directions flow.
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