JP2010014548A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2010014548A5 JP2010014548A5 JP2008174819A JP2008174819A JP2010014548A5 JP 2010014548 A5 JP2010014548 A5 JP 2010014548A5 JP 2008174819 A JP2008174819 A JP 2008174819A JP 2008174819 A JP2008174819 A JP 2008174819A JP 2010014548 A5 JP2010014548 A5 JP 2010014548A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008174819A JP5317556B2 (ja) | 2008-07-03 | 2008-07-03 | 電子線回折像の解析方法及び透過型電子顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008174819A JP5317556B2 (ja) | 2008-07-03 | 2008-07-03 | 電子線回折像の解析方法及び透過型電子顕微鏡 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010014548A JP2010014548A (ja) | 2010-01-21 |
| JP2010014548A5 true JP2010014548A5 (ja) | 2011-05-06 |
| JP5317556B2 JP5317556B2 (ja) | 2013-10-16 |
Family
ID=41700791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008174819A Expired - Fee Related JP5317556B2 (ja) | 2008-07-03 | 2008-07-03 | 電子線回折像の解析方法及び透過型電子顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5317556B2 (ja) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6454414B2 (ja) * | 2015-04-27 | 2019-01-16 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置及び当該装置を用いた試料の観察方法 |
| CN107479330B (zh) | 2016-06-08 | 2019-02-05 | 清华大学 | 一种采用电子束的光刻方法 |
| CN107481913B (zh) | 2016-06-08 | 2019-04-02 | 清华大学 | 一种电子束加工系统 |
| CN107473179B (zh) * | 2016-06-08 | 2019-04-23 | 清华大学 | 一种表征二维纳米材料的方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59163550A (ja) * | 1983-03-09 | 1984-09-14 | Central Res Inst Of Electric Power Ind | 電子線回折像の自動判別方法 |
| JP2885562B2 (ja) * | 1992-03-02 | 1999-04-26 | 日本電子株式会社 | 電子回折画像のピーク抽出方法 |
| JPH06249799A (ja) * | 1993-02-25 | 1994-09-09 | Natl Res Inst For Metals | 電子線回折強度迅速精密計測装置 |
| JPH0815186A (ja) * | 1994-06-29 | 1996-01-19 | Nippon Steel Corp | 加工された結晶質材料の局所内部歪の定量方法 |
| JP3888980B2 (ja) * | 2003-03-18 | 2007-03-07 | 株式会社日立ハイテクノロジーズ | 物質同定システム |
-
2008
- 2008-07-03 JP JP2008174819A patent/JP5317556B2/ja not_active Expired - Fee Related