JP2010013176A - Storage case for treatment tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a storage case for a treatment tool capable of preventing a ring frame from flopping and vibrating to inhibit the generation of a foreign matter and avoiding potential substrate damage. <P>SOLUTION: The storage case for the treatment tool includes a storage case for storing a ring frame of the treatment tool on which a semiconductor wafer is mounted and a pair of lids 20 for opening and closing open front and rear faces of the storage case. Each lid 20 includes a cover 21 with an approximate disk-shaped cross section detachably fitted over the front and rear faces of the storage case, a plurality of pinching ribs arranged at the center of an opposite face facing the front and rear faces of the storage case of the body 21 for pinching peripheral edges of the stored ring frame, and a pair of swelling walls 25 integrally formed with both sides of the opposite face of the cover 21, respectively, and coming into contact with both sides of the peripheral edges of the ring frame. Both sides of the plurality of pinching ribs are formed to extend arcuately in the direction of the swelling wall 25 to function as a side 26 of each swelling wall 25, and both sides of the plurality of pinching ribs are made to go along a clearance between the two sides from the peripheral edge of the ring frame 2. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a storage case for a processing jig for opening and closing a storage case for storing a ring frame of a processing jig on which various substrates made of a semiconductor wafer or the like are mounted.

A semiconductor wafer is mounted on a processing jig called a dicing tape frame at the time of manufacturing a semiconductor package. The processing jig is generally stored in a storage case and transported or transported between factories. Although not shown, the storage case for the processing jig opens and closes the storage case for horizontally aligning and storing the ring frame of the processing jig on which the semiconductor wafer is mounted, and the front and rear surfaces of the storage case that are opened and detached. And a flat lid (see Patent Documents 1, 2, and 3).
JP 2007-207404 A JP 2007-294303 A JP 2008-016022 A

  The conventional storage case for processing jigs is configured as described above, and the front and rear surfaces of the storage case that are opened and closed simply by a lid lacking rigidity. There is a problem that it is attached or vibrated and rubs against the storage case to generate a foreign substance as a contamination source or damage the semiconductor wafer.

  The present invention has been made in view of the above, and an object of the present invention is to provide a storage case for a processing jig that can prevent fluttering and vibration of a ring frame, suppress the generation of foreign matter, and eliminate the possibility of substrate damage. It is said.

In the present invention, in order to solve the above-mentioned problem, a storage case for storing a ring frame of a processing jig for mounting a substrate, and a lid for opening and closing the opening surface of the storage case,
The lid body is formed in an array at the center portion of the cover body having a substantially dish-shaped cross section that is detachably fitted to the opening surface of the storage case and the opening surface of the storage case of the cover body. A ring frame that is integrally formed on a plurality of sandwiching protrusions sandwiching the peripheral edge of the ring frame housed in the housing and on both sides of the facing surface of the cover body that faces the opening surface of the housing case, and housed in the housing case A pair of bulging walls that contact both sides of the peripheral edge of the
Both side portions of the plurality of sandwiching protrusions are formed in a substantially arc shape in the direction of the adjacent bulging wall to form side portions of the respective bulging walls, and both side portions of the plurality of sandwiching projections are stored in the storage case. The ring frame is characterized in that it extends along the both sides from the peripheral edge of the ring frame.

  In addition, a pair of support pieces for supporting the ring frame is provided on both side walls of the storage case, and a plurality of the pair of support pieces are arranged at a predetermined pitch in the vertical direction of the side wall to support the support pieces adjacent in the vertical direction. An insertion groove for the ring frame is defined between the two pieces, and a stopper facing the rear of the peripheral side of the ring frame is formed on the rear surface of the lower surface of the support piece. It is possible to form an inclined surface that regulates rattling.

Further, the lid body preferably includes a plurality of drop-off preventing protrusions that are formed to protrude from the inner surface of the peripheral wall of the cover body and come into contact with the outer periphery of the opening surface of the storage case.
The lid can be vacuum formed using a molding material containing polyethylene terephthalate or polystyrene.

  Here, the substrates in the claims include semiconductor wafers of φ200 mm, 300 mm, and 450 mm, liquid crystal substrates, glass plates, mask glasses, and the like. The processing jig may or may not be a jig with a substrate mounted on a ring frame. The storage case and the lid are preferably transparent so that the stored processing jig can be visually recognized. However, the storage case and the lid are not limited thereto and may be opaque or translucent.

  According to the present invention, the both side portions of the plurality of sandwiching protrusions extend and are three-dimensionally integrated with the side portions of the bulging wall to reinforce the lid body and increase its strength. The jig ring frame does not flutter or vibrate and rub against the storage case.

According to the present invention, it is possible to prevent the ring frame from flapping and vibrating, to suppress the generation of foreign matters, and to eliminate the possibility of substrate damage.
In addition, if the lid includes a plurality of drop-off prevention protrusions that protrude from the inner surface of the peripheral wall of the cover body and come into contact with the outer periphery of the opening surface of the storage case, it is difficult for the cover body to come out of the storage case, and the cover body is stored. It can be effectively prevented from falling off the case.

  Moreover, if the lid is vacuum molded using a molding material containing polyethylene terephthalate or polystyrene, excellent dimensional stability, weather resistance, and the like can be obtained. In addition, partial design changes can be simplified, and even small lots can be easily handled.Furthermore, countermeasures against static electricity and weight reduction are easy, and the lid can be manufactured at a lower cost than injection molding. Is possible.

  Hereinafter, a preferred embodiment of a storage case for a processing jig according to the present invention will be described with reference to the drawings. The storage case for a processing jig in the present embodiment is a semiconductor as shown in FIGS. A transparent storage case 10 that stores the ring frame 2 of the processing jig 1 on which the wafer W is mounted, and a pair of lids 20 that open and close the front and rear surfaces of the storage case 10 are provided. The cover body 21, a plurality of sandwiching ribs 24, and a pair of bulging walls 25, and both sides of the plurality of sandwiching ribs 24 are formed in an arc shape to form side portions 26 of the respective bulging walls 25; The both side portions of the plurality of holding ribs 24 are brought into surface contact along the both sides from the peripheral edge portion of the ring frame 2 accommodated.

  As shown in FIG. 2, the semiconductor wafer W is made of, for example, a thin and sliced φ200 mm silicon wafer, and a notch having a substantially planar half for alignment is selectively cut out at the peripheral edge.

  As shown in FIGS. 1 and 2, the processing jig 1 includes a hollow ring frame 2 made of, for example, SUS or resin that can accommodate a semiconductor wafer W. The adhesive layer 3 is attached in a detachable manner, and the semiconductor wafer W accommodated in the adhesive layer 3 is detachably attached. The ring frame 2 has cutouts 4 formed in a substantially triangular shape on both sides of the front end of the periphery thereof, and an RFID tag 5 for identifying a moving body is adhered to the center of the rear surface.

  As shown in FIGS. 1, 3, and 4, the storage case 10 has a bottom plate 11 larger than the ring frame 2, and the same shape opposite to each other from above with a storage space for the plurality of ring frames 2 on the bottom plate 11. A top plate 13 and a pair of left and right side walls 14 that vertically connect both side portions of the bottom plate 11 and the top plate 13 are provided, and the front and rear surfaces are each formed in a box shape that is open in a horizontally long rectangle. The ring frame 2 of the processing jig 1 on which the semiconductor wafer W is mounted, or the ring frame 2 on which the semiconductor wafer W is not mounted functions so as to be aligned and housed horizontally (for example, 13 or 25) via a robot (not shown).

  The bottom plate 11, the top plate 13, and the pair of side walls 14 are injection-molded using a molding material containing a resin such as polycarbonate, for example, and assembled using a fastener such as a screw. A rectangular cutout 12 that contributes to the insertion and removal of the lower ring frame 2 is cut out at the front end of the inner surface of the bottom plate 11, and a gripping operation is provided between the upper front and upper rear of the pair of side walls 14. The handles 15 are pivotally supported so that they can be raised and lowered.

  A pair of support pieces 16 that support both sides of the ring frame 2 substantially horizontally are provided on the inner surfaces of the pair of side walls 14, and a plurality of the pair of support pieces 16 are arranged at a predetermined pitch in the vertical direction of the side walls 14. The support pieces 16 are formed in an elongated plate extending in the front-rear direction of the storage case 10. Insertion grooves 17 for the ring frame 2 are defined between the support pieces 16 adjacent to each other in the vertical direction of each side wall 14, and each insertion groove 17 extends in the front-rear direction of the storage case 10, and The groove has a height (width) equal to or greater than the thickness of the ring frame 2.

  As shown in FIG. 4, a stopper 18 that interferes with and opposes the rear side of the peripheral side of the ring frame 2 is integrally formed on the rear surface of the lower surface of the support piece 16. An inclined surface 19 that gradually narrows toward 16 is formed smoothly, and this inclined surface 19 faces the rear surface of the ring frame 2 with a gap.

  Each lid 20 is vacuum-formed transparently using a molding material containing polyethylene terephthalate or polystyrene from the standpoint of measures against static electricity and cost reduction. As shown in FIGS. 4 to 8, the cover body 21 of the lid 20 is formed in a horizontally long rectangle corresponding to the front or rear surface of the storage case 10 and has a substantially dish-shaped cross section. It is detachably fitted on the front and rear surfaces so as to prevent foreign matter from flowing into the storage case 10 from the outside.

  The peripheral wall 22 of the cover body 21 is formed in a front substantially frame shape and surrounds the plurality of sandwiching ribs 24 and the pair of bulging walls 25. A plurality of oval-shaped drop-off prevention ribs 23 that are pressed against each other are formed so as to protrude, and the plurality of drop-off prevention ribs 23 function to prevent the lid 20 from falling from the storage case 10.

  The plurality of sandwiching ribs 24 are arranged at a predetermined pitch in the vertical direction in the center of the opposing surface of the cover body 21 facing the front and rear surfaces of the storage case 10 and are interposed between the pair of bulging walls 25. The rib 24 is formed in an approximately mountain shape that is elongated in the left-right horizontal direction, and functions to prevent flapping and vibration of the ring frame 2 by sandwiching the peripheral edge of the ring frame 2 stored in the storage case 10 from above and below. To do.

  The pair of bulging walls 25 are integrally formed on both sides of the opposing surface of the cover body 21 facing the front and rear surfaces of the storage case 10 so as to be adjacent to both sides of the plurality of holding ribs 24, and The wall 25 is formed in a vertically long rectangle to increase the strength of the lid 20 and presses against both sides of the peripheral edge of the ring frame 2 stored in the storage case 10 to prevent the ring frame 2 from flapping or vibrating. .

  As shown in FIGS. 5 to 7, the side portions 26 of the respective bulging walls 25 are three-dimensionally integrated with the side portions of the plurality of adjacent sandwiching ribs 24 that are curved and extended in an arc shape, and are stored in the storage case 10. While being press-contacted by surface contact along the both sides from the peripheral edge part of the accommodated ring frame 2, the lid 20 is given rigidity. In other words, both side portions of the plurality of sandwiching ribs 24 are curved and extended in a circular arc shape in the direction of the adjacent bulging walls 25 to be bent side portions 26 of the respective bulging walls 25. It functions so as to be integrated and suppress the bending and deformation of the lid 20.

  In the above description, when the ring frame 2 of the processing jig 1 is stored in the storage case 10, first, the ring frame 2 of the processing jig 1 may be inserted into the storage case 10 from the front by a robot. Then, the ring frame 2 is horizontally inserted into the insertion groove 17 of the storage case 10 and slides, and both side portions of the ring frame 2 are supported horizontally from below by the pair of support pieces 16, and the inclined surface 19 of the stopper 18 is supported. The ring frame 2 is guided and contacted / stopped, whereby the ring frame 2 of the processing jig 1 is appropriately positioned and stored in the storage case 10.

  When the ring frame 2 of the processing jig 1 is properly stored in the storage case 10, the lid bodies 20 are manually fitted to the front and back surfaces of the storage case 10 that are opened, and a plurality of clamps of each lid body 20 are sandwiched. The rib 24 sandwiches the peripheral edge of the ring frame 2 from above and below to restrict its movement and unevenness, and fluttering and vibration of the ring frame 2 during transportation and transportation are prevented. At this time, both sides of the plurality of sandwiching ribs 24 of the lid 20 and the pair of bulging walls 25 are in surface contact from the peripheral edge of the ring frame 2 to both sides thereof.

  According to the above configuration, both side portions of the plurality of holding ribs 24 are three-dimensionally extended and integrated with the side portions 26 of the respective bulging walls 25 to increase the strength of the lid body 20 and prevent its bending and deformation. Therefore, the ring frame 2 accommodated at the time of conveyance or transportation does not flutter or vibrate and rub against the storage case 10. Therefore, it is possible to suppress the generation of foreign matter that becomes a contamination source and prevent damage to the semiconductor wafer W.

  In addition, since the stopper 18 of the support piece 16 regulates the rear portion of the ring frame 2, it is possible to effectively prevent positional deviation and rattling of the inserted ring frame 2. Furthermore, since the inclined surface 19 of the stopper 18 gradually fills the extra space of the insertion groove 17, it is possible to prevent the ring frame 2 from rattling due to vibration, and the semiconductor wafer W can be greatly prevented from being damaged.

  In the above embodiment, the front and rear surfaces of the storage case 10 are opened, but only the front surface of the storage case 10 may be opened. Further, although the notch 12 is cut out at the front end of the inner surface of the bottom plate 11, a rectangular cutout 12 that contributes to the insertion and removal of the lower ring frame 2 may be cut out at the rear end of the inner surface of the bottom plate 11. Further, instead of forming the support piece 16 in an elongated flat plate, the support piece 16 may be formed in a substantially J-shaped plate. Furthermore, drop-off prevention ribs 23 that press against the outer circumferences of the front and rear surfaces of the storage case 10 can be formed on both sides of the upper and lower inner surfaces of the peripheral wall 22.

It is front explanatory drawing which shows typically embodiment of the storage case for processing jigs concerning this invention. It is a perspective explanatory view showing typically the processing jig in the embodiment of the storage case for the processing jig according to the present invention. It is side explanatory drawing which shows typically embodiment of the storage case for processing jigs concerning this invention. It is explanatory drawing which shows typically the inside of the storage case in embodiment of the storage case for processing jigs concerning this invention. It is a perspective view showing typically a lid in an embodiment of a storage case for processing jigs concerning the present invention. It is explanatory drawing which shows typically the cover body in embodiment of the storage case for processing jigs concerning this invention. It is a plane explanatory view showing typically the lid in the embodiment of the storage case for processing jigs concerning the present invention. It is explanatory drawing which shows typically the surrounding wall inner surface of the cover body in embodiment of the storage case for processing jigs concerning this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Processing jig 2 Ring frame 10 Storage case 14 Side wall 16 Supporting piece 17 Insertion groove 18 Stopper 19 Inclined surface 20 Cover body 21 Cover body 22 Perimeter wall 23 Fall-off prevention rib (fall-off prevention protrusion)
24 Clamping rib (Clamping protrusion)
25 Swelling wall 26 Side W Semiconductor wafer (substrate)

Claims (3)

A storage case for a processing jig comprising a storage case for storing a ring frame of a processing jig for mounting a substrate, and a lid for opening and closing the opening surface of the storage case,
The lid body is formed in an array at the center portion of the cover body having a substantially dish-shaped cross section that is detachably fitted to the opening surface of the storage case and the opening surface of the storage case of the cover body. A ring frame that is integrally formed on a plurality of sandwiching protrusions sandwiching the peripheral edge of the ring frame housed in the housing and on both sides of the facing surface of the cover body that faces the opening surface of the housing case, and housed in the housing case A pair of bulging walls that contact both sides of the peripheral edge of the
Both side portions of the plurality of sandwiching protrusions are formed in a substantially arc shape in the direction of the adjacent bulging wall to form side portions of the respective bulging walls, and both side portions of the plurality of sandwiching projections are stored in the storage case. A storage case for a processing jig, characterized in that it extends from the peripheral edge of the ring frame to both sides thereof.   The storage case for a processing jig according to claim 1, wherein the lid includes a plurality of drop-off preventing protrusions that protrude from the inner surface of the peripheral wall of the cover body and contact the outer periphery of the opening surface of the storage case.   The storage case for a processing jig according to claim 1 or 2, wherein the lid is vacuum formed using a molding material containing polyethylene terephthalate or polystyrene.

Images