JP2010005619A5

JP2010005619A5 -

Info

Publication number: JP2010005619A5
Application number: JP2009230615A
Authority: JP
Filing date: 2009-10-02
Publication date: 2012-01-26
Anticipated expiration: 2026-04-25

Description

本発明は、基板に溶液をインクジェット方式で吐出して塗布する溶液の塗布装置及び塗布方法に関する。 The present invention solution relates solution method of coating apparatus and coating for coating by ejecting the inkjet method to the substrate.

この発明は、上面に凹部と凸部が規則的に形成された凹凸パターンを有する基板の上記上面に溶液をインクジェット方式で吐出して塗布する溶液の塗布装置であって、
所定方向に沿って配置された複数のノズルを有し、この複数のノズルから一定のタイミングでドット状の上記溶液を上記基板に塗布する塗布ヘッドと、
上記基板と上記塗布ヘッドとを相対的に移動させる駆動手段と、
この駆動手段による上記基板と上記塗布ヘッドとの相対的移動の際、上記各ノズルから吐出されて上記基板上に塗布されるドット状の溶液の各列が、上記基板上面の隣接する２つ以上の上記凸部に跨るように、上記凹凸パターンの凹部と凸部の配置方向を上記相対的移動方向に対して所定角度ずらすように制御する制御手段と
を具備したことを特徴とする溶液の塗布装置にある。 This invention provides a coating apparatus of the solution to be applied by ejecting the inkjet method a solution to the upper surface of the substrate having a concave portion and a convex portion regularly formed concave-convex pattern on the upper surface,
An application head that has a plurality of nozzles arranged along a predetermined direction and applies the dot-like solution to the substrate at a certain timing from the plurality of nozzles;
Driving means for relatively moving the substrate and the coating head;
During the relative movement between the substrate and the coating head by the driving means, is discharged from the respective nozzles each row of dot-like solution applied on the substrate, two adjacent of the upper surface of the substrate as spans the convex portion of the above solution, characterized in that the arrangement direction of the concave portion and the convex portion of the concavo-convex pattern and a control means for controlling so as to shift a predetermined angle with respect to the direction of relative movement In the applicator.

この発明は、上面に凹部と凸部が規則的に形成された凹凸パターンを有する基板の上記上面に溶液を塗布ヘッドの複数のノズルからインクジェット方式で吐出させて塗布する溶液の塗布方法であって、
上記基板と上記塗布ヘッドとを相対的に移動させる工程と、
上記基板と上記塗布ヘッドとの相対的移動の際、上記各ノズルから一定のタイミングで吐出されて上記基板上に塗布されるドット状の溶液の各列が、上記基板上面の隣接する２つ以上の上記凸部に跨るように、上記凹凸パターンの凹部と凸部の配置方向を上記相対的移動方向に対して所定角度ずらす工程と
を具備したことを特徴とする溶液の塗布方法にある。 The present invention was in a solution coating method for applying ejected by an inkjet method a solution to the upper surface of the substrate from the plurality of nozzles of the coating head having an uneven pattern concave portion and convex portion are formed regularly on the top surface And
Relatively moving the substrate and the coating head;
At the time of relative movement between the substrate and the coating head , each row of dot-like solutions that are ejected from the nozzles at a certain timing and applied onto the substrate has two or more adjacent rows on the upper surface of the substrate. of so as to extend over the above protrusion, the step of shifting the predetermined angular direction of arrangement of the concave portion and the convex portion of the concavo-convex pattern with respect to the direction of relative movement
A solution coating method characterized by comprising:

上記ヘッドテーブル１９の一側面にはインクジェット方式によって機能性薄膜である、たとえば配向膜を形成する溶液をドット状に吐出する複数の塗布ヘッド２２がＹ方向に沿って配置されている。この実施の形態では、たとえば７つの塗布ヘッド２２が千鳥状に二列で配置されている（図７参照）。 On one side surface of the head table 19, a plurality of coating heads 22 that are functional thin films by an ink jet method, for example, eject a solution for forming an alignment film in a dot shape, are arranged along the Y direction. In this embodiment, for example, seven of the coating head 22 is arranged in two rows in a staggered manner (see FIG. 7).

また、凹凸パターン１５の凹部１５ａと凸部１５ｂとが基板Ｗの長手方向と幅方向に対して規則的に形成された例において、１つのノズル３４から吐出されて基板Ｗ上に塗布されるドット状の溶液の列の方向と、凸部１５ｂとの間の角度θを４５度までの範囲に設定する例を説明したが、角度θは４５度までの範囲に限定されず、それ以上であっても良い。 Further, in the example in which the concave portions 15 a and the convex portions 15 b of the concave / convex pattern 15 are regularly formed in the longitudinal direction and the width direction of the substrate W, dots are ejected from one nozzle 34 and applied onto the substrate W. In the above example, the angle θ between the direction of the row of the solution and the convex portion 15b is set to a range of up to 45 degrees. However, the angle θ is not limited to the range of up to 45 degrees, and more than that. May be.

Claims

Applicator apparatus of a solution to be applied by ejecting the inkjet method a solution to the upper surface of a substrate having an uneven pattern concave portion and convex portion are formed regularly on the top surface,
An application head that has a plurality of nozzles arranged along a predetermined direction and applies the dot-like solution to the substrate at a certain timing from the plurality of nozzles;
Driving means for relatively moving the substrate and the coating head;
During the relative movement between the substrate and the coating head by the driving means, is discharged from the respective nozzles each row of dot-like solution applied on the substrate, two adjacent of the upper surface of the substrate as spans the convex portion of the above solution, characterized in that the arrangement direction of the concave portion and the convex portion of the concavo-convex pattern and a control means for controlling so as to shift a predetermined angle with respect to the direction of relative movement Coating device.

The drive means has a mounting table that holds the substrate and can drive the substrate in a horizontal direction and a rotation direction centered on an axis orthogonal to the horizontal direction.
2. The control unit according to claim 1, wherein the control unit shifts the arrangement direction of the concave and convex portions of the concave / convex pattern by a predetermined angle with respect to the relative movement direction by rotating the substrate by the driving unit. Solution applicator.

It carries out a plurality of times relative movement between the substrate and the coating head by the driving means, during their relative movement, with the arrangement direction of the concave portion and the convex portion of the relative movement direction and the uneven pattern 3. The solution coating apparatus according to claim 1, wherein the angle shift is changed.

The solution applying apparatus according to claim 1, wherein the substrate is relatively moved by the driving unit in a direction orthogonal to an arrangement direction of the plurality of nozzles .

5. The solution coating apparatus according to claim 1, wherein the concave and convex portions of the concavo-convex pattern are formed to be inclined with respect to the longitudinal direction and the width direction of the substrate.

A solution coating method of the concave portion on the upper surface and the convex portion is applied by ejecting an inkjet method a solution to the upper surface of the substrate from the plurality of nozzles of the coating head with regularly formed concave-convex pattern,
Relatively moving the substrate and the coating head;
At the time of relative movement between the substrate and the coating head , each row of dot-like solutions that are ejected from the nozzles at a certain timing and applied onto the substrate has two or more adjacent rows on the upper surface of the substrate. of so as to extend over the above protrusion, the step of shifting the predetermined angular direction of arrangement of the concave portion and the convex portion of the concavo-convex pattern with respect to the direction of relative movement
A method for applying a solution , comprising:

With moving the substrate in a linear direction, by moving the coating head in a direction crossing the moving direction of the substrate, the concave portion of the concavo-convex pattern relative movement direction of the substrate and the coating head and the convex portion The solution coating method according to claim 6, wherein the solution is shifted by a predetermined angle with respect to the arrangement direction.