JP2010002633A5 - - Google Patents

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Publication number
JP2010002633A5
JP2010002633A5 JP2008160865A JP2008160865A JP2010002633A5 JP 2010002633 A5 JP2010002633 A5 JP 2010002633A5 JP 2008160865 A JP2008160865 A JP 2008160865A JP 2008160865 A JP2008160865 A JP 2008160865A JP 2010002633 A5 JP2010002633 A5 JP 2010002633A5
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JP
Japan
Prior art keywords
monomers
trimers
dimers
polymerizing
reacts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008160865A
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English (en)
Japanese (ja)
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JP2010002633A (ja
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Publication date
Application filed filed Critical
Priority to JP2008160865A priority Critical patent/JP2010002633A/ja
Priority claimed from JP2008160865A external-priority patent/JP2010002633A/ja
Publication of JP2010002633A publication Critical patent/JP2010002633A/ja
Publication of JP2010002633A5 publication Critical patent/JP2010002633A5/ja
Pending legal-status Critical Current

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JP2008160865A 2008-06-19 2008-06-19 レジスト組成物 Pending JP2010002633A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008160865A JP2010002633A (ja) 2008-06-19 2008-06-19 レジスト組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008160865A JP2010002633A (ja) 2008-06-19 2008-06-19 レジスト組成物

Publications (2)

Publication Number Publication Date
JP2010002633A JP2010002633A (ja) 2010-01-07
JP2010002633A5 true JP2010002633A5 (https=) 2011-06-30

Family

ID=41584418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008160865A Pending JP2010002633A (ja) 2008-06-19 2008-06-19 レジスト組成物

Country Status (1)

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JP (1) JP2010002633A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7656485B2 (ja) * 2021-05-13 2025-04-03 信越化学工業株式会社 高分子化合物の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3507024B2 (ja) * 1999-10-27 2004-03-15 ダイセル化学工業株式会社 環式骨格を有する（メタ）アクリル酸エステルの製造法
JP3694685B2 (ja) * 2002-10-24 2005-09-14 丸善石油化学株式会社 レジスト用ポリマー及び感放射線性レジスト組成物
JP2004323704A (ja) * 2003-04-25 2004-11-18 Daicel Chem Ind Ltd フォトレジスト用重合体合成用（メタ）アクリル酸エステルとその製造法
JP3694692B2 (ja) * 2003-12-11 2005-09-14 丸善石油化学株式会社 レジスト用ポリマー溶液およびその製造方法

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