JP2009520344A - 金属−セラミック基板 - Google Patents
金属−セラミック基板 Download PDFInfo
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Abstract
【選択図】図1
Description
2 セラミック材料
3、 4 金属被覆
3a、4a 金属または銅ロール
5、 6 活性半田層
5a、6a 活性半田箔
7 ベース層またはベース基板
8、 9 中間層
10、11 マスク
Claims (17)
- 窒化アルミニウムまたは窒化シリコンセラミックでできており、かつ、金属被覆がパターニングの前に活性半田付けを用いてその上に施着されるベース基板から成る、薄板状セラミック材料の少なくとも一つの表層側面上のエッチングによってパターン化される少なくとも一つの金属被覆を備えた金属−セラミック基板であって、
酸化物セラミックでできている中間層が、前記少なくとも一つの金属被覆と前記ベース基板との間に設けられる、ことを特徴とする金属−セラミック基板。 - 前記中間層が、酸化シリコン、酸化アルミニウム、ムライト、フォルステライト、コージライトまたはこれらの組合せでできている、ことを特徴とする請求項1に記載の金属−セラミック基板。
- 銅、および、1つの更なる半田成分、例えば銀が、次のグループ:Ti、Zr、Hfからの少なくとも一つの活性半田成分とともに、活性半田として使われる、ことを特徴とする請求項1または2に記載の金属−セラミック基板。
- 前記中間層が、前記ベース基板のおよび/または前記少なくとも一つの金属被覆の厚さより非常に小さい厚さを有する、ことを特徴とする先行する請求項のいずれかに記載の金属−セラミック基板。
- 前記少なくとも一つの金属被覆が、銅または銅箔でできている、ことを特徴とする先行する請求項のいずれかに記載の金属−セラミック基板。
- 活性半田付けによる窒化アルミニウムまたは窒化シリコンセラミックでできているベース基板を備えた薄板状セラミック材料の少なくとも一つの表面上への少なくとも一つの金属被覆の施着によって、かつ、エッチングを用いた前記少なくとも一つの金属被覆のその後のパターニングによって、金属−セラミック基板を製作するための方法であって、前記少なくとも一つの金属被覆の施着の前に、前記セラミック材料の前記表層側面を形成する酸化物セラミックでできている中間層が、前記ベース基板に施着される、ことを特徴とする方法。
- 酸化シリコン、酸化アルミニウム、ムライト、フォルステライト、コージライトまたはこれらの組合せが、前記中間層のために使われる、ことを特徴とする請求項6に記載の方法。
- 銅、および、1つの更なる半田成分、例えば銀が、次のグループ:Ti、Zr、Hfからの少なくとも一つの活性半田成分とともに、活性半田として使われる、ことを特徴とする請求項6または7に記載の方法。
- 前記中間層が、好ましくは1000℃と1650℃との間のプロセス温度で、前記ベース基板の熱酸化によって作成される、ことを特徴とする先行する請求項のいずれかに記載の方法。
- 前記中間層が前記層を形成する前記材料を施着することによって、および、例えば1200℃と1650℃との間の温度での、前記中間層のその後の焼成によって達成される、ことを特徴とする先行する請求項のいずれかに記載の方法。
- 前記中間層が、前記中間層の前記セラミック材料を含む分散体または分散混合物を使用して、好ましくは、マイクロ分散ないしナノ分散混合物を使用して施着される、ことを特徴とする先行する請求項のいずれかに記載の方法。
- 前記中間層が、噴霧および/またはディップコーティングおよび/またはスピンコーティングおよび/またはゾルーゲルコーティングによって施着される、ことを特徴とする先行する請求項のいずれかに記載の方法。
- 前記中間層が、前記ベース基板のおよび/または前記少なくとも一つの金属被覆の厚さより非常に小さい厚さで施着されることを特徴とする先行する請求項のいずれかに記載の方法。
- 銅または銅箔が、前記少なくとも一つの金属被覆に用いられる、ことを特徴とする先行する請求項のいずれかに記載の方法。
- 前記金属被覆のパターニングの後に、必要とされない活性半田残存物を取り除くために更なるエッチングが続く、ことを特徴とする先行する請求項のいずれかに記載の方法。
- 前記金属被覆のパターニングの後、チタン、ハフニウムおよび/またはジルコニウム窒素化合物残存物がエッチングによって取り除かれる、ことを特徴とする先行する請求項のいずれかに記載の方法。
- 前記必要とされない活性半田残存物の除去および前記チタン、ハフニウムおよび/またはジルコニウム窒素化合物残存物の除去が、一般のエッチングステップで行われる、ことを特徴とする請求項16に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005061049A DE102005061049A1 (de) | 2005-12-19 | 2005-12-19 | Metall-Keramik-Substrat |
PCT/DE2006/001470 WO2007071218A1 (de) | 2005-12-19 | 2006-08-22 | Metall-keramik-substrat |
Publications (1)
Publication Number | Publication Date |
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JP2009520344A true JP2009520344A (ja) | 2009-05-21 |
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Application Number | Title | Priority Date | Filing Date |
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JP2008544746A Pending JP2009520344A (ja) | 2005-12-19 | 2006-08-22 | 金属−セラミック基板 |
Country Status (5)
Country | Link |
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US (1) | US8069561B2 (ja) |
EP (1) | EP1966824B1 (ja) |
JP (1) | JP2009520344A (ja) |
DE (2) | DE102005061049A1 (ja) |
WO (1) | WO2007071218A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012522709A (ja) * | 2009-04-02 | 2012-09-27 | キュラミーク エレクトロニクス ゲーエムベーハー | 金属セラミック基板 |
JP2020533797A (ja) * | 2017-09-12 | 2020-11-19 | ロジャーズ ジャーマニー ゲーエムベーハーRogers Germany GmbH | レーザダイオードなどの構成要素をヒートシンクに接合するためのアダプタ要素、レーザダイオード、ヒートシンクおよびアダプタ要素を含むシステム、およびアダプタ要素の製造方法 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005042554B4 (de) * | 2005-08-10 | 2008-04-30 | Curamik Electronics Gmbh | Metall-Keramik-Substrat und Verfahren zur Herstellung eines Metall-Keramik-Substrats |
US9418937B2 (en) * | 2011-12-09 | 2016-08-16 | Infineon Technologies Ag | Integrated circuit and method of forming an integrated circuit |
DE102012101057A1 (de) * | 2011-12-27 | 2013-06-27 | Curamik Electronics Gmbh | Verfahren zur Herstellung von DCB-Substraten |
DE102013101936A1 (de) | 2013-02-27 | 2014-08-28 | Endress + Hauser Gmbh + Co. Kg | Drucksensor |
JP6111764B2 (ja) * | 2013-03-18 | 2017-04-12 | 三菱マテリアル株式会社 | パワーモジュール用基板の製造方法 |
JP5672324B2 (ja) | 2013-03-18 | 2015-02-18 | 三菱マテリアル株式会社 | 接合体の製造方法及びパワーモジュール用基板の製造方法 |
CN103338588B (zh) * | 2013-06-04 | 2016-04-20 | 苏州晶品光电科技有限公司 | 高导热绝缘金属基印刷电路板 |
CN103327736B (zh) * | 2013-06-04 | 2015-12-23 | 苏州晶品光电科技有限公司 | 高导热绝缘金属基印刷电路板 |
CN103327735B (zh) * | 2013-06-04 | 2015-12-23 | 苏州晶品光电科技有限公司 | 高导热绝缘金属基印刷电路板 |
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DE102018101750A1 (de) * | 2018-01-26 | 2019-08-01 | Rogers Germany Gmbh | Verbundkeramik für eine Leiterplatte und Verfahren zu deren Herstellung |
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DE102019126954A1 (de) * | 2019-10-08 | 2021-04-08 | Rogers Germany Gmbh | Verfahren zur Herstellung eines Metall-Keramik-Substrats, Lötsystem und Metall-Keramik-Substrat, hergestellt mit einem solchen Verfahren |
CN117334795B (zh) * | 2023-09-30 | 2024-02-20 | 江苏富乐华功率半导体研究院有限公司 | 一种基于陶瓷围坝的高功率led封装结构的制备及应用 |
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- 2006-08-22 EP EP06775889A patent/EP1966824B1/de not_active Expired - Fee Related
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JP2012522709A (ja) * | 2009-04-02 | 2012-09-27 | キュラミーク エレクトロニクス ゲーエムベーハー | 金属セラミック基板 |
JP2020533797A (ja) * | 2017-09-12 | 2020-11-19 | ロジャーズ ジャーマニー ゲーエムベーハーRogers Germany GmbH | レーザダイオードなどの構成要素をヒートシンクに接合するためのアダプタ要素、レーザダイオード、ヒートシンクおよびアダプタ要素を含むシステム、およびアダプタ要素の製造方法 |
JP7034266B2 (ja) | 2017-09-12 | 2022-03-11 | ロジャーズ ジャーマニー ゲーエムベーハー | レーザダイオードなどの構成要素をヒートシンクに接合するためのアダプタ要素、レーザダイオード、ヒートシンクおよびアダプタ要素を含むシステム、およびアダプタ要素の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US8069561B2 (en) | 2011-12-06 |
EP1966824B1 (de) | 2010-06-02 |
EP1966824A1 (de) | 2008-09-10 |
DE502006007133D1 (de) | 2010-07-15 |
US20090020321A1 (en) | 2009-01-22 |
WO2007071218A1 (de) | 2007-06-28 |
DE102005061049A1 (de) | 2007-06-21 |
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