JP2009507370A5 - - Google Patents

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Publication number
JP2009507370A5
JP2009507370A5 JP2008529029A JP2008529029A JP2009507370A5 JP 2009507370 A5 JP2009507370 A5 JP 2009507370A5 JP 2008529029 A JP2008529029 A JP 2008529029A JP 2008529029 A JP2008529029 A JP 2008529029A JP 2009507370 A5 JP2009507370 A5 JP 2009507370A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2008529029A
Other versions
JP2009507370A (ja
JP5042225B2 (ja
Filing date
Publication date
Priority claimed from US11/217,276 external-priority patent/US7444572B2/en
Application filed filed Critical
Publication of JP2009507370A publication Critical patent/JP2009507370A/ja
Publication of JP2009507370A5 publication Critical patent/JP2009507370A5/ja
Application granted granted Critical
Publication of JP5042225B2 publication Critical patent/JP5042225B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008529029A 2005-09-01 2006-07-06 熱処理システムのビルトイン・セルフテスト Expired - Fee Related JP5042225B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/217,276 US7444572B2 (en) 2005-09-01 2005-09-01 Built-in self test for a thermal processing system
US11/217,276 2005-09-01
PCT/US2006/026128 WO2007030193A1 (en) 2005-09-01 2006-07-06 Built-in self test for a thermal processing system

Publications (3)

Publication Number Publication Date
JP2009507370A JP2009507370A (ja) 2009-02-19
JP2009507370A5 true JP2009507370A5 (ja) 2010-08-19
JP5042225B2 JP5042225B2 (ja) 2012-10-03

Family

ID=37215984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008529029A Expired - Fee Related JP5042225B2 (ja) 2005-09-01 2006-07-06 熱処理システムのビルトイン・セルフテスト

Country Status (4)

Country Link
US (1) US7444572B2 (ja)
JP (1) JP5042225B2 (ja)
TW (1) TWI332131B (ja)
WO (1) WO2007030193A1 (ja)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7838072B2 (en) 2005-01-26 2010-11-23 Tokyo Electron Limited Method and apparatus for monolayer deposition (MLD)
US7526699B2 (en) * 2006-03-31 2009-04-28 Tokyo Electron Limited Method for creating a built-in self test (BIST) table for monitoring a monolayer deposition (MLD) system
US7340377B2 (en) * 2006-03-31 2008-03-04 Tokyo Electron Limited Monitoring a single-wafer processing system
US7519885B2 (en) * 2006-03-31 2009-04-14 Tokyo Electron Limited Monitoring a monolayer deposition (MLD) system using a built-in self test (BIST) table
US7302363B2 (en) * 2006-03-31 2007-11-27 Tokyo Electron Limited Monitoring a system during low-pressure processes
US8180594B2 (en) * 2007-09-06 2012-05-15 Asm International, N.V. System and method for automated customizable error diagnostics
US7689887B2 (en) * 2007-12-21 2010-03-30 International Business Machines Corporation Automatic shutdown or throttling of a BIST state machine using thermal feedback
US20100076729A1 (en) * 2008-09-19 2010-03-25 Applied Materials, Inc. Self-diagnostic semiconductor equipment
US20120222009A1 (en) * 2011-02-24 2012-08-30 Ayewah Nathaniel E Defective code warning resolution analysis
JP5973173B2 (ja) * 2012-01-23 2016-08-23 東京エレクトロン株式会社 熱処理装置及び熱処理装置の制御方法
US10401164B2 (en) * 2012-10-16 2019-09-03 Exxonmobil Research And Engineering Company Sensor network design and inverse modeling for reactor condition monitoring
WO2020055555A1 (en) 2018-09-12 2020-03-19 Applied Materials, Inc. Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools
US10998205B2 (en) * 2018-09-14 2021-05-04 Kokusai Electric Corporation Substrate processing apparatus and manufacturing method of semiconductor device
US11449047B2 (en) * 2018-09-28 2022-09-20 Rockwell Automation Technologies, Inc. Systems and methods for retraining a model a target variable in a tiered framework
TW202310131A (zh) * 2021-08-24 2023-03-01 日商東京威力科創股份有限公司 基板處理裝置、模型資料產生裝置、基板處理方法、及模型資料產生方法
CN117711992A (zh) * 2024-02-04 2024-03-15 北京北方华创微电子装备有限公司 温控异常处理方法、半导体工艺设备及存储介质

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5642296A (en) * 1993-07-29 1997-06-24 Texas Instruments Incorporated Method of diagnosing malfunctions in semiconductor manufacturing equipment
JP3447749B2 (ja) * 1996-08-29 2003-09-16 富士通株式会社 設備故障診断方法及びその装置並びにその方法に従った処理をコンピュータに実行させるためのプログラムを格納した記緑媒体
US5937154A (en) * 1997-03-05 1999-08-10 Hewlett-Packard Company Manufacturing functional testing of computing devices using microprogram based functional tests applied via the devices own emulation debug port
US6195621B1 (en) * 1999-02-09 2001-02-27 Roger L. Bottomfield Non-invasive system and method for diagnosing potential malfunctions of semiconductor equipment components
JP4493192B2 (ja) * 2000-09-13 2010-06-30 東京エレクトロン株式会社 バッチ式熱処理装置及びその制御方法

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