JP2009298461A - Dry silica particle package - Google Patents

Dry silica particle package Download PDF

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JP2009298461A
JP2009298461A JP2008157675A JP2008157675A JP2009298461A JP 2009298461 A JP2009298461 A JP 2009298461A JP 2008157675 A JP2008157675 A JP 2008157675A JP 2008157675 A JP2008157675 A JP 2008157675A JP 2009298461 A JP2009298461 A JP 2009298461A
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dry silica
silica fine
fine particles
package
packaging container
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Masakazu Ohara
雅和 大原
Hiroo Aoki
博男 青木
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Tokuyama Corp
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Tokuyama Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide dry silica particle package in which dry silica particles have a superior dispersibility into a resin even if its storage period is extended and an increase in viscosity is restricted, when the package is filled in resin. <P>SOLUTION: Dry silica particle is filled in and stored in a packaging container with a moisture vapor transmission of less than 1 (g/(m<SP>2</SP>×day), 40°C/90%RH) in order to restrict suction of moisture during its storage period. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、乾式シリカ微粒子を包装容器に封入してなる乾式シリカ微粒子包装物に関し、詳しくは凝集の発生抑制に優れた乾式シリカ微粒子包装物に関する。   The present invention relates to a dry silica fine particle package formed by enclosing dry silica fine particles in a packaging container, and more particularly to a dry silica fine particle package excellent in suppressing the occurrence of aggregation.

近年、電子機器の高性能化、小型軽量化に伴い、搭載される半導体素子及び半導体パッケージの高集積化、小型化、薄型化が進んでいる。このため、半導体封止用樹脂に添加する充填材の粒子径が段々と小さくなっていく傾向にあり、平均粒子径が100nm程度の乾式シリカ微粒子が用いられることもある(例えば、特許文献1参照。)。   2. Description of the Related Art In recent years, as electronic devices have become higher performance, smaller and lighter, semiconductor devices and semiconductor packages to be mounted have been highly integrated, miniaturized, and thinned. For this reason, the particle diameter of the filler added to the resin for semiconductor encapsulation tends to be gradually reduced, and dry silica fine particles having an average particle diameter of about 100 nm are sometimes used (for example, see Patent Document 1). .)

微粒子であるか否かに限らず通常は、シリカ製造者と樹脂組成物等に調製する者(最終ユーザー)とは異なるため、製造されたシリカ粒子は、製造後に各種包装に小分け、シリカ製造業者や流通業者がいわゆる在庫として保管し、最終ユーザーからの注文に応じて必要量が出荷されることが多い。また最終ユーザーのもとで保管されることもある。この保管期間は、数日から長い場合には数年に及ぶこともある。   Usually, it is different from the silica manufacturer and the person who prepares the resin composition, etc. (final user) regardless of whether it is a fine particle. The manufactured silica particles are subdivided into various packages after manufacture, and the silica manufacturer And distributors store the stock as so-called stock, and the required amount is often shipped according to the order from the end user. It may also be stored under the end user. This storage period can range from a few days to several years.

特開2008−19157号公報JP 2008-19157 A

しかしながら、本発明者らの検討によれば、前記のような平均粒子径が100nm程度の乾式シリカ微粒子は、他の製法や粒子径を有するシリカに比べると、保存期間が長くなると樹脂組成物にした時の粘度上昇幅が増大していく傾向にあり、ついには半導体封止用樹脂組成物として使用困難な状態に至ってしまう。   However, according to the study by the present inventors, the dry silica fine particles having an average particle diameter of about 100 nm as described above are used in the resin composition when the storage period is long compared to silica having other production methods and particle diameters. In this case, the viscosity increase range tends to increase, and finally it becomes difficult to use as a semiconductor sealing resin composition.

従って本発明の目的は、保存期間が長くなっても樹脂への分散性に優れ、樹脂に充填した場合の粘度の上昇が抑えられる乾式シリカ微粒子包装物を提供することにある。   Accordingly, an object of the present invention is to provide a dry silica fine particle package that is excellent in dispersibility in a resin even when the storage period is long, and that can suppress an increase in viscosity when filled in the resin.

本発明者等は、上記技術課題を解決すべく鋭意検討を行った結果、乾式シリカ微粒子を保存する雰囲気中に存在する水蒸気が、乾式シリカ微粒子の凝集を促進し、樹脂組成物にした時の粘度上昇幅を増大させていくことに気付いた。そこで乾式シリカ微粒子を保存する時に、水蒸気透過率がある値以下の包装物にすることで、保存による粘度の上昇を抑制出来ることを見いだし、本発明を完成するに至った。   As a result of intensive studies to solve the above technical problems, the present inventors have promoted the aggregation of the dry silica fine particles and the water vapor present in the atmosphere in which the dry silica fine particles are preserved to form a resin composition. It was noticed that the increase in viscosity was increased. Thus, when storing dry silica fine particles, it was found that by increasing the water vapor permeability to a certain value or less, it was possible to suppress an increase in viscosity due to storage, and the present invention was completed.

すなわち、本発明の乾式シリカ微粒子包装物は、乾式シリカ微粒子を水蒸気透過率が1(g/(m・day)、40℃/90%RH)以下の包装容器に封入してなることを特徴とする。 That is, the dry silica fine particle package of the present invention is characterized in that the dry silica fine particles are sealed in a packaging container having a water vapor permeability of 1 (g / (m 2 · day), 40 ° C./90% RH) or less. And

また、BET比表面積が20〜55m/gである乾式シリカ微粒子の包装物に特に好適である。さらには前記包装容器がアルミラミネート袋であることが好ましい。 Further, it is particularly suitable for a package of dry silica fine particles having a BET specific surface area of 20 to 55 m 2 / g. Furthermore, the packaging container is preferably an aluminum laminated bag.

本発明の乾式シリカ微粒子包装物は、水蒸気透過率が1(g/(m・day)、40℃/90%RH)以下の包装物にすることで、調湿などが行われていない倉庫などで、例えば6ヶ月以上の長期間に亘って保管しても、樹脂組成物にした時の粘度の保存による上昇を抑制出来る。 The dry silica fine particle package of the present invention is a warehouse in which humidity is not controlled by making the package having a water vapor transmission rate of 1 (g / (m 2 · day), 40 ° C./90% RH) or less. For example, even if it is stored for a long period of, for example, 6 months or more, an increase due to storage of the viscosity when the resin composition is formed can be suppressed.

本発明における乾式シリカとしては、Si原子を含む分子からなる気体又は噴霧した液体を気相中高温で熱分解して製造する熱分解法シリカや、金属ケイ素を火炎中や高温の電気炉中で酸化させて製造されるシリカ、あるいは粉砕石英等のシリカ質粉末を火炎中で一旦溶融させ、これを再凝固させることにより製造するシリカなどが挙げられる。   As dry silica in the present invention, a pyrogenic silica produced by thermally decomposing gas or sprayed liquid containing molecules containing Si atoms at high temperature in the gas phase, or metal silicon in a flame or in a high-temperature electric furnace Examples include silica produced by oxidation, or silica produced by once melting a siliceous powder such as pulverized quartz in a flame and re-solidifying it.

Si原子を含む分子からなる気体又は液体としては、モノクロロシラン、ジクロロシラン、トリクロロシラン、テトラクロロシラン等のハロゲン化ケイ素類、ヘキサメチルシクロトリシロキサン、オクタメチルシクロテトラシロキサン、デカメチルシクロペンタシロキサン、ヘキサメチルジシロキサン、オクタメチルトリシロキサン等のシロキサン類が挙げられる。   Examples of gases or liquids composed of molecules containing Si atoms include silicon halides such as monochlorosilane, dichlorosilane, trichlorosilane, and tetrachlorosilane, hexamethylcyclotrisiloxane, octamethylcyclotetrasiloxane, decamethylcyclopentasiloxane, hexa Examples thereof include siloxanes such as methyldisiloxane and octamethyltrisiloxane.

このような原料を用いた熱分解法シリカの製造方法は知られており、例えば、特開2008−19157号公報には、シロキサン類を原料とした熱分解法シリカの製造例が具体的に記載されている。   A method for producing pyrogenic silica using such a raw material is known. For example, JP 2008-19157A specifically describes an example of producing pyrogenic silica using siloxanes as a raw material. Has been.

本発明の乾式シリカ微粒子包装物において包装容器内に封入される乾式シリカ微粒子は、BET比表面積が20〜55m/gの乾式シリカ微粒子である場合によりその効果が大きい。即ち、BET比表面積が20〜55m/gの範囲にある乾式シリカ微粒子は、凝集の発生が極めて顕著であるため保存に伴う粘度上昇が起こり易く、本発明の如き包装形態がより重要となる。このような比表面積の範囲を有する乾式シリカとしては、上記特開2008−19157号公報に記載されたシリカが挙げられる。 The effect of the dry silica fine particles enclosed in the packaging container in the dry silica fine particle package of the present invention is greater when the dry silica fine particles have a BET specific surface area of 20 to 55 m 2 / g. That is, dry silica fine particles having a BET specific surface area in the range of 20 to 55 m 2 / g are very prominent in aggregation, so that the viscosity increases during storage, and the packaging form as in the present invention becomes more important. . Examples of the dry silica having such a specific surface area range include silicas described in JP-A-2008-19157.

また本発明のまた本発明の乾式シリカ微粒子包装物において包装容器内に封入される乾式シリカ微粒子は、表面処理されているものでも、なんら処理されていないものでも構わないが、相対的に吸湿しやすく、よって保存に伴い凝集しやすい傾向が一段と強い点で、親水性シリカであることがより発明の効果を得られやすい。なおここで親水性シリカとは、シリカ濃度が1.5重量%となるように水と混合したとき、水と完全に混合できるシリカをいう。   Further, the dry silica fine particles enclosed in the packaging container of the dry silica fine particle package of the present invention may be surface-treated or not treated at all, but relatively absorbs moisture. It is easy to obtain the effect of the invention because it is easy to aggregate and thus is more prone to agglomeration upon storage, and is hydrophilic silica. Here, the hydrophilic silica refers to silica that can be completely mixed with water when mixed with water so that the silica concentration is 1.5% by weight.

このような親水性シリカとしては、全く表面処理をしていないもの、主にγ−グリシドキシプロピルメチルジメトキシシラン、γ−グリシドキシプロピルトリメトキシシラン、γ−グリシドキシプロピルトリエトキシシラン、γ−グリシドキシプロピルトリプロポキシシラン等のエポキシ官能基を有するシランカップリング剤やγ−アミノプロピルトリメトキシシラン、γ−アミノプロピルトリエトキシシラン、γ−(2−アミノエチル)アミノプロピルトリメトキシシラン、γ−(2−アミノエチル)アミノプロピルメチルジメトキシシラン等のアミノ基を有するシランカップリング剤等の極性官能基を有するシランカップリング剤で処理したものなどが挙げられる。   As such hydrophilic silica, those which are not surface-treated at all, mainly γ-glycidoxypropylmethyldimethoxysilane, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropyltriethoxysilane, Silane coupling agents having an epoxy functional group such as γ-glycidoxypropyltripropoxysilane, γ-aminopropyltrimethoxysilane, γ-aminopropyltriethoxysilane, γ- (2-aminoethyl) aminopropyltrimethoxysilane And those treated with a silane coupling agent having a polar functional group such as a silane coupling agent having an amino group such as γ- (2-aminoethyl) aminopropylmethyldimethoxysilane.

本発明の乾式シリカ微粒子包装物は、上記の如き乾式シリカ微粒子を水蒸気透過率が1(g/(m・day)、40℃/90%RH)以下の包装容器に封入してなる。即ち、水蒸気透過率が1(g/(m・day)、40℃/90%RH)を超える場合には、乾式シリカ微粒子の凝集を抑制出来ず、保存期間が長くなると樹脂組成物にした時の粘度上昇幅が増大していく傾向にあり、ついには半導体封止用樹脂組成物として使用困難な状態に至ってしまう。換言すれば、水蒸気透過率が上記値を超える包装容器では、初期の性能を維持した状態での長期の保存が困難となる。なお当該水蒸気透過率はJIS-Z-0208に準じて測定する値である。 The dry silica fine particle package of the present invention is formed by enclosing the dry silica fine particles as described above in a packaging container having a water vapor transmission rate of 1 (g / (m 2 · day), 40 ° C./90% RH) or less. That is, when the water vapor transmission rate exceeds 1 (g / (m 2 · day), 40 ° C./90% RH), aggregation of the dry silica fine particles cannot be suppressed, and the resin composition is obtained when the storage period is long. The viscosity increase width at the time tends to increase, and eventually it becomes difficult to use as a semiconductor sealing resin composition. In other words, in a packaging container having a water vapor transmission rate exceeding the above value, long-term storage with the initial performance maintained is difficult. The water vapor transmission rate is a value measured according to JIS-Z-0208.

水蒸気透過率が小さいほど、より長期の保存に耐えうるが、一般に要求される保存期間と水蒸気透過率を低減するに必要なコスト及び包装物の取扱い性等を勘案すれば、通常は0.001〜1(g/(m・day)、40℃/90%RH)であればよく、なかでも0.2(g/(m・day)、40℃/90%RH)以下であればより好ましい。 The smaller the water vapor transmission rate, the longer it can withstand storage, but generally considering the required storage period, the cost required to reduce the water vapor transmission rate, the handleability of the package, etc., it is usually 0.001. ˜1 (g / (m 2 · day), 40 ° C./90% RH), especially 0.2 (g / (m 2 · day), 40 ° C./90% RH) or less. More preferred.

かかる包装容器の例としては、アルミラミネート袋、金属製ペール缶などが挙げられるが、経済性、包装容器の取扱い易さ、保管スペースを小さく出来る点でアルミラミネート袋が好ましい。当該アルミラミネート袋の具体例としては、例えば、株式会社生産日本社製ラミジップALシリーズ、カイト化学工業株式会社製アルミラミネート袋、株式会社サンライズ製ハイバリアー袋等が挙げられる。   Examples of such packaging containers include aluminum laminated bags and metal pail cans, but aluminum laminated bags are preferred in terms of economy, ease of handling of packaging containers, and storage space can be reduced. Specific examples of the aluminum laminated bag include lami zip AL series manufactured by Nippon Shokubai Co., Ltd., an aluminum laminated bag manufactured by Kite Chemical Industries, Ltd., a high barrier bag manufactured by Sunrise, and the like.

包装容器への乾式シリカ微粒子の充填方法は、スクリューフィーダーやテーブルフィーダー等の定量供給装置を備えた自動計量器を用いた方法、作業者が計量スコップ等の器具を用いて包装容器に所定の重量になるまで乾式シリカ微粒子を充填する方法等、公知の充填方法が何らの制限無く採用できる。   The packing method of dry silica fine particles into the packaging container is a method using an automatic measuring instrument equipped with a quantitative supply device such as a screw feeder or a table feeder, and an operator uses a measuring scoop or the like to put a predetermined weight on the packaging container. A known filling method such as a method of filling dry silica fine particles until it becomes can be employed without any limitation.

包装容器の封止方法は、包装容器が内袋入りペール缶の場合、内袋の開口部を持つ端を捻じった後、ビニールテープや輪ゴム等で留め、次いでペール缶の蓋を所定の留め金具で固定する方法が採用できる。この封止作業の際、内袋やペール缶内部を封止前に露点−20℃以下の空気や窒素で置換すれば本発明の効果がより発揮される。また、包装容器がアルミラミネート袋の場合、開口部をヒートシールする方法が採用できる。この封止作業の際、アルミラミネート袋内部を封止前に露点−20℃以下の空気や窒素で置換すれば本発明の効果がより発揮される。   When the packaging container is a pail can with an inner bag, after twisting the end of the inner bag with the opening, it is fastened with vinyl tape or rubber band, and then the pail can lid is fastened to the specified A method of fixing with metal fittings can be adopted. At the time of this sealing operation, the effect of the present invention is more exhibited if the inside of the inner bag or the pail can is replaced with air or nitrogen having a dew point of −20 ° C. or lower before sealing. Moreover, when a packaging container is an aluminum laminated bag, the method of heat-sealing an opening part is employable. At the time of this sealing operation, the effect of the present invention is more exhibited if the inside of the aluminum laminated bag is replaced with air or nitrogen having a dew point of −20 ° C. or lower before sealing.

上述の方法で作製された乾式シリカ微粒子包装物の保存は、通常の工業製品が保存される環境下、即ち風雨や直射日光に曝されない環境下での保存であれば何ら問題ない。但し、包装容器がアルミラミネート袋の場合、積み重ねると荷重により乾式シリカ微粒子が圧密し凝集粒子が生成する恐れがあるため、積み重ねを好ましくは10重ね以下、より好ましくは5重ね以下にすると良い。   Storage of the dry silica fine particle package produced by the above-described method poses no problem as long as it is stored in an environment where ordinary industrial products are stored, that is, in an environment where it is not exposed to wind and rain or direct sunlight. However, when the packaging container is an aluminum laminated bag, there is a possibility that the dry silica fine particles are consolidated by the load and aggregated particles are generated by stacking.

本発明を具体的に説明するために実施例及び比較例を示すが、本発明はこれらの実施例に限定されるものではない。   Examples and comparative examples are shown to specifically describe the present invention, but the present invention is not limited to these examples.

なお、以下の実施例及び比較例における各種の物性測定等は以下の方法による。   In addition, various physical property measurements in the following examples and comparative examples are based on the following methods.

(1)BET比表面積測定:
柴田理化学社製比表面積測定装置(SA−1000)を用い、窒素吸着BET1点法により測定した。
(1) BET specific surface area measurement:
Using a specific surface area measuring device (SA-1000) manufactured by Shibata Rikagaku Co., the nitrogen adsorption BET one-point method was used.

(2)平均粒子径
堀場製作所製レーザー回折散乱式粒度分布測定装置(LA−920)を用い測定した。
(2) Average particle diameter It measured using the Horiba Seisakusho laser diffraction scattering type particle size distribution measuring device (LA-920).

(3)樹脂組成物の粘度特性
下記のようにエポキシ樹脂組成物を調製し、樹脂組成物の粘度特性評価を行った。
(3) Viscosity characteristics of resin composition An epoxy resin composition was prepared as follows, and the viscosity characteristics of the resin composition were evaluated.

(エポキシ樹脂組成物の調製)
ダウケミカル社製エポキシ樹脂ERL−4221と、乾式シリカ微粒子を1:1(重量比)の割合で配合し、自転公転式プラネタリーミキサー(シンキー社製AR−250)を用いて、攪拌時間3分の条件で混練しエポキシ樹脂組成物を得た。
(Preparation of epoxy resin composition)
Dow Chemical's epoxy resin ERL-4221 and dry silica fine particles were blended at a ratio of 1: 1 (weight ratio), and a rotation time and planetary mixer (Sinky AR-250) was used, and the stirring time was 3 minutes. An epoxy resin composition was obtained by kneading under these conditions.

(粘度測定)
ブルックフィールド粘度計(BROOKFIELD社製 DV−2+VISCOMETER、スピンドル:S51)を用いて、温度25℃、スピンドル回転数3rpmの条件で測定した。
(Viscosity measurement)
Using a Brookfield viscometer (BROOKFIELD DV-2 + VISCOMETER, spindle: S51), the temperature was measured at 25 ° C. and the spindle rotation speed was 3 rpm.

実施例1
特開2008−19157号公報記載の方法で製造したBET比表面積が30m/g、平均粒子径が0.11μm、エポキシ樹脂組成物粘度が4800mPa・sの乾式シリカ微粒子を水蒸気透過率が0.1(g/(m・day)、40℃/90%RH)のアルミラミネート袋に封入し、6ヶ月間大気雰囲気中に静置した。6ヶ月経過後のBET比表面積は30m/g、平均粒子径は0.11μm、エポキシ樹脂組成物粘度は4800mPa・sであり、保存による経時的な変化は見られなかった。
Example 1
A dry silica fine particle having a BET specific surface area of 30 m 2 / g, an average particle size of 0.11 μm, and an epoxy resin composition viscosity of 4800 mPa · s, produced by the method described in JP-A-2008-19157, has a water vapor transmission rate of 0.1. It was sealed in an aluminum laminate bag of 1 (g / (m 2 · day), 40 ° C./90% RH) and allowed to stand in an air atmosphere for 6 months. After 6 months, the BET specific surface area was 30 m 2 / g, the average particle size was 0.11 μm, and the viscosity of the epoxy resin composition was 4800 mPa · s. No change over time due to storage was observed.

比較例1
実施例1と同じ乾式シリカ微粒子を水蒸気透過率が4(g/(m・day)、40℃/90%RH)のポリエチレン袋に封入し、6ヶ月間大気雰囲気中に静置した。6ヶ月経過後のBET比表面積は30m/g、平均粒子径は0.21μm、エポキシ樹脂組成物粘度は11000mPa・sであり、保存による凝集の発生と樹脂組成物の粘度上昇が見られた。
Comparative Example 1
The same dry silica fine particles as in Example 1 were sealed in a polyethylene bag having a water vapor transmission rate of 4 (g / (m 2 · day), 40 ° C./90% RH) and allowed to stand in an air atmosphere for 6 months. After 6 months, the BET specific surface area was 30 m 2 / g, the average particle size was 0.21 μm, the viscosity of the epoxy resin composition was 11000 mPa · s, and the occurrence of aggregation due to storage and the increase in the viscosity of the resin composition were observed. .

Claims (3)

乾式シリカ微粒子を水蒸気透過率が1(g/(m・day)、40℃/90%RH)以下の包装容器に封入してなる乾式シリカ微粒子包装物。 A dry silica fine particle package in which dry silica fine particles are sealed in a packaging container having a water vapor transmission rate of 1 (g / (m 2 · day), 40 ° C./90% RH) or less. 前記乾式シリカ微粒子のBET比表面積が20〜55m/gである請求項1に記載の乾式シリカ微粒子包装物。 The dry silica fine particle package according to claim 1, wherein the dry silica fine particles have a BET specific surface area of 20 to 55 m 2 / g. 前記包装容器がアルミラミネート袋である請求項1に記載の乾式シリカ微粒子包装物。   The dry silica fine particle package according to claim 1, wherein the packaging container is an aluminum laminated bag.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022239708A1 (en) * 2021-05-13 2022-11-17 デンカ株式会社 Silica powder in which aggregation is reduced, resin composition, and semiconductor sealing material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022239708A1 (en) * 2021-05-13 2022-11-17 デンカ株式会社 Silica powder in which aggregation is reduced, resin composition, and semiconductor sealing material

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