JP2009290169A5 - - Google Patents
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- Publication number
- JP2009290169A5 JP2009290169A5 JP2008144353A JP2008144353A JP2009290169A5 JP 2009290169 A5 JP2009290169 A5 JP 2009290169A5 JP 2008144353 A JP2008144353 A JP 2008144353A JP 2008144353 A JP2008144353 A JP 2008144353A JP 2009290169 A5 JP2009290169 A5 JP 2009290169A5
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- manufacturing
- excitation
- etching solution
- vibration state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- 238000004519 manufacturing process Methods 0.000 claims 19
- 238000000034 method Methods 0.000 claims 11
- 230000005284 excitation Effects 0.000 claims 8
- 238000005530 etching Methods 0.000 claims 7
- 239000000243 solution Substances 0.000 claims 6
- 238000001039 wet etching Methods 0.000 claims 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims 1
- 239000002253 acid Substances 0.000 claims 1
- 239000012670 alkaline solution Substances 0.000 claims 1
- 229910017604 nitric acid Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Claims (11)
前記ウェットエッチングを停止する第2の工程と、
を有する振動子の製造方法であって、
前記第1の工程と前記第2の工程との間に、前記エッチング液中の前記振動子を励振し、当該励振された前記振動子の振動状態を少なくとも1回検出する第3の工程を有することを特徴とする振動子の製造方法。 A first step of forming a vibrator on a substrate in an etching solution by wet etching;
A second step of stopping the wet etching;
A method of manufacturing a vibrator having
Between the first step and the second step, the excites the vibrator etching solution, a third detecting once even a vibration state of the excited by said transducer least without A method of manufacturing a vibrator comprising a step.
前記第3の工程では、前記振動子を励振する励振手段と、前記励振手段による前記振動子の振動状態を検出する検出手段と、を用いて、前記振動子の振動状態を検出し、
前記第2の工程では、前記振動子が目標の振動数で共振状態となったことを前記第3の工程において検出した時に前記ウェットエッチングを停止することを特徴とする振動子の製造方法。 A method for manufacturing the vibrator according to claim 1,
In the third step, using the excitation means for exciting the vibrator and the detection means for detecting the vibration state of the vibrator by the excitation means, the vibration state of the vibrator is detected,
In the second step, the wet etching is stopped when it is detected in the third step that the vibrator is in a resonance state at a target frequency.
前記励振の振動数は前記目標の振動数と一致し且つ一定であることを特徴とする振動子の製造方法。 A method for manufacturing the vibrator according to claim 1 or 2,
The method of manufacturing a vibrator, wherein the excitation frequency is equal to the target frequency and is constant.
前記励振の振動数は前記目標の振動数を含み且つ周期的に変化することを特徴とする振動子の製造方法。 A method for manufacturing the vibrator according to claim 1 or 2,
The method of manufacturing a vibrator, wherein the excitation frequency includes the target frequency and periodically changes.
前記励振のエネルギーは、前記エッチング液を媒体として前記振動子へ伝えることを特徴とする振動子の製造方法。 A method for manufacturing a vibrator according to any one of claims 1 to 4,
The method of manufacturing a vibrator, wherein the excitation energy is transmitted to the vibrator using the etching solution as a medium.
前記励振のエネルギーは、前記振動子を支持する支持部を媒体として前記振動子へ伝えることを特徴とする振動子の製造方法。 A method for manufacturing a vibrator according to any one of claims 1 to 4,
The method of manufacturing a vibrator, wherein the excitation energy is transmitted to the vibrator by using a support portion that supports the vibrator as a medium.
前記検出手段は光学的に前記振動子の振動状態を検出することを特徴とする振動子の製造方法。 A method for manufacturing a vibrator according to any one of claims 1 to 6,
The method for manufacturing a vibrator, wherein the detecting means optically detects a vibration state of the vibrator.
前記検出手段は前記エッチング液の振動を検出することを特徴とする振動子の製造方法。 A method for manufacturing a vibrator according to any one of claims 1 to 6,
The method for manufacturing a vibrator, wherein the detecting means detects vibration of the etching solution.
前記エッチング液として、アルカリ溶液を用いることを特徴とする振動子の製造方法。 A method for manufacturing a vibrator according to any one of claims 1 to 8,
A method of manufacturing a vibrator, wherein an alkaline solution is used as the etchant.
前記エッチング液として、フッ酸と硝酸とを含む混酸を用いることを特徴とする振動子の製造方法。 A method for manufacturing a vibrator according to any one of claims 1 to 8,
A method of manufacturing a vibrator, wherein a mixed acid containing hydrofluoric acid and nitric acid is used as the etchant.
被エッチング物を励振するための励振手段と、
前記励振手段により前記エッチング液中で励振される前記被エッチング物の振動状態を検出するための検出手段と、
を有することを特徴とするウェットエッチング装置。 An etching tank for holding an etching solution;
Excitation means for exciting the object to be etched;
Detection means for detecting a vibration state of the object to be etched excited in the etching solution by the excitation means;
A wet etching apparatus comprising:
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008144353A JP2009290169A (en) | 2008-06-02 | 2008-06-02 | Method for manufacturing oscillator |
| US12/475,182 US20090294405A1 (en) | 2008-06-02 | 2009-05-29 | Methods of producing oscillator and apparatuses for producing oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008144353A JP2009290169A (en) | 2008-06-02 | 2008-06-02 | Method for manufacturing oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009290169A JP2009290169A (en) | 2009-12-10 |
| JP2009290169A5 true JP2009290169A5 (en) | 2011-07-21 |
Family
ID=41378482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008144353A Withdrawn JP2009290169A (en) | 2008-06-02 | 2008-06-02 | Method for manufacturing oscillator |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20090294405A1 (en) |
| JP (1) | JP2009290169A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101233687B1 (en) * | 2010-10-28 | 2013-02-15 | 삼성디스플레이 주식회사 | Apparatus of etching a glass substrate |
| JP6185744B2 (en) * | 2013-04-25 | 2017-08-23 | シチズンファインデバイス株式会社 | Manufacturing method of tuning fork crystal unit |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6831765B2 (en) * | 2001-02-22 | 2004-12-14 | Canon Kabushiki Kaisha | Tiltable-body apparatus, and method of fabricating the same |
| US6803843B2 (en) * | 2001-02-22 | 2004-10-12 | Canon Kabushiki Kaisha | Movable-body apparatus, optical deflector, and method of fabricating the same |
| US6900918B2 (en) * | 2002-07-08 | 2005-05-31 | Texas Instruments Incorporated | Torsionally hinged devices with support anchors |
-
2008
- 2008-06-02 JP JP2008144353A patent/JP2009290169A/en not_active Withdrawn
-
2009
- 2009-05-29 US US12/475,182 patent/US20090294405A1/en not_active Abandoned
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