JP2009277933A - High-pressure water-jet cleaning device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high-pressure water-jet cleaning device which can securely cope with faster cleaning, and has its vibrations suppressed during cleaning and attains uniform and efficient cleaning. <P>SOLUTION: In the high-pressure water-jet cleaning device, a holder 30 provided with a high-pressure water jet nozzle (n) is provided at the top of a casing 33, a support shaft 27 which is rotatably supported is provided in the casing 33, and an eccentric portion whose axis is eccentric is formed at the tip side of the support shaft 27, and bearings 26 whose bearing surfaces are oscillatable are provided to the eccentric portion and the support shaft 27. The base side of the holder 30 is supported by the bearings 26, and a high-pressure water tube 31 is coupled to the holder 30, wherein the high-pressure water-jet nozzle (n) has three high-pressure water-jet holes nk. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention mainly uses high-pressure water for cleaning flat plate-like objects such as FPDs (flat panel displays) such as liquid crystal panels, plasma panels, and organic EL (electric luminance) panels, and glass and semiconductor wafers by jetting high-pressure cleaning liquid. More specifically, for example, in a manufacturing process of a liquid crystal display or a semiconductor wafer, it causes a decrease in yield such as fine particles on the glass substrate surface, organic matter, and metal impurities. The present invention relates to a high-pressure water jet cleaning apparatus that removes pollutants by injecting high-pressure water (high-pressure cleaning liquid), especially for high speed operation.

  As this type of high-pressure water jet cleaning device, high-pressure water sprayed from the cleaning device while rotating (circularly moving) or conically swinging a holder with a plurality of high-pressure water jet nozzles arranged side by side is the object to be cleaned. An apparatus has been proposed that precisely cleans one surface of an object to be cleaned with high-pressure water sprayed from a spray nozzle by moving it in an orthogonal direction while being vertically applied to the surface (for example, see Patent Document 1). This apparatus is provided with a converging nozzle that jets high-pressure water in a straight line.

  As for the nozzle used in the conventional general cleaning apparatus, there are many cone types in which cleaning water (also referred to as a jet) to be sprayed spreads in a conical shape, or a fan type that spreads in a fan shape. With these nozzles, since the jet itself diffuses and is wide, it is not necessary to make a circular motion or swing like the cleaning device of Patent Document 1.

  On the other hand, the cleaning device of Patent Document 1 uses a converging nozzle that jets cleaning water in a straight line that does not diffuse cleaning water. It is very high, 100 times to 1000 times compared to the mold. Therefore, the peeling / cleaning effect on the cleaning surface is very excellent. However, the region (area) where the cleaning water hits the object to be cleaned is extremely narrow, and only the local portion can be cleaned. In other words, the areas that are not exposed to the washing water are wide, and those areas are not cleaned.

  Therefore, in the above cleaning apparatus, a plurality of spray nozzles are mounted on a holder, swirled, and circularly moved to ensure a cleaning region. That is, FIG. 4-a and FIG. 4-b show the trajectory of the cleaning water by the above-described cleaning device, specifically, an example of the cleaning trajectory of the high-pressure water in the cleaning device having six nozzles attached to the holder. FIG. 4-a is a trajectory diagram showing a state where the holder is turned and moved circularly at a fixed position, and FIG. 4-b is a state where the holder is moved circularly at 400 rpm and the cleaning device is moved relatively at 4 m / min. FIG. As shown in the trajectory diagrams of FIGS. 4-a and 4-b, there are very few places where the cleaning water hits.

  In order to solve this problem, FIGS. 5-a and 5-b show cleaning water trajectory diagrams in which the circular movement speed of the holder is increased. FIG. 5-a shows the holder with the relative movement speed maintained at 4 m / min. FIG. 5B shows a state in which the rotation speed of the holder is increased to 1200 rpm while keeping the relative movement speed at 4 m / min. In this way, the cleaning area becomes denser as the rotational speed of the rotating circle of the holder is increased.

  In addition to increasing the rotational speed of the holder in a circular motion, increasing the number of nozzles mounted on the holder increases the density (cleaning density) of the cleaning region. -A indicates the cleaning trajectory in a state where the relative movement speed is 4 m / min, the holder turning (circular movement) speed is maintained at 400 rpm, and the number of nozzles is increased from 6 to 12, and FIG. The cleaning trajectories in the state are shown. However, increasing the number of nozzles increases weight and vibration.

In the prior art related to other high pressure water jet cleaning devices, a high pressure water jet nozzle head having a plurality of nozzles for injecting high pressure water onto a material to be cleaned that is mounted on a cleaning conveyor and transferred into a cleaning chamber is located above the cleaning conveyor. The cleaning device is configured to spray high-pressure water from each nozzle while the high-pressure water spray nozzle head rotates, and a plurality of high-pressure water spray nozzle heads are provided, There has been proposed a cleaning apparatus having a structure in which motors that are independently driven to rotate are installed at positions separated from the cleaning chamber (see, for example, Patent Document 2).
Japanese Patent No. 2705719 JP 2002-166235 A

  As described above, the higher the rotational speed at which the holder is rotated, the higher the cleaning density, while the vibration of the holder or the entire apparatus including the holder increases. That is, since this vibration acceleration increases with the square of the rotation speed, if the rotation speed is doubled, the vibration acceleration is quadrupled, and if the rotation speed is tripled, the vibration acceleration is nine times. For this reason, in the hand-held cleaning apparatus as described in Patent Document 1, it is difficult to continue the cleaning operation with the operator holding it by hand.

  FIG. 7 shows a case where the number of nozzles 72 attached to the holder 71 is increased from 6 (FIG. 7A) to 12 (FIG. 7B) or 18 (FIG. 7C). As can be seen from these drawings, when the number of nozzles is increased, not only the entire length of the holder 71 is extended, but also the outer diameter of the holder 71 is greatly increased, which is inaccurate as a hand-held cleaning device.

  The present invention has been made in view of the above points, and is a high-pressure water jet cleaning device that can reliably cope with high-speed cleaning, can suppress vibration of the device during cleaning, and enables uniform and efficient cleaning. The issue is to provide.

  In order to solve the above-described problems, a high-pressure water jet cleaning apparatus according to the present invention (Claim 1) has a plurality of high-pressure water jet nozzles directed to a cleaning object and arranged in a common holder at intervals. The high-pressure water jet for cleaning by jetting high-pressure water in a straight line from the high-pressure water jet holes to the object to be cleaned while integrally rotating the high-pressure water jet nozzles through the holder. In the cleaning apparatus, the high-pressure water spray nozzle is provided with a plurality of high-pressure water spray holes.

  According to the high pressure water jet cleaning apparatus according to claim 1 having the above-described configuration, the plurality of high pressure water jet nozzles integrally rotate and circularly move through the holder, and at the same time, two or more high pressure water provided in each nozzle. Since high-pressure water is injected from the water injection holes, high-pressure water can be injected uniformly and at a high cleaning density on the object to be cleaned without increasing the size of the nozzle, and high cleaning strength can be obtained. Uneven cleaning is less likely to occur. In addition, even if the moving speed of the object to be cleaned is increased 1.5 times to 2 times or more in order to increase the speed of cleaning, the rotation speed of the nozzle (that is, the holder) is not kept constant or greatly increased. A cleaning effect with a high cleaning density is obtained. Therefore, the vibration acceleration of the holder or the apparatus including the holder is not increased, and the vibration is suppressed.

  The high-pressure water jet cleaning apparatus according to the present invention (Claim 2) is the high-pressure water jet cleaning apparatus according to Claim 1, comprising a holder provided with a high-pressure water spray nozzle at the tip of the casing, and rotatable inside the casing. A support shaft supported on the support shaft, an eccentric portion with a shifted center is formed on the tip end side of the support shaft, and a bearing having a swingable bearing surface is provided on the eccentric portion and the support shaft. A high-pressure water jet cleaning apparatus that rotatably supports a base side of a holder and has a high-pressure water tube connected to the holder, wherein the high-pressure water jet nozzle is provided with a plurality of high-pressure water jet holes. .

  According to the high pressure water jet cleaning apparatus according to claim 2 having the above-described configuration, a plurality of high pressure water jet nozzles are integrally swung through a holder and circularly moved. High pressure water is ejected from the high pressure water injection holes), so that high pressure water can be sprayed uniformly and at a high cleaning density on the object to be cleaned without enlarging the size of the nozzle. Strength is obtained and cleaning unevenness is less likely to occur. In addition, even if the moving speed of the object to be cleaned is increased 1.5 times to 2 times or more in order to increase the speed of cleaning, the rotation speed of the nozzle (that is, the holder) is not kept constant or greatly increased. A cleaning effect with a high cleaning density is obtained. Therefore, the vibration acceleration of the holder or the apparatus including the holder is not increased, and the vibration is suppressed.

  The high-pressure water jet cleaning apparatus according to the present invention (Claim 3) is the high-pressure water jet cleaning apparatus according to Claim 1, wherein the cleaning object main body is moved at a constant speed with respect to the cleaning apparatus main body. A high-pressure water jet cleaning apparatus for cleaning by jetting high-pressure water from a water jet nozzle onto the object to be cleaned, and a plurality of surfaces on a common holder support member having a length equal to or longer than the length across the object to be cleaned The high-pressure water jet nozzles are arranged toward the object to be cleaned through the holder and spaced apart from each other, and both extended end portions of the holder support member are respectively placed on the one surface or the extension surface of the holder support member. The holder support member rotates circularly by rotating the eccentric rotation shaft with a driving device while supporting the eccentric rotation shaft and the bearing portion so as to be able to rotate eccentrically. Each high-pressure water spray nozzle is configured to have a plurality of spray holes, supply high-pressure water to each high-pressure water spray nozzle, and move circularly with respect to the object to be cleaned that moves at a constant speed The high-pressure water is jetted from the plurality of jet holes.

  According to the high pressure water jet cleaning apparatus according to claim 3 having the above-described configuration, a plurality of high pressure water jet nozzles provided with a plurality (two or more) of high pressure water jet holes are arranged on one surface of a common holder support member. Since the high-pressure water is sprayed onto the object to be cleaned while swirling circular motion (turning so as to draw a perfect circle with an eccentric amount (radius) r about a certain center position), for example, a plurality of nozzles are mounted on the holder. By spraying high-pressure water in a straight line from two or more spray holes of each nozzle arranged at equal intervals through the nozzle, it is possible to perform uniform cleaning with a constant cleaning strength for the object to be cleaned Therefore, even when a member such as a glass substrate that requires uniform cleaning is cleaned, a constant cleaning power can be maintained and there is no possibility of damaging the object to be cleaned. Further, similarly to the effect of the cleaning apparatus according to the first aspect, even if the cleaning operation is speeded up, it is not necessary to increase the rotation speed (circular motion) of the nozzle or the holder support member, and a high cleaning density can be obtained. At the same time, generation of unnecessary vibration can be prevented. Further, since the eccentric rotation drive unit can be disposed outside the cleaning area where the plurality of nozzles are located, there is no member that generates dust in the cleaning area, and thus cleaning with a high degree of cleanliness is possible. For this reason, it is possible to easily cope with cleaning that requires extremely high cleanliness (10 to 100 or less) such as FPD and semiconductor wafer. In addition, the structure is simple, the assembly of the device is easy, the piping and wiring work is not time-consuming, and the cost is lower than the structure in which each nozzle is individually rotated (rotating circular motion) by the drive device and cleaned. You can go down.

  The high-pressure water jet cleaning apparatus according to the present invention (Claim 4) is the high-pressure water jet cleaning apparatus according to Claim 1, wherein the cleaning object main body is moved at a constant speed with respect to the cleaning apparatus main body. A high-pressure water jet cleaning apparatus for cleaning by jetting high-pressure water from both sides of the cleaning target from a water jet nozzle, and having a length that is greater than or equal to the length across the cleaning target, the thickness direction of the apparatus main body A plurality of high-pressure water spray nozzles are arranged opposite to each other through a holder on opposite surfaces of a pair of holder support members arranged in parallel across the central axis of the holder, and support each holder. Both end portions of the member are integrally coupled, and connecting plates are extended from both end connecting portions to both sides along the central axis of the apparatus main body, and the end portions of the connecting plates are orthogonal to one surface thereof. Eccentricity The holder support member is configured to rotate in a circular motion by rotating the eccentric rotation shaft with a driving device while supporting the eccentric rotation shaft via a shaft and a bearing portion. High-pressure water is supplied to each of the high-pressure water injection nozzles, and the high-pressure water is supplied from the plurality of injection holes of each of the high-pressure water injection nozzles that make a circular motion with respect to both surfaces of the object to be cleaned that moves at a constant speed. It is characterized by spraying.

  According to the high-pressure water jet cleaning apparatus according to claim 4 having the above-described configuration, the same effect as that of the high-pressure water jet cleaning apparatus according to claim 4 described above can be achieved, and both surfaces of the cleaning object can be simultaneously applied. In addition to being able to be cleaned, the cleaning device main body is balanced across the central axis.

  As described in claim 5, in the high-pressure water injection device according to any one of claims 2 to 4, the holder is provided with three high-pressure water injection nozzles, and a plurality of high-pressure water provided in each high-pressure water injection nozzle It is preferable to align the direction of the injection holes in a certain direction.

  According to the high pressure water jet cleaning apparatus of the fifth aspect, the outer diameter (for example, about 5 mm) of each of the high pressure water jet nozzles is equal to or slightly increased (for example, about 1 mm) from one nozzle. As a result, it is possible to obtain almost the same effect as that in which the number of nozzles is increased by a factor of three particularly with respect to the cleaning density, and the structure is not complicated and the weight is not increased. Therefore, it is possible to cope with an increase in the moving speed of the object to be cleaned without increasing the rotation speed of the nozzle (holder). Furthermore, by aligning the direction of the injection holes in a certain direction, the trajectory of the cleaning water is not blurred and cleaning can be performed efficiently.

  As described in claim 6, in the high-pressure water injection device according to any one of claims 1 to 5, the three high-pressure water injection nozzles can be provided with three injection holes at substantially equal intervals.

  According to the high pressure water jet cleaning apparatus of the sixth aspect, similarly to the cleaning apparatus of the fifth aspect, the outer diameter of each high pressure water injection nozzle (for example, about 5 mm) is the same as or slightly smaller than that of one nozzle ( (For example, about 1 mm) The number of nozzles can be increased to three simply by expanding the nozzle. As a result, the effect is almost the same as that of increasing the number of nozzles by three times with respect to the cleaning density, and the structure is not complicated and the weight is increased. There is nothing to do. Therefore, it is possible to cope with an increase in the moving speed of the object to be cleaned without increasing the rotation speed of the nozzle (holder).

  As described in claim 7, in the high-pressure water jet cleaning apparatus according to any one of claims 1 to 5, a part of the circular shape of the nozzle body provided with three high-pressure water jet holes is linearly cut, A hole corresponding to the shape of the nozzle body is formed in the holder and the nozzle body is embedded in the holder, or a hole corresponding to the shape of the nozzle body is formed in the holder, and the inner periphery of the hole is A part is provided with an inward protruding part, and a concave part corresponding to the protruding part is formed in a part of the periphery of the nozzle body, and the concave part of the nozzle body is fitted into the protruding part of the holder and embedded. And

  According to the high-pressure water jet cleaning apparatus of the seventh aspect, the direction of the high-pressure water injection holes can be surely aligned in a certain direction, and the high-pressure water trajectory is not blurred, and the cleaning can be performed efficiently. Further, as in the cleaning device of claim 5, particularly the same effect as that obtained by increasing the number of nozzles by three times with respect to the cleaning density can be obtained, and the structure is not complicated and the weight is not increased. Therefore, it is possible to cope with an increase in the moving speed of the object to be cleaned without increasing the rotation speed of the nozzle (holder).

Since the high-pressure water jet cleaning apparatus according to the present invention has the above-described configuration, the following excellent effects can be obtained. That is,
Since the plurality of high-pressure water injection nozzles rotate and circularly move integrally through the holder, high-pressure water is injected from a plurality of (two or more) high-pressure water injection holes provided in each nozzle. Therefore, high-pressure water can be sprayed uniformly on the object to be cleaned while maintaining a high cleaning density, so that high cleaning strength can be obtained and cleaning unevenness is unlikely to occur. Moreover, even if the moving speed of the object to be cleaned is increased to 1.5 times to 2 times or more in order to increase the speed of cleaning, the rotation speed of the high-pressure water spray nozzle (holder) is set to 1500 rpm to 2000 rpm or less, for example. Therefore, it is possible to perform uniform cleaning with a high cleaning density and a strong cleaning force, vibrations are suppressed without increasing the vibration acceleration of the holder or the apparatus including the holder, and a cleaning effect with a high cleaning density is obtained.

  Embodiments of the high-pressure water jet cleaning apparatus according to the present invention will be described below.

  FIG. 1 is a side sectional view and a direction A arrow view showing a first embodiment of the high pressure water jet cleaning apparatus of the present invention. Here, a first embodiment of the high-pressure water jet cleaning apparatus according to the present invention will be described with reference to FIG.

  As shown in FIG. 1, the high-pressure water jet cleaning apparatus 1 of the present embodiment uses a mechanism of a drive motor 23 and bevel gears 34 and 35, and has a configuration in which the high-pressure water jet nozzle n is rotated conically with an eccentric structure. In addition, an opening / closing valve 32 that shuts off the high-pressure water supplied to the high-pressure water injection nozzle n is provided in the grip portion 33 a of the casing 33. The casing 33 of the cleaning device 1 is formed in a circular tube shape, and a gripping portion 33a is integrally formed at the rear lower end in the front-rear direction. A drive motor 23 is provided in the gripping portion 33 a, a drive side bevel gear 34 is provided on the upper side of the drive motor 23, and a follower that meshes with the drive side bevel gear 34 at a substantially central portion in the axial direction of the casing 33. A side bevel gear 35 is provided sideways. A support shaft 27 having a high pressure water passage formed in the shaft center is coupled to the shaft center of the driven bevel gear 35. The support shaft 27 is rotatably supported by a bearing 26 provided on the casing 33 side.

  Further, a support shaft 27 is supported by a self-aligning ball bearing 29 provided on a rotor member 28 having an eccentric center between the distal end side and the proximal end side, and the holder 30 of the high-pressure water injection nozzle n is provided with this eccentricity. It is inclined according to the amount. Therefore, the holder 30 provided with the high-pressure water spray nozzle n is configured to move in a conical shape as the support shaft 27 rotates. In addition, a high pressure water tube 31 is connected to the rear end of the support shaft 27, which is a substantially starting point of the holder 30, which moves in a conical shape, via a high pressure water joint 31 a, and the high pressure water tube 31 is spiral in the casing 33. In this spiral portion, the displacement transmitted from the support shaft 27 is absorbed. An opening / closing valve 32 that shuts off the passage of the high-pressure water tube 31 is provided at the lower part of the gripping part 33 a that integrally extends downward from the lower end of the rear part of the casing 33.

  When the on-off valve 32 is closed in a state where the injection lever 36 provided on the gripping portion 33a is released, the spool 32b is always pressed upward in the drawing by the force of the spring 32a. In this state, the spool 32b The poppet 32d provided at the tip is located under the high-pressure water passage 32c and is in a state of blocking the passage. When the injection lever 36 is pressed against the force of the spring 32a from this state, the spool 32b moves downward in the figure, and in this state, the poppet 32d provided at the tip of the spool 32b is detached from the high-pressure water passage 32c. The high-pressure water is supplied from the high-pressure water tube 31 to the high-pressure water injection nozzle n through the high-pressure water passage 32c. As described above, when the operator operates the injection lever 36 of the cleaning device 1, it is possible to perform an efficient operation while operating the injection of high-pressure water according to the work state or the work place.

  The front end surface 30a of the holder 30 has a circular arc cross section and forms a part of a spherical surface. Six high-pressure water injection nozzles n are embedded at equal intervals in the circumferential direction of the circular front end surface 30a when viewed from the front. In each injection nozzle n, three high-pressure water injection holes nk are formed at equal intervals, and the high-pressure water passage of the support shaft 27 is connected to the water supply portion 30 b at the base end of the holder 30. High-pressure water passages 30c are formed radially from the water supply part 30b in the holder 30 toward the respective injection nozzles n.

  A cleaning aspect of the high-pressure water jet cleaning apparatus 1 having the above configuration will be described.

  In FIG. 1, when the operator operates the injection lever 36 of the cleaning device 1, the cleaning operation is performed while injecting the high-pressure water toward the object to be cleaned with the six high-pressure water injection nozzles n. At this time, the six high-pressure water injection nozzles n swing with the holder 30 eccentrically in the radial direction while rotating at, for example, 800 rpm. Moreover, since the high-pressure water is ejected from the three high-pressure water injection holes nk of each high-pressure water injection nozzle n, it is possible to perform uniform cleaning with high cleaning density and strong cleaning power.

  2A is a front view and a cross-sectional view showing a high-pressure water injection nozzle n used in a conventional cleaning apparatus, and FIGS. 2B and 2C are cleaning apparatuses 1 according to an embodiment of the present invention. It is the front view and sectional drawing which show an example of the high pressure water injection nozzle n used for. That is, in the conventional cleaning apparatus, as shown in FIG. 2 (a), an injection hole n4 is formed at the center position of a gemstone such as diamond or sapphire in the tip hole n2 provided in the center of the stainless steel nozzle body n1. The drilled nozzle tip n3 is embedded, and high pressure water is jetted from one high pressure water jet hole nk of the nozzle body n1. Note that n5 is a straight hole, and n6 is a tapered hole whose diameter is increased conically toward the tip.

  On the other hand, in the cleaning apparatus 1 of the present invention, as shown in FIGS. 2B and 2C, three tip holes n2 are provided at equal intervals in the circumferential direction around the center of the stainless steel nozzle body n1. A nozzle tip n3 having an injection hole n4 formed in the center position of a gemstone such as diamond or sapphire is embedded in each tip hole n2, and high pressure water is injected from the three high pressure water injection holes nk of the nozzle body n1. . In particular, in the high-pressure water injection nozzle n shown in FIG. 2C, the tip hole n2, the straight hole n5, and the tapered hole n6 are formed so as to radially expand toward the front with respect to the central axis s of the nozzle body n1. The interval increases as the high-pressure water sprayed from the three high-pressure water spray holes nk of the nozzle body n1 is separated. For this reason, the high-pressure water from each high-pressure water injection hole n4 (nk) strikes the object to be cleaned in a state where the high-pressure water spreads larger than the interval between the tip holes n2. 8A and 8B show the trajectory of the cleaning water by the high pressure water injection nozzle n in FIG. 2C, and FIGS. 10A and 10B show the high pressure water injection nozzle n in FIG. The high-pressure water injection nozzle n in FIG. 2 (c) is recognized to be superior in uniformity with no overlap of the cleaning water, and three nozzle tips n3 are provided. There is an advantage that the outer diameter of the nozzle body n1 to be embedded can be reduced (about 5 mm to 6 mm).

  In addition to the case where the number of the high-pressure water injection holes nk provided in one high-pressure water injection nozzle n is three, the arrangement (direction) of the high-pressure water injection holes nk is not random but constant. It is desirable to align in the direction. On the other hand, FIG. 9 shows the locus of high-pressure water when the number of high-pressure water injection holes nk is three and is random, but in this case, the locus of high-pressure water partially overlaps. On the other hand, FIG. 8 shows the trajectory of the high-pressure water when the number of the high-pressure water injection holes nk is three and is aligned in a certain direction. In this case, the trajectories of the high-pressure water do not overlap.

  Thus, in order to align the three high-pressure water injection holes nk in a certain direction, the nozzle body n1 in which the three nozzle tips n4 (high-pressure water injection holes nk) are embedded is as shown in FIG. When viewed from the front, a part of the circle is cut into a straight line, and a hole n7 corresponding to this shape is formed in the holder n8 as shown in FIG. As shown in FIG. 3B, the nozzle body n1 is embedded in the holder n8, or the nozzle body n1 is formed with a pin hole n9 in a circular part when viewed from the front as shown in FIG. After forming the hole n10 corresponding to this shape in the holder n8 as shown in (b-2), the nozzle body n1 is embedded in the holder n8 as shown in FIG. 3 (b-3) and the pin hole n9 is pinned. the nozzle body n1 is positioned with respect to the holder n8 Rice, it is possible to align the three directions of the high-pressure water jetting holes nk constant.

  The nozzle body n1 in which the three three high-pressure water injection holes nk (nozzle tips n4) described above are embedded is also applied to the high-pressure water injection cleaning apparatuses according to second and third embodiments of the present invention described later. Is done.

  Next, a second embodiment of the high-pressure water jet cleaning apparatus according to the present invention will be described with reference to FIG. FIG. 11 (a) is a front view showing a part of the high-pressure water jet cleaning apparatus of the present invention in a cross-sectional view, FIG. 11 (b) is a cross-sectional view taken along line AA of FIG. 11 (a), FIG.11 (c) is CC arrow line view of Fig.11 (a). FIG. 12 is a plan view showing a second embodiment of the high-pressure water jet cleaning apparatus of the present invention, FIG. 13 is a bottom view showing the first embodiment of the high-pressure water jet cleaning apparatus of the present invention, and FIG. FIG. 14B is an enlarged front view showing the left support base and its vicinity toward FIG. 14A, FIG. 14B is an explanatory diagram schematically showing the rotational shaft eccentric part and the upper and lower rotational shafts, and FIG. FIG. 14C is a plan view of the rotating shaft shown in FIG. FIG. 15 is a plan view of FIG. 16 is an enlarged central longitudinal sectional view showing a part of the main body of the cleaning apparatus in FIG. 11A, FIG. 17 is a sectional view taken along line AA in FIG. 16, and FIG. 18 is a sectional view taken along line CC in FIG. .

  As shown in these drawings, the high-pressure water jet cleaning apparatus 1 ′ of the present embodiment includes support bases 3 and 3 on both sides of the machine frame 2. Each support base 3 includes a column 3a, and the upper portions of the columns 3a on both sides are coupled by a cross beam 18. The cleaning device main body 5 is rotatably supported by bolts 3d and 3e via a substantially U-shaped bracket 3b and a support plate 3c as viewed from the side on the upper front of the column 3a. It is supported straddling between the support bases 3. In addition, a pair of left and right downwardly recessed protective frames 19 are attached so as to surround the upper portion of the cleaning apparatus main body 5 with an interval in the longitudinal direction of the cross beam 18.

  As shown in FIG. 17, the cleaning device main body 5 includes a hollow holder support member (hereinafter, referred to as a hollow support member) 6 made of a rectangular tube-shaped flat bar, and a mounting bracket on the lower surface of the hollow support member 6. Nozzle head portion 7 having a plurality of high-pressure water jet nozzles 7n arranged in a staggered manner in two rows at equal intervals in a plate-like holder 7nh is attached to the mounting bracket 8 with a bolt 8a facing downward. Is fixed. Each nozzle 7n has three high-pressure water injection holes 7nk formed at equal intervals on the tip (lower end) surface thereof as shown in FIGS. 1 and 17, and the direction of each high-pressure water injection hole 7nk is described later. Are aligned vertically (at right angles). The holder 7nh and the nozzle head portion 7 are provided with high-pressure water supply passages 9a and 9b along the longitudinal direction. As shown in FIG. 16, a spiral metal pipe 10 having flexibility from the high-pressure water tank 10a. Is connected to one end of the high-pressure water supply path 9b of the holder 7nh, and from the high-pressure water supply path 9b to the three high-pressure water injection holes 7nk of each nozzle 7n through the high-pressure water supply path 9a of the nozzle head section 7. Water is supplied, and high-pressure water is sprayed in a straight line from the three high-pressure water spray holes 7nk of each nozzle 7n. The outer diameter of the nozzle 7n and the diameter of the high-pressure water injection hole 7nk are not limited, but in this embodiment, the outer diameter of the nozzle 7n is 6 mm and the diameter of the high-pressure water injection hole 7nk is 0.15 mm to 0. 3 mm. The metal high-pressure water tube 10 does not have to be spiral as long as it has flexibility. For example, the metal high-pressure water tube 10 may be linear so that the entire high-pressure water tube 10 is curved.

  The high-pressure water jet cleaning apparatus according to the second embodiment of the present invention is configured as described above, and the mode of the cleaning operation will be described below.

  First, in the cleaning chamber, when the cleaning object X is, for example, a glass substrate, it is placed on the roller conveyor 40 and conveyed at a constant speed from the carry-in place to the lower side of the cleaning device body 5. In this state, driving of the left and right servo motors 17 is started, the rotation shaft 15 rotates, and the rotation of the rotation shaft 15 causes the cylindrical rotation shaft eccentric portion 14 to rotate eccentrically, via the bearing housing portion 12. The cleaning device main body 5 performs a circular motion. Subsequently, a high-pressure cleaning liquid is supplied from the high-pressure water tank 10 a to each nozzle 7 n through the flexible metal high-pressure water tube 10 through the high-pressure water supply path 9 b and the high-pressure water supply path 9 a of the nozzle head portion 7. . Each nozzle 7n is swung so as to draw a perfect circle, and high-pressure cleaning liquid is ejected linearly from each high-pressure water ejection hole 7nk. On the other hand, the cleaning object X is conveyed at a constant speed below the cleaning apparatus body 5. In this state, a high-pressure cleaning liquid is jetted onto one surface of the cleaning object X, and a cleaning liquid trajectory as shown in FIG. 19B is drawn to perform a cleaning operation with no variation in cleaning strength. That is, as shown in FIG. 19A, in this embodiment, the nozzles 7n are arranged in two rows in a zigzag manner so as to be equidistant from each other in the holder 7nh so as to maintain uniformity over the entire cleaning surface. Yes. In addition, three high-pressure water injection holes 7nk are formed at equal intervals on the tip surface of each nozzle 7n. Then, in this state, each nozzle 7n is jetted from each high-pressure water injection hole 7nk while rotating so as to draw a true circle, so that high-pressure water (ultra pure water, chemical solution, etc.) is injected linearly, so that FIG. As shown in Fig. 2, the cleaning water trajectory is drawn, and the cleaning operation without variation in the cleaning strength is achieved.

  In the high-pressure water jet cleaning device 1 of the present embodiment, the cleaning device main body 5 (including the nozzle head portion 7 and the hollow support member 6) rotates and circularly moves (oscillates and rotates) so as to draw a perfect circle. To balance the entire high-pressure water jet cleaning apparatus 1 including the balance of the cleaning apparatus body 5 itself including the hollow support member 6 and the balance with respect to the both-side support base 3 when the cleaning apparatus body 5 including the hollow support member 6 rotates. is important. Therefore, the mass (and moment) of the nozzle portion 7 (and the high-pressure water supply passages 9a and 9b) is balanced with the longitudinal center axis M passing through the intermediate position in the thickness direction of the hollow support member 6 as the center. Therefore, a flat bar-shaped counterweight 21 is attached to a plurality of brackets 22 projecting from the upper surface of the hollow support member 6 at regular intervals with bolts 22a.

  Further, semi-disc-like counterweights 25 are attached to the upper and lower rotary shafts 15 with the rotary shaft eccentric portion 14 interposed therebetween so as to cancel the moment generated when the cleaning device body 5 rotates. Yes. That is, the counterweight 25 is attached at a position symmetrical to the swinging rotation direction of the cleaning apparatus body 5 with the central axis S of the rotation shaft 15 in between, and the counterweight 25 is the same for the left and right rotation shafts 15. Arranged in the direction. As a result, when the rotating shaft 15 rotates, the counterweight 25 is displaced to a position symmetrical to the swiveling direction of the cleaning apparatus body 5 across the central axis S, and the moment to be generated when the cleaning apparatus body 5 rotates is swung. Counter the occurrence. Therefore, no unnecessary moment is generated in the entire high-pressure water jet cleaning apparatus 1 including the support tables 3 on both sides, and no vibration is generated.

  20 to 22 show a third embodiment of the high-pressure water jet cleaning apparatus according to the present invention, which will be described below. 20 is a front view showing a part of the high-pressure water jet cleaning apparatus according to the third embodiment of the present invention. FIG. 21 is a sectional view taken along the line BB in FIG. 20, and FIG. It is C sectional drawing.

As shown in these drawings, the high-pressure water jet cleaning apparatus 1 ″ of the present embodiment is different from the high-pressure water jet cleaning apparatus 1 ′ of the second embodiment in the following points.
The cleaning apparatus 1 ′ is configured to clean one surface (upper surface) of the cleaning object X, but the cleaning apparatus 1 ″ of the present embodiment is configured to simultaneously clean both surfaces of the cleaning object X. For this reason, A pair of hollow support members 6 in the shape of a rectangular tube constituting the cleaning device main body 5 ′ are arranged in parallel with each other at a predetermined interval in parallel with each other, and both sides of the upper and lower hollow support members 6 and 6 are arranged on a plate. The connecting plates 11 are integrally connected to each other, and the connecting plate 11 is integrally extended from an intermediate position in the vertical direction of each connecting member 20 to the side (outward).

  Each connecting plate 11 is provided with a circular or oval opening 11a to reduce the weight, and a ring-shaped bearing housing 12 is integrally connected to one end (outer end) of the opening 11a. A cylindrical rotating shaft eccentric portion 14 is rotatably arranged via a bearing 13. Further, the upper and lower rotary shafts 15 (FIG. 14) that are rotatably supported by the support base 3 via the bearing housing 16 are connected to the support base 3 via the bearing housing 16 so as to be eccentric from the center position of the rotary shaft eccentric portion 14, Each of the plurality of nozzles 7n is swung so as to draw a perfect circle by rotating and driving the cleaning apparatus body 5 in a swivel manner by being substantially synchronously driven by the servo motors 17, respectively.

  Nozzle head portions 7 in which nozzles 7n are arranged in two rows in a staggered manner at regular intervals are mounted on opposite surfaces of the upper and lower holder support members 6 and 6 via holders 7nh. In the case of this example, as shown in FIG. 20, the gap between the tip surfaces of the upper and lower nozzles 7 n that can be cleaned by passing the cleaning target X and spraying high-pressure water onto both surfaces of the cleaning target (not shown). t is provided.

  Other configurations are the same as those of the high-pressure water jet cleaning apparatus 1 ′ according to the second embodiment, and therefore, common members are denoted by the same reference numerals in the drawings and description thereof is omitted.

  Three examples of the high-pressure water jet cleaning apparatus according to the present invention have been described above. However, the present invention is not limited to these examples, and can be implemented as follows, for example.

  In the above embodiment, each nozzle 7n is provided with three high-pressure water injection holes 7nk. However, when the moving speed of the object x to be cleaned increases from, for example, 80 mm / sec to about 100 mm / sec, each nozzle 7n Even if the number of the high-pressure water injection holes 7nk is two, it can be sufficiently handled. If there are two high-pressure water injection holes 7nk, the outer diameter of the nozzle 7n can be reduced to about 5 mm.

  The high-pressure water jet cleaning apparatus 1 'or 1 "according to the present invention and the high-pressure water jet cleaning apparatus 1 according to the present invention can be combined to form a high-pressure water jet cleaning apparatus.

  The cleaning trajectory shown in FIG. 20 represents the case where the turning speed of each nozzle 7n is 1800 rpm and the moving speed of the cleaning target is 120 mm / second.

It is side view sectional drawing and A direction arrow directional view which show 1st Example of the high pressure water jet cleaning apparatus of this invention. 2A is a front view and a cross-sectional view showing a high-pressure water injection nozzle n used in a conventional cleaning apparatus, and FIG. 2B is a high-pressure water used in the cleaning apparatus 1 according to the embodiment of the present invention. The front view which shows an example of the injection nozzle n, FIG.2 (c) is the same sectional drawing. 3 (a-1) to 3 (a-3) are explanatory views showing an embodiment for aligning the three high-pressure water injection holes nk in a certain direction, and FIGS. 3 (b-1) to 3 (b). 3) is an explanatory view showing another embodiment. It is a locus map of washing water which shows the state where it swung in a fixed position and carried out circular motion in a washing device with which a high pressure water injection hole was equipped with one nozzle with a holder. Cleaning water trajectory diagram showing a state in which the holder in the cleaning device having six nozzles with one high-pressure water injection hole mounted on the holder is swung circularly at 400 rpm and the cleaning device is moving at a relative speed of 4 m / min. It is. This shows the trajectory of cleaning water in which the circular motion speed of the holder is increased in a cleaning device with six nozzles with one high-pressure water injection hole in the holder. The rotating circle of the holder is maintained at a relative moving speed of 4 m / min. It is a locus map of washing water which shows the state where the exercise speed was raised to 800 rpm. It is a locus diagram which shows the state which raised the turning circle | round | yen movement speed of the holder to 1200 rpm, maintaining a relative moving speed at 4 m / min in the washing | cleaning apparatus which equipped the holder with six nozzles with one high pressure water injection hole. This shows the trajectory of the cleaning water in which the circular motion speed of the holder is increased in a cleaning device equipped with 12 nozzles with one high-pressure water injection hole in the holder. The rotating circle of the holder is maintained at a relative moving speed of 4 m / min. It is a locus map of washing water which shows the state where the exercise speed was raised to 800 rpm. It is a locus | trajectory figure which shows the state which raised the turning circular motion speed of the holder to 1200 rpm, keeping a relative moving speed at 4 m / min in the washing | cleaning apparatus which mounted | wore the holder with 12 nozzles with a high pressure water injection hole. FIG. 7A is an explanatory view showing a case where the number of nozzles 72 mounted on the holder 71 is six, FIG. 7B is an explanatory view showing a case where the number of nozzles 72 is increased, and FIG. It is explanatory drawing which shows the case where it increases to a piece. FIG. 3 is a locus diagram of washing water in which the rotational speed of the circular rotation of the holder is 400 rpm at a fixed position by the high-pressure water injection nozzle n in FIG. FIG. 3 is a trajectory diagram of washing water in which the relative movement speed by the high-pressure water injection nozzle n in FIG. 2C is maintained at 4000 mm / min and the turning circular motion speed of the holder is set to 400 rpm. FIG. 5 is a locus diagram of cleaning water when six high-pressure water injection nozzles n have three high-pressure water injection holes nk and are random. FIG. 3 is a trajectory diagram of cleaning water in which the rotational speed of the circular rotation of the holder is 400 rpm at a fixed position by the high-pressure water injection nozzle n in FIG. FIG. 3 is a locus diagram of washing water in which the relative movement speed by the high-pressure water injection nozzle n in FIG. FIG. 11 (a) is a front view showing a part of the high-pressure water jet cleaning apparatus of the present invention in a cross-sectional view, FIG. 11 (b) is a cross-sectional view taken along line AA of FIG. 11 (a), FIG.11 (c) is CC arrow line view of Fig.11 (a). It is a top view which shows 2nd Example of the high pressure water jet cleaning apparatus of this invention. It is a bottom view which shows 2nd Example of the high pressure water jet cleaning apparatus of this invention. FIG. 14A is an enlarged front view showing the left side support base and its vicinity as viewed in FIG. 11, and FIG. 14B is an explanation schematically showing the rotational axis eccentric part and the upper and lower rotational axes. FIG. 14 (c) is a plan view of the rotating shaft shown in FIG. 14 (b). It is a top view of Fig.14 (a). It is a center longitudinal cross-sectional view which expands and shows a part of washing | cleaning apparatus main body of Fig.11 (a). It is AA sectional drawing of FIG. It is CC sectional drawing of FIG. FIG. 19A is a bottom view schematically showing a state in which the high-pressure water injection holes 7nk are arranged in two rows in a staggered manner so that the three nozzles 7n are arranged at equal intervals in the holder 7nh, FIG. FIG. 4 is a locus diagram of cleaning water by the nozzle head unit 7. It is the front view which represented a part in section showing the 3rd example of the high-pressure water jet washing device of the present invention. It is BB sectional drawing of FIG. It is CC sectional drawing of FIG.

Explanation of symbols

1. 1 ', 1 "high pressure water jet cleaning device 2. Machine frame 3. Support base 3a support column 3b bracket 3c support plate 3d-3e bolt 5. 5' cleaning device body 6. Holder support member (hollow support member)
7 Nozzle Head 7n Nozzle 7nh Nozzle Holder 7nk High Pressure Water Injection Hole 8 Mounting Bracket 8a Bolt 9a / 9b High Pressure Water Supply Channel 10 Metal Pipe (Metal High Pressure Water Tube)
10a high-pressure water tank 11 connecting plate 11a opening 12 bearing housing (bearing housing portion / bearing portion)
13 Bearing 14 Rotating shaft eccentric part 15 Rotating shaft (Eccentric rotating shaft)
16 Bearing housing 17 Servo motor 17a Rotation drive shaft 18 Horizontal girder 19 Protective frame 20 Connection member 21/25 Counterweight 22 Bracket 22a Bolt 23 Drive motor 26 Bearing 27 Support shaft 28 Rotor member 29 Self-aligning ball bearing 30 Holder 30a Holder 30 Tip surface 30b water supply part 30c high-pressure water passage 31 high-pressure water tube 31a high-pressure water joint 32 on-off valve 32a spring (spring)
32b spool 32c high pressure water passage 32d poppet 33 casing 33a gripping part 34/35 bevel gear 36 injection lever 40 roller conveyor n high pressure water injection nozzle n1 nozzle body n2 tip hole n3 nozzle tip n4 / nk high pressure water injection hole n5 straight hole n6 taper hole n7 hole n8 holder n9 pin hole n10 hole n11 pin

Claims (7)

A plurality of high-pressure water spray nozzles are directed to the object to be cleaned and arranged in a common holder with a space between each other, and the high-pressure water spray nozzles are swung circularly and integrally moved through the holder. In the high-pressure water jet cleaning device for cleaning by spraying high-pressure water from the injection holes in a straight line to the object to be cleaned,
A high-pressure water jet cleaning apparatus comprising a plurality of high-pressure water jet holes in the high-pressure water jet nozzle. The high-pressure water jet cleaning device is
A holder provided with a high-pressure water jet nozzle at the tip of the casing is provided, a support shaft that is rotatably supported is provided inside the casing, and an eccentric portion with a shifted center is formed on the tip side of the support shaft. A high pressure water jet cleaning apparatus in which a bearing having a swingable bearing surface is provided on the support portion and the support shaft, the base side of the holder is rotatably supported on the bearing, and a high pressure water tube is connected to the holder. The high-pressure water jet cleaning apparatus according to claim 1. The high-pressure water jet cleaning device injects high-pressure water from the high-pressure water jet nozzle of the cleaning device main body onto the cleaning target while cleaning the target to be cleaned with respect to the cleaning device main body. A cleaning device,
A plurality of high-pressure water spray nozzles are arranged on one surface of the common holder support member having a length that is greater than or equal to the length across the object to be cleaned, with the holder facing the object to be cleaned and spaced apart from each other.
Both ends of the holder support member are extended via an eccentric rotation shaft and a bearing portion orthogonal to the one surface or the extension surface of the holder support member, and the eccentric rotation shaft is driven by the drive device. The holder support member is configured to rotate in a circular motion by rotating at
Supplying high pressure water to each of the high pressure water injection nozzles and injecting high pressure water from a plurality of high pressure water injection holes of each of the high pressure water injection nozzles moving in a circular motion with respect to the cleaning object moving at a constant speed. 2. The high-pressure water jet cleaning apparatus according to claim 1. The high pressure water jet cleaning device is configured to inject and wash high pressure water from both sides of the cleaning target object from the high pressure water injection nozzle of the cleaning device main body while moving the cleaning target object at a constant speed with respect to the cleaning device main body. A water jet cleaning device,
A plurality of high-pressure water injection nozzles are provided on opposing surfaces of a pair of holder support members that have a length that is greater than or equal to the length across the object to be cleaned and that are arranged in parallel across a central axis in the thickness direction of the apparatus main body. Are arranged opposite each other through a holder and arranged with a space between each other,
Both ends of each holder support member are integrally coupled, and connecting plates are respectively extended from the both ends coupling portions to both sides along the central axis of the apparatus body,
The end of each connecting plate is supported so as to be eccentrically rotatable via an eccentric rotating shaft and a bearing portion orthogonal to one surface thereof, and the holder supporting member is turned by rotating the eccentric rotating shaft with a driving device. Configured to make a circular motion,
High pressure water is supplied to each of the high pressure water injection nozzles, and high pressure water is injected from a plurality of the injection holes of each of the high pressure water injection nozzles that make a circular motion with respect to both surfaces of the object to be cleaned that moves at a constant speed. The high-pressure water jet cleaning apparatus according to claim 1.   5. The high-pressure water injection nozzle is provided in the holder, and a plurality of high-pressure water injection holes provided in each high-pressure water injection nozzle are aligned in a certain direction. High pressure water injection device.   6. The high-pressure water jet cleaning apparatus according to claim 1, wherein three high-pressure water jet holes are provided at substantially equal intervals in each of the high-pressure water jet nozzles.   A part of the circular shape of the nozzle body provided with three high-pressure water injection holes is linearly cut, and a hole corresponding to the shape of the nozzle body is formed in the holder, and the nozzle body is embedded in the holder, or A hole corresponding to the shape of the nozzle body is formed in the holder, an inward protrusion is provided at a part of the inner periphery of the hole, and the recess corresponding to this protrusion is part of the periphery of the nozzle body. The high-pressure water jet cleaning apparatus according to any one of claims 1 to 5, wherein the concave portion of the nozzle main body is formed and embedded in a protruding portion of the holder.

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