JP2009277768A - Heat sink, and method of manufacturing the same - Google Patents
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この発明は、たとえば半導体素子などの電子部品からなる発熱体を冷却する液冷式冷却装置に用いられるヒートシンクおよびその製造方法に関する。 The present invention relates to a heat sink used in a liquid cooling type cooling device for cooling a heating element made of an electronic component such as a semiconductor element and a method for manufacturing the same.
この明細書において、「アルミニウム」という用語には、純アルミニウムの他にアルミニウム合金を含むものとする。 In this specification, the term “aluminum” includes aluminum alloys in addition to pure aluminum.
従来、発熱量の多い電子部品の冷却装置として、内部が冷却水通路となされたチューブ状のアルミニウム製ケーシングと、ケーシング内に配置されたアルミニウム製オフセットフィンと、ケーシングに接続された冷却水出入り口とを備えたものが知られている（特許文献１参照）。 Conventionally, as a cooling device for an electronic component having a large amount of heat generation, a tubular aluminum casing having a cooling water passage inside, an aluminum offset fin disposed in the casing, and a cooling water inlet / outlet connected to the casing The thing provided with (refer patent document 1) is known.
しかしながら、特許文献１記載の冷却装置においては、ケーシング内に冷却水が流されるので、アルミニウム製オフセットフィンのオフセット部が、端面から腐食するおそれがある。
この発明の目的は、上記問題を解決し、水を含んだ冷却液による腐食を防止しうるヒートシンクおよびその製造方法を提供することにある。 An object of the present invention is to provide a heat sink capable of solving the above-described problems and preventing corrosion by a coolant containing water, and a method for manufacturing the same.
本発明は、上記目的を達成するために以下の態様からなる。 In order to achieve the above object, the present invention comprises the following aspects.
1)水を含む冷却液が流れる冷却液通路に臨むように配置されるヒートシンクであって、
第１面が冷却液通路に臨まされるとともに、第２面が発熱体取付面となされる放熱基板と、放熱基板の第１面に、鍛造により相互に間隔をおくように一体に形成された複数のピン状放熱フィンとよりなり、放熱フィンが先端に向かって細くなった円すい状であり、放熱基板の第１面および全放熱フィンの表面が犠牲腐食層で覆われ、放熱フィンの外周面の勾配が３％以上であり、放熱フィンの高さが放熱フィンの基端部の直径の２〜１０倍であり、放熱基板の第１面と各放熱フィンの外周面との連接部に丸みが形成されるとともに、当該丸みの曲率半径が放熱基板の板厚の１／２以上であるヒートシンク。
1) A heat sink arranged so as to face a coolant passage through which a coolant containing water flows,
The first surface is exposed to the coolant passage and the second surface is integrally formed on the first surface of the heat radiating substrate and the heat radiating substrate mounting surface so as to be spaced apart from each other by forging. Consists of a plurality of pin-shaped heat dissipating fins, the heat dissipating fins have a conical shape that narrows toward the tip, the first surface of the heat dissipating substrate and the surface of all heat dissipating fins are covered with a sacrificial corrosion layer, and the outer peripheral surface of the heat dissipating fins The gradient of the heat dissipation fin is 2 to 10 times the diameter of the base end portion of the heat dissipation fin, and the connecting portion between the first surface of the heat dissipation substrate and the outer peripheral surface of each heat dissipation fin is rounded. And a heat sink in which the radius of curvature of the roundness is ½ or more of the thickness of the heat dissipation substrate.
2)放熱基板の板厚と放熱フィンの基端部の直径とが等しくなっている上記1)記載のヒートシンク。 2) The heat sink according to 1) above, wherein the thickness of the heat radiating substrate is equal to the diameter of the base end portion of the heat radiating fin.
3)水を含む冷却液が流れる冷却液通路に臨むように配置されるヒートシンクであって、
第１面が冷却液通路に臨まされるとともに、第２面が発熱体取付面となされる放熱基板と、放熱基板の第１面に、鍛造により相互に間隔をおくように一体に形成され、かつ放熱基板よりも短い複数の板状放熱フィンとよりなり、放熱フィンの横断面形状が先端に向かって細くなったテーパ状であるとともに、放熱フィンの両端面が先端に向かって長さ方向内方に傾斜しており、放熱基板の第１面および全放熱フィンの表面が犠牲腐食層で覆われ、放熱フィンの両側面および両端面の勾配が３％以上であり、放熱フィンの高さが放熱フィンの基端部の厚みの２〜５倍であり、放熱基板の第１面と各放熱フィンの両側面および両端面との連接部に丸みが形成されるとともに、当該丸みの曲率半径が放熱基板の板厚の１／２以上であるヒートシンク。
3) A heat sink arranged so as to face a coolant passage through which a coolant containing water flows,
The first surface is exposed to the coolant passage and the second surface is integrally formed on the first surface of the heat radiating substrate and the heat radiating substrate mounting surface so as to be spaced apart from each other by forging. And a plurality of plate-like radiating fins that are shorter than the radiating substrate, the radiating fin having a taper shape in which the cross-sectional shape of the radiating fin is narrowed toward the tip, and both end faces of the radiating fin are in the longitudinal direction toward the tip. The first surface of the heat radiating board and the surface of all the heat radiating fins are covered with a sacrificial corrosion layer, the gradients of both side surfaces and both end surfaces of the heat radiating fins are 3% or more, and the height of the heat radiating fins is It is 2 to 5 times the thickness of the base end portion of the radiating fin, and a roundness is formed at the connecting portion between the first surface of the radiating board and both side surfaces and both end surfaces of each radiating fin, and the curvature radius of the roundness is Heat sink that is 1/2 or more of the thickness of the heat dissipation board
4)上記1)記載のヒートシンクを製造する方法であって、
芯材の片面が、芯材の厚みの５〜２０％の厚みを有する犠牲腐食層で覆われたクラッド材を用意すること、
底部に向かって細くなったテーパ穴状である複数の放熱フィン形成用凹部を有する鍛造用型を用意し、放熱フィン形成用凹部の内周面の勾配を３％以上とするとともに、放熱フィン形成用凹部の深さを放熱フィン形成用凹部の開口端部の内径の２〜１０倍とし、鍛造用型の表面と各放熱フィン形成用凹部の内周面との連接部に丸みを形成するとともに、当該丸みの曲率半径を製造すべき放熱基板の板厚の１／２以上とすること、
ならびに前記クラッド材を１２０〜１５０℃または３５０〜４００℃に加熱した後、前記鍛造用型を用いて鍛造加工を施すことにより、片面が犠牲腐食層で覆われた放熱基板と、表面が犠牲腐食層で覆われるとともに先端に向かって細くなった円すい状である複数のピン状放熱フィンとを形成することを含むヒートシンクの製造方法。
4) A method for producing the heat sink according to 1) above,
Providing a clad material in which one side of the core material is covered with a sacrificial corrosion layer having a thickness of 5 to 20% of the thickness of the core material;
A forging die having a plurality of recesses for forming radiating fins that are tapered holes that narrow toward the bottom is prepared, and the gradient of the inner peripheral surface of the dents for forming radiating fins is set to 3% or more, and the radiating fins are formed. The depth of the concave portion is 2 to 10 times the inner diameter of the opening end of the radiating fin forming concave portion, and the connecting portion between the forging die surface and the inner peripheral surface of each radiating fin forming concave portion is rounded. , Making the radius of curvature of the round more than half of the thickness of the heat dissipation substrate to be manufactured,
In addition, after the clad material is heated to 120 to 150 ° C. or 350 to 400 ° C., forging is performed using the forging die, and a heat dissipation substrate having one surface covered with a sacrificial corrosion layer, and the surface is sacrificial corrosion. A method of manufacturing a heat sink, comprising: forming a plurality of pin-shaped heat dissipating fins that are covered with a layer and are tapered toward the tip.
5)製造すべき放熱基板の板厚と、放熱フィン形成用凹部の開口端部の内径とを等しくする上記4)記載のヒートシンクの製造方法。 5) The method for producing a heat sink according to 4) above, wherein the thickness of the heat radiation substrate to be produced is equal to the inner diameter of the opening end of the heat radiation fin forming recess.
6)上記3)記載のヒートシンクを製造する方法であって、
芯材の片面が、芯材の厚みの５〜２０％の厚みを有する犠牲腐食層で覆われたクラッド材を用意すること、
横断面形状が先端に向かって細くなったテーパ状であるとともに、両端面が底部に向かって長さ方向内方に傾斜した複数の放熱フィン形成用凹溝を有する鍛造用型を用意し、放熱フィン形成用凹溝の両側面および両端面の勾配を３％以上とするとともに、放熱フィン形成用凹溝の深さを放熱フィン形成用凹溝の開口端部の幅の２〜５倍とし、鍛造用型の表面と各放熱フィン形成用凹溝の両側面および両端面との連接部に丸みを形成するとともに、当該丸みの曲率半径を製造すべき放熱基板の板厚の１／２以上とすること、
ならびに前記クラッド材を１２０〜１５０℃または３５０〜４００℃に加熱した後、前記鍛造用型を用いて鍛造加工を施すことにより、片面が犠牲腐食層で覆われた放熱基板と、表面が犠牲腐食層で覆われ、かつ横断面形状が先端に向かって細くなったテーパ状であるとともに、両端面が先端に向かって長さ方向内方に傾斜した複数の板状放熱フィンとを形成することを含むヒートシンクの製造方法。
6) A method of manufacturing the heat sink according to 3) above,
Providing a clad material in which one side of the core material is covered with a sacrificial corrosion layer having a thickness of 5 to 20% of the thickness of the core material;
Prepare a forging die that has a plurality of grooves for forming radiating fins that have a taper shape with a cross-sectional shape that becomes narrower toward the tip and that both end faces are inclined inward in the longitudinal direction toward the bottom. The gradient of both side surfaces and both end surfaces of the fin forming groove is 3% or more, and the depth of the radiating fin forming groove is 2 to 5 times the width of the opening end of the radiating fin forming groove, A roundness is formed at the connecting portion between the surface of the forging die and both side faces and both end faces of each radiating fin forming groove, and the radius of curvature of the rounding is ½ or more of the thickness of the radiating board to be manufactured. To do,
In addition, after the clad material is heated to 120 to 150 ° C. or 350 to 400 ° C., forging is performed using the forging die, and a heat dissipation substrate having one surface covered with a sacrificial corrosion layer, and the surface is sacrificial corrosion. Forming a plurality of plate-like radiating fins that are covered with a layer and whose cross-sectional shape is tapered toward the tip and whose both end faces are inclined inward in the longitudinal direction toward the tip. A method for manufacturing a heat sink.
上記1)のヒートシンクを、水を含む冷却液が流れる冷却液通路を有するケーシングに、放熱基板の第１面および放熱フィンが冷却液通路に臨むように配置した場合であっても、放熱基板の第１面および全放熱フィンの表面が犠牲腐食層で覆われているので、冷却液による放熱基板および放熱フィンの腐食を防止することができる。たとえば、放熱基板の第１面および全放熱フィンの表面が犠牲腐食層で覆われていないヒートシンクに比べて、発生する孔食深さは１／５〜１／１０程度となる。また、放熱フィンの外周面の勾配が３％以上であり、放熱フィンの高さが放熱フィンの基端部の直径の２〜１０倍であり、放熱基板の第１面と各放熱フィンの外周面との連接部に丸みが形成されるとともに、当該丸みの曲率半径が放熱基板の板厚の１／２以上であるから、芯材の片面が、芯材の厚みの５〜２０％の厚みを有する犠牲腐食層で覆われたクラッド材を用意し、当該クラッド材を１２０〜１５０℃または３５０〜４００℃に加熱した後鍛造加工を施すことによって、放熱基板の第１面および全放熱フィンの表面が確実に犠牲腐食層で覆われたヒートシンクを比較的簡単に製造することができる。 Even when the heat sink of 1) is arranged in a casing having a coolant passage through which water-containing coolant flows, so that the first surface of the heat sink and the heat sink fins face the coolant passage, Since the first surface and the surfaces of all the heat radiating fins are covered with the sacrificial corrosion layer, corrosion of the heat radiating board and the heat radiating fins by the coolant can be prevented. For example, the generated pitting corrosion depth is about 1/5 to 1/10 compared to a heat sink in which the first surface of the heat dissipation board and the surface of all the heat dissipation fins are not covered with the sacrificial corrosion layer. Further, the gradient of the outer peripheral surface of the radiating fin is 3% or more, the height of the radiating fin is 2 to 10 times the diameter of the base end portion of the radiating fin, and the first surface of the radiating substrate and the outer periphery of each radiating fin. Since the rounded portion is formed in the connecting portion with the surface and the radius of curvature of the roundness is 1/2 or more of the thickness of the heat dissipation substrate, one side of the core material is 5 to 20% of the thickness of the core material. A clad material covered with a sacrificial corrosive layer having a thickness of 1 and a forging process after heating the clad material to 120 to 150 ° C. or 350 to 400 ° C. A heat sink whose surface is reliably covered with a sacrificial corrosion layer can be produced relatively easily.
上記3)のヒートシンクを、水を含む冷却液が流れる冷却液通路を有するケーシングに、放熱基板の第１面および放熱フィンが冷却液通路に臨むように配置した場合であっても、放熱基板の第１面および全放熱フィンの表面が犠牲腐食層で覆われているので、冷却液による放熱基板および放熱フィンの腐食を防止することができる。また、放熱フィンの両側面および両端面の勾配が３％以上であり、放熱フィンの高さが放熱フィンの基端部の厚みの２〜５倍であり、放熱基板の第１面と各放熱フィンの両側面および両端面との連接部に丸みが形成されるとともに、当該丸みの曲率半径が放熱基板の板厚の１／２以上であるから、芯材の片面が、芯材の厚みの５〜２０％の厚みを有する犠牲腐食層で覆われたクラッド材を用意し、当該クラッド材を１２０〜１５０℃または３５０〜４００℃に加熱した後鍛造加工を施すことによって、放熱基板の第１面および全放熱フィンの表面が確実に犠牲腐食層で覆われたヒートシンクを比較的簡単に製造することができる。 Even if the heat sink of the above 3) is arranged in a casing having a coolant passage through which a coolant containing water flows so that the first surface of the heat sink and the heat sink fins face the coolant passage, Since the first surface and the surfaces of all the heat radiating fins are covered with the sacrificial corrosion layer, corrosion of the heat radiating board and the heat radiating fins by the coolant can be prevented. Moreover, the gradient of the both side surfaces and both end surfaces of the heat radiation fin is 3% or more, the height of the heat radiation fin is 2 to 5 times the thickness of the base end portion of the heat radiation fin, and the first surface of the heat radiation board and each heat radiation Since rounds are formed at both sides of the fins and the joints between both sides, and the radius of curvature of the rounds is ½ or more of the thickness of the heat dissipation board, one side of the core is less than the thickness of the core. First, a clad material covered with a sacrificial corrosion layer having a thickness of 5 to 20% is prepared, and the clad material is heated to 120 to 150 ° C. or 350 to 400 ° C., and then subjected to forging, whereby the first heat dissipation substrate is formed. A heat sink in which the surface and the surface of all the radiation fins are reliably covered with the sacrificial corrosion layer can be manufactured relatively easily.
上記4)の製造方法によれば、放熱基板の第１面および全ピン状放熱フィンの表面が確実に犠牲腐食層で覆われたヒートシンクを比較的簡単に製造することができる。 According to the manufacturing method of 4), it is possible to relatively easily manufacture a heat sink in which the first surface of the heat dissipation board and the surface of all the pin-shaped heat dissipation fins are reliably covered with the sacrificial corrosion layer.
上記6)の製造方法によれば、放熱基板の第１面および全板状放熱フィンの表面が確実に犠牲腐食層で覆われたヒートシンクを比較的簡単に製造することができる。 According to the manufacturing method of 6), it is possible to relatively easily manufacture a heat sink in which the first surface of the heat radiating substrate and the surface of all the plate-shaped heat radiating fins are reliably covered with the sacrificial corrosion layer.
以下、この発明の実施形態を、図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the drawings.
なお、以下の説明において、各図面の上下を上下というものとする。 In the following description, the top and bottom of each drawing is referred to as the top and bottom.
実施形態１
この実施形態は図１〜図４に示すものである。
This embodiment is shown in FIGS.
図１はこの発明によるヒートシンクの全体構成を示し、図２はその要部を示す。また、図３はヒートシンクの製造方法を示し、図４はヒートシンクの使用方法を示す。 FIG. 1 shows the overall structure of a heat sink according to the present invention, and FIG. FIG. 3 shows a method for manufacturing the heat sink, and FIG. 4 shows a method for using the heat sink.
図１および図２において、ヒートシンク(1)は、第１面(2a)が冷却液通路に臨まされるとともに、第２面(2b)が発熱体取付面となされる放熱基板(2)と、放熱基板(2)の第１面(2a)に、鍛造により相互に間隔をおくように千鳥配置状に一体に形成された複数のピン状放熱フィン(3)とよりなる。放熱基板(2)の第１面(2a)および全放熱フィン(3)の表面は、連続した犠牲腐食層(4)で覆われている。放熱基板(2)および放熱フィン(3)の犠牲腐食層(4)を除いた芯材(5)の部分は、たとえばJIS Ａ１１００などのJIS Ａ１０００系アルミニウムからなり、犠牲腐食層(4)はたとえばJIS Ａ７０７２などのＡｌ−Ｚｎ系合金からなる。 1 and 2, the heat sink (1) includes a heat radiating board (2) having a first surface (2a) facing the coolant passage and a second surface (2b) serving as a heating element mounting surface. The first surface (2a) of the heat radiating substrate (2) includes a plurality of pin-shaped heat radiating fins (3) integrally formed in a staggered manner so as to be spaced from each other by forging. The first surface (2a) of the heat dissipation substrate (2) and the surface of all the heat dissipation fins (3) are covered with a continuous sacrificial corrosion layer (4). The core material (5) portion excluding the sacrificial corrosion layer (4) of the heat dissipating substrate (2) and the heat dissipating fin (3) is made of, for example, JIS A1000 series aluminum such as JIS A1100, and the sacrificial corrosion layer (4) is, for example, It is made of an Al-Zn alloy such as JIS A7072.
放熱フィン(3)は先端（上端）に向かって細くなった円すい状であり、放熱フィン(3)の外周面の勾配(S)は３％以上である。放熱フィン(3)の勾配(S)の上限は、５％程度であることがよい。なお、放熱フィン(3)の先端は丸みを帯びて部分球面状となっている。また、放熱フィン(3)の高さ(H)は放熱フィン(3)の基端部（下端部）の直径(D)の２〜１０倍である。放熱基板(2)の第１面(2a)と各放熱フィン(3)の外周面との連接部には丸み(6)が形成されており、丸み(6)の曲率半径(R)は放熱基板(2)の板厚(T)の１／２以上となっている。丸み(6)の曲率半径(R)の上限は、放熱基板(2)の板厚(T)と同程度であることがよい。また、丸み(6)の曲率半径(R)は放熱フィン(3)の基端部の直径(D)の１／２以上となっていてもよい。すなわち、放熱基板(2)の板厚(T)と放熱フィン(3)の基端部の直径(D)とが等しくてもよい。 The radiating fin (3) has a conical shape that narrows toward the tip (upper end), and the gradient (S) of the outer peripheral surface of the radiating fin (3) is 3% or more. The upper limit of the gradient (S) of the radiating fin (3) is preferably about 5%. Note that the tips of the radiating fins (3) are rounded and partially spherical. The height (H) of the radiating fin (3) is 2 to 10 times the diameter (D) of the base end (lower end) of the radiating fin (3). A roundness (6) is formed at the connection between the first surface (2a) of the heat dissipation board (2) and the outer peripheral surface of each heat dissipation fin (3), and the radius of curvature (R) of the roundness (6) is the heat dissipation. It is 1/2 or more of the plate thickness (T) of the substrate (2). The upper limit of the radius of curvature (R) of the roundness (6) is preferably about the same as the thickness (T) of the heat dissipation substrate (2). Further, the radius of curvature (R) of the roundness (6) may be ½ or more of the diameter (D) of the base end portion of the radiating fin (3). That is, the plate thickness (T) of the heat dissipation substrate (2) and the diameter (D) of the base end portion of the heat dissipation fin (3) may be equal.
放熱フィン(3)の勾配(S)、放熱フィン(3)の高さ(H)、放熱基板(2)の第１面(2a)と各放熱フィン(3)の外周面との連接部の丸み(6)の曲率半径(R)が上述した範囲内である場合、芯材(5)の片面が、芯材(5)の厚みの５〜２０％の厚みを有する犠牲腐食層(4)で覆われたクラッド材を用意し、当該クラッド材を１２０〜１５０℃または３５０〜４００℃に加熱した後鍛造加工を施すことによって、放熱基板(2)の第１面(2a)および全放熱フィン(3)の表面が確実に犠牲腐食層(4)で覆われたヒートシンク(1)を比較的簡単に製造することができる。 The slope (S) of the radiating fin (3), the height (H) of the radiating fin (3), and the connection between the first surface (2a) of the radiating substrate (2) and the outer peripheral surface of each radiating fin (3) When the radius of curvature (R) of the roundness (6) is within the above-mentioned range, the sacrificial corrosion layer (4) in which one side of the core material (5) has a thickness of 5 to 20% of the thickness of the core material (5). The clad material covered with the first surface (2a) of the heat radiating substrate (2) and all the heat radiating fins are prepared by heating the clad material to 120 to 150 ° C or 350 to 400 ° C and then forging. The heat sink (1) in which the surface of (3) is reliably covered with the sacrificial corrosion layer (4) can be manufactured relatively easily.
次に、ヒートシンク(1)の製造方法について、図３を参照して説明する。 Next, a method for manufacturing the heat sink (1) will be described with reference to FIG.
まず、芯材(5)の片面が、芯材(5)の厚み(t1)の５〜２０％の厚み(t2)を有する犠牲腐食層(4)で覆われた平板状のクラッド材(7)を用意する。また、放熱基板(2)と同一の大きさの１つの凹所(11)と、凹所(11)の底面に形成された複数の放熱フィン形成用凹部(12)とを有する鍛造用下型(10)と、下型(10)の凹所(11)内に嵌め入れられる鍛造用上型(13)とを用意する。 First, a flat clad material (7) in which one side of the core material (5) is covered with a sacrificial corrosion layer (4) having a thickness (t2) of 5 to 20% of the thickness (t1) of the core material (5). ) Is prepared. The lower die for forging having one recess (11) having the same size as the heat dissipation substrate (2) and a plurality of heat dissipation fin forming recesses (12) formed on the bottom surface of the recess (11). (10) and an upper die (13) for forging to be fitted in the recess (11) of the lower die (10) are prepared.
下型(10)の放熱フィン形成用凹部(12)は、底部に向かって細くなったテーパ穴状であり、放熱フィン形成用凹部(12)の内周面の勾配(S1)は３％以上となっている。また、放熱フィン形成用凹部(12)の深さ(F)は、放熱フィン形成用凹部(12)の開口端部の内径(D1)の２〜１０倍となっている。さらに、下型(10)の凹所(11)の底面と各放熱フィン形成用凹部(12)の内周面との連接部には丸み(14)が形成されており、丸み(14)の曲率半径(R1)は、製造すべき放熱基板(2)の板厚(T)の１／２以上となっている。 The lower mold (10) radiating fin forming recess (12) has a tapered hole shape that narrows toward the bottom, and the slope (S1) of the inner peripheral surface of the radiating fin forming recess (12) is 3% or more. It has become. The depth (F) of the radiating fin forming recess (12) is 2 to 10 times the inner diameter (D1) of the opening end of the radiating fin forming recess (12). Further, a rounded portion (14) is formed at the connecting portion between the bottom surface of the recess (11) of the lower mold (10) and the inner peripheral surface of each radiating fin forming concave portion (12). The radius of curvature (R1) is ½ or more of the plate thickness (T) of the heat dissipation substrate (2) to be manufactured.
ついで、クラッド材(7)を、１２０〜１５０℃の温間または３５０〜４００℃の熱間に加熱した後下型(10)の凹所(11)の底面上に、犠牲腐食層(4)が下方（放熱フィン形成用凹部(12)側）を向くように配置する（図３(a)参照）。その後、上下両型(13)(10)を相互に接近させることにより上型(13)を下型(10)の凹所(11)内に嵌め入れてクラッド材(7)を上下から押圧し、クラッド材(7)を形成する材料の一部を放熱フィン形成用凹部(12)内に流入させる。こうして、放熱基板(2)とピン状放熱フィン(3)とからなり、放熱基板(2)の芯材(5)の第１面(2a)および全放熱フィン(3)の表面が犠牲腐食層(4)で覆われているヒートシンク(1)が製造される（図３(b)参照）。 Next, the clad material (7) is heated to a temperature of 120 to 150 ° C. or heated to 350 to 400 ° C., and then a sacrificial corrosion layer (4) is formed on the bottom surface of the recess (11) of the lower mold (10). Is arranged so as to face downward (radiation fin forming recess (12) side) (see FIG. 3 (a)). After that, the upper and lower molds (13) and (10) are brought close to each other to fit the upper mold (13) into the recess (11) of the lower mold (10) and press the clad material (7) from above and below. Then, a part of the material forming the clad material (7) is caused to flow into the radiating fin forming recess (12). Thus, the heat radiation substrate (2) and the pin-shaped heat radiation fin (3) are composed, and the first surface (2a) of the core material (5) of the heat radiation substrate (2) and the surface of all the heat radiation fins (3) are sacrificial corrosion layers. The heat sink (1) covered with (4) is manufactured (see FIG. 3 (b)).
図４はヒートシンク(1)の使用方法を示す。 FIG. 4 shows how to use the heat sink (1).
ヒートシンク(1)は、水を含む冷却液、たとえばロングライフクーラントなどが図４の紙面表裏方向に流れる冷却液通路(16)を形成するケーシング(15)の上壁に形成された開口(17)内に、放熱基板(2)の第１面(2a)および放熱フィン(3)が冷却液通路(16)内に臨むように配置される。発熱体である半導体素子(P)は、板状絶縁部材(I)を介してヒートシンク(2)の第２面(2b)に接合される。 The heat sink (1) has an opening (17) formed in the upper wall of a casing (15) that forms a coolant passage (16) in which a coolant containing water, for example, a long life coolant flows in the front and back direction of the paper surface of FIG. Inside, the first surface (2a) of the heat radiating substrate (2) and the heat radiating fins (3) are arranged so as to face the coolant passage (16). The semiconductor element (P), which is a heating element, is joined to the second surface (2b) of the heat sink (2) via the plate-like insulating member (I).
半導体素子(P)から発せられる熱は、絶縁部材(I)、ヒートシンク(1)の放熱基板(2)および放熱フィン(3)を経て冷却液通路(16)内を流れる冷却液に伝わり、半導体素子(P)が冷却される。 The heat generated from the semiconductor element (P) is transferred to the coolant flowing in the coolant passage (16) through the insulating member (I), the heat sink (2) of the heat sink (1), and the heat sink fin (3). The element (P) is cooled.
実施形態２
この実施形態は図５〜図８に示すものである。
This embodiment is shown in FIGS.
図５はこの発明によるヒートシンクの全体構成を示し、図６および図７はその要部を示す。また、図８はヒートシンクの製造方法を示す。 FIG. 5 shows the overall structure of the heat sink according to the present invention, and FIGS. 6 and 7 show the main part thereof. FIG. 8 shows a method for manufacturing a heat sink.
図５〜図７において、ヒートシンク(20)は、第１面(21a)が冷却液通路に臨まされるとともに、第２面(21b)が発熱体取付面となされる放熱基板(21)と、放熱基板(21)の第１面(21a)に、鍛造により相互に間隔をおくとともに並列状となるように一体に形成され、かつ放熱基板(21)よりも短い複数の板状放熱フィン(22)とよりなる。放熱基板(21)の第１面(21a)および全放熱フィン(22)の表面は、連続した犠牲腐食層(4)で覆われている。放熱基板(21)および放熱フィン(22)の犠牲腐食層(4)を除いた芯材(5)の部分は、たとえばJIS Ａ１１００などのJIS Ａ１０００系アルミニウムからなり、犠牲腐食層(4)はたとえばJIS Ａ７０７２などのＡｌ−Ｚｎ系合金からなる。 5 to 7, the heat sink (20) includes a heat dissipation substrate (21) having a first surface (21a) facing the coolant passage and a second surface (21b) serving as a heating element mounting surface. On the first surface (21a) of the heat dissipation substrate (21), a plurality of plate-shaped heat radiation fins (22) are formed integrally with the first surface (21a) so as to be spaced apart from each other and arranged in parallel. ). The first surface (21a) of the heat dissipation substrate (21) and the surface of all the heat dissipation fins (22) are covered with a continuous sacrificial corrosion layer (4). The portion of the core material (5) excluding the sacrificial corrosion layer (4) of the heat dissipating substrate (21) and the heat dissipating fin (22) is made of, for example, JIS A1000 series aluminum such as JIS A1100. It is made of an Al-Zn alloy such as JIS A7072.
放熱フィン(22)の横断面形状は先端（上端）に向かって細くなったテーパ状であり、その両側面は先端に向かって厚み方向の内方に傾斜している。また、放熱フィン(22)の長さ方向の両端面は先端に向かって長さ方向内方に傾斜している。そして、放熱フィン(22)の両側面および両端面の勾配(S2)は３％以上である。放熱フィン(22)の両側面は放熱フィン(22)の勾配(S2)の上限は、５％程度であることがよい。なお、放熱フィン(22)の先端は丸みを帯びている。また、放熱フィン(22)の高さ(H1)は放熱フィン(22)の基端部（下端部）の厚み(W)の２〜５倍である。放熱基板(21)の第１面(21a)と各放熱フィン(22)の両側面および両端面との連接部には丸み(23)が形成されており、丸み(23)の曲率半径(R2)は放熱基板(21)の板厚(T1)の１／２以上となっている。丸み(23)の曲率半径(R)の上限は、放熱基板(21)の板厚(T1)と同程度であることがよい。また、丸み(23)の曲率半径(R)は放熱フィン(22)の基端部の厚み(W)の１／２以上となっていてもよい。すなわち、放熱基板(21)の板厚(T1)と放熱フィン(22)の基端部の厚み(W)とが等しくてもよい。 The cross-sectional shape of the heat dissipating fin (22) is a taper shape that narrows toward the tip (upper end), and both side surfaces thereof are inclined inward in the thickness direction toward the tip. Further, both end surfaces of the heat radiating fin (22) in the length direction are inclined inward in the length direction toward the tip. And the gradient (S2) of both side surfaces and both end surfaces of the radiation fin (22) is 3% or more. The upper limit of the gradient (S2) of the radiating fin (22) on both side surfaces of the radiating fin (22) is preferably about 5%. The tip of the heat radiating fin (22) is rounded. Moreover, the height (H1) of the radiation fin (22) is 2 to 5 times the thickness (W) of the base end (lower end) of the radiation fin (22). A roundness (23) is formed at the connecting portion between the first surface (21a) of the heat dissipation substrate (21) and both side surfaces and both end surfaces of each radiation fin (22), and the radius of curvature (R2) of the roundness (23) is formed. ) Is 1/2 or more of the thickness (T1) of the heat dissipation substrate (21). The upper limit of the radius of curvature (R) of the roundness (23) is preferably about the same as the thickness (T1) of the heat dissipation substrate (21). Further, the radius of curvature (R) of the roundness (23) may be 1/2 or more of the thickness (W) of the base end portion of the radiating fin (22). That is, the plate thickness (T1) of the heat dissipation substrate (21) and the thickness (W) of the base end portion of the heat dissipation fin (22) may be equal.
放熱フィン(22)の勾配(S2)、放熱フィン(22)の高さ(H1)、放熱基板(21)の第１面(21a)と各放熱フィン(22)の両側面および両端面との連接部の丸み(23)の曲率半径(R2)が上述した範囲内である場合、芯材(5)の片面が、芯材(5)の厚みの５〜２０％の厚みを有する犠牲腐食層(4)で覆われたクラッド材を用意し、当該クラッド材を１２０〜１５０℃または３５０〜４００℃に加熱した後鍛造加工を施すことによって、放熱基板(21)の第１面(21a)および全放熱フィン(22)の表面が確実に犠牲腐食層(4)で覆われたヒートシンク(20)を比較的簡単に製造することができる。 The slope (S2) of the radiating fin (22), the height (H1) of the radiating fin (22), the first surface (21a) of the radiating substrate (21) and both side surfaces and both end surfaces of each radiating fin (22) When the curvature radius (R2) of the roundness (23) of the connecting portion is within the above-described range, the sacrificial corrosion layer in which one side of the core material (5) has a thickness of 5 to 20% of the thickness of the core material (5). The clad material covered with (4) is prepared, and the clad material is heated to 120 to 150 ° C. or 350 to 400 ° C. and then subjected to forging, whereby the first surface (21a) of the heat dissipation substrate (21) and The heat sink (20) in which the surface of all the heat radiating fins (22) is surely covered with the sacrificial corrosion layer (4) can be manufactured relatively easily.
次に、ヒートシンク(20)の製造方法について、図８を参照して説明する。 Next, a manufacturing method of the heat sink (20) will be described with reference to FIG.
まず、芯材(5)の片面が、芯材(5)の厚み(t1)の５〜２０％の厚み(t2)を有する犠牲腐食層(4)で覆われた平板状のクラッド材(7)を用意する。また、放熱基板(21)と同一の大きさの１つの凹所(26)と、凹所(26)の底面に並列状に形成された複数の放熱フィン形成用凹溝(27)とを有する鍛造用下型(25)と、下型(25)の凹所(26)内に嵌め入れられる鍛造用上型(28)とを用意する。 First, a flat clad material (7) in which one side of the core material (5) is covered with a sacrificial corrosion layer (4) having a thickness (t2) of 5 to 20% of the thickness (t1) of the core material (5). ) Is prepared. Moreover, it has one recess (26) of the same size as the heat dissipation substrate (21) and a plurality of heat sink fin forming grooves (27) formed in parallel on the bottom surface of the recess (26). A lower forging die (25) and an upper forging die (28) to be fitted in the recess (26) of the lower die (25) are prepared.
下型(25)の放熱フィン形成用凹溝(27)の横断面形状は先端に向かって細くなったテーパ状であり、その両側面は底部に向かって幅方向内方に傾斜している。また、放熱フィン形成用凹溝(27)の両端面は底部に向かって長さ方向内方に傾斜している。そして、放熱フィン形成用凹溝(27)の両側面および両端面の勾配(S3)は３％以上となっている。また、放熱フィン形成用凹溝(27)の深さ(F1)は、放熱フィン形成用凹溝(27)の開口端部の幅の２〜５倍となっている。さらに、下型(25)の凹所(26)の底面と各放熱フィン形成用凹溝(27)の両側面および両端面との連接部には丸み(29)が形成されており、丸み(29)の曲率半径(R3)は、製造すべき放熱基板(21)の板厚(T1)の１／２以上となっている。 The cross-sectional shape of the radiating fin forming groove (27) of the lower mold (25) is a taper shape that is narrowed toward the tip, and both side surfaces thereof are inclined inward in the width direction toward the bottom. Further, both end surfaces of the radiating fin forming groove (27) are inclined inward in the length direction toward the bottom. And the gradient (S3) of the both side surfaces and both end surfaces of the recessed groove (27) for radiating fin formation is 3% or more. The depth (F1) of the radiating fin forming groove (27) is 2 to 5 times the width of the opening end of the radiating fin forming groove (27). Furthermore, roundness (29) is formed at the connecting portion between the bottom surface of the recess (26) of the lower mold (25) and both side surfaces and both end surfaces of each radiating fin forming groove (27). The radius of curvature (R3) of 29) is greater than or equal to ½ of the plate thickness (T1) of the heat dissipation substrate (21) to be manufactured.
ついで、クラッド材(7)を、１２０〜１５０℃の温間または３５０〜４００℃の熱間に加熱した後下型(25)の凹所(26)の底面上に、犠牲腐食層(4)が下方（放熱フィン形成用凹溝(27)側）を向くように配置する（図８参照）。その後、上下両型(28)(25)を相互に接近させることにより上型(28)を下型(25)の凹所(26)内に嵌め入れてクラッド材(7)を上下から押圧し、クラッド材(7)を形成する材料の一部を放熱フィン形成用凹溝(27)内に流入させる。こうして、放熱基板(21)と板状放熱フィン(22)とからなり、放熱基板(21)の芯材(5)の第１面(21a)および全放熱フィン(22)の表面が犠牲腐食層(4)で覆われているヒートシンク(20)が製造される。 Then, the clad material (7) is heated to 120 to 150 ° C. or 350 to 400 ° C. and then the sacrificial corrosion layer (4) is formed on the bottom surface of the recess (26) of the lower mold (25). Is arranged so as to face downward (the side of the radiating fin forming groove (27)) (see FIG. 8). After that, the upper and lower molds (28) and (25) are brought close to each other to fit the upper mold (28) into the recess (26) of the lower mold (25) and press the clad material (7) from above and below. Then, a part of the material forming the clad material (7) is caused to flow into the radiating fin forming concave groove (27). Thus, the heat radiating board (21) and the plate-like heat radiating fins (22) are formed, and the first surface (21a) of the core material (5) of the heat radiating board (21) and the surface of all the heat radiating fins (22) are sacrificial corrosion layers. The heat sink (20) covered with (4) is manufactured.
実施形態２のヒートシンク(20)は、実施形態１のヒートシンク(1)と同様にして使用される。 The heat sink (20) of the second embodiment is used in the same manner as the heat sink (1) of the first embodiment.
すなわち、水を含む冷却液、たとえばロングライフクーラントなどが流れる冷却液通路を形成するケーシングの上壁に形成された開口内に、放熱基板(21)の第１面(21a)および放熱フィン(22)が冷却液通路内に臨むように配置される。このとき、放熱フィン(22)の長さ方向は、冷却液の流れ方向に向けられる。発熱体である半導体素子は、板状絶縁部材を介してヒートシンク(20)の放熱基板(21)の第２面(21b)に接合される。半導体素子から発せられる熱は、絶縁部材、ヒートシンク(20)の放熱基板(21)および放熱フィン(22)を経て冷却液通路内を流れる冷却液に伝わり、半導体素子が冷却される。 That is, the first surface (21a) of the heat radiating substrate (21) and the heat radiating fins (22) are formed in an opening formed in the upper wall of the casing that forms a coolant passage through which a coolant containing water, for example, a long life coolant flows. ) Is arranged so as to face the coolant passage. At this time, the length direction of the radiation fin (22) is directed to the flow direction of the coolant. The semiconductor element, which is a heating element, is bonded to the second surface (21b) of the heat dissipation substrate (21) of the heat sink (20) via a plate-like insulating member. Heat generated from the semiconductor element is transferred to the coolant flowing in the coolant passage through the insulating member, the heat dissipation substrate (21) of the heat sink (20), and the heat dissipation fin (22), thereby cooling the semiconductor element.
(1)：ヒートシンク
(2)：放熱基板
(2a)：第１面
(2b)：第２面
(3)：ピン状放熱フィン
(4)：犠牲腐食層
(5)：芯材
(6)：丸み
(7)：クラッド材
(10)：鍛造用下型（鍛造用型）
(12)：放熱フィン形成用凹部
(14)：丸み
(20)：ヒートシンク
(21)：放熱基板
(21a)：第１面
(21b)：第２面
(22)：板状放熱フィン
(23)：丸み
(25)：鍛造用下型（鍛造用型）
(27)：放熱フィン形成用凹部
(29)：丸み
(1): Heat sink
(2): Heat dissipation board
(2a): First side
(2b): Second side
(3): Pin-shaped heat radiation fin
(4): Sacrificial corrosion layer
(5): Core material
(6): Roundness
(7): Clad material
(10): Lower die for forging (forging die)
(12): Recessed fin forming recess
(14): Roundness
(20): Heat sink
(21): Heat dissipation board
(21a): First side
(21b): Second side
(22): Plate-shaped radiation fin
(23): Roundness
(25): Lower die for forging (forging die)
(27): Recessed fin forming recess
(29): Roundness
Claims (6)
第１面が冷却液通路に臨まされるとともに、第２面が発熱体取付面となされる放熱基板と、放熱基板の第１面に、鍛造により相互に間隔をおくように一体に形成された複数のピン状放熱フィンとよりなり、放熱フィンが先端に向かって細くなった円すい状であり、放熱基板の第１面および全放熱フィンの表面が犠牲腐食層で覆われ、放熱フィンの外周面の勾配が３％以上であり、放熱フィンの高さが放熱フィンの基端部の直径の２〜１０倍であり、放熱基板の第１面と各放熱フィンの外周面との連接部に丸みが形成されるとともに、当該丸みの曲率半径が放熱基板の板厚の１／２以上であるヒートシンク。 A heat sink arranged to face a coolant passage through which a coolant containing water flows,
The first surface is exposed to the coolant passage and the second surface is integrally formed on the first surface of the heat radiating substrate and the heat radiating substrate mounting surface so as to be spaced apart from each other by forging. Consists of a plurality of pin-shaped heat dissipating fins, the heat dissipating fins have a conical shape that narrows toward the tip, the first surface of the heat dissipating substrate and the surface of all heat dissipating fins are covered with a sacrificial corrosion layer, and the outer peripheral surface of the heat dissipating fins The gradient of the heat dissipation fin is 2 to 10 times the diameter of the base end portion of the heat dissipation fin, and the connecting portion between the first surface of the heat dissipation substrate and the outer peripheral surface of each heat dissipation fin is rounded. And a heat sink in which the radius of curvature of the roundness is ½ or more of the thickness of the heat dissipation substrate.
第１面が冷却液通路に臨まされるとともに、第２面が発熱体取付面となされる放熱基板と、放熱基板の第１面に、鍛造により相互に間隔をおくように一体に形成され、かつ放熱基板よりも短い複数の板状放熱フィンとよりなり、放熱フィンの横断面形状が先端に向かって細くなったテーパ状であるとともに、放熱フィンの両端面が先端に向かって長さ方向内方に傾斜しており、放熱基板の第１面および全放熱フィンの表面が犠牲腐食層で覆われ、放熱フィンの両側面および両端面の勾配が３％以上であり、放熱フィンの高さが放熱フィンの基端部の厚みの２〜５倍であり、放熱基板の第１面と各放熱フィンの両側面および両端面との連接部に丸みが形成されるとともに、当該丸みの曲率半径が放熱基板の板厚の１／２以上であるヒートシンク。 A heat sink arranged to face a coolant passage through which a coolant containing water flows,
The first surface is exposed to the coolant passage and the second surface is integrally formed on the first surface of the heat radiating substrate and the heat radiating substrate mounting surface so as to be spaced apart from each other by forging. And a plurality of plate-like radiating fins that are shorter than the radiating substrate, the radiating fin having a taper shape in which the cross-sectional shape of the radiating fin is narrowed toward the tip, and both end faces of the radiating fin are in the longitudinal direction toward the tip. The first surface of the heat radiating board and the surface of all the heat radiating fins are covered with a sacrificial corrosion layer, the gradients of both side surfaces and both end surfaces of the heat radiating fins are 3% or more, and the height of the heat radiating fins is It is 2 to 5 times the thickness of the base end portion of the radiating fin, and a roundness is formed at the connecting portion between the first surface of the radiating board and both side surfaces and both end surfaces of each radiating fin, and the curvature radius of the roundness is Heat sink that is 1/2 or more of the thickness of the heat dissipation board
芯材の片面が、芯材の厚みの５〜２０％の厚みを有する犠牲腐食層で覆われたクラッド材を用意すること、
底部に向かって細くなったテーパ穴状である複数の放熱フィン形成用凹部を有する鍛造用型を用意し、放熱フィン形成用凹部の内周面の勾配を３％以上とするとともに、放熱フィン形成用凹部の深さを放熱フィン形成用凹部の開口端部の内径の２〜１０倍とし、鍛造用型の表面と各放熱フィン形成用凹部の内周面との連接部に丸みを形成するとともに、当該丸みの曲率半径を製造すべき放熱基板の板厚の１／２以上とすること、
ならびに前記クラッド材を１２０〜１５０℃または３５０〜４００℃に加熱した後、前記鍛造用型を用いて鍛造加工を施すことにより、片面が犠牲腐食層で覆われた放熱基板と、表面が犠牲腐食層で覆われるとともに先端に向かって細くなった円すい状である複数のピン状放熱フィンとを形成することを含むヒートシンクの製造方法。 A method of manufacturing a heat sink according to claim 1, comprising:
Providing a clad material in which one side of the core material is covered with a sacrificial corrosion layer having a thickness of 5 to 20% of the thickness of the core material;
A forging die having a plurality of recesses for forming radiating fins that are tapered holes that narrow toward the bottom is prepared, and the gradient of the inner peripheral surface of the dents for forming radiating fins is set to 3% or more, and the radiating fins are formed. The depth of the concave portion is 2 to 10 times the inner diameter of the opening end of the radiating fin forming concave portion, and the connecting portion between the forging die surface and the inner peripheral surface of each radiating fin forming concave portion is rounded. , Making the radius of curvature of the round more than half of the thickness of the heat dissipation substrate to be manufactured,
In addition, after the clad material is heated to 120 to 150 ° C. or 350 to 400 ° C., forging is performed using the forging die, and a heat dissipation substrate having one surface covered with a sacrificial corrosion layer, and the surface is sacrificial corrosion. A method of manufacturing a heat sink, comprising: forming a plurality of pin-shaped heat dissipating fins that are covered with a layer and are tapered toward the tip.
芯材の片面が、芯材の厚みの５〜２０％の厚みを有する犠牲腐食層で覆われたクラッド材を用意すること、
横断面形状が先端に向かって細くなったテーパ状であるとともに、両端面が底部に向かって長さ方向内方に傾斜した複数の放熱フィン形成用凹溝を有する鍛造用型を用意し、放熱フィン形成用凹溝の両側面および両端面の勾配を３％以上とするとともに、放熱フィン形成用凹溝の深さを放熱フィン形成用凹溝の開口端部の幅の２〜５倍とし、鍛造用型の表面と各放熱フィン形成用凹溝の両側面および両端面との連接部に丸みを形成するとともに、当該丸みの曲率半径を製造すべき放熱基板の板厚の１／２以上とすること、
ならびに前記クラッド材を１２０〜１５０℃または３５０〜４００℃に加熱した後、前記鍛造用型を用いて鍛造加工を施すことにより、片面が犠牲腐食層で覆われた放熱基板と、表面が犠牲腐食層で覆われ、かつ横断面形状が先端に向かって細くなったテーパ状であるとともに、両端面が先端に向かって長さ方向内方に傾斜した複数の板状放熱フィンとを形成することを含むヒートシンクの製造方法。 A method of manufacturing a heat sink according to claim 3,
Providing a clad material in which one side of the core material is covered with a sacrificial corrosion layer having a thickness of 5 to 20% of the thickness of the core material;
Prepare a forging die that has a plurality of grooves for forming radiating fins that have a taper shape with a cross-sectional shape that becomes narrower toward the tip and that both end faces are inclined inward in the longitudinal direction toward the bottom. The gradient of both side surfaces and both end surfaces of the fin forming groove is 3% or more, and the depth of the radiating fin forming groove is 2 to 5 times the width of the opening end of the radiating fin forming groove, A roundness is formed at the connecting portion between the surface of the forging die and both side faces and both end faces of each radiating fin forming groove, and the radius of curvature of the rounding is ½ or more of the thickness of the radiating board to be manufactured. To do,
In addition, after the clad material is heated to 120 to 150 ° C. or 350 to 400 ° C., forging is performed using the forging die, and a heat dissipation substrate having one surface covered with a sacrificial corrosion layer, and the surface is sacrificial corrosion. Forming a plurality of plate-like radiating fins that are covered with a layer and whose cross-sectional shape is tapered toward the tip and whose both end faces are inclined inward in the longitudinal direction toward the tip. A method for manufacturing a heat sink.
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