JP2009271663A - Management system, management device, management method and management program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a management system capable of efficiently managing product manufacturing processes by means of a simple arrangement. <P>SOLUTION: The management system, which creates a management slip 10, includes a management device 100 and a printer 150. The management device 100 includes: a process storage unit 106 for storing the process flow of manufacturing processes including a plurality of processes for each product lot; an extraction unit 108 for extracting the plurality of predetermined processes as management slip output times according to predetermined conditions; a creation unit 110 for creating, in a predetermined format, printing data for printing and outputting at every management slip output time the management slip 10 indicating a partial process flow where the plurality of processes included in between the management slip output times extracted constitute one unit and recording a working history; an instruction accepting unit 116 for accepting instructions to print and output the management slip 10; and an output unit 118 for causing the printer 150 to print and output the management slip 10 of the partial process flow corresponding to the management slip output time according to the printing data upon receiving the instructions to print and output. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a product manufacturing process management system, and more particularly to a management system, a management apparatus, a management method, and a management program for creating a management slip for managing a process.

  Examples of product manufacturing process management devices are described in Patent Documents 1 to 5. The process management apparatus described in each patent document includes a database that stores manufacturing process information, a host computer that manages manufacturing process information, and a plurality of terminal devices that are provided on-site for each process. Accepts reports from on-site terminal devices and manages product manufacturing processes.

In addition, the management form described in Patent Document 6 is designed to record all processes of the product manufacturing process on a single management form, which is ordered in advance from a printing company, printed, bound, and delivered. When a product lot is stored, a management slip suitable for the product is selected from the stocked management slips and attached to the lot for use.
JP 2001-306124 A JP 2001-344005 A JP 2003-330527 A JP-A-1-181103 JP-A-4-287275 JP 9-315038 A

However, the prior art described in the above literature has room for improvement in the following points.
If you try to manage all processes with a single control form like the conventional control form, for example, in the manufacturing process of semiconductor devices, only a few changes in hundreds of processes are required for improvement. Even if it is done, it is necessary to re-create the management slip, it is unavoidable to discard all the management slips that are already in stock, the cost of creating the management slip is wasted, and waste of resources It was. Moreover, when printing out management slips, it took 1 or 2 weeks to deliver, so there was a time lag and a lot of man-hours were required to change the process. In addition, it is necessary to secure a storage place for storing the inventory of management slips and to manage the inventory, and further, particles may adhere during storage and become unusable and useless.

The management system of the present invention
By presenting the flow of the product manufacturing process including multiple processes to the worker, the worker confirms the process procedure and creates a management slip for the worker to record the work history for each of the multiple processes Management system
A management device, and a management slip output device connected to the management device via a network,
The management device
Storage means for storing a process flow of the product manufacturing process including the plurality of processes for each product lot;
Extraction means for extracting a plurality of predetermined processes from the plurality of processes included in the process flow stored in the storage means as management form output times according to predetermined conditions,
In addition to showing the worker a partial process flow with a plurality of processes included in each of the extracted management slip output times as a unit, the work history for each of the plurality of processes included in the partial process flow is Creating means for creating print data for printing out a management slip for recording by the worker at each management slip output time in a predetermined format;
An instruction receiving means for receiving a print output instruction of the corresponding management slip before the predetermined step corresponding to the plurality of management slip output times;
When the print output instruction is received, the management slip output of the partial process flow corresponding to the plurality of management slip output times is output based on the print data of the management slip created by the creation means Output means for printing out the apparatus.

  According to the present invention, since the management slip that has been conventionally managed by one large sheet printed by outsourcing can be divided into a plurality of pieces and printed before a predetermined process, the manufacturing process flow Even if there is a change, it is not necessary to recreate the entire management slip, it is only necessary to recreate only the management slip corresponding to the relevant part, so the change can be flexibly and quickly handled, and the cost is greatly increased Reduced. Conventionally, management slips printed by outsourcing had to be kept in stock. However, according to the present invention, it is not necessary to have stock, and the management slip storage location is not required, so the management slip is printed. It is only necessary to store a general A4 size copy paper or the like. Problems such as particle adhesion during management slip storage are also solved. In addition, the man-hours for requesting printing and bookbinding for management slips are not required. There is no unnecessary management slip due to the change, so resources are not wasted. Thus, according to the present invention, product manufacturing process management can be efficiently performed using a management slip with a simple configuration.

The management device of the present invention
The worker confirms the process procedure by presenting a flow of a product manufacturing process including a plurality of processes connected to the management form output device via the network, and the work history for each of the plurality of processes is displayed. A management device that causes the management slip output device to output a management slip for recording by the worker,
Storage means for storing a process flow of the product manufacturing process including the plurality of processes for each product lot;
Extraction means for extracting a plurality of predetermined processes from the plurality of processes included in the process flow stored in the storage means as management form output times according to predetermined conditions,
In addition to showing the worker a partial process flow with a plurality of processes included in each of the extracted management slip output times as a unit, the work history for each of the plurality of processes included in the partial process flow is Creating means for creating print data for printing out a management slip for recording by the worker at each management slip output time in a predetermined format;
An instruction receiving means for receiving a print output instruction of the corresponding management slip before the predetermined step corresponding to the plurality of management slip output times;
When the print output instruction is received, the management slip output of the partial process flow corresponding to the plurality of management slip output times is output based on the print data of the management slip created by the creation means Output means for printing out the apparatus.

The management method of the present invention includes:
In a management system comprising a management device having a storage device for storing a process flow of a product manufacturing process including a plurality of steps for each product lot, and a management slip output device connected to the management device via a network, Management that presents the process flow of the product manufacturing process to the worker so that the worker confirms the process procedure and creates a management slip for the worker to record work histories for each of the plurality of processes A method,
The management device is
Extracting a plurality of predetermined processes from the plurality of processes included in the process flow stored in the storage device according to predetermined conditions, respectively, as a management slip output time,
In addition to showing the worker a partial process flow with a plurality of processes included in each of the extracted management slip output times as a unit, the work history for each of the plurality of processes included in the partial process flow is A management form for the operator to record is created in a predetermined format for printing data for printing out each time the management form is output,
Prior to the predetermined step corresponding to the plurality of management slip output times, a corresponding printout instruction of the management slip is received,
When the print output instruction is received, the management slip of the partial process flow corresponding to the plurality of management slip output times is printed on the management slip output device based on the print data of the created management slip Output.

The management program of the present invention
Computer for realizing a management device having a storage device for storing a process flow of a product manufacturing process including a plurality of processes for each product lot and connected to a management slip output device for printing out a management slip via a network A program, a computer,
Extraction means for extracting a plurality of predetermined processes from the plurality of processes included in the process flow stored in the storage device as management slip output times according to predetermined conditions,
The worker is shown a partial process flow with a plurality of processes included in each of the extracted management slip output times as a unit, and the work history for each of the plurality of processes included in the partial process flow is Creating means for creating print data for printing out a management slip for recording by a person at each management slip output time in a predetermined format;
An instruction receiving means for receiving a print output instruction of the corresponding management slip before the predetermined step corresponding to the plurality of management slip output times;
When the print output instruction is received, the management slip output of the partial process flow corresponding to the plurality of management slip output times is output based on the print data of the management slip created by the creation means It is for functioning as output means for printing out the apparatus.

  It should be noted that any combination of the above-described constituent elements and a conversion of the expression of the present invention between a method, an apparatus, a system, a recording medium, a computer program, etc. are also effective as an aspect of the present invention.

  The various components of the present invention do not necessarily have to be independent of each other. A plurality of components are formed as a single member, and a single component is formed of a plurality of members. It may be that a certain component is a part of another component, a part of a certain component overlaps with a part of another component, or the like.

  The management method and computer program of the present invention describe a plurality of procedures in order, but the described order does not limit the order in which the plurality of procedures are executed. For this reason, when implementing the management method and computer program of this invention, the order of the several procedure can be changed in the range which does not interfere in content.

  Furthermore, the management method and the plurality of procedures of the computer program of the present invention are not limited to being executed at different timings. For this reason, another procedure may occur during the execution of a certain procedure, or some or all of the execution timing of a certain procedure and the execution timing of another procedure may overlap.

  According to the present invention, a management system, a management device, a management method, and a management program that can efficiently manage a product manufacturing process with a simple configuration are provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same reference numerals are given to the same components, and the description will be omitted as appropriate.

  FIG. 1 is a functional block diagram showing the configuration of the management system according to the embodiment of the present invention. In the management system of the present embodiment, the worker 5 confirms the process procedure by presenting the flow of the product manufacturing process including a plurality of processes to the worker 5, and the worker 5 stores the work history for each of the plurality of processes. In the management system for creating the management slip 10 for recording, the management device 100 includes a management device 100 and a management slip output device (printing device 150) connected to the management device 100 via the network 3. A storage unit (process storage unit 106) for storing a process flow of a product manufacturing process including a plurality of processes for each product lot, and a plurality of processes included in the process flow stored in the storage unit (process storage unit 106) A plurality of predetermined processes are extracted in accordance with predetermined conditions as management slip output times, respectively, and a plurality of processes included between the extracted management slip output times. Is shown to the worker 5 as a unit, and a management slip 10 for the worker 5 to record a work history for each of the plurality of steps included in the partial step flow for each management slip output time. A creation unit 110 that creates print data for printout in a predetermined format, and an instruction reception unit that receives a printout instruction for the corresponding management slip 10 before a predetermined process corresponding to a plurality of management slip output times 116, when a print output instruction is received, the management slip output device (10) outputs the management slip 10 of the partial process flow corresponding to a plurality of management slip output timings based on the print data of the management slip 10 created by the creation section 110. And an output means for causing the printing apparatus 150 to print out.

  The management apparatus 100 according to the present invention instructs a work procedure of a product manufacturing process to an on-site worker and records a management record 10 for recording a work history by dividing a process table for each predetermined process. It is configured so as to include a process chart in which the processes of the part are described. The management slip 10 including a process chart in which some of the divided processes are described is printed out by the printing apparatus 150 every time before a predetermined process. In the present embodiment, a case where a management slip for manufacturing process management of a semiconductor device (not shown) is output will be described as an example.

  Specifically, the management system of the present embodiment includes a management device 100, a printing device 150 connected to the management device 100 via the network 3, and a barcode reader 160.

The management device 100 is, for example, a personal computer or a workstation.
The printing apparatus 150 is connected to the network 3 and is provided in the vicinity of, for example, an on-site product (semiconductor device) production line, and manages the management slip 10 in which a process procedure for giving a work instruction to the worker 5 is described. Printing is performed according to instructions from 100. As an example, a general-purpose network printer can be used. For example, a page printer or a serial printer that can print on a predetermined size of paper, for example, A4 size copy paper commonly used in offices, is not a continuous paper. preferable.

  The management slip 10 printed by the printing apparatus 150 is attached to the product semiconductor device 1. The management slip 10 includes a process chart 12 and a barcode 14. The operator 5 looks at the management slip 10 attached to the semiconductor device 1, confirms the work procedure of the process described in the process table 12, and performs the work.

  The management slip 10 of the present invention is collected after the work history is recorded in each manufacturing process by the worker 5, and information such as the work history recorded in the management slip 10 is obtained by a scanner (not shown). Reading is done. In the work history, for example, the work start time, end time, worker name, comment, completion check, etc. can be recorded for each process so that the progress status of each process can be understood.

  At this time, it is important for the scanner to be able to read a plurality of sheets continuously with an auto sheet feeder or the like from the viewpoint of labor and cost reduction when collecting information on the management slip 10. That is, it is desirable that the management slip 10 is created in a predetermined format using the same size paper. Rather than using one large management slip as in the conventional management slip, according to the management slip 10 of the present invention, it is standardized to a standard copy paper of a predetermined size, for example, A4, By unifying the format, the efficiency at the time of collecting information of the management slip 10 can be improved.

  In the present embodiment, the printing apparatus 150 is directly connected to the network 3, but the present invention is not limited to this. The management slip 10 may be printed out in accordance with a print instruction from the management apparatus 100 via a user terminal connected to another user terminal (not shown) installed at a site connected to the network 3 or the like. Alternatively, print data of the management slip 10 is transmitted from the management apparatus 100 to another user terminal in advance and stored in the storage unit of the user terminal, or the management slip format storage unit 112 is provided in the user terminal, which will be described later. It is also possible for the user terminal to receive a print output instruction for the management slip 10 transmitted from the barcode reader 160 and to issue a print instruction to the printing apparatus 150 from the user terminal.

  Note that the installation location of the printing apparatus 150 is not limited to this. For example, the printing device 150 may be a predetermined location such as a room where an operator stops before and after work, a vicinity of an entrance / exit, and a manager's room where instructions are given to the worker. be able to.

  The barcode reading device 160 is connected to the network 3, reads the barcode 14 described in the management form 10 of the present embodiment, and sends a print output instruction read from the barcode 14 to the management device 100 via the network 3. Send. Alternatively, instead of reading the barcode 14 of the management slip 10 by the barcode reader 160, a screen for accepting a print output instruction is displayed on the other user terminal as described above, and the worker 5 at the site operates the user terminal. In this case, a print output instruction may be issued. In this case, the configuration may be such that a print output instruction is transmitted to the management device 100, or if the user terminal has the print data of the management slip 10, the management slip 10 is directly sent from the user terminal to the printing device 150. May be issued.

  That is, the management form format storage unit 112, the interface unit 114, the instruction reception unit 116, and the output unit 118 of the management apparatus 100 according to the present embodiment to be described later can be provided in another user terminal.

  In the present embodiment, the barcode reader 160 is directly connected to the network 3, but the present invention is not limited to this. Connected to other user terminals (not shown) installed in the field or the like connected to the network 3 by wired or wireless communication, and transmits print output instructions read by the barcode reader 160 via the user terminals. It is good also as composition to do. In addition, after a confirmation screen or the like is displayed on a display unit (not shown) of the user terminal, a print output instruction can be transmitted after waiting for a user operation instruction from the operation unit (not shown) of the user terminal. .

  The management apparatus 100 includes an operation unit 102, a process reception unit 104, a process storage unit 106, an extraction unit 108, a creation unit 110, a management slip format storage unit 112, an interface unit (I / F) 114, An instruction receiving unit 116 and an output unit 118 are provided.

In addition, in the following each figure, the structure of the part which is not related to the essence of this invention is abbreviate | omitted.
Each component of the management system is centered on a CPU of a computer, a memory, a program for realizing the components shown in the figure loaded in the memory, a storage unit such as a hard disk for storing the program, and a network connection interface. It is realized by any combination of hardware and software. It will be understood by those skilled in the art that there are various modifications to the implementation method and apparatus. Each figure described below shows functional unit blocks, not hardware unit configurations.

  The operation unit 102 receives an operation of a user of the management apparatus 100. The operation unit 102 is, for example, a keyboard, a mouse, a tablet, a touch panel, a joystick, or the like. The user can instruct the management apparatus 100 to make various settings and inputs by operating the operation unit 102 with reference to various screens displayed on a display unit (not shown).

  The operation unit 102 may use a user terminal provided separately from the management apparatus 100, for example, a wireless portable terminal such as a personal computer or a cellular phone. What is necessary is just to have a function of a user interface for a user to operate the management apparatus 100 and a means for transmitting data input to the management apparatus 100. Or it can also be set as the structure which accesses the web page prepared by the web server (not shown) using a web browser from a user terminal, and performs required setting and input operation.

  The process receiving unit 104 receives a process flow setting of a manufacturing process including a plurality of processes for each product lot, which is set by the user using the operation unit 102 on a setting screen displayed on a display unit (not shown). Further, the process accepting unit 104 may accept setting of manufacturing conditions for a product lot. Manufacturing conditions can be accepted in lot units or process units.

  The process storage unit 106 is a database that stores various settings and information received by the process receiving unit 104. In the present embodiment, the process storage unit 106 is included in the management apparatus 100, but is not limited thereto. The management apparatus 100 may be provided separately. An existing database for product manufacturing process management may be used.

  As shown in FIG. 2A, the process storage unit 106 stores a product ID (IDentifier), a product lot ID, a process ID, and a condition ID in association with each other. In the figure, one product lot ID is associated with each product ID, but a plurality of product lot IDs are actually associated with each product ID. Furthermore, a plurality of process IDs are also associated with each product lot ID in the order of the manufacturing process, and a necessary condition ID may be associated with each of the plurality of process IDs. An ID may be associated. The condition ID is not necessary unless the setting of conditions is particularly necessary, and when there are a plurality of conditions for one process, a plurality of condition IDs are associated with the one process ID.

  The process storage unit 106 also stores information associated with each ID in advance. That is, product information such as the product name and product number associated with the product ID, lot number associated with the product lot ID, product lot information such as manufacturing date and time, management number, information on the process flow associated with the process ID, That is, process information of a plurality of processes in the flow, process information such as process names, equipment, and work contents, manufacturing conditions associated with the condition ID, for example, condition information such as temperature and processing time are stored.

  Returning to FIG. 1, the extraction unit 108 extracts a plurality of predetermined processes from a plurality of processes included in the process flow as management form output times according to predetermined conditions, respectively. In the present invention, the operation unit 102, the process reception unit 104, and the process storage unit 106 of the management apparatus 100 can use the configuration of an existing product process management system. That is, the extraction unit 108 can extract a plurality of predetermined processes as management slip output timings according to predetermined conditions from information such as a database that has already been constructed.

  In the present embodiment, in order to simplify the description, a product manufacturing process flow as shown in FIG. First, after step A is performed, step B1 is performed, and then step C, step D, step E1, and the like are performed in this order. Thereafter, the process returns to the process A, and then the processes B2, C, D, E1 (or E2) are performed in this order, and then the process returns to the process A, and then the processes B3, C, D, E1 (or E2). It is assumed that the flow is repeated in this order.

  In the present embodiment, taking the semiconductor device manufacturing process as an example, after the wafer is loaded, for example, after the cleaning process corresponding to the process A in FIG. 3, after the oxidation and diffusion processes corresponding to the process B1, the process C Following the resist coating process corresponding to, after performing the purpose, exposure, development, etching, resist removal process, etc. corresponding to process D, the process returns to process A, and further the CVD (Chemical Vapor Deposition) film corresponding to process B2 After the forming process, the processes corresponding to the processes C and D are sequentially performed, and after returning to the process A, the conductive film forming process corresponding to the process B3 is continued.

  In the case of such a manufacturing process, for example, if the control sheet output timing is the initial stage and the process C that is repeatedly performed a plurality of times, for example, the step of applying a semiconductor device and the resist coating process that is performed a plurality of times during the flow, This is preferable because it is possible to minimize the number of installation locations of the printing apparatus 150 that prints the image. For example, in the present embodiment, it can be installed at two locations near the site of the charging process and the resist coating process.

  In this way, the process (process C) that is repeatedly performed a plurality of times is set as the management slip output time, the product manufacturing process is divided into a plurality of groups, and the process table 12 for each group including only some processes is described. The management slip is printed out before the process C by the printing apparatus 150. Then, the newly output management slip can be attached to the product in place of the old management slip for the completed process.

  For example, when the resist coating process corresponding to the process C is set as the management slip output time, a part of the processes described in the process table 12 is finished before the process C. The finished product lot is placed on a shelf before application of resist and put on standby. Before the next process C, a new management form including a process table 12 including a part of the process starting from the next process C is replaced with the old management form attached to the product lot. Efficiently work to print out from the printing device 150 installed near the work site (resist pre-applying shelf) and paste this new management slip on the product lot placed on the pre-resist pre-applied shelf Can be done.

  For example, there are several hundred (about 450) processes for manufacturing a semiconductor device, and among them, the resist coating process exists more than ten times and is repeatedly performed. By setting the resist coating process that is repeatedly performed a plurality of times as the management sheet output time, all processes can be divided into a plurality of groups, and the management sheet 10 is set to a predetermined paper size for each process flow of each group. For example, it can be prepared by putting it on about 1-2 sheets of A4 size paper.

  Returning to FIG. 1, in this way, the extraction unit 108 extracts a predetermined condition, for example, a process performed at the start of the process and a process repeated a plurality of times as the management form output time. The predetermined condition may be set in a memory (not shown) in advance, or may be set by the user by displaying a setting screen on the display unit of the management apparatus 100. In particular, in the case of a manufacturing process line in which there are no repetitive processes, the management slip may be printed out by dividing every predetermined number of processes. In this case, it is desirable to set the installation location and the management slip output time so that the installation location of the printing apparatus 150 and the barcode reader 160 for printing out the management slip is efficient for the worker who receives the management slip. .

  The creation unit 110 indicates a partial process flow with a plurality of processes included in each of the management slip output times extracted by the extraction unit 108 as a unit to the worker in charge, and includes a plurality of processes included in the partial process flow. Print data for printing out the management slip 10 for the worker in charge to record the work history for each process at each management slip output timing is created in a predetermined format. The print data is not particularly limited, but can be general document data, text data, and HTML (HyperText Markup Language) data.

  The creation unit 110 can create the print data of the management slip 10 at an arbitrary timing after the input of the product process is completed and the process flow is determined. After the process flow is confirmed, the print data of the management slip 10 may be automatically created, may be created according to a user instruction, or when the instruction receiving unit 116 described later receives a print output instruction, Only print data corresponding to the designated management slip 10 may be created.

  In the present embodiment, the process reception unit 104 described above can receive various settings and information changes related to the product process flow that are already stored in the process storage unit 106. The process reception unit 104 receives the change and updates the information stored in the process storage unit 106. When the information related to the process flow is updated as described above, the extraction unit 108 and the creation unit 110 again perform the process extraction and the creation of the print data of the management slip 10 in response to the update. Can be done.

  Specifically, the management device 100 includes an update control unit (not shown), and the update control unit monitors whether the update has been received by the process receiving unit 104 or updates of information in the process storage unit 106. . When the update control unit detects that the manufacturing process information has been updated, the update control unit determines whether or not the updated process corresponds to the management form output time in the process flow before the update. If this is the case, the extraction part 108 causes the management form output time to be re-extracted for a part of the processes after the part including the updated process. Further, the update control unit causes the creation unit 110 to create again the print data of the management slip in which the process table 12 including the updated process is described.

  The management form format storage unit 112 stores the print data created by the creation unit 110. As shown in FIG. 2B, the product lot ID, the management slip ID, the process ID, and the output destination ID are stored in association with each other. Each product lot ID is associated with the IDs of the plurality of management slips 10 to be output in the order of the management slip output times, and the process IDs of the plurality of processes extracted as the management slip output times are stored in association with each other. The Further, the printing apparatus 150 to which each management slip 10 is output is associated, that is, the output destination ID is associated with the management slip ID and stored. Further, the management slip format storage unit 112 also stores each piece of information associated with each ID. That is, a predetermined format and print data of the management slip 10 associated with the management slip ID, output device identification information associated with the output destination ID, paper settings, and the like are stored.

  In the present embodiment, the management slip 10 includes information (not shown) such as a product name, a management slip ID, and a product lot ID, a process table 12, and a barcode 14. Furthermore, manufacturing conditions (not shown) may be included. The process table 12 includes, for example, a plurality of processes and work contents, and includes a column for recording a history of each work, for example, work start time, work end time, end check, worker name, comment, and the like. Can do. The manufacturing conditions can be accepted in lot units or process units.

  Further, the barcode 14 includes information for issuing a print output instruction for printing the next management slip to the management apparatus 100 via the network 3. For example, a product ID, a product lot ID, and a management slip ID managed by the management slip 10 are included. In addition to the barcode 14 as shown in FIG. 1, a two-dimensional barcode such as a QR code may be used, and the type of barcode is not particularly limited.

  When the worker finishes all the processes included in the process chart 12 of the management slip 10, the barcode reader 160 is read by the barcode reader 160, so that the barcode reader 160 transmits the barcode to the management apparatus 100 via the network 3. Send print output instruction information.

  Returning to FIG. 1, the interface unit 114 communicates with devices on the network 3. In the present embodiment, the network 3 is, for example, a local area network (LAN), a wide area network (WAN), or the like.

  The instruction receiving unit 116 receives print output instruction information from the barcode reader 160 via the interface unit 114 and receives it as a print output instruction. As described above, the print output information is transmitted to the management apparatus 100 by reading the barcode 14 of the management slip 10 by the barcode reader 160. Alternatively, the instruction receiving unit 116 can receive a print output instruction for the first management form 10 when the operation unit 102 of the management apparatus 100 instructs the start of product manufacture by a user such as an administrator. Further, not only the first sheet but also an arbitrary management slip 10 can be received as a print output instruction by a user operation instruction.

  In another embodiment, the print output instruction is sent to the management device via the network 3 by a user such as the operator 5 operating an operation unit of a user terminal device such as a personal computer provided in the field. 100 can also be transmitted. Alternatively, an RFID tag in which the above-described print output instruction information is recorded is attached to the management slip 10, the print output instruction information is read by a tag reader (not shown) connected to the network 3, and transmitted to the management apparatus 100. Good.

  When the instruction receiving unit 116 receives a print output instruction, the output unit 118 should output from the management form format storage unit 112 based on the product ID, the product lot ID, and the management form ID included in the print output instruction information. The print data of the management form 10 is selected and acquired, and the management form 10 is printed out via the interface unit 114 by the corresponding printing device 150 based on the corresponding output destination ID.

  The management apparatus 100 according to the present embodiment executes various processing operations corresponding to the computer program installed as described above, thereby realizing the various units 102 to 118 as various functions as described above. Yes.

  The computer program according to the present embodiment has a storage device (process storage unit 106) that stores a process flow of a product manufacturing process including a plurality of processes for each product lot, and a management slip output device via the network 3 in the computer. A computer program for realizing the management device 100 connected to the (printing device 150), the computer (management device 100), a plurality of processes included in the process flow stored in the storage device (process storage unit 106) An extraction unit 108 that extracts a plurality of predetermined processes from among the processes as a management form output time according to a predetermined condition, and a plurality of processes included between the extracted management form output times as one unit The partial process flow is shown to the worker 5, and the worker 5 records the work history for each of the plurality of processes included in the partial process flow. Before the predetermined process corresponding to a plurality of management slip output times, a creation unit 110 that creates print data for printing out the management slip 10 for each management slip output time in a predetermined format Corresponding to a plurality of management slip output timings based on the print data of the management slip 10 created by the creation portion 110 when receiving the print output instruction and the instruction receiving portion 116 for receiving the print output instruction of the corresponding management slip 10 It is described to function as an output unit 118 that causes the management slip output device (printing device 150) to print out the management slip 10 of the partial process flow to be performed.

  In the configuration as described above, a management method by the management apparatus 100 of the present embodiment will be described below. FIG. 5 is a flowchart illustrating an example of the operation of the management apparatus 100 of the management system according to the present embodiment.

  The management method of the present embodiment includes a management device 100 having a storage device (process storage unit 106) that stores a process flow of a product manufacturing process including a plurality of steps for each product lot, and the management device 100 via the network 3. In a management system including a connected management form output device (printing device 150), the worker 5 confirms the process procedure by presenting the flow of a product manufacturing process including a plurality of steps to the worker 5. A management method for creating a management slip 10 for the worker 5 to record work histories for a plurality of processes, and the management apparatus 100 is included in the process flow stored in the storage device (process storage unit 106). A plurality of predetermined processes are extracted as management slip output times according to a predetermined condition (S105), and between each of the extracted management slip output times. A partial process flow with a plurality of included processes as a unit is shown to the worker 5, and a management slip 10 for the worker 5 to record a work history for each of the plurality of processes included in the partial process flow is displayed as a management slip. Print data to be printed at each output time is created in a predetermined format (S107), and a print output instruction for the corresponding management slip 10 is issued before a predetermined step corresponding to a plurality of management slip output times. Upon receipt (S121), when a print output instruction is accepted (YES in S121), based on the generated print data of the management slip 10 (S123), the management slip 10 of the partial process flow corresponding to a plurality of management slip output times Is printed out by the management slip output device (printing device 150) (S125).

Hereinafter, the operation of the management system will be described in detail.
FIG. 4 is a diagram for explaining a procedure in the case of managing a product manufacturing process using the management slip 10 in the management system of the present embodiment. FIG. 5A shows an example of an operation for creating print data for the management slip 10 in the management apparatus 100. FIG. 5B shows an example of an operation of causing the management apparatus 100 to output the management slip 10 to the on-site printing apparatus 150. Hereinafter, description will be made with reference to FIGS.

  As shown in FIG. 5A, first, the management apparatus 100 of the management system of the present embodiment prepares to manage the manufacturing process of each product. In the management apparatus 100 of FIG. 1, the process receiving unit 104 receives an input of a product manufacturing process through a process input screen (not shown) based on an operation by a user such as a product manufacturing process manager (S101). Here, the procedure of the manufacturing process and the conditions of each process are accepted for each product lot. As shown in FIG. 2 (a), the information received by the process receiving unit 104 is a process memory in which a plurality of process procedures and product lots and manufacturing conditions of each process are associated with each product and each product lot. The information is stored in the unit 106 (S103). In another embodiment, when a product manufacturing process has already been determined and a database has been constructed in the process storage unit 106, steps S101 and S103 can be omitted.

  Then, the extraction unit 108 accesses the process storage unit 106, and outputs a plurality of predetermined processes from among a plurality of processes included in the process flow of the set product or product lot according to predetermined conditions, respectively. (S105). In this embodiment, the input process and the resist coating process are extracted as the management slip output time. For example, in the case of the process flow shown in FIG. 3, first, the process A that is the initial process and the process C that is repeatedly performed a plurality of times are extracted as the management form output timing. The first management slip output at the time of the process A is a management slip including the processes up to the process C where the management slip is output next to the process A. That is, each manufacturing condition of the process A and the process B including the process A and the process B1 is printed on the management slip.

  Further, the second management slip output at the time of the process C is a management slip including the processes up to the process C, the process D, the process E1 (or the process E2), and the processes A and B2. Further, the third management slip output at the time of the next step C is a management slip including the steps C, D, E1 (or E2), and steps A and B3. The fourth management slip is a management slip including the steps C, D, and E1 (or E2).

Returning to FIG. 5A, the creation unit 110 creates print data of each management slip in a predetermined format based on the process included in each management slip output at the management slip output time (S107). As described above, the format of the first management slip includes the process table 12 indicating the process flow including the steps A and B1, which are a part of all the processes, and one management slip. A bar code including information indicating that it is an eye management slip, information indicating that the process managed by this management slip starts from process A, or information indicating that the last process is process B1 14 is included. For example, the barcode 14 may include information on a product lot ID and a management slip ID.
The generated management slip print data is stored in the management slip format storage unit 112 in association with the product lot ID, management slip ID, process ID, and output destination ID as shown in FIG. (S109).

  In this embodiment, the case where the management slip creation time is set at the time of setting the production process of the product lot is taken as an example, but the present invention is not limited to this. For example, as will be described later, when a management form printout instruction is received from the site or the like, print data of the corresponding management form may be created and printed.

  Based on the print data of the management slip 10 created in this way, when the manufacturing process of the product is actually started, the management slip 10 is printed from the on-site printing device 150 at every management slip output time as will be described later. It is possible to output the work instruction to the worker 5 at the site.

  Next, an operation of causing the management apparatus 100 to output the management slip 10 to the on-site printing apparatus 150 will be described. The system example of FIG. 4 includes two printing apparatuses 150, which are a printer P1 installed at the product input process site and a printer P2 installed in the vicinity of the pre-resist coating work shelf 20.

  First, in the management apparatus 100, when a manufacturing lot production start instruction is received by the instruction receiving unit 116 (YES in S121 of FIG. 5B), the first management slip 10 is printed on-site from the management apparatus 100. A print instruction for the management slip 10 is transmitted to the apparatus 150 (printer P1 in FIG. 4) via the network 3 (S1 in FIG. 4).

  Specifically, as shown in FIG. 5B, after the instruction receiving unit 116 receives a print instruction (YES in S121), the output unit 118 causes the first management slip 10 to be stored from the management slip format storage unit 112. And the information of the output destination printer 150 is acquired (S123). Then, the output unit 118 instructs the output destination printing apparatus 150 (here, printer P1) to print the acquired first management slip 10 via the interface unit 114 (S125). In the management apparatus 100, the process returns to step S121 until the instruction receiving unit 116 receives an end instruction from the user or a user terminal (not shown) at the site, and receives the next print instruction (YES in S121). Repeat S125. When an end instruction is accepted (YES in S127), this process ends. Here, for example, the end instruction may be automatically ended when the management apparatus 100 detects that printing of all the management slips has ended, or the instruction receiving unit 116 in FIG. May be accepted.

  In FIG. 4, the management slip 10 instructed to be printed from the management apparatus 100 is output from the printer P1 (S3), received by the worker 5 (FIG. 1), and attached to the semiconductor device 1 which is a product (S5). Then, the operator 5 looks at the process table 12 (FIG. 1) of the management slip 10 attached to the semiconductor device 1 and confirms the process and work contents. At this time, since the manufacturing conditions of each process are also described in the management form 10, the operator 5 can check the conditions with the same management form 10 and work.

  For example, the manufacturing conditions may be changed irregularly, such as in the manufacturing process of a semiconductor device, for improvement of a product in progress. However, in the conventional system, the manufacturing conditions are printed on a management slip in advance. Product lot number because it was printed on a separate sheet of paper as a manufacturing condition instruction, and the field worker was working with both the control slip and the manufacturing condition printed instruction sheet The management slip and the manufacturing conditions need to be added together, and the work is complicated.

  According to the present embodiment, since the manufacturing conditions can be described in the management slip 10, it is possible to save time and labor for the worker 5 at the site to check the management slip 10 together with the manufacturing conditions. In addition, it is possible to flexibly cope with manufacturing conditions that are changed irregularly. In addition, it is possible to flexibly cope with changes in manufacturing conditions during the manufacturing process.

  Then, for example, the process A and the process B1 of FIG. 3 are performed, and the work history is recorded in the process table 12 of the management form 10 by the worker 5 of each process, and then the semiconductor device with the management form 10 attached. 1 is temporarily placed on the in-process shelf 20 before resist application (S7).

  Then, the worker 5 who is in charge of the next process C causes the barcode 14 of the management slip 10 attached to the semiconductor device 1 to be read using the barcode reader 160 (S9). The barcode reader 160 transmits the read information of the barcode 14 to the management device 100 as a print output instruction via the network 3 (S11). The management slip 10 having the barcode 14 read by the barcode reader 160 is accommodated in the collection box 22 and collected (S19).

  In the management apparatus 100, as shown in FIG. 5B, when the instruction receiving unit 116 receives a print output instruction transmitted from the barcode reader 160 via the interface unit 114 (YES in S121), the output unit 118 However, the management slip to be output next is specified from the product ID, management slip ID, or process ID included in the print output instruction, and the print data of the corresponding management slip is acquired from the management slip format storage unit 112 (S123). ).

  The output unit 118 identifies the printing device 150 to be output from the output destination ID of the management slip to be output, and instructs the printing device 150 to output the corresponding management slip via the interface unit 114 (S125).

  Returning to FIG. 4, the management apparatus 100 issues an instruction to output the second management slip 10a to the printing apparatus 150 (printer P2 in FIG. 4) via the network 3 (S13). The management form 10a is output from the printer P2 (S15), and the management form 10a is newly attached to the semiconductor device 1 in place of the management form 10 for which the barcode 14 has been read in step S9 by the operator 5 (S15). S17). Here, the second management slip 10a includes a process table 12 including a process C, a process D, a process E1, a process A, and a process B2, work contents, manufacturing conditions, and a barcode 14. It is.

  Then, the operator 5 looks at the process table 12 of the management slip 10a attached to the semiconductor device 1 and confirms the process, work contents, and manufacturing conditions, and performs the work. And, for example, after the process C, process D, process E1, process A, and process B2 of FIG. 3 are performed and the work history is recorded in the process table 12 of the management slip 10a by the worker 5 of each process, The semiconductor device 1 is temporarily placed on the pre-resisting work shelf 20 with the management slip 10a attached (S21).

  Further, the bar code 14 of the management slip 10a attached to the semiconductor device 1 is read by the worker 5 in charge of the next process C using the bar code reading device 160 (S9), and the management device A print output instruction is transmitted to 100 (S11), and the third management slip is printed out from the management apparatus 100 to the printer P2 (S13, S15).

  The third management slip is attached to the semiconductor device 1 (S17), and the old second management slip 10a whose barcode 14 is read by the barcode reader 160 is accommodated in the collection box 22 (S19). ). Thereafter, by repeating the same processing, it is possible to print out a plurality of management slips for each product lot with an output timing before a predetermined process.

  As described above, according to the management system of the embodiment of the present invention, the management slip that has been conventionally managed by one large sheet printed by outsourcing is divided into a plurality of predetermined steps. Since it is possible to print out before, it is not necessary to recreate the entire management slip when applying the improvement process flow to the product in production, so it is only necessary to recreate only the management slip corresponding to the relevant part, Changes can be handled flexibly and quickly, and the man-hours and costs for creating management slips are greatly reduced. Conventionally, management slips printed by outsourcing had to be stored and managed. However, according to the present invention, it is not necessary to have stock, and the storage location and management of management slips are not required. . It is only necessary to store general A4 size copy paper for printing management slips. Problems such as particle adhesion during management slip storage are also solved. In addition, the man-hours for requesting printing and bookbinding for management slips are not required. There is no unnecessary management slip due to the change, so resources are not wasted.

  In particular, the present invention is suitable for managing processes in an existing semiconductor production line. The reason for this is that the existing semiconductor production line, for example, a production line about 20 years ago, is not automated, and the people in the field carry and work on the product. The worker in charge records and manages the work history based on the management slip. It takes a huge amount of money to replace the management with management slips to fully automate the existing semiconductor manufacturing line, automate the process management, and make the control slips paperless. Thus, the process management in the existing semiconductor manufacturing line can be realized efficiently and at a low cost by using a management slip by simply adding a printing device 150 and a barcode reader 160 to the system, for example. it can.

  As mentioned above, although embodiment of this invention was described with reference to drawings, these are the illustrations of this invention, Various structures other than the above are also employable.

  For example, when temporarily changing process conditions temporarily, the management system of the present invention can efficiently accept and respond to the change. For example, in a semiconductor device manufacturing process, a special condition may be specified for a specific lot as a specific experiment process. Conventionally, in such a case, an engineer directly enters the on-site production line for an experimental process, finds a specific lot from hundreds of lots in the line, and identifies it on the control slip attached to the product lot. By entering the experiment instruction number separately issued for the experiment process, the operator instructed the experiment process on the spot. Then, the operator had to obtain an experiment instruction that is issued separately from the experiment instruction number, and it was necessary to work according to the experiment instruction, which took man-hours.

  In the management system of the present invention, the process accepting unit 104 can accept the condition of the specific experiment process for the specific lot, and can be stored in the process storage unit 106 in association with the product lot ID and the process ID as the condition of the specific experiment process. That is, it is only necessary to specify a specific experiment process for a specific lot in the management apparatus 100 and set the conditions without entering the site.

  Then, the creation unit 110 reads the print data of the management form 10 including the process corresponding to the specified specific experiment process from the management form format storage unit 112, the process table 12 including the specific experiment process, and the conditions of the specific experiment process To create print data for management slips that contain At this time, the management slip 10 also serves as an instruction sheet for notifying the worker that the product lot includes a specific experiment process. In other words, the format may include a message for notifying the worker that the specific experiment process is included.

  The generated print data of the management slip 10 is stored in the management slip format storage unit 112 in association with the product lot ID, the management slip ID, the process ID of the process extracted as the management slip output time, and the output destination ID. . The operator reads the barcode 14 of the management slip 10 attached to the product lot of the specific experiment target by the barcode reader 160 and transmits print output instruction information to the management device 100 via the network 3. In the management apparatus 100, the instruction receiving unit 116 receives print output instruction information from the barcode reader 160 as a print output instruction via the interface unit 114.

  Then, the print data of the management form 10 previously stored in the management form format storage unit 112 in which the work instruction of the specific experiment process of the product lot targeted for the specific experiment is described is read, and the management form 10 is printed on the printing device 150 Output. As described above, the management slip 10 printed out at this time includes an instruction for the specific experiment process, and the specific experiment condition is also presented to the operator. In this way, the engineer enters the field, searches for the corresponding product lot, and writes the experiment instruction number in the management form 10, or the operator can enter the experiment instruction form corresponding to the instruction number written in the management form 10. The efficiency of specific experiment work is improved.

It is a functional block diagram which shows the structure of the management system which concerns on embodiment of this invention. It is a figure which shows an example of the structure of the process memory | storage part of FIG. 1, and a management slip format memory | storage part. It is a flowchart which shows an example of the product manufacturing process managed by the management system which concerns on embodiment of this invention. It is a figure for demonstrating the procedure in the case of managing the manufacturing process of a product using a management slip in the management system of this Embodiment. It is a flowchart which shows an example of operation | movement of the management apparatus of the management system of this Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Semiconductor device 3 Network 5 Worker 10 Management form 12 Process table 14 Barcode 20 In-process shelf 22 before resist application Collection box 100 Management apparatus 102 Operation part 104 Process reception part 106 Process storage part 108 Extraction part 110 Creation part 112 Management form Format storage unit 114 Interface unit 116 Instruction reception unit 118 Output unit 150 Printing device 160 Bar code reading device P1 Printer P2 Printer

Claims (9)

By presenting the flow of the product manufacturing process including multiple processes to the worker, the worker confirms the process procedure and creates a management slip for the worker to record the work history for each of the multiple processes Management system
A management device, and a management slip output device connected to the management device via a network,
The management device
Storage means for storing a process flow of the product manufacturing process including the plurality of processes for each product lot;
Extraction means for extracting a plurality of predetermined processes from the plurality of processes included in the process flow stored in the storage means as management form output times according to predetermined conditions,
In addition to showing the worker a partial process flow with a plurality of processes included in each of the extracted management slip output times as a unit, the work history for each of the plurality of processes included in the partial process flow is Creating means for creating print data for printing out a management slip for recording by the worker at each management slip output time in a predetermined format;
An instruction receiving means for receiving a print output instruction of the corresponding management slip before the predetermined step corresponding to the plurality of management slip output times;
When the print output instruction is received, the management slip output of the partial process flow corresponding to the plurality of management slip output times is output based on the print data of the management slip created by the creation means A management system comprising: an output unit that causes the apparatus to perform print output. The management system according to claim 1,
The extraction unit of the management device is a management system in which, among the product manufacturing processes, a process that is repeatedly performed a plurality of times at the start of the process is used as the management form output time. In the management system according to claim 1 or 2,
The management device
Means for accepting the setting of manufacturing conditions for the product lot;
The management system of the management device creates the print data in a format in which the manufacturing conditions are further added to the management slip. The management system according to any one of claims 1 to 3,
The creation unit of the management device creates the print data in a format with a barcode attached to the management slip output device including a print output instruction information for printing out the management slip.
The management device further includes a reading device that reads the print output instruction information of the barcode recorded in the management slip,
A management system in which the instruction receiving means of the management device receives the print output instruction information of the barcode read by the reading device via the network and receives it as the print output instruction. The management system according to any one of claims 1 to 4,
Reading means for reading the management slip on which the work history is recorded by the operator as digital data by an optical reading device;
And a storage unit that stores the digital data of the work history read by the reading unit. The management system according to any one of claims 1 to 5,
The product manufactured by the product manufacturing process is a semiconductor device, and the extraction unit of the management device includes a management process including an input process and a resist coating process in the product manufacturing process of the semiconductor device as the management form output timing. system. The worker confirms the process procedure by presenting a flow of a product manufacturing process including a plurality of processes connected to the management form output device via the network, and the work history for each of the plurality of processes is displayed. A management device that causes the management slip output device to output a management slip for recording by the worker,
Storage means for storing a process flow of the product manufacturing process including the plurality of processes for each product lot;
Extraction means for extracting a plurality of predetermined processes from the plurality of processes included in the process flow stored in the storage means as management form output times according to predetermined conditions,
In addition to showing the worker a partial process flow with a plurality of processes included in each of the extracted management slip output times as a unit, the work history for each of the plurality of processes included in the partial process flow is Creating means for creating print data for printing out a management slip for recording by the worker at each management slip output time in a predetermined format;
An instruction receiving means for receiving a print output instruction of the corresponding management slip before the predetermined step corresponding to the plurality of management slip output times;
When the print output instruction is received, the management slip output of the partial process flow corresponding to the plurality of management slip output times is output based on the print data of the management slip created by the creation means And an output unit that causes the apparatus to print out. In a management system comprising a management device having a storage device for storing a process flow of a product manufacturing process including a plurality of steps for each product lot, and a management slip output device connected to the management device via a network, Management that presents the process flow of the product manufacturing process to the worker so that the worker confirms the process procedure and creates a management slip for the worker to record work histories for each of the plurality of processes A method,
The management device is
Extracting a plurality of predetermined processes from the plurality of processes included in the process flow stored in the storage device according to predetermined conditions, respectively, as a management slip output time,
In addition to showing the worker a partial process flow with a plurality of processes included in each of the extracted management slip output times as a unit, the work history for each of the plurality of processes included in the partial process flow is A management form for the operator to record is created in a predetermined format for printing data for printing out each time the management form is output,
Prior to the predetermined step corresponding to the plurality of management slip output times, a corresponding printout instruction of the management slip is received,
When the print output instruction is received, the management slip of the partial process flow corresponding to the plurality of management slip output times is printed on the management slip output device based on the print data of the created management slip Management method to output. Computer for realizing a management device having a storage device for storing a process flow of a product manufacturing process including a plurality of processes for each product lot and connected to a management slip output device for printing out a management slip via a network A program, a computer,
Extraction means for extracting a plurality of predetermined processes from the plurality of processes included in the process flow stored in the storage device as management slip output times according to predetermined conditions,
The worker is shown a partial process flow with a plurality of processes included in each of the extracted management slip output times as a unit, and the work history for each of the plurality of processes included in the partial process flow is Creating means for creating print data for printing out a management slip for recording by a person at each management slip output time in a predetermined format;
An instruction receiving means for receiving a print output instruction of the corresponding management slip before the predetermined step corresponding to the plurality of management slip output times;
When the print output instruction is received, the management slip output of the partial process flow corresponding to the plurality of management slip output times is output based on the print data of the management slip created by the creation means A management program for causing the device to function as an output means for printing out.

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