JP2009270140A - Aluminum foil for electrolytic capacitor - Google Patents

Aluminum foil for electrolytic capacitor Download PDF

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JP2009270140A
JP2009270140A JP2008119833A JP2008119833A JP2009270140A JP 2009270140 A JP2009270140 A JP 2009270140A JP 2008119833 A JP2008119833 A JP 2008119833A JP 2008119833 A JP2008119833 A JP 2008119833A JP 2009270140 A JP2009270140 A JP 2009270140A
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foil
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surface layer
pits
aluminum foil
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JP5104525B2 (en
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Asami Ito
麻美 伊藤
Masahiko Katano
雅彦 片野
Yuya Yoshida
祐也 吉田
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Nippon Light Metal Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an aluminum foil which can meet a requirement of further increasing the capacitance of the electrolytic capacitor when having been electrolytically etched. <P>SOLUTION: The aluminum foil for the electrolytic capacitor has an aluminum purity of 99.9% or higher, and includes one or more of In, Bi or Sn. In the surface layer from the surface to the depth of 0.1 μm, 10 to 500 ppm of Pb exists and In, Bi or Sn are not concentrated. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、電解コンデンサの電極に用いられるエッチング処理前の電解コンデンサ用のアルミニウム箔に関する。本発明の明細書において、%、ppmは質量換算である。   The present invention relates to an aluminum foil for an electrolytic capacitor that is used for an electrode of an electrolytic capacitor and that is not yet etched. In the specification of the present invention,% and ppm are in terms of mass.

電解コンデンサの電極は、アルミニウム箔を電解エッチング処理して単位投影面積あたりの表面積を拡大し、更にその表面に陽極酸化皮膜を形成している。このような用途に使用されるアルミニウム箔としては、従来より特殊な処理をして箔表層に微量添加元素の濃縮層を形成した箔を用いている。   The electrode of the electrolytic capacitor is obtained by subjecting an aluminum foil to an electrolytic etching process to increase the surface area per unit projected area, and further, an anodized film is formed on the surface. As an aluminum foil used for such an application, a foil that has been specially treated and formed a concentrated layer of a trace amount of added elements on the surface of the foil is used.

本発明の電解コンデンサ用アルミニウム箔は、直流でエッチング処理して電極に供されるが、例えば、特許文献1(特公昭62-42370号公報)には、アルミニウム箔の表面にPb、In、およびBiの少なくとも一種を元素または化合物の状態で付与し、これ等金属の融点以上の温度で熱拡散処理し、必要ならば常法に従って焼鈍を行なって、箔の表層にPb、In、およびBiを濃縮している電解コンデンサ用アルミニウム箔が開示されている。なおこの箔には不純物元素として1ppm未満の含有を許容している。   The aluminum foil for electrolytic capacitors of the present invention is used as an electrode after being etched by direct current. For example, in Patent Document 1 (Japanese Patent Publication No. 62-42370), Pb, In, and At least one of Bi is imparted in the state of an element or a compound, heat diffusion treatment is performed at a temperature equal to or higher than the melting point of these metals, and annealing is performed according to a conventional method if necessary, and Pb, In, and Bi are added to the surface layer of the foil. A concentrated aluminum foil for electrolytic capacitors is disclosed. In addition, this foil is allowed to contain less than 1 ppm as an impurity element.

また、特許文献2(特開2000-252170号公報)には、Al純度が99.9%を超える、電解コンデンサの陽極の製造のための箔であって、該箔は元素Pb+B+Inの合計の平均重量含有量が0.1〜10ppmで、深さ0.1μmの表面領域におけるこれらの3元素の分布が、イオン分析によって得られた信号強度で5未満の分散比率Rd=(Imax−Imin)/Iaverage を示すような精錬アルミニウムの薄い箔が提案されている。特にこの箔は冷間圧延を挟んで高温と低温の中間焼きなましを加え、更に最終焼きなまし処理の加熱保持温度をアルゴンガスの下で580℃×10時間とすることによって箔表層にPb+B+Inをばらつき小さく濃縮させることができ、そのような箔をエッチング処理することによって箔表層のPb、B、Inの濃度のばらつきが大きい箔に対して高い静電容量をもたらすことができることが開示されている。   Patent Document 2 (Japanese Patent Laid-Open No. 2000-252170) discloses a foil for manufacturing an anode of an electrolytic capacitor having an Al purity exceeding 99.9%, and the foil is an average of the total of elements Pb + B + In The distribution of these three elements in the surface region having a weight content of 0.1 to 10 ppm and a depth of 0.1 μm is a dispersion ratio Rd = (Imax−Imin) / A thin foil of refined aluminum that exhibits Iaverage has been proposed. In particular, this foil is subjected to intermediate annealing at high and low temperatures with cold rolling in between, and the heating and holding temperature of the final annealing treatment is 580 ° C. × 10 hours under argon gas, so that Pb + B + In is concentrated in the foil surface layer with small variation. It has been disclosed that by etching such a foil, a high capacitance can be provided for a foil having a large variation in the Pb, B, and In concentration of the foil surface layer.

特公昭62-42370号公報Japanese Patent Publication No.62-42370 特開2000-252170号公報JP 2000-252170 A

しかしながら、前記従来技術では電解エッチング処理による箔の拡面率に限界があり、静電容量の高容量化に対応できない。すなわち、Pb,In,Biの全てまたはPb,In,Bの全てが表層に濃縮しているためピット数が過多になり、ピット同士の結合や表層部の過度な溶解が生じるため静電容量が上昇しない。   However, the conventional technique has a limit in the surface area expansion ratio of the foil by electrolytic etching, and cannot cope with the increase in capacitance. That is, since all of Pb, In, Bi or all of Pb, In, B are concentrated on the surface layer, the number of pits becomes excessive, and bonding between pits and excessive dissolution of the surface layer portion occur, resulting in a capacitance. Does not rise.

本発明の目的は、電解エッチング処理で静電容量の高容量化に対応できるアルミニウム箔を提供することである。   An object of the present invention is to provide an aluminum foil that can cope with an increase in capacitance by electrolytic etching.

本発明者らはアルミニウム箔表層に含有される元素の微量範囲を検討した結果、Pbが表層に規定量存在し、In、Bi、Snが表層に濃縮していないアルミニウム箔は、Pb、In、Bi、Snが表層に濃縮しているアルミニウム箔と比較して静電容量の高いことを見出して本発明を完成したものである。   As a result of studying a minute range of elements contained in the surface layer of the aluminum foil, the present inventors have found that an aluminum foil in which Pb is present in the surface layer and In, Bi, Sn is not concentrated in the surface layer is Pb, In, The present invention has been completed by finding that the capacitance is higher than that of the aluminum foil in which Bi and Sn are concentrated in the surface layer.

即ち、本発明はAl純度が99.9%以上で、In、BiまたはSnの一種以上を含有する箔であって、表面から深さ0.1μmまでの表層にPbが10〜500ppm存在し、かつIn、BiまたはSnが該表層に濃縮していないことを特徴とする電解コンデンサ用アルミニウム箔である。   That is, the present invention is a foil having an Al purity of 99.9% or more and containing one or more of In, Bi, or Sn, and 10 to 500 ppm of Pb is present in the surface layer from the surface to a depth of 0.1 μm, The aluminum foil for electrolytic capacitors is characterized in that In, Bi or Sn is not concentrated in the surface layer.

本発明において、In、BiまたはSnの一種以上の含有量は、In:0.1〜10ppm、Bi:0.1〜10ppm、Sn:1〜20ppm、であることが望ましい。   In the present invention, the content of one or more of In, Bi, or Sn is preferably In: 0.1 to 10 ppm, Bi: 0.1 to 10 ppm, and Sn: 1 to 20 ppm.

更に、Pbを5ppm以下含有していることが望ましい。   Furthermore, it is desirable to contain 5 ppm or less of Pb.

本発明のアルミニウム箔は電解コンデンサの静電容量の高容量化に対応できるので、軽量で小型の電解コンデンサおよび電子機器装置等を提供できるという効果を有する。   Since the aluminum foil of the present invention can cope with an increase in the capacitance of the electrolytic capacitor, it has an effect that it is possible to provide a lightweight and small electrolytic capacitor, an electronic device, and the like.

アルミニウム電解コンデンサは、例えば中高圧用コンデンサの場合は、ピット形成による表面積拡大のために、典型的には下記のようにエッチング処理される。即ち、直流による連続エッチング処理でトンネル状にピットを穿孔して表面積を拡大させる。このエッチング処理は、一次エッチング処理と二次エッチング処理の二段階に分けて行い、一次エッチング処理では箔表面に初期トンネル状ピットを多数形成し、次いで二次エッチング処理では処理条件を変えて初期トンネル状ピットを深くかつピット径を拡大する。二次エッチング処理を多段に分け条件を変えて処理することも行なわれている。一次エッチング処理で形成される箔表面の初期トンネル状ピットの数は箔表面の性状に大きく影響を受けるものである。   For example, in the case of a medium-high voltage capacitor, an aluminum electrolytic capacitor is typically etched as follows in order to increase the surface area by forming pits. That is, the surface area is increased by drilling pits in a tunnel shape by continuous etching using direct current. This etching process is performed in two stages, a primary etching process and a secondary etching process. In the primary etching process, a large number of initial tunnel-like pits are formed on the foil surface. Deep pits and enlarge the pit diameter. The secondary etching process is divided into multiple stages and processed under different conditions. The number of initial tunnel-like pits on the foil surface formed by the primary etching process is greatly influenced by the properties of the foil surface.

本発明は、In、BiまたはSnの一種以上、もしくは更にPbを5ppm以下含有する箔であって、箔表面から0.1μm深さの間の表層においてPbの含有量が10〜500ppmであり、かつIn、BiまたはSnの一種以上は表層に濃縮していないことが必要である。これは箔の表層に存在している高濃度Pbと箔のマトリックス中のIn、BiまたはSnの一種以上、もしくは更に含有させるPbの存在する箔表面の特殊性状の基本になるもので、これにより一次エッチング処理において形成される初期トンネル状ピットの過大な溶解あるいは結合を極力少なくし、初期ピットの起点を多くできる。その理由の詳細は未解明であるが、下記のように推察される。なお、従来から一般に箔は厚さ200μm以下とされているが、本発明においては、箔という用語を使用するが特に厚さを限定するものではない。   The present invention is a foil containing one or more of In, Bi or Sn, or further containing 5 ppm or less of Pb, the Pb content in the surface layer between 0.1 μm depth from the foil surface is 10 to 500 ppm, And it is necessary that one or more of In, Bi or Sn is not concentrated in the surface layer. This is the basis of the high-density Pb present in the surface layer of the foil and one or more of In, Bi or Sn in the foil matrix, or the special properties of the foil surface where Pb to be further contained exists. The excessive melting or bonding of the initial tunnel-like pits formed in the primary etching process can be reduced as much as possible, and the starting points of the initial pits can be increased. Although the details of the reason are unclear, it is presumed as follows. Conventionally, a foil is generally 200 μm or less in thickness, but in the present invention, the term “foil” is used, but the thickness is not particularly limited.

まず、箔表面から0.1μmまでの深さを表層と限定した理由は、一次エッチング処理時の初期ピット形成に大きく影響を与えるのは、表面を含みせいぜい箔表面から0.1μmまでの深さの表層であるからである。0.1μmより深い内部までが上記の状態であっても、一次エッチング処理による初期ピットは0.1μm以内の深さに形成されれば十分であるし、また、二次エッチング処理でピットを深く径を拡げる処理においても影響は少ないと考えられるからである。   First, the reason why the depth from the foil surface to 0.1 μm is limited to the surface layer is that the initial pit formation during the primary etching process is greatly affected by the depth from the foil surface to the 0.1 μm at most. It is because it is the surface layer. Even if the inner part deeper than 0.1 μm is in the above state, it is sufficient if the initial pits formed by the primary etching process are formed to a depth of 0.1 μm or less, and the pits are deepened by the secondary etching process. This is because it is considered that there is little influence in the process of expanding the diameter.

さらに説明を加えると、製板から製箔までの過程で形成される箔の表層部は、析出部、AlおよびAl以外の元素あるいはそれらの酸化物等により、多くの欠陥部を生じる。この欠陥部が周囲と比較して電気化学的な電位差が大きければ、その欠陥部、あるいはその周囲において一次エッチング処理時に初期ピットを形成し易いものと考えられる。ここでPbはAlに固溶しないと考えられ分散状態と思われる。Pbの存在部はミクロ的にみると周囲と比較して電気化学的な電位差が大きいと共にその電位差の大きい箇所数も多いものと考えられる。一方In、Bi、SnもAlに固溶しないと考えられ分散状態と思われる。またIn、Bi、SnもPbと同様にミクロ的にみると周囲と比較して電気化学的な電位差が大きいものと考えられる。従って一次エッチング処理時にPbが存在し、In、Bi、Snが濃縮していない表層において形成された初期ピットは、過大な溶解もなく、ピット同士の結合も少ないのでその数も多く、二次エッチング処理でピットを深くかつピット径を広げる過程において、In、Bi、Snの存在の基で更にピット数の増加はあるにしても、初期ピット数の影響の方が大きく結果として静電容量の大きな箔が得られるものと考えられる。しかしながら従来技術の認識に従うと、PbばかりでなくIn、Bi、Snが表層に濃縮しており、Pb、In、Bi、Snによるピット数が過多になってピット同士が結合し、あるいは表層部の過度な溶解が生じ、期待するほどには静電容量が向上しないものと思われる。   In further explanation, the surface layer part of the foil formed in the process from the plate making to the foil making has many defective parts due to the precipitation part, Al and elements other than Al or oxides thereof. If this defective portion has a larger electrochemical potential difference than the surrounding area, it is considered that initial pits can be easily formed in the defective portion or the surrounding area during the primary etching process. Here, it is considered that Pb does not dissolve in Al and is considered to be in a dispersed state. From the microscopic viewpoint, the Pb-existing portion is considered to have a large electrochemical potential difference and a large number of locations where the potential difference is large compared to the surroundings. On the other hand, it is considered that In, Bi, and Sn are not dissolved in Al and are in a dispersed state. Similarly to Pb, In, Bi, and Sn are considered to have a larger electrochemical potential difference than the surroundings when viewed microscopically. Therefore, the number of initial pits formed on the surface layer where Pb is present during the primary etching process and In, Bi, and Sn are not concentrated is not excessively dissolved and there are few bonds between the pits. In the process of deepening the pit and widening the pit diameter in the process, even if there is a further increase in the number of pits due to the presence of In, Bi, Sn, the effect of the initial number of pits is greater, resulting in a larger capacitance. It is thought that foil is obtained. However, according to the recognition of the prior art, not only Pb but also In, Bi, and Sn are concentrated on the surface layer, the number of pits due to Pb, In, Bi, and Sn becomes excessive, and the pits are combined, or the surface layer portion It seems that excessive dissolution occurs and the capacitance does not improve as expected.

ここで、Al純度が99.9%以上であることは、エッチング処理でピットをトンネル状に穿孔するために必要であり、純度が低下するとピットが分岐し易く、分岐のない直線的なトンネル状のピット穿孔ができない。   Here, Al purity of 99.9% or more is necessary for drilling pits in a tunnel shape by etching treatment. When the purity decreases, the pits easily branch, and there is no straight tunnel shape without branching. Pit drilling is not possible.

表面から深さ0.1μmまでの表層におけるPbの平均含有量は10〜500ppmであり、かつ該表層にはIn、BiまたはSnの一種以上の元素が濃縮していないことは、一次エッチング処理で適正な数の初期ピットを穿孔するために必要である。表層のPbが10ppm未満では初期ピット数が少なく、また500ppmを超えると初期ピットが過溶解または結合もしくは連通して初期ピット数が少なく、結果として静電容量の高い箔が得られない。またPbの含有量が10〜500ppmであっても、箔に含有しているIn、BiまたはSnの一種以上の元素が表層に濃縮していると、初期ピットが過溶解または結合もしくは連通してピット数が少なく、結果として静電容量の高い箔が得られない。   The average content of Pb in the surface layer from the surface to a depth of 0.1 μm is 10 to 500 ppm, and that one or more elements of In, Bi or Sn are not concentrated in the surface layer is a primary etching process. Required to drill the correct number of initial pits. If the Pb of the surface layer is less than 10 ppm, the number of initial pits is small, and if it exceeds 500 ppm, the initial pits are over-dissolved, bonded or communicated to reduce the number of initial pits, and as a result, a foil having a high electrostatic capacity cannot be obtained. Even if the content of Pb is 10 to 500 ppm, if one or more elements of In, Bi, or Sn contained in the foil are concentrated on the surface layer, the initial pits are over-dissolved, bonded or communicated. The number of pits is small, and as a result, a foil having a high capacitance cannot be obtained.

本発明において、In、BiまたはSnの一種以上の元素が表層に濃縮していないとは、表層のIn、BiまたはSnの濃度が箔の平均組成におけるIn、BiまたはSnの濃度(箔の各元素含有量)の2倍を超えないことを言う。平均組成は溶湯の組成に対応する。In、Bi、Snの濃縮程度は少ないほど好ましいが、これらの元素は箔の製造過程で表層に濃縮し易いため、平均組成における含有量の2倍を基本的な上限とする。好ましくは表層での濃度は平均組成における含有量の1.5倍以下、更に好ましくは1.3倍以下である。   In the present invention, the fact that one or more elements of In, Bi, or Sn are not concentrated in the surface layer means that the concentration of In, Bi, or Sn in the surface layer is the concentration of In, Bi, or Sn in the average composition of the foil (each of the foil It means not to exceed twice the element content. The average composition corresponds to the composition of the melt. Although the degree of concentration of In, Bi, and Sn is preferably as small as possible, these elements are easily concentrated on the surface layer in the process of manufacturing the foil, and therefore the basic upper limit is set to twice the content in the average composition. The concentration in the surface layer is preferably 1.5 times or less, more preferably 1.3 times or less of the content in the average composition.

平均組成における含有量の2倍を超えて存在すると濃縮していない箔と比べてピットが過溶解または結合して初期ピット数が少なく、結果として静電容量の高い箔が得られない。   If the content exceeds twice the content in the average composition, pits are over-dissolved or combined as compared with the foil that is not concentrated, and the number of initial pits is small, and as a result, a foil having a high capacitance cannot be obtained.

箔がIn、BiまたはSnの一種以上を含有することは、箔のエッチング処理過程で初期ピットを穿孔もしくは拡径し易くするために必要である。好ましい含有量は、In:0.1〜10ppm、Bi:0.1〜10ppm、Sn:1〜20ppmで、更に好ましくはIn+Bi≦10ppm、In+Bi+Sn≦20ppmある。下限値未満では効果が少なく、また上限値を超えると一次エッチング処理過程で初期ピットが過溶解または結合する傾向がみられて初期ピット数が少なくなると共に二次エッチング過程でトンネル状のピット数が少なくなり、結果として静電容量の高い箔が得難くなる。   It is necessary for the foil to contain one or more of In, Bi, or Sn in order to make it easy to drill or expand the initial pit during the etching process of the foil. Preferable contents are In: 0.1 to 10 ppm, Bi: 0.1 to 10 ppm, Sn: 1 to 20 ppm, and more preferably In + Bi ≦ 10 ppm and In + Bi + Sn ≦ 20 ppm. Below the lower limit, the effect is small, and when the upper limit is exceeded, initial pits tend to be over-dissolved or combined in the primary etching process, reducing the number of initial pits and increasing the number of tunnel-like pits in the secondary etching process. As a result, it becomes difficult to obtain a foil having a high capacitance.

更に好ましくは、Pbを箔に5ppm以下含有させると、In、BiまたはSnと同様の効果が期待できる。上限値を超えると、一次エッチング処理過程で初期ピットが過溶解または結合する傾向がみられて二次エッチング処理過程でトンネル状のピット数が少なくなり、結果として静電容量の高い箔が得難くなる。   More preferably, when Pb is contained in the foil in an amount of 5 ppm or less, the same effect as In, Bi or Sn can be expected. When the upper limit is exceeded, initial pits tend to be over-dissolved or bonded during the primary etching process, and the number of tunnel-like pits decreases during the secondary etching process, resulting in difficulty in obtaining a foil with high capacitance. Become.

先にAl純度の規定の説明をしたが、本発明で規定した以外の元素については、本発明の効果を妨げない範囲で含有量を適宜定めることができる。例えば、好ましい範囲としてFeおよびSiの含有量は各5〜100ppm、Cuの含有量は、20〜100ppm、Zn、Ga、Bは各20ppm好ましくは10ppm以下、更に好ましくは5ppm以下がよく、Zn、Ga、Bの合計で20ppm以下がよい。前記以外の元素は各5ppm以下、好ましくは3ppm以下、更に好ましくは1ppm以下がよく、合計で10ppm以下がよい。   Although the definition of Al purity has been described above, the content of elements other than those specified in the present invention can be appropriately determined within a range not impeding the effects of the present invention. For example, as preferable ranges, the content of Fe and Si is 5 to 100 ppm each, the content of Cu is 20 to 100 ppm, Zn, Ga, and B are each 20 ppm, preferably 10 ppm or less, more preferably 5 ppm or less, Zn, The total of Ga and B is preferably 20 ppm or less. Elements other than the above are each 5 ppm or less, preferably 3 ppm or less, more preferably 1 ppm or less, and 10 ppm or less in total.

<本発明のアルミニウム箔を製造する方法>
本発明のアルミニウム箔は、種々の方法で製造できるが、一例を挙げれば下記の如くである。まずAlの含有量99.9質量%以上(すなわちAl純度99.9質量%以上)の前提で、例えば、In:0.1〜10ppm、Bi:0.1〜10ppmまたはSn:0.5〜20ppmの一種以上、もしくは更にPbを5ppm以下含有する組成の範囲で配合調節し溶製する。添加元素は溶製にあたって地金、返り材、および金属あるいは母合金等で添加含有させる。
<Method for producing the aluminum foil of the present invention>
The aluminum foil of the present invention can be produced by various methods. An example is as follows. First, on the premise that the Al content is 99.9% by mass or more (that is, Al purity is 99.9% by mass or more), for example, In: 0.1 to 10 ppm, Bi: 0.1 to 10 ppm, or Sn: 0.5 to The composition is adjusted and melted in the range of a composition containing at least 20 ppm or further containing 5 ppm or less of Pb. The additive element is added and contained as a base metal, a return material, a metal or a master alloy, etc. during melting.

溶製にあたって、脱ガス、脱滓、必要に応じてフィルターを通過させてシート用鋳塊に鋳造する。分析用のサンプルをJIS H 2111に準じて採取し、固体発光分光分析装置(ARL社(*)製ARL3460(*:旧社名。現在:Thermo Fisher Scientific社))で分析し、箔の組成とした。鋳塊は均質化熱処理を経て、熱延、冷延し、必要に応じて中間焼鈍し箔地とする。次に各種濃度にPbを溶解させた酸性溶液を箔表面に塗布し、例えば100℃〜250℃の温度で加熱保持することでPbが表層に高濃度で存在し、In、Bi、Snは表層に濃縮していない箔を得ることができる。すなわち、前記の加熱条件は、表面に塗布したPbが表層内に拡散するが、内部に含有されているIn、Bi、Snは実質的に拡散しない温度および時間を組み合わせた条件を適宜選定すればよく、特に限定する必要はない。   In melting, degassing, degassing, and if necessary, passing through a filter and casting into a sheet ingot. Samples for analysis were collected according to JIS H 2111 and analyzed with a solid state emission spectrometer (ARL3460 manufactured by ARL (*) (*: former company name. Present: Thermo Fisher Scientific)) to obtain a foil composition. . The ingot is subjected to homogenization heat treatment, hot rolled, cold rolled, and intermediate annealed as necessary to obtain a foil. Next, an acidic solution in which Pb is dissolved in various concentrations is applied to the foil surface and, for example, Pb is present in the surface layer at a high concentration by heating and holding at a temperature of 100 ° C. to 250 ° C., and In, Bi, and Sn are surface layers. It is possible to obtain a foil that has not been concentrated. That is, the heating conditions described above can be appropriately selected by combining conditions of temperature and time in which Pb applied on the surface diffuses in the surface layer, but In, Bi, and Sn contained therein are not substantially diffused. Well, it is not necessary to limit in particular.

本発明における中高圧用コンデンサ用アルミニウム箔、即ち化成電圧100V以上で化成処理されるアルミニウム箔は、ピット形成による拡面率増大のため典型的には下記のようにエッチング処理される。例えば、直流による連続エッチング処理でトンネル状のピットを穿孔して拡面率を増大させる。このエッチング処理は一次エッチング処理と二次エッチング処理の二段階に分けて行い、一次エッチング処理では箔表面に初期ピットを多数形成し、次いで二次エッチング処理では処理条件を変えて初期ピットを箔厚さ方向に進行させると共にピットの径を拡大させる。   The aluminum foil for medium- and high-voltage capacitors in the present invention, that is, the aluminum foil that is subjected to chemical conversion treatment at a chemical conversion voltage of 100 V or more, is typically etched as follows in order to increase the area expansion ratio due to pit formation. For example, the area expansion rate is increased by drilling tunnel-like pits by direct etching using direct current. This etching process is divided into two stages, a primary etching process and a secondary etching process. In the primary etching process, a large number of initial pits are formed on the foil surface, and then in the secondary etching process, the processing conditions are changed to change the initial pits to the foil thickness. Advancing in the direction and expanding the pit diameter.

一次エッチング処理で使用する電解液は、塩酸、硫酸、燐酸、硝酸等のうちの1種または2種以上を含有する公知の混酸水溶液でよく、特に限定されるものではない。電解液の温度が高いと反応が促進されて好ましいが、高温に過ぎると反応が速すぎて箔表面の溶解が激しく均一な初期ピットを形成し難くなる。好ましい液温度は60〜95℃である。また好ましい処理時間は2〜4分程度である。電気量は15〜30ク−ロン/cm、電流密度は100〜300mA/cmが好ましい。 The electrolytic solution used in the primary etching process may be a known mixed acid aqueous solution containing one or more of hydrochloric acid, sulfuric acid, phosphoric acid, nitric acid and the like, and is not particularly limited. When the temperature of the electrolytic solution is high, the reaction is promoted, which is preferable. However, when the temperature is too high, the reaction is too fast and the foil surface is so melted that it becomes difficult to form uniform initial pits. A preferable liquid temperature is 60 to 95 ° C. Moreover, a preferable processing time is about 2 to 4 minutes. The amount of electricity is preferably 15 to 30 K / cm 2 , and the current density is preferably 100 to 300 mA / cm 2 .

二次エッチング処理による初期ピット径の拡大処理は、直流電解処理、化学処理、または両者を併用することにより、一次エッチング処理により形成した初期ピットの径を拡大して表面積を増大させる。   The initial pit diameter increasing process by the secondary etching process increases the surface area by increasing the diameter of the initial pit formed by the primary etching process by using a direct current electrolytic process, a chemical process, or a combination of both.

二次エッチング処理の条件は、特に限定する必要はないが、例えば電解液としては、塩酸に少量の硫酸、燐酸、蓚酸等を加えた混酸水溶液や硝酸を加えた混酸水溶液が好ましい。あるいは、一次エッチング処理液と同種のもので化学処理してもよい。液の温度は60〜95℃が好ましく、電解を行う場合には電流密度は60〜200mA/cmが好ましい。処理時間はトンネルピットの拡径の寸法にもよるが典型的には2〜20分程度である。トンネル状ピットの長さ(深さ)は、箔厚さとエッチング処理された箔の用途等で異なるが、一般的に10〜50μmである。エッチング処理によりピットを形成して表面積を増大させたアルミニウム箔は、この箔を陽極として化成処理を施す。化成処理は公知の条件で施せばよく、例えば電解液としては、硼酸アンモニウム、燐酸アンモニウム、有機酸アンモニウム等の緩衝溶液を用いて、コンデンサの用途によって約100〜200V以上の電圧を一段または多段で印加して化成皮膜、即ち誘電体皮膜を形成する。アルミニウム箔は前記エッチング処理に先立って、箔の表面を脱油および表面調整のために酸またはアルカリ液による処理を施してもよい。この処理は、例えば処理液としては0.05〜1mol/リットルの硝酸または苛性ソーダ水溶液を用い、温度40〜60℃で処理しておくとよい。 The conditions for the secondary etching treatment need not be particularly limited. For example, the electrolyte is preferably a mixed acid aqueous solution obtained by adding a small amount of sulfuric acid, phosphoric acid, oxalic acid or the like to hydrochloric acid, or a mixed acid aqueous solution obtained by adding nitric acid. Alternatively, chemical treatment may be performed using the same kind of primary etching treatment liquid. The temperature of the liquid is preferably 60 to 95 ° C., and when electrolysis is performed, the current density is preferably 60 to 200 mA / cm 2 . The treatment time is typically about 2 to 20 minutes, although it depends on the diameter of the tunnel pit. The length (depth) of the tunnel-like pit varies depending on the foil thickness and the usage of the etched foil, but is generally 10 to 50 μm. The aluminum foil whose surface area is increased by forming pits by etching treatment is subjected to chemical conversion treatment using this foil as an anode. The chemical conversion treatment may be performed under known conditions. For example, as an electrolytic solution, a buffer solution such as ammonium borate, ammonium phosphate, or organic acid ammonium is used, and a voltage of about 100 to 200 V or more is applied in one or more stages depending on the use of the capacitor. A chemical conversion film, that is, a dielectric film is formed by application. Prior to the etching process, the surface of the foil may be treated with an acid or an alkali solution for deoiling and surface adjustment. In this treatment, for example, 0.05 to 1 mol / liter of nitric acid or a caustic soda aqueous solution may be used as a treatment solution, and the treatment may be performed at a temperature of 40 to 60 ° C.

本発明のアルミニウム箔を下記の手順で製造し、特性を評価した。   The aluminum foil of this invention was manufactured in the following procedure, and the characteristic was evaluated.

〔試料の作成方法〕
<鋳造>
SiおよびFeの含有量各10〜40ppm、Cu含有量50〜70ppm、In、BiまたはSnの一種以上の含有量を種々の値とし、あるいは更にPbを添加し、前記の範囲で配合調節し溶製したAl純度99.9質量%以上の表1または表2に記載のアルミニウム合金溶湯をDC鋳造法で厚さ560mmのシート用鋳塊とし、該鋳塊を600℃の温度に10時間保持して均質化処理を施し、室温で両面を各15mm面削した。
[Sample preparation method]
<Casting>
Each of Si and Fe contents 10-40 ppm, Cu content 50-70 ppm, one or more contents of In, Bi or Sn are set to various values, or further Pb is added, and the composition is adjusted within the above range and dissolved. The aluminum alloy melt shown in Table 1 or Table 2 having an Al purity of 99.9% by mass or more was made into an ingot for a sheet having a thickness of 560 mm by DC casting, and the ingot was held at a temperature of 600 ° C. for 10 hours. The surfaces were homogenized and each side was shaved at 15 mm at room temperature.

<圧延>
再加熱して鋳塊温度520℃で熱間圧延を開始し、厚さ6mmの熱間圧延板を得た。熱間圧延の終了温度は210℃であった。得られた熱間圧延板に中間焼鈍を施し、0.25mmまで冷間圧延して箔地とした。
<Rolling>
It was reheated and hot rolling was started at an ingot temperature of 520 ° C. to obtain a hot rolled plate having a thickness of 6 mm. The end temperature of hot rolling was 210 ° C. The obtained hot-rolled sheet was subjected to intermediate annealing and cold-rolled to 0.25 mm to obtain a foil.

<箔圧延>
次いで、厚さ130μmまで冷間圧延した後260℃×50分保持の中間焼鈍を施して厚さ110μmに圧延して箔とした。この箔を530℃×30分保持の最終焼鈍処理して箔を得た。
<Foil rolling>
Next, after cold rolling to a thickness of 130 μm, intermediate annealing at 260 ° C. × 50 minutes was performed to roll to a thickness of 110 μm to obtain a foil. This foil was finally annealed at 530 ° C. for 30 minutes to obtain a foil.

<箔表層にPbを存在させる処理>
次に各種濃度にPbを溶解させた塩酸溶液を用意し、0.3〜0.5N程度の塩酸水溶液として箔表面に塗布し、160℃の温度で10分間保持し試料とした。
<Process to make Pb exist on foil surface layer>
Next, a hydrochloric acid solution in which Pb was dissolved in various concentrations was prepared, applied to the foil surface as a hydrochloric acid aqueous solution of about 0.3 to 0.5 N, and kept at a temperature of 160 ° C. for 10 minutes to prepare a sample.

〔評価〕
<表層組成>
得られた前記試料の表層部の組成を下記の方法で分析した。結果を表1または表2に示す。
[Evaluation]
<Surface composition>
The composition of the surface layer portion of the obtained sample was analyzed by the following method. The results are shown in Table 1 or Table 2.

《表層部の組成分析方法:Pb、In、Bi、Sn》
20%(5mol/リットル)苛性ソーダ水溶液で箔表面から0.1μmまでの表層を溶解し、硝酸で酸性にした後、フレームレス原子吸光法(バリアン社製 SpectrAA220Pの付属書『Analytical Methods for Graphite Tube Atomizers,Varian』に準ずる方法)で定量した。
<< Surface Layer Composition Analysis Method: Pb, In, Bi, Sn >>
Dissolve the surface layer from the foil surface to 0.1 μm in 20% (5 mol / liter) caustic soda solution, acidify with nitric acid, and then add flameless atomic absorption method (SpectAA220P manufactured by Varian Inc. Analytical Methods for Graphite Tube Atomizers , Method according to Varian ”).

<静電容量>
得られた試料を下記に示す条件で電解エッチングした後、JEITA RC-2364Aに準じて硼酸系水溶液で250V化成し、静電容量を測定した。
<Capacitance>
The obtained sample was subjected to electrolytic etching under the conditions shown below, then formed into 250V with a boric acid aqueous solution according to JEITA RC-2364A, and the capacitance was measured.

《エッチング条件》
[前処理]
エッチング液:0.1mol苛性ソーダ/リットルの水溶液
温度:50℃
浸漬時間:60秒
[一次エッチング処理]
電解液:(1molの塩酸+3molの硫酸)/リットルの水溶液
温度:85℃
電流密度:200mA/cm
電解時間:120秒
[二次エッチング処理(浸漬処理)]
エッチング液:(1molの塩酸+3molの硫酸)/リットルの水溶液
温度:85℃
浸漬時間:900秒
二次エッチング処理後の静電容量を測定した。結果を表1に示す。表中、比較例の試料番号2−1(表2)の静電容量を100(基準)として、各試料の静電容量の相対値を示す。
<Etching conditions>
[Preprocessing]
Etching solution: 0.1 mol sodium hydroxide / liter aqueous solution Temperature: 50 ° C
Immersion time: 60 seconds
[Primary etching process]
Electrolyte: (1 mol hydrochloric acid + 3 mol sulfuric acid) / liter aqueous solution Temperature: 85 ° C.
Current density: 200 mA / cm 2
Electrolysis time: 120 seconds
[Secondary etching treatment (immersion treatment)]
Etching solution: (1 mol hydrochloric acid + 3 mol sulfuric acid) / liter aqueous solution Temperature: 85 ° C.
Immersion time: 900 seconds The electrostatic capacity after the secondary etching treatment was measured. The results are shown in Table 1. In the table, the relative value of the capacitance of each sample is shown with the capacitance of sample number 2-1 (Table 2) of the comparative example being 100 (reference).

Figure 2009270140
Figure 2009270140

表1の結果から、表層にIn、Bi、Snの濃縮がない本発明例は、濃縮している比較例より、静電容量の高いことが判る。   From the results in Table 1, it can be seen that the inventive examples in which In, Bi, and Sn are not concentrated on the surface layer have a higher capacitance than the concentrated comparative examples.

〔比較例〕
実施例の組成の溶湯と、更にPbを添加した溶湯を用い、実施例と同様の手順で鋳造、圧延、箔圧延し、最終焼鈍処理までを行った。
[Comparative example]
Using the molten metal having the composition of the example and the molten metal to which Pb was further added, casting, rolling and foil rolling were performed in the same procedure as in the example, and the final annealing treatment was performed.

この箔をアルゴンガス雰囲気で580℃に20時間加熱保持した。
次に、表2の試料番号2−1〜2−4については、実施例の<箔表層にPbを存在させる処理>に記載する処理を施して、Pbを箔表層に存在させた。
This foil was heated and held at 580 ° C. for 20 hours in an argon gas atmosphere.
Next, about the sample numbers 2-1 to 2-4 of Table 2, the process described in the <process which makes Pb exist in foil surface layer> of an Example was given, and Pb was made to exist in foil surface layer.

各元素の分析値およびエッチング後の静電容量を表2に示す。表中、試料番号2−1の静電容量を100(基準)として、各試料の静電容量の相対値を示す。   Table 2 shows the analytical values of each element and the capacitance after etching. In the table, the relative value of the capacitance of each sample is shown with the capacitance of sample number 2-1 being 100 (reference).

Figure 2009270140
Figure 2009270140

表2の結果から、表層にPbと共にIn、Bi、Snも濃縮している比較例は、表層にIn、Bi、Snの濃縮がない本発明例より静電容量の低いことが判る。   From the results in Table 2, it can be seen that the comparative example in which In, Bi, and Sn are concentrated together with Pb on the surface layer has a lower capacitance than the inventive example in which the surface layer does not have In, Bi, and Sn concentrated.

本発明によれば、電解エッチング処理により静電容量の高容量化に対応できるアルミニウム箔が提供される。   ADVANTAGE OF THE INVENTION According to this invention, the aluminum foil which can respond to the increase in electrostatic capacity by an electrolytic etching process is provided.

Claims (3)

Al純度が99.9%以上で、In、BiまたはSnの一種以上を含有する箔であって、表面から深さ0.1μmまでの表層にPbが10〜500ppm存在し、かつIn、BiまたはSnが該表層に濃縮していないことを特徴とする電解コンデンサ用アルミニウム箔。   A foil having an Al purity of 99.9% or more and containing one or more of In, Bi or Sn, wherein Pb is present in the surface layer from the surface to a depth of 0.1 μm, and In, Bi or An aluminum foil for electrolytic capacitors, characterized in that Sn is not concentrated in the surface layer. In、BiまたはSnの一種以上の含有量は、In:0.1〜10ppm、Bi:0.1〜10ppm、Sn:1〜20ppm、であることを特徴とする請求項1記載の電解コンデンサ用アルミニウム箔。   The content of one or more of In, Bi or Sn is In: 0.1 to 10 ppm, Bi: 0.1 to 10 ppm, Sn: 1 to 20 ppm, for an electrolytic capacitor according to claim 1, Aluminum foil. 更にPbを5ppm以下含有していることを特徴とする請求項1または2記載の電解コンデンサ用アルミニウム箔。   The aluminum foil for electrolytic capacitors according to claim 1 or 2, further comprising 5 ppm or less of Pb.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104018018A (en) * 2014-06-04 2014-09-03 厦门火炬特种金属材料有限公司 Processing method of novel Al-air fuel cell positive material Al-Sn-Bi-Mn
US10546691B2 (en) 2015-08-12 2020-01-28 Murata Manufacturing Co., Ltd. Capacitor and method for manufacturing the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194516A (en) * 1981-05-26 1982-11-30 Toyo Aluminium Kk Aluminum foil for electrolytic condenser
JPH03257913A (en) * 1990-03-08 1991-11-18 Sumitomo Light Metal Ind Ltd Aluminum foil for electrolytic capacitor
JPH06124855A (en) * 1992-10-14 1994-05-06 Showa Alum Corp Aluminum material for electrolytic capacitor electrode
JP2000252170A (en) * 1999-02-23 2000-09-14 Pechiney Rhenalu Refined aluminum foil for electrolytic capacitor and manufacture thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194516A (en) * 1981-05-26 1982-11-30 Toyo Aluminium Kk Aluminum foil for electrolytic condenser
JPH03257913A (en) * 1990-03-08 1991-11-18 Sumitomo Light Metal Ind Ltd Aluminum foil for electrolytic capacitor
JPH06124855A (en) * 1992-10-14 1994-05-06 Showa Alum Corp Aluminum material for electrolytic capacitor electrode
JP2000252170A (en) * 1999-02-23 2000-09-14 Pechiney Rhenalu Refined aluminum foil for electrolytic capacitor and manufacture thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104018018A (en) * 2014-06-04 2014-09-03 厦门火炬特种金属材料有限公司 Processing method of novel Al-air fuel cell positive material Al-Sn-Bi-Mn
US10546691B2 (en) 2015-08-12 2020-01-28 Murata Manufacturing Co., Ltd. Capacitor and method for manufacturing the same

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