JP2009262266A - Mount flange removal tool and method of removing mount flange - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tool easily removing a mount flange strongly engaged with a spindle. <P>SOLUTION: This mount flange removal tool for removing a mount flange strongly attached to the tapered section of the spindle having, at the end, a center blind hole and the tapered section, includes: a tubular body having a first screw hole formed through the center thereof and a second screw hole engageable with a male screw formed on the boss section of the mount flange which is formed at one end; and a driver having on end at which a handle section is formed and the other end at which a screw bar extending from the handle section and longer than the tubular body engageable with the first screw hole of the tubular body is formed. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a mount flange removal jig for removing a mount flange for holding a cutting blade mounted on a spindle of a cutting apparatus from the spindle, and a method for removing the mount flange.

  A cutting apparatus that divides a semiconductor wafer into individual devices includes a chuck table that holds the wafer, and a cutting means that rotatably supports a cutting blade that cuts a scheduled division line of the wafer held on the chuck table. The wafer can be divided into individual devices with high accuracy.

  The cutting means includes a spindle unit that rotationally drives the spindle, a mount flange attached to the tip of the spindle, a cutting blade having a thin cutting blade attached to the mount flange, and a fixing nut for fixing the cutting blade to the mount flange. It consists of.

The tip of the spindle to which the mount flange is attached has a tapered shape, and the mount flange has a taper-shaped engagement hole corresponding to the taper shape of the spindle, and the mount flange is attached to the spindle through the engagement hole. Installed.
JP 2001-54805 A

  Since the mount flange is rotated at a high speed such as 40,000 rpm or 60,000 rpm together with the cutting blade, the inner diameter of the mount flange is expanded by the centrifugal force, moves toward the back of the tapered spindle tip, and is strong between the spindle and the spindle. There is a problem that biting occurs and it cannot be removed from the spindle.

  On the other hand, although the cutting blade is consumed as a result of machining, the cutting blade cannot be completely cut when the protruding amount of the cutting blade from the mount flange becomes smaller than the workpiece thickness.

  It is considered possible to extend the life of the cutting blade by using a cutting blade with a large diameter so that the protruding amount of the cutting blade from the mounting flange becomes large. Since the cutting blade bends during machining due to the reduced rigidity of the blade and cutting defects such as meandering occur in the cutting line, the mounting flange and cutting blade are usually combined so that a predetermined protrusion amount is obtained depending on the type of cutting blade. ing.

  On the other hand, since these cutting blades contain diamond abrasive grains and are expensive, there is a desire to use the worn cutting blade again by replacing it with a smaller diameter mounting flange after the cutting blade is worn out.

  That is, the idea is to reduce the amount of cutting blades used by preparing several mounting flanges with different diameters in advance and replacing the mounting flanges according to wear of the cutting blades. In such a case, it is necessary to frequently remove the mounting flange from the spindle as the cutting blade is consumed.

  The present invention has been made in view of the above points, and an object of the present invention is to provide a mount flange removal jig that can easily remove a mount flange in which strong engagement with a spindle has occurred. That is.

  According to the first aspect of the present invention, there is provided a mounting flange removing jig for removing a mounting flange firmly attached to a tapered portion of a spindle having a center blind hole and a tapered portion at a tip, and formed through the center. A cylindrical main body having a first screw hole, a second screw hole that can be screwed into a male screw formed in a boss portion of the mount flange at one end, a handle at one end, and a handle at the other end A mount flange removal comprising: a driver extending from the handle portion and screwed into a first screw hole of the cylindrical main body and having a screw rod longer than the cylindrical main body. A jig is provided.

  According to a second aspect of the present invention, there is provided a method for removing a mount flange firmly attached to a tapered portion of a spindle having a center blind hole and a tapered portion at a tip using the mount flange removing jig according to the first aspect. Then, after screwing the second screw hole of the cylindrical main body into the male screw formed in the boss portion of the mount flange, and integrating the cylindrical main body and the mount flange, By rotating the handle portion of the driver and screwing the screw rod into the first screw hole of the cylindrical main body, the tip of the screw rod protruding from the cylindrical main body is positioned at the central blind of the spindle. The mount flange is removed from the spindle by inserting it into the hole and bringing it into contact with the bottom thereof, further rotating the handle and feeding the screw rod. How to remove is provided.

  According to the third aspect of the present invention, there is provided a mounting flange removing jig for removing a mounting flange firmly attached to the tapered portion of the spindle having a center blind hole and a tapered portion at the tip, the center formed on one end side. A hole, a first screw hole formed on the other end side so as to be aligned with the center hole, and the one end threadably engageable with a male screw formed on a boss portion of the mount flange A cylindrical main body having a second screw hole formed on the side, a handle portion formed at one end, and extending from the handle portion at the other end to be screwed into the first screw hole of the cylindrical main body A mounting flange removing jig comprising: a driver having a screw rod shorter than the cylindrical main body, and a push bar inserted in the central hole of the cylindrical main body so as to be tiltable. Is provided.

  According to a fourth aspect of the present invention, there is provided a method for removing the mount flange firmly attached to the tapered portion of the spindle having the center blind hole and the tapered portion at the tip using the mounting flange removing jig according to the third aspect. Then, after screwing the second screw hole of the cylindrical main body into the male screw formed in the boss portion of the mount flange, and integrating the cylindrical main body and the mount flange, By rotating the handle portion of the driver and screwing the screw rod into the first screw hole of the cylindrical main body, the screw rod is brought into contact with the push rod and protrudes from the cylindrical main body. The mounting flange is formed by inserting the tip of the push rod into the center blind hole formed at the tip of the spindle and bringing it into contact with the bottom, further rotating the handle and screwing the push rod. The spindle Removal method of mounting flanges, characterized in that the removal al is provided.

  According to the mounting flange removing jigs of the first and third aspects, even the mounting flange having a strong engagement with the spindle can be easily detached from the spindle, and the cutting work efficiency can be improved.

  According to the mount flange removing jig of the third aspect, the push rod contacting the center blind hole of the spindle can be tilted, so that there is no possibility of damaging the center blind hole of the spindle.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows an appearance of a cutting apparatus 2 according to an embodiment of the present invention, which can divide a semiconductor wafer into individual chips (devices).

  On the front side of the cutting device 2, there is provided operating means 4 for an operator to input instructions to the device such as machining conditions. In the upper part of the apparatus, there is provided a display means 6 such as a CRT for displaying a guidance screen for an operator and an image taken by an imaging means described later.

  As shown in FIG. 2, on the surface of the wafer W to be diced, the first street S1 and the second street S2 are formed orthogonally, and the first street S1 and the second street S2 A plurality of devices D are partitioned and formed on the wafer W.

  The wafer W is attached to a dicing tape T that is an adhesive tape, and the outer peripheral edge of the dicing tape T is attached to an annular frame F. As a result, the wafer W is supported by the frame F via the dicing tape T, and a plurality of wafers (for example, 25 sheets) are accommodated in the wafer cassette 8 shown in FIG. The wafer cassette 8 is placed on a cassette elevator 9 that can move up and down.

  Behind the wafer cassette 8, a loading / unloading means 10 for unloading the wafer W before cutting from the wafer cassette 8 and loading the wafer after cutting into the wafer cassette 8 is disposed. Between the wafer cassette 8 and the loading / unloading means 10, a temporary placement area 12, which is an area on which a wafer to be carried in / out, is temporarily placed, is provided. Positioning means 14 for positioning at a certain position is provided.

  In the vicinity of the temporary placement area 12, transport means 16 having a turning arm that sucks and transports the frame F integrated with the wafer W is disposed, and the wafer W carried to the temporary placement area 12 is It is attracted by the transport means 16 and transported onto the chuck table 18 and is sucked by the chuck table 18, and is held on the chuck table 18 by fixing the frame F by a plurality of fixing means 19.

  The chuck table 18 is configured to be rotatable and reciprocally movable in the X-axis direction. Above the movement path of the chuck table 18 in the X-axis direction, an alignment unit 20 that detects a street to be cut of the wafer W is provided. It is arranged.

  The alignment unit 20 includes an imaging unit 22 that images the surface of the wafer W, and can detect a street to be cut by a process such as pattern matching based on an image acquired by imaging. The image acquired by the imaging unit 22 is displayed on the display unit 6.

  On the left side of the alignment means 20, a cutting means 24 for cutting the wafer W held on the chuck table 18 is disposed. The cutting means 24 is configured integrally with the alignment means 20, and both move together in the Y-axis direction and the Z-axis direction.

  The cutting means 24 is configured by attaching a cutting blade 28 to the tip of a rotatable spindle 26 and is movable in the Y-axis direction and the Z-axis direction. The cutting blade 28 is located on the extended line of the imaging means 22 in the X-axis direction.

Referring to FIG. 3, there is shown an exploded perspective view showing how the cutting blade is mounted on the spindle. A spindle 26 that is rotationally driven by a servo motor (not shown) is rotatably accommodated in a spindle housing 32 of the spindle unit 30. The spindle 26 has a tapered portion 26a and a tip small diameter portion 26b, and a screw hole 34 is formed at the tip. The screw hole 34 is blind with a bottom.
A mount flange 36 includes a boss part (convex part) 38 and a fixing flange 40 formed integrally with the boss part 38, and a male screw 42 is formed on the boss part 38. Further, the blade mount 36 has a mounting hole 43.

    The mount flange 36 is attached to the tapered portion 26a of the spindle 26 by inserting the mounting hole 43 into the tapered portion 26a via the small diameter portion 26b of the spindle 26 and screwing the screw 44 into the screw hole 34 and tightening. .

  The cutting blade 28 is called a hub blade, and is configured by electrodepositing a cutting blade 50 in which diamond abrasive grains are dispersed in a nickel base material on the outer periphery of a circular base 46 having a circular hub 48.

  In order to attach the cutting blade 28 to the spindle 26, the mounting hole 52 of the cutting blade 28 is inserted into the boss portion 38 of the mount flange 36, and the fixing nut 54 is screwed onto the male screw 42 of the boss portion 38 and tightened. A blade 28 is attached to the spindle 26.

  Referring to FIG. 4, another embodiment of the mounting structure of the mount flange 36 is shown. In the present embodiment, a male thread 34 ′ is formed on the tip small diameter portion 26 b of the spindle 26. Further, a central blind hole 33 is formed at the tip of the spindle 26.

  To mount the mount flange 36 on the spindle 26, the mounting hole 43 of the mount flange 36 is inserted through the small diameter portion 26b of the spindle 26 to the tapered portion 26a, and the nut 44a is screwed onto the male screw 34 'and tightened. Thus, the mount flange 36 is attached to the tip of the spindle 26.

  In the cutting apparatus 2 configured as described above, the wafer W accommodated in the wafer cassette 8 is sandwiched by the frame F by the loading / unloading means 10, and the loading / unloading means 10 moves to the rear of the apparatus (Y-axis direction). When the nipping is released in the placing area 12, the placing area 12 is placed in the temporary placing area 12. Then, the wafer W is positioned at a certain position by the positioning means 14 moving in a direction approaching each other.

  Next, the frame F is adsorbed by the transport unit 16, and the wafer W integrated with the frame F is transported to the chuck table 18 and held by the chuck table 18 as the transport unit 16 rotates. Then, the chuck table 18 moves in the X-axis direction, and the wafer W is positioned directly below the alignment means 20.

  The image used for pattern matching at the time of alignment in which the alignment unit 20 detects a street to be cut needs to be acquired in advance before cutting. Therefore, when the wafer W is positioned directly below the alignment unit 20, the imaging unit 22 captures the surface of the wafer W and causes the display unit 6 to display the captured image.

  The operator of the cutting apparatus 2 operates the operation unit 4 to move the image pickup unit 22 slowly and also move the chuck table 18 as necessary to search for a pattern that is a pattern matching target.

  When the operator determines a key pattern, an image including the key pattern is stored in a memory provided in the controller of the cutting apparatus 2. Further, the distance between the key pattern and the center line of the streets S1 and S2 is obtained by a coordinate value or the like, and the value is also stored in the memory.

  Further, by moving the image pickup means 22, an interval between the adjacent streets (street pitch) is obtained by a coordinate value or the like, and the street pitch value is also stored in the memory of the controller.

  At the time of cutting along the street of the wafer W, the alignment unit 20 performs pattern matching between the stored key pattern image and the image actually acquired by the imaging unit 22.

  When the pattern matches, the cutting means 24 is moved in the Y-axis direction by the distance between the key pattern and the street center line, thereby aligning the street to be cut with the cutting blade 28.

  When the street to be cut and the cutting blade 28 are aligned, the chuck table 18 is moved in the X-axis direction, and the cutting means 24 is lowered while rotating the cutting blade 28 at a high speed. The street was cut.

  By performing cutting while feeding the cutting means 24 in the Y-axis direction by the street pitch stored in the memory, all the streets S1 in the same direction are cut. Furthermore, when the chuck table 18 is rotated by 90 ° and then the same cutting as described above is performed, the streets S2 are all cut and divided into individual devices D.

  The wafer W that has been cut is moved in the X-axis direction by the chuck table 18 and is then gripped by the transfer means 25 that can move in the Y-axis direction and transferred to the cleaning device 27. The cleaning device 27 cleans the wafer by rotating the wafer W at a low speed (for example, 300 rpm) while jetting water from the cleaning nozzle.

  After cleaning, while rotating the wafer W at a high speed (for example, 3000 rpm), air is blown out from the air nozzle to dry the wafer W, and then the wafer W is sucked by the conveying means 16 and returned to the temporary storage area 12, and further carried in and out. By means 10, the wafer W is returned to the original storage location of the wafer cassette 8.

  If the cutting of the wafer W is continued, the mount flange 36 is rotated at a high speed together with the cutting blade 28, so that the inner diameter of the mount flange 36 is expanded by the centrifugal force and moves in the back direction of the tapered portion 26 a of the spindle 26. Strong biting occurs between the two. As a result, the mount flange 36 cannot normally be held and removed by hand.

  Hereinafter, a mount flange removal jig according to an embodiment of the present invention for removing the mount flange 36 having such a strong bite from the spindle 26 will be described. FIG. 5 is a perspective view of the mount flange removing jig 58 according to the first embodiment of the present invention, and FIG. 6 is a longitudinal sectional view thereof.

  The mount flange removal jig 58 includes a cylindrical main body 60 and a driver 70. An annular member 66 is fixed to one end 60 a of the cylindrical main body 60 by a plurality of screws 68.

  A first screw hole 62 is formed through the center of the cylindrical main body 60, and a male screw formed on the boss portion 38 of the mount flange 36 is attached to the annular member 66 attached to one end 60 a of the cylindrical main body 60. A second screw hole 64 that can be screwed onto 42 is formed. The cylindrical main body 60 and the annular member 66 are made of a metal such as stainless steel, for example.

  The driver 70 has a handle 72 at one end, and a screw rod 74 longer than the cylindrical main body 60 that can be screwed into the first screw hole 62 of the cylindrical main body 60 is attached to the handle 72. Yes. The screw rod 74 is made of metal, and the handle portion 72 is made of, for example, a resin molded product. 6 shows a state in which the screw rod 74 of the driver 70 shown in FIG. 5 is screwed into the first screw hole 62 of the cylindrical main body 60.

  Next, with reference to FIGS. 7 and 8, a method of removing the mount flange 36 that has been strongly engaged with the tapered portion 26a of the spindle 26 using the mount flange removing jig 58 described above will be described. .

  First, the second screw hole 64 of the cylindrical main body 60 is screwed into the male screw 42 formed in the boss portion 38 of the mount flange 36 to integrate the cylindrical main body 60 and the mount flange 36. Next, the handle 72 of the driver 70 is rotated so that the screw rod 74 is screwed into the first screw hole 62 of the cylindrical main body 60, and the screw 72 protruding from the cylindrical main body 60 by further rotating the handle 72. The tip of 74 is inserted into the center screw hole 34 of the spindle 26 through the mounting hole 43 of the mount flange 36 and brought into contact with the bottom as shown in FIG.

  By further rotating the handle portion 72 of the driver 70 and screw-feeding the screw rod 74, the mounting flange 36 firmly engaged and fixed to the tapered portion 26a of the spindle 26 by the reaction force can be removed from the spindle 26.

  By the way, when the flange mount 36 is removed from the spindle 26, there may occur a problem that the flange mount removal jig 58 and the flange mount 36 cannot be detached. As a result of investigating the cause, it was found that the jig 58 was pushed all the way into the flange mount 36 when the jig 58 was attached.

  In order to prevent the occurrence of this problem, it has been found effective to attach an O-ring 75 made of rubber to the bottom of the second screw hole 64. By inserting the O-ring 75 between the flange mount 36 and the jig 58, the jig 58 can be prevented from being pushed too much.

  When attaching the cylindrical main body 60 to the mount flange 36, if the annular member 66 attached to the cylindrical main body 60 hits the O-ring 75, the hand turning the cylindrical main body 60 feels resistance, so check that it is caught. It is possible to prevent the cylindrical body 60 from being pushed further. Even if the cylindrical body 60 is pushed too far and the O-ring 75 is cut off, the O-ring 75 can be easily replaced.

  Next, with reference to FIG. 10 thru | or FIG. 11, the mounting flange removal jig | tool 58A of 2nd Embodiment of this invention is demonstrated. The mount flange removal jig 58A includes a cylindrical main body 60A and a driver 70A, as in the first embodiment.

  A central hole 63 is formed on one end side of the cylindrical main body 60 </ b> A, and a first screw hole 62 a is formed on the other end side so as to be aligned with the central hole. As in the first embodiment, an annular member 66 is fixed to one end 60a of the cylindrical main body 60A by a plurality of screws 68. The annular member 66 is formed with a second screw hole 64 that can be screwed into the male screw 42 formed in the boss portion 38 of the mount flange 36.

  The driver 70A includes a handle portion 72 and a screw rod 74A that extends from the handle portion 72 and is shorter than the cylindrical main body 60A that can be screwed into the first screw hole 62a of the cylindrical main body 60A. Reference numeral 76 denotes a push rod having a circular cross section, and two annular grooves 78 are cut on one end side (left side in FIG. 10), and an O-ring 80 is inserted into the annular groove 78.

  When the push rod 76 is pushed into the center hole 63 from the one end 60a side of the cylindrical body 60A, the O-ring 80 is crushed and pushed, so that the push rod 76 is inserted into the center hole 63 of the tubular body 60A so as to be tiltable. Will be.

  In order to remove the mounting flange 36 that is firmly engaged with and fixed to the tapered portion 26a of the spindle 26 using the mounting flange removal jig 50A, first, the second screw hole 64 of the annular member 66 fixed to the cylindrical body 60A is used. Is screwed into a male screw 42 formed on the boss portion 38 of the mount flange 36, and the cylindrical main body 60A and the mount flange 36 are integrated. At this time, care should be taken not to push the boss portion 38 of the mount flange 36 into the second screw hole 64.

  Next, the handle portion 72 of the driver 70 </ b> A is rotated so that the screw rod 74 </ b> A is screwed into the first screw hole 62 </ b> A of the cylindrical main body 60 </ b> A, and the screw rod 74 </ b> A is brought into contact with the push rod 76. The handle 72 is further rotated, and the tip of the push rod 76 protruding from the cylindrical main body 60A is inserted into the center screw hole 34 formed at the tip of the spindle 26 through the mounting hole 43 of the mount flange 36, and at the bottom thereof. Make contact. By further rotating the handle portion 72 and screw-feeding the push rod 76, the mount flange 36 can be removed from the tapered portion 26a of the spindle 26 using the reaction force.

  In this embodiment, since the push rod 76 is attached to the central hole 63 of the cylindrical main body 60A so as to be tiltable, the push rod 76 inserted into the central screw hole 34 of the spindle 26 damages the central screw hole 34. There is no fear.

It is an external appearance perspective view of a cutting device. It is a perspective view which shows the wafer integrated with the flame | frame. It is a disassembled perspective view which shows a mode that a cutting blade is attached to a spindle. It is a disassembled perspective view which shows other embodiment of a mount flange attachment structure. It is a perspective view of the mount flange removal jig | tool of 1st Embodiment of this invention. It is a longitudinal cross-sectional view of the mount flange removal jig | tool of 1st Embodiment. It is a disassembled perspective view which shows a mode that a mount flange is removed using a mount flange removal jig | tool. It is a longitudinal cross-sectional view which shows a mode that a mount flange is removed using a mount flange removal jig | tool. It is a perspective view of the mount flange removal jig | tool of 2nd Embodiment of this invention. It is a longitudinal cross-sectional view of the mount flange removal jig | tool of 2nd Embodiment. It is a longitudinal cross-sectional view which shows a mode that a mount flange is removed using the mount flange removal jig | tool of 2nd Embodiment.

Explanation of symbols

2 Cutting device 18 Chuck table 24 Cutting means 26 Spindle 26a Taper portion 30 Spindle unit 36 Mount flange 58, 58A Mount flange removal jig 60, 60A Cylindrical body 62, 62a First screw hole 64 Second screw hole 66 Annular Member 70 Driver 72 Handle 74, 74A Screw rod 76 Push rod

Claims (4)

A mount flange removal jig for removing a mount flange firmly attached to a tapered portion of a spindle having a center blind hole and a tapered portion at a tip,
A cylindrical main body having a first screw hole formed through the center and a second screw hole that can be screwed into a male screw formed in a boss portion of the mount flange at one end;
A driver having a handle portion formed at one end and a screw rod extending from the handle portion at the other end and capable of being screwed into the first screw hole of the cylindrical body;
A mounting flange removal jig characterized by comprising: A method for removing the mount flange firmly attached to the tapered portion of the spindle having a center blind hole and a tapered portion at the tip using the mount flange removing jig according to claim 1,
After the second screw hole of the cylindrical main body is screwed into the male screw formed on the boss portion of the mount flange, the cylindrical main body and the mount flange are integrated,
By rotating the handle portion of the driver and screwing the screw rod into the first screw hole of the cylindrical main body, the tip of the screw rod protruding from the cylindrical main body is positioned at the central blind of the spindle. A method for removing a mounting flange, wherein the mounting flange is removed from the spindle by inserting it into a hole and bringing it into contact with the bottom, further rotating the handle and feeding the screw rod. A mount flange removal jig for removing a mount flange firmly attached to a tapered portion of a spindle having a center blind hole and a tapered portion at a tip,
A center hole formed on one end side, a first screw hole formed on the other end side so as to be aligned with the center hole continuously with the center hole, and a male screw formed on a boss portion of the mount flange A cylindrical body having a second screw hole formed on the one end side that can be screwed to
A driver in which a handle is formed at one end and a screw rod that is shorter than the cylindrical main body is formed at the other end and extends from the handle and can be screwed into the first screw hole of the cylindrical main body;
A push rod that is tiltably inserted into the central hole of the tubular body;
A mounting flange removal jig characterized by comprising: A method for removing a mounting flange firmly attached to the tapered portion of a spindle having a center blind hole and a tapered portion at a tip using the mounting flange removing jig according to claim 3,
After the second screw hole of the cylindrical main body is screwed into the male screw formed on the boss portion of the mount flange, the cylindrical main body and the mount flange are integrated,
By rotating the handle portion of the driver and screwing the screw rod into the first screw hole of the cylindrical main body, the screw rod is brought into contact with the push rod and protrudes from the cylindrical main body. The mounting flange is formed by inserting the tip of the push rod into the center blind hole formed at the tip of the spindle and bringing it into contact with the bottom, further rotating the handle and screwing the push rod. The mounting flange is removed from the spindle.

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