JP2009259306A - Clamp device and slider inspection device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technique for facilitating attaching and detaching operations for a minute member such as a slider. <P>SOLUTION: After a liquid 108 is dripped on a base 101, the minute member 105 is disposed thereupon. The minute member is clamped on the base with the attractive force of the liquid between the minute member and base. When the minute member is released from being clamped, the base is heated to vaporize the liquid. Consequently, the attractive force of the liquid disappears. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a slider inspection apparatus for inspecting a slider, and more particularly to a slider inspection apparatus for inspecting a slider having a magnetic head.

  A magnetic head is used for reading / writing data on a magnetic recording medium such as a magnetic disk. In the magnetic head manufacturing process, the magnetic head is inspected using an inspection device. In this inspection, a magnetic head is engaged with a rotating magnetic disk, and the flying characteristics from the disk surface and the data reading / writing function with the disk are tested.

  The magnetic head is attached to the tip of a member called a slider. Usually, the slider means a member on which a magnetic head is mounted as described above. The magnetic head inspection apparatus is called a slider inspection apparatus.

  Conventionally, when inspecting a magnetic head, a slider assembly is formed by fixing a slider to a suspension, and this slider assembly is mounted on an inspection apparatus. Therefore, when the magnetic head is defective, not only the magnetic head and the slider on which it is mounted, but also the suspension is discarded. That is, if the magnetic head is defective, the manufacturing cost of the slider, the manufacturing cost of the suspension, and the assembly cost of the slider assembly are wasted. When the defect rate of the magnetic head is high, these costs are wasted.

  In the slider testing machine described in WO2005-006332, the slider is directly mounted on the testing machine without placing the slider on the suspension. Therefore, when a defective product is detected, the manufacturing cost of the slider is wasted, but the manufacturing cost of the suspension and the assembling cost of the slider assembly are not wasted.

WO2005-006332 publication

  The slider testing machine described in WO2005-006332 is configured to fix the slider with a leaf spring. Therefore, it is not easy to attach and remove the slider.

  An object of the present invention is to provide a technique that makes it easy to attach and remove a micro member such as a slider.

  According to the present invention, after the liquid is dropped on the base, the micro member is disposed thereon. The micro member can be clamped on the base by the adsorption force of the liquid between the micro member and the base. When releasing the clamp, the base is heated and the liquid is vaporized. Thereby, the adsorptive power by the liquid disappears.

  According to the present invention, it is easy to attach and remove a micro member such as a slider.

  Hereinafter, a plurality of embodiments of the present invention will be described with reference to the drawings. The same reference numerals in the respective embodiments indicate the same or equivalent.

  With reference to FIG.1 and FIG.2, the 1st example of the clamp mechanism of this invention is demonstrated. The clamp mechanism of this example includes a base 101 and a connection member 102. The base 101 includes a heater (not shown). FIG. 1 shows a state where a slider is not arranged on the base 101, and FIG. 2 shows a state where a slider 105 is arranged on the base 101. A thin film of liquid 108 is inserted between the base 101 and the slider 105. The size of the base 101 is smaller than the size of the slider 105. Accordingly, when the slider 105 is placed on the base 101, the slider 105 protrudes outward from the base 101. As shown in FIG. 2, the base 101 and the connection member 102 are separated by a distance L.

  As shown in FIG. 2, a magnetic head 106 is attached to the tip of the upper surface 105 b of the slider 105. A terminal of the magnetic head 106 is exposed on the front surface 105 a of the slider 105.

  The contact surface 102 a of the connection member 102 is in contact with the terminal of the magnetic head 106 of the slider 105. The connection member 102 is made of a conductive material. Therefore, the terminal of the magnetic head 106 and the connection member 102 are electrically connected by contact between the front surface 105 of the slider 105 and the contact surface 102 a of the connection member 102. Although the case where the connection member 102 is formed of a conductive material has been described here, only the contact surface 102a of the connection member 102 may be formed of a conductive material.

  A wiring 103 is connected to the base 101 and the connection member 102. The terminals of the magnetic head 106 are connected to the wiring 103 through the connection member 102. The heater built in the base 101 is connected to the wiring 103. In this example, the base 101 and the wiring 103 are mounted on the gimbal 104.

  Next, a method for clamping the slider 105 will be described. First, the liquid 108 is dropped or applied on the upper surface of the base 101. Next, the slider 105 is disposed on the upper surface of the base 101. A thin film of the liquid 108 spreads between the upper surface of the base 101 and the lower surface of the slider 105. In FIG. 2, the thickness of the thin film of the liquid 108 is exaggerated. The thickness of the liquid 108 thin film is actually in the submicron order. In order to prevent the liquid from getting wet on the side surface of the base 101, the amount of the liquid is very small. As shown in FIG. 2, the connection member 102 and the base 101 are separated by a distance L. Therefore, even if the liquid 108 wets and spreads, wetting of the connection member 102 is avoided.

  A thin film of the liquid 108 generates a liquefaction bridge force between the slider 105 and the base 101. The liquefaction bridge force will be described later with reference to FIG. The slider 105 is clamped on the base 101 by this liquefaction bridge force.

  When arranging the slider 105 on the base 101, it is desirable to arrange the slider 105 while pressing the front surface 105 a of the slider 105 against the connecting member 102. The height of the terminals of the magnetic head 106 may vary. Therefore, a contact failure may occur between the terminal of the magnetic head 106 and the contact surface 102 a of the connection member 102. Therefore, in order to avoid poor contact, the contact surface 102a of the connection member 102 is configured to be elastically deformable. For example, the contact surface 102a may be formed of a member that can be elastically deformed, or a spring may be provided on the contact surface 102a so that the contact surface 102a is movable by elastic deformation of the spring.

  Next, a method for releasing the clamp of the slider 105 will be described. The heater built in the base 101 is activated. The temperature of the base 101 rises by the heater. Thereby, the liquid 108 is vaporized. When the liquid 108 is vaporized, the liquefaction bridge force disappears. Accordingly, the clamp of the slider 105 is released. The slider 105 can be easily removed from the base 101.

  The liquid 108 is water, preferably pure water. Pure water does not leave a solid when vaporized. The liquid 108 may be any liquid as long as no solid remains when vaporized.

  The clamp mechanism of this example clamps the slider 105 on the base 101 by the liquefaction bridge force. Further, by evaporating the liquid 108, the liquefaction bridge force is erased, and the slider 105 is released from the base 101. Therefore, the clamping mechanism of this example does not use a mechanical mechanism. Therefore, the structure of the clamp mechanism can be simplified.

  In the clamp mechanism described with reference to FIGS. 1 and 2, the case where the slider 105 on which the magnetic head 106 is mounted is clamped on the base 101 has been described. However, the clamping mechanism of the present example can be used for any device or mechanism as long as it can be clamped using liquefaction bridge force.

  However, there is a limit to the magnitude of the liquefaction bridge force. Therefore, the clamping mechanism of this example is suitable for clamping a relatively small member like a slider having a magnetic head.

With reference to FIG. 3, the liquefaction bridge force of water is demonstrated. The liquefaction bridge force is a liquid adsorption force between the slider 105 and the base 101. In general, it is known that when a thin liquid film exists between two surfaces, the two surfaces are adsorbed to each other. Here, the force that adsorbs two surfaces is referred to as a liquefaction bridge force. The magnitude of the liquefaction bridge force varies depending on conditions such as the surface roughness of the two surfaces, the distance between the two surfaces, the amount of liquid between the two surfaces, and the like. Figure 3 shows the liquefaction bridge force of water, the horizontal axis represents the amount of water V (liters), the vertical axis represents the liquefied bridge force F _{L (mN).} In this graph, the slider 105 has a dimension of 0.85 × 0.70 × 0.23 mm, the base 101 has a dimension of 0.60 × 0.50 mm, and the surface roughness Ra of the base 101 is 1.0. Obtained by condition. In this example, the highest liquefaction bridge force is shown when the amount of water is 1 × 10 ⁻⁷ liters.

  FIG. 4 shows a state where the clamping mechanism of the present invention is mounted on the gimbal 104. The gimbal 104 includes a rectangular main body 104c, and a hole 104b is formed in the main body 104c. A mounting portion 104a that is cantilevered is disposed in the hole 104b. The base 101 and the connection member 102 are mounted on the mounting portion 104a. A slider 105 is clamped on the connecting member 102. The gimbal 104 is welded to the suspension 107 (FIG. 5) at a plurality of welding points 104d.

  FIG. 5 shows a state where the gimbal 104 is attached to the tip of the suspension 107. As shown in FIG. 4, the gimbal 104 is attached to the tip of the suspension 107 at a welding point 104d. The suspension 107 is formed with a hemispherical dimple 107d. The dimple 107d is disposed below the base 101. The elastic force of the suspension 107 is transmitted to the mounting portion 104a of the gimbal 104 via the dimple 107d. Accordingly, the base 101 mounted on the mounting portion 104a of the gimbal 104 and the slider 105 thereon are pressed upward in FIG. 5 by the pressing force via the dimple 107d. With this pressing force, the magnetic head is pressed against the surface of the disk.

  Since the dimple 107d has a hemispherical shape, it makes point contact with the mounting portion 104a of the gimbal 104. Accordingly, the dimple 107d gives a pressing force upward in FIG. 5 to the base 101 and the slider 105 thereon, but does not hinder the swing of the base 101 and the slider 105 thereon. A force for pressing the base 101 and the slider 105 thereon from the suspension 107 via the dimple 107d is obtained by an elastic force or a restoring force of the suspension 107.

  FIG. 6 shows an example of the configuration of the suspension 107. The suspension 107 has a tip portion 107a and a fixing portion 107b. The tip portion 107a is inclined with respect to the fixed portion 107b. In other words, the suspension 107 is plastically deformed at the plastic deformation portion 107c at the boundary between the tip portion 107a and the fixed portion 107b. Thus, the elastic force of the suspension 107 is generated by plastically deforming the tip portion 107a so as to be inclined with respect to the fixed portion 107b. When the slider 105 is pressed against a disk (not shown), the suspension 107 is substantially horizontal. That is, the tip portion 107a and the fixing portion 107b are substantially in a straight line. At this time, the elastic force generated by the elastic deformation of the tip end portion 107a becomes a force for pressing the slider 105 against the disk.

  An example of the slider inspection apparatus according to the present invention will be described with reference to FIG. The slider inspection apparatus of this example has one disk drive mechanism 202 and a plurality of slider drive mechanisms 203 and 204. The slider drive mechanism 203 includes an arm 113, a fine movement actuator 114, and a coarse movement actuator 115. A suspension 107 is fixed to the tip of the arm 113. That is, the fixed portion 107 b of the suspension 107 is fixed to the arm 113. A clamp mechanism according to the present invention is attached to the distal end portion 107 a of the suspension 107. The slider 105 is clamped by the clamp mechanism.

  The arm 113 is fixed to the fine actuator 114. The fine actuator 14 is fixed to the coarse actuator 115. The fine actuator 114 can be driven in the direction of arrow R in the figure. The coarse actuator 115 can also be driven in the direction of arrow R in the figure. Note that a mechanism capable of driving in the direction orthogonal to the arrow R may be added to the coarse actuator 115.

  The disk drive mechanism 202 has a spindle 112. The disk 111 is fixed to the spindle 112. The spindle 112 can rotate the disk 111.

  The load operation and unload operation will be described. The load operation and unload operation are performed by a load / unload mechanism (not shown). The load operation is an operation in which the magnetic head mounted on the slider 105 is engaged with the surface of the disk 111. Now, it is assumed that the slider 105 is separated from the disk 111. First, the suspension 107 is deformed so that the tip portion 107a and the fixing portion 107b of the suspension 107 are substantially in a straight line. Next, the slider 105 is moved below the disk 111 by the coarse actuator 115 and the fine actuator 114. Finally, the deformation of the suspension 107 is released. As a result, the tip 107 a of the suspension 107 moves in a direction perpendicular to the disc 111. The magnetic head mounted on the slider 105 is pressed against the surface of the disk 111.

  The unload operation is an operation for moving the slider 105 away from the disk 111. The suspension 107 is deformed, and the tip 107a of the suspension 107 is moved in a direction perpendicular to the disk 111 and away from the disk. Next, the slider 105 is moved away from the disk 111 by the coarse actuator 115 and the fine actuator 114.

  A slider inspection system according to the present invention will be described with reference to FIG. The slider inspection system of this example has a base 201. On the base 201, one disk drive mechanism 202, four slider drive mechanisms 203, 204, 205, 206 and a slider transport mechanism 210 are provided. Since the slider inspection system of this example has four slider drive mechanisms, it is possible to inspect four sliders simultaneously. On the base 201, a tray 207 on which the slider 105 to be inspected stands by is mounted. Each of the disk drive mechanism 202 and the four slider drive mechanisms 203, 204, 205, and 206 has been described with reference to FIG.

  The slider transport mechanism 210 includes a transport base 211, an x transport member 212, a y transport member 213, and a z transport member 214. The x transport member 212 is movable in the arrow A direction relative to the transport base 211. The y transport member 213 is movable in the arrow B direction relative to the x transport member 212. The z transport member 214 is movable in the arrow C direction relative to the y transport member 213. A suction mechanism that sucks the slider 105 is provided at the lower end of the z transport member 214. This adsorption mechanism will be described with reference to FIG.

  An operation of mounting the slider to be inspected on the clamp mechanism by the slider transport mechanism 210 will be described. The slider 105 to be inspected is placed on the tray 207. The x transport member 212, the y transport member 213, and the z transport member 214 are moved to place the z transport member 214 above the tray 207. The z transport member 214 is moved downward, that is, in the direction of arrow C, and the suction mechanism at the lower end of the z transport member 214 is moved closer to the slider 105. Next, the slider 105 is sucked by the suction mechanism. The x transport member 212, the y transport member 213, and the z transport member 214 are moved, and the z transport member 214 is disposed above the base 101 at the tip of the suspension 107 of the slider drive mechanism. Next, the z transport member 214 is moved downward, that is, in the direction of arrow C, and the slider 105 is disposed above the base 101. A liquid is dropped on the base 101. The suction mechanism is released and the slider 105 is placed on the base 101.

  Thus, when the slider to be inspected is mounted on the clamp mechanism by the slider transport mechanism 210, the magnetic head is inspected. The magnetic head inspection method has been described with reference to FIG.

  The operation of removing the slider to be inspected from the clamp mechanism by the slider transport mechanism 210 will be described. First, the base 101 is heated by a heater built in the base 101. Thereby, the liquid between the slider 105 and the base 101 is vaporized. Next, the x transport member 212, the y transport member 213, and the z transport member 214 are moved to place the z transport member 214 above the slider 105. The z transport member 214 is moved downward, that is, in the direction of arrow C, and the suction mechanism at the lower end of the z transport member 214 is moved closer to the slider 105. Next, the slider 105 is sucked by the suction mechanism. The x transport member 212, the y transport member 213, and the z transport member 214 are moved to move the z transport member 214 to a predetermined transport position. The suction mechanism is released and the slider 105 is placed at the transport position.

  Here, after the liquid is vaporized, the z transport member 214 is moved above the slider 105. However, the liquid may be vaporized after the z transport member 214 is moved above the slider 105.

  With reference to FIG. 9, the suction mechanism and the liquid nozzle provided at the lower end of the z transport member 214 will be described. An air tweezer 215 and a liquid nozzle 216 are provided at the lower end of the z transport member 214. The air tweezers 215 provides a suction function for sucking and holding the slider 105. The air tweezers 215 is connected to a vacuum device or an exhaust device (not shown). The suction function of the air tweezers 215 is known to those skilled in the art and will not be described in detail here. The liquid nozzle 216 can drop a predetermined amount of liquid.

  As described above, the clamping mechanism of this example does not require any mechanical operation for clamping and releasing the slider 105. Therefore, it is easy to attach and remove the slider.

  With reference to FIG. 10, the 2nd example of the clamp mechanism of this invention is demonstrated. The slider clamp mechanism of this example is provided with a guide 110 for accurately arranging the slider 105 on the base 101. In order for the slider transport mechanism 210 to accurately place the slider to be inspected on the base 101, the slider transport mechanism 210 needs to be accurately controlled. Even when the control accuracy of the slider transport mechanism 210 is low, the slider 105 can be accurately arranged on the base 101 by providing the guide 110.

  The guide 110 of this example has a U-shape having two legs. An inclined surface 110a is provided inside the ends of the two legs. The width D between the ends of the two legs is slightly larger than the width of the slider 105. When arranging the slider 105 on the base 101, first, the slider 105 is arranged between the two legs of the guide 110. Next, the slider 105 is moved in the direction of arrow E. A corner portion of the slider 105 contacts the inclined surface 110 a of the guide 110. When the slider 105 is further moved in the direction of arrow E, the slider 105 is guided by the inclined surface 110 a of the guide 110 and is accurately arranged on the base 101.

  The example of the present invention has been described above. However, the present invention is not limited to the above-described example, and various modifications can be easily made by those skilled in the art within the scope of the invention described in the claims. Will be understood.

It is a perspective view which shows the 1st example of the clamp mechanism of this invention. It is a side view which shows the 1st example of the clamp mechanism of this invention. It is a figure which shows the liquefaction bridge force of the 1st example of the clamp mechanism of this invention. It is a figure which shows the example of the gimbal which has arrange | positioned the 1st example of the clamp mechanism of this invention. It is a figure which shows a part of example of the suspension which has arrange | positioned the gimbal which has arrange | positioned the 1st example of the clamp mechanism of this invention. It is a figure which shows the example of the suspension which has arrange | positioned the gimbal which has arrange | positioned the 1st example of the clamp mechanism of this invention. It is a figure which shows a part of example of the slider test | inspection apparatus using the 1st example of the clamp mechanism of this invention. It is a figure which shows the example of the slider test | inspection system using the 1st example of the clamp mechanism of this invention. It is an enlarged view which shows a part of example of the slider test | inspection system using the 1st example of the clamp mechanism of this invention. It is a figure which shows the 2nd example of the clamp mechanism of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 101 ... Base, 102 ... Connection member, 103 ... Wiring, 104 ... Gimbal, 104a ... Mounting part, 104b ... Hole, 104c ... Main body, 104d ... Welding point, 105 ... Slider, 106 ... Magnetic head, 107 ... Suspension, 107a DESCRIPTION OF SYMBOLS ... Tip part, 107b ... Fixed part, 107c ... Plastic deformation part, 107d ... Dimple, 108 ... Liquid, 110 ... Guide, 110a ... Inclined surface, 111 ... Disk, 112 ... Spindle, 113 ... Arm, 114 ... Fine actuator, 115 ... Coarse actuator, 201 ... base, 202 ... disk drive mechanism, 203, 204, 205, 206 ... slider drive mechanism, 207 ... tray, 210 ... slider transport mechanism, 211 ... transport base, 212 ... x transport member, 213 ... y conveying member, 214 ... z conveying member, 215 ... air tweezers 216 ... liquid nozzle

Claims (19)

  In a clamping device having a base for arranging a micro member and a heater for heating the base, when the micro member is clamped on the base, After the liquid is dropped, the micro member is disposed on the base, and the micro member is clamped on the base by the liquid adsorption force between the micro member and the base, A clamping device configured to vaporize the liquid by heating the base with the heater when the minute member is removed from the base.   The clamping device according to claim 1, wherein the liquid is water. A base on which a slider with a magnetic head can be placed; a connection member that can contact the slider when the slider is placed on the base; and a wiring connected to the connection member In a clamping device having
When the slider is disposed on the base, the magnetic head is configured to be connected to the wiring via the connection member, and a liquid thin film is formed between the micro member and the base. , And the micro member is configured to be clamped on the base by the liquid adsorption force.   The clamp device according to claim 3, wherein a heater for heating the base is provided, and when the minute member is removed from the top of the base, the base is heated by the heater to discharge the liquid. Clamping device configured to vaporize.   4. The clamping device according to claim 3, wherein the liquid is water.   4. The clamping device according to claim 3, wherein a surface of the connecting member that contacts the slider is elastically deformable.   The clamping device according to claim 3, wherein the connection member is disposed away from the base.   4. The clamping device according to claim 3, wherein a planar dimension of the slider is larger than a planar dimension of the base.   5. The clamping device according to claim 4, wherein a guide is provided for guiding the slider onto the base, and the guide is engaged with the slider before the slider is disposed on the base. A clamping device characterized by having an inclined surface that fits together. A dropping step for dropping a liquid on the base;
A slider disposing step of disposing a slider on which a magnetic head is mounted on a base on which the liquid is dropped;
A clamping method. The method according to claim 10, wherein when removing the slider from the base, a vaporizing step of heating the base to vaporize the liquid;
Removing the minute member from the base;
A clamping method.   The clamping method according to claim 10, wherein the liquid is water.   11. The clamping method according to claim 10, wherein, in the slider arranging step, the slider is arranged on the base so as to be in contact with a connecting member adjacent to the base.   11. The clamping method according to claim 10, wherein a planar dimension of the slider is larger than a planar dimension of the base. In a slider inspection apparatus having a disk drive mechanism for rotationally driving a disk and a slider drive mechanism for engaging a slider mounted with a magnetic head to be inspected with the disk,
The slider drive mechanism includes a clamp mechanism that clamps the slider, a suspension that supports the clamp mechanism, an arm that supports the suspension, and an actuator that drives the arm,
The clamp mechanism is connected to a base on which the slider can be disposed, a connection member that can contact the magnetic head when the slider is disposed on the base, and the connection member Wiring, and
When the slider is disposed on the base, the magnetic head is configured to be connected to the wiring via the connection member, and a liquid thin film is formed between the micro member and the base. Is inserted, and the micro member is configured to be clamped on the base by the adsorption force of the liquid.   16. The slider inspection apparatus according to claim 15, wherein a heater for heating the base is provided, and when the minute member is removed from the base, the base is heated by the heater and the liquid is heated. A slider inspection device configured to vaporize the liquid.   16. The slider inspection apparatus according to claim 15, wherein the slider drive mechanism has a gimbal that supports the clamp mechanism, the gimbal is attached to a tip of the suspension, and the suspension is attached to the gimbal. A slider inspection apparatus having dimples at positions corresponding to the base of the mechanism. A disk drive mechanism for rotationally driving the disk, a slider drive mechanism for engaging a slider mounted with a magnetic head to be inspected with the disk, and a slider transport mechanism for transporting the slider to the slider drive mechanism. In a slider inspection system having
The slider drive mechanism includes a clamp mechanism that clamps the slider, a suspension that supports the clamp mechanism, an arm that supports the suspension, and an actuator that drives the arm,
The clamp mechanism is connected to a base on which the slider can be disposed, a connection member that can contact the magnetic head when the slider is disposed on the base, and the connection member Wiring, and
When the slider is disposed on the base, the magnetic head is configured to be connected to the wiring via the connection member, and a liquid thin film is formed between the micro member and the base. Is inserted, and the micro member is configured to be clamped on the base by the adsorption force of the liquid.   19. The slider inspection system according to claim 18, wherein the slider transport mechanism includes a transport member provided with a suction mechanism that sucks the slider, and a drive mechanism that drives the transport member in three axial directions. The slider inspection system, wherein the member has a liquid nozzle for dropping the liquid.

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