JP2009254953A - Head unit, discharge inspecting device provided with the same and droplet discharge device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a head unit or the like capable of properly receiving a functional liquid leaked from a tube connection part of a fluid component without increasing the weight. <P>SOLUTION: The head unit includes a plurality of ink jet type functional droplet discharge heads 40, a carriage plate 35 having a head mounting part 81 on which the plurality of functional droplet discharge heads 40 are mounted, a plurality of the fluid components arranged right above a side extending part 82 shifted from of the head mounting part 81 of the carriage plate 35 to supply the functional liquid to each functional droplet discharge head 40, a functional liquid tube led around on the side extending part 82 to connect each fluid component to each functional droplet discharge head 40 and a groove like liquid receiving part 83 positioned right below the fluid component and formed to be sunken to the side extending part 82 of the carriage plate 35 and to receive the functional liquid leaked from the fluid component. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a head unit equipped with a plurality of ink jet type droplet discharge heads, a discharge inspection apparatus including the same, and a droplet discharge apparatus.

2. Description of the Related Art Conventionally, a droplet discharge device is known in which a functional liquid supply device including a plurality of tank units and a plurality of pressure adjusting valves is mounted on a main carriage (head unit) on which a plurality of functional droplet discharge heads are mounted (patent) Reference 1). The main carriage includes a plurality of functional liquid droplet ejection heads, a plurality of tank units that store functional liquids supplied to the plurality of functional liquid droplet ejection heads, and each functional liquid droplet ejection head and each tank unit on a support plate. And a plurality of pressure control valves interposed in a supply tube, and the functional liquid supplied from the tank unit is adjusted to a predetermined hydraulic head pressure by the pressure control valve to function droplets Naturally flows down to the discharge head. The main carriage is configured to be detachable from the functional liquid supply device.
JP 2006-082538 A

  In such a conventional main carriage, if a connection failure occurs at the joint between each tank unit and the supply tube or between each pressure regulating valve and the supply tube, the functional fluid leaks from this portion. Occurs. In this case, the leaked functional liquid may drip from the gap between the support plates, corrode the component parts, or damage the workpiece. In such a case, it is conceivable that the dropped functional liquid is received by the liquid receiving pan. However, if the liquid receiving pan is simply installed, the weight of the main carriage increases, and the followability in the movement of the main carriage is assumed to deteriorate. .

  The present invention provides a head unit that can appropriately receive the leaked functional liquid from the tube connecting portion of each fluid component that supplies the functional liquid to each functional liquid droplet ejection head without increasing the weight. It is an object of the present invention to provide a discharge inspection device and a droplet discharge device including the above.

  The head unit of the present invention includes a plurality of inkjet functional liquid droplet ejection heads, a carriage plate on which a plurality of functional liquid droplet ejection heads are mounted on a head mounting portion, and a side extension extending from the head mounting portion of the carriage plate. A plurality of fluid parts that are disposed immediately above the installation part and supply the functional liquid to each functional liquid droplet ejection head, and are routed on the side extension part to connect each fluid part and each functional liquid droplet ejection head. A functional liquid tube, and a groove-shaped liquid receiving portion that is located immediately below the fluid component and is recessed into the side extending portion of the carriage plate to receive the functional fluid leaked from the fluid component. And

  According to this configuration, even if the functional liquid leaks from the connection portion between the fluid component and the functional liquid tube, the dropped functional liquid is received at the liquid receiving portion formed in the carriage plate immediately below the functional liquid. Can receive. For this reason, corrosion of a component and damage to a workpiece can be prevented by the dropped functional liquid. Further, by positioning the functional liquid tube directly above the liquid receiving part, a space below the fluid part can be secured widely, and the degree of freedom of the routing of the functional liquid tube extending from the fluid part is increased. For this reason, the bending by the unreasonable handling of a functional liquid tube can be prevented. Further, since the liquid receiving part is formed in the side extension part of the carriage plate, the weight of the head unit itself may be reduced but not increased.

  In this case, it is preferable that the liquid receiving part has a plurality of grooves that regulate the routing position of each functional liquid tube at the top.

  According to this configuration, the plurality of grooves serve as guides when the functional liquid tube is attached to the fluid component, and therefore can be disposed at appropriate positions corresponding to the respective functional liquid ejection heads. Further, the functional liquid tube does not fluctuate with the movement of the head unit, and no unnecessary force is applied to the functional liquid tube.

  In this case, it is preferable that the liquid receiving part further includes a communication groove part that communicates the plurality of groove parts.

  According to this configuration, since the plurality of groove portions communicate with each other via the communication groove portion, the dropped functional liquid droplets can be received by the whole of the plurality of groove portions, and the overflow of the functional liquid can be suppressed.

  Furthermore, in this case, the liquid receiving part preferably further includes a plurality of tube attachment members attached to the respective functional liquid tubes.

  According to this configuration, since the tube attachment member is provided so as to follow each functional liquid tube, the leaked functional liquid can be appropriately guided to each groove portion, and the bending of the functional liquid tube can be effectively prevented. can do.

  Furthermore, it is preferable that the fluid component is a pressure regulating valve.

  According to this configuration, the functional liquid can be appropriately supplied to each functional liquid droplet ejection head at a predetermined water head pressure.

  The discharge inspection apparatus of the present invention performs inspection discharge from the above-described head unit and a large number of discharge nozzles in a plurality of functional liquid droplet discharge heads of the head unit, and the discharge performance of the large number of discharge nozzles is determined from the landing result. And a discharge inspection means for inspecting.

  According to this configuration, it is possible to prevent the component parts from being corroded by the dropped functional liquid and to bend due to excessive handling of the functional liquid tube, and the weight of the head unit itself is reduced. An inspection device can be provided.

  The droplet discharge device of the present invention includes the above-described head unit, and a drawing unit that performs drawing by discharging functional droplets from a plurality of functional droplet discharge heads while moving the head unit relative to the workpiece. , Provided.

  According to this configuration, it is possible to prevent component parts from being corroded by the dropped functional liquid, damage to the workpiece, and bending due to excessive handling of the functional liquid tube, and a liquid droplet ejecting apparatus with good drawing quality by reducing the weight of the head unit. Can be provided.

  Hereinafter, a droplet discharge device according to an embodiment of the present invention will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a functional droplet discharge head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced. A light emitting layer to be a pixel, a filter element of a color filter, and the like are formed.

  As shown in FIGS. 1 to 3, the droplet discharge device 1 is disposed on an X-axis support base 15 supported by a stone surface plate and extends in the X-axis direction, which is the main scanning direction. 10 on the X-axis table 2 for moving the X-axis in the X-axis direction and a pair of Y-axis support bases 22 spanning the X-axis table 2 via a plurality of support columns 23, and in the sub-scanning direction The Y-axis table 3 extending in the Y-axis direction and ten carriage units 4 on which a plurality of functional liquid droplet ejection heads 40 are mounted. The ten carriage units 4 are composed of the Y-axis table 3. It is suspended so that it can move freely. Further, the droplet discharge device 1 includes a chamber 5 that accommodates these devices in an atmosphere in which temperature and humidity are controlled, and a functional droplet discharge head 40 that penetrates the chamber 5 from the outside of the chamber 5 to the inside. A functional liquid supply unit 6 having three sets of tank units 61 for supplying functional liquid to the apparatus and a control device (not shown) for overall control of the entire apparatus are provided. By discharging the functional liquid droplet discharge head 40 in synchronization with the driving of the X-axis table 2 and the Y-axis table 3, the functional liquids of R, G, and B colors supplied from the functional liquid supply unit 6 are discharged. A predetermined drawing pattern is drawn on the substrate 10. The number of carriage units 4 is arbitrary.

  Further, the droplet discharge device 1 is provided with a maintenance device 7 including a flushing unit 71, a suction unit 72, a wiping unit 73, and a discharge performance inspection unit 74, and each unit is used for maintenance of the functional droplet discharge head 40. Accordingly, the function of the functional liquid droplet ejection head 40 is maintained and recovered. Reference numeral 76 in the figure denotes a camera unit that captures an image of a drawing result on the substrate 10 and is composed of two inspection cameras 77 supported above the X-axis table 2 so as to be movable in the Y-axis direction. Yes.

  In the droplet discharge device 1 according to the embodiment, the carriage unit 4 faces the portion where the X-axis table 2 and the Y-axis table 3 intersect to draw the substrate 10, and the portion where the Y-axis table 3 and the maintenance device 7 intersect. The function of the functional liquid droplet ejection head 40 is maintained / recovered while facing the carriage unit 4.

  As shown in FIGS. 2 and 3, the X-axis table 2 sucks and sets the substrate 10, and has a set table 11 having a mechanism that can be corrected in the θ-axis direction, and the set table 11 is slidable in the X-axis direction. An X-axis first slider 12 that supports the X-axis second slider 13 that supports the flushing unit 71 and the stage unit 75 slidably in the X-axis direction, and an X-axis first slider that extends in the X-axis direction. 12 and a pair of left and right X-axis linear motors (not shown) that move the X-axis second slider 13 in the X-axis direction.

  The Y-axis table 3 includes 10 bridge plates 21 each having 10 carriage units 4 suspended therein, 10 sets of Y-axis sliders (not shown) that support the 10 bridge plates 21 in both ends, and a pair. And a pair of Y-axis linear motors (not shown) that move the bridge plate 21 in the Y-axis direction. Further, the Y-axis table 3 causes the functional liquid droplet ejection head 40 to face the maintenance device 7 in addition to the sub-scanning of the functional liquid droplet ejection head 40 during drawing through each carriage unit 4. The ten carriage units 4 are configured to be individually movable in the Y-axis direction.

  Ten carriage units 4 suspended from the Y-axis table 3 have the same configuration, and each carriage unit 4 divides 12 functional liquid droplet ejection heads 40 into two groups of six. A mounted head unit 30 (see FIG. 6), a θ rotation mechanism 31 that supports the head unit 30 so as to be rotatable about θ, and a lifting mechanism that supports the head unit 30 on the Y-axis table 3 via the θ rotation mechanism 31. The suspension member 32 is provided. In addition, each carriage unit 4 is provided with a sub tank unit 33 that accommodates three sub tanks 34 connected to the above three sets of tank units 61 (actually, it is provided on the Y-axis table 3 side). : See FIG. 1 and FIG. 2), the functional liquid is supplied from the sub tank 34 to each functional liquid droplet ejection head 40 using the natural water head.

  Next, each head unit 30 will be described in detail with reference to FIGS. 4 to 6. The head unit 30 includes twelve functional liquid droplet ejection heads 40, a substantially square carriage plate 35 to which the twelve functional liquid droplet ejection heads 40 are attached, and a pair of left and right sides attached to both short sides of the carriage plate 35. Each of the plate support members 36 and the pair of plate support members 36, the head mounting frame 37 mounted on the θ rotation mechanism 31 and the both sides of the carriage plate 35. A pair of left and right pipe connection assemblies 38 for supplying a functional liquid to the functional liquid droplet ejection head 40, and a wiring connection assembly 39 disposed on the head mounting frame 37 and connected to the functional liquid droplet ejection head 40 for ejection control. It is equipped with.

  The twelve functional liquid droplet ejection heads 40 are assembled to the head unit 30 by dividing each of the six functional liquid droplet ejection heads 40 to the left and right. Each set of six functional liquid droplet ejection heads 40 ejects three types of functional liquid droplet ejection heads 40 for ejecting three types of functional liquid droplets (ink droplets) of R color, G color, and B color, respectively. They are combined in a step-by-step manner and are displaced from each other in a staircase pattern. That is, each group of six functional liquid droplet ejection heads 40 is arranged in the same arrangement pattern in terms of color arrangement and arrangement. In the two functional liquid droplet ejection heads 40 of the same color in each set, the nozzle row 46b continuously forms one partial drawing line in the Y-axis direction. Further, between the two groups in one head unit 30 and between the two groups between adjacent head units 30, the partial drawing lines of each color are spaced apart by two partial drawing lines.

  As shown in FIG. 7, the functional liquid droplet ejection head 40 is a so-called double ink jet head, which is a functional liquid introduction part 41 having two connection needles 44, and a dual head connected to the functional liquid introduction part 41. A substrate 42 and a head main body 43 that discharges the functional liquid are provided below the head substrate 42 (FIG. 7A).

  The functional liquid introduction part 41 has a pair of connection needles 44 and receives the supply of the functional liquid from the pipe connection assembly 38 described above. The head body 43 includes a double pump unit 45 composed of a piezo element and the like, and a nozzle plate 46 having a nozzle surface 46a on which a plurality of discharge nozzles 47 are formed. A large number of discharge nozzles 47 formed on the nozzle surface 46a of the nozzle plate 46 constitute two rows of nozzle rows 46b arranged in parallel with each other and shifted by a half nozzle pitch position. , 180 discharge nozzles 47 arranged at an equal pitch (see FIG. 7B). The head substrate 42 is provided with two series of connectors 48, and each connector 48 is connected to the control device via a flexible flat cable (not shown) extending from each of the wiring connection assemblies 39. . The drive waveform output from the control device is applied to each pump unit 45 (piezoelectric element) via each connector 48, so that the functional liquid is discharged from each discharge nozzle 47. The drawing means described in the claims includes the X-axis table 2, the Y-axis table 3, the carriage unit 4 (functional liquid droplet ejection head 40 and head unit 30), and a control device.

  As shown in FIGS. 4 and 5, the pair of pipe connection assemblies 38 are located on both short sides of the carriage plate 35, and are fixed to two plates horizontally attached to the plate support members 36 inward. Plate 51, three valve mounting plates 52 erected on each fixed plate 51, six pressure regulating valves 53 mounted on a total of six valve mounting plates 52, six pressure regulating valves 53 and six And six decompression supply tubes 54 for connecting the functional liquid droplet ejection heads 40.

  Each pressure regulating valve 53 is a diaphragm type pressure reducing valve that operates on the basis of atmospheric pressure, and an upstream connector 53a connected to the sub tank 34 is provided on the upstream side (primary side), and the downstream side (secondary side) ) Is provided with a downstream connector 53b to which the reduced pressure supply tube 54 is connected. The six pressure regulating valves 53 in each group are arranged in a posture parallel to the long side of the carriage plate 35 and arranged in the short side direction, and the upstream connector 53a of each pressure regulating valve 53 is obliquely upward and the downstream connector. Each 53b is arranged downward. In this case, each pressure regulating valve 53 is disposed in the height direction so as to fit in the gap between the carriage plate 35 and the head mounting frame 37, and the individual supply tube 55 described later is disposed outside the plate support member 36. The decompression supply tube 54 connected to the upstream connector 53a and connected to the downstream connector 53b extends curvedly in a “U” shape and is connected to the functional liquid droplet ejection head 40 from above (both shown in FIG. 4).

  Here, with reference to FIG. 8, the functional liquid supply flow path around the pipe connection assembly 38 from the sub tank 34 (sub tank unit 33) to the functional liquid droplet ejection head 40 will be briefly described. Four individual supply tubes 55 of the same color are connected to the sub tanks 34 of the respective colors via three two-branch joints 56. Further, the four individual supply tubes 55 of the same color are connected to the upstream connectors 53a of the pressure regulating valves 53 of two pieces on each side. Further, the decompression supply tube 54 connected to the downstream connector 53 b of each pressure regulating valve 53 is connected to the two connection needles 44 of the functional liquid droplet ejection head 40 via the two-branch joint 56 on the downstream side. In the present embodiment, a plurality of two branch joints 56 are used in each functional liquid supply flow path from the sub tank 34 to each functional liquid droplet ejection head 40, and the tube lengths of the individual supply tube 55 and the reduced pressure supply tube 54 are The tube diameter is the same so that there is no variation in pressure loss.

  As shown in FIGS. 4 and 9, the carriage plate 35 is made of a thick plate such as stainless steel, and includes a head mounting portion 81 on which the functional liquid droplet ejection head 40 is mounted, and a pair of heads positioned on both sides of the head mounting portion 81. The side extending portion 82 is integrally formed. The head mounting portion 81 is formed with twelve mounting openings 88 for mounting twelve functional liquid droplet ejection heads 40, and a pair of reference pins 87 for head alignment projecting from the back surface thereof. (See FIG. 5B). The functional liquid droplet ejection head 40 projects its head main body 43 downward from a mounting opening 88 formed in the carriage plate 35 and is positioned in the carriage plate 35 through a head holding member 89 applied from the lower side. It is fixed (see FIGS. 5B and 5C).

  On the other hand, the pair of side extending portions 82 has a pair of liquid receiving portions 83 for receiving a functional liquid when a liquid leaks from the pipe connection assembly 38 (pressure adjusting valve 53) disposed immediately above the side extending portions 82, A depression is formed. Each liquid receiving portion 83 is positioned between the left and right plate support members 36 attached to both short side portions of the carriage plate 35 and the head mounting portion 81, and is viewed in plan view parallel to the short side of the carriage plate 35. It is recessed and formed as a rectangular integral groove. That is, each liquid receiving part 83 is connected from the connection part of said 6 sets of downstream connectors 53b and the pressure reduction supply tube 54, and the connection part of the pressure reduction supply tube 54 and the 2 branch joint 56 (connection part of the pressure reduction supply tube 54). It is located directly below the connecting portion of the decompression supply tube 54 so that it can be received when a liquid leak occurs. In addition, each liquid receiving portion 83 is recessed and formed at a depth approximately half the thickness of the carriage plate 35.

  The decompression supply tube 54 curved in the “U” shape is routed so that the curved portion faces the center in the recess of the liquid receiving portion 83 and is connected to the bifurcated joint 56. Yes. For example, when a liquid leak occurs in the downstream connector 53b portion of the pressure regulating valve 53 (connection portion with the reduced pressure supply tube 54), the leaked functional liquid flows down through the reduced pressure supply tube 54 and is received by the liquid receiving portion 83. It is done. Similarly, the functional liquid leaking from the connection portion between the reduced pressure supply tube 54 and the two-branch joint 56 flows down through the reduced pressure supply tube 54 and is received by the liquid receiving portion 83.

  By the way, the reduced pressure supply tube 54 (same as the individual supply tube 55) is made of a material having gas impermeability at the molecular level, and therefore has high rigidity, and once bent, it becomes white and cannot be used. End up. On the other hand, as described above, due to the positional relationship with the pressure regulating valve 53, the decompression supply tube 54 needs to be curved and piped in a “U” shape in a narrow space. For this reason, it is required that the reduced pressure supply tube 54 has a structure that does not interfere with other components, and that a sufficient work space is required for connecting the reduced pressure supply tube 54 to the pressure regulating valve 53. In this respect, in the liquid receiving part 83 of the present embodiment, the liquid receiving part 83 is formed in the carriage plate 35 so as to receive the functional liquid that has leaked from the connection portion of the decompression supply tube 54, and the liquid receiving part 83 The recessed portion of the portion 83 can be used as a space for routing the reduced pressure supply tube 54. Thereby, the attachment work of the decompression supply tube 54 can be easily performed, and the bending of the decompression supply tube 54 during the attachment work can be effectively prevented.

  Next, a second embodiment of the liquid receiver 83 will be described with reference to FIG. The liquid receiving part 83 of this embodiment corresponds to the number of the reduced pressure supply tubes 54 and is configured with a plurality (six on one side) of the groove parts 84 so as to serve as a guide when the reduced pressure supply tubes 54 are attached. . Each groove portion 84 corresponds to the lead-out portion curved in the “U” shape of the decompression supply tube 54, and follows the groove width slightly larger than the diameter of the decompression supply tube 54 and the curved shape of the “U” shape. It has a groove bottom shape. Each decompression supply tube 54 is routed in a “U” shape so as to be loosely fitted in the groove 84. As a result, it is possible to receive the functional liquid leaking from the connection portion of the reduced pressure supply tube 54 and to prevent the reduced pressure supply tube 54 from wobbling.

  Furthermore, as shown in FIG. 11, the liquid receiving part 83 of the third embodiment includes the plurality of groove parts 84 and the above-described groove parts 84 in order to suppress overflow of the functional liquid that has leaked from the connection part of the decompression supply tube 54. And a plurality of groove portions 84 that communicate with each other. That is, the liquid receiving part 83 of the third embodiment is integrally formed with a plurality of groove parts 84 in the outer half part and a communication groove part 85 in the inner half part. Thereby, the fluctuation of the reduced pressure supply tube 54 can be prevented, and the overflow of the functional liquid that has leaked can be suppressed.

  Furthermore, as shown in FIG. 12, the liquid receiving portion 83 according to the fourth embodiment includes a plurality of groove portions 84 and communication groove portions 85 similar to those of the above embodiment, and tube attachments provided so as to rise from the respective groove portions 84. And a member 86. Each tube attachment member 86 is formed in a curved shape such that a portion on the downstream connector 53b side of the reduced pressure supply tube 54 bent and routed in a “U” shape is attached. Each tube attachment member 86 is formed as a separate member with respect to the carriage plate 35, and is fixed to each groove portion 84 by adhesion or the like. Accordingly, the functional liquid leaking from the connection portion of the reduced pressure supply tube 54 can be guided to the respective groove portions 84 through the tube attachment member 86, and the bending of the reduced pressure supply tube 54 can be effectively prevented. .

  According to the above configuration, the liquid receiving portion 83 for receiving the functional liquid leaking from the connection portion of the reduced pressure supply tube 54 is recessedly formed in the side extending portion 82 of the carriage plate 35 in the head unit 30. Therefore, the leaked functional liquid can be appropriately received. As a result, it is possible to prevent the component parts from being corroded by the dropped functional liquid, the workpiece from being damaged, and the bending of the reduced pressure supply tube 54 caused by excessive handling. Further, the head unit 30 can be reduced in weight because the liquid receiving portion 83 is recessed.

  Next, the discharge inspection apparatus according to the present embodiment will be described. This discharge inspection apparatus inspects the discharge performance of a single head unit 30 in which twelve functional liquid droplet discharge heads 40 are incorporated.

  As shown in FIG. 13, the discharge inspection device 90 includes a machine base 91, a drawing inspection device 92 that is widely mounted on the entire area of the machine base 91 and has the head unit 30 mounted thereon, a head suction device 94, and a head wiping device. 95, and a control computer (not shown) for overall control of the entire apparatus. Further, the discharge inspection device 90 is accommodated in a chamber device (not shown) constituting a clean booth whose temperature is controlled inside. The drawing inspection device 92 ejects functional droplets from the plurality of functional droplet ejection heads 40 mounted on the head unit 30 onto the inspection sheet S, and inspects the landing positions of the ejected functional droplets.

  The drawing inspection device 92 is placed on the machine base 91 and is disposed across the Y-axis movement table 96 constituting the movement axis in the main scanning direction and the Y-axis movement table 96, and the movement axis in the sub-scanning direction. And an X-axis movement table 97, and a main carriage 98 provided on the X-axis movement table 97. A head unit 30 is detachably suspended from the main carriage 98, and a functional liquid supply device 99 that supplies functional liquid to the head unit 30 is mounted. The X-axis moving table 97 is provided with a camera device 101 separately from the main carriage 98. On the other hand, the Y-axis moving table 96 is provided with an alignment table 102 that holds the alignment mask 103 and a sheet suction table 104 that sucks and holds the inspection sheet S to be landed with the discharged functional liquid droplets. .

  In the drawing inspection apparatus 92, the camera apparatus 101 recognizes an image of a mark serving as a landing position reference of the alignment mask 103 and also recognizes an image of landing dots inspected and discharged from the plurality of functional liquid droplet discharge heads 40 of the head unit 30. By comparing both recognition results, the ejection performance of each functional liquid droplet ejection head 40 (ejection nozzle 47) is inspected.

  The head unit 30 mounted on the discharge inspection apparatus 90 of the present embodiment has the same structure as the head unit 30 mounted on the droplet discharge apparatus 1 described above. Therefore, the structures of the pressure regulating valve 53, the reduced pressure supply tube 54, the liquid receiving portion 83, etc. are completely the same, and the description of this portion is omitted.

  Thus, when the head unit 30 having the pair of liquid receiving portions 83 formed on the carriage plate 35 is mounted on the discharge inspection device 90 and the discharge performance is inspected, the leaked functional liquid is appropriately received. Can do. Therefore, it is possible to effectively prevent the component parts from being corroded by the dropped functional liquid and from being bent due to excessive handling of the reduced pressure supply tube 54, and to reduce the weight of the head unit 30.

It is a perspective view of the droplet discharge device concerning an embodiment. It is a top view of a droplet discharge device. It is a side view of a droplet discharge device. It is an external appearance perspective view of a head unit. It is the top view and side view of a head unit. It is explanatory drawing of the color arrangement pattern of a functional droplet discharge head. It is a front and back external perspective view of a functional liquid droplet ejection head mounted on the head unit. It is a supply system diagram of the functional liquid from the sub tank to the functional liquid droplet ejection head. 1 is an external perspective view of a carriage plate according to a first embodiment. It is the external appearance perspective view of the carriage plate which concerns on 2nd Embodiment, and the expansion perspective view of the side extension part of a carriage plate. It is the external appearance perspective view of the carriage plate which concerns on 3rd Embodiment, and the expansion perspective view of the side extension part of a carriage plate. It is the external appearance perspective view of the carriage plate which concerns on 4th Embodiment, and the expansion perspective view of the side extension part of a carriage plate. 1 is a schematic plan view of a discharge inspection apparatus according to an embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1: Droplet discharge apparatus, 10: Board | substrate, 30: Head unit, 35: Carriage plate, 40: Functional droplet discharge head, 53: Pressure adjustment valve, 54: Depressurization supply tube, 83: Liquid receiving part, 84: Groove part 85: Communication groove portion 86: Tube attachment member 90: Discharge inspection device

Claims (7)

A plurality of ink-jet functional droplet discharge heads;
A carriage plate on which the plurality of functional liquid droplet ejection heads are mounted on a head mounting portion;
A plurality of fluid components that are disposed immediately above the side extending portion of the carriage plate that is disengaged from the head mounting portion, and that supply functional liquid to each functional liquid droplet ejection head;
A functional liquid tube that is routed on the side extending portion and connects the fluid components and the functional liquid droplet ejection heads;
A groove-shaped liquid receiving portion that is located immediately below the fluid component, is recessed in the side extension portion of the carriage plate, and receives a functional liquid that has leaked from the fluid component; Head unit to be used.   2. The head unit according to claim 1, wherein the liquid receiving part has a plurality of groove parts that regulate a routing position of each functional liquid tube at an upper part.   The head unit according to claim 2, wherein the liquid receiving portion further includes a communication groove portion that communicates the plurality of groove portions.   4. The head unit according to claim 2, wherein the liquid receiving portion further includes a plurality of tube attachment members attached to the functional liquid tubes. 5.   The head unit according to claim 1, wherein the fluid component is a pressure regulating valve. A head unit according to any one of claims 1 to 5,
Discharge inspection means for inspecting and discharging from a large number of discharge nozzles in the plurality of functional liquid droplet discharge heads of the head unit, and inspecting the discharge performance of the large number of discharge nozzles from the landing result. Discharge inspection device characterized. A head unit according to any one of claims 1 to 5,
A droplet discharge apparatus comprising: a drawing unit that performs drawing by discharging functional droplets from the plurality of functional droplet discharge heads while moving the head unit relative to a workpiece. .

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