JP2009250686A - Oxygen pump and restoration method of oxygen pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a capacity restoring method of an oxygen pump capable of efficiently restoring a solid electrolyte cylindrical body by utilizing existing equipment to extend the life of the oxygen pump. <P>SOLUTION: The capacity restoring method is adapted to the oxygen pump which is equipped with a solid electrolyte cylindrical body bundle 29 constituted of a plurality of the solid electrolyte cylindrical bodies 30, the electrodes 34 and 35 arranged to the inner and outer surfaces of the solid electrolyte cylindrical body 30 and a heating means 31 for heating the solid electrolyte cylindrical body 30 and constituted so as to discharge an oxygen molecule by applying a positive pole to the electrode 35 and applying a negative pole to the electrode 34 to allow a current to flow. In at least one solid electrolyte cylindrical body 30, the oxygen molecule is discharged, while the oxygen molecule is taken in the solid electrolyte cylindrical body 30 by applying the positive pole to the electrode 34 provided to the inner surface of at least the other one solid electrolyte cylindrical body 30 for a predetermined time and applying the negative pole to the electrode 35 provided to the outer surface of the solid electrolyte cylindrical body 30 to perform the restoration measure. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an oxygen pump and a method for recovering the oxygen pump.

  Conventionally, a method for producing a single crystal sample or the like using an atmospheric gas whose oxygen partial pressure is controlled by an oxygen partial pressure control device having an electrochemical oxygen pump containing a solid electrolyte is known (Patent Document). 1).

  The oxygen partial pressure control device shown in FIG. 5 includes a mass flow controller (MFC) 3 that controls the flow rate of the inert gas that has passed through the valve 2 to a set value, and the inert gas that has passed through the mass flow controller 3 as a target oxygen component. The oxygen oxygen for supply gas supplied to the next process (apparatus) such as a sample growing apparatus by monitoring the oxygen partial pressure of the inert gas controlled by the oxygen pump 4 and the inert gas controlled by the oxygen pump 4 It has a sensor 5.

Further, this apparatus compares the monitored value by the oxygen sensor 5 with the set value by the oxygen partial pressure setting unit 6 and the inertness sent out from the oxygen pump 4 to set a desired oxygen partial pressure value. An oxygen partial pressure control unit 7 that controls the oxygen partial pressure of the gas to a predetermined value and an oxygen partial pressure display unit 8 that displays a monitor value by the oxygen sensor 5 are provided. Normally, the oxygen partial pressure in the inert gas is about 10 ⁻⁴ atm.

  As shown in FIG. 6, the electrochemical oxygen pump 4 has electrodes 4b and 4c made of platinum formed on both the inner and outer surfaces of a solid electrolyte cylindrical body 4a having oxygen ion conductivity. The solid electrolyte cylindrical body 4a is, for example, a zirconia solid electrolyte, and is heated to about 600 ° C. by a heater (not shown). The oxygen pump 4 is generally configured by arranging a plurality (for example, five) of solid electrolyte cylindrical bodies 4a in parallel on the same surface.

As shown in FIG. 6, an inert gas is supplied in the axial direction from one opening of the solid electrolyte cylindrical body 4a toward the other opening. The inert gas is, for example, Ar + O ₂ (10 ⁻⁴ atm). At that time, the DC voltage of the DC power source E is applied between the electrodes 4b and 4c on both the inner and outer surfaces. When a positive electrode is applied to the outer electrode 4c and a negative electrode is applied to the inner electrode 4b to flow a current I, oxygen molecules (O ₂ ) in the inert gas flowing through the solid electrolyte cylindrical body 4a are electrically charged. It is reduced to ions (O ²⁻ ) and released again as oxygen molecules (O ₂ ) through the solid electrolyte to the outside of the solid electrolyte cylindrical body 4a. The oxygen molecules released to the outside of the solid electrolyte cylindrical body 4a are exhausted to the atmosphere. The inert gas of Ar + O ₂ (10 ⁻⁴ atm) supplied to the solid electrolyte cylindrical body 4a becomes a processed gas (purified gas) that is controlled to a target oxygen partial pressure by reducing oxygen molecules, and is the next step. (Device). If a gas whose oxygen partial pressure is controlled by such an oxygen pump is supplied, crystal growth, alloying, heat treatment, semiconductor manufacturing process, etc. can be performed in an atmosphere such as an inert gas whose oxygen partial pressure is controlled.

In the oxygen pump 4 as described above, the oxygen partial pressure in the solid electrolyte cylindrical body is usually 2 × 10 ⁻¹ to 1 × 10 ⁻³⁰ atm, and the temperature is 600 ° C. to 700 ° C. If the use is continued in such a harsh environment, the solid electrolyte cylindrical body is excessively reduced to cause defects (excessive increase in oxygen vacancies). That is, a solid electrolyte cylindrical body (for example, zirconia) that is a metal oxide is excessively reduced to generate a metal (for example, zirconium). Since the metal oxide and the metal have different coefficients of thermal expansion, the solid electrolyte cylindrical body is damaged when stress is generated due to the difference in coefficient of thermal expansion.

Then, the method of taking a recovery | restoration measure of a solid electrolyte cylindrical body and preventing damage is proposed (patent document 2). In Patent Document 2, after operating an oxygen pump, before starting to cool down, 1 atm of pure oxygen or air is allowed to flow into a solid electrolyte tube such as an oxygen pump to recover the solid electrolyte cylindrical body. That is, a branch pipe, a valve, a filter, a check valve, and the like are provided in the gas path, and pure oxygen or air is allowed to flow into the solid electrolyte cylindrical body through the branch pipe. Thereby, the metal (zirconium) partially reduced under extremely low oxygen partial pressure can be reoxidized to form a metal oxide (zirconia), and the solid electrolyte cylindrical body is recovered.
JP 2002-326887 A JP 2005-331339 A

  However, when a branch path is provided as described in Patent Document 2, piping, valves, filters, check valves, and the like must be separately added for recovery measures for the solid electrolyte cylindrical body. For this reason, the installation space becomes large and the cost is high. Further, since recovery cannot be performed while the oxygen pump is in operation, it is necessary to stop the operation of the oxygen pump once in order to perform recovery. For this reason, the operating efficiency of the oxygen pump has been poor.

  In view of the above problems, the present invention provides a capacity recovery method and an oxygen pump in an oxygen pump that can efficiently recover a solid electrolyte cylindrical body using an existing apparatus and can achieve a long life. provide.

  The capacity recovery method in the oxygen pump according to the present invention includes a solid electrolyte cylindrical bundle composed of a plurality of solid electrolyte cylindrical bodies having oxygen ion conductivity, and an inner surface and an outer surface of the solid electrolyte cylindrical body. And a heating means for heating the solid electrolyte cylindrical body, the heating means is operated to apply a positive electrode to the electrode on the outer surface of the solid electrolyte cylindrical body, and the electrode on the inner surface of the solid electrolyte cylindrical body A method for recovering the capacity of an oxygen pump that discharges oxygen molecules to the outside of the solid electrolyte cylinder by applying a current to the negative electrode to discharge oxygen molecules in at least one solid electrolyte cylinder Then, a positive electrode is applied to an electrode on the inner surface of at least one other solid electrolyte cylindrical body for a predetermined time, and a negative electrode is applied to an electrode on the outer surface of the solid electrolyte cylindrical body to thereby convert oxygen molecules into the solid electrolyte cylindrical body. Recovered by taking inside And performs location.

  According to the capacity recovery method in the oxygen pump of the present invention, at least one other solid electrolyte cylinder is recovering while oxygen molecules are released from at least one solid electrolyte cylinder. That is, since at least one solid electrolyte cylindrical body can be operated as an oxygen pump, release of oxygen molecules and recovery of the solid electrolyte cylindrical body can be performed simultaneously. In the solid electrolyte cylindrical body to be recovered, the metal produced by reducing the solid electrolyte cylindrical body that was originally a metal oxide can be reoxidized and returned to the metal oxide again. In other words, oxygen molecules can be filled into the defects (oxygen vacancies) formed in the solid electrolyte cylindrical body by releasing the oxygen molecules, so that the solid electrolyte cylindrical body can be recovered. Here, recovery means regenerating the oxygen molecule releasing ability of the solid electrolyte cylindrical body.

  In a plurality of solid electrolyte cylindrical bodies, the solid electrolyte cylindrical bodies that perform recovery measures for a predetermined time can be sequentially changed every predetermined period. That is, since the solid electrolyte cylindrical body is alternately recovered every predetermined period, the solid electrolyte cylindrical body can be recovered sequentially, and oxygen can be released again by the recovered solid electrolyte cylindrical body. . In this case, even if it is a solid electrolyte cylinder that requires recovery or a solid electrolyte cylinder that does not require recovery, recovery measures are uniformly performed.

  The oxygen pump of the present invention includes a solid electrolyte cylindrical bundle composed of a plurality of solid electrolyte cylindrical bodies having oxygen ion conductivity, and electrodes disposed on the inner surface and the outer surface of the plurality of solid electrolyte cylindrical bodies. And an oxygen pump provided with a heating means for heating the solid electrolyte cylindrical body, a positive electrode is applied to the electrode on the outer surface of at least one solid electrolyte cylindrical body, and the electrode on the inner surface of the solid electrolyte cylindrical body is − Applying a pole to the oxygen molecule releasing state in which oxygen molecules are released to the outside from the solid electrolyte cylindrical body, and applying a positive electrode to the electrode on the inner surface of at least one solid electrolyte cylindrical body that requires recovery for a predetermined time, A control means is provided that can switch between an oxygen molecule intake state in which a negative electrode is applied to the electrode on the outer surface of the solid electrolyte cylindrical body and oxygen molecules are taken into the solid electrolyte cylindrical body.

  The number of solid electrolyte cylinders can be provided in excess of the number of solid electrolyte cylinders that provide the minimum required oxygen molecule release capability. As a result, even if there is a solid electrolyte cylindrical body that is recovering, other solid electrolyte cylindrical bodies can release oxygen molecules, and can always have the necessary oxygen molecule releasing ability.

  Recovery measures can be taken for each solid electrolyte cylindrical body at regular intervals.

  In the oxygen pump recovery method and the oxygen pump according to the present invention, when recovering after the operation of the oxygen pump is stopped, it is only necessary to change the direction of voltage application. The solid electrolyte cylindrical body is easily recovered using the equipment. Therefore, there is no need to provide a branch pipe as in the prior art, the installation space can be reduced, and the cost can be reduced. Furthermore, while the solid electrolyte cylindrical body is being recovered, other solid electrolyte cylindrical bodies can operate as an oxygen pump, so that the continuous operation can be performed without stopping the operation of the oxygen pump for recovery. This makes it possible to recover efficiently.

  If the solid electrolyte cylindrical body is provided in excess of the number of solid electrolyte cylindrical bodies that release the minimum required oxygen molecules, the oxygen molecule release capability can be provided at all times, so that the release of oxygen molecules is possible. It is possible not to impair the ability. Therefore, a device such as an oxygen partial pressure control device using this oxygen pump can be made to function with high performance.

  The solid electrolyte cylindrical body can be filled with oxygen vacancies by sequentially recovering the solid electrolyte cylindrical body. Therefore, the solid electrolyte cylindrical body requiring recovery can be prevented from being damaged, and the solid electrolyte does not require recovery. The tubular body can prevent the cause of damage. For this reason, the effect of recovery and prevention of the cause of breakage can be expected, and the life of the entire apparatus can be further extended.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS. As shown in FIG. 1, the oxygen pump 4 according to the present invention includes a solid electrolyte cylindrical bundle 29 composed of a plurality of solid electrolyte cylindrical bodies 30 having oxygen ion conductivity, and each solid electrolyte cylindrical body. Heating means 31 for heating 30 is provided. In this case, platinum plating etc. are given to the inner surface and the outer surface of each solid electrolyte cylindrical body 30, and the electrodes 34 and 35 are comprised as shown in FIG. In the present embodiment, the minimum number of solid electrolyte cylindrical bodies 30 required as the oxygen molecule release capability is five, and the solid electrolyte cylindrical bundle 29 has six solid electrolyte cylindrical bodies 30a to 30f. Are arranged in parallel on the same plane. That is, the solid electrolyte cylindrical body bundle 29 is provided in an amount one extra than the number of the solid electrolyte cylindrical bodies 30 that provide the minimum required oxygen molecule release capability.

  The solid electrolyte cylindrical bundle 29 is sandwiched between flat heating means 31 (shown simply). The heating means 31 is a meandering heater having a conductor coated with an insulating layer, and is constituted by a meandering heater wired in a plane as shown by an imaginary line in FIG. The heating means 31 may be constituted by a heating wire wound in a coil shape on the outer peripheral side of the solid electrolyte cylindrical bundle 29 instead of the meandering heater. In each solid electrolyte cylindrical body 30, a gas supply path 27 is provided in the upper part, and a gas discharge path 28 is provided in the lower part.

In order to operate the oxygen pump 4 as described above, a DC voltage of a DC power source E is applied between the electrodes 34 and 35 on both the inner and outer surfaces. That is, the positive electrode is applied to the outer electrode 35 and the negative electrode is applied to the inner electrode 34 to pass the current I. At that time, an inert gas is supplied from the gas supply path 27. As a result, oxygen molecules (O ₂ ) in the inert gas flowing through the solid electrolyte cylindrical body are electrically reduced to ions (O ²⁻ ), and are again converted into oxygen molecules (O ₂ ) through the solid electrolyte. The oxygen molecule is released to the outside of the cylindrical body 30. On the other hand, as shown in FIG. 2, a positive electrode is applied to the inner electrode 34 and a negative electrode is applied to the outer electrode 35 to pass a reverse current I. As a result, oxygen molecules (O ₂ ) in a gas such as air flowing along the outer surface of the solid electrolyte cylindrical body 30 are electrically reduced to ions (O ²⁻ ) and pass through the solid electrolyte cylindrical body 30. the oxygen molecules capture state to take the inside of the solid electrolyte cylindrical body 30 as oxygen molecules (O _2).

  FIG. 3 shows an oxygen partial pressure control apparatus using the oxygen pump 4 of the present invention. This oxygen partial pressure control device controls a mass flow controller (MFC) 3 that controls the flow rate of the inert gas that has passed through the valve 2 to a set value, and controls the inert gas that has passed through the mass flow controller 3 to a target oxygen partial pressure. A possible electrochemical oxygen pump 4 and a supply gas oxygen sensor 5 for monitoring the oxygen partial pressure of the inert gas controlled by the oxygen pump 4 and supplying it to the next process (device) such as a sample growing device Have. Further, this apparatus compares the monitored value by the oxygen sensor 5 with the set value by the oxygen partial pressure setting unit 6 and the inertness sent out from the oxygen pump 4 to set a desired oxygen partial pressure value. An oxygen partial pressure control unit 7 that controls the oxygen partial pressure of the gas to a predetermined value and an oxygen partial pressure display unit 8 that displays a monitor value by the oxygen sensor 5 are provided.

  The oxygen pump 4 is provided with voltage application means 50 as shown in FIG. The voltage applying means 50 applies a voltage to the electrodes 34 and 35 on the inner and outer surfaces of the solid electrolyte cylindrical body 30.

  Further, the oxygen pump 4 is provided with a control means 51 as shown in FIG. The control means 51 switches the voltage applied to the solid electrolyte cylindrical body 30 at certain time intervals (30 minutes in the present embodiment) to bring the solid electrolyte cylindrical body 30 into an oxygen molecule releasing state or to take in oxygen molecules. State. The control means 51 can be constituted by a microcomputer, for example. That is, in this embodiment, automatic control is performed. The control means 51 may be one that can be manually controlled (switched) by a lever, a switch, or the like.

Next, the capacity recovery method in the oxygen pump of the present invention will be described. First, with respect to all the solid electrolyte cylindrical bodies 30a to 30f, when a positive electrode is applied to the outer electrode 35 and a negative electrode is applied to the inner electrode 34 to flow a current I, the interior of the solid electrolyte cylindrical body 30 is obtained. Oxygen molecules (O ₂ ) in the flowing inert gas are electrically reduced to become ions (O ²⁻ ), and are released again as oxygen molecules (O ₂ ) through the solid electrolyte to the outside of the solid electrolyte cylindrical body 30. The oxygen molecule is released.

  After a predetermined time (for example, 50 hours) has elapsed since the oxygen molecule was released, the solid electrolyte cylindrical body 30a is recovered in the oxygen molecule uptake state as shown in FIG. That is, in response to a command from the control means 51, the voltage applying means 50 applies a positive pole to the inner electrode 4b of the solid electrolyte cylindrical body 30a and a negative pole to the outer electrode 4c so that a reverse current I is generated. The voltage of the solid electrolyte cylindrical body 30a is switched so as to flow. Then, this reverse current I flows for 30 minutes. Thereby, the solid electrolyte cylindrical body 30a can be filled with oxygen molecules in the defects (oxygen vacancies) formed in the solid electrolyte cylindrical body 30a by taking in oxygen molecules. That is, the metal produced by reducing the solid electrolyte cylindrical body, which was originally a metal oxide, can be reoxidized and returned to the metal oxide again, and the solid electrolyte cylindrical body 30a can be recovered. . In addition, the hatching of FIG. 4 has shown the solid electrolyte cylindrical body which is in the oxygen molecule taking-in state by applying the DC voltage of the reverse polarity to the oxygen molecule releasing state.

  Thereafter, the solid electrolyte cylindrical body 30 to be recovered is sequentially changed every predetermined period. Specifically, after the solid electrolyte cylindrical body 30a is recovered for 30 minutes, the target to be recovered is defined as the solid electrolyte cylindrical body 30b. That is, as shown in FIG. 4 (b), the voltage applying means 50 applies a positive pole to the inner electrode 34 of the solid electrolyte cylindrical body 30b and a negative pole to the outer electrode 35 in accordance with a command from the control means 51. Is applied to switch the voltage of the solid electrolyte cylindrical body 30b so that a reverse current I flows. Thereby, the solid electrolyte cylindrical body 30b can be reoxidized and recovered by taking in oxygen molecules. Further, the voltage applying means 50 is applied to the solid electrolyte cylindrical body 30a so that a current I flows by applying a positive electrode to the electrode 35 on the outer surface of the solid electrolyte cylindrical body 30a and a negative electrode to the electrode 34 on the inner surface. Switch the voltage. Thereby, oxygen can be released again by the solid electrolyte cylindrical body 30a after the recovery.

  Thereafter, the solid electrolyte cylindrical body 30c is recovered by the same method, and a DC voltage having the original polarity is applied to the solid electrolyte cylindrical body 30b. Thereafter, the solid electrolyte cylindrical bodies 30d, 30e, and 30f are all recovered by the same method, and the solid electrolyte cylindrical body 30 that performs a 30-minute recovery measure is sequentially changed every predetermined period. Thereby, when a predetermined period passes, all the solid electrolyte cylindrical bodies 30a-30f will be recovered.

  As described above, in the present invention, when recovering after the operation of the oxygen pump 4 is stopped, it is only necessary to change the direction in which the voltage is applied. The solid electrolyte cylindrical body 30 is easily recovered. Therefore, there is no need to provide a branch pipe as in the prior art, the installation space can be reduced, and the cost can be reduced. Further, while the solid electrolyte cylindrical body 30a is being recovered, the other solid electrolyte cylindrical bodies 30b to 30f can operate as oxygen pumps, so that the operation of the oxygen pump is stopped for recovery. Continuous operation is possible and recovery can be performed efficiently.

  In the plurality of solid electrolyte cylindrical bodies 30, the solid electrolyte cylindrical bodies 30 that perform the recovery measures for a predetermined time can be sequentially changed every predetermined period. That is, the solid electrolyte cylindrical body 30 is alternately restored every predetermined period. In this case, even if it is the solid electrolyte cylindrical body 30 that requires recovery or the solid electrolyte cylindrical body 30 that does not require recovery, the recovery measures are uniformly performed. Since it is possible to sequentially fill the oxygen vacancies by performing recovery measures for the solid electrolyte cylindrical body 30, the solid electrolyte cylindrical body 30 that requires recovery can be prevented from being damaged and does not require recovery. The solid electrolyte cylindrical body 30 can prevent the occurrence of damage. For this reason, the effect of recovery and prevention of the cause of breakage can be expected, and the life of the oxygen pump 4 can be further prolonged.

  If the solid electrolyte cylindrical body 30 is provided in excess of the number of the solid electrolyte cylindrical bodies 30 that provide the minimum required oxygen molecule release capability, the oxygen molecule release capability required at all times can be provided. It is possible not to impair the ability to release molecules. Therefore, a device such as an oxygen partial pressure control device using this oxygen pump 4 can be made to function with high performance.

  As described above, the embodiments of the present invention have been described. However, the present invention is not limited to the above-described embodiments, and various modifications are possible. For example, the number of solid electrolyte cylindrical bodies 30 can be increased or decreased. What is necessary is just to provide two or more. In the embodiment, the solid electrolyte tubular body bundle 29 is provided to be one extra than the number of solid electrolyte tubular bodies 30 that provides the minimum required oxygen molecule release capability. May be provided. Further, the solid electrolyte cylindrical body 30 can be arranged in the vertical direction or in the horizontal direction. As the order of recovery, the adjacent solid electrolyte cylindrical bodies 30 programmed in advance in FIG. 4 are recovered sequentially, but may be random. The solid electrolyte cylindrical body that starts recovery can be arbitrarily set. Moreover, the solid electrolyte cylindrical body 30 can also be arrange | positioned circularly with a predetermined pitch along the circumferential direction. When it arrange | positions in circular shape, not a fixed pitch but an unequal pitch may be sufficient. Further, the recovery order may be sequentially clockwise, counterclockwise, or random. Also in this case, the solid electrolyte cylindrical body that starts recovery can be arbitrarily set.

  In the embodiment, the recovery is performed after a predetermined time has elapsed since the oxygen pump 4 was operated. For this reason, when performing recovery, the solid electrolyte cylindrical body that does not require a recovery and does not require recovery has also been recovered. As described above, in the embodiment, even when the solid electrolyte cylindrical body requires recovery, the solid electrolyte cylindrical body does not need recovery evenly. Therefore, the control means 51 may be provided with a selection means for detecting the release amount of oxygen molecules and the like and sequentially selecting the solid electrolyte cylindrical body 30 that needs to be recovered early based on the release amount. Thereby, the efficiency of oxygen molecule release as a whole can be improved.

  The recovery time of one solid electrolyte cylindrical body 30 is not limited to 30 minutes, and can be a long time or a short time. Further, in the embodiment, the recovery time of all the solid electrolyte cylindrical bodies 30a to 30f is 30 minutes, but the recovery time may be different for each solid electrolyte cylindrical body 30a to 30f. Furthermore, two or more solid electrolyte cylindrical bodies may be recovered at the same time.

It is a cross-sectional side view of the oxygen pump of the present invention. It is a simplified diagram of an oxygen partial pressure control device using the oxygen pump of the present invention. It is a principal part front view inside the oxygen pump which shows embodiment of invention. It is a side view which shows the layout of the oxygen pump which shows embodiment of this invention. It is a simplified diagram of a conventional oxygen partial pressure control device. It is explanatory drawing of the principle of an oxygen pump.

Explanation of symbols

29 Solid electrolyte cylindrical body bundle 30 Solid electrolyte cylindrical body 31 Heating means 34, 35 Electrode

Claims (5)

A solid electrolyte cylindrical bundle composed of a plurality of solid electrolyte cylindrical bodies having oxygen ion conductivity, electrodes disposed on the inner and outer surfaces of the solid electrolyte cylindrical body, and heating the solid electrolyte cylindrical body The heating means is operated, the heating means is operated, a positive electrode is applied to the electrode on the outer surface of the solid electrolyte cylindrical body, and a negative electrode is applied to the electrode on the inner surface of the solid electrolyte cylindrical body to pass a current. A capacity recovery method in an oxygen pump that releases oxygen molecules to the outside of a solid electrolyte cylinder,
In at least one solid electrolyte cylindrical body, oxygen molecules are released, while a positive electrode is applied to an electrode on the inner surface of at least one other solid electrolyte cylindrical body for a predetermined time, and the outer surface of the solid electrolyte cylindrical body is A method for recovering capacity in an oxygen pump, wherein a negative electrode is applied to an electrode to take oxygen molecules into the solid electrolyte cylindrical body and perform recovery measures.   2. The capacity recovery method for an oxygen pump according to claim 1, wherein, in the plurality of solid electrolyte cylindrical bodies, the solid electrolyte cylindrical body that performs the recovery measures for a predetermined time is sequentially changed every predetermined period. Solid electrolyte cylindrical bundle composed of a plurality of solid electrolyte cylindrical bodies having oxygen ion conductivity, electrodes disposed on the inner and outer surfaces of the plurality of solid electrolyte cylindrical bodies, and a solid electrolyte cylindrical body In an oxygen pump provided with a heating means for heating
Oxygen is applied to the electrode on the outer surface of at least one solid electrolyte cylindrical body, and the negative electrode is applied to the electrode on the inner surface of the solid electrolyte cylindrical body to release oxygen molecules from the solid electrolyte cylindrical body to the outside. Apply a positive electrode for a predetermined time to the electrode on the inner surface of at least one solid electrolyte cylindrical body that needs to be recovered and the molecular electrolyte, and apply a negative electrode to the electrode on the outer surface of the solid electrolyte cylindrical body to An oxygen pump comprising a control means capable of switching between a state in which oxygen molecules are taken into a solid electrolyte cylindrical body.   4. The oxygen pump according to claim 3, wherein the solid electrolyte cylindrical body is provided in excess of the number of solid electrolyte cylindrical bodies that provide a minimum required oxygen molecule release capability.   The oxygen pump according to claim 3 or 4, wherein a recovery measure is taken for each solid electrolyte cylindrical body at regular intervals.

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