JP5614727B2 - Gas decomposition apparatus and gas decomposition system - Google Patents

Description

  The present invention relates to a gas decomposition apparatus, and more specifically to a gas decomposition apparatus capable of stably decomposing a predetermined harmful gas component such as ammonia contained in exhaust gas of a manufacturing apparatus.

  Waste gases from semiconductor manufacturing equipment contain ammonia, hydrogen, and the like, and ammonia is particularly harmful, so many methods for decomposing it have been studied. In order to completely remove the odor of ammonia, it is necessary to remove the concentration to the order of ppm. For this purpose, a method of absorbing harmful gas in water containing chemicals through a scrubber when discharging waste gas from a semiconductor manufacturing apparatus is often used. On the other hand, in order to obtain an inexpensive running cost without input of energy, chemicals, etc., there has also been proposed a semiconductor manufacturing apparatus exhaust gas treatment that decomposes ammonia with a phosphoric acid fuel cell (Patent Document 1).

  The inventors of the present application also include a MEA (Membrane Electrode Assembly) composed of a pair of electrodes and an electrolyte sandwiched between the electrodes as this type of device, and efficiently removes chemical components in the gas by an electrochemical reaction. A harmful gas abatement device is disclosed (Patent Document 2).

JP 2003-45472 A JP 2010-247032 A

  Such a gas decomposing apparatus needs to be operated while maintaining the MEA at a high temperature of 800 ° C. or higher in order to efficiently perform an electrochemical reaction. In order to increase the cost for operating the apparatus, the electric power for heating increases the cost of operating the apparatus. A heater is built in a casing surrounded by a heat insulating material, and temperature control is performed in a heat-retaining state to maintain a constant temperature. When heating with a heater, it is required to operate the energy efficiently without waste. In addition, when the MEA electrolyte is a solid electrolyte, cracks may occur due to stress generated in the electrolyte when a sudden temperature change is applied. In heating and cooling, uniform heating and cooling are performed by a gradual temperature change. Needed to be controlled.

  An object of the present invention is to provide a gas decomposition apparatus and system that can maintain a stable temperature with energy efficiency and can reduce running costs.

In order to achieve the above object, a gas decomposition apparatus according to the present invention is a gas decomposition apparatus used for decomposing a predetermined gas, wherein a first electrode into which a first gas containing the predetermined gas is introduced, An electrochemical reaction device including an MEA (Membrane Electrode Assembly) constituted by a solid electrolyte and a second electrode into which a second gas is introduced, a heater for increasing the temperature of the electrochemical reaction device, and the electrochemical The housing | casing which accommodates the reaction apparatus and the said heater, and the thermal storage body provided in the said housing | casing are provided .

  By using the heat stored by the heat storage body with such a configuration, it is possible to realize a stable operation. That is, since the heat storage body has a large heat capacity, the temperature change in the apparatus becomes gentle with respect to the heater on / off, and the influence of stress caused by thermal expansion / contraction on each element constituting the apparatus can be reduced. . Further, it is possible to continue the operation even in the event of a power failure of the heater circuit and to prevent a device failure. Furthermore, it is possible to store heat in the heat storage body by using low-cost power as heater power, for example, low-cost power in the case where the power cost varies depending on the time zone such as nighttime power, thereby reducing the overall operation cost.

The heater may be disposed in a hole provided in the heat storage body or embedded in the heat storage body . This is because the heat storage body can be effectively heated, and the temperature of the heater can be changed gradually to heat the entire apparatus.

Here, the MEA is a cylindrical body, and the first electrode is positioned on the inner surface side of the cylindrical body so as to introduce the first gas into the inner surface side of the cylindrical body. It may be a gas decomposition apparatus . This is because when the cylindrical body MEA is rapidly heated or cooled, the cylindrical body MEA itself may be damaged due to distortion caused by thermal expansion / contraction, and the effect of gradual heating and cooling is great.

Here, it is preferable that the MEA of the cylindrical body is disposed in a hole provided in the heat storage body . This is because the temperature is stable and the above-described effects are easily obtained.

Such a gas decomposition apparatus can be an ammonia gas decomposition apparatus in which the first gas is a gas mainly composed of ammonia and the second gas is a gas containing oxygen . Further, in such a gas decomposition apparatus using the MEA, the MEA can be a gas decomposition system configured to function as a fuel cell for supplying electric power to an external apparatus or the heater .

As described above, the gas decomposition system according to the present invention includes a first electrode into which a first gas containing a predetermined gas is introduced, a solid electrolyte, and an MEA (a second electrode into which a second gas is introduced) ( A gas decomposing apparatus comprising: an electrochemical reaction apparatus including a Membrane Electrode Assembly; a heater for increasing the temperature of the electrochemical reaction apparatus; and a casing for housing the electrochemical reaction apparatus and the heater. A gas decomposition system comprising: a heat storage body heated by the heater in the housing; the heater is energized in a relatively low-cost power charge time zone determined during one day; It can be set as the gas decomposition system characterized by being comprised so that a driving | running may be continued by the heat stored in the said thermal storage body in the electric power charge time slot | zone . Thus, by using low-cost electric power using a heat storage body, a gas decomposition system capable of stable operation at low cost can be provided.

  ADVANTAGE OF THE INVENTION According to this invention, the gas decomposition apparatus and system which can hold | maintain the stable temperature efficiently and can suppress running cost can be provided.

It is a figure explaining an example of an embodiment of a gas decomposition device of the present invention. It is a figure explaining the structure of MEA of the electrochemical reaction apparatus used for this invention. It is a figure explaining the example of arrangement | positioning of the thermal storage body in this invention. It is a figure explaining the example of arrangement | positioning of the thermal storage body in this invention. It is a figure explaining the example of arrangement | positioning of the thermal storage body in this invention. It is a block diagram which shows the example of whole structure of the gas decomposition system of this invention.

  The configuration of the gas decomposition apparatus and system of the present invention will be described. The gas decomposition system of the present invention is used for decomposing a predetermined gas. In the following description, the decomposition of ammonia gas is exemplified as a specific example, but the characteristics of the apparatus configuration can be similarly applied to other gases.

  This system includes an MEA (Membrane Electrode Assembly) composed of a first electrode into which a first gas containing a predetermined gas is introduced, a solid electrolyte, and a second electrode into which a second gas is introduced. A reaction device, a heater for increasing the temperature of the electrochemical reaction device, a housing for housing the heater, and a heat storage body provided in the housing are provided.

The solid electrolyte, which is the main component of the MEA, is used to pass ions. When the temperature is close to room temperature, the permeation rate of ions is small, and a practical gas decomposition ability cannot be obtained. That is, in general, the amount of ion permeation through the solid electrolyte determines the reaction rate. For this reason, heating the electrochemical reaction apparatus containing MEA to 500 to 1000 degreeC is performed. The higher the temperature, the higher the ion permeation rate, which is preferable. However, it is necessary to use a material or structure having high heat resistance as the material, and the cost is increased. When a heater is used for heating, power consumption by the heater cannot be ignored as a running cost. The ions may be anions or cations. For example, if the solid electrolyte is oxygen ion conductive, oxygen ions (O ²⁻ ) generated at the cathode are moved to the anode. If the solid electrolyte is proton conductive, protons (H ⁺ ) generated at the anode can be moved to the cathode. Since protons are smaller than oxygen ions, the transfer speed is higher for protons.

  In the electrochemical reaction device, electric power is generated by an electrochemical reaction between at least one of the predetermined gases in the first gas and the second gas. By using the electric power for the heater, part or all of the electric power cost can be covered. Thereby, high energy efficiency can be achieved and running cost can be suppressed.

  In addition, the MEA including the solid electrolyte can reduce the size of the apparatus, and can be installed anywhere. For this reason, it is not necessary to route a long pipe that causes an increase in initial cost, and further, it is possible to eliminate the risk of leakage of harmful components due to damage caused by an earthquake or the like.

  The predetermined gas to be decomposed may be one component or two or more components. The electrochemical reaction is preferably performed by decomposing two or more components (electrochemical reaction), but at least one component of the predetermined gas may be decomposed. The second gas may be a single component or may include two or more components.

  The heat storage body has a function of storing heat generated by the heater for a long time, and the temperature changes more slowly than the temperature change of the heater itself due to the size of the heat capacity. By heating the MEA through the heat accumulator, it is possible to realize a gradual temperature change without giving the MEA an abrupt temperature change caused by turning on and off the heater. Furthermore, by increasing the volume of the heat storage body, for example, the heat storage body is heated in 12 hours within one day, and the remaining 12 hours are used to increase the temperature of the MEA by the heat stored without energizing the heater. It can also be maintained. The volume and capacity of the heat storage body can be selected according to the desired design. For example, when night power is set to be cheaper than other time zones, the overall running cost is reduced by heating the heat storage body mainly at night and reducing the heater energization time during the day as much as possible. It can be done. Such power control can be realized by a normal programming means or the like by the following control device.

  The apparatus further includes a control device and an external power distribution device. Electric power generated by the electrochemical reaction device is supplied to the heater, and the control device supplies the heater of the external power distribution device so that the heater maintains a predetermined temperature. It is better to control the power supply. As a result, if the total power supply to the heater cannot be covered by power generation by the electrochemical reaction, first, the power from the electrochemical reaction is supplied to the heater, and the external power distribution device is controlled while detecting the shortage by the control device. External power can be supplied. Generally, this gas decomposition system is not always operated, but is intermittently operated only when a reaction vessel or the like is used. Even during this use, the amount of the predetermined gas is not constant and varies greatly. For this reason, the amount of power generation (voltage, current) generated by gas decomposition also fluctuates, and from the standpoint of handling power, it cannot be said that it is good quality power and is difficult to control. Moreover, at the time when the use of the reaction vessel is started, the power generation by the electrochemical reaction is close to zero, but the temperature must already be high in order to remove harmful gases at a predetermined rate. . Therefore, in the initial heater heating, the entire electric power is not covered by external electric power. When the electrochemical reaction proceeds and electric power can be obtained, the electric power obtained by the electric power generation should be immediately supplied to the heater. As a result, a predetermined amount (a part) of input power from the outside becomes unnecessary. At this time, the control device can adjust the temperature while measuring the temperature of the electrochemical reaction device and a predetermined position inside the device.

  Furthermore, the power storage device is provided, and the power storage device can store power generated by power generation. The electric power generated by the electrochemical reaction is first stored in the power storage device, and the power can be supplied from the power storage device to the heater. As a result, it is possible to take out the electric power by the electrochemical reaction at a constant voltage, and the control is easy. For example, heating of the electrochemical reaction device at the start of use of the reaction vessel can be performed with the stored electric power without using external power. Of course, in consideration of safety, etc., in combination with external power, depending on the amount of power generated by the electrochemical reaction device, the power generated by the electrochemical reaction may be mainly used, and the external power may be used as a sub, and vice versa. Also good.

  The MEA is a cylindrical body, and the first electrode is located on the inner surface side of the cylindrical body, and the first gas can be introduced into the inner surface side of the cylindrical body. The MEA in the present invention is not limited to a cylindrical body, and may be in any form such as a plate-like body. However, the following advantages can be obtained by using a cylindrical body. Since the MEA of the cylindrical body including the solid electrolyte is ceramic, the material itself is fragile in terms of mechanical strength, but the strength can be increased by using the cylindrical body. Moreover, it is more stable in strength than a MEA of a plate-like multilayer body in which flaky MEAs are laminated in multiple stages. For this reason, in the handling at the time of assembling to the gas decomposition element, a situation such as breakage due to the addition of a slight force can be avoided, and the production yield can be improved. In the case of an MEA having a plate-like multilayer body, if there is no high dimensional accuracy, it may be easily damaged by a small amount of pressing. In addition, even after assembly, heating and cooling are repeated in a cycle of operation and non-operation, so that the MEA of the plate-like multilayer body is easily damaged from the stress concentration portion due to a difference in thermal expansion. In this respect as well, since the MEA of the cylindrical body is fixed at the end portion, it is not necessary to increase the processing accuracy so much, such as a stress concentration portion or a seal member in which damage occurs due to the difference in thermal expansion between the heating and cooling cycles. There are few restraint parts by. Furthermore, the generation of stress can be suppressed and effective by making the temperature change gentle by using the heat storage body.

  It is possible to maintain an internal temperature and increase energy efficiency by including a casing that houses a main body including an electrochemical reaction device, a heater, and a heat storage body, and the casing is mainly provided with a heat insulating material on its inner wall. A plurality of cylindrical MEAs may be arranged in the housing, and the first gas may be introduced into each MEA in parallel. The heater may be disposed in common for all MEAs to heat the entire inside of the housing, or may be provided adjacent to each MEA.

  Here, when the heater is arranged in a hole provided in the heat storage body or is embedded in the heat storage body, the heat storage body can be efficiently heated. In addition, it is possible to avoid a rapid temperature change by not passing the heat of the heater directly to the MEA but via the heat accumulator.

  Moreover, it is good to arrange | position MEA of a cylindrical body in the hole provided in the thermal storage body. The temperature of the MEA is stabilized, for example, a sudden stop of gas decomposition can be avoided even during a power failure or a heater failure, and damage to the MEA due to a sudden temperature change can be suppressed. In this case, the heater may be arranged in the same hole. However, if the MEA is not directly heated in another hole or outside the heat storage body, the effect of alleviating the temperature change can be further obtained. Cheap. A configuration in which these are combined to combine a heater that is directly heated adjacent to the MEA and a heater that is indirectly heated via a heat storage body to control the temperature is also preferable. It is possible to realize a desired temperature change by combination control of both heaters and the temperature sensor.

  An adsorption unit that adsorbs gas may be provided after the MEA. The adsorption part can render the gas harmless or suppress the amount of external release. The adsorbing part is not particularly limited, and examples thereof include a scrubber (adsorption with water) and a chemical treatment part (adsorption with chemical). For example, the arrangement of the scrubber is preferable because the exhausted gas can be reliably suppressed to a concentration below the reference value.

  The gas decomposition system of the present invention may be used for the decomposition of ammonia gas exhausted from a compound semiconductor manufacturing apparatus. In this case, the first gas is mainly composed of ammonia and contains a small amount of cyan-based hydrogen, and the ammonia and cyan-based hydrogen can be decomposed together by an electrochemical reaction. Since ammonia and cyanogen hydrogen can be rendered harmless by one decomposition system, exhaust gas can be rendered harmless with high economic efficiency. Further, by using the tubular MEA, ammonia is passed through the inner surface side of the tubular body, so that it is easy to process while sealing without leaking to the outside.

(Gas decomposition system)
FIG. 6 is a block diagram showing the overall configuration including the gas decomposition system of the present invention. In this gas decomposition system, a predetermined gas (one or a plurality of types) generated from a production facility is decomposed.

  The configuration and operation will be described below. The electrochemical reaction device 101 including the main constituent MEA is housed in the housing 103 so as to be surrounded by the heat storage body 102. The first gas, which is the gas to be decomposed, is introduced into the electrochemical reaction apparatus 101 after the metal particles and the like are removed by the filter 111 in the middle of the pre-decomposition exhaust passage 110. The gas decomposed in the electrochemical reaction device 101 is discharged to the outside air through the exhaust passage 112 after decomposition. Here, from the viewpoint of safety, a scrubber 113 may be inserted in the middle of the exhaust passage 112 after decomposition, and the residual gas may be dissolved and removed. The first gas is sucked by the exhaust pump 114 which is a driving device during the period from the production facility to the scrubber 113 and the outside air discharge.

  The apparatus is heated by a built-in heater 104. In this example, electric power (self-generated power or self-generated power) generated by the MEA electrochemical reaction is supplied to the heater 104 as it is, and a shortage to be maintained at a predetermined temperature is supplied from the external power source via the external power wiring 121. It is covered by the power supplied. A thermometer such as a thermocouple (not shown) is attached to a predetermined position inside the apparatus, temperature information is read out by the control panel 120, and an external power distribution device in the control panel 120 is controlled according to the temperature, whereby the heater Control the power supply to the. A voltage application unit 123 is inserted into the self-power wiring 122 that connects the first electrode and the second electrode of the MEA. The voltage application unit 123 is controlled by the control panel 120.

  The first gas contains one or more gases to be decomposed. The gas to be decomposed is (1) a plurality of gases including ammonia in the compound semiconductor device and cyanic hydrogen mixed in a small amount in the ammonia. (2) Compound gas such as VOC (Volatile Organic Compounds) such as toluene and xylene contained in the exhaust of a printing factory can be exemplified.

(Electrochemical reactor)
FIG. 2 is a diagram illustrating an example of the configuration of the MEA of the electrochemical reaction device 101. The MEA is an element using a cylindrical solid electrolyte 33 as an ion conductive insulating layer, and includes an anode 32 (fuel electrode) on the inner peripheral surface of the solid electrolyte 33 and a cathode 34 (air electrode) on the outer peripheral surface. . As the electrolyte, a solid oxide, molten carbonate, phosphoric acid, solid polymer, or the like can be used, but the solid oxide is preferable because it can be downsized and easily handled. As a solid oxide, oxygen ion conductive SSZ, YSZ, SDC, LSGM, GDC, or the like is preferably used. An internal current collector 31 is provided inside the anode electrode, and an external current collector 35 is provided on the outer periphery of the cathode electrode. The solid electrolyte 33 does not need to be a cylindrical body, but the use of the cylindrical body, particularly a cylindrical body, makes it easy to overcome the weakness of strength unique to the solid electrolyte. In this example, ammonia gas as the first gas is supplied into the cylinder, and oxygen in the air as the second gas is taken into the outer peripheral surface side. As the device 101, the first gas and the second gas may be reversed, and there may be a configuration in which the positive electrode and the negative electrode are reversed. The inner diameter of the cylinder is, for example, about 20 mm, but can be changed according to the device to be applied. In the case of ammonia gas decomposition, the internal current collector 31 may be a porous metal body made of, for example, a nickel mesh sheet and nickel. As the porous metal body, in order to reduce the pressure loss of gas, it is preferable to use a metal plated body capable of increasing the porosity, for example, Celmet (registered trademark: Sumitomo Electric Industries, Ltd.). As the outer current collector 35, for example, a silver paste coated wiring and a nickel mesh sheet may be used. The nickel mesh sheet contacts the outer surface of the cylinder and conducts to the external wiring, and the silver paste coated wiring acts as a catalyst that promotes decomposition of oxygen gas at the cathode into oxygen ions.

When the solid electrolyte is oxygen ion conductive, oxygen molecules in contact with the cathode obtain electrons and become oxygen ions, move through the solid electrolyte and reach the anode. When the gas to be decomposed is ammonia, the ammonia is decomposed into nitrogen molecules and hydrogen molecules on the anode, and the hydrogen molecules react with oxygen ions that have reached the anode via the solid electrolyte from the cathode, releasing electrons. To produce water (H ₂ O). This electrochemical reaction generates electricity. If a heater, which is a load, is inserted between wirings connecting the anode and the cathode to the outside, the heater generates heat by the electric power generated by this electrochemical reaction. Water vapor and nitrogen gas generated from the ammonia are discharged from the inner surface side of the cylindrical body MEA to the outside air through the decomposed exhaust passage.

  The solid electrolyte is an insulator through which ions pass (electrons do not pass). However, when the temperature is close to room temperature, the permeation rate of ions is low, and a practical gas decomposition ability cannot be obtained. The amount of ion permeation through the solid electrolyte determines the reaction rate. For this reason, the MEA is heated to 500 ° C. to 1000 ° C. The higher the temperature, the higher the ion permeation rate, which is preferable. However, it is necessary to use a material or structure having high heat resistance as the material, and the cost is increased. When a heater is used for heating, power consumption by the heater becomes a large running cost that cannot be ignored. With the above configuration, if an electrochemical reaction of power generation is used, a part of the power bill can be covered by using the power for the heater.

(Gas decomposition equipment)
The apparatus configuration of the gas decomposition apparatus 10 will be described with reference to FIG. FIG. 1 schematically shows a state in which one side of the apparatus is opened in order to explain the arrangement of main components of the apparatus. The heat storage body 1 has large and small holes penetrating in the longitudinal direction. In this example, the heat accumulator 1 having three small-diameter holes and two large-diameter holes alternately is stacked in three stages. A heater 4 is built in each small-diameter hole. A nichrome wire, a known heating wire, a ceramic heater, a sheathed heater, or the like can be used as the heater. The sheathed heater has a long life and is preferable for use by being embedded in a heat storage body. In this figure, the energization line and the like to the heater are not shown, but naturally the power supply line and the internal wiring from the outside of the apparatus are necessary. An electrochemical reaction device 3 is built in each large-diameter hole of the heat storage body 1. The electrochemical reaction device 3 has the basic structure shown in FIG. 2, has a pipe (not shown) for the gas to be decomposed inside, and is provided between the holes of the heat storage body so that air can be supplied to the outside. There is a space. Thus, the heater 4 and the electrochemical reaction device 3 housed in the holes of the heat storage body 1 are housed in the housing 2 having the heat insulating layer 5.

  In such a configuration, when the heater 4 is energized, the temperature of the heater rapidly increases unless special control is performed. However, since the heat capacity of the heat storage body 1 is large, the temperature of the heat storage body 1 does not increase rapidly. The temperature rise is gradually transmitted from the heater to the electrochemical reaction device 3. Therefore, a rapid temperature change is not applied to the solid electrolyte constituting the electrochemical reaction device, and damage due to internal stress of the solid electrolyte can be avoided. In addition, since the heat storage body once heated by the heater is not easily cooled, even if the power supply to the heater is stopped for a certain period of time, the temperature of the electrochemical reaction device does not decrease and the operation is continued. Can be continued.

  In the above example, the structure in which the heater 4 and the electrochemical reaction device 3 are accommodated in the holes of the heat storage body 1 is shown as an example in which the heat of the heat storage body can be effectively used for gas decomposition. The arrangement is not limited to a specific one as long as the same effect can be obtained using the heat storage body. 3, 4 and 5 show other configuration examples. FIG. 3 shows an example in which a rectangular parallelepiped heat storage body 1 is arranged so as to surround the electrochemical reaction device 3 in the housing 2, and a heater 4 a is embedded in each heat storage body. Air can be easily supplied to the electrochemical reaction device 3, and replacement work can be easily performed. FIG. 4 shows a configuration example in which a sheet-like heater 4b is sandwiched between the heat storage elements 1 as another example of the heater. It is not necessary to provide holes in the heat storage body, the heater can be easily replaced, and layout design such as the volume and thickness of the heat storage body is facilitated. FIG. 5 shows an example in which a heater 4c for directly heating the electrochemical reaction device 3 is added as a modification of FIG. More preferable temperature control can be realized by performing temperature control in which the heater 4c and the indirect heater 4a are combined directly, such as when heating is insufficient with only the heater 4a that is indirectly heated. In this case, a temperature sensor for measuring the temperature inside the apparatus or each of the electrochemical reaction apparatuses and a control apparatus for controlling energization of each heater from the temperature information are required.

  The heat storage body 1 is not particularly limited as long as it can be heated to 500 ° C to 1000 ° C. For example, the heat storage body 1 is formed from a material having high thermal conductivity and high heat storage capacity, such as magnesia, iron oxide, and peridotite. Is mentioned. In particular, a heat storage brick used for a heat storage heater is preferably used at a low cost. Iron oxide has a property that it is difficult to heat but cool against magnesia, and it contributes to the downsizing of the apparatus relatively in terms of heat storage.

  Although the embodiments of the present invention have been described above, the embodiments of the present invention disclosed above are merely examples, and the scope of the present invention is not limited to these embodiments. The scope of the present invention is indicated by the description of the scope of claims, and further includes meanings equivalent to the description of the scope of claims and all modifications within the scope.

  The gas decomposition apparatus and system of the present invention can exert great power in decomposing ammonia, cyan, etc. from a compound semiconductor manufacturing apparatus, and VOC, such as toluene, xylene, etc., from a printing factory. Moreover, it is not limited to a manufacturing apparatus, and can be easily applied to any gas decomposition. Further, it can be used as a fuel cell system.

DESCRIPTION OF SYMBOLS 1 Heat storage body 2 Case 3 Electrochemical reaction device 4 Heater 5 Heat insulation layer 10 Gas decomposition device 31 Internal collector 32 Anode electrode 33 Solid electrolyte 34 Cathode electrode 35 External current collector 101 Electrochemical reaction device 102 Heat storage material 103 Case 104 heater 110 pre-disassembly exhaust passage 111 filter 112 post-disassembly exhaust passage 113 scrubber 114 exhaust pump 120 control panel 121 external power wiring 122 private power wiring 123 voltage application unit

Claims (5)

A gas decomposition apparatus used for decomposing a predetermined gas,
An electrochemical reaction device including an MEA (Membrane Electrode Assembly) constituted by a first electrode into which a first gas containing the predetermined gas is introduced, a solid electrolyte, and a second electrode into which a second gas is introduced; ,
A heater for increasing the temperature of the electrochemical reaction device;
A housing for housing the electrochemical reaction device and the heater;
A heat storage body provided in the housing ,
The MEA is a cylindrical body, the first electrode is positioned on the inner surface side of the cylindrical body, and is configured to introduce the first gas into the inner surface side of the cylindrical body,
The gas decomposing apparatus , wherein the MEA is disposed in a hole provided in the heat storage body .   The gas decomposition apparatus according to claim 1, wherein the heater is disposed in a hole provided in the heat storage body or embedded in the heat storage body. The gas decomposition apparatus according to claim 1 or 2 , wherein the first gas is a gas mainly composed of ammonia, and the second gas is a gas containing oxygen. The gas decomposition system using the gas decomposition apparatus according to any one of claims 1 to 3 , wherein the MEA functions as a fuel cell for supplying electric power to an external apparatus or the heater. A gas decomposition system characterized by the above. A gas decomposition system obtained by operating the gas decomposition apparatus according to any one of claims 1 to 4,
The heat storage body is heated by the heater,
The heater is energized in a relatively low-cost power charge time zone determined during one day, and the operation is continued by heat stored in the heat storage body in another power charge time zone. Gas decomposition system.

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