JP2009223114A - Optical reflecting element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compact optical reflecting element used for a laser scan unit or the like such as a laser printer. <P>SOLUTION: The optical reflecting element comprises: first supporting parts 2a and 2b supported by a supporting body 1; tuning fork oscillators 6a and 6b having first arms 3a and 3b and second arms 4a and 4b supported by the first supporting parts 2a and 2b; second supporting parts 11a and 11b supported at an oscillation center 9a, 9b; and a mirror part 12, wherein the tuning fork oscillators 6a and 6b are arranged opposite to the mirror part 12, the oscillation center 9a, 9b and the turning axis of the mirror part 12 are arranged on one and the same line, and projected parts are provided on the first arms 3a and 3b, and the second arms 4a and 4b. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an optical reflection element used in a laser scan unit or the like.

Conventionally, as a laser scanning unit that sweeps light emitted from a laser used in a laser printer or the like, a polygon mirror provided with a mirror on the side surface of a polygonal rotating body has been used. A laser beam was swept onto the scanning surface of the body drum (for example, see Patent Document 1).
Japanese Patent Laid-Open No. 11-281908

  With such widespread use of color laser printers and miniaturization of printers, miniaturization of optical reflecting elements used in laser scan units has become a proposition. However, in a laser scan unit using a polygon mirror, in addition to downsizing the polygon mirror, a separate drive device for driving the polygon mirror is required, so that downsizing is very difficult. .

  Therefore, the present invention aims to solve the above problems and realize an optical reflecting element that can reduce the size of a laser scan unit.

  In order to achieve this object, the present invention includes two first support portions supported at one end by a support, a first arm supported at the other end of the first support portion, and a first arm. Two tuning fork vibrators having two arms, a second support part having one end supported by the vibration center of the tuning fork vibrator, and a mirror part supported by the other end of the second support part In addition, the two tuning fork vibrators are arranged to face each other via a mirror part, the vibration centers of the two tuning fork vibrators and the rotation axis of the mirror part are arranged on the same line, and the first arm and the second arm The arm is provided with a protrusion.

  By adopting a vibrator configuration that vibrates flexural vibrations generated by two tuning fork vibrators having such protrusions as torsional vibrations of the mirror part, the vibration of the mirror part can be controlled while accurately controlling repetitive rotational vibrations. A small optical reflecting element capable of increasing the angle can be realized.

(Embodiment 1)
Hereinafter, the configuration of the optical reflecting element according to Embodiment 1 of the present invention will be described with reference to the drawings.

  FIG. 1 is a plan view of the optical reflecting element according to the first embodiment, and FIG. 2 is a cross-sectional view taken along the line AA in FIG. FIG. 3 is a conceptual diagram for explaining the operating principle of the optical reflecting element.

  1 to 3, the optical reflecting element according to the first embodiment includes two first support portions 2a and 2b, first arms 3a and 3b, second arms 4a and 4b, and connecting portions 5a and 5b. Two tuning fork vibrators 6a and 6b, one end of the first support portions 2a and 2b is fixed to the support 1, and two second tuning fork vibrators 6a and 6b have two second vibration centers 9a and 9b. One end of the second support portions 11a and 11b is fixed, and the other end of the second support portions 11a and 11b has a mirror portion 12 for reflecting light such as a laser beam, and the two tuning fork vibrators 6a and 6b. Are arranged opposite to the mirror part 12, and the two vibration centers 9a, 9b and the rotating shaft 14 of the mirror part 12 are arranged on the same line, and the first arm 3a, 3b and the second arm 4a, 4b are connected to each other. , A configuration provided with protrusions 7a and 7b, respectively It is characterized.

  Since the first arm 3a, 3b and the second arm 4a, 4b cause flexural vibration, the amplitude amount is the largest at the free ends of the first arm 3a, 3b and the second arm 4a, 4b. The projections 7a and 7b are most effectively provided at the free ends of the first arms 3a and 3b and the second arms 4a and 4b.

  In addition, when it cannot provide in a free end, it is also possible to arrange | position in the predetermined place in the middle of 1st arm 3a, 3b and 2nd arm 4a, 4b.

  As described above, by providing the projections 7a and 7b at the free ends of the first arms 3a and 3b and the second arms 4a and 4b, the free ends of the two tuning fork vibrators 6a and 6b are fulcrums of additional mass. Thus, the tuning fork vibrators 6a and 6b are moved in the thickness direction about the fulcrum, and the moment of inertia of the tuning fork vibrators 6a and 6b leads to an increase in the amount of movable amplitude, and the amplitude of the tuning fork vibrators 6a and 6b. As a result, it is possible to increase the amplitude of the repetitive rotational vibration of the mirror unit 12 and to realize an optical reflecting element that can increase the deflection angle of the mirror unit 12 in a small shape. be able to.

  More preferably, the projections 7a and 7b are provided so that the first arms 3a and 3b and the second arms 4a and 4b are orthogonal to each other, and are disposed inside the tuning fork vibrators 6a and 6b, thereby further tuning the fork vibration. It is possible to efficiently generate torsion of the children 6a and 6b. The protrusions 7a and 7b are preferably symmetrical from the viewpoint of vibration characteristics, and the shape of the protrusions 7a and 7b at that time is not particularly limited, and is appropriately selected from the viewpoint of vibration characteristics and productivity. Can do.

  In addition, it is desirable that the mass of the projections 7a and 7b is large, and when the large shape cannot be provided by design, it is possible to add a weight to the projections 7a and 7b, thereby further increasing the effect. Can be made.

  Further, the two tuning fork vibrators 6a and 6b are preferably formed in the same shape, and it is more preferable that the resonance frequencies of the two tuning fork vibrators 6a and 6b are the same frequency and the symmetry thereof is increased. Thereby, a vibrator having a larger Q value can be realized, and can be vibrated with high accuracy.

  As shown in FIG. 2, the substrate material constituting the optical reflecting element is composed of an elastic member having elasticity, mechanical strength and high Young's modulus such as metal, glass or quartz substrate as the base material 20. From the viewpoint of mechanical characteristics and productivity, it is preferable to use a metal, quartz, glass or quartz material as an elastic member satisfying such characteristics from the viewpoint of mechanical characteristics and availability. Further, by using silicon, titanium, stainless steel, Elinvar, or a brass alloy as the metal, an optical reflecting element having excellent vibration characteristics and workability can be realized.

  A piezoelectric actuator 10 for causing flexural vibration is formed on at least one surface of the first arm 3a, 3b and the second arm 4a, 4b made of a base material 20 such as silicon. The piezoelectric actuator 10 is preferably a thin film laminated piezoelectric actuator having a laminated structure of a first electrode layer 21, a piezoelectric layer 22 and a second electrode layer 23. As a result, it is possible to produce a large number of wafers in a batch and to design thin tuning fork vibrators 6a and 6b.

  Further, by making the thickness of the tuning fork vibrators 6a and 6b smaller than the width dimensions of the first arms 3a and 3b and the second arms 4a and 4b, a small optical reflecting element can be realized.

  The first electrode layer 21, the piezoelectric layer 22, and the second electrode layer 23 are sequentially formed on the base material 20 on which the tuning fork vibrators 6a and 6b are formed by a thin film process such as a sputtering technique. can do. Therefore, it is preferable from the viewpoint of productivity that the piezoelectric actuator 10 is formed on the same surface of the tuning fork vibrators 6a and 6b.

  The piezoelectric material used for the piezoelectric layer 22 is preferably a piezoelectric material having a high piezoelectric constant such as lead zirconate titanate (PZT).

  Further, it is important that the tuning fork vibrators 6a and 6b have the same resonance frequency, and further, the tuning fork vibrators 6a and 6b are constituted by the resonance frequency, the mirror part 12, and the second support parts 11a and 11b. By designing the vibration so that the resonance frequency of the torsional vibrator is the same, an optical reflection element that efficiently and repeatedly vibrates the mirror unit 12 can be realized.

  That is, the tuning fork vibrators 6a and 6b are arranged opposite to each other on the same line of the rotation axis of the mirror part 12 with the mirror part 12 as the center, and the first arms 3a and 3b of the two tuning fork vibrators 6a and 6b and the second The arms 4a and 4b are vibrated so as to bend in directions different from each other by 180 degrees, and using the vibration energy of the two tuning fork vibrators 6a and 6b, the second support part 11a, the mirror part 12 and the second support part 11b are used. The torsional vibrator constituted by can cause torsional vibration. By this torsional vibration, it is possible to control a repetitive rotational vibration of the mirror unit 12 with high accuracy and to realize a small optical reflecting element capable of designing a large deflection angle of the mirror unit 12.

  At this time, it is important to synchronize so that the first arm 3a and the first arm 3b bend in the same direction, and the second arm 4a and the second arm 4b bend in the same direction.

  Furthermore, by making the widths of the first arms 3a and 3b, the second arms 4a and 4b, and the connecting portions 5a and 5b equal, it is possible to obtain an optical reflection element that suppresses unnecessary vibration modes. Further, by making the tuning fork vibrators 6a and 6b U-shaped, an optical reflecting element having the same effect can be obtained. Furthermore, the effect can be exhibited more by combining these.

  Further, by using the same material for the first support portions 2a and 2b, the tuning fork vibrators 6a and 6b, the second support portions 11a and 11b, and the base member 20 of the mirror portion 12, stable vibration characteristics and unnecessary resonance can be obtained. It is possible to realize an optical reflection element that is suppressed and excellent in productivity.

  Moreover, it is preferable that the cross-sectional shape of 1st support part 2a, 2b and 2nd support part 11a, 11b shall be circular shape. As a result, the vibration mode of torsional vibration is stabilized, unnecessary resonance can be suppressed, and an optical reflection element that is hardly affected by disturbance vibration can be realized.

  The mirror portion 12 can also be formed by mirror polishing the surface of the substrate 20, and more preferably, can be formed as a mirror film of a metal thin film of gold or aluminum having excellent light reflection characteristics. It is. The mirror film made of these metal thin films can be formed by a sputtering technique in the same manner as described above in the process of manufacturing the piezoelectric actuator 10.

  The optical reflecting element having such a configuration can be manufactured in a lump with high accuracy by applying a semiconductor process such as a thin film process or a photolithography technique on the base material 20 such as a silicon wafer. Therefore, it is possible to realize an optical reflecting element that is small in size, high in accuracy, and excellent in production efficiency.

  Further, by utilizing the torsional vibration of the torsional vibrator composed of the second support parts 11a and 11b and the mirror part 12, it is possible to increase the deflection angle of the mirror part 12 while having a small device structure. An optical reflecting element can be realized.

  Further, the bending vibrations of the first arms 3a and 3b and the second arms 4a and 4b constituting the two tuning fork vibrators 6a and 6b, which are vibration drive units, the second support portions 11a and 11b, and the mirror portion 12 are provided. The degree of freedom of design is increased because of the configuration of the torsional vibrator formed by the above, and the drive frequency and deflection angle of the mirror portion 12 can be designed in a wide range by devising the respective dimensions and shapes. It is possible to realize an optical reflecting element capable of

  In addition, the lead electrodes of the first electrode layer 21 and the second electrode layer 23 of the piezoelectric actuator 10 formed on the first arm 3a, 3b and the second arm 4a, 4b are individually drawn lines (see FIG. (Not shown) are connected to the respective connection terminals 25a and 25b. As a result, opposite electrical signals can be applied to each piezoelectric actuator 10.

  Next, the operation principle of the optical reflecting element having such a configuration will be described. FIG. 3 is a conceptual diagram for explaining the operation principle, and illustration of the protrusions 7a and 7b is omitted.

  As shown in FIGS. 1 to 3, by applying an alternating drive voltage between the first electrode layer 21 and the second electrode layer 23 constituting the piezoelectric actuator 10, Expansion and contraction occur, and the piezoelectric actuator 10 can be deformed. Using this piezoelectric characteristic, the first arm 3a and the first arm 3b, the second arm 4a and the second arm 4b bend in the same direction, and the first arm 3a and 3b An electric signal is applied so that the second arms 4a and 4b are bent and vibrated in directions (arrow directions 8a and 8b) different in phase by 180 degrees. That is, electrical signals having the same phase are applied to the first arms 3a and 3b, and the piezoelectric actuators 10 formed on the first arms 3a and 3b and the second arms 4a and 3b are in opposite phases. An electrical signal is applied to.

  As a result, the first arm 3a, 3b and the second arm 4a, 4b bend and vibrate in opposite directions, and the vibration energy of this bending vibration propagates to the connecting portions 5a, 5b of the tuning fork vibrators 6a, 6b. Is done. Accordingly, the tuning fork vibrators 6a and 6b perform repetitive rotational vibration (torsional vibration) at a predetermined frequency with the vibration centers 9a and 9b as vibration axes together with the two first support portions 2a and 2b. At this time, since the projections 7a and 7b are added to the free ends of the first arms 3a and 3b and the second arms 4a and 4b, they serve as weights, and the first arms 3a and 3b Since the resonance frequency of the second arms 4a and 4b can be reduced, the torsional vibrations of the tuning fork vibrators 6a and 6b are efficiently vibrated.

  By providing the projections 7a and 7b, the projections 7a and 7b are transmitted to the coupling portions 5a and 5b of the tuning fork vibrators 6a and 6b that are vibrated at a lower frequency. As a result, the tuning fork vibrators 6a and 6b perform repetitive rotational vibration (torsional vibration) at a lower frequency with the vibration centers 9a and 9b as the vibration axes (with the rotation axis 14 as the central axis).

  Next, the vibration energy of the repetitive rotational vibrations of the two tuning fork vibrators 6a and 6b is transmitted to the second support portions 11a and 11b joined to the connecting portions 5a and 5b, and the rotation shaft 14 is the center. As a torsional vibrator composed of the second support parts 11a and 11b and the mirror part 12, torsional vibration is caused. As a result, repetitive rotational vibration is caused in the mirror section 12 around the rotation shaft 14.

  At this time, the direction of the repetitive rotational vibration of the tuning fork vibrators 6a and 6b and the direction of the repetitive rotational vibration of the torsional vibrator constituted by the second support parts 11a and 11b and the mirror part 12 are different in opposite directions by 180 degrees. Will repeatedly vibrate.

  Therefore, it is important that the resonance frequency of the two tuning fork vibrators 6a and 6b and the resonance frequency of the torsional vibrator constituted by the mirror part 12 and the two second support parts 11a and 11b are the same. is there. As a result, high-accuracy resonance vibration and high Q value can be realized, so that an optical reflection element that is not easily affected by disturbance vibration can be realized.

  By constructing a vibrator having such a vibration mode and inputting a light beam generated from a laser light source or an LED light source to the mirror part 12, a small optical reflection element capable of increasing the deflection angle of the mirror part 12 is realized. can do. By designing the vibration of these vibration parts, the reflection angle of the output light can be greatly changed, and an optical reflection element capable of sweeping input light such as a laser beam to a predetermined design value is realized. be able to.

  As described above, the vibration source is the two tuning fork vibrators 6a and 6b having a high Q value, and this stable vibration energy is applied to the torsional vibration to the torsional vibrator composed of the second support parts 11a and 11b and the mirror part 12. By supplying the excitation energy to be generated, stable repetitive rotational vibration can be generated in the mirror unit 12.

  Note that an optical reflection element in the case where the piezoelectric actuator 10 is formed on one surface of the first arms 3a and 3b and the second arms 4a and 4b in order to cause repetitive rotational vibration of the tuning fork vibrators 6a and 6b will be described as an example. However, the operation of the optical reflecting element similar to that described above can also be realized by forming the piezoelectric actuator 10 on at least one of the arms constituting the tuning fork vibrators 6a and 6b. This utilizes the vibration characteristics of the tuning fork, and applied the property that when either one of the arms is excited, the kinetic energy propagates to the other arm via the connecting portion 5. Is.

  As an application of the optical reflection element having the above-described configuration, a laser beam printer is an example. The photosensitive unit used in this laser beam printer, etc., sensitizes the laser beam by reflecting the laser beam and changing the direction of reflection of the laser, the photosensitive drum irradiated with the laser beam emitted from the laser. It consists of an optical reflection element that sweeps the scanning surface of the drum. The optical reflection element used in this photosensitive unit is a small laser beam printer by using the optical reflection element having the structure shown in FIGS. Can be realized.

  Next, a method for manufacturing the optical reflecting element in the first embodiment will be described.

  First, a silicon substrate 20 having a thickness of 0.3 mm is prepared, and an electrode layer 21 made of a platinum electrode is formed thereon using a thin film process such as sputtering or vapor deposition. At this time, the thickness of the silicon substrate 20 may be thick. As a result, a silicon substrate 20 having a large wafer shape can be used, and since warpage and the like are small, a highly accurate optical reflecting element can be efficiently manufactured.

  Thereafter, a piezoelectric layer 22 is formed on the electrode layer 21 by a sputtering method using a piezoelectric material such as lead zirconate titanate (PZT). At this time, it is preferable to use an oxide dielectric containing Pb and Ti as the orientation control layer between the piezoelectric layer 22 and the electrode layer 21, and it is more preferable to form an orientation control layer made of PLMT. Thereby, the crystal orientation of the piezoelectric layer 22 is further improved, and the piezoelectric actuator 10 having excellent piezoelectric characteristics can be realized.

  Next, an electrode layer 23 made of titanium / gold is formed on the piezoelectric layer 22.

  At this time, titanium under the gold electrode is formed in order to increase the adhesion with the piezoelectric layer 22 such as a PZT thin film, and a metal such as chromium can be used in addition to titanium.

  As a result, the piezoelectric actuator 10 having excellent adhesion with the piezoelectric layer 22 and having a strong diffusion strength with the gold electrode can be formed. At this time, the platinum electrode is 0.2 μm thick, the PZT thin film is 3.5 μm, the titanium electrode is 0.01 μm, and the gold electrode is 0.3 μm.

  Next, a patterned first electrode layer 21, piezoelectric layer 22 and second electrode layer 23 are formed by etching using a photolithographic technique. At this time, a predetermined electrode pattern was formed using an etchant composed of an iodine / potassium iodide mixed solution, ammonium hydroxide, and hydrogen peroxide mixed solution as an etchant for the second electrode layer 23.

Moreover, as an etching method used for the first electrode layer 21 and the piezoelectric layer 22, any one of a dry etching method and a wet etching method, or a combination of these methods can be used. For example, in the case of a dry etching method, a fluorocarbon-based etching gas or SF ₆ gas can be used. The piezoelectric thin film layer is subjected to wet etching using an etching solution made of a mixed solution of hydrofluoric acid, nitric acid, acetic acid and hydrogen peroxide, thereby forming a patterned piezoelectric layer 22. Thereafter, by further forming the patterned first electrode layer 21 by etching the lower electrode thin film layer by dry etching, the piezoelectric actuator 10 as shown in FIG. 2 can be formed.

Next, unnecessary silicon is removed by isotropically dry-etching the silicon substrate 20 using XeF ₂ gas, and an optical reflecting element having a shape as shown in FIG. 2 can be formed. .

When a silicon substrate or the like is etched with high accuracy by utilizing anisotropy by dry etching, SF ₆ gas that promotes etching and C ₄ F ₈ gas that suppresses etching are more linear. Etching is preferably performed. In the etching, a mixed gas using the gas can be used, or an etching method in which the gas is alternately switched to perform dry etching is possible, and these methods are matched to the dimensional shape and processing accuracy. It is possible to select and perform etching appropriately.

  By the manufacturing method as described above, it is possible to efficiently produce a small and highly accurate optical reflecting element collectively.

  Then, by the manufacturing process as described above, the lengths of the first arms 3a and 3b and the second arms 4a and 4b are set to 0.785 mm, the width is set to 0.3 mm, and the lengths of the protrusions 7a and 7b are set to 0. 0.3 mm, width: 0.3 mm, length of the first support portions 2a, 2b; 0.2 mm, width: 0.1 mm, length of the second support portions 11a, 11b; 0.4 mm, width; 0 .1 mm, mirror portion 12; 1.0 × 1.0 mm, gap between opposing arms; an element having a dimensional shape of 0.05 mm was manufactured and the vibration characteristics were evaluated. An optical reflection element having a deflection angle: ± 10 degrees characteristic could be produced. At this time, the same deflection angle can be realized with an applied voltage of about 2/3 of the applied voltage when driven by one tuning fork vibrator having the same shape, and the Q value can be increased. It was confirmed that the optical reflective element was high.

(Embodiment 2)
Hereinafter, the configuration of the optical reflecting element according to Embodiment 2 of the present invention will be described with reference to the drawings.

  FIG. 4 is a plan view of the optical reflecting element according to the second embodiment.

  The basic configuration of the optical reflecting element in the second embodiment is substantially the same as that of the first embodiment, and detailed description thereof is omitted. The optical reflecting element in the second embodiment is the same as that of the first embodiment. A greatly different configuration will be described with reference to the drawings.

  In FIG. 4, third support portions 30 a and 30 b are provided between the intermediate portions of the first arms 3 a and 3 b and the second arms 4 a and 4 b and the second support portion 11. This makes it possible to efficiently transmit the energy of the repetitive rotational vibrations of the tuning fork vibrators 6a and 6b to the second support portions 11a and 11b, and to realize a further compact optical reflecting element.

  As shown in FIG. 4, the resonance frequency of the torsional vibrator constituted by the second support portions 11a and 11b generated in the second support portions 11a and 11b and the mirror portion 12 is used as the third support portions 30a and 30b. It is characterized in that it is provided at the vibration node of the higher-order standing wave. This standing wave appears in a fraction of an integer as shown by 1/2, 1/3, and 1/4, and the vibration node of the standing wave generated in the second support portions 11a and 11b. It is preferable to provide the third support portions 30a and 30b in the portion. Moreover, it is preferable to arrange | position the 3rd support parts 30a and 30b between the intermediate part of 2nd support parts 11a and 11b, and connection part 5a, 5b. As a result, it is possible to efficiently cause repetitive rotational vibration having a large deflection angle of the mirror portion 12 while suppressing the attenuation of the flexural vibration of the first arm 3a, 3b and the second arm 4a, 4b.

  Furthermore, as shown in FIG. 4, the first arm 3a and the first arm 3b, and the second arm 4a and the second arm 4b are connected using a damper 35, respectively. By adopting such a configuration, it is possible to eliminate a slight shift in the resonance frequency caused by manufacturing variations of the two tuning fork vibrators 6a and 6b. As a result, the symmetry of the axis center is enhanced, and the driving force of the tuning fork vibrators 6a and 6b can be increased. This also increases the Q value of the vibrator, and can reduce unnecessary resonance.

  As the material used for the damper 35, an elastic member having elasticity is preferable, and as such an elastic member, it is preferable to use any one of metal, rubber, and elastomer from the viewpoint of electrical characteristics and availability.

  Moreover, by making the shape of the damper 35 into a sheet shape, unnecessary vibration can be suppressed and connectivity can be enhanced. Furthermore, by making the elastic modulus of the damper 35 larger than the elastic modulus of the first arms 3a and 3b and the second arms 4a and 4b, it is possible to suppress the vibration attenuation of the tuning fork vibrators 6a and 6b.

  Further, the protrusions 7a and 7b are arranged in the middle of the first arms 3a and 3b and the second arms 4a and 4b. This is for realizing a smaller optical reflecting element depending on the shape of the mirror part 12, and by adopting such a configuration, it is possible to efficiently arrange the components, thereby eliminating a useless space. . When the shape of the mirror portion 12 can be designed to be small, the protrusions 7a and 7b are arranged at the free ends of the first arms 3a and 3b and the second arms 4a and 4b as shown in FIG. It is preferable.

  As described above, the third support portions 30a and 30b are optical reflecting elements provided at the vibration node portions of the higher-order standing wave having the resonance frequency of the torsional vibrator, thereby reducing the size and the deflection angle. Large optical reflecting element can be realized.

  The present invention has an effect that the optical reflecting element can be miniaturized, and is particularly useful for electrophotographic copying machines, laser printers, and optical scanners.

Plan view of the optical reflecting element of the present invention Sectional view in the AA part of FIG. The conceptual diagram which shows the operation state of the optical reflection element in Embodiment 1 Plan view of the optical reflecting element in the second embodiment

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Support body 2a, 2b 1st support part 3a, 3b 1st arm 4a, 4b 2nd arm 5a, 5b Connection part 6a, 6b Tuning fork vibrator 7a, 7b Projection part 8a, 8b Arrow 9a, 9b Center of vibration DESCRIPTION OF SYMBOLS 10 Piezoelectric actuator 11a, 11b 2nd support part 12 Mirror part 13 Arrow 14 Rotating shaft 20 Base material 21 1st electrode layer 22 Piezoelectric layer 23 2nd electrode layer 25a, 25b Connection terminal 30a, 30b 3rd support Part 35 damper

Claims (18)

A support, two first supports supported at one end by the support, and two first arms and a second arm supported at the other ends of the two first supports. A tuning fork vibrator, two second support parts having one end supported at the vibration center of the two tuning fork vibrators, and a mirror part supported at the other end of the two second support parts, The two tuning fork vibrators are arranged to face each other through the mirror part, the vibration centers of the two tuning fork vibrators and the rotation axis of the mirror part are arranged on the same line, and the first arm and the second arm are arranged. An optical reflecting element provided with a protrusion. The optical reflection element according to claim 1, wherein the protrusions are provided at the free ends of the first arm and the second arm. The optical reflecting element according to claim 1, wherein the protrusions are provided symmetrically with respect to the tuning fork vibrator. The optical reflecting element according to claim 1, wherein the protrusion is provided inside the tuning fork vibrator. The optical reflecting element according to claim 1, wherein the tuning fork vibrator is vibrated such that the two first support portions vibrate in the same direction about the rotation axis. The optical reflecting element according to claim 1, wherein the two tuning fork vibrators have substantially the same shape. The optical reflection element according to claim 6, wherein the resonance frequencies of the two tuning fork vibrators are the same. The optical reflection element according to claim 1, wherein the resonance frequency of the two tuning fork vibrators and the resonance frequency of the torsional vibrator formed of the mirror part and the two second support parts are substantially the same frequency. The optical reflecting element according to claim 1, wherein the first support part, the tuning fork vibrator, the protrusion, the second support part, and the mirror part have the same base material. The optical reflective element according to claim 9, wherein the base material is an elastic member. The optical reflective element according to claim 10, wherein the elastic member is made of metal, glass, quartz, or quartz. The optical reflective element according to claim 11, wherein the metal is silicon, titanium, stainless steel, Elinvar, or a brass alloy. The optical reflective element according to claim 1, wherein a piezoelectric actuator is provided on at least one surface of the first arm and / or the second arm. The optical reflective element according to claim 13, wherein the piezoelectric actuator is a laminated piezoelectric thin film comprising a first electrode layer, a piezoelectric layer, and a second electrode layer. The optical reflection element according to claim 13, wherein a piezoelectric actuator is provided on the same surface of the two tuning fork vibrators. The optical reflective element according to claim 1, wherein a third support portion is provided between the first arm and the second arm, and the second support portion. The optical reflecting element according to claim 16, wherein the third support portion is provided at a vibration node portion of a higher-order standing wave having a resonance frequency of the torsional vibrator. The optical reflection element according to claim 1, wherein the free ends of the first arm and the free ends of the second arm are connected by a damper.

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