JP2009217093A - Optical reflection element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dual axis driving type optical reflection element which is compact and has a large frequency ratio. <P>SOLUTION: The optical reflection element is provided with: a mirror part 1; a pair of tuning fork type oscillation elements 3 connected by a first supporting part 2; a frame body 6 connected by a second supporting part 5; a meander type oscillation element 8 of which the one end 7 is connected to the frame body 6; and a supporting body 10 to which the other end 9 of the meander type oscillation element 8 is connected, wherein the tuning fork type oscillation elements 3 have a first arm 12 and a second arm 13, the rotation axis 28B of the tuning fork type oscillation elements 3 and the rotation axis 28A of the meander type oscillation element 8 are orthogonal to each other. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an optical reflection element used for an optical scanner, a projector, and the like.

  An example of a conventional piezoelectric driven optical reflection element is shown in FIG. The optical reflecting element is connected to the frame body 103 supporting the mirror section 101 and the both ends of the frame body 103 via the mirror section 101 and the first torsion beam 102 connected to both ends of the mirror section 101. And a support body 105 that supports the frame body 103 via a second torsion beam 104 whose axial direction is orthogonal to the first torsion beam 102.

  Further, on both sides of the first torsion beam 102, piezoelectric vibrating bodies 106A and 106B having one end connected to the mirror part 101 and the other end connected to the frame 103 are provided on both sides of the second torsion beam 104. Includes piezoelectric diaphragms 107 </ b> A and 107 </ b> B having one end connected to the frame body 103 and the other end connected to the support body 105.

  When positive and negative voltages are applied to the piezoelectric diaphragms 106A and 106B and the piezoelectric diaphragms 107A and 107B, respectively, the first and second torsion beams 102 and 104 rotate about their rotation axes. The vibration energy propagates to the mirror unit 101 and the frame body 103, and the mirror unit 101 repeatedly rotates and vibrates around two orthogonal axes (see, for example, Patent Document 1).

Such an optical reflection element can project a two-dimensional drawing on the screen by reflecting light from a laser light source or the like by a mirror unit and scanning the light in the vertical and horizontal directions of the screen.
JP 2005-148459 A

  However, in the conventional optical reflecting element, the resolution of drawing to be projected may be lowered. This is because the frequency ratio of repetitive rotational vibrations about the two axes is small. Moreover, when the frequency ratio is increased, the shape is increased.

  SUMMARY OF THE INVENTION The present invention solves the above-described conventional problems, and an object of the present invention is to provide an optical reflecting element that is small in size and can increase the frequency ratio of biaxial vibration in a biaxial driving optical reflecting element.

  In order to solve the above-described conventional problems, the present invention includes a mirror portion, a pair of tuning fork vibrators that are opposed to each other via the mirror portion, and are connected to the mirror portion by a first support portion, A frame body connected to the vibration center of each of these tuning fork type vibrators by a second support portion, a meander type vibrator having one end connected to the frame body, and the other end of the meander type vibrator are connected to each other. And the tuning fork vibrator has a first arm and a second arm on both sides of the first support part, respectively, and a rotation axis of vibration of the tuning fork vibrator, The meander type vibrator is configured to be orthogonal to the vibration axis of vibration.

  The optical reflecting element of the present invention is a small-sized optical reflecting element that is biaxially driven, and can increase the frequency ratio of biaxial vibration.

  The reason is that repetitive rotational vibration about one axis can be driven at a high frequency by a tuning fork vibrator, and repetitive rotational vibration about the other axis is driven by a meander beam having a long beam length. This is because it can be driven at a low frequency. In the biaxially driven optical reflecting element, a small-sized vibrator can be used, and the frequency ratio of the biaxial vibration can be increased.

(Embodiment 1)
Hereinafter, the configuration of the optical reflecting element according to Embodiment 1 of the present invention will be described with reference to the drawings.

  FIG. 1 is a plan view of the optical reflecting element according to the first embodiment, FIG. 2 is a cross-sectional view of the AA portion of FIG. 1, and FIG. 3 is a schematic diagram showing an operating state of the tuning fork vibrator.

  In FIG. 1, the optical reflecting element according to the first embodiment is opposed to the mirror unit 1 through the mirror unit 1 and is connected to the mirror unit 1 by the first support unit 2. The tuning fork vibrator 3 has a frame 6 connected to the vibration center 4 of each of these tuning fork vibrators 3 by a second support portion 5, and the meander in which the frame 6 and the end 7 are connected. The configuration includes a type vibrator 8 and a frame-shaped support body 10 to which an end 9 of the meander type vibrator 8 is connected.

  The meander-type vibrator 8 has a plurality of diaphragms 11 each having an end 7 connected to a corner of the frame 6 and parallel to the first support 2, and has a meandering beam shape.

  Further, the tuning fork vibrator 3 has a first arm 12 and a second arm 13 that are substantially parallel to the first support part via connecting parts 22 on both sides of the first support part 2. ing.

  Moreover, in this Embodiment 1, the 1st support part 2 and the 2nd support part 5 are provided on the rotating shaft 28B which is on the straight line parallel to the Y-axis of FIG. 1, and is further stable. Therefore, the end 9 of the meandering vibrator 8 is provided on the rotating shaft 28A of the meandering vibrator 8.

  The tuning fork vibrator 3 has a rotation axis 28B parallel to the Y axis, and the meandering vibrator 8 has a rotation axis 28A parallel to the X axis. The rotation axis 28 </ b> A of the vibration of the meandering vibrator 8 is formed so as to be perpendicular to the substantial center of the mirror unit 1.

  Next, as shown in FIG. 2, it is preferable from the viewpoint of productivity that the base material 14 of the optical reflecting element is made of a material having elasticity, mechanical strength and high Young's modulus such as a metal, glass or ceramic substrate. For example, it is preferable to use a material such as metal, quartz, glass, or quartz from the viewpoint of mechanical properties and availability. Furthermore, if a metal such as silicon, titanium, stainless steel, Elinvar, or a brass alloy is used, an optical reflecting element having excellent vibration characteristics and workability can be realized.

  In the first embodiment, as shown in FIGS. 1 and 2, the first arm 12 and the second arm 13 made of a base material such as silicon (14 in FIG. 2) and the meander type vibration are used. Each of the diaphragms 11 of the child 8 is formed with piezoelectric actuators 15, 16, and 17 for generating a flexural vibration on at least one surface. The piezoelectric actuators 15, 16, and 17 are connected to the lower electrode layer 18 and the piezoelectric element. A laminated piezoelectric thin film structure composed of a laminate of the body layer 19 and the upper electrode layers 20A, 20B, and 21 is formed.

  Thereby, the tuning fork type vibrator 3 and the meander type vibrator 8 can be made thinner. In the first embodiment, the lower electrode layer 18 and the piezoelectric layer 19 are formed in common by the tuning fork vibrator 3 and the meander vibrator 8, and the upper electrode layers 20A, 20B, and 21 are electrically connected respectively. Formed independently.

  Further, by reducing the thickness of the tuning fork vibrator 3, the amplitude is increased, and a small optical reflection element can be realized. Similarly, the amplitude is increased by making the thickness of the meandering vibrator 8 smaller than its width.

  Further, the lower electrode layer 18, the piezoelectric layer 19, and the upper electrode layers 20A, 20B, and 21 are sequentially formed on the base material 14 on which the tuning fork vibrator 3 and the meander vibrator 8 are formed. Can be formed. Therefore, it is preferable from the viewpoint of productivity to form the piezoelectric actuators 15, 16, and 17 on the surfaces of the tuning fork vibrator 3 and the meander vibrator 8.

  The piezoelectric material used for the piezoelectric layer 19 is preferably a piezoelectric material having a high piezoelectric constant such as lead zirconate titanate (PZT).

  Further, the tuning fork type can be obtained by designing the tuning fork type vibrator 3 so that the resonance frequency of the tuning fork type vibrator 3 and the resonance frequency of the torsional vibrator constituted by the mirror part 1 and the first support part 2 are substantially the same frequency. When the vibrator 3 is driven to resonate, the torsional vibrator can also resonate, and an optical reflection element that efficiently and repeatedly vibrates the mirror unit 1 can be realized.

  Further, the frame body 6 can be efficiently and repeatedly oscillated repeatedly by applying a signal of the resonance frequency to the meander type vibrator 8 and causing the resonance drive. Further, by making the vibrator 8 a meander type, the resonator length can be increased, and a vibrator that can be driven at a low frequency can be obtained.

  Also, unnecessary vibration modes can be suppressed by making the tuning fork type vibrator 3 U-shaped.

  In this embodiment, the piezoelectric actuators 15, 16, and 17 formed on the diaphragm 11 of the first arm 12, the second arm 13, and the meander type vibrator 8 of the tuning fork vibrator 3 shown in FIG. The lead electrodes of the upper electrode layer (20A, 20B, and 21 in FIG. 2) and the lower electrode layer (18 in FIG. 2) common to these are formed as lead wires (not shown) individually, and connection terminals 23A to 23C are formed. , 24. As a result, opposite electrical signals can be applied to the first arm 12 and the second arm 13, and electrode signals of the resonance frequency can be applied to the meander type vibrator 8 to the respective piezoelectric actuators 15, 16, and 17. .

  Note that monitor electrodes (not shown) are arranged on the first arm 12 and the second arm 13 of the tuning fork type vibrator 3 and the diaphragm 11 of the meander type vibrator 8, respectively, and these are also elements similar to the upper electrode. The connection terminals 25A to 25C were connected while being routed upward. As a result, the input signal can be adjusted while detecting the amplitudes of the first and second arms 12 and 13 of the tuning fork type vibrator 3 and the diaphragm 11 of the meander type vibrator 8, and stable self-excitation is achieved. Drive can be realized.

  Note that the lead lines of the above-described piezoelectric actuators 15, 16, and 17, monitor electrodes, and lead lines thereof are omitted in FIG. 2.

  Next, the operation principle of the optical reflecting element having such a configuration will be described.

  When an alternating drive voltage is applied between the lower electrode layer 18 and the upper electrode layers 20A and 20B shown in FIG. 2, the piezoelectric layer 19 expands and contracts in the plane direction, and the first arm 12 and the second arm 13 bends and vibrates in a direction perpendicular to the substrate 14.

  At this time, if a driving signal opposite to positive and negative is applied to the piezoelectric actuators 15 and 16 formed on the first arm 12 and the second arm 13, respectively, as shown in FIG. The second arm 13 can be flexed and vibrated in a direction (in the directions of arrows 26 and 27) that is 180 degrees out of phase, that is, in the opposite direction. Here, in the first embodiment, the first and second arms 12 and 13 can be greatly bent and vibrated because of the cantilever structure having the distal ends thereof as free ends.

  The vibration energy of the first arm 12 and the second arm 13 is propagated to the connecting portion 22 of the tuning fork vibrator 3. As a result, the tuning fork vibrator 3 repeats rotational vibration (torsional vibration) at a predetermined frequency about the rotation shaft 28B with the straight line passing through the vibration center 4 as the rotation shaft 28B.

  Next, the vibration energy of this repetitive rotational vibration is transmitted to the first support part 2 joined to the connecting part 22, and the torsional vibrator composed of the first support part 2 and the mirror part 1 The torsional vibration is generated in the direction of the arrow 29 around the rotation shaft 28B. As a result, repetitive rotational vibration is caused in the mirror section 1 with the rotation shaft 28B as the axis center. At this time, the direction of repetitive rotational vibration of the tuning fork vibrator 3 and the direction of repetitive rotational vibration of the torsional vibrator composed of the first support part 2 and the mirror part 1 vibrate in opposite directions that are 180 degrees out of phase. It will be.

  Further, in the meander type vibrator 8 shown in FIG. 1, when a voltage is applied between the lower electrode layer 18 and the upper electrode layer 21 in FIG. , Repetitive rotational vibration is caused around the rotation axis (the center portion of the meander shape). That is, the adjacent diaphragms 11 can apply repeated rotational vibration having a larger amplitude to the frame body 6 by bending and vibrating in directions in which the phases are different by 180 °.

  In addition, although the common upper electrode layer 21 was provided in each adjacent diaphragm 11 and the signal of the same phase was applied, the independent upper electrode layer was provided and the signal which a phase differs 180 degree | times to the adjacent diaphragm 11 If applied, displacement accumulates around the rotation axis, and a larger amplitude can be obtained.

  Then, the end of the frame body 6 can be vibrated in the vertical direction with this vibration energy, and the frame body 6 can be repeatedly rotated and oscillated around the rotation axis of the meandering vibrator 8.

  When the frame body 6 vibrates in this way, the mirror unit 1 supported by the frame body 6 can also be repeatedly rotated and oscillated around the rotation axis of the meandering vibrator 8.

  A light beam generated from, for example, a laser light source or an LED light source is input to the mirror unit 1 and reflected by the vibrating mirror unit 1 to scan the light beam on the screen. Further, since the rotation axes of the tuning fork type vibrator 3 and the meander type vibrator 8 are orthogonal to each other, the light emitted from the mirror unit 1 can be scanned in the vertical and horizontal directions on the screen.

  Next, a method for manufacturing the optical reflecting element in the first embodiment will be described with reference to FIG.

  First, a silicon substrate having a thickness of about 0.3 mm to be a base material 14 is prepared, and a lower electrode layer 18 made of a platinum electrode is formed thereon using a thin film process such as sputtering or vapor deposition. At this time, the thickness of the silicon substrate may be changed. The natural frequency can be adjusted by changing the thickness.

  Thereafter, a piezoelectric layer 19 is formed on the lower electrode layer 18 by a sputtering method or the like using a piezoelectric material such as lead zirconate titanate (PZT). At this time, an oxide dielectric containing Pb and Ti is preferably used as the orientation control layer between the piezoelectric layer 19 and the lower electrode layer 18, and an orientation control layer made of PLMT is more preferably formed. . Thereby, the crystal orientation of the piezoelectric layer 19 is further improved, and the piezoelectric actuators 15, 16, and 17 having excellent piezoelectric characteristics can be realized.

  Next, titanium / gold films to be the upper metal layers 20A, 20B, and 21 are formed on the piezoelectric layer 19.

  At this time, the titanium film under the gold film is formed in order to enhance the adhesion with the piezoelectric layer 19 such as a PZT thin film, and a metal such as chromium can be used in addition to titanium. As a result, the piezoelectric actuators 15, 16, and 17 having high adhesion strength can be formed because a diffusion layer that is excellent in adhesion to the piezoelectric layer 19 and is strong with the gold electrode is formed.

  In the present embodiment, the thickness of the lower electrode layer 18 of platinum is 0.2 μm, the piezoelectric layer 19 made of PZT is 3.5 μm, and the titanium portions of the upper electrode layers 20A, 20B, and 21 are 0.01 μm. The gold electrode portion is formed with a thickness of 0.3 μm.

  Next, the lower electrode layer 18, the piezoelectric layer 19, and the upper electrode layers 20A, 20B, and 21 are etched using a photolithographic technique, and the piezoelectric actuators 15, 16, and 17 are patterned.

  At this time, as an etching solution for the upper electrode layers 20A, 20B, and 21, a predetermined electrode pattern was formed using an etching solution composed of an iodine / potassium iodide mixed solution, ammonium hydroxide, and hydrogen peroxide mixed solution.

  Moreover, as an etching method used for the lower electrode layer 18 and the piezoelectric layer 19, any one of a dry etching method and a wet etching method, or a combination of these methods can be used.

For example, in the case of a dry etching method, a fluorocarbon-based etching gas or SF ₆ gas can be used.

  In addition, there is a method in which the piezoelectric layer 19 is wet-etched and patterned using a mixed solution of hydrofluoric acid, nitric acid, acetic acid and hydrogen peroxide, and then the lower electrode layer 18 is further etched and patterned by dry etching. is there.

Next, the silicon substrate is isotropically dry-etched using XeF ₂ gas to remove unnecessary silicon portions and patterning to form the base material 14 as shown in FIG. An optical reflection element having a shape as shown can be formed.

In addition, when etching a silicon substrate with higher accuracy, dry etching utilizing the anisotropy of silicon is preferable. In this case, etching can be performed more linearly by using a mixed gas of SF ₆ gas that promotes etching and C ₄ F ₈ gas that suppresses etching, or by alternately switching these gases.

  By the manufacturing method as described above, it is possible to efficiently produce a small and highly accurate optical reflecting element collectively.

  In the first embodiment, the mirror 14, the first support 2, the tuning fork vibrator 3, the second support 5, the frame 6, the meandering vibrator 8, and the base material 14 of the support 10 are By integrally forming from the same base material 14, it is possible to realize an optical reflective element having stable vibration characteristics and excellent productivity.

  In addition, the optical reflecting element according to the first embodiment can be manufactured in a lump with high accuracy by applying a semiconductor process such as a thin film process or a photolithographic technique on a base material 14 such as a silicon wafer. It is possible to realize an optical reflective element that is excellent in miniaturization, high accuracy, and production efficiency of the reflective element.

  The mirror portion 1 can be formed by mirror polishing the surface of the substrate 14, but a metal thin film of gold or aluminum having excellent light reflection characteristics can also be formed as a mirror film. In the present embodiment, since gold is used for the upper electrode layers 20A, 20B, and 21, this gold thin film can be used as a mirror film as it is, and the production efficiency is increased.

  As described above, in the biaxially driven optical reflecting element according to the first embodiment, repetitive rotational vibration around one axis can be driven at a high frequency by the tuning fork vibrator 3, and the other Repetitive rotational vibration around the axis is driven by the meander beam of the meander type vibrator 8 having a long beam length and can be driven at a low frequency, so that the frequency ratio of the biaxial vibration can be increased and the size can be reduced. Can be realized. By combining a meander vibrator and a tuning fork vibrator, a small optical reflecting element can be realized.

  In particular, when projecting an image, in order to increase the resolution of the image, it is desirable to set the scanning speed in the horizontal direction of the screen to be larger than the scanning speed in the vertical direction, and a vibrator for scanning light in the vertical direction. By using the meander type vibrator 8, the beam length can be easily designed even in a small element, and the frequency ratio of the biaxially driven optical reflecting element can be increased.

  Further, in the first embodiment, the vibrator that is arranged inside the meander-type vibrator 8 and has a smaller size is a tuning fork type that performs repetitive rotational vibration. While increasing, it can be set as the optical reflection element which can enlarge the deflection angle of the mirror part 1 efficiently even if it is small.

  In general, it is difficult to obtain a sufficient amplitude as the drive frequency is increased. However, the tuning fork vibrator according to the first embodiment can obtain a sufficient amplitude by highly efficient driving. A highly accurate optical reflecting element can be realized.

  Further, by making the vibration source a tuning fork type having a high Q value, a large vibration energy can be obtained with a small energy, which contributes to the miniaturization of the element.

  Further, by designing the tuning fork type vibrator 3 and the meander type vibrator 8 to vibrate, the reflection angle of the output light can be greatly changed, and the input light such as a laser beam becomes a predetermined design value. An optical reflecting element that can be swept can be realized.

  Further, the mirror unit 1 is surrounded by a pair of tuning fork type vibrators 3 from both sides thereof, the outer periphery of these tuning fork type vibrators 3 is surrounded by a frame body 6, and the frame body 6 is supported by a meander type vibrator 8. Since the outer periphery of the meander-type vibrator 8 is surrounded by the support 10, the area of the element can be used effectively, and the element can be downsized.

  Further, since the tuning fork type vibrators 3 are symmetrically arranged on both sides of the mirror unit 1, the mirror unit 1 can be stably excited in left and right directions, and the center of the mirror unit 1 becomes a fixed point. Therefore, light can be scanned stably.

  Moreover, since the mirror part 1 has a double-sided structure in which both ends are supported by the first support part 2, unnecessary vibration of the mirror part 1 can be suppressed and the influence of disturbance vibration can be reduced.

  In addition, since the frame body 6 has a cantilever structure in which one end is supported by the meander type vibrator 8, a small element structure can be realized.

  In FIG. 1, the piezoelectric actuators 15 and 16 are formed on both the first arm 12 and the second arm 13, but an actuator element may be formed only on at least one of them. This utilizes the characteristics of the tuning fork vibrator 3, and when one of the arms vibrates, kinetic energy propagates to the other arm via the connecting portion 22, and this other arm can be excited. Because it can.

  Further, by forming the piezoelectric actuators 15, 16, and 17 on the same surface of the tuning fork type vibrator 3 and the meander type vibrator 8, an optical reflective element having excellent productivity can be obtained.

  Further, in both the tuning fork type vibrator 3 and the meander type vibrator 8, the piezoelectric actuators 15, 16, and 17 are formed on only one side of the arm and the meander, but may be formed on both sides.

  Since the tuning fork vibrator 3 has a smaller area and a lower driving force than the meander vibrator 8, the piezoelectric actuators 15 and 16 may be formed on both surfaces of the base material 14 only for the tuning fork vibrator 3. .

  Moreover, if each cross-sectional shape of the 1st support part 2 and the 2nd support part 5 is made into circular shape, the vibration mode of torsional vibration will be stabilized and an unnecessary resonance can be suppressed, and it will be influenced by disturbance vibration. A difficult optical reflecting element can be realized.

  Applications of the optical reflecting element having the above configuration include an image projection device and a laser exposure machine. The image projection apparatus can project a two-dimensional image on a screen by irradiating the mirror unit 1 with light while rotating the mirror unit 1 in two axial directions, for example, and reflecting the light on the mirror unit 1. It can be done.

(Embodiment 2)
Hereinafter, the configuration of the optical reflecting element according to Embodiment 2 of the present invention will be described with reference to the drawings.

  FIG. 4 is a plan view of the optical reflecting element according to the second embodiment.

  In FIG. 4, the main difference between the optical reflecting element in the second embodiment and the optical reflecting element in the first embodiment is that the third support portion 30 supports between the frame 6 and the support 10. It is to have made the structure. This third support portion 30 is effective when the frame 6 vibrates repeated rotational vibrations with high accuracy about the rotation shaft 28A. That is, unnecessary vibrations other than the predetermined vibration centering on the rotation shaft 28A can be suppressed, and it is preferable that the rotation shaft 28A be disposed on the axis of the rotation shaft 28A. The third support portion 30 preferably has a structure having a small resistance to repeated rotational vibration. Therefore, a thin beam shape is preferable. Furthermore, it is more preferable to have a configuration having a gimbal mechanism.

  Further, the shape and location of the piezoelectric actuators 15 and 16 are different from those of the first embodiment. In other words, in the tuning fork vibrator 3, the piezoelectric actuators 15 and 16 are connected to the first arm 12 and the second arm 13. It extends to the connecting portion 22 and is configured in an L shape. Since the first arm 12 and the second arm 13 are applied with signals having opposite phases, the tuning fork type vibration is applied so that the drive electrodes of the piezoelectric actuators 15 and 16 formed on the first arm 12 and the second arm 13 are not electrically short-circuited with each other. It is intermittent at the vibration center 4 of the child 3.

  In addition, description about the same structure and effect as Embodiment 1 is abbreviate | omitted.

(Embodiment 3)
Hereinafter, the configuration of the optical reflecting element according to Embodiment 3 of the present invention will be described with reference to the drawings.

  FIG. 5 is a plan view of the optical reflecting element according to the third embodiment. The main difference between the optical reflecting element in the third embodiment and the optical reflecting element in the first embodiment is that the pair of tuning fork vibrators 3 are disposed between the opposed first arms 12 and the opposed second arms. 13 is a point connected by an elastic body 31. The elastic body 31 is softer than the base material 14 of the optical reflecting element, and is formed of a stretchable resin film in the third embodiment and is attached to the first arm 12 or the second arm 13. It has been.

  As this resin film, a material having higher elasticity in the direction parallel to the extending direction of the first arm 12 and the second arm 13 is preferable.

  In addition, although the resin is used as the elastic body 31, other materials such as a rubber material or a metal having high elasticity and a small thickness may be used.

  In this way, by connecting the first arm 12 and the second arm 13 with the elastic body 31, it is possible to correct a slight shift in the resonance frequency of the opposing tuning fork vibrator 3. Further, the symmetry of flexural vibration is increased, and unnecessary vibration at the free end of each arm can be suppressed, and the driving force is increased. In addition, description about the same structure and effect as Embodiment 1 is abbreviate | omitted.

  As described above, the optical reflecting element according to the present invention has an effect that it can be miniaturized, and is particularly useful for applications such as a small projector, an optical scanner, an electrophotographic copying machine, and a laser printer.

The top view of the optical reflection element in Embodiment 1 of this invention Sectional view of the optical reflecting element (cross section AA in FIG. 1) Schematic diagram showing the operating state of the tuning fork vibrator The top view of the optical reflective element in Embodiment 2 of this invention The top view of the optical reflective element in Embodiment 3 of this invention Plan view of a conventional optical reflecting element

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Mirror part 2 1st support part 3 Tuning fork type vibrator 4 Center of vibration 5 Second support part 6 Frame body 7 End part 8 Meander type vibrator 9 End part 10 Support body 11 Diaphragm 12 First arm 13 First arm Two arms 14 Base material 15, 16, 17 Piezoelectric actuator 18 Lower electrode layer 19 Piezoelectric layer 20A, 20B Upper electrode layer 21 Upper electrode layer 22 Connecting portion 23A-23C Connection terminal 24 Connection terminal 25A-25C Connection terminal 26, 27 Arrow 28A, 28B Rotating shaft 29 Arrow 30 Third support portion 31 Elastic body

Claims (15)

Mirror part,
A pair of tuning fork vibrators that are opposed to each other via the mirror part and are connected to the mirror part by a first support part,
A frame body connected to the vibration center of each of these tuning fork type vibrators by a second support part,
A meander-type vibrator having one end connected to the frame,
A support body connected to the other end of the meander type vibrator,
The tuning fork vibrator has a first arm and a second arm on both sides of the first support part,
An optical reflecting element in which a rotation axis of vibration of the tuning fork vibrator and a rotation axis of vibration of the meander vibrator are orthogonal to each other. Tuning fork type vibrator
The optical reflecting element according to claim 1, wherein the first arm and the second arm are driven to bend and vibrate in directions different in phase by 180 degrees and torsionally vibrate about a rotation axis thereof. The optical reflection element according to claim 1, wherein the resonance frequency of the tuning fork vibrator and the resonance frequency of the torsional vibrator formed of the mirror part and the first support part are the same frequency. The optical reflecting element according to claim 1, wherein the two tuning fork vibrators have substantially the same shape. The optical reflection element according to claim 1, wherein a piezoelectric actuator is provided on at least one of the first arm and the second arm. The optical reflection element according to claim 5, wherein the piezoelectric actuator extends to a connecting portion between the first arm and the second arm. 6. The optical reflecting element according to claim 5, wherein the piezoelectric actuator is a laminated piezoelectric thin film comprising a first electrode layer, a piezoelectric layer, and a second electrode layer. 6. The optical reflecting element according to claim 5, wherein a piezoelectric actuator is provided on the same surface of the two tuning fork vibrators and the meander vibrator. The optical reflective element according to claim 1, wherein the first support portion, the tuning fork vibrator, the second support portion, the meander vibrator, and the mirror portion are made of the same material. The optical reflective element according to claim 9, wherein the base material is an elastic member. The optical reflective element according to claim 10, wherein the elastic member is made of metal, glass, quartz, or quartz. The optical reflective element according to claim 11, wherein the metal is silicon, titanium, stainless steel, Elinvar, or a brass alloy. The optical reflection element according to claim 1, wherein a third support portion that supports the frame body and the support body is provided on the same line as the rotation axis of the meander type vibrator. The optical reflecting element according to claim 1, wherein the opposing first arms and the opposing second arms are each connected by an elastic body. The optical reflective element according to claim 14, wherein the elastic body is made of metal, rubber, or elastomer.

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