JP2009210194A - Kiln control method, and baking device - Google Patents

Kiln control method, and baking device Download PDF

Info

Publication number
JP2009210194A
JP2009210194A JP2008053749A JP2008053749A JP2009210194A JP 2009210194 A JP2009210194 A JP 2009210194A JP 2008053749 A JP2008053749 A JP 2008053749A JP 2008053749 A JP2008053749 A JP 2008053749A JP 2009210194 A JP2009210194 A JP 2009210194A
Authority
JP
Japan
Prior art keywords
furnace
chamber
furnace chamber
internal pressure
firing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008053749A
Other languages
Japanese (ja)
Other versions
JP5339029B2 (en
Inventor
Hirokazu Ishii
弘和 石井
Shinichiro Ito
信一郎 伊藤
Mamoru Ito
守 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP2008053749A priority Critical patent/JP5339029B2/en
Publication of JP2009210194A publication Critical patent/JP2009210194A/en
Application granted granted Critical
Publication of JP5339029B2 publication Critical patent/JP5339029B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Tunnel Furnaces (AREA)
  • Furnace Details (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a kiln control method and a baking device suitable for obtaining a baked object having stable characteristics. <P>SOLUTION: The kiln 1 is provided with a first furnace chamber 11 to a seventh furnace chamber 17 between a conveyance preparation chamber 10 and an extraction preparation chamber 18. When controlling furnace pressure, the internal pressure P1-P7 of the first furnace chamber 11 to the seventh furnace chamber 17 is maintained higher than atmospheric pressure Pa. The internal pressure P1 of the first furnace chamber 11 adjacent to the conveyance preparation chamber 10 is maintained higher than the internal pressure P2 of the second furnace chamber 12. The internal pressure P7 of the seventh furnace chamber 17 adjacent to the extraction preparation chamber 18 is maintained higher than the internal pressure P6 of the sixth furnace chamber 16. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、焼成炉制御方法及び焼成装置に関する。   The present invention relates to a firing furnace control method and a firing apparatus.

例えば、セラミックスを雰囲気焼成する際に用いられる焼成炉においては、被焼成物搬入及び取出時に、炉室の雰囲気が擾乱されないように配慮しなければならない。炉室の雰囲気が擾乱されると、焼結体の特性変動を招いてしまうからである。その一つの手段として、置換室と隣接する炉室とをシャッタによって閉じるとともに、被焼成物を搬入側置換室に搬入したことによって入った空気を、例えばN2ガスなどの不活性ガスによって置換し、その後、シャッタを開いて、被焼成物を炉室内に送り込む。 For example, in a firing furnace used when firing ceramics in an atmosphere, care must be taken so that the atmosphere in the furnace chamber is not disturbed when the object to be fired is carried in and taken out. This is because if the atmosphere in the furnace chamber is disturbed, the characteristics of the sintered body will change. As one of the means, the replacement chamber and the adjacent furnace chamber are closed by a shutter, and the air that has entered the product to be fired into the loading-side replacement chamber is replaced with an inert gas such as N 2 gas. Thereafter, the shutter is opened, and the object to be fired is fed into the furnace chamber.

焼成後、焼成物を取り出す際には、予め、不活性ガスで満たした取出側置換室内に焼成物を取り込み、次に炉室と取出側置換室との間に設けられたシャッタを閉じた状態で、焼成物を取出側置換室から外部に取り出す。その後、焼成物取出操作に伴って取出側置換室内に入った空気を、不活性ガスで置換する。   When the fired product is taken out after firing, the fired product is previously taken into the take-out side replacement chamber filled with an inert gas, and then the shutter provided between the furnace chamber and the take-out side replacement chamber is closed. Then, the fired product is taken out from the take-out side replacement chamber. Thereafter, the air that has entered the extraction-side replacement chamber in accordance with the baking product extraction operation is replaced with an inert gas.

雰囲気焼成炉においては、炉室内の雰囲気ガスの状態が、焼成品の特性に重大な影響を与えることから、従来より、種々の雰囲気ガス制御技術が提案され、実用に供されている。例えば、特許文献1は、焼成炉内を、被焼結体の移送方向に温度勾配を持つ焼結条件に設定することにより、焼結炉内を移送される被焼結体からその加熱過程で生じるガスを、その不活性ガス等の流れにより焼結炉外に円滑に排出する焼結方法及び焼結炉を開示している。具体的には、出口側の炉圧を高くし、入口側の炉圧を低く設計する。   In the atmosphere firing furnace, since the state of the atmosphere gas in the furnace chamber has a significant influence on the characteristics of the fired product, various atmosphere gas control techniques have been proposed and put into practical use. For example, Patent Document 1 discloses that the inside of a firing furnace is set to a sintering condition having a temperature gradient in the transfer direction of the sintered body, so that the heating process is performed from the sintered body transferred in the sintering furnace. A sintering method and a sintering furnace are disclosed in which the generated gas is smoothly discharged out of the sintering furnace by the flow of the inert gas or the like. Specifically, the furnace pressure on the outlet side is increased and the furnace pressure on the inlet side is decreased.

また、特許文献1とは異なって、積極的な炉圧制御は行わず、焼成温度の影響で、焼成炉内の焼成安定部(高温部)で炉圧が高くなり、入口部及び出口部で炉圧が低くなる現象を利用する技術も、よく知られている。   Further, unlike Patent Document 1, active furnace pressure control is not performed, and the furnace pressure increases at the firing stable part (high temperature part) in the firing furnace due to the influence of the firing temperature, and at the inlet and outlet parts. A technique using the phenomenon that the furnace pressure is lowered is also well known.

しかし、何れの従来技術を適用した場合でも、未焼成物を搬入側置換室に導入する場合、及び、取出側置換室から焼成物を取り出す場合に、大気圧よりも高い内圧にある置換室が大気開放となるから、その内圧が大気圧まで低下してしまう。置換室と炉室は、シャッタによって一応区切られているが、シャッタ自体の密閉性は、その構造上、高いものではない。このため、置換室の内圧変動が炉室の内圧に波及し、その内圧の変動、炉室の雰囲気ガス組成分比の変動、炉室温度の変動を招き、焼結体の特性が変動してしまう。   However, even when any conventional technique is applied, when the unfired product is introduced into the carry-in replacement chamber, and when the fired product is taken out from the take-out replacement chamber, the replacement chamber is at an internal pressure higher than atmospheric pressure. Since it is open to the atmosphere, its internal pressure drops to atmospheric pressure. Although the replacement chamber and the furnace chamber are temporarily separated by a shutter, the sealing performance of the shutter itself is not high due to its structure. For this reason, the internal pressure fluctuation of the replacement chamber affects the internal pressure of the furnace chamber, causing fluctuations in the internal pressure, fluctuations in the atmospheric gas composition ratio in the furnace chamber, fluctuations in the furnace chamber temperature, and fluctuations in the characteristics of the sintered body. End up.

しかも、特許文献1の場合は、出口側の炉圧を高くし、入口側の炉圧を低く設計するのであって、焼成炉全長にわたる一方向温度傾斜制御に限定され、安定した特性の焼結体を得る上に重要なゾーン制御に不向きである。
特開平6−346104
Moreover, in the case of Patent Document 1, the furnace pressure on the outlet side is increased and the furnace pressure on the inlet side is designed to be low, which is limited to unidirectional temperature gradient control over the entire length of the firing furnace, and stable sintering. It is not suitable for zone control, which is important for obtaining the body.
JP-A-6-346104

本発明の課題は、安定した特性の焼成物を得るのに適した焼成炉制御方法及び焼成装置を提供することである。   An object of the present invention is to provide a firing furnace control method and a firing apparatus suitable for obtaining a fired product having stable characteristics.

1.焼成炉制御方法
上述した課題を解決するため、本発明に係る焼成炉制御方法は、焼成炉の炉圧を制御するために適用される。前記焼成炉は、未焼成物搬入用の搬入準備室と焼結物取出用の取出準備室との間に、複数nに区画された前記第1炉室〜第n炉室を有している。
1. Firing furnace control method In order to solve the above-described problems, the firing furnace control method according to the present invention is applied to control the furnace pressure of the firing furnace. The firing furnace includes the first furnace chamber to the nth furnace chamber divided into a plurality of n between a carry-in preparation chamber for carrying in an unfired product and a take-out preparation chamber for taking out a sintered product. .

本発明に係る焼成炉制御方法は、上述した焼成炉の内圧を制御するに当たり、前記第1炉室〜第n炉室の内圧を大気圧よりも高く保ち、前記搬入準備室に隣接する前記第1炉室の内圧を、前記第1炉室に隣接する前記第2炉室の内圧よりも高く保ち、前記取出準備室に隣接する前記第n炉室の内圧を、前記第n炉室に隣接する前記第(n-1)炉室の内圧よりも高く保つ、ステップを含む。   In the firing furnace control method according to the present invention, in controlling the internal pressure of the firing furnace described above, the internal pressure of the first furnace chamber to the nth furnace chamber is kept higher than atmospheric pressure, and the first adjacent to the carry-in preparation chamber. The internal pressure of one furnace chamber is maintained higher than the internal pressure of the second furnace chamber adjacent to the first furnace chamber, and the internal pressure of the nth furnace chamber adjacent to the extraction preparation chamber is adjacent to the nth furnace chamber. And maintaining the pressure higher than the internal pressure of the (n-1) furnace chamber.

上述したように、本発明に係る焼成炉制御方法では、第1炉室〜第n炉室の内圧を大気圧よりも高く保ってあるから、焼成工程において、大気が第1炉室〜第n炉室の内部に入る余地はない。   As described above, in the firing furnace control method according to the present invention, the internal pressure of the first furnace chamber to the nth furnace chamber is kept higher than the atmospheric pressure. There is no room for entry into the furnace chamber.

しかも、搬入準備室に隣接する第1炉室の内圧を、第1炉室に隣接する第2炉室の内圧よりも高く保ってあるから、被焼成物を搬入したことによって搬入準備室が大気開放され、その内圧が低下した場合でも、搬入準備室に隣接する第1炉室の高い内圧が「壁」となって、第2炉室以降の炉室から搬入準備室の方向へ向かう雰囲気ガスの流れが生じるのを遮断する。雰囲気ガスの流れを遮断する作用は、焼成工程においても、当然に維持される。   Moreover, since the internal pressure of the first furnace chamber adjacent to the carry-in preparation chamber is kept higher than the internal pressure of the second furnace chamber adjacent to the first furnace chamber, the carry-in preparation chamber is brought into the atmosphere by carrying in the object to be fired. Even when the internal pressure is released and the internal pressure is lowered, the high internal pressure of the first furnace chamber adjacent to the carry-in preparation chamber becomes a “wall”, and the atmospheric gas is directed from the second and subsequent furnace chambers toward the carry-in preparation chamber. To prevent the flow of water. The action of blocking the flow of the atmospheric gas is naturally maintained even in the firing process.

これに加えて、取出準備室に隣接する第n炉室の内圧を、第n炉室に隣接する第(n-1)炉室の内圧よりも高く保ってあるから、焼成物を取り出したことによって取出準備室が大気開放され、その内圧が低下した場合でも、取出準備室に隣接する第n炉室の高い内圧が「壁」となって、第n炉室より前の炉室から取出準備室の方向へ向かう雰囲気ガスの流れが生じるのを遮断する。この焼成工程においても、雰囲気ガスの流れを遮断する作用は、当然に維持される。   In addition to this, the internal pressure of the nth furnace chamber adjacent to the extraction preparation chamber is kept higher than the internal pressure of the (n-1) furnace chamber adjacent to the nth furnace chamber. Even if the extraction preparation chamber is opened to the atmosphere by the above and the internal pressure drops, the high internal pressure of the nth furnace chamber adjacent to the extraction preparation chamber becomes a “wall”, and preparations for extraction from the furnace chamber before the nth furnace chamber are made. Blocks the flow of atmospheric gas toward the chamber. Even in this firing step, the action of blocking the flow of the atmospheric gas is naturally maintained.

結局、第2炉室〜第(n-1)炉室の列では、両側の第1炉室及び第n炉室の高い内圧が「壁」となって、雰囲気ガスの炉室間流通が生じないように封じこめられることになる。この結果、中間部の炉室又は炉室群によって構成される焼成安定部の雰囲気ガス成分比、内圧の変動が抑制され、安定した特性を持つ焼成物が得られることになる。   Eventually, in the row of the second furnace chamber to the (n-1) furnace chamber, the high internal pressures of the first furnace chamber and the nth furnace chamber on both sides become “walls”, and the circulation of atmospheric gas between the furnace chambers occurs. It will be sealed so that there is no. As a result, fluctuations in the atmospheric gas component ratio and the internal pressure of the firing stable portion constituted by the furnace chamber or furnace chamber group in the intermediate portion are suppressed, and a fired product having stable characteristics can be obtained.

本発明に係る焼成炉制御方法の適用される焼成炉においても、従来と同様に、未焼成物搬入側及び焼結物取出側に、搬入及び取出によって流入した空気を、不活性ガスで置換する搬入準備室及び取出準備室を有する。従って、従来と同様に、搬入準備室と隣接する炉室とをシャッタによって閉じるとともに、未焼成物を搬入準備室に搬入したことによって入った空気を、例えばN2ガスなどの不活性ガスによって置換し、その後、シャッタを開いて、未焼成物を搬入準備室から炉室内に送り込むことができる。不活性ガスによる置換後の搬入準備室及び取出準備室の内圧は、第1炉室及び第(n-1)炉室の内圧よりも高くても、低くてもよい。 Also in the firing furnace to which the firing furnace control method according to the present invention is applied, the air that has flowed in by unloading and unloading is replaced with an inert gas on the unfired material loading side and the sintered product unloading side, as in the past. It has a loading preparation room and an extraction preparation room. Therefore, as before, the loading preparation chamber and the adjacent furnace chamber are closed by the shutter, and the air that has entered the unburned material into the loading preparation chamber is replaced with an inert gas such as N 2 gas, for example. Then, the shutter can be opened, and the unfired product can be fed from the carry-in preparation chamber into the furnace chamber. The internal pressures of the carry-in preparation chamber and the extraction preparation chamber after replacement with the inert gas may be higher or lower than the internal pressures of the first furnace chamber and the (n-1) furnace chamber.

焼結物を取り出す際には、予め、不活性ガスで満たした取出準備室内に焼結物を取り込み、次に一定の冷却時間を置いて、炉室と取出準備室との間に設けられたシャッタを閉じ、この状態で、焼結物を取出準備室から外部に取り出す。その後、焼結物取出操作に伴って取出準備室内に入った空気を、不活性ガスで置換することができる。   When taking out the sintered product, the sintered product was previously taken into the extraction preparation chamber filled with an inert gas, and then provided between the furnace chamber and the extraction preparation chamber with a certain cooling time. The shutter is closed, and in this state, the sintered product is taken out from the take-out preparation chamber. Thereafter, the air that has entered the extraction preparation chamber as a result of the sintered product extraction operation can be replaced with an inert gas.

従って、対象物の搬入及び取出時に、炉室の雰囲気が擾乱されないようにし、炉室の雰囲気擾乱による焼結体の特性変動を抑制することができる。   Therefore, it is possible to prevent the atmosphere in the furnace chamber from being disturbed when the object is carried in and out, and to suppress fluctuations in the characteristics of the sintered body due to the atmosphere disturbance in the furnace chamber.

しかも、搬入準備室に搬入された未焼成物を、第1炉室〜第n炉室に送って焼成し、焼結物を取出準備室から取り出す構成であるから、第1炉室〜第n炉室の雰囲気制御によるゾーン制御が可能である。ゾーン制御によれば、第1炉室〜第n炉室の各雰囲気を制御し、最適な雰囲気制御を実行することができる。例えば、第1炉室〜第n炉室において、不活性ガスと酸素の混合比を個別的に選択制御し、焼成の程度に応じた柔軟な雰囲気制御を行うことができ、これにより、優れた特性の焼結体を得ることができる。   In addition, since the unfired material carried into the carry-in preparation chamber is sent to the first furnace chamber to the n-th furnace chamber and fired, and the sintered product is taken out from the take-out preparation chamber, the first furnace chamber to the nth Zone control is possible by controlling the atmosphere in the furnace chamber. According to the zone control, it is possible to control the atmospheres in the first furnace chamber to the nth furnace chamber and perform optimum atmosphere control. For example, in the first furnace chamber to the nth furnace chamber, the mixing ratio of the inert gas and oxygen can be individually selected and controlled, and a flexible atmosphere control according to the degree of firing can be performed. A sintered body having the characteristics can be obtained.

一つの形態として、前記第2炉室と前記第(n-1)炉室との間に、これらよりも高い内圧を有する第r炉室(rは自然数)を含んでいてもよい。このような場合も、第1炉室及び第n炉室の内圧が、前記第2炉室及び前記第(n-1)炉室の内圧よりも高いという条件が満たされる限り、焼成工程において、焼結物の特性に影響を与えるほどの大きな雰囲気ガス流を生じないからである。   As one embodiment, an r-th furnace chamber (r is a natural number) having an internal pressure higher than these may be included between the second furnace chamber and the (n-1) furnace chamber. In such a case, as long as the condition that the internal pressure of the first furnace chamber and the nth furnace chamber is higher than the internal pressure of the second furnace chamber and the (n-1) furnace chamber is satisfied, This is because an atmosphere gas flow large enough to affect the properties of the sintered product is not generated.

前記内圧は、(ガス供給量/時間)と(ガス排気量/時間)の関係を調整することによって制御される。内圧は、結局は、雰囲気ガス供給量雰囲気ガス排気量とのバランスによって決まるからである。   The internal pressure is controlled by adjusting the relationship between (gas supply amount / time) and (gas exhaust amount / time). This is because the internal pressure is ultimately determined by the balance with the atmospheric gas supply amount and the atmospheric gas exhaust amount.

内圧は、前記第1炉室〜第n炉室の全てにおいて調整してもよいが、本発明の目的の観点からは、前記内圧は、少なくとも、前記第1炉室及び第n炉室において調整される必要がある。   The internal pressure may be adjusted in all of the first furnace chamber to the nth furnace chamber, but from the viewpoint of the object of the present invention, the internal pressure is adjusted at least in the first furnace chamber and the nth furnace chamber. Need to be done.

2.焼成装置
本発明は、更に焼成装置を開示する。この焼成装置は、基本的には、上述した焼成炉制御方法を実施するのに適した構成であればよい。即ち、本発明に係る焼成装置は、焼成炉を含む。前記焼成炉は、未焼成物搬入用の搬入準備室と焼結物取出用の取出準備室との間に、複数nに区画された前記第1炉室〜第n炉室を有している。
2. Baking apparatus The present invention further discloses a baking apparatus. Basically, the firing apparatus may have any configuration suitable for carrying out the above-described firing furnace control method. That is, the firing apparatus according to the present invention includes a firing furnace. The firing furnace includes the first furnace chamber to the nth furnace chamber divided into a plurality of n between a carry-in preparation chamber for carrying in an unfired product and a take-out preparation chamber for taking out a sintered product. .

前記第1炉室〜第n炉室は、内圧が大気圧よりも高く保たれる。また、前記搬入準備室に隣接する前記第1炉室の内圧は、前記第1炉室に隣接する前記第2炉室の内圧よりも高く保たれる。更に、前記取出準備室に隣接する前記第n炉室の内圧は、前記第n炉室に隣接する前記第(n-1)炉室の内圧よりも高く保たれる。   In the first to nth furnace chambers, the internal pressure is kept higher than the atmospheric pressure. Moreover, the internal pressure of the first furnace chamber adjacent to the carry-in preparation chamber is kept higher than the internal pressure of the second furnace chamber adjacent to the first furnace chamber. Furthermore, the internal pressure of the nth furnace chamber adjacent to the extraction preparation chamber is kept higher than the internal pressure of the (n-1) furnace chamber adjacent to the nth furnace chamber.

本発明に係る焼成装置は、ガス供給装置と、ガス排出装置とを含むことができる。この場合、前記内圧は、前記ガス供給装置によるガス供給量と、前記ガス排出装置によるガス排出量の関係を調整することによって制御される。   The firing apparatus according to the present invention can include a gas supply device and a gas discharge device. In this case, the internal pressure is controlled by adjusting the relationship between the gas supply amount by the gas supply device and the gas discharge amount by the gas discharge device.

前記ガス供給装置及び前記ガス排出装置は、前記第1炉室〜第n炉室の全てに備える必要はない、少なくとも、前記第1炉室及び第n炉室のそれぞれに備えられていればよい。   The gas supply device and the gas discharge device do not need to be provided in all of the first furnace chamber to the nth furnace chamber, and may be provided in at least each of the first furnace chamber and the nth furnace chamber. .

本発明に係る焼成装置は、その具体的構成として、焼成炉と、ガス供給装置と、ガス排出装置とを含む。前記焼成炉は、搬入準備室と、取出準備室と、炉室とを有する。前記搬入準備室は、未焼成物搬入側に配置され、内部空気を不活性ガスで置換する。前記取出準備室は、焼結物取出側に配置され、内部空気を不活性ガスで置換する。前記炉室は、連続するn個に区画された第1炉室〜第n炉室を有している。   The firing apparatus according to the present invention includes a firing furnace, a gas supply device, and a gas discharge device as its specific configuration. The firing furnace has a carry-in preparation room, an extraction preparation room, and a furnace room. The carry-in preparation chamber is disposed on the unfired product carry-in side and replaces the internal air with an inert gas. The said extraction preparation chamber is arrange | positioned at the sintered compact extraction side, and replaces internal air with an inert gas. The furnace chamber has a first furnace chamber to an nth furnace chamber which are divided into n consecutive chambers.

前記ガス供給装置及び前記ガス排出装置は、対となって、少なくとも、前記搬入準備室、前記取出準備室、前記第1炉室および第n炉室にそれぞれ備えられる。前記ガス供給装置は、ガス供給量調節部を有し、前記ガス排出装置は、ガス排出量調節部を有する。   The gas supply device and the gas discharge device are provided in pairs in at least the carry-in preparation chamber, the extraction preparation chamber, the first furnace chamber, and the nth furnace chamber, respectively. The gas supply device includes a gas supply amount adjustment unit, and the gas discharge device includes a gas discharge amount adjustment unit.

上述した焼成装置が、本発明に係る焼成炉制御方法の実施に適していることは、これまでの説明から明らかである。   It is clear from the above description that the above-described firing apparatus is suitable for carrying out the firing furnace control method according to the present invention.

具体的形態として、前記搬入準備室及び前記取出準備室に備えられた前記ガス供給装置は、不活性ガスのみを供給する。また、前記第1炉室及び前記第2炉室に備えられた前記ガス供給装置は、不活性ガス及びO2ガスの混合比率を制御する機能を有する。前記ガス供給装置及びガス排出装置は、前記第1炉室〜第n炉室の全てに備えられてもよいし、その一部、例えば、前記第1炉室及び第n炉室だけに備えられていてもよい。 As a specific form, the gas supply device provided in the carry-in preparation chamber and the extraction preparation chamber supplies only inert gas. Further, the gas supply device provided in the first furnace chamber and the second furnace chamber has a function of controlling the mixing ratio of the inert gas and the O 2 gas. The gas supply device and the gas discharge device may be provided in all of the first furnace chamber to the nth furnace chamber, or only in a part thereof, for example, the first furnace chamber and the nth furnace chamber. It may be.

以上述べたように、本発明によれば、安定した特性の焼成物を得るのに適した焼成炉制御方法及び焼成装置を提供することができる。   As described above, according to the present invention, it is possible to provide a firing furnace control method and a firing apparatus suitable for obtaining a fired product having stable characteristics.

本発明の他の目的、構成及び利点については、添付図面を参照し、更に詳しく説明する。但し、添付図面は、単なる例示に過ぎない。   Other objects, configurations and advantages of the present invention will be described in more detail with reference to the accompanying drawings. However, the attached drawings are merely examples.

図1は、本発明に係る焼成装置の概略的な構成と、この焼成装置を用いた焼成炉制御方法とを示す図である。図1において、上半部(A)は焼成装置の構成を示し、下半部(B)は制御方法に関連する位置ー圧力(炉圧、内圧)との関係を示すグラフである。位置は焼成炉1の位置に対応している。   FIG. 1 is a diagram showing a schematic configuration of a firing apparatus according to the present invention and a firing furnace control method using the firing apparatus. In FIG. 1, the upper half (A) shows the configuration of the firing apparatus, and the lower half (B) is a graph showing the relationship between the position-pressure (furnace pressure, internal pressure) related to the control method. The position corresponds to the position of the firing furnace 1.

本発明における焼成炉及び焼成装置は、連続式焼成炉の範疇に入るタイプを包含する。具体的には、トンネル炉、ローラーはースキルン、プッシャー炉、セラミックチェーンコンベア炉、メッシュベルト焼成炉、ウォーキングビーム焼成炉等が含まれる。   The firing furnace and firing apparatus in the present invention include a type that falls within the category of a continuous firing furnace. Specific examples include tunnel furnaces, roller kilns, pusher furnaces, ceramic chain conveyor furnaces, mesh belt firing furnaces, walking beam firing furnaces, and the like.

図示の焼成装置において、焼成炉1は、未焼成物41を搬入するために用いられる搬入準備室10と、焼結物42を取出すために用いられる取出準備室18との間に、複数n=7に区画された第1炉室11〜第7炉室17を有している。炉室数nは、任意数である。   In the illustrated firing apparatus, the firing furnace 1 includes a plurality of n = between the carry-in preparation chamber 10 used for carrying in the unfired product 41 and the take-out preparation chamber 18 used for taking out the sintered product 42. 7 has a first furnace chamber 11 to a seventh furnace chamber 17. The number n of furnace chambers is an arbitrary number.

第1炉室11〜第7炉室17は、内圧が大気圧よりも高く保たれる。また、搬入準備室10に隣接する第1炉室11の内圧P1は、第1炉室11に隣接する第2炉室12の内圧P2よりも高く保たれる。更に、取出準備室18に隣接する第7炉室17の内圧P7は、第7炉室17に隣接する第6炉室16の内圧P6よりも高く保たれる。搬入準備室10と第1炉室11との間には、シャッタ101が配置されており、取出準備室18と第7炉室17との間にも、シャッタ181が配置されている。
図1(A)は、シャッタ101、181が閉じられた焼成中の状態を示している。
In the first furnace chamber 11 to the seventh furnace chamber 17, the internal pressure is kept higher than the atmospheric pressure. Further, the internal pressure P1 of the first furnace chamber 11 adjacent to the carry-in preparation chamber 10 is kept higher than the internal pressure P2 of the second furnace chamber 12 adjacent to the first furnace chamber 11. Further, the internal pressure P7 of the seventh furnace chamber 17 adjacent to the extraction preparation chamber 18 is kept higher than the internal pressure P6 of the sixth furnace chamber 16 adjacent to the seventh furnace chamber 17. A shutter 101 is disposed between the carry-in preparation chamber 10 and the first furnace chamber 11, and a shutter 181 is also disposed between the extraction preparation chamber 18 and the seventh furnace chamber 17.
FIG. 1A shows a firing state in which the shutters 101 and 181 are closed.

第1炉室11〜第7炉室17は、一列に配置されており、炉室間には隔壁が設けられている。第1炉室11〜第7炉室17は、その内圧調整手段として、ガス供給装置(211、212)〜(271、272)と、ガス排出装置31〜37とを含む。第1炉室11〜第7炉室17の内圧は、ガス供給装置(211、212)〜(271、272)によるガス供給量と、ガス排出装置31〜37によるガス排出量の関係を調整することによって制御される。   The first furnace chamber 11 to the seventh furnace chamber 17 are arranged in a line, and a partition wall is provided between the furnace chambers. The first furnace chamber 11 to the seventh furnace chamber 17 include gas supply devices (211 and 212) to (271 and 272) and gas discharge devices 31 to 37 as internal pressure adjusting means. The internal pressure of the first furnace chamber 11 to the seventh furnace chamber 17 adjusts the relationship between the gas supply amounts by the gas supply devices (211 and 212) to (271 and 272) and the gas discharge amounts by the gas discharge devices 31 to 37. Is controlled by

ガス供給装置(211、212)〜(271、272)及びガス排出装置31〜37は、第1炉室11〜第7炉室17の全てに備える必要はない。少なくとも、第1炉室11及び第7炉室17のそれぞれに備えられていればよい。ガス供給装置(211、212)〜(271、272)及びガス排出装置31〜37は、対となっている。ガス供給装置(211、212)〜(271、272)の実体は、マス・コントローラなどのガス供給量調節機構である。ガス排出装置31〜37はガス排出量調節弁を有するようなタイプのものが用いられる。   The gas supply devices (211, 212) to (271, 272) and the gas discharge devices 31 to 37 need not be provided in all of the first furnace chamber 11 to the seventh furnace chamber 17. It suffices that at least each of the first furnace chamber 11 and the seventh furnace chamber 17 is provided. The gas supply devices (211 and 212) to (271 and 272) and the gas discharge devices 31 to 37 are paired. The substance of the gas supply devices (211, 212) to (271, 272) is a gas supply amount adjustment mechanism such as a mass controller. As the gas discharge devices 31 to 37, those having a gas discharge amount adjustment valve are used.

また、搬入準備室10には、ガス供給装置20及びガス排出装置30が備えられ、取出準備室18には、ガス供給装置28及びガス排出装置37が備えられている。搬入準備室10及び取出準備室18に備えられたガス供給装置20、28は、N2ガスなどの不活性ガスのみを供給する。また、第1炉室11〜第7炉室17に備えられたガス供給装置(211、212)〜(271、272)は、N2ガス及びO2ガスの混合比率を制御する機能を有する。ガス供給装置(211、212)〜(271、272)及びガス排出装置31〜37は、第1炉室11〜第7炉室17の全てに備えられてもよいし、その一部だけに備えられていてもよい。例えば、第1炉室11及び第7炉室17だけに備えられているような場合もありえる。 The carry-in preparation chamber 10 is provided with a gas supply device 20 and a gas discharge device 30, and the take-out preparation chamber 18 is provided with a gas supply device 28 and a gas discharge device 37. The gas supply devices 20 and 28 provided in the carry-in preparation chamber 10 and the extraction preparation chamber 18 supply only an inert gas such as N 2 gas. Moreover, the gas supply apparatuses (211 and 212) to (271 and 272) provided in the first furnace chamber 11 to the seventh furnace chamber 17 have a function of controlling the mixing ratio of N 2 gas and O 2 gas. The gas supply devices (211, 212) to (271, 272) and the gas discharge devices 31 to 37 may be provided in all of the first furnace chamber 11 to the seventh furnace chamber 17, or only in a part thereof. It may be done. For example, there may be a case where only the first furnace chamber 11 and the seventh furnace chamber 17 are provided.

上述した焼成装置を用いて本発明に係る制御方法を実行する場合、まず、搬入準備室10の内部に未焼成物41を搬入する。未焼成物41は、未焼成誘電体セラミック成型体、未焼成磁性セラミック成型体又はその複合セラミック成型体などであり、一般には、図示されていない搬送用トレー、台車などに搭載され、第1炉室11〜第7炉室17の内部を、矢印Fで示す方向に搬送される。   When the control method according to the present invention is executed using the above-described baking apparatus, first, the unfired product 41 is carried into the carry-in preparation chamber 10. The unfired product 41 is an unfired dielectric ceramic molded body, an unfired magnetic ceramic molded body, a composite ceramic molded body thereof, or the like, and is generally mounted on a transfer tray, a carriage, or the like (not shown), and the first furnace The inside of the chamber 11 to the seventh furnace chamber 17 is conveyed in the direction indicated by the arrow F.

未焼成物41を搬入準備室10の内部に搬入した後、ガス供給装置20から搬入準備室10の内部にN2ガスを導入し、搬入時に入った空気をN2ガスによって置換する。この置換工程では、搬入準備室10と第1室11とを仕切るシャッタ101は閉じておくとよい。搬入準備室10の内圧が所定値に達したら、シャッタ101を開け、プッシャなどの適当な移送手段5を用いて、未焼成物41を第1炉室11の内部に送り込む。第1炉室11〜第7炉室17の内部には、先に送り込まれた被焼結物が順次に整列した状態で一列に並んでいるので、未焼成物41を第1炉室11の内部に送り込むと、被焼結物の列の全体が、矢印Fで示す方向に送り出され、最前列に位置する被焼結物が、焼成の済んだ焼結物42として、取出準備室18の内部に取り込まれる。そして、取出準備室18の内部において、N2ガス雰囲気の中で除冷される。 After carrying the unfired product 41 into the carry-in preparation chamber 10, N 2 gas is introduced into the carry-in preparation chamber 10 from the gas supply device 20, and the air entered at the time of carry-in is replaced with N 2 gas. In this replacement step, the shutter 101 that partitions the carry-in preparation chamber 10 and the first chamber 11 is preferably closed. When the internal pressure of the carry-in preparation chamber 10 reaches a predetermined value, the shutter 101 is opened, and the unfired product 41 is fed into the first furnace chamber 11 using an appropriate transfer means 5 such as a pusher. In the first furnace chamber 11 to the seventh furnace chamber 17, the sintered objects previously sent are arranged in a line in a state of being sequentially aligned. When sent into the interior, the entire row of the objects to be sintered is sent out in the direction indicated by the arrow F, and the objects to be sintered located in the foremost line are sintered as sintered products 42 in the extraction preparation chamber 18. Captured inside. Then, inside the extraction preparation chamber 18, it is slow cooling in N 2 gas atmosphere.

取出準備室18の内部で所定温度まで冷却された焼結物42は、周知の取出機構によって、取出準備室18から外部に取り出される。この取出工程の前に、取出準備室18と第7炉室17との間を仕切るシャッタ181が閉じられる。そして、焼結物42を取出準備室18から外部に取り出した後、ガス供給装置28及びガス排出装置38の協働により、取出準備室18に存在していた空気を、N2ガスによって置換し、次のステップに備える。 The sintered product 42 cooled to a predetermined temperature inside the extraction preparation chamber 18 is extracted from the extraction preparation chamber 18 to the outside by a known extraction mechanism. Prior to this extraction step, the shutter 181 that partitions the extraction preparation chamber 18 and the seventh furnace chamber 17 is closed. Then, after taking out the outside sinter 42 from takeout preparation chamber 18, by the cooperation of a gas supply apparatus 28 and the gas discharge device 38, the air present in unloading preparation room 18, was replaced by N 2 gas Prepare for the next step.

上述した送り込み及び取出工程とは別に、第1炉室11〜第7炉室17の内圧を制御する。第1炉室11〜第7炉室17の内圧を制御するに当たり、図1(B)に図示するように、第1炉室11〜第7炉室17の最小内圧Pminを、大気圧Paよりも高く保つ。また、搬入準備室10に隣接する第1炉室11の内圧P1を、第1炉室11に隣接する第2炉室12の内圧P2よりも高く保つ。同様に、取出準備室18に隣接する第7炉室17の内圧P7を、第7炉室17に隣接する第6炉室16の内圧P6よりも高く保つ。この状態で焼成プロセスを実行する。   Separately from the feeding and taking-out steps described above, the internal pressures of the first furnace chamber 11 to the seventh furnace chamber 17 are controlled. In controlling the internal pressures of the first furnace chamber 11 to the seventh furnace chamber 17, as shown in FIG. 1B, the minimum internal pressure Pmin of the first furnace chamber 11 to the seventh furnace chamber 17 is determined from the atmospheric pressure Pa. Also keep it high. Further, the internal pressure P1 of the first furnace chamber 11 adjacent to the carry-in preparation chamber 10 is kept higher than the internal pressure P2 of the second furnace chamber 12 adjacent to the first furnace chamber 11. Similarly, the internal pressure P7 of the seventh furnace chamber 17 adjacent to the extraction preparation chamber 18 is kept higher than the internal pressure P6 of the sixth furnace chamber 16 adjacent to the seventh furnace chamber 17. The firing process is performed in this state.

上述したように、第1炉室11〜第7炉室17の内圧を大気圧Paよりも高く保ってあるから、焼成工程において、大気が第1炉室11〜第7炉室17の内部に入る余地はない。   As described above, since the internal pressure of the first furnace chamber 11 to the seventh furnace chamber 17 is kept higher than the atmospheric pressure Pa, the atmosphere is brought into the first furnace chamber 11 to the seventh furnace chamber 17 in the firing step. There is no room for entry.

しかも、搬入準備室10に隣接する第1炉室11の内圧P1を、第1炉室11に隣接する第2炉室12の内圧P2よりも高く保ってあるから、被焼結物41を搬入したことによって搬入準備室10が大気開放され、その内圧が低下した場合でも、搬入準備室10に隣接する第1炉室11の高い内圧P1が「壁」となって、第2炉室12以降の炉室から搬入準備室10の方向へ向かう雰囲気ガスの流れが生じるのを遮断することができる。雰囲気ガスの流れを遮断する作用は、焼成工程においても、当然に維持される。   Moreover, since the internal pressure P1 of the first furnace chamber 11 adjacent to the carry-in preparation chamber 10 is kept higher than the internal pressure P2 of the second furnace chamber 12 adjacent to the first furnace chamber 11, the object to be sintered 41 is carried in. Thus, even when the carry-in preparation chamber 10 is opened to the atmosphere and the internal pressure thereof decreases, the high internal pressure P1 of the first furnace chamber 11 adjacent to the carry-in preparation chamber 10 becomes a “wall”, and the second furnace chamber 12 and later. The flow of atmospheric gas from the furnace chamber toward the carry-in preparation chamber 10 can be blocked. The action of blocking the flow of the atmospheric gas is naturally maintained even in the firing process.

これに加えて、取出準備室18に隣接する第7炉室17の内圧P7を、第7炉室17に隣接する第6炉室16の内圧P6よりも高く保ってあるから、焼結物42を取り出したことによって取出準備室18が大気開放され、その内圧が低下した場合でも、取出準備室18に隣接する第7炉室17の高い内圧P7が「壁」となって、第7炉室17より前の炉室から取出準備室18の方向へ向かう雰囲気ガスの流れが生じるのを遮断する。この焼成工程においても、雰囲気ガスの流れを遮断する作用は、当然に維持される。   In addition, since the internal pressure P7 of the seventh furnace chamber 17 adjacent to the extraction preparation chamber 18 is kept higher than the internal pressure P6 of the sixth furnace chamber 16 adjacent to the seventh furnace chamber 17, the sintered product 42 Even when the extraction preparation chamber 18 is opened to the atmosphere by removing the gas, and the internal pressure thereof decreases, the high internal pressure P7 of the seventh furnace chamber 17 adjacent to the extraction preparation chamber 18 becomes a “wall”, and the seventh furnace chamber The flow of atmospheric gas from the furnace chamber before 17 toward the extraction preparation chamber 18 is blocked. Even in this firing step, the action of blocking the flow of the atmospheric gas is naturally maintained.

結局、第2炉室12〜第6炉室16の列では、両側の第1炉室11及び第7炉室17の高い内圧P1、P7が「壁」となって、雰囲気ガスの炉室間流通が生じないように封じこめられることになる。この結果、中間部の炉室又は炉室群によって構成される焼成安定部の雰囲気ガス成分比、内圧の変動が抑制され、安定した特性を持つ焼結物が得られることになる。   After all, in the row of the second furnace chamber 12 to the sixth furnace chamber 16, the high internal pressures P1 and P7 of the first furnace chamber 11 and the seventh furnace chamber 17 on both sides become “walls”, and the atmosphere gas between the furnace chambers It will be sealed so that no distribution occurs. As a result, fluctuations in the atmospheric gas component ratio and internal pressure of the firing stable part constituted by the furnace room or furnace room group in the intermediate part are suppressed, and a sintered product having stable characteristics can be obtained.

実施例において、従来と同様に、被焼結物搬入側及び焼結物取出側に、内部空気がN2ガスで置換される搬入準備室10及び取出準備室18を有する。従って、従来と同様に、搬入準備室10と、隣接する第1炉室11とをシャッタ101によって閉じるとともに、被焼結物41を搬入準備室10に搬入したことによって入った空気を、N2ガスによって置換し、その後、シャッタ101を開いて、被焼結物41を、搬入準備室10から第1炉室11の内部に送り込むことができる。 In the embodiment, as in the prior art, the carry-in preparation chamber 10 and the take-out preparation chamber 18 in which the internal air is replaced with N 2 gas are provided on the workpiece import side and the sintered product take-out side. Therefore, as in the prior art, the carry-in preparation chamber 10 and the adjacent first furnace chamber 11 are closed by the shutter 101, and the air that has entered by bringing the object to be sintered 41 into the carry-in preparation chamber 10 is N 2. After the replacement with the gas, the shutter 101 can be opened, and the object to be sintered 41 can be sent into the first furnace chamber 11 from the carry-in preparation chamber 10.

焼成後に焼結物42を取り出す際には、予め、不活性ガスで満たした取出準備室18の内部に焼結物42を取り込み、次に一定の冷却時間を置いて、第7炉室17と取出準備室18との間に設けられたシャッタ181を閉じ、この状態で、焼結物42を取出準備室18から外部に取り出す。その後、焼結物取出操作に伴って取出準備室18内に入った空気を、不活性ガスで置換することができる。従って、搬入及び取出時に、炉室の雰囲気が擾乱されないようにし、炉室の雰囲気擾乱による焼結体の特性変動を抑制することができる。   When the sintered product 42 is taken out after firing, the sintered product 42 is taken into the take-out preparation chamber 18 filled with an inert gas in advance, and after a certain cooling time, The shutter 181 provided between the take-out preparation chamber 18 is closed, and in this state, the sintered product 42 is taken out from the take-out preparation chamber 18. Thereafter, the air that has entered the extraction preparation chamber 18 in accordance with the sintered product extraction operation can be replaced with an inert gas. Therefore, at the time of carrying in and taking out, it is possible to prevent the atmosphere of the furnace chamber from being disturbed, and to suppress the characteristic fluctuation of the sintered body due to the atmosphere disturbance of the furnace chamber.

しかも、搬入準備室10に搬入された未焼成物41を、第1炉室11〜第7炉室17に送って焼成し、焼結物を取出準備室18から取り出す構成であるから、第1炉室11〜第7炉室17の雰囲気制御によるゾーン制御が可能である。ゾーン制御によれば、例えば、第1炉室11〜第7炉室17において、N2ガスとO2ガスの混合比及び昇温特性を個別的に選択制御し、焼成過程に応じた柔軟な雰囲気制御及び温度制御を行うことができ、これにより、優れた特性の焼結体42を得ることができる。 Moreover, since the unfired product 41 carried into the carry-in preparation chamber 10 is sent to the first furnace chamber 11 to the seventh furnace chamber 17 and fired, the sintered product is taken out from the take-out preparation chamber 18. Zone control by atmosphere control of the furnace chamber 11 to the seventh furnace chamber 17 is possible. According to the zone control, for example, in the first furnace chamber 11 to the seventh furnace chamber 17, the mixing ratio and the temperature rise characteristic of N 2 gas and O 2 gas are individually selected and controlled, and flexible according to the firing process. Atmosphere control and temperature control can be performed, whereby a sintered body 42 with excellent characteristics can be obtained.

図1に示す例では、搬入準備室10の内圧P0が第1炉室11の内圧P1よりも高くなっており、また、取出準備室18の内圧P8も、第7炉室17の内圧P7よりも高くなっている。この内圧分布によれば、第1炉室11〜第7炉室17の炉室列では、両側の搬入準備室10及び取出準備室18の高い内圧P0、P8が「壁」となって、雰囲気ガスの炉室間流通が生じないように封じこめられることになる。   In the example shown in FIG. 1, the internal pressure P0 of the carry-in preparation chamber 10 is higher than the internal pressure P1 of the first furnace chamber 11, and the internal pressure P8 of the extraction preparation chamber 18 is also higher than the internal pressure P7 of the seventh furnace chamber 17. Is also high. According to this internal pressure distribution, in the furnace chamber rows of the first furnace chamber 11 to the seventh furnace chamber 17, the high internal pressures P0 and P8 of the loading preparation chamber 10 and the extraction preparation chamber 18 on both sides become “walls”, and the atmosphere It will be sealed so that gas does not flow between furnace chambers.

もっとも、本発明において選択された焼成炉内圧分布は、雰囲気ガスが炉室間で流通しないように封じ込めることにその目的があるから、この目的が達成される限り、図1に示すような内圧分布に限定される必要はない。そのような代表例を図2、図3に例示する。図2及び図3において、図1に現れた構成部分と対応する部分については、同一の参照符号を付し、重複説明はこれを省略する。   However, the firing furnace internal pressure distribution selected in the present invention has the purpose of containing the atmospheric gas so that it does not flow between the furnace chambers. Therefore, as long as this purpose is achieved, the internal pressure distribution as shown in FIG. It is not necessary to be limited to. Such representative examples are illustrated in FIGS. 2 and 3, parts corresponding to those shown in FIG. 1 are denoted by the same reference numerals, and redundant description is omitted.

まず、図2では、搬入準備室10の内圧P0が、第1炉室11の内圧P1よりも低くなっており、取出準備室18の内圧P8も第7炉室17の内圧P7よりも低くなっているが、第1炉室11の内圧P1は、第2炉室12の内圧P2よりも高くなっており、第7炉室17の内圧P7も、第6炉室16の内圧P6よりも高くなっている。従って、第2炉室12〜第6炉室16の炉室列では、両側の第1炉室11及び第7炉室17の高い内圧P1、P7が「壁」となって、雰囲気ガスの炉室間流通が生じないように封じこめられる。   First, in FIG. 2, the internal pressure P0 of the carry-in preparation chamber 10 is lower than the internal pressure P1 of the first furnace chamber 11, and the internal pressure P8 of the extraction preparation chamber 18 is also lower than the internal pressure P7 of the seventh furnace chamber 17. However, the internal pressure P1 of the first furnace chamber 11 is higher than the internal pressure P2 of the second furnace chamber 12, and the internal pressure P7 of the seventh furnace chamber 17 is also higher than the internal pressure P6 of the sixth furnace chamber 16. It has become. Therefore, in the furnace chamber rows of the second furnace chamber 12 to the sixth furnace chamber 16, the high internal pressures P1 and P7 of the first furnace chamber 11 and the seventh furnace chamber 17 on both sides become “walls”, and the furnace of the atmospheric gas It is sealed so that circulation between rooms does not occur.

次に、図3では、第2炉室12と第6炉室16との間に、これらの内圧P2、P6よりも高い内圧P4を有する第4炉室を含んでいる。この場合も、第1炉室11及び第7炉室17の内圧P1、P2が、第2炉室12及び第6炉室16の内圧P2、P6よりも高いという条件が満たされる限り、焼成工程において、焼結物の特性に影響を与えるほどの大きな雰囲気ガス流を生じない。   Next, in FIG. 3, a fourth furnace chamber having an internal pressure P4 higher than these internal pressures P2 and P6 is included between the second furnace chamber 12 and the sixth furnace chamber 16. Also in this case, as long as the conditions that the internal pressures P1, P2 of the first furnace chamber 11 and the seventh furnace chamber 17 are higher than the internal pressures P2, P6 of the second furnace chamber 12 and the sixth furnace chamber 16, the firing process is satisfied. Therefore, an atmosphere gas flow that is large enough to affect the properties of the sintered product is not generated.

内圧は、(ガス供給量/時間)と(ガス排気量/時間)の関係を調整することによって制御される。内圧は、結局は、雰囲気ガス供給量雰囲気ガス排気量とのバランスによって決まるからである。   The internal pressure is controlled by adjusting the relationship between (gas supply amount / time) and (gas exhaust amount / time). This is because the internal pressure is ultimately determined by the balance with the atmospheric gas supply amount and the atmospheric gas exhaust amount.

内圧は、第1炉室11〜第7炉室17の全てにおいて調整してもよいが、本発明の目的からは、内圧は、少なくとも、第1炉室11及び第7炉室17において調整される必要がある。   The internal pressure may be adjusted in all of the first furnace chamber 11 to the seventh furnace chamber 17, but for the purposes of the present invention, the internal pressure is adjusted at least in the first furnace chamber 11 and the seventh furnace chamber 17. It is necessary to

以上、好ましい実施例を参照して本発明を詳細に説明したが、本発明はこれらに限定されるものではなく、当業者であれば、その基本的技術思想および教示に基づき、種々の変形例を想到できることは自明である。   The present invention has been described in detail with reference to the preferred embodiments. However, the present invention is not limited to these embodiments, and various modifications can be made by those skilled in the art based on the basic technical idea and teachings. It is self-evident that

本発明に係る焼成装置の概略的な構成と、焼成炉制御方法とを示す図であって、上半部(A)は焼成装置の構成を示し、下半部(B)は制御方法に関連する位置−圧力(内圧)との関係を示すグラフである。It is a figure which shows the schematic structure of the baking apparatus which concerns on this invention, and a baking furnace control method, Comprising: The upper half part (A) shows the structure of a baking apparatus, and the lower half part (B) is related to the control method It is a graph which shows the relationship with the position-pressure (internal pressure) to do. 発明に係る焼成装置の概略的な構成と、焼成炉制御方法の別の例を示す図であって、上半部(A)は焼成装置の構成を示し、下半部(B)は制御方法に関連する位置−圧力(内圧)との関係を示すグラフである。It is a figure which shows the schematic structure of the baking apparatus which concerns on invention, and another example of the baking furnace control method, Comprising: The upper half part (A) shows the structure of a baking apparatus, and the lower half part (B) is a control method It is a graph which shows the relationship with the position-pressure (internal pressure) relevant to. 発明に係る焼成装置の概略的な構成と、焼成炉制御方法の更に別の例を示す図であって、上半部(A)は焼成装置の構成を示し、下半部(B)は制御方法に関連する位置−圧力(内圧)との関係を示すグラフである。It is a figure which shows another example of the schematic structure of the baking apparatus which concerns on invention, and a baking furnace control method, Comprising: The upper half part (A) shows the structure of a baking apparatus, and the lower half part (B) is control It is a graph which shows the relationship with the position-pressure (internal pressure) relevant to a method.

符号の説明Explanation of symbols

1 焼成炉
10 搬入準備室
11〜17 第1炉室〜第7炉室
18 取出準備室
20、28、(211、212)〜(271、272)
ガス供給装置
30〜38 ガス排出装置
1 Firing furnace
10 Import preparation room
11-17 First furnace chamber-seventh furnace chamber
18 Preparation room
20, 28, (211, 212) to (271, 272)
Gas supply device
30-38 gas discharge device

Claims (11)

焼成炉の炉圧を制御する焼成炉制御方法であって、
前記焼成炉は、未焼成物搬入用の搬入準備室と焼結物取出用の取出準備室との間に、複数nに区画された前記第1炉室〜第n炉室を有しており、
前記第1炉室〜第n炉室の内圧を大気圧よりも高く保ち、
前記搬入準備室に隣接する前記第1炉室の内圧を、前記第1炉室に隣接する前記第2炉室の内圧よりも高く保ち、
前記取出準備室に隣接する前記第n炉室の内圧を、前記第n炉室に隣接する前記第(n-1)炉室の内圧よりも高く保つ、
ステップを含む焼成炉制御方法。
A firing furnace control method for controlling the furnace pressure of a firing furnace,
The firing furnace includes the first furnace chamber to the nth furnace chamber divided into a plurality of n between a carry-in preparation chamber for carrying in the unfired material and a take-out preparation chamber for taking out the sintered product. ,
Keeping the internal pressure of the first to nth furnace chambers higher than atmospheric pressure,
Maintaining the internal pressure of the first furnace chamber adjacent to the carry-in preparation chamber higher than the internal pressure of the second furnace chamber adjacent to the first furnace chamber;
The internal pressure of the nth furnace chamber adjacent to the extraction preparation chamber is kept higher than the internal pressure of the (n-1) furnace chamber adjacent to the nth furnace chamber;
A firing furnace control method including steps.
請求項1に記載された焼成炉制御方法であって、前記第2炉室と前記第(n-1)炉室との間に、これらよりも高い内圧を有する第r炉室(rは自然数)を含む、焼成炉制御方法。   The firing furnace control method according to claim 1, wherein an r-th furnace chamber (r is a natural number) having an internal pressure higher than the second furnace chamber and the (n-1) furnace chamber. A firing furnace control method. 請求項1又は2に記載された焼成炉制御方法であって、前記内圧は、ガス供給量とガス排気量の関係を調整することによって制御される、焼成炉制御方法。   The firing furnace control method according to claim 1 or 2, wherein the internal pressure is controlled by adjusting a relationship between a gas supply amount and a gas exhaust amount. 請求項3に記載された焼成炉制御方法であって、前記内圧は、少なくとも、前記第1炉室及び第n炉室において調整される、焼成炉制御方法。   4. The firing furnace control method according to claim 3, wherein the internal pressure is adjusted at least in the first furnace chamber and the nth furnace chamber. 焼成炉を含む焼成装置であって、
前記焼成炉は、未焼成物搬入用の搬入準備室と焼結物取出用の取出準備室との間に、複数nに区画された前記第1炉室〜第n炉室を有しており、
前記第1炉室〜第n炉室は、内圧が大気圧よりも高く保たれ、
前記搬入準備室に隣接する前記第1炉室の内圧は、前記第1炉室に隣接する前記第2炉室の内圧よりも高く保たれ、
前記取出準備室に隣接する前記第n炉室の内圧は、前記第n炉室に隣接する前記第(n-1)炉室の内圧よりも高く保たれる、
焼成装置
A firing apparatus including a firing furnace,
The firing furnace includes the first furnace chamber to the nth furnace chamber divided into a plurality of n between a carry-in preparation chamber for carrying in the unfired material and a take-out preparation chamber for taking out the sintered product. ,
In the first to nth furnace chambers, the internal pressure is kept higher than the atmospheric pressure,
The internal pressure of the first furnace chamber adjacent to the carry-in preparation chamber is kept higher than the internal pressure of the second furnace chamber adjacent to the first furnace chamber;
The internal pressure of the nth furnace chamber adjacent to the extraction preparation chamber is kept higher than the internal pressure of the (n-1) furnace chamber adjacent to the nth furnace chamber.
Firing equipment
請求項5に記載された焼成装置であって、前記第2炉室と前記第(n-1)炉室との間に、これらよりも高い内圧を有する第r炉室(rは自然数)を含む、焼成装置。   The firing apparatus according to claim 5, wherein an r-th furnace chamber (r is a natural number) having an internal pressure higher than the second furnace chamber and the (n-1) furnace chamber. Including baking apparatus. 請求項5又は6に記載された焼成装置であって、ガス供給装置と、ガス排出装置とを含み、前記ガス供給装置によるガス供給量と、前記ガス排出装置によるガス排出量の関係を調整することによって、前記内圧を制御する、焼成装置。   The firing apparatus according to claim 5 or 6, comprising a gas supply device and a gas discharge device, and adjusting a relationship between a gas supply amount by the gas supply device and a gas discharge amount by the gas discharge device. By this, the baking apparatus which controls the said internal pressure. 請求項7に記載された焼成装置であって、前記内圧は、少なくとも、前記第1炉室及び第n炉室において調整される、焼成装置。   The firing apparatus according to claim 7, wherein the internal pressure is adjusted at least in the first furnace chamber and the nth furnace chamber. 焼成炉と、ガス供給装置と、ガス排出装置とを含む焼成装置であって、
前記焼成炉は、搬入準備室と、取出準備室と、炉室とを有しており、
前記搬入準備室は、被焼成物搬入側に配置され、内部空気を不活性ガスで置換するものであり、
前記取出準備室は、焼成物取出側に配置され、内部空気を不活性ガスで置換するものであり、
前記炉室は、複数nに区画された第1炉室〜第n炉室を有しており、
前記ガス供給装置及び前記ガス排出装置は、対となって、前記搬入準備室、前記取出準備室、前記第1炉室および第n炉室にそれぞれ備えられている、
焼成装置。
A firing device including a firing furnace, a gas supply device, and a gas discharge device,
The firing furnace has a carry-in preparation room, an extraction preparation room, and a furnace room,
The carry-in preparation chamber is arranged on the carry-in side of the object to be fired, and replaces the internal air with an inert gas.
The take-out preparation chamber is disposed on the fired product take-out side, and replaces the internal air with an inert gas.
The furnace chamber has a first furnace chamber to an nth furnace chamber divided into a plurality of n,
The gas supply device and the gas discharge device are provided in pairs in the carry-in preparation chamber, the take-out preparation chamber, the first furnace chamber, and the nth furnace chamber,
Firing equipment.
請求項9に記載された焼成装置であって、
前記第1炉室及び前記第2炉室に備えられた前記ガス供給装置は、不活性ガス及びO2ガスの混合比率を制御する機能を有する、焼成装置。
A firing apparatus according to claim 9, wherein
The gas supply device provided in the first furnace chamber and the second furnace chamber has a function of controlling a mixing ratio of an inert gas and an O 2 gas.
請求項9に記載された焼成装置であって、前記ガス供給装置及びガス排出装置は、前記第1炉室〜第n炉室に備えられている、焼成装置。   10. The firing apparatus according to claim 9, wherein the gas supply device and the gas discharge device are provided in the first furnace chamber to the n-th furnace chamber.
JP2008053749A 2008-03-04 2008-03-04 Baking furnace control method and baking apparatus Active JP5339029B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008053749A JP5339029B2 (en) 2008-03-04 2008-03-04 Baking furnace control method and baking apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008053749A JP5339029B2 (en) 2008-03-04 2008-03-04 Baking furnace control method and baking apparatus

Publications (2)

Publication Number Publication Date
JP2009210194A true JP2009210194A (en) 2009-09-17
JP5339029B2 JP5339029B2 (en) 2013-11-13

Family

ID=41183532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008053749A Active JP5339029B2 (en) 2008-03-04 2008-03-04 Baking furnace control method and baking apparatus

Country Status (1)

Country Link
JP (1) JP5339029B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITRE20090075A1 (en) * 2009-07-24 2011-01-25 Sacmi CONTINUOUS OVEN
CN115325819A (en) * 2022-08-15 2022-11-11 浙江长兴电子厂有限公司 Ceramic metallization sintering device

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5266809A (en) * 1975-12-01 1977-06-02 Daido Steel Co Ltd Furnace pressure controlling device for continuous heating furnace
JPS62112982A (en) * 1985-11-12 1987-05-23 石川島播磨重工業株式会社 Fiber calciner
JPS63187092A (en) * 1987-01-29 1988-08-02 日本碍子株式会社 Tunnel kiln, variation of kiln pressure of which is prevented
JPH0744824U (en) * 1995-02-03 1995-11-28 有限会社アール・アイ電子工業 Oxygen concentration extremely low atmosphere furnace
JP2001194071A (en) * 2000-01-06 2001-07-17 Mitsubishi Rayon Co Ltd Horizontal heat treatment apparatus for thread and heat treatment method therefor
JP2006071278A (en) * 2005-09-30 2006-03-16 Matsushita Electric Ind Co Ltd Burning furnace
JP2006145195A (en) * 2004-10-18 2006-06-08 Future Vision:Kk Substrate baking device
JP2007297647A (en) * 2006-04-27 2007-11-15 Aisin Seiki Co Ltd Heat-treatment apparatus and heat-treatment method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5266809A (en) * 1975-12-01 1977-06-02 Daido Steel Co Ltd Furnace pressure controlling device for continuous heating furnace
JPS62112982A (en) * 1985-11-12 1987-05-23 石川島播磨重工業株式会社 Fiber calciner
JPS63187092A (en) * 1987-01-29 1988-08-02 日本碍子株式会社 Tunnel kiln, variation of kiln pressure of which is prevented
JPH0744824U (en) * 1995-02-03 1995-11-28 有限会社アール・アイ電子工業 Oxygen concentration extremely low atmosphere furnace
JP2001194071A (en) * 2000-01-06 2001-07-17 Mitsubishi Rayon Co Ltd Horizontal heat treatment apparatus for thread and heat treatment method therefor
JP2006145195A (en) * 2004-10-18 2006-06-08 Future Vision:Kk Substrate baking device
JP2006071278A (en) * 2005-09-30 2006-03-16 Matsushita Electric Ind Co Ltd Burning furnace
JP2007297647A (en) * 2006-04-27 2007-11-15 Aisin Seiki Co Ltd Heat-treatment apparatus and heat-treatment method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITRE20090075A1 (en) * 2009-07-24 2011-01-25 Sacmi CONTINUOUS OVEN
EP2278244A1 (en) 2009-07-24 2011-01-26 Sacmi Cooperativa Meccanici Imola Societa' Cooperative Continuous kiln
CN115325819A (en) * 2022-08-15 2022-11-11 浙江长兴电子厂有限公司 Ceramic metallization sintering device
CN115325819B (en) * 2022-08-15 2023-09-12 浙江东瓷科技有限公司 Ceramic metallization sintering device

Also Published As

Publication number Publication date
JP5339029B2 (en) 2013-11-13

Similar Documents

Publication Publication Date Title
US6048199A (en) Tunnel kiln for firing ceramic honeycomb bodies
US7196297B2 (en) Process and system for thermally uniform materials processing
EP3901547A1 (en) Furnace for producing secondary battery positive electrode material and method for firing secondary battery positive electrode material
JP5339029B2 (en) Baking furnace control method and baking apparatus
KR101638844B1 (en) Kiln apparatus for firing electriceramic products be capable of improving productivity and yields
EP1439563A2 (en) Heat treatment method and heat treatment furnace for plasma display panel substrate
JP2018169137A (en) Heat treatment furnace
CN112179130B (en) Bell jar furnace with high-temperature uniformity
KR100440667B1 (en) Method of thermal treatment for substrates and the furnace for its continuous thermal treatment
JP2007198626A (en) Baking furnace
JPH0456707A (en) Continuous type vacuum furnace
JP2003123651A (en) Manufacturing method of plasma display panel and furnace equipment for the same
JP2007187374A (en) Continuous calcination furnace
CN104541118B (en) Heating furnace
CN111442641B (en) heat treatment furnace
JP2004354043A (en) Heat treatment method for substrate, and continuous heat treatment furnace used therefor
JP3218719B2 (en) Continuous firing furnace
WO2021130845A1 (en) Sintering furnace
CN111655641A (en) Apparatus and method for continuous thermal treatment of pharmaceutical glass containers
KR100415166B1 (en) Manufacturing Furnace for Ceramic Elctronic Components
JPH0544713Y2 (en)
KR102192069B1 (en) Sinterring furnace for ceramic electronic-parts
US20240167766A1 (en) A kiln for firing ceramic slabs
JP7319219B2 (en) Continuous firing furnace
KR20230022092A (en) Firing furnace

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110131

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110330

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110506

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120208

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120409

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121010

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121130

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130508

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130620

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130710

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130723

R150 Certificate of patent or registration of utility model

Ref document number: 5339029

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150