JP2009204916A - 2軸駆動装置及び光偏向装置 - Google Patents

2軸駆動装置及び光偏向装置 Download PDF

Info

Publication number
JP2009204916A
JP2009204916A JP2008047468A JP2008047468A JP2009204916A JP 2009204916 A JP2009204916 A JP 2009204916A JP 2008047468 A JP2008047468 A JP 2008047468A JP 2008047468 A JP2008047468 A JP 2008047468A JP 2009204916 A JP2009204916 A JP 2009204916A
Authority
JP
Japan
Prior art keywords
magnet
driven member
support pin
coil
pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008047468A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009204916A5 (enExample
Inventor
Masashi Ishii
真史 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2008047468A priority Critical patent/JP2009204916A/ja
Publication of JP2009204916A publication Critical patent/JP2009204916A/ja
Publication of JP2009204916A5 publication Critical patent/JP2009204916A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Brushless Motors (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
JP2008047468A 2008-02-28 2008-02-28 2軸駆動装置及び光偏向装置 Withdrawn JP2009204916A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008047468A JP2009204916A (ja) 2008-02-28 2008-02-28 2軸駆動装置及び光偏向装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008047468A JP2009204916A (ja) 2008-02-28 2008-02-28 2軸駆動装置及び光偏向装置

Publications (2)

Publication Number Publication Date
JP2009204916A true JP2009204916A (ja) 2009-09-10
JP2009204916A5 JP2009204916A5 (enExample) 2011-01-27

Family

ID=41147250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008047468A Withdrawn JP2009204916A (ja) 2008-02-28 2008-02-28 2軸駆動装置及び光偏向装置

Country Status (1)

Country Link
JP (1) JP2009204916A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015533652A (ja) * 2012-09-14 2015-11-26 トルンプフ レーザー マーキング システムズ アクチエンゲゼルシャフトTRUMPF Laser Marking Systems AG レーザ加工装置
CN112558289A (zh) * 2019-09-25 2021-03-26 日本电产株式会社 光学元件以及光扫描装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015533652A (ja) * 2012-09-14 2015-11-26 トルンプフ レーザー マーキング システムズ アクチエンゲゼルシャフトTRUMPF Laser Marking Systems AG レーザ加工装置
US10386631B2 (en) 2012-09-14 2019-08-20 Trumpf Schweiz Ag Laser machining device
CN112558289A (zh) * 2019-09-25 2021-03-26 日本电产株式会社 光学元件以及光扫描装置

Similar Documents

Publication Publication Date Title
JP4864981B2 (ja) 可動小型プラットフォームを作動させるためのシステム、方法、及び装置
US6424068B2 (en) Galvano mirror unit
CN101908816A (zh) 弯曲制动器
CN112014827A (zh) 物体检测装置
EP2157441A1 (en) Optical scanning type sensor
EP0268311A1 (en) Electro-optical scanning device
JP2009204916A (ja) 2軸駆動装置及び光偏向装置
US20020150324A1 (en) Optical switch and servo mechanism
JP3976683B2 (ja) 表面配向方法および装置
KR20060124079A (ko) 스캐닝 마이크로미러 및 전자력 구동 2축 스캐닝마이크로미러 디바이스
JP2009204458A (ja) エンコーダ
JP3625207B2 (ja) 光学手段駆動装置
US20030190116A1 (en) Zero static power optical switch
JPH0981947A (ja) 光ディスク装置の対物レンズ駆動装置と対物レンズ
JP4757573B2 (ja) 2軸型アクチュエータ及びこれを用いたホログラフィー装置
KR20050083892A (ko) 회전 광학장치
US6376953B1 (en) Galvano mirror unit
US20240371558A1 (en) Actuator and optical device
JP2014074639A (ja) エンコーダ、駆動装置及びロボット装置
JP2619874B2 (ja) 光ビーム走査用スキャナー
CN1682287A (zh) 光盘装置
JP2006500709A (ja) 光ディスク装置
JP2009116080A (ja) 露光方法及び露光装置
KR950004702Y1 (ko) 광 픽업의 광축 조정장치
JP5099021B2 (ja) 光走査装置、非接触光走査制御機構および画像形成装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101203

A621 Written request for application examination

Effective date: 20101203

Free format text: JAPANESE INTERMEDIATE CODE: A621

A761 Written withdrawal of application

Effective date: 20110309

Free format text: JAPANESE INTERMEDIATE CODE: A761