JP2009204916A5 - - Google Patents

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Publication number
JP2009204916A5
JP2009204916A5 JP2008047468A JP2008047468A JP2009204916A5 JP 2009204916 A5 JP2009204916 A5 JP 2009204916A5 JP 2008047468 A JP2008047468 A JP 2008047468A JP 2008047468 A JP2008047468 A JP 2008047468A JP 2009204916 A5 JP2009204916 A5 JP 2009204916A5
Authority
JP
Japan
Prior art keywords
driven member
magnet
support pin
drive device
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008047468A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009204916A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008047468A priority Critical patent/JP2009204916A/ja
Priority claimed from JP2008047468A external-priority patent/JP2009204916A/ja
Publication of JP2009204916A publication Critical patent/JP2009204916A/ja
Publication of JP2009204916A5 publication Critical patent/JP2009204916A5/ja
Withdrawn legal-status Critical Current

Links

JP2008047468A 2008-02-28 2008-02-28 2軸駆動装置及び光偏向装置 Withdrawn JP2009204916A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008047468A JP2009204916A (ja) 2008-02-28 2008-02-28 2軸駆動装置及び光偏向装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008047468A JP2009204916A (ja) 2008-02-28 2008-02-28 2軸駆動装置及び光偏向装置

Publications (2)

Publication Number Publication Date
JP2009204916A JP2009204916A (ja) 2009-09-10
JP2009204916A5 true JP2009204916A5 (enExample) 2011-01-27

Family

ID=41147250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008047468A Withdrawn JP2009204916A (ja) 2008-02-28 2008-02-28 2軸駆動装置及び光偏向装置

Country Status (1)

Country Link
JP (1) JP2009204916A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2708308A1 (de) 2012-09-14 2014-03-19 Trumpf Laser Marking Systems AG Laserbearbeitungsvorrichtung
JP2021051219A (ja) * 2019-09-25 2021-04-01 日本電産株式会社 光学素子および光走査装置

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