JP2009204495A5 - - Google Patents

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Publication number
JP2009204495A5
JP2009204495A5 JP2008047829A JP2008047829A JP2009204495A5 JP 2009204495 A5 JP2009204495 A5 JP 2009204495A5 JP 2008047829 A JP2008047829 A JP 2008047829A JP 2008047829 A JP2008047829 A JP 2008047829A JP 2009204495 A5 JP2009204495 A5 JP 2009204495A5
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JP
Japan
Prior art keywords
displacement amount
displacement
amount
measurement object
motor
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JP2008047829A
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English (en)
Japanese (ja)
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JP5014197B2 (ja
JP2009204495A (ja
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Priority to JP2008047829A priority Critical patent/JP5014197B2/ja
Priority claimed from JP2008047829A external-priority patent/JP5014197B2/ja
Publication of JP2009204495A publication Critical patent/JP2009204495A/ja
Publication of JP2009204495A5 publication Critical patent/JP2009204495A5/ja
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Publication of JP5014197B2 publication Critical patent/JP5014197B2/ja
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JP2008047829A 2008-02-28 2008-02-28 変位量検出装置及びそれを利用した装置、変位量検出方法 Active JP5014197B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008047829A JP5014197B2 (ja) 2008-02-28 2008-02-28 変位量検出装置及びそれを利用した装置、変位量検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008047829A JP5014197B2 (ja) 2008-02-28 2008-02-28 変位量検出装置及びそれを利用した装置、変位量検出方法

Publications (3)

Publication Number Publication Date
JP2009204495A JP2009204495A (ja) 2009-09-10
JP2009204495A5 true JP2009204495A5 (enExample) 2011-01-27
JP5014197B2 JP5014197B2 (ja) 2012-08-29

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ID=41146920

Family Applications (1)

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JP2008047829A Active JP5014197B2 (ja) 2008-02-28 2008-02-28 変位量検出装置及びそれを利用した装置、変位量検出方法

Country Status (1)

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JP (1) JP5014197B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014174614A1 (ja) * 2013-04-24 2014-10-30 三菱電機株式会社 サーボモータおよびエンコーダ
JP7664719B2 (ja) * 2021-03-12 2025-04-18 株式会社ミツトヨ 位置測定装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3195117B2 (ja) * 1993-04-19 2001-08-06 株式会社トプコン ロータリエンコーダ
JP3221161B2 (ja) * 1993-06-22 2001-10-22 富士ゼロックス株式会社 回転部材駆動装置の故障検知装置
JP4716463B2 (ja) * 2000-09-14 2011-07-06 ハイデンハイン株式会社 多回転型絶対値エンコーダ
JP2007024636A (ja) * 2005-07-14 2007-02-01 Sony Corp 検出装置および方法、走査装置および方法、並びにプログラム

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