JP2009191873A - Rolling sliding member and rolling device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a rolling sliding member and a rolling device capable of being suitably used even under the conditions that a large contact stress is applied, slip occurs and lubrication is not provided. <P>SOLUTION: A lubricating coating L is coated on a base material of an inner ring 1, an outer ring 2, and balls 3 in a contact surface of the inner ring 1, the outer ring 2 and the balls 3 of a thrust ball bearing. The lubricating coating L is made up of a diamond-like carbon layer D, an intermediate layer M, and a metallic layer K. The layers are arranged in order of the diamond-like carbon layer D, the intermediate layer M, and the metal layer K from a surface side toward the base material. The intermediate layer M is composed of at least one of silicon, germanium, and tellurium and is amorphous. The metal layer K is composed of at least one of chromium, titanium, nickel, molybdenum, copper, tungsten, and cobalt. Furthermore, an equivalent elastic constant of the lubricating coating L is no less than 100 GPa and no more than 280 GPa. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a rolling sliding member having excellent lubricity and a rolling device composed of the rolling sliding member, and in particular, under conditions where a large contact stress is applied or a large slip is generated or under unlubricated conditions. In particular, the present invention relates to a rolling sliding member and a rolling device that can be suitably used.

Diamond-like carbon (hereinafter sometimes referred to as DLC) has a hardness similar to that of diamond, and its sliding resistance is as low as 0.2 or less, like molybdenum disulfide and fluororesin. Therefore, it has been conventionally used as a lubricating material.
For example, in a magnetic disk device, by forming a DLC film of several tens of angstroms on the surface of the magnetic element or the magnetic disk, the lubricity between the magnetic element and the magnetic disk is improved to protect the surface of the magnetic disk. Yes.

On the other hand, DLC has attracted attention as a new lubricating material for rolling and sliding members due to the unique surface properties as described above, and has recently been used to impart lubricity to bearings.
For example, Patent Document 1 discloses a rolling bearing including a DLC film containing metal on the raceway surface of a raceway or the surface of a rolling element. In this rolling bearing, the contact stress is relieved by the DLC film.

In addition, a rolling bearing having a DLC film formed on the raceway surface of the race ring or the surface of the rolling element by CVD method, plasma CVD method, ion beam forming method, ionized vapor deposition method, sputtering method using non-equilibrium magnetron, etc. A rolling device is known (see, for example, Patent Documents 2 to 7).
International Publication No. WO99 / 14512 Japanese Patent Laid-Open No. 9-147464 JP 2000-136828 A JP 2000-205277 A JP 2000-205279 A JP 2000-205280 A JP 2003-56575 A Japanese Patent Laid-Open No. 11-10061 JP 2001-62605 A JP 2007-160506 A

According to the technique described in Patent Document 7, damage to the DLC film due to repeated stress and peeling of the DLC film from the base material are unlikely to occur. Although it can be used under low or non-lubricated conditions, further improvement is desired in consideration of use under conditions where a larger contact stress acts or slip occurs.
The following two points can be considered as causes of the above damage.

  First, the first point is a problem of embrittlement of the metal intermediate layer interposed in order to improve the adhesion between the steel and the DLC film. That is, since the metal constituting the metal intermediate layer and the carbon constituting the DLC film are combined to produce brittle metal carbide, the metal intermediate layer becomes brittle and the DLC film is easily damaged. And when a metal intermediate layer is comprised with 1 type of metal, since the brittleness of a metal carbide is large, it is easy to become a factor of a failure | damage.

The second problem is that the DLC film has a property of being hardly deformed even when stress is applied. Since DLC is hard and highly elastic, if it is covered with a metal material having a small equivalent elastic constant such as stainless steel or bearing steel, the DLC follows the deformation of the base material due to the difference in the equivalent elastic constant between the two. In some cases, the DLC film may be damaged.
Further, if the adhesion at the interface between the base material and the DLC film is insufficient, the entire DLC film may be peeled off from the base material.
Accordingly, the present invention solves the above-mentioned problems of the prior art, and is a rolling sliding member that can be suitably used even under conditions in which a large contact stress acts or slipping occurs or under no lubrication. It is an issue to provide. Another object of the present invention is to provide a rolling device having such a rolling sliding member and having excellent lubricity.

In order to solve the above problems, the present invention has the following configuration. That is, the rolling sliding member of claim 1 according to the present invention is characterized by satisfying the following five conditions in a rolling sliding member in which relative rolling contact or sliding contact occurs with a counterpart member. To do.
Condition 1: On the contact surface with the mating member, a steel base material is covered with a lubricating coating.
Condition 2: The lubricating coating is composed of a diamond-like carbon layer, an intermediate layer, and a metal layer. The diamond-like carbon layer, the intermediate layer, and the metal layer are arranged in this order from the surface side toward the base material. Has been.

Condition 3: The intermediate layer is made of at least one of silicon, germanium, and tellurium, and is amorphous.
Condition 4: The metal layer is made of at least one of chromium, titanium, nickel, molybdenum, copper, tungsten, and cobalt.
Condition 5: The lubricating film has an equivalent elastic constant of 100 GPa to 280 GPa. The rolling sliding member according to claim 2 of the present invention is the rolling sliding member according to claim 1, wherein the intermediate layer is composed of at least one of silicon, germanium, and tellurium and carbon. It is characterized by being amorphous.

  In such a rolling sliding member, a steel base material and a metal layer, a metal layer and an intermediate layer, an intermediate layer and a diamond-like carbon layer (hereinafter sometimes referred to as a DLC layer) each have good adhesion. Since it shows, the adhesiveness of the DLC layer excellent in lubricity and the steel base material is excellent. Further, since the intermediate layer has no crystal plane orientation or directionality, it has high strength against vertical load and shear applied to the lubricating coating during rolling contact.

In addition, since the equivalent elastic constant of the lubricating coating is 100 GPa or more and 280 GPa or less and the lubricating coating has an equivalent elastic constant close to that of the base material, the lubricating coating follows the deformation of the base material even when repeated stress is applied. This makes it possible to prevent damage to the lubricating coating.
If the equivalent elastic constant of the lubricating coating exceeds 280 GPa, the equivalent elastic constant of the lubricating coating is too much larger than that of steel, making it difficult for the lubricating coating to follow the deformation of the base material when a repeated stress is applied. The lubricant film is easily damaged. On the other hand, if it is less than 100 GPa, the lubricating film has a low hardness and wear tends to occur.

  As described above, since the rolling sliding member of the present invention has a lubricating coating that is not easily damaged even when a large contact stress is applied, a device (for example, a rolling bearing such as a rolling bearing) on which the large contact stress is applied. It is possible to apply suitably to the member etc. which comprise a moving apparatus). In addition, since it has excellent lubricity, it can be suitably used even without lubrication. In addition, there is little seizure, wear and heat generation, and it is strong against repeated stress and has a long life.

For a thin film such as this lubricating coating, the elastic constant cannot be measured by a normal method. Therefore, in the present invention, an equivalent elastic constant based on the elastic constant measured by the following method is used. That is, the indentation depth is at least within the thickness of the lubricating coating, measurement is performed with a microhardness meter, and the equivalent elastic constant is obtained from the obtained load-unloading curve.
For example, when the thickness of the lubricating coating is 2 μm or less, the indentation load is appropriately set between 0.4 to 50 mN and the measurement is performed. In the present invention, an equivalent elastic constant measured using a micro hardness tester manufactured by Elionix Co., Ltd. and an indentation load of 50 mN is used.

  As another method for measuring the equivalent elastic constant, there is a method using a micro hardness measuring device manufactured by Fischer. In this method, it is desirable not to use a (micro) Vickers hardness tester but to use a micro hardness tester or a nano indentator that can be controlled by capacitance. In addition, the indentation depth must be within the thickness of the lubricating coating. And an equivalent elastic constant is calculated | required from the amount of elastic deformation of the load-unloading curve obtained by the said micro hardness meter or the nano indentator.

In addition, when the equivalent elastic constant of the surface of the high carbon chromium steel (SUJ2) of HRC60 is calculated | required by said method, it will be 250 GPa and will be a result larger than 210 GPa normally described in the catalog etc. This is because the above method is a measurement in a minute indentation region, and is therefore influenced by the work hardening layer on the surface of SUJ2.
Furthermore, the rolling sliding member of claim 3 according to the present invention is the rolling sliding member of claim 1 or claim 2, wherein the lubricating coating is formed by sputtering using a non-equilibrium magnetron. It is characterized by being.

Such a physical film-forming method is easy to obtain a lubricating film having a suitable equivalent elastic constant and strength as compared with CVD method, plasma CVD method, ion beam forming method, ionized vapor deposition method, etc. It is suitable for a part constituting a device such as a device on which large contact stress acts.
Furthermore, the rolling device according to claim 4 of the present invention includes an inner member having a raceway surface on the outer surface and a raceway surface facing the raceway surface of the inner member on the inner surface, and the outer side of the inner member. In the rolling device comprising an outer member disposed on the rolling surface and a rolling element disposed so as to be able to roll between the both raceway surfaces, at least one of the inner member, the outer member, and the rolling element. One is the rolling sliding member according to any one of claims 1 to 3.

With such a configuration, the lubricating coating of the rolling sliding member constituting the rolling device is not easily damaged even when a large contact stress is applied. Long life even when used.
Examples of the rolling device of the present invention include a rolling bearing, a linear motion guide bearing (linear guide device), a ball screw, and a linear motion bearing.

  The inner member is an inner ring in the case where the rolling device is a rolling bearing, a guide rail in the case of a linear guide bearing, a screw shaft in the case of a ball screw, and a shaft in the case of a linear bearing. Each means. In addition, the outer member is an outer ring when the rolling device is a rolling bearing, a slider when the same is a linear guide bearing, a nut when it is a ball screw, and an outer cylinder when it is also a linear bearing. means.

  The rolling sliding member and rolling device of the present invention are less likely to cause peeling or breakage of the lubricating coating even under conditions where large contact stress acts or large slippage occurs or under non-lubricated conditions. Since it is difficult for abrasion to occur, it can be suitably used.

Embodiments of a rolling sliding member and a rolling device according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a longitudinal sectional view showing a configuration of a thrust ball bearing which is an embodiment of a rolling device according to the present invention, and FIG. 2 is a partially enlarged sectional view showing an enlarged portion A of FIG. is there.
The thrust ball bearing shown in FIG. 1 includes an inner ring 1 having a raceway surface 1a, an outer ring 2 having a raceway surface 2a opposite to the raceway surface 1a, and a plurality of balls arranged so as to roll between the raceway surfaces 1a and 2a. 3 and a cage 4 that holds a plurality of balls 3 equally between the raceway surfaces 1a and 2a in the circumferential direction of the bearing.

The inner ring 1, the outer ring 2, and the ball 3 are made of steel such as SUJ2. The dimensions of the inner ring 1 and the outer ring 2 are an inner diameter of 25 mm, an outer diameter of 52 mm, and a thickness of 18 mm, and the cross-sectional shape of the raceway surfaces 1 a and 2 a is an arc shape having a curvature radius of 54% of the diameter of the ball 3.
The inner ring 1, the outer ring 2 and the ball 3 are in rolling contact or sliding contact with each other, and the raceway surface 1a of the inner ring 1, the raceway surface 2a of the outer ring 2, and the rolling surface 3a of the ball 3 correspond to the contact surfaces. . On these contact surfaces, the base material of the inner ring 1, the outer ring 2, and the ball 3 is covered with a lubricating coating L having lubricity. The lubricating coating L may be coated on the surface of the cage 4 where the inner ring 1, the outer ring 2 and the ball 3 are in contact with each other.

  Further, as shown in FIG. 2, the lubricating film L is composed of a diamond-like carbon (DLC) layer D, an intermediate layer M, and a metal layer K, and the DLC layer D, The intermediate layer M and the metal layer K are arranged in this order. The intermediate layer M is made of at least one of silicon (Si), germanium (Ge), and tellurium (Te), and is amorphous. The metal layer K is composed of at least one of chromium (Cr), titanium (Ti), nickel (Ni), molybdenum (Mo), copper (Cu), tungsten (W), and cobalt (Co). ing. The equivalent elastic constant of the lubricating coating L is 100 GPa or more and 280 GPa or less. Here, the amorphous intermediate layer M may be composed of at least one of silicon, germanium, and tellurium, carbon, and (C).

  Note that the term “amorphous” means that there is no peak indicating the lattice plane of the crystal by analysis using the X-ray diffraction method. FIG. 3 shows X-ray diffraction patterns of the crystalline body and the amorphous body. FIG. 3A shows an X-ray diffraction pattern of a tungsten film formed on a SUJ2 substrate by a sputtering method, and it can be seen that a plurality of lattice planes exist and it is crystalline. On the other hand, FIG. 3B is an X-ray diffraction pattern of a carbon film (diamond-like carbon film) produced on a SUJ2 substrate by a sputtering method. A peak indicating carbon constituting the film cannot be confirmed. This shows that this carbon film is amorphous.

  Here, a method for forming the lubricating coating L will be described using the outer ring 2 as an example. The lubricating coating L may be formed not only on the outer ring 2 but also on the inner ring 1, the balls 3 and the cage 4. First, the outer ring 2 from which oil has been degreased is installed in an unbalanced magnetron sputtering apparatus 504 (hereinafter referred to as a UBMS apparatus) manufactured by Kobe Steel, Ltd., and the bombarding treatment is performed on the raceway surface 2a using sputtering by argon plasma. Applied for 15 minutes.

  Then, using chromium as a target, a chromium layer was sputtered onto a portion of the surface of the base material that would become the raceway surface 2a to form a metal layer K. Next, sputtering using silicon and germanium as targets was performed to form an intermediate layer M made of amorphous silicon and germanium on the metal layer K. Further, sputtering using carbon as a target was performed to form a DLC layer D made of carbon on the intermediate layer M.

The lubricating film L thus obtained has an adhesion between the DLC layer D and the intermediate layer M, an adhesion between the intermediate layer M and the metal layer K, and an adhesion between the metal layer K and the base steel. Is very good.
In the above description, an example in which silicon and germanium are used as the elements constituting the intermediate layer M has been shown. However, tellurium may be used, or silicon and germanium may be used alone. Of course. Further, all of silicon, germanium, and tellurium may be used in combination. Further, at least one of silicon, germanium, and tellurium may be used in combination with carbon.

Furthermore, although the example which used chromium as an element which comprises the metal layer K was shown, of course, you may use titanium, nickel, molybdenum, copper, tungsten, or cobalt. Moreover, you may use together 2 or more types of elements among chromium, titanium, nickel, molybdenum, copper, tungsten, and cobalt.
When the intermediate layer M and the metal layer K are composed of two or more elements, sputtering may be performed using each as a target. In that case, by controlling the sputtering efficiency of both, it is possible to easily form an intermediate layer or a metal layer having a configuration in which the composition ratio of the two gradually changes.

The UBMS apparatus can be equipped with a plurality of targets used for sputtering, and can control the sputtering efficiency of each component arbitrarily by independently controlling the sputtering power source of each target. is there.
The equivalent elastic constant of the lubricating coating L can be changed by controlling the bias voltage applied to the outer ring 2 or controlling the partial pressure of the introduced gas. By controlling the type and partial pressure ratio of the introduced gas (hydrocarbon gas such as argon, hydrogen, methane, etc.), it is possible to freely control the sliding resistance of the surface as well as the equivalent elastic constant of the lubricating coating L. Therefore, the desired lubricating film L suitable for the purpose can be formed by introducing the gas alone or in combination. Furthermore, the thickness of the lubricating coating L and each layer (DLC layer D, intermediate layer M, and metal layer K) can be accurately controlled by the sputtering time.

In addition, this embodiment shows an example of this invention and this invention is not limited to this embodiment.
For example, in this embodiment, the lubricating coating L is formed by sputtering using a non-equilibrium magnetron, but a pulsed laser arc vapor deposition method, a plasma CVD method, or the like can also be used. However, sputtering using a non-equilibrium magnetron that can easily control the equivalent elastic constant, plastic deformation hardness, and the like is most preferable.

In the present embodiment, the thrust ball bearing has been described as an example, but the rolling device of the present invention can be applied to various rolling bearings. For example, there are radial type rolling bearings such as deep groove ball bearings, angular ball bearings, cylindrical roller bearings, tapered roller bearings, needle roller bearings, and self-aligning roller bearings, and thrust type rolling bearings such as thrust roller bearings.
Further, in the present embodiment, the rolling bearing is exemplified as the rolling device, but the rolling device of the present invention can be applied to various other types of rolling devices. For example, the present invention can be suitably applied to other rolling devices such as a linear motion guide bearing (linear guide device), a ball screw, and a linear motion bearing.

〔Example〕
Hereinafter, the present invention will be described more specifically with reference to examples. A bearing having the same configuration as the thrust ball bearing of FIG. 1 is prepared by changing the types of elements constituting the intermediate layer and the metal layer and the equivalent elastic constant of the lubricating coating (see Table 1). Durability was investigated by testing. In this test, the lubricating coating was formed only on the raceway surfaces of the inner ring and the outer ring, and not on the rolling surface of the ball.

In the rotation test, the rotation of the bearing was interrupted every 24 hours and the lubricating film was observed to confirm whether the lubricating film was peeled off. When peeling did not occur, the rotation test was continued, and when peeling occurred, the life (peeling life) was determined. The rotation test is performed using a turbine oil having an ISO viscosity grade of ISO VG68 as a lubricant. The conditions of the rotation test are an axial load of 8820 N and a rotation speed of 1500 min ⁻¹ .

  The results of the rotation test are also shown in Table 1. In addition, the numerical value of the peeling life in Table 1 is shown as a relative value when the peeling life of Comparative Example 1 is 1. From the results in Table 1, it can be seen that the bearings of Examples 1 to 7 have a long life. The bearing of Comparative Example 1 had a short life because the equivalent elastic constant of the lubricating coating was too large. Further, the bearings of Comparative Examples 2 to 4 had a short life because the intermediate layer was crystalline.

It is a longitudinal section showing the composition of the thrust ball bearing which is one embodiment of the rolling device concerning the present invention. It is the elements on larger scale which expanded and showed the A section of FIG. 2 is an X-ray diffraction pattern of a crystalline body and an amorphous body.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inner ring 1a Raceway surface 2 Outer ring 2a Raceway surface 3 Ball 3a Rolling surface L Lubricant coating D Diamond-like carbon layer M Intermediate layer K Metal layer

Claims (4)

A rolling sliding member in which relative rolling contact or sliding contact occurs with a counterpart member, wherein the following five conditions are satisfied:
Condition 1: On the contact surface with the mating member, a steel base material is covered with a lubricating coating.
Condition 2: The lubricating coating is composed of a diamond-like carbon layer, an intermediate layer, and a metal layer. The diamond-like carbon layer, the intermediate layer, and the metal layer are arranged in this order from the surface side toward the base material. Has been.
Condition 3: The intermediate layer is made of at least one of silicon, germanium, and tellurium, and is amorphous.
Condition 4: The metal layer is made of at least one of chromium, titanium, nickel, molybdenum, copper, tungsten, and cobalt.
Condition 5: The lubricating film has an equivalent elastic constant of 100 GPa to 280 GPa.   The rolling sliding member according to claim 1, wherein the intermediate layer is made of at least one of silicon, germanium, and tellurium and carbon, and is amorphous.   The rolling sliding member according to claim 1 or 2, wherein the lubricating coating is formed by sputtering using a non-equilibrium type magnetron.   An inner member having a raceway surface on the outer surface, an outer member having a raceway surface facing the raceway surface of the inner member on the inner surface and disposed outside the inner member, and the two raceway surfaces In a rolling device provided with rolling elements arranged so that rolling is possible, at least one of the inner member, the outer member, and the rolling elements is given in any 1 paragraph of Claims 1-3. A rolling device characterized in that the rolling sliding member is described.

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