JP2009174959A - Stage apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To apply a larger load to a table and to improve controllability in positioning control of the table, when driving the table in the direction of the Z axis and in the direction of θ around the Z axis. <P>SOLUTION: A Z stage apparatus 1 comprises: a rotating shaft 5 that is disposed with a Z-axis direction as a direction of an axis G and can be rotated around the axis G; a rotary ring 6 that is disposed on the rotating shaft 5 and can be rotated around the axis G; and an actuator 7 for rotating and driving each of the rotating shaft 5 and the rotary ring 6 around the axis G. The rotating shaft 5 and the rotary ring 6 are in contact mutually via a spiral surface S extended spirally around the axis G while being inclined in the direction of the Z axis. A rotary motion is converted to a translational motion on the spiral surface S, thus increasing a contact area and improving support stiffness of the table 4. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a stage device that drives a table in a Z-axis direction and a θ-direction around the Z-axis.

Conventionally, a stage apparatus has been developed that drives a table in the Z-axis direction and the θ-direction around the Z-axis (hereinafter simply referred to as “θ-direction”). As such a stage device, for example, a device described in Patent Document 1 is known. The stage apparatus described in Patent Document 1 includes a θ-axis table supported by a base (XY table) and a Z-axis table supported by the θ-axis table, and the θ provided on the base. The θ-axis table is driven in the θ direction by the axial voice coil motor, and the Z-axis table is driven in the Z-axis direction by the Z-axis voice coil motor provided on the θ-axis table.
JP 2003-28974 A

  Here, in the stage apparatus as described above, since all of the Z-axis mechanism is a load on the θ-axis table, an extra load is applied to the θ-axis motor. This load adversely affects the controllability of the table positioning control. Therefore, for example, when a disturbance is applied, the table settling time may become longer, and the controllability of the table positioning control may be reduced. In recent stage apparatuses, it is desired that a larger load can be applied to the table.

  Therefore, according to the present invention, when the table is driven in the Z-axis direction and the direction around the Z-axis θ, a larger load can be applied to the table, and the controllability of the table positioning control can be improved. It is an object to provide a stage device.

  In order to solve the above-described problems, a stage apparatus according to the present invention is a stage apparatus that drives a table in the Z-axis direction and the θ-direction around the θ-axis, and is arranged with the Z-axis direction set as the axial direction. A first rotating body that can rotate, a second rotating body that is disposed on the first rotating body and that can rotate around the axis, and each of the first and second rotating bodies is driven to rotate about the axis. Drive means, wherein the first and second rotating bodies are in contact with each other via a helically inclined surface extending in a spiral shape around the axis while being inclined in the Z-axis direction. .

  According to this stage apparatus, when the first and second rotating bodies are rotated relative to each other around the axis by the driving means, the first and second rotating bodies are in contact with each other via the spiral inclined surface. Therefore, the first rotating body acts like a wedge with respect to the second rotating body, and the second rotating body is raised or returned in the Z-axis direction. Therefore, for example, by supporting the table in the Z-axis direction with the second rotating body, the table can be driven to translate in the Z-axis direction. That is, the rotational motion in the θ direction of the rotating body is converted into the translational motion in the Z-axis direction by the spiral inclined surface, and the table is translated in the Z-axis direction. When the first and second rotating bodies are synchronously rotated around the axis by the driving means, the first and second rotating bodies rotate together without the above-mentioned wedge action. Therefore, for example, the table can be rotationally driven in the θ direction by engaging at least one of the first and second rotating bodies with the table in the θ direction. Here, in the stage apparatus of the present invention, as described above, the first and second rotating bodies are brought into contact with each other via the spiral inclined surface, and the rotational motion is converted into a translational motion by the spiral inclined surface. Yes. Therefore, compared with the case where a ball screw etc. are used for this conversion, for example, a contact area can be increased and it becomes possible to raise the support rigidity of a table. As a result, a larger load can be applied to the table, the settling time when a disturbance is applied can be shortened, and the controllability of the table positioning control can be improved.

  Here, the driving means is preferably provided on the base. Thus, by providing the drive means on the base, the drive force can be directly transmitted from the base to the first and second rotating bodies without applying an extra load to the drive means. Therefore, the controllability of the table positioning control can be further enhanced.

  Moreover, as a structure which has the said effect suitably, a 1st rotary body is a shaft body which has a large diameter part and a small diameter part provided on the large diameter part, and a 2nd rotary body is a shaft. An example is a configuration in which the ring is coaxial with the body, is slidably fitted into the small diameter portion, and is in contact with the large diameter portion via a spiral inclined surface.

  The first rotating body includes guide means for guiding the movement of the table. The guide means is configured to engage with the first rotating body in the θ direction and move in the Z-axis direction. It is preferable. In this case, when the second rotating body is rotated with respect to the first rotating body (when the first rotating body is not rotated), the guide means is moved in the Z-axis direction without rotating, and the table Z Axial translation can be guided without rotating the table.

  Moreover, it is preferable that a ball or a roller is interposed between the spiral inclined surface of the first rotating body and the spiral inclined surface of the second rotating body. In this case, the table can be driven smoothly.

  In addition, it is preferable to further include a thrust bearing provided to support the table in the Z-axis direction. Thereby, the table can be driven smoothly.

  The drive means is preferably an electromagnetic actuator. In this case, the driving force of the first and second rotating bodies can be directly controlled by controlling the applied current. Therefore, the controllability of the table positioning control can be further enhanced.

  At this time, it is preferable that the stator of the electromagnetic actuator is configured to open upward. Thus, when the second rotating body is raised, the second rotating body can be driven in the Z-axis direction without bringing the mover and the stator of the electromagnetic actuator into contact with each other.

  The stator of the electromagnetic actuator preferably has a ring shape. In this case, it is possible to improve the driving force for driving the first and second rotating bodies while reducing the height of the stage device.

  According to the present invention, when the table is driven in the Z-axis direction and the direction around the Z-axis θ direction, a larger load can be applied to the table, and the controllability of the table positioning control can be improved. Become.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, the same or equivalent elements will be denoted by the same reference numerals, and redundant description will be omitted. The terms “upper” and “lower” correspond to the upper and lower sides in the Z-axis direction (vertical direction).

  FIG. 1 is a schematic exploded view showing a stage apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic sectional view showing the stage apparatus of FIG. As shown in FIGS. 1 and 2, the stage apparatus 1 of the present embodiment is used for, for example, a semiconductor wafer inspection or manufacturing apparatus or a machine tool. The stage device 1 is provided on a base 3 that can move on the surface plate 2 in the X-axis direction and the Y-axis direction, and a table 4 on which a driving object is placed is arranged around the Z-axis direction and the Z-axis direction. Drive in the θ direction, which is the rotational direction. The stage device 1 includes a rotating shaft (first rotating body) 5, a rotating ring (second rotating body) 6, an electromagnetic actuator (driving means) 7, and a guide plate (guide means) 9.

  3 is a perspective view showing a rotation axis in the stage apparatus of FIG. 1, and FIG. 4 is a plan view showing the rotation axis in the stage apparatus of FIG. As shown in FIG. 3, the rotating shaft 5 is a shaft body arranged with the Z-axis direction as the axis G direction, and has a main body portion (large diameter portion) 10. The main body 10 has a circular shape when viewed in the direction of the axis G. An annular recess 11 that opens radially outward is provided at the lower end of the main body portion 10 for rotatably attaching the rotating shaft 5 to the base 3.

  The outer edge portion 10a on the upper surface of the main body portion 10 is a spiral surface (spiral inclined surface) S1 that extends in a spiral manner around the axis G while being inclined in the Z-axis direction. Specifically, the spiral surface S1 extends so that a belt-like inclined surface inclined at a constant gradient in the Z-axis direction makes one round spiral around the axis G, and one end of the inclined surface and the other. The end is continuous with the step 12.

  The spiral surface S1 is for converting rotational motion into translational (linear) motion (so-called reverse conversion). Here, the relative rotational motion between the rotating shaft 5 and the rotating ring 6 is converted to Z of the rotating ring 6. It is converted into a translational motion along the axial direction (details will be described later). The inclination angle of the spiral surface is set to 45 ° or less with respect to the horizontal direction for the purpose of reducing the reverse conversion efficiency, and the position holding performance is enhanced against the load applied to the table 4.

  On the other hand, a fitting portion (small diameter portion) 14 having a substantially cylindrical shape coaxial with the main body portion 10 is provided on the inner surface of the outer edge portion 10 a on the upper surface of the main body portion 10. The fitting portion 14 is slidably fitted into the rotating ring 6. A guide portion 15 having a substantially cylindrical shape coaxial with the main body portion 10 is provided at a central portion on the upper surface of the fitting portion 14. The guide portion 15 is for guiding the movement of the table 4. A plurality of grooves 16 extending in the Z-axis direction are provided on the outer peripheral surface 15 a of the guide portion 15. As shown in FIG. 4, the grooves 16 here extend at four equal positions in the circumferential direction on the outer peripheral surface 15 a. In addition, this groove | channel 16 is not limited to this structure, What is necessary is just to provide two or more.

  As shown in FIG. 2, the rotating shaft 5 has an inner ring of a bearing 17 such as a ball bearing fitted in the annular recess 11. The outer ring of the bearing 17 is fitted into a through hole 18 extending in the Z-axis direction of the base 3, and a convex portion 19 on the inner peripheral surface of the through hole 18 and a ring plate 20 having an annular plate shape, And is fixed to the base 3 in the Z-axis direction. Thereby, the rotating shaft 5 is supported so as to be rotatable around the axis G with respect to the base 3.

  FIG. 5 is a perspective view showing a rotating ring in the stage apparatus of FIG. As shown in FIGS. 1 and 5, the rotating ring 6 is an annular ring body, and the inner diameter thereof is substantially equal to the outer diameter of the fitting portion 14 of the rotating shaft 5. The lower surface 6a of the rotating ring 6 is a spiral surface S2 corresponding to the spiral surface S1. That is, even in the spiral surface S2, a band-shaped inclined surface inclined at a constant gradient in the Z-axis direction is extended so as to make a spiral around the axis G, and one end and the other end of the inclined surface are connected to each other. It is configured to be continuous through the step 12.

  As shown in FIG. 2, the rotating ring 6 is slidably fitted (with an inlay structure) into the fitting portion 14 of the rotating shaft 5, and is axial with respect to the base 3 and the rotating shaft 5. It can rotate around G. At the same time, the spiral surface S <b> 2 of the rotating ring 6 is in contact with the spiral surface S <b> 1 of the rotating shaft 5. That is, the rotating ring 6 is disposed on the rotating shaft 5, and the rotating shaft 5 and the rotating ring 6 are in contact with each other via the spiral surface S (S1, S2).

  Returning to FIG. 1, the electromagnetic actuator 7 rotationally drives each of the rotating shaft 5 and the rotating ring 6 in the θ direction. Specifically, the rotating shaft 5 and the rotating ring 6 are mutually connected around the axis G. The rotating shaft 5 and the rotating ring 6 are driven so as to rotate relative to each other and rotate synchronously. The electromagnetic actuator 7 includes a pair of an electromagnetic actuator 7 a attached to the rotating shaft 5 and an electromagnetic actuator 7 b attached to the rotating ring 6. These electromagnetic actuators 7 are arranged on the same plane of the base 3. The electromagnetic actuators 7a and 7b have the same structure, and for example, a voice coil motor is used as the electromagnetic actuators 7a and 7b.

  The electromagnetic actuator 7a gives thrust to the rotating shaft 5, and has a stator 22 including a magnet portion 41 made of, for example, a permanent magnet, and a mover 23 including a coil portion 42 made of, for example, a coil. .

  The stator 22 has a U-shaped cross section so that an opening 24 that opens upward is formed. Further, as shown in FIG. 6, the outer shape has an arc shape so that the opening 24 extends in an arc shape when viewed from above. As shown in FIG. 2, the stator 22 is fixed to the upper surface of the base 3. Here, the stator 22 is fixed to the upper surface of the ring plate 20 provided on the base 3 so as to be close to the rotating shaft 5. The mover 23 is attached to the outer peripheral surface 10b of the main body portion 10 of the rotary shaft 5 so that the coil portion 42 enters the opening 24 of the stator 22 from above without contact.

  The electromagnetic actuator 7b applies thrust to the rotating ring 6, and includes a stator 27 including a magnet portion 43 made of, for example, a permanent magnet, and a mover 28 including a coil portion 44 made of, for example, a coil. .

  The stator 27 has a U-shaped cross section so that an opening 29 that opens upward is formed, and the outer shape has an arc shape so that the opening 29 extends in an arc shape when viewed from above. . The stator 27 is fixed to the upper surface of the base 3. Here, the stator 27 is fixed to the upper surface of the ring plate 20 provided on the base 3 so as to be close to the rotating ring 6. The mover 28 is attached to the outer peripheral surface 6 b of the rotating ring 6 so that the coil portion 44 enters the opening 29 of the stator 27 in a non-contact manner.

  In the electromagnetic actuators 7a and 7b of the present embodiment, the stators 22 and 27 include the magnet portions 41 and 43, and the movers 23 and 28 include the coil portions 42 and 44, but the stator includes the coil portions. The mover may include a magnet part. Further, for example, when the angular range in which the rotating shaft 5 and the rotating ring 6 rotate is small, the electromagnetic actuators 7a and 7b may be configured so that the openings 24 and 29 extend linearly when viewed from above. Good.

  A control device 31 is connected to the electromagnetic actuators 7a and 7b. The control device 31 controls the current applied to the electromagnetic actuator 7. By controlling the current applied to the electromagnetic actuator 7, the driving torque can be directly transmitted to the rotating shaft 5 and the rotating ring 6.

  As shown in FIG. 1, the guide plate 9 guides the movement of the table 4. The guide plate 9 has a plate portion 32 and a ball spline portion 33. The ball spline portion 33 includes a cylindrical wall 34 provided at the center of the lower surface of the plate portion 32 and a plurality of balls 35 fixed to the inner peripheral surface of the cylindrical wall 34 so as to be capable of rotating. .

  As shown in FIG. 2, the upper surface of the plate portion 32 of the guide plate 9 is fixed to the lower surface of the table 4, and the ball spline portion 33 is extrapolated to the guide portion 15 of the rotating shaft 5. A plurality of balls 35 of the ball spline portion 33 are in contact with the outer peripheral surface of the guide portion 15, and some of the plurality of balls 35 are engaged with the grooves 16. That is, the guide plate 9 is provided on the rotating shaft 5 and is configured to engage with the rotating shaft 5 in the θ direction and move in the Z-axis direction.

  Due to the structure of the guide plate 9, when the rotating ring 6 rotates with respect to the rotating shaft 5 (when the rotating shaft 5 does not rotate), the guide plate 9 is moved in the Z-axis direction without rotating synchronously with the rotating ring 6. It becomes possible to make it. On the other hand, when the rotating shaft 5 rotates, the guide plate 9 can be rotated synchronously with the rotating ring 6.

  The guide plate 9 has a sensor (not shown). The rotation angle (position) of the rotating shaft 5 and the rotating ring 6 is detected by this sensor, and feedback control is performed, so that the θ direction and the Z axis direction of the table 4 are controlled. Positioning control is performed.

  A thrust bearing 21 is disposed between the lower surface of the plate portion 32 of the guide plate 9 and the upper surface of the rotating ring 6. The thrust bearing 21 supports the guide plate 9 and the plate 4 in the Z-axis direction. That is, the guide plate 9 and the table 4 are configured to engage with the rotary ring 6 in the Z-axis direction and to rotate in the θ direction.

  In the stage apparatus 1 configured as described above, when a current is applied to the electromagnetic actuator 7 and the rotary shaft 5 and the rotary ring 6 are rotated relative to each other around the axis G by the electromagnetic actuator 7, the table 4 is moved to the Z axis. Translationally driven along the direction.

  That is, in the state of the stage apparatus 1 shown in FIG. 7A, the rotation axis 5 is rotated around the axis G by the electromagnetic actuator 7a, and the rotation axis 6 is prevented from rotating around the axis G by the electromagnetic actuator 7b. Hold around. Here, as described above, since the main body 10 of the rotating shaft 5 and the rotary ring 6 are in contact with each other via the spiral surface S, the main body 10 acts on the rotary ring 6 like a wedge. To do. Therefore, the rotating ring 6 is raised or returned in the Z-axis direction.

  Since the table 4 is supported in the Z-axis direction by the rotating ring 6 via the thrust bearing 21, the ball spline portion of the guide plate 9 is provided in the table 4 as shown in FIG. 33 and the guide portion 15 of the rotating shaft 5 are guided and moved in the Z-axis direction. That is, the spiral surface S converts the relative rotational motion of the rotary shaft 5 and the rotary ring 6 into a translational motion in the Z-axis direction, and the table 4 is translated in the Z-axis direction.

  On the other hand, in the stage apparatus 1, when the rotary shaft 5 and the rotary ring 6 are synchronously rotated around the axis G by the electromagnetic actuator 7, the table 4 is rotationally driven around the axis G in the θ direction.

  That is, the rotating shaft 5 and the rotating ring 6 are rotated around the axis G so as to be synchronized with each other by the electromagnetic actuators 7a and 7b. As a result, the rotary shaft 5 and the rotary ring 6 are rotated together without the effect of the wedge. Since the table 4 can be synchronously rotated in the θ direction with respect to the rotating shaft 5 as described above, the table 4 is rotated in the θ direction without moving in the Z axis direction.

  Therefore, according to the stage apparatus 1 of this embodiment, the table 4 can be driven in the Z-axis direction and the θ direction. As described above, the rotary shaft 5 and the rotary ring 6 are brought into contact with the spiral surface S to convert the rotational motion into the translational motion. Therefore, the contact area is reduced compared to the case where a ball screw or the like is used for the conversion. By increasing it, the support rigidity of the table 4 can be increased (sliding can be made difficult to occur). Therefore, a larger load can be applied to the table 4. As a result, for example, when the stage apparatus 1 is used for a machine tool, a load of about 3 t may be applied to the table 4. Even in this case, the table 4 is stabilized in the Z axis direction and the θ direction. It can be driven reliably. Further, since the support rigidity of the table 4 can be increased as described above, the settling time when a disturbance is applied can be shortened, and the controllability of the table positioning control can be improved.

  Further, as described above, since the electromagnetic actuator 7 (7a, 7b) is provided on the base 3, the driving torque is applied to the rotating shaft 5 and the rotating ring 6 without applying an extra load to the electromagnetic actuator 7. 3, the rotation shaft 5 and the rotation ring 6 can be directly driven from the base 3. Therefore, the controllability of the table positioning control can be further enhanced.

  In addition, since it is not necessary to provide each of the stage device 1 with a table that rotates in the θ direction and a table that moves in the Z-axis direction, the stage device 1 can be reduced in height to have a flat structure. The position of the center of gravity of the stage device 1 can be lowered. As a result, when the base 3 is driven in the X-axis direction or the Y-axis direction, it is possible to suppress the shaking of the table 4 and to improve the vibration damping performance of the table 4.

  In addition, as described above, the stage apparatus 1 includes the guide plate 9 that is provided on the rotating shaft 5 and guides the movement of the table 4, and the guide plate 9 is engaged with the rotating shaft 5 in the θ direction and It is configured to be movable in the Z-axis direction. Thereby, when the rotating ring 6 is rotated with respect to the rotating shaft 5 (when the rotating shaft 5 is not rotated), the guide plate 9 can be moved in the Z-axis direction without rotating. Therefore, the translational movement in the Z-axis direction in the table 4 can be guided without rotating the table 4.

  In the stage device 1, as described above, the table 4 is supported in the Z-axis direction by the rotating ring 6 via the thrust bearing 21. That is, the stage apparatus 1 includes a thrust bearing provided to support the table 4 in the Z-axis direction. Therefore, the table 4 can be driven smoothly.

  Further, in the stage apparatus 1, the rotation shaft 5 and the rotation ring 6 are driven by the electromagnetic actuator 7, so that the drive of the rotation shaft 5 and the rotation ring 6 is controlled by controlling the current applied to the electromagnetic actuator 7. Can do. As a result, the controllability of the positioning control of the table 4 can be further improved.

  Further, in the stage apparatus 1, as described above, the stator 27 of the electromagnetic actuator 7b is formed to open upward. As a result, the rotating ring 6 rises while allowing the mover 28 (coil portion 44) of the electromagnetic actuator 7b to move upward (see FIG. 7B). That is, when the rotating ring 6 is lifted, the rotating ring 6 can be driven in the Z-axis direction without bringing the movable element 28 and the stator 27 into contact with each other. Here, it is conceivable that the rotating shaft 5 and the rotating ring 6 are relatively rotated by driving means such as a worm gear or a timing belt, but in this case, it is difficult to cope with the lifting of the rotating ring 6. Therefore, the above-described effect of suitably making the electromagnetic actuator 7 correspond to the lifting of the rotating ring 6 is particularly effective.

  In the stage device 1, as described above, the electromagnetic actuator 7 a is close to the rotating shaft 5, and the electromagnetic actuator 7 b is close to the rotating ring 6. Thereby, the vibration which arises because the drive means and the driven part are separated can be suppressed.

  By the way, in the conventional stage apparatus, there is a case where the table 4 is guided in a non-contact manner by an air guide (static pressure guide) or the like. May end up. This surface vibration becomes a problem particularly when a thin object such as a semiconductor wafer is placed on the table 4. Moreover, if the air guide is used in this way, the cost becomes high. In this regard, in the stage apparatus 1 of the present embodiment, as described above, with respect to the guide of the table 4, the plurality of balls 35 of the ball spline portion 33 are reliably brought into contact with the outer peripheral surface of the guide portion 15. Therefore, occurrence of surface deflection can be suppressed, and the cost of the stage apparatus 1 can be reduced.

  Further, when the rotational motion is converted into the translational motion by a ball screw or the like, the table 4 may move even when an unintended force (disturbance) is applied to the table 4. Therefore, in the stage apparatus 1, as described above, the rotating shaft 5 and the rotating ring 6 are brought into contact with each other via the spiral surface S, and the rotational motion is converted into a translational motion by the spiral surface S. Further, the inclination of the spiral surface S is 45 ° or less. Therefore, the reverse conversion efficiency becomes low, the rotation of the rotating shaft 5 and the rotating ring 6 against disturbance can be prevented, and the posture of the table 4 can be stabilized against disturbance. In addition, about the reverse efficiency of the stage apparatus 1, the material (sliding friction coefficient) of the rotating shaft 5 and the rotating ring 6, and the inclination angle of a spiral surface can be set suitably, and can be set as desired.

  Incidentally, in this embodiment, when the rotary shaft 5 and the rotary ring 6 are rotated relative to each other around the axis G in order to drive the table 4 in the Z-axis direction, the rotary shaft 5 is rotated around the axis G and the rotary ring 6 is rotated. Are held so as not to rotate around the axis G, but they may be driven independently. For example, the rotary shaft 5 is held so as not to rotate and the rotary ring 6 is rotated around the axis G. Also good. When the rotary shaft 5 is rotated about the axis G as in the present embodiment, the table 4 can also rotate about the axis G because the table 4 can rotate synchronously with the rotary shaft 5 in the θ direction. Alternatively, the rotary shaft 5 and the rotary ring 6 may be rotated relative to each other by rotating around the axis G so as to be in opposite directions. The rotation shaft 5 and the rotation ring 6 may be rotated relative to each other by rotating around the axis G in the same direction so that the angular velocities are different.

  Further, since the rotation shaft 5 and the rotation ring 6 can be individually driven and controlled as described above, the table 4 can be driven simultaneously in the Z-axis direction and the θ direction. At this time, the position of the table 4 can be accurately controlled by detecting the amount of displacement of the rotating shaft 5 and the rotating ring 6 and the amount of displacement in the Z-axis direction by a sensor (not shown) and performing feedback control.

  Moreover, this embodiment is provided on the base 3 driven in the X-axis direction and the Y-axis direction. Therefore, the table 4 can be driven also in the X-axis direction and the Y-axis direction by driving the base 3 in the X-axis direction and the Y-axis direction. The base 3 may be driven in either the X-axis direction or the Y-axis direction, or may not be driven.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment.

  For example, in the electromagnetic actuator 7 of the above embodiment, the stators 22 and 27 have an arc shape, but may have a ring shape. FIG. 8 is a plan view showing another example of the stator of the electromagnetic actuator of FIG. As shown in FIG. 8, the stator 51 has a ring shape so that an opening 54 that opens upward extends in a ring shape when viewed from above. The stator 51 functions as a stator for both of the electromagnetic actuators 7 a and 7 b, and has a plurality of magnet portions 41 and the same number of magnet portions 43 as the magnet portions 41. In this case, the movers 23 and 28 are provided in a configuration such as the number and arrangement corresponding to the magnet portions 41 and 43. Thereby, the driving force by the electromagnetic actuator 7 can be increased while reducing the height of the stage device 1.

  Moreover, in the said embodiment, although the spiral surface S1 of the rotating shaft 5 and the spiral surface S2 of the rotating ring 6 are mutually contacted, for example, as shown to Fig.9 (a), between spiral surfaces S1, S2 The ball 52 may be interposed and the rotary shaft 5 and the rotary ring 6 may be brought into contact with each other via the ball 52. In this case, the rotating shaft 5 and the rotating ring 6 can be smoothly rotated relative to each other about the axis G, and the table 4 can be driven smoothly. Moreover, you may make the rotating shaft 5 and the rotating ring 6 contact each other via a roller.

  Moreover, in the said embodiment, although the rotating shaft 5 and the rotating ring 6 are contacting via the spiral surface S (S1, S2) extended so that it may make one round spiral around the axis line G, it is in multiple You may contact through the divided spiral surface. For example, as shown in FIG. 9 (b), there are a plurality of spiral surfaces Sd extending spirally in a part of the circumferential direction around the axis G, and these spiral surfaces Sd are continuous via a step 53. May be. In the spiral surface S that spirals around the axis G as in the above embodiment, the table 4 can be translated in the Z-axis direction within a relatively narrow stroke range in the Z-axis direction. The table 4 can be driven to translate in the Z-axis direction with a relatively wide Z-axis direction stroke range and a flat mechanism. Thus, in the present invention, the spiral surface can be appropriately set according to the specification. Moreover, it is possible to cope with various driving modes of the table 4 by adjusting the slope of the spiral surface.

It is a schematic exploded view which shows the stage apparatus which concerns on one Embodiment of this invention. It is a schematic sectional drawing which shows the stage apparatus of FIG. It is a perspective view which shows the rotating shaft in the stage apparatus of FIG. It is a top view which shows the rotating shaft in the stage apparatus of FIG. It is a perspective view which shows the rotating ring in the stage apparatus of FIG. It is a top view which shows the stator of the electromagnetic actuator in the stage apparatus of FIG. It is a figure for demonstrating operation | movement of the stage apparatus of FIG. It is a top view which shows the other example of the electromagnetic actuator of FIG. It is a schematic sectional drawing which shows the other example of the stage apparatus of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Stage apparatus, 3 ... Base, 4 ... Table, 5 ... Rotating shaft (1st rotating body), 6 ... Rotating ring (2nd rotating body), 7, 7a, 7b ... Electromagnetic actuator (drive means), DESCRIPTION OF SYMBOLS 9 ... Guide plate (guide means), 10 ... Main-body part (large diameter part), 14 ... Fitting part (small diameter part), 21 ... Thrust bearing, 22, 27, 51 ... Stator, G ... Axis, S, S1 , S2, Sd ... spiral surface (spiral inclined surface).

Claims (9)

A stage device that drives a table in the Z-axis direction and the θ-axis θ direction,
A first rotating body that is arranged with the Z-axis direction as the axial direction and is rotatable about this axis;
A second rotating body disposed on the first rotating body and rotatable about the axis;
Drive means for driving each of the first and second rotating bodies to rotate about the axis,
The stage device according to claim 1, wherein the first and second rotating bodies are in contact with each other via a spiral inclined surface extending around the axis while being inclined in the Z-axis direction.   The stage device according to claim 1, wherein the driving unit is provided on a base. The first rotating body is a shaft body having a large diameter portion and a small diameter portion provided on the large diameter portion,
The second rotating body has an annular shape coaxial with the shaft body, is slidably fitted into the small diameter portion, and is in contact with the large diameter portion via the spiral inclined surface. The stage apparatus according to claim 1 or 2, wherein A guide means provided on the first rotating body for guiding the movement of the table;
The said guide means is comprised so that it can engage with the said (theta) direction with respect to a said 1st rotary body, and it can move to the said Z-axis direction. Stage equipment.   3. A ball or a roller is interposed between the spiral inclined surface of the first rotating body and the spiral inclined surface of the second rotating body. Stage equipment   The stage apparatus according to any one of claims 1 to 5, further comprising a thrust bearing provided to support the table in the Z-axis direction.   The stage apparatus according to claim 1, wherein the driving unit is an electromagnetic actuator.   The stage device according to claim 7, wherein the stator of the electromagnetic actuator is configured to open upward. The stage apparatus according to claim 8, wherein the stator of the electromagnetic actuator has a ring shape.

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