JPS63244205A - Positioning device - Google Patents

Positioning device

Info

Publication number
JPS63244205A
JPS63244205A JP62076177A JP7617787A JPS63244205A JP S63244205 A JPS63244205 A JP S63244205A JP 62076177 A JP62076177 A JP 62076177A JP 7617787 A JP7617787 A JP 7617787A JP S63244205 A JPS63244205 A JP S63244205A
Authority
JP
Japan
Prior art keywords
displacement
piezoelectric element
positioning
movable table
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62076177A
Inventor
Nobutaka Kikuiri
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62076177A priority Critical patent/JPS63244205A/en
Publication of JPS63244205A publication Critical patent/JPS63244205A/en
Application status is Pending legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34Relative movement obtained by use of deformable elements, e.g. piezo-electric, magnetostrictive, elastic or thermally-dilatable elements

Abstract

PURPOSE:To improve the positioning accuracy and the responsiveness by executing the positioning by a displacement of a piezoelectric element, and also, to enlarge the displacement of the piezoelectric element by utilizing a lever mechanism so that a positioning stroke can be taken large. CONSTITUTION:The titled device is provided with a base 21, a movable table 23 which been provided so as to be freely movable against this base 21, a piezoelectric element 31 which is buried and fixed to the base 21, and whose on end is displaced in accordance with magnitude of an applied voltage, and a lever mechanism 32 for enlarging the displacement of one end of the piezoelectric element 31 and giving a displacement to the movable table 23. When a voltage is applied to the piezoelectric element 31, the piezoelectric element 31 expands and contracts to length corresponding to the applied voltage, therefore, one end thereof is displaced, this displacement is applied to a point of application of the level mechanism 32, and the lever mechanism 32 enlarges it and gives a large displacement to a point of force. In such a way, the positioning accuracy and the responsiveness of the movable table become satisfactory, and also, the movable table can obtain a large positioning stroke.
JP62076177A 1987-03-31 1987-03-31 Positioning device Pending JPS63244205A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62076177A JPS63244205A (en) 1987-03-31 1987-03-31 Positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62076177A JPS63244205A (en) 1987-03-31 1987-03-31 Positioning device

Publications (1)

Publication Number Publication Date
JPS63244205A true JPS63244205A (en) 1988-10-11

Family

ID=13597820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62076177A Pending JPS63244205A (en) 1987-03-31 1987-03-31 Positioning device

Country Status (1)

Country Link
JP (1) JPS63244205A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5101132A (en) * 1989-08-31 1992-03-31 Brother Kogyo Kabushiki Kaisha Linear ultrasonic motor
US5105117A (en) * 1989-10-31 1992-04-14 Brother Kogyo Kabushiki Kaisha Ultrasonic motor
US5323082A (en) * 1989-05-03 1994-06-21 Spectra Physics Lasers, Inc. Piezoelectric actuator for planar alignment
US5596242A (en) * 1991-09-05 1997-01-21 Canon Kabushiki Kaisha Guide device for vibration driven motor
US5742113A (en) * 1996-05-07 1998-04-21 K Laser Technology, Inc. Device for tilt-free translation of one plate relative to a reference plate
US6384515B1 (en) * 1998-10-26 2002-05-07 Nanomotion Ltd. Multidirectional motors
US6888289B2 (en) * 2002-07-16 2005-05-03 Baldor Electric Company Multi-axes, sub-micron positioner
JP2009174959A (en) * 2008-01-23 2009-08-06 Sumitomo Heavy Ind Ltd Stage apparatus
CN102059693A (en) * 2010-11-05 2011-05-18 山东理工大学 Dual-translation microoperating platform comprising quadrate elastic pair
CN102819186A (en) * 2012-09-07 2012-12-12 天津大学 3T1R four-degrees-of-freedom precise location workbench
CN102998899A (en) * 2012-12-05 2013-03-27 天津大学 Two-degree-of-freedom nanometer positioning platform
CN103226287A (en) * 2013-04-25 2013-07-31 河北工业大学 Two-in-parallel parallel decoupling flexible microposition mechanism

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5323082A (en) * 1989-05-03 1994-06-21 Spectra Physics Lasers, Inc. Piezoelectric actuator for planar alignment
US5101132A (en) * 1989-08-31 1992-03-31 Brother Kogyo Kabushiki Kaisha Linear ultrasonic motor
US5105117A (en) * 1989-10-31 1992-04-14 Brother Kogyo Kabushiki Kaisha Ultrasonic motor
US5596242A (en) * 1991-09-05 1997-01-21 Canon Kabushiki Kaisha Guide device for vibration driven motor
US5742113A (en) * 1996-05-07 1998-04-21 K Laser Technology, Inc. Device for tilt-free translation of one plate relative to a reference plate
US6384515B1 (en) * 1998-10-26 2002-05-07 Nanomotion Ltd. Multidirectional motors
US7078848B2 (en) 2002-07-16 2006-07-18 Baldor Electric Company Multi-axes, sub-micron positioner
US6888289B2 (en) * 2002-07-16 2005-05-03 Baldor Electric Company Multi-axes, sub-micron positioner
JP2009174959A (en) * 2008-01-23 2009-08-06 Sumitomo Heavy Ind Ltd Stage apparatus
CN102059693A (en) * 2010-11-05 2011-05-18 山东理工大学 Dual-translation microoperating platform comprising quadrate elastic pair
CN102819186A (en) * 2012-09-07 2012-12-12 天津大学 3T1R four-degrees-of-freedom precise location workbench
CN102998899A (en) * 2012-12-05 2013-03-27 天津大学 Two-degree-of-freedom nanometer positioning platform
CN103226287A (en) * 2013-04-25 2013-07-31 河北工业大学 Two-in-parallel parallel decoupling flexible microposition mechanism

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