JP2011119320A - thetaZ DRIVE DEVICE AND STAGE DEVICE WITH THE SAME, AND INSPECTION DEVICE - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To miniaturize a θZ drive device positioning a substrate used in a semiconductor manufacturing device or the like. <P>SOLUTION: The θZ drive device includes a cylindrical frame 17 erected on a base 6, a θZ actuator 15 which is arranged on an inner face of the frame 17 and drives a table 1 in a Z direction and a θ direction, a rise and fall supporting part 7 supporting the table 1 so that it can rise and fall in the Z direction, a rotation supporting part 4 supporting the table 1 so that it can rotate in the θ direction, and a position detection unit 31 for acquiring rise/fall positions and a rotation position of the table 1. All of the rise/fall supporting part 7, the rotation supporting part 4 and the position detection unit 31 are arranged on an inner side of the θZ actuator 15 and are arranged so as to be settled in a height of the Z direction of the θZ actuator 15. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a θZ driving device that is used in, for example, a semiconductor exposure apparatus or a semiconductor inspection apparatus and positions a substrate in a Z direction and a θ direction.

  In the field of semiconductor manufacturing equipment, various apparatuses are used for accurately positioning a substrate (wafer, liquid crystal glass, mask, etc.). Among such apparatuses, there is a θZ driving apparatus for positioning a substrate in a vertical Z direction and a rotation θ direction around the Z axis with respect to an optical apparatus provided in an exposure apparatus or an inspection apparatus. Substrate positioning accuracy required for the θZ driving device is required to be several nanometers. This positioning accuracy is required to be further increased in the future with the miniaturization of semiconductors. As a conventional technique for realizing this high-precision positioning, for example, there is a technique as disclosed in Patent Document 1.

Japanese Patent Laying-Open No. 2007-27659 (Page 7, FIGS. 1 and 2)

However, in the conventional θZ driving device such as Patent Document 1, the Z-axis actuator and the θ-axis actuator that drive the substrate holding part are separated, and they are only arranged around the movable part. There is a problem that the θZ driving device becomes large. In particular, the height in the Z direction of the θZ drive device is increased. For example, when the θZ drive device is mounted on a so-called XY stage as in Patent Document 1, the height of the entire device is increased. There's a problem.
In addition, the conventional θZ drive device holds the substrate because the Z-axis actuator for driving the substrate holding part that holds the substrate in the Z direction is inserted between the plate-like magnets with a gap between them. When the member rotates in the θ direction, the magnet can rotate only within a range in which the magnet can move within the gap, and there is a problem that the operating range in the θ direction is limited. That is, the rotation in the θ direction can be performed only in a very small range, which has been a problem when the substrate is inspected from various directions.
In addition, an air slider is used for the elevating support portion that guides the substrate holding portion in the Z direction. In this case, an air layer of several μm or more is necessary between the fixed side and the movable side of the θZ drive device. For this reason, there is a problem that the substrate holding part is likely to vibrate, and the positioning accuracy of the substrate holding part in the Z direction is deteriorated.
Further, in the conventional θZ driving device, since the Z-axis actuator supports all of the weight of the movable part, there is a problem that the Z-axis actuator that drives the movable part becomes large.
Further, in the conventional θZ driving device, there is a possibility that particles generated from the rotation support part and the lifting support part of the movable part contaminate the substrate.
The present invention has been made in view of such problems, and an object thereof is to increase the operation range in the θ direction, improve the positioning accuracy in the Z direction, and reduce the size of the θZ driving device. It is another object of the present invention to provide a θZ driving device that can prevent the substrate from being contaminated by particles generated from the inside of the θZ device.

In order to solve the above problem, the present invention is configured as follows.
That is, in a θZ drive device in which a table movable with respect to the base is capable of operating in two directions: vertical movement in the Z direction and rotation in the θ direction with the Z direction as the rotation center axis. A cylindrical frame standing on the base, a θZ actuator provided on the inner surface of the frame for driving the table in the Z direction and the θ direction, and a support for allowing the table to move up and down in the Z direction. An elevating support unit, a rotating support unit for supporting the table so as to be rotatable in the θ direction, and a position detecting unit for acquiring an elevating position and a rotating position of the table, and the elevating support unit And the rotation support part and the position detection part are located inside the θZ actuator and arranged so as to be substantially within the height of the θZ actuator in the Z direction. A driving device was used.
The θZ actuator includes a magnet portion fixed to the outer peripheral surface of the table and a stator fixed to the inner surface of the frame, and is disposed on the outermost peripheral portion of the θZ drive device, and the magnet The raising / lowering support part, the rotation support part, and the position detection part are arranged inside the part.
Further, the table includes an elevating table unit and a rotating table unit, the elevating table unit is supported by the elevating support unit so as to be movable up and down, and the rotating table unit is held around the elevating table unit. The magnet portion is provided on the outer peripheral surface so as to be substantially the same height as the rotation support portion, and only the rotation table portion rotates when rotating by the action of the θZ actuator. And when raising / lowering, the said rotary table and the said raising / lowering table were made to go up and down integrally.
The elevating support unit includes a first elevating support unit and a second elevating support unit. The first elevating support unit supports the elevating table at a center of the elevating table, and the second elevating support unit. Has supported the periphery of the lifting table at a plurality of locations.
Further, the lifting table is supported by only one of the first and second lifting support portions.
The stator of the θZ actuator includes a core fixed inside the frame, a θ-axis coil fixed inside the core, a Z-axis coil fixed inside the θ-axis coil, The magnet portion of the θZ actuator is disposed so as to face a yoke fixed to the outer peripheral surface of the rotary table portion and a surface of the yoke so as to face the Z-axis coil with a certain gap. A first magnet disposed at an equal pitch so that all of the magnetic poles on the surface of the yoke have the same polarity at the upper stage in the Z direction in the yoke, and the Z direction in the yoke. A second magnet disposed at the lower stage so that all the magnetic poles on the surface thereof have the same polarity and are different from the magnetic poles of the first magnet. , It was constructed so as to be from.
Further, a self-weight compensation spring is provided that has one end supported by the base and the other end acting on the lifting table to support the weight in the Z direction of the lifting part including the table.
The self-weight compensation spring includes a spring adjustment mechanism for adjusting the length of the self-weight compensation spring.
Further, the frame is provided with at least one exhaust hole, and is configured to exhaust from the exhaust hole in a substantially closed space surrounded by the base, the table, and the frame.
Also, a θZ driving device, a Y driving device that drives the θZ driving device in a Y direction perpendicular to the Z direction, and an X that drives the θZ driving device in an X direction perpendicular to the Z direction and the Y direction. And an XYθZ stage including a driving device.
Also, a θZ driving device, a Y driving device that drives the θZ driving device in a Y direction perpendicular to the Z direction, and an X that drives the θZ driving device in an X direction perpendicular to the Z direction and the Y direction. A semiconductor inspection apparatus including an XYθZ stage including a driving device and an inspection mechanism for inspecting a substrate held on the table of the θZ driving device is configured.
Also, a θZ driving device, a Y driving device that drives the θZ driving device in a Y direction perpendicular to the Z direction, and an X that drives the θZ driving device in an X direction perpendicular to the Z direction and the Y direction. A semiconductor exposure apparatus including an XYθZ stage including a driving device and an exposure mechanism that performs exposure on a substrate held on the table of the θZ driving device is configured.

According to the present invention, in the θZ driving device, the lifting support portion, the rotation support portion, and the position detection portion are all arranged inside the θZ actuator and substantially within the height of the θZ actuator in the Z direction. The drive device becomes smaller. Further, the height in the Z direction is reduced.
In addition, since the θZ actuator is arranged on the outermost peripheral portion of the θZ drive device and arranged so that the elevating support portion, the rotation support portion, and the position detection portion are located inside the magnet portion of the θZ actuator, the electromagnetic force of the θZ actuator The θZ driving device can be reduced in size while ensuring a large value.
In addition, the table includes an elevating table unit and a rotating table unit. The elevating table unit is supported by an elevating support unit so as to be movable up and down, and the rotating table unit can be rotated by a rotation support unit held around the elevating table unit. The magnet portion is provided on the outer peripheral surface so as to be substantially the same height as the rotation support portion, and when rotating by the action of the θZ actuator, only the rotation table portion rotates, and when moving up and down, the rotation table and Since the lifting table is integrally lifted, the table can be downsized even if the table can move in two directions, Z and θ.
The elevating support unit includes a first elevating support unit and a second elevating support unit. The first elevating support unit supports the elevating table at the center of the elevating table, and the second elevating support unit is configured of the elevating table. Since the periphery is supported at a plurality of locations, precise guidance in the Z direction of the table is possible, and in particular, the second lifting support portion is disposed at a position far from the center of the lifting table. Rotation in the θ direction can be suppressed with high rigidity. Therefore, the positioning accuracy in the θ direction of the table can be improved.
Further, if the lifting table is supported by only one of the first and second lifting support portions, further downsizing and cost reduction can be expected.
Further, the stator of the θZ actuator includes a core fixed inside the frame, a θ-axis coil fixed inside the core, and a Z-axis coil fixed inside the θ-axis coil, and the θZ actuator The magnet part is composed of a yoke fixed to the outer peripheral surface of the rotary table part, and a magnet fixed to the surface of the yoke and arranged to face the Z-axis coil with a certain gap, In the yoke, the first magnet arranged at an equal pitch so that all the magnetic poles on the upper surface in the Z direction have the same polarity, and on the yoke, so that all the magnetic poles on the surface in the lower stage in the Z direction have the same polarity. Since the second magnet has a pitch and is different from the magnetic pole of the first magnet, the Z-axis coil is arranged inside the θ-axis coil. Since the magnet, yoke and core are shared by the Z-axis and the θ-axis, and the two-axis actuators θ and Z are integrated, the θZ driving device can be made smaller. In addition, since the yoke provided with the coil and the yoke provided with the magnet are both cylindrical, the table can be rotated infinitely in the θ direction.
In addition, since the one end is supported by the base and the other end acts on the lifting table and has a self-weight compensation spring that supports the weight of the table in the Z direction, the θZ actuator is a thrust force for supporting the weight of the lifting table, etc. Need not be generated, and only the thrust that gives the necessary acceleration when the table is driven needs to be generated. Therefore, the θZ actuator can be reduced in size.
In addition, since the self-weight compensation spring is provided with a spring adjustment mechanism that adjusts the length of the self-weight compensation spring, the position where the self-weight of the table and the repulsive force of the self-weight compensation spring are balanced can be adjusted. By adjusting the balance position, the thrust generated on average by the θZ actuator can be minimized, and the θZ actuator can be reduced in size.
Further, since the frame is provided with at least one exhaust hole, and the exhaust space is exhausted from the substantially enclosed space surrounded by the base, the table, and the frame, the joint connected to the frame is connected to the joint from the exhaust device. By connecting these pipes, it is possible to make the inside of the θZ driving device have a negative pressure, and it is possible to prevent outflow of particles generated by the bearings and linear guides of the lifting support part and the rotation support part to the outside. In addition, the particles can be prevented from adhering to the substrate held by the table.

Side sectional view of one embodiment of the θZ drive device to which the present invention is applied Side cross-sectional view at a different location from FIG. 1 is a perspective view of FIG. A perspective view for explaining the self-weight compensation spring and the second lifting support portion Side sectional view showing the case where there is no first lifting support section Side sectional view explaining the θZ actuator Top view explaining the θZ actuator Whole perspective view of the θZ actuator coil and magnet only Whole perspective view of XYθZ stage to which θZ drive device is applied

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a side sectional view showing an embodiment of a θZ drive device to which the present invention is applied. FIG. 2 is also a side sectional view, but shows a cross section of a portion different from FIG. FIG. 3 is a perspective view of FIG. Here, the direction along gravity is defined as the Z direction, and the direction rotating around the Z direction as the central axis is defined as the θ direction. Also, two directions on a plane perpendicular to the Z direction are defined as an X direction and a Y direction, and the X direction and the Y direction are perpendicular to each other.
1 to 3, the θZ driving device generally includes a base 6, a cylindrical frame 17 having a lower end fixed so as to stand on the base 6, a θZ actuator 15 positioned on the inner peripheral surface of the frame 17, and its θZ The table 15 is driven by an actuator 15 to rotate in the θ direction and to move up and down in the Z direction. The upper surface of the table 1 is configured to be exposed from the upper end of the frame 17. Further, the elevating support portion 7 and the rotation support portion 4 disposed inside the θZ actuator 15 support the table 1, and a position detection unit 31 is also disposed on a part of the table 1. Hereinafter, the detailed configuration of each unit will be described.

First, the θZ actuator 15 that rotates and lifts the table 1 will be described. FIG. 6 is a detailed side sectional view of the θZ actuator 15, and FIG. 7 is a part of a detailed top view of the θZ actuator 15. FIG. 8 is a perspective view of only the coil and magnet portion of the θZ actuator 15. In FIG. 8, for easy understanding, the coil and the magnet are shifted in the Z direction.
First, the stator 32 side of the θZ actuator 15 will be described with reference to FIGS. The cylindrical core 16 is formed by laminating electromagnetic steel plates, and is fitted and fixed to the inner surface of a frame 17 that is also cylindrical and fixed to the upper surface of the base 6.
A plurality of θ-axis coils 19 are fixed to the inner surface of the core 16 at equal intervals. As shown in FIG. 7, the θ-axis coil 19 is arranged in the order of a θ-U phase coil 19a, a θ-W phase coil 19c, and a θ-V phase coil 19b. Therefore, the total number of θ-axis coils 19 is a multiple of three.
The Z-axis coil 18 wound in a circular shape when viewed from the Z direction is fixed to the inner surface of the θ-axis coil 19 described above so as to be stacked in the Z direction. As shown in FIG. 6, the Z-axis coil 18 is fixed in the order of Z-U + phase coil 18a, Z-W-phase coil 18b, Z-V + phase coil 18c,. Here, for example, the Z-U + phase coil 18a and the Z-U-phase coil 18d have the same amount of flowing current, but the flowing direction is opposite.
Insulating paper (not shown) is sandwiched between the core 16 and the θ-axis coil 19 and between the θ-axis coil 19 and the Z-axis coil 18.

Next, the magnet part 33 of the θZ actuator 15 will be described. The magnet portion 33 is mounted on a cylindrical surface 1aa (see FIG. 1) formed so as to hang down at the outermost peripheral portion of the table 1. A yoke 20 is mounted on the cylindrical surface 1aa. A magnet 21 is attached around the yoke 20.
As shown in FIG. 8, the yoke 20 has a cylindrical shape, and magnets 21 are arranged on the outer periphery of the yoke 20 in two upper and lower stages in the Z direction. The magnet 21 is magnetized in the thickness direction, that is, in the radial direction of the yoke 20. The upper first magnets 21a and the like are magnetized so that their exposed surfaces are S poles, and are arranged at equal pitches. On the other hand, the lower second magnets 21b and the like are magnetized so that the exposed surface is N-pole, contrary to the upper first magnets 21a, and the same pitch as the upper first magnets 21a and the like. The upper stage is arranged at a position shifted by a half pitch.

  Next, the principle that the θZ actuator 15 drives the table 1 in the Z direction will be described. In FIG. 6, the lines of magnetic force emitted from the lower second magnet 21 pass through the Z-axis coil 18 and the θ-axis coil 19, return to the upper first magnet 21 through the core 16, and from the inside of the yoke 20 to the lower stage. A loop of returning to the second magnet 21 is formed. Since the magnetic lines of force are linked to the Z-axis coil 18 in this way, a U-V-W-phase three-phase current is appropriately applied according to the position of the magnet 21 in the Z direction by a driver (current supply device) (not shown). By flowing in a correct phase, the table 1 can be driven in the Z direction.

  Next, the principle of driving the table 1 in the θ direction by the θZ actuator 15 will be described. FIG. 7 shows lines of magnetic force formed by the magnet 21 as viewed from above. Similarly to the Z-axis coil 18, the θ-axis coil 19 is linked to form magnetic lines of force. Here, the table 1 can be driven in the θ direction by flowing a three-phase current to the θ-axis coil 19 with an appropriate phase according to the angle of the magnet 21 with a driver (not shown).

  As described above, since the θZ actuator 15 is located on the outermost peripheral portion of the table 1, a large number of θ-axis coils, Z-axis coils, and magnets can be arranged, and a structure capable of generating a large electromagnetic force with respect to the table 1. It has become. On the other hand, since the biaxial coils and magnets in the θ direction and the Z direction are respectively integrated, the θZ actuator 15 can be reduced in size. In addition, since the yoke provided with the coil and the yoke provided with the magnet are both cylindrical, the table 1 can be rotated infinitely in the θ direction.

  Next, the detailed configuration of the table 1 will be described with reference to FIGS. The table 1 includes an elevating table portion 1b and a rotary table portion 1a. The upper surface of the turntable 1 a is exposed to the outside near the upper end of the frame 17. Although not shown, a mechanism for holding the substrate is mounted on the upper surface of the turntable 1a. A cylindrical surface 1aa for holding the above-described magnet portion 33 hangs down on the outermost peripheral portion of the turntable 1a. A cylindrical surface 1ab also hangs down further inside the cylindrical surface 1aa, and the inner periphery of the cylindrical surface 1ab is supported by the rotation support portion 4. In this embodiment, the rotation support portion 4 is a bearing 3. Thereby, the turntable 1a can rotate in the θ direction. Then, the turntable 1a is rotated by the electromagnetic force of the θZ actuator 15 described above. In addition, the rotation support part 4 is located so that it may become substantially the same height as the magnet part 33 in the Z direction. Thereby, even if the electromagnetic force of the θZ actuator 15 acts on the rotary table 1a, an excessive moment is not applied to the rotation support portion 4.

The rotary table 1b holds the rotation support portion 4 described above. A rotation support portion 4 is held around the lifting table 1b. The elevating table 1b is supported by the first elevating support portion 7a so as to be movable up and down at the position of the rotation center in the θ direction. In the present embodiment, the first elevating support portion 7 a is composed of a spline 26 and a spline shaft 25. The spline 26 is engaged with a spline shaft 25 fixed to the base 6 so as to be movable up and down. A spline 26 is fastened to the lifting table 1b.
Further, the lifting table 1b extends further outward from a portion holding the rotation support portion 4, and is supported by the second lifting support portion 7b at a portion extending further upward. That is, the second lifting support portion 7b is positioned outside the rotation support portion 4 and inside the θZ actuator 15, and supports the lifting table 1b. In the present embodiment, a linear guide 5 is used for the second lifting support portion 7b. The second lifting support portions 7b are provided at a plurality of locations on the side surface around the lifting table 1b. In this embodiment, three linear guides 5 are provided. The second elevating support portion 7b has a lower end fixed to the base 6 and supports the elevating table 1b so that it can be raised and lowered.
The first elevating support portion 7a and the second elevating support portion 7b are located inside the θZ actuator 15 as in the rotation support portion 4, and are arranged at positions that are substantially within the height of the θZ actuator 15 in the Z direction. ing.
The first elevating support portion 7a and the second elevating support portion 7b, that is, the linear guide 5 and the spline 26 both support the elevating table 1b in the Z direction and at the same time suppress the rotation of the elevating table 1b in the θ direction. have. Therefore, when the table 1 is rotated by the action of the θZ actuator 15, only the rotary table 1a is rotated, and when the table 1 is moved up and down, the rotary table 1a and the lift table 1b are moved up and down integrally.

Here, the reason why the first elevating support portion 7a and the second elevating support portion 7b, that is, the linear guide 5 and the spline 26 are provided in the present embodiment will be described below. FIG. 5 is a diagram showing a structure in which the spline 26 is removed from the θZ driving device. Even in this case, the lifting and lowering table 1b is supported by the linear guide 5 so as to be movable up and down, and at the same time, the rotation in the θ direction is suppressed.
However, in the case of this structure, as shown in FIG. 5, due to the mechanical backlash of the so-called linear guide 5, the left side of the table 1 is moved downward and the right side of the table 1 is moved upward by a submicron level amount. Is expected to. This minute movement causes the table 1 to vibrate slightly around the vertical axis as shown by the arrows in FIG. This slight vibration affects the positioning accuracy of the table 1 in the Z-axis direction.
Therefore, by providing the spline 26 as in the present embodiment, the vibration operation around the vertical axis of the drawing can be suppressed. As described above, both the linear guide 5 and the spline 26 have a function of suppressing the lifting table 1b from rotating in the θ direction. However, as in this embodiment, the outermost diameter portion of the lifting table 1b, that is, the rotation of the table 1 is used. By arranging the linear guide 5 at a position relatively far from the center, it is possible to suppress the elevation table 1b from rotating in the θ direction with high rigidity. Therefore, the positioning accuracy of the table 1 in the θ direction can be improved.
For the above reasons, the spline 26 may be replaced with, for example, a ball bushing that does not have a θ-direction suppressing function. In other words, the rotation in the θ direction may be suppressed only by the linear guide that can suppress the lifting table 1b from rotating in the θ direction with relatively high rigidity. Also, in applications where high positioning accuracy is not required with respect to the Z direction and the θ direction, the first elevating support portion 7a or the second elevating support portion 7b, that is, either the linear guide 5 or the spline 26 is eliminated. May be.

Next, the configuration of the position detection unit 31 of the θZ drive device will be described with reference to FIGS. 1 and 2. The position detection unit 31 detects the position in the θ direction and the position in the Z direction of the table 1. As described above, when the table 1 is rotated by the action of the θZ actuator 15, only the rotary table 1a is rotated, and when the table 1 is moved up and down, the rotary table 1a and the lift table 1b are integrally moved up and down. No. 31 needs to detect the position of the lift table 1b for detection in the Z direction, and the position of the rotary table 1a for detection in the θ direction. Therefore, specifically, the position detector 31 of the present embodiment is configured as follows.
First, as shown in FIG. 2, in order to detect the position of the table 1 in the Z direction, it is fixed to a part of the outermost periphery of the lifting table 1b, that is, the same surface as the surface on which the linear guide 5 described above is mounted. The linear scale 11 and a linear scale head 12 disposed to face the linear scale 11 are provided. The linear scale head 12 is attached by parts fixed to the upper surface of the base 6. When the table 1 moves up and down in the Z direction, the position and speed of the table 1 in the Z direction can be detected by detecting the relative position of the linear scale 11 with respect to the linear scale head 12. For this detection, an optical or magnetic principle can be used.
On the other hand, as shown in FIG. 1, in order to detect the position of the table 1 in the θ direction, an encoder disk 13 is attached to the outer peripheral portion of the cylindrical surface 1ab of the rotary table 1a so as to face the encoder disk 13. The encoder head 14 is provided. The encoder head 14 is attached near the outermost periphery of the lifting table 1b, that is, around the surface on which the above-described linear guide 5 is mounted. When the table 1, that is, the rotary table 1 a rotates in the θ direction, the position and speed of the table 1 in the θ direction can be detected by detecting the relative position of the encoder disk 13 with respect to the encoder head 14. For this detection, the principle of optical type, magnetic type, etc. can be used as in the Z direction.

Next, the self-weight compensation spring of the θZ drive device will be described. With the self-weight compensation spring described below, the θZ actuator does not need to generate thrust for supporting the self-weight of the part to be lifted, such as the table 1, the rotation support part 4, and a part of the lift support part 7, and the table Since only the thrust that gives the necessary acceleration when driving up and down is generated, the θZ actuator can be made compact.
As shown in FIG. 2, the self-weight compensation springs 9 are arranged at three locations outside the outermost peripheral surface of the lifting table 1b described above in the case of the present embodiment. More specifically, a spring seat 8a is attached to a part of the outermost peripheral surface of the lift table 1b, and a spring adjustment screw 8b is screwed to the spring seat 8a. These are arranged so that the lower end of the spring adjustment screw 8b and the upper end of the self-weight compensation spring 9 abut. The lower end of the self-weight compensation spring 9 is in contact with the upper surface of the base 6. The self-weight compensation spring 9 is inserted into a spring column 10 erected on the base 6 to prevent buckling.
With the above structure, the part such as the table 1 that moves up and down is supported by its own weight compensation spring 9 and floats. That is, the table 1 floats with respect to the base 6 through the self-weight compensation spring 9 at a height at which the weight of the ascending / descending portion and the repulsive force of the self-weight compensation spring 9 are balanced. This height can be adjusted by rotating the spring adjusting screw 8b. After this adjustment is finished, the spring adjustment screw 8b can be prevented from loosening by tightening the nut 8c screwed into the spring adjustment screw 8b.
FIG. 4 is a perspective view more clearly showing the support configuration by the self-weight compensation spring 9 described above and the configuration of the second elevating support portion 7b described above. In FIG. 4, illustrations of parts not related to the lifting operation are omitted.

Next, the exhaust mechanism of the θZ drive device will be described. When the θZ driving device is used as a positioning device for semiconductor exposure, for example, or as a positioning device for a semiconductor inspection device, for example, it is difficult to attach fine particles to the substrate mounted on the table 1 As described below, it is preferable that a substantially closed space surrounded by the base, the table, and the frame is exhausted from the exhaust hole as follows.
As shown in FIG. 1, at least one exhaust hole 23 that connects the inside and the outside of the cylindrical frame 17 is provided near the lower end of the frame 17, and a joint 22 is provided on the outside of the exhaust hole 23. It is connected. A circular cover 24 having a slight gap with the table 1 is attached to the upper end of the frame 17. Here, by connecting a pipe from an exhaust device (not shown) to the joint 22 and exhausting it, the pressure inside the θZ drive device can be made negative, and generated by bearings and linear guides such as a lifting support portion and a rotation support portion. It is possible to prevent the discharged particles from flowing out.

  Next, an XYθZ stage equipped with the θZ driving device described above will be described. FIG. 9 is an overall perspective view of an XYθZ stage to which the θZ driving device is applied. The XYθZ stage is used as a positioning device for semiconductor exposure, for example, or as a positioning device for a semiconductor inspection device, for example. The XYθZ stage in this embodiment is mounted on a surface plate 36 that is not easily affected by disturbance. A so-called XY stage is mounted on the upper surface of the surface plate 36. The XY stage can move the θZ driving device in the X and Y directions. As the X driving device and the Y driving device of the XY stage, for example, a device that linearly moves the movable portion by driving with a linear motor or the like is used. Since a known configuration of the XY stage can be used, a detailed description thereof will not be given. As is apparent from FIG. 9, by mounting the θZ driving device on the XY stage, the substrate held on the table of the θZ driving device can be precisely positioned in the X, Y, θ, and Z directions. It becomes possible. In addition, for example, the θZ driving device is small and has a low height in the Z direction as compared with a conventional stage device such as Patent Document 1, so that the entire stage device can be downsized. . In addition, since the θZ drive device is small, the X and Y drive devices can be miniaturized.

1 Table 1a Rotating table 1b Lifting table

DESCRIPTION OF SYMBOLS 3 Bearing 4 Rotation support part 5 Linear guide 6 Base 7 Elevation support part 7a 1st elevation support part 7b 2nd elevation support part 8a Spring seat 8b Spring adjustment screw 8c Nut 9 Self-weight compensation spring 10 Spring support 11 Linear scale 12 Linear scale head 13 Encoder disk 14 Encoder head 15 θZ actuator 16 Core 17 Frame 18 Z-axis coil 19 θ-axis coil 20 Yoke 21 Magnet 21a First magnet 22a Second magnet 22 Joint 23 Exhaust hole 24 Cover 25 Spline shaft 26 Spline

31 Position Detection Unit 32 Stator 33 Magnet Unit 34 Y Drive Device 35 X Drive Device 36 Surface Plate

Claims (12)

In a θZ driving device in which a table movable with respect to the base is capable of operating in two directions: vertical movement in the Z direction and rotation in the θ direction with the Z direction as the rotation center axis.
A cylindrical frame standing on the base;
A θZ actuator provided on the inner surface of the frame to drive the table in the Z direction and the θ direction;
An elevating support part for supporting the table so as to be elevable in the Z direction;
A rotation support portion for supporting the table so as to be rotatable in the θ direction;
A position detection unit for obtaining a lift position and a rotation position of the table,
The ascending / descending support portion, the rotation support portion, and the position detection portion are all located inside the θZ actuator and arranged so as to be substantially within the height of the θZ actuator in the Z direction. θZ drive unit.   The θZ actuator is composed of a magnet portion fixed to the outer peripheral surface of the table and a stator fixed to the inner surface of the frame, and is disposed on the outermost peripheral portion of the θZ drive device. The θZ driving device according to claim 1, wherein the elevating support unit, the rotation support unit, and the position detection unit are disposed inside. The table is composed of a lifting table part and a rotary table part,
The elevating table part is supported by the elevating support part so as to be movable up and down,
The rotary table portion is rotatably supported by the rotation support portion held around the lifting table portion, and includes the magnet portion on the outer peripheral surface thereof so as to be substantially the same height as the rotation support portion,
3. The θZ drive according to claim 2, wherein when rotating by the action of the θZ actuator, only the rotary table unit rotates, and when the elevator moves up and down, the rotary table and the lift table move up and down integrally. apparatus. The elevating support unit includes a first elevating support unit and a second elevating support unit,
The first lifting support unit supports the lifting table at the center of the lifting table,
The θZ driving device according to claim 3, wherein the second elevating support part supports the periphery of the elevating table at a plurality of locations.   The θZ driving device according to claim 4, wherein the lift table is supported by only one of the first and second lift support portions. The stator of the θZ actuator includes a core fixed inside the frame, a θ-axis coil fixed inside the core, and a Z-axis coil fixed inside the θ-axis coil. ,
The magnet portion of the θZ actuator includes a yoke fixed to the outer peripheral surface of the rotary table portion, and a magnet fixed to the surface of the yoke and arranged to face the Z-axis coil with a certain gap. Consists of
The magnet has a first magnet disposed at an equal pitch so that all of the magnetic poles on the upper surface in the Z direction are the same pole in the yoke, and the magnetic pole on the lower surface of the yoke in the Z direction. And a second magnet disposed at an equal pitch so as to be all of the same polarity and different from the magnetic pole of the first magnet. θZ drive unit.   The θZ according to claim 3, further comprising: a self-weight compensation spring having one end supported by the base and the other end acting on the lift table to support the weight of the lift portion including the table in the Z direction. Drive device.   The θZ driving device according to claim 7, wherein the self-weight compensation spring is provided with a spring adjustment mechanism that adjusts a length of the self-weight compensation spring.   2. The frame according to claim 1, wherein at least one exhaust hole is provided in the frame, and the inside of the substantially closed space surrounded by the base, the table, and the frame is exhausted from the exhaust hole. The described θZ driving device.   The θZ driving device according to claim 1, a Y driving device that drives the θZ driving device in a Y direction perpendicular to the Z direction, and the θZ driving device in an X direction perpendicular to the Z direction and the Y direction. An XYθZ stage comprising: an X driving device for driving. The θZ drive device according to claim 1,
A Y driving device for driving the θZ driving device in a Y direction perpendicular to the Z direction; and an X driving device for driving the θZ driving device in an X direction perpendicular to the Z direction and the Y direction. XYθZ stage,
An inspection mechanism for inspecting a substrate held on the table of the θZ driving device;
A semiconductor inspection apparatus comprising: The θZ drive device according to claim 1,
A Y driving device for driving the θZ driving device in a Y direction perpendicular to the Z direction; and an X driving device for driving the θZ driving device in an X direction perpendicular to the Z direction and the Y direction. XYθZ stage,
An exposure mechanism that exposes the substrate held on the table of the θZ driving device;
A semiconductor exposure apparatus comprising:

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