JP2009170670A - Semiconductor device, and driving method of feeder system having same semiconductor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technique whereby a reverse conducting type semiconductor device reduces the regular loss of its diode element region without degrading the recovery characteristic of its diode element region. <P>SOLUTION: In a reverse conducting type semiconductor device B1 having IGBT element regions J1 and diode element regions J2 mixed with each other in a single semiconductor substrate 2, a length whereby each second trench gate electrode TG2 of each diode element region J2 protrudes from its anode layer 50 is longer than a length whereby each first trench gate electrode TG1 of each IGBT element region J1 protrudes from its body layer 30. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a reverse conducting semiconductor device in which an IGBT element region and a diode element region are mixed on the same semiconductor substrate. The present invention also relates to a method for driving a power supply apparatus that includes the semiconductor device and supplies power to an electrical load such as a motor.

Reverse conducting semiconductor in which a region where an IGBT (insulated gate bipolar transistor) is formed (IGBT element region) and a region where a FWD (free wheel diode) is formed (diode element region) are mixed on the same semiconductor substrate The device is known.
A power supply device that supplies power to an electrical load such as a motor includes a plurality of IGBTs and a plurality of FWDs. Conventionally, a power feeding device is configured by preparing and wiring a plurality of IGBTs and a plurality of diodes. When a reverse conduction type semiconductor device is used, since the IGBT and the FWD are formed on the same semiconductor substrate, the power feeding device can be downsized as compared with the conventional case.

Since two types of elements are mixed in a reverse conducting semiconductor device, it is difficult to form an optimum configuration for both elements on the same semiconductor substrate.
In Patent Document 1, it is pointed out that when a reverse conduction type semiconductor device is used, recovery loss is increased when the diode shifts from a conduction state to a non-conduction state as compared with the conventional case. In order to solve this problem, in the semiconductor device disclosed in Patent Document 1, a p-type layer that functions as a body layer in the IGBT element region and functions as an anode layer in the diode element region is formed, for example, on the surface of a semiconductor substrate. It is formed intermittently. According to this structure, since the amount of holes flowing out from the p-type layer when the diode element region is in a conductive state can be suppressed, recovery loss in the diode element region can be reduced.

JP 2005-101514 A

When the reverse conducting semiconductor device disclosed in Patent Document 1 is used, recovery loss in the diode element region can be reduced. However, since the amount of holes flowing out from the p-type layer when the diode element region is conductive is reduced, the steady loss of the diode element region increases. It is difficult to achieve both recovery loss reduction and steady loss reduction.
The present invention was created to solve the above problems. That is, the present invention provides a technique for reducing the steady loss of the diode element region without increasing the recovery loss of the diode element region of the reverse conducting semiconductor device.

The present invention can be embodied in a semiconductor device in which an IGBT element region and a diode element region are mixed on the same semiconductor substrate.
In the IGBT element region, a p-type collector layer, an n-type drift layer, and a p-type body layer are sequentially stacked. A first trench gate electrode is formed extending from the surface of the semiconductor substrate so as to penetrate the body layer and protrude into the drift layer. An n-type emitter region is formed in a range in contact with the first trench gate electrode and facing the surface of the semiconductor substrate. The emitter region is separated from the drift layer by the body layer.
In the diode element region, an n-type cathode layer, a drift layer, and a p-type anode layer are sequentially stacked. A second trench gate electrode is formed extending from the surface of the semiconductor substrate so as to penetrate the anode layer and protrude into the drift layer. A p-type anode region is formed in a range facing the surface of the semiconductor substrate. The anode region is separated from the drift layer by the anode layer.
In the semiconductor device of the present invention, the length of the second trench gate electrode protruding from the anode layer is longer than the length of the first trench gate electrode protruding from the body layer.
In this specification, the insulating film formed on the inner surface of the trench and the gate electrode housed in the trench while being covered with the insulating film are collectively referred to as a trench gate electrode.
When both the first trench gate electrode and the second trench gate electrode are not in a floating state, they may be connected to a common gate wiring, or each may be connected to an independent gate wiring and a gate control circuit. Also good.

When a positive voltage higher than a threshold is applied to the first trench gate electrode and the second trench gate electrode in a state where the emitter region and the anode region are grounded and a positive voltage is applied to the collector layer and the cathode layer, the IGBT element In the region, an n-type channel is formed in a range in contact with the first trench gate electrode in the p-type body layer. Electrons are injected into the n-type drift layer from the n-type emitter region in contact with the first trench gate electrode through the n-type channel. When electrons are injected into the drift layer, holes are injected from the collector layer into the drift layer. Electrons and holes are injected into the drift layer, and an active conductivity modulation phenomenon occurs. As a result, the IGBT element is turned on.
When the voltage applied to the anode region becomes higher than the voltage applied to the cathode layer, holes are injected from the p-type anode region into the n-type drift layer through the p-type anode layer in the diode element region. . The diode element region becomes conductive.

  As will be described in detail later, it is preferable to perform control to apply a negative voltage to the second insulating trench gate electrode when the diode element region is in a conductive state. When such control is performed, when the diode element region is conductive, the conductivity type of the portion of the n-type drift layer that is in contact with the second trench gate electrode is inverted to form a p-type inversion region. The As in the semiconductor device of the present invention, when the length of the second trench gate electrode protruding from the anode layer is longer than the length of the first trench gate electrode protruding from the body layer, the inversion region is formed widely. . By collecting many holes in the inversion region, the forward voltage drop when the diode element region is in a conductive state can be reduced. The steady loss in the diode element region can be reduced.

In the above semiconductor device, the second trench gate electrode extends deeper than the first trench gate electrode, so that the length of the second trench gate electrode protruding from the anode layer is the body length of the first trench gate electrode. It may be set longer than the length protruding from the layer.
Alternatively, since the anode layer is shallower than the body layer, the length of the second trench gate electrode protruding from the anode layer is set longer than the length of the first trench gate electrode protruding from the body layer. It may be.
In the semiconductor device, the second trench gate electrode extends deeper than the first trench gate electrode, and the anode layer is shallower than the body layer, so that the second trench gate electrode protrudes from the anode layer. The length of the first trench gate electrode may be set longer than the length of the first trench gate electrode protruding from the body layer.
When the anode layer is formed shallower than the body layer, the amount of holes injected when the diode element region is conductive can be suppressed. Recovery loss when the diode element region shifts from the conductive state to the non-conductive state can be reduced. When the diode element region is in a conductive state, the steady loss can be reduced while the recovery loss is reduced by controlling the negative voltage to be applied to the second insulating trench gate electrode.

A p-type diffusion region is preferably formed between the IGBT element region and the diode element region. The p-type diffusion region is formed to be equal to or deeper than the second trench gate electrode, and an edge where the bottom surface of the adjacent second trench gate electrode and the side surface of the second trench gate electrode on the diffusion region side intersect is formed. It is preferable to cover. Note that the edge may form a corner or may not form a corner.
When trenches having different depths are formed in the same semiconductor substrate (when the second trench gate electrode extends deeper than the first trench gate electrode), the bottom surface of the deeper trench (second trench gate electrode) The electric field concentrates on the edges where the sides intersect. As a result, the breakdown voltage of the semiconductor device may decrease. When the p-type diffusion region described above is provided, the edge where the electric field tends to concentrate is covered with the p-type diffusion region, so that the breakdown voltage of the semiconductor device does not decrease.

The present invention also realizes a novel driving method of the power feeding apparatus. The power feeding device driven by the present invention is configured by combining a plurality of the above-described reverse conducting semiconductor devices of the present invention. This power supply device supplies power to an electrical load such as a motor.
In this method, when the IGBT element region of the semiconductor device is switched to the on state to supply power, a positive voltage is applied to the first trench gate electrode of the semiconductor device including the IGBT element region. When a return current flows through the diode element region of another semiconductor device by switching the IGBT element region to an off state, a negative voltage is applied to the second trench gate electrode of the semiconductor device through which the return current flows.

When a negative voltage is applied to the second trench gate electrode, the conductivity type of the portion in contact with the second trench gate electrode in the n-type drift layer is inverted to form a p-type inversion region. In the semiconductor device constituting the power feeding device of the present invention, the inversion region is widely formed. By collecting many holes in the inversion region, the forward voltage drop when the diode element region is in a conductive state can be reduced. The steady loss in the diode element region can be reduced.
This driving method is particularly useful when adopting a configuration in which the amount of holes injected when the diode element region is in a conductive state is reduced for the purpose of reducing recovery loss.

Prior to switching the IGBT element region from the off state to the on state again, it is preferable to interrupt application of a negative voltage to the second trench gate electrode of another semiconductor device.
In a state where a negative voltage is applied to the second trench gate electrode, the amount of holes injected into the drift layer increases. If the IGBT element region that was previously turned off is switched to the on state again and the diode element region in which the reflux current flows is switched to the non-conducting state, the recovery current is supplied to the diode element region by the holes accumulated in the drift layer. Flows. Therefore, prior to switching the IGBT element region from the OFF state to the ON state again (prior to the switching of the diode element region in which the reflux current flows) to the non-conducting state, the first of the semiconductor device in which the reflux current flows. The application of a negative voltage to the two-trench gate electrode is interrupted. As a result, the amount of holes accumulated in the drift layer is reduced, and the recovery current that flows when the diode element region is switched to the non-conductive state can be reduced. Recovery loss in the diode element region can be reduced.

The present invention also realizes a novel driving method of the power feeding device.
In this method, when power is supplied by switching at least two IGBT element regions to the on state, the first trench gate electrode of each semiconductor device including each IGBT element region to be switched on is positively connected. Apply voltage. By switching at least one IGBT element region of the IGBT element region thus switched on to an off state and maintaining at least one other IGBT element region in an on state, another semiconductor device A reflux current is passed through the diode element region. Then, after the IGBT element region that has been switched from the on state to the off state is switched to the on state again, a negative voltage is applied to the second trench gate electrode of another semiconductor device in which the reflux current has flowed.
When the recovery current flows when the diode element region shifts from the conductive state to the non-conductive state, a negative voltage is applied to the second trench gate electrode of the semiconductor device through which the recovery current flows. Then, the holes accumulated in the drift layer are attracted to the second trench gate electrode, and the speed at which the holes return to the anode region becomes slow. Soft recovery characteristics can be realized, and the recovery current can be prevented from developing into a large current. Generation of a surge voltage can be suppressed.

  According to the present invention, the steady loss of the diode element region can be reduced without increasing the recovery loss of the diode element region.

The main features of the embodiments described below are listed.
(Characteristic 1) The power feeding device K driven by the driving method of the present invention is an inverter circuit including four reverse conducting semiconductor devices A1, A2, B1, and B2.
(Feature 2) The gate electrode 12 in the IGBT element region J1 and the gate electrode 13 in the diode element region J2 are connected to a common gate wiring.

(First embodiment)
A first embodiment of a semiconductor device embodying the present invention and a driving method of a power feeding device including the semiconductor device will be described with reference to FIGS. The semiconductor device of this embodiment is a reverse conducting IGBT in which an IGBT element region and a diode element region are mixed on the same semiconductor substrate. As shown in FIG. 1, the semiconductor device B1 of the present embodiment is characterized in that the length X2 in which a plurality of second trench gate electrodes TG2 formed in the diode element region J2 protrude from the anode layer 50 is IGBT. The plurality of first trench gate electrodes TG1 formed in the element region J1 is longer than the length X1 protruding from the body layer 30.
FIG. 1 is a cross-sectional view of a main part of the semiconductor device B1. 2 to 7 are diagrams for explaining a state in which the power supply device K including the semiconductor devices A1, A2, B1, and B2 supplies power to the motor M. FIG. Each of the semiconductor devices A1, A2, B1, and B2 has the same configuration. FIG. 8 is a timing chart of gate voltages V _GA1 , V _GA2 , V _GB1 , and V _GB2 applied to the gates GA1, GA2, GB1, and GB2 of the semiconductor devices A1, A2, B1, and B2, respectively. FIG. 9 is a diagram illustrating an on state of the IGBT element region J1 of the semiconductor device B1. FIG. 10 is a diagram for explaining the conduction state of the diode element region J2 of the semiconductor device B2. FIG. 11 is an enlarged view of the vicinity of the second trench gate electrode TG2 in the diode element region J2 of FIG. FIG. 12 is a diagram illustrating a state immediately before the diode element region J2 of the semiconductor device B2 is in a conductive state and the IGBT element region J1 of the semiconductor device B1 is turned on again. FIG. 13 is a diagram illustrating a state in which a recovery current flows through the diode element region J2 of the semiconductor device B2 after the IGBT element region J1 of the semiconductor device B1 is turned on again.

A configuration of the semiconductor device B1 will be described with reference to a cross-sectional view of a main part of FIG.
The semiconductor device B1 is formed using an n ⁻ type semiconductor substrate 2. In the semiconductor substrate 2, the IGBT element region J1 and the diode element region J2 are mixed. The IGBT element region J1 and the diode element region J2 are separated by a separation region J4. Although only a limited range is shown in FIG. 1, in practice, a combination of the IGBT element region J1, the isolation region J4, the diode element region J2, and the isolation region J4 is repeatedly formed in the left-right direction.
In the IGBT element region J1, a p ⁺ -type collector region 80, an n ⁻ -type drift layer 60, and a p ⁻ -type body layer 30 are sequentially stacked. In the upper layer portion 2U of the IGBT element region J1, a plurality of first trench gate electrodes extending from the surface 2a of the semiconductor substrate 2 through the body layer 30 and projecting into the n ⁻ -type drift layer 60 by a length x1 TG1 is formed. Each first trench gate electrode TG1 extends with its longitudinal direction aligned in the depth direction of FIG. The first trench gate electrode TG1 includes an insulating film 14 formed on the inner surface of the trench. The first trench gate electrode TG1 includes the gate electrode 12 accommodated in the trench while being covered with the insulating film.

In the IGBT element region J1, a plurality of n ⁺ -type emitter regions 20 are formed in the upper layer portion 2U between the adjacent first trench gate electrodes TG1. Each emitter region 20 is formed in a range facing the surface 2 a of the semiconductor substrate 2. Each emitter region 20 is in contact with the first trench gate electrode TG1. Therefore, the emitter region 20 faces the gate electrode 12 with the insulating film 14 interposed therebetween.
In the IGBT element region J1, ap ⁺ type body contact region 22 is formed in the upper layer portion 2U. The body contact region 22 is formed in a range facing the surface 2a. The body contact region 22 is disposed between the adjacent emitter regions 20.
In the IGBT element region J 1, the emitter region 20 and the body contact region 22 are separated from the n ⁻ -type drift layer 60 by the body layer 30.

In the diode element region J2, an n ⁺ -type cathode region 70, an n ⁻ -type drift layer 60, and a p ⁻ -type anode layer 50 are sequentially stacked. The n ⁻ type drift layer 60 functions as a part of the cathode region of the diode (as a high resistance region). In the present invention, n in the IGBT element region J1 ^- -type drift layer 60, n diode element region J2 ^- since -type drift layer 60 is common, collectively both of the drift layer.
In the upper layer portion 2U of the diode element region J2, a plurality of pieces extending from the surface 2a of the semiconductor substrate 2 through the anode layer 50 and projecting into the n ⁻ -type drift layer 60 by a length x2 (x2> x1). A second trench gate electrode TG2 is formed. Each second trench gate electrode TG2 extends with its longitudinal direction aligned in the depth direction shown in FIG. The second trench gate electrode TG2 includes an insulating film 15 formed on the inner surface of the trench. The second trench gate electrode TG2 includes a gate electrode 13 accommodated in the trench while being covered with the insulating film 15.

In the diode element region J2, a p ⁺ -type anode region 40 is formed in the upper layer portion 2U between the adjacent second trench gate electrodes TG2. The anode region 40 is formed in a range facing the surface 2 a of the semiconductor substrate 2. In the diode element region J 2, the anode region 40 is separated from the drift layer 60 by the anode layer 50.

  The length X2 in which the second trench gate electrode TG2 in the diode element region J2 protrudes from the anode layer 50 is longer than the length X1 in which the first trench gate electrode TG1 in the IGBT element region J1 protrudes from the body layer 30. In the semiconductor device B1 shown in FIG. 1, the second trench gate electrode TG2 extends deeper than the first trench gate electrode TG1. The anode layer 50 in the diode element region J2 is formed in a shallower range than the body layer 30 in the IGBT element region J1.

  In the isolation region J4, a trench gate electrode having the same depth as the p-type diffusion region 90 and the second trench gate electrode TG2 is formed. The p-type diffusion region 90 extends deeper than the second trench gate electrode TG2. The p-type diffusion region 90 covers the edge portion 19 of the adjacent second trench gate electrode TG2. The edge portion 19 here is a portion where the bottom surface 11 of the second trench gate electrode TG2 and the side surface 18 on the p-type diffusion region 90 side of the side surfaces of the second trench gate electrode TG2 intersect.

A surface electrode 1 is formed on the surface 2 a of the semiconductor substrate 2. The surface electrode 1 continuously extends on the surface of the IGBT element region J1 and the surface of the diode element region J2. The surface electrode 1 is electrically connected to the emitter region 20 and the body contact region 22 in the IGBT element region J1. The surface electrode 1 is electrically connected to the anode region 40 in the diode element region J2.
An insulating film 10 is formed between the gate electrodes 12 and 13 and the surface electrode 1, and the two are not connected. The gate electrodes 12 and 13 are connected to a gate wiring (not shown) in a region where the surface electrode 1 is not formed (any cross section in the depth direction in FIG. 1).
A back electrode 3 is formed on the back surface 2 b of the semiconductor substrate 2. The back electrode 3 continuously extends from the back surface of the IGBT element region J1 and the back surface of the diode element region J2. The back electrode 3 is electrically connected to both the collector region 80 and the cathode region 70 that are formed facing the back surface 2 b in the lower layer 2 </ b> L of the semiconductor substrate 2.
Thus, the semiconductor device B1 that functions as a reverse conducting IGBT is configured.

As shown in FIGS. 2 to 7, the power feeding device K can be configured using four reverse conducting IGBTs having the same configuration as the semiconductor device B <b> 1 described above. As shown in FIG. 2, each of the semiconductor devices A1, A2, B1, and B2 is configured by a diode element region J2 between a pair of main electrodes (between collector and emitter) of the IGBT configured by the IGBT element region J1. Functions as a circuit in which diodes connected in reverse parallel are connected.
The collector CB1 of the semiconductor device B1 shown in FIGS. 2 to 7 is electrically connected to the back electrode 3 (see FIG. 1) of the semiconductor device B1. The emitter EB1 of the semiconductor device B1 is electrically connected to the surface electrode 1 (see FIG. 1) of the semiconductor device B1. The gate GB1 of the semiconductor device B1 is electrically connected to the gate electrodes 12 and 13 (see FIG. 1) of the semiconductor device B1. Similarly to the semiconductor device B1, the collector CA1, the emitter EA1, and the gate GA1 of the semiconductor device A1 are electrically connected to the respective electrodes. Similarly to the semiconductor device B1, the collector CA2, the emitter EA2, and the gate GA2 of the semiconductor device A2 are electrically connected to the respective electrodes. Similarly to the semiconductor device B1, the collector CB2, the emitter EB2, and the gate GB2 of the semiconductor device B2 are electrically connected to the respective electrodes.

The configuration of the power feeding device K will be described with reference to FIG.
The power feeding device K includes a series circuit A in which two semiconductor devices A1 and A2 of reverse conducting IGBT are connected in series, and a series circuit in which two semiconductor devices B1 and B2 of reverse conducting IGBT are connected in series. B is provided. These series circuits A and B are connected in parallel. The parallel circuit is connected between the pair of terminals c and d of the power source S. An intermediate potential point x between the semiconductor devices A1 and A2 of the series circuit A is connected to one feeding point of the motor M. An intermediate potential point y between the semiconductor devices B1 and B2 of the series circuit B is connected to the other feeding point of the motor M.

With reference to FIGS. 2 to 7, an operation in which the power supply apparatus K supplies power to the motor M will be described.
The on / off state of the IGBT element region J1 when the IGBT is on / off will be described later. The state of the diode element region J2 when the diode is conductive / non-conductive (conductive state / non-conductive state) will also be described later. First, only the operation of the power supply device K to supply power to the motor M will be described.
In the following description, the IGBT configured by the IGBT element region J1 of the semiconductor devices A1, A2, B1, and B2 is simply referred to as IGBT. In addition, the diode configured by the diode element region J2 of the semiconductor devices A1, A2, B1, and B2 is referred to as a diode.

The power feeding device K feeds power from the power source S to the motor M.
FIG. 3 shows one state where the power supply device K supplies power to the motor M. The IGBTs of the semiconductor devices B1 and A2 are turned on, and the IGBTs of the semiconductor devices A1 and B2 are turned off. In this case, a closed loop is formed that returns from the positive side of the power source S to the negative side of the power source S via the IGBT of the semiconductor device B1, the motor M, and the IGBT of the semiconductor device A2. Thereby, the electric current of the arrow direction shown in FIG. The motor M is supplied with power.
Next, as shown in FIG. 4, the IGBT of the semiconductor device B1 is turned off, and the on state of the IGBT of the semiconductor device A2 is maintained. Then, the connection between the motor M and the power source S is disconnected. However, a reflux current flows due to the inductance component of the motor M. The reflux current flows through the motor M, the IGBT of the semiconductor device A2, and the diode of the semiconductor device B2. The current in the direction of the arrow shown in FIG.
Next, the state shown in FIG. 3 is restored. A current in the direction of the arrow shown in FIG. 3 flows through the motor M, and the motor M is supplied with power.
Next, as shown in FIG. 2, the IGBT of the semiconductor device A2 is turned off, and the on state of the IGBT of the semiconductor device B1 is maintained. Then, the connection between the motor M and the power source S is disconnected. However, a reflux current flows due to the inductance component of the motor M. The reflux current flows through the motor M, the diode of the semiconductor device A1, and the IGBT of the semiconductor device B1. The current in the direction of the arrow shown in FIG.
Next, the state shown in FIG. 3 is restored. A current in the direction of the arrow shown in FIG. 3 flows through the motor M, and the motor M is supplied with power.
By repeating this state, the power feeding device K can adjust the effective value of the electric power supplied to the motor M while flowing the current in the same direction to the motor M.

The power feeding device K can switch the power feeding direction to the motor M.
FIG. 6 shows another state in which the power supply device K supplies power to the motor M. The IGBTs of the semiconductor devices A1 and B2 are turned on, and the IGBTs of the semiconductor devices B1 and A2 are turned off. In this case, a closed loop is formed that returns from the positive side of the power source S to the negative side of the power source S via the IGBT of the semiconductor device A1, the motor M, and the IGBT of the semiconductor device B2. As a result, a current in the direction of the arrow shown in FIG. The motor M is supplied with power.
Next, as shown in FIG. 7, the IGBT of the semiconductor device A1 is turned off, and the on state of the IGBT of the semiconductor device B2 is maintained. Then, the connection between the motor M and the power source S is disconnected. However, a reflux current flows due to the inductance component of the motor M. The reflux current flows through the motor M, the IGBT of the semiconductor device B2, and the diode of the semiconductor device A2. The current in the direction of the arrow shown in FIG.
Next, the state shown in FIG. 6 is restored. A current in the direction of the arrow shown in FIG. 6 flows through the motor M, and the motor M is supplied with power.
Next, as shown in FIG. 5, the IGBT of the semiconductor device B2 is turned off, and the on state of the IGBT of the semiconductor device A1 is maintained. Then, the connection between the motor M and the power source S is disconnected. However, a reflux current flows due to the inductance component of the motor M. The reflux current flows through the motor M, the diode of the semiconductor device B1, and the IGBT of the semiconductor device A1. The current in the direction of the arrow shown in FIG.
Next, the state shown in FIG. 6 is restored. A current in the direction of the arrow shown in FIG. 6 flows through the motor M, and the motor M is supplied with power.
By repeating this state, the power feeding device K can adjust the effective value of the electric power supplied to the motor M while flowing the current in the same direction to the motor M.

A driving method of the power feeding device K for realizing the above-described state will be described with reference to FIG. In addition, when the power feeding device K is driven by the driving method of FIG. 8, the state of the IGBT element region J1 and the diode element region J2 of the semiconductor devices B1 and B2 constituting the power feeding device K is shown. Will be described with reference to FIGS. 9 to 13.
In the following, a case where the power feeding device K passes a current in the direction of the arrow shown in FIGS. Since the same method is used also when the current in the direction of the arrow shown in FIGS. 5 to 7 is applied, the description regarding this case is omitted.

In FIG. 8, the gate voltages V _GA1 , V _GA2 , V _GB1 , V _GB2 applied to the gates GA1, GA2, GB1, GB2 (also see FIG. 2) of the semiconductor devices A1, A2, B1, B2 are shown in a timing chart. ing.
In the period Q1 (until time t1) in FIG. 8, the power feeding device K is in the state shown in FIG.
As shown in FIG. 8, a gate voltage V _GB1 (+ V (V)) equal to or higher than the threshold is applied to the gate GB1 of the semiconductor device B1. Further, a gate voltage V _GA2 (+ V (V)) equal to or higher than the threshold value is applied to the gate GA2 of the semiconductor device A2. The gate voltage V _GB2 and the gate voltage V _GA1 applied to the semiconductor device B2 and the semiconductor device A1 are set to 0V.
The collector CB1 of the semiconductor device B1 is connected to the positive side of the power source S, the emitter EB1 is connected to the negative side, and + V (V) is applied to the gate GB1. Thereby, the IGBT of the semiconductor device B1 is turned on (the IGBT element region J1 is turned on). Further, the collector CA2 of the semiconductor device A2 is connected to the positive side, the emitter EA2 is connected to the negative side, and + V (V) is applied to the gate GA2. Thereby, the IGBT of the semiconductor device A2 is turned on (the IGBT element region J1 is turned on). A current in the direction of the arrow shown in FIG.

FIG. 9 shows a cross-sectional view of main parts of the semiconductor device B1 in the period Q1. Since the semiconductor device A2 is the same, the semiconductor device B1 will be described as an example.
The positive side of the power source S shown in FIG. 3 is connected to the back electrode 3 (collector CB1) of the semiconductor device B1, and a positive voltage is applied. The surface electrode 1 (emitter EB1) of the semiconductor device B1 is connected to the negative side. Further, + V (V) is applied to the gate electrode 12 (gate GB1).
In the IGBT element region J1 of the semiconductor device B1, the p ⁻ -type body layer 30 facing the gate electrode 12 via the insulating film 14 is inverted to the n-type to form an n-type channel (schematically indicated by a cross in FIG. 9). Is formed). As a result, electrons that have flowed out of the emitter region 20 (schematically indicated by a minus sign in FIG. 9) are injected into the drift layer 60 via the n-type channel. As a result, a hole (shown schematically by a plus sign in FIG. 9) moves from the collector region 80 toward the drift layer 60. Electrons and holes are injected into the drift layer 60 to cause a conductivity modulation phenomenon, and the IGBT element region J1 of the semiconductor device B1 is turned on at a low on voltage. The holes are recombined with electrons and disappear, or are discharged to the surface electrode 1 through the body layer 30 and the body contact region 22.
Also in the diode element region J2 of the semiconductor device B1, the p ⁻ type anode layer 50 facing the gate electrode 13 through the insulating film 15 is inverted to the n type, and an n type channel is formed. However, since there is no n-type emitter region 20 in the diode element region J2, electrons are not injected into the drift layer 60.

In the period Q2 in FIG. 8, the power feeding device K is in the state shown in FIG. In the period Q2, as shown in FIG. 8, the gate voltage V _GB1 applied to the gate GB1 of the semiconductor device B1 is set to 0V. The gate voltage V _GA2 applied to the gate GA2 of the semiconductor device A2 maintains + V (V).
In the period Q2, the IGBT element region J1 of the semiconductor device B1 is turned off, and the on state of the IGBT element region J1 of the semiconductor device A2 is maintained. As a result, the connection between the motor M and the power source S is disconnected. However, the motor M becomes a voltage source due to the inductance component of the motor M. By this voltage, a voltage higher than that of the back electrode 3 is applied to the front electrode 1 of the semiconductor device B2. As a result, the diode element region J2 of the semiconductor device B2 becomes conductive. A reflux current flows through the motor M, the IGBT element region J1 of the semiconductor device A2, and the diode element region J2 of the semiconductor device B2. The current in the direction of the arrow shown in FIG.

As shown in FIG. 8, in the period from time t1 to time t2 in the period Q2, a negative gate voltage V _GB2 (−V (V)) is applied to the gate GB2 of the semiconductor device B2 in which the reflux current flows. .
FIG. 10 shows a cross-sectional view of the main part of the semiconductor device B2 in which the return current flows during the period from the time t1 to the time t2.
As shown in FIG. 10, a positive voltage is applied to the surface electrode 1 (anode) of the semiconductor device B2. The back electrode 3 (cathode) of the semiconductor device B2 is on the negative side.
As a result, holes flow out from the anode region 40, and the diode element region J2 becomes conductive.
When a negative voltage is applied to the gate electrode 13, holes are concentrated in a range of the anode layer 50 that faces the gate electrode 13 through the insulating film 15 (range H <b> 1 shown in FIG. 11). Further, when a negative voltage is applied to the gate electrode 13, a range of the n ⁻ -type drift layer 60 facing the gate electrode 13 through the insulating film 15 (schematically indicated by crosses in FIG. 11). ) Induces holes and inverts to the p-type region. Holes flowing out from the anode region 40 are efficiently injected into the n ⁻ -type drift layer 60 via the p-type inversion region formed around the hole concentration range H1 and the bottom of the trench. Since the holes move through the hole concentration range H1 and the p-type inversion region, the forward voltage drop in the diode element region J2 is low, and the steady loss can be reduced. This driving method reduces the amount of holes injected into the drift layer 60 when the diode element region J2 is conductive in order to reduce the recovery loss of the diode element region J2 of the semiconductor devices A1, A2, B1, and B2. This is especially useful when set.

In the period from time t2 to time t3 in the period Q2 in FIG. 8, the application of the negative gate voltage V _GB2 to the gate GB2 of the semiconductor device B2 in which the return current flows is interrupted.
FIG. 12 shows a cross-sectional view of the main part of the semiconductor device B2 at this time.
As shown in FIG. 12, a positive voltage is applied to the surface electrode 1 (anode) of the semiconductor device B2 as in the case of FIG. 10 (similar to the time t1 to the time t2 in the period Q2). The back electrode 3 (cathode) of the semiconductor device B2 is on the negative side. Accordingly, as in the case of FIG. 10, holes flow out from the anode region 40, and the diode element region J2 is in a conductive state.
In this period, since the application of the negative gate voltage V _GB2 (−V (V)) to the gate GB2 of the semiconductor device B2 is interrupted, the hole concentration range H1 disappears. Further, the p-type inversion layer formed around the bottom of the trench has also disappeared. For this reason, the efficiency with which holes are injected into the drift layer 60 decreases. The amount of holes accumulated in the drift layer 60 is reduced as compared with the case where a negative gate voltage V _GB2 (−V (V)) is applied to the gate GB2 of the semiconductor device B2 (in the case of FIG. 10). Before the IGBT of the semiconductor device B1 is turned on again (that is, before the diode element region J2 of the semiconductor device B2 in which the reflux current has flowed), the drift layer of the diode element region J2 of the semiconductor device B2 is previously set The amount of holes accumulated in 60 can be reduced. For this reason, it is possible to reduce the recovery loss that occurs when the diode element region J2 of the semiconductor device B2 is turned off.

In the period Q3 in FIG. 8, the power feeding device K returns to the state shown in FIG. In the period Q3, similarly to the period Q1, the gate voltage V _GB1 (+ V (V)) higher than the threshold is applied to the gate GB1 of the semiconductor device B1. Further, a gate voltage V _GA2 (+ V (V)) equal to or higher than the threshold value is applied to the gate GA2 of the semiconductor device A2. The gate voltage V _GB2 and the gate voltage V _GA1 applied to the semiconductor device B2 and the semiconductor device A1 are set to 0V.
In the period Q3, during the period from the time t3 to the time t4, the gate voltage V _GB2 of the gate GB2 of the semiconductor device B2 in which the return current flows in the period Q2 is set to 0 (V). After time t4, the negative gate voltage V _GB2 (−V (V)) is applied to the gate GB2 again.
The time t4 is set after the time t3 when the IGBT of the semiconductor device B1 is turned on again, and is set when the diode element region J2 of the semiconductor device B2 is performing the recovery operation.
In the diode element region J2, a recovery current in a direction opposite to that in the conductive state flows when the conductive state is changed to the non-conductive state. The generation of the recovery current is caused by the holes flowing into the drift layer 60 returning to the anode layer 50 and the anode region 40 during the conduction state. In this embodiment, when a recovery current is generated in the semiconductor device B2, a negative gate voltage V _GB2 is applied to the gate electrode 13 of the semiconductor device B2. When a negative voltage is applied, as shown in FIG. 13, holes remaining in the drift layer 60 are attracted to the gate electrode 13, and the speed at which the holes return to the anode layer 50 and the anode region 40 can be reduced. Thereby, the change speed of the recovery current can be suppressed, and soft recovery characteristics can be realized. Surge voltage caused by the change rate of the recovery current can be suppressed. In addition, the recovery current can be prevented from developing to a large current.

Thereafter, the gate voltages V _GA1 , V _GA2 , V _GB1 , and V _GB2 applied to the gates GA1, GA2, GB1, and GB2 of the semiconductor devices A1, A2, B1, and B2 constituting the power feeding device K are switched. The state shown in 4 is repeated.
In this embodiment, the case where the return current flows in the diode element region J2 of the semiconductor device B2 shown in FIG. 4 is described. However, the case where the return current flows in the diode element region J2 of another semiconductor device (FIGS. 2, 5, and 5). Each state shown in FIG. 7 is the same as that of the semiconductor device B2.

According to the driving method of the power feeding device K described above, the characteristics of the diode element region J2 of each semiconductor device can be actively controlled.
When the return current flows through the diode element region J2 of any semiconductor device, the inflow amount of holes in the diode element region J2 is increased. A negative voltage is applied to the second insulating trench gate electrode TG2 in the diode element region J2 through which the reflux current flows. As a result, the conductivity type of the portion of the n-type drift layer 60 in the diode element region J2 in contact with the second trench gate electrode TG2 is inverted to form a p-type inversion region. Holes gather in the inversion area. The semiconductor devices A1, A2, B1, and B2 constituting the power supply device K have a long length in which the second trench gate electrode TG2 protrudes from the anode layer 50. As a result, the inversion region is formed widely. When a reflux current flows through the diode element region J2, many holes gather in a widely formed inversion region. The return current easily flows through the diode element region J2. The forward voltage drop when the diode element region J2 is in the conductive state can be effectively reduced, and the steady loss can be reduced.
Further, when a recovery current flows through the diode element region J2, the recovery current can be suppressed by reducing the amount of holes accumulated in the diode element region J2.
In addition, when a recovery current is flowing in the diode element region J2, by suppressing the movement of holes in the diode element region J2, it is possible to suppress an increase in the recovery current and to slow down the recovery current change rate. Can do.
In the present embodiment, the device K is described with the supply when the motor M is a single phase. However, for example, when the motor M is a three-phase, the power supply device is configured using six reverse conducting semiconductor devices. Can be configured. The present invention is not limited to the number of phases of the power feeding circuit.

In this embodiment, the anode layer 50 in the diode element region J2 is shallower than the body layer 30 in the IGBT element region J1, and the second trench gate electrode TG2 in the diode element region J2 is the first trench gate electrode in the IGBT element region J1. The case of extending deeper than TG1 has been described. As shown in FIG. 14, if the second trench gate electrode TG2 extends deeper than the first trench gate electrode TG1, the effect of the present invention can be obtained even if the anode layer 50 is not shallower than the body layer 30. it can. In FIG. 14, the anode layer 52 in the diode element region J2 is formed to a depth equivalent to that of the body layer 30 in the IGBT element region J1. The other components are the same as those of the semiconductor device B1 shown in FIG.
Further, as shown in FIG. 15, if the second trench gate electrode TG2 extends deeper than the first trench gate electrode TG1, the configuration of the upper layer portion 2U of the IGBT element region J1 and the diode element region J2 (adjacent first Even if the layout of the semiconductor region formed between the first trench gate electrodes TG1 and the layout of the semiconductor region formed between the adjacent second trench gate electrodes TG2) are the same, the effect of the present invention can be obtained. be able to.

Further, as shown in FIG. 16, if the anode layer 50 in the diode element region J2 is shallower than the body layer 30 in the IGBT element region J1, the second trench gate electrode TG2 is not deeper than the first trench gate electrode TG1. Also, the effects of the present invention can be obtained. In FIG. 16, the second trench gate electrode TG2 in the diode element region J2 extends to the same depth as the first trench gate electrode TG1 in the IGBT element region J1. Since the trenches formed in the same semiconductor substrate 2 have the same depth, it is not necessary to form the isolation region J4 and protect the edge portion of the second trench gate electrode TG2. Therefore, the isolation region J4 is not formed. The other components are the same as those of the semiconductor device B1 shown in FIG.
As shown in FIG. 17, if the anode layer 50 in the diode element region J2 is shallower than the body layer 30 in the IGBT element region J1, the configurations of the upper layer portions 2U of the IGBT element region J1 and the diode element region J2 are the same. Even if it exists, the effect of this invention can be acquired.

(Second embodiment)
In a reverse conduction type semiconductor device, since the IGBT element region and the diode element region exist on the same semiconductor substrate, the relationship between the collector voltage V _CE and the collector current I _C in the IGBT element region may exhibit a snapback characteristic. This phenomenon is caused by the collector short structure of the reverse conducting semiconductor device. As shown in FIG. 23, in the reverse conducting semiconductor device 100, the p ⁺ -type collector region 182 of the IGBT element region J101 and the n ⁺ -type cathode region 172 of the diode element region J102 are connected to the common back electrode 3. For this reason, when the collector voltage V _CE (voltage between the front electrode 1 and the back electrode 3) is increased in a state where a gate voltage equal to or higher than the threshold is applied to the trench gate electrode, in the initial stage, the emitter region 120 Outflowed electrons flow to the cathode region 172 by bypassing the collector region 182 via the channel (schematically indicated by a cross), the drift layer 162, and the n ⁺ -type field stop region 174. May leave. As a result, even if the collector voltage V _CE is increased, the potential difference between the p ⁺ -type collector region 182 and the n ⁺ -type field stop region 174 does not easily reach the potential difference at which the pn junction D101 becomes conductive. It is difficult for holes to be injected from the collector region 182 into the drift layer 162. That is, at the initial stage of the process of increasing the collector voltage V _CE , the IGBT element region J101 is less likely to be turned on than an IGBT element alone having the same configuration. There is a delay in the timing at which the collector current I _C flows between the emitter region 120 and the collector region 182. A voltage drop occurs in the field stop region 174 due to the current flowing through the electron bypass path. When the potential difference between the collector region 182 and the field stop region 174 reaches the potential difference at which the pn junction D101 becomes conductive, the pn junction D101 is finally forward-biased and becomes conductive. Holes are injected from the collector region 182 into the drift layer 162, and the IGBT element region J101 is turned on. The collector voltage V _CE at this point is referred to as a snapback voltage of the IGBT element region J101.

In the technique described in Japanese Patent Application Laid-Open No. 2007-184486, the resistance value R101 of the field stop region 174 in the electronic bypass path is increased in order to reduce the snapback voltage. As shown in FIG. 23, an insulating trench ZT extending from the back surface 102b of the semiconductor substrate 2 to the field stop region 174 is formed. When the insulating trench ZT is formed, the resistance value of the field stop region 174 increases. A voltage drop due to electrons flowing in the electron bypass path increases. When the IGBT element region J101 shifts to the on state, the pn junction D101 can be made to conduct quickly. The snapback voltage can be reduced.
However, in this technique, it takes time and effort to form a configuration in which the resistance value R101 is increased by adding a process such as forming a trench from the back surface 102b side and filling the insulator.

Even if the conventional technique is not described above, the snapback characteristics can be improved by increasing the extension distance of the collector region 182 (if the collector region 182 is extended far from the cathode region 172). However, if the area occupied by the collector region 182 is too large in the limited area of the back surface 102b, the characteristics of the diode element region J102 are hindered.
Further, when the field stop region 174 is not formed on the collector region 182 of the IGBT element region J101, holes are easily injected from the collector region 182 into the drift region 162, and the snapback characteristics can be improved. However, the tail current when the IGBT element region J101 is turned off increases.
It is difficult to improve the snapback characteristics of the IGBT element region of the reverse conducting semiconductor device without degrading other characteristics.
The present embodiment provides a technique for improving the snapback characteristics of the IGBT element region of the reverse conducting semiconductor device without degrading other characteristics.

The main features of the embodiments described below are listed.
(Feature 1) A semiconductor device in which an IGBT element region and a diode element region are mixed on the same semiconductor substrate,
In the IGBT element region, a p-type collector layer, an n-type field stop region, an n-type drift layer, and a p-type body layer are sequentially stacked, and penetrate through the body layer from the surface of the semiconductor substrate. A first trench gate electrode projecting into the drift layer is formed, and an n-type emitter region is formed in a range in contact with the first trench gate electrode and facing the surface. A region is separated from the drift layer by the body layer;
In the diode element region, an n-type cathode layer, the field stop region, the drift layer, and a p-type anode layer are sequentially stacked, and extend from the surface through the anode layer and project into the drift layer. A second trench gate electrode is formed, a p-type anode region is formed in a range facing the surface, and the anode region is separated from the drift layer by the anode layer,
A peripheral region adjacent to the IGBT element region;
In the peripheral region, a p-type collector extension layer and the drift layer are sequentially stacked, and the collector extension layer is continuous with the collector layer in the IGBT region. (Fig. 19)
(Characteristic 2) The collector extension layer is formed on the back surface of the peripheral region of the semiconductor substrate with a width of about 270 μm from the end of the chip. (Fig. 18)
With the semiconductor device described above, the snapback characteristics of the IGBT element region can be improved without degrading other characteristics.

The semiconductor device of this example will be described with reference to FIGS. The semiconductor device 9 of this embodiment is a reverse conducting IGBT in which the IGBT element region J11 and the diode element region J12 are mixed on the same semiconductor substrate 2. The feature of the semiconductor device 9 of this embodiment is that, as shown in FIG. 22, a p-type collector extension region 84 and an n-type drift layer 62 are sequentially stacked on the back surface 2b side of the peripheral region J3. . No n-type field stop region 74 is formed between the p-type collector extension region 84 and the n-type drift layer 62.
FIG. 18 is a top view of the semiconductor device 9. FIG. 19 shows the relationship between the collector voltage V _CE and the collector current I _C of the semiconductor device 9. 20 to 22 are views of the semiconductor device 9 taken along the line XX-XX in FIG.

  As shown in FIG. 18, the semiconductor device 9 is formed in a substantially square chip having a side length L2 of about several hundred μm to 1 mm when viewed from above. A diode element region J12 is formed at the center of the chip. An IGBT element region J11 is formed so as to surround the diode element region J12. A peripheral region J3 is formed so as to surround IGBT element region J11. The peripheral region J3 is formed on each side with a width of 270 μm from the end F of the chip.

As shown in FIG. 22, the semiconductor device 9 is formed using an n ⁻ type semiconductor substrate 2.
In the IGBT element region J11, a p ⁺ -type collector region 82, an n-type field stop region 74, an n ⁻ -type drift layer 62, and a p ⁻ -type layer 32 are sequentially stacked. On the other hand, in the diode element region J12, an n ⁺ type cathode region 72, an n type field stop region 74, an n ⁻ type drift layer 62, and a p ⁻ type layer 32 are sequentially stacked.
In the upper layer portion 2U of the semiconductor substrate 2, a plurality of trench gate electrodes TG extending from the surface 2a through the p ⁻ type layer 32 and projecting into the n ⁻ type drift layer 62 are formed. Each trench gate electrode TG extends with its longitudinal direction aligned in the depth direction of FIG. The trench gate electrode TG includes an insulating film 17 formed on the inner surface of the trench. The trench gate electrode TG includes a gate electrode 16 accommodated in the trench while being covered with the insulating film 17. A plurality of n ⁺ -type regions 21 are formed in the upper layer portion 2U between adjacent trench gate electrodes TG. Each n ⁺ -type region 21 is formed in a range facing the surface 2a. Each n ⁺ -type region 21 is in contact with the trench gate electrode TG. Therefore, the n ⁺ -type region 21 faces the gate electrode 16 with the insulating film 17 interposed therebetween. A p ⁺ type region 23 is formed in the upper layer portion 2U. The p ⁺ type region 23 is formed in a range facing the surface 2a. The p ⁺ type region 23 is arranged between the adjacent n ⁺ type regions 21.
The n ⁺ type region 21 and the p ⁺ type region 23 are separated from the n ⁻ type drift layer 62 by the p ⁻ type layer 32. In the IGBT element region J11, the n ⁺ type region 21 functions as an emitter region, the p ⁺ type region 23 functions as a body contact region, and the p ⁻ type layer 32 functions as a body layer 32. In the diode element region J12, the p ⁺ type region 23 functions as an anode region, and the p ⁻ type layer 32 functions as an anode layer.

A surface electrode (not shown) is formed on the surface 2 a of the semiconductor substrate 2. The surface electrode continuously extends on the surface of the IGBT element region J11 and the surface of the diode element region J12. The surface electrode is electrically connected to the n ⁺ type region 21 and the p ⁺ type region 23. An insulating film (not shown) is formed between the gate electrode 16 accommodated in the trench gate electrode TG and the surface electrode, and the two are not connected. The gate electrode 16 is connected to a gate wiring (not shown) in a region where the surface electrode is not formed.
A back surface electrode (not shown) is formed on the back surface 2 b of the semiconductor substrate 2. The back surface electrode extends continuously from the back surface of the IGBT element region J11 and the back surface of the diode element region J12. The back electrode is electrically connected to both the collector region 82 and the cathode region 72 formed on the lower layer 2L of the semiconductor substrate 2 so as to face the back surface 2b.
Thereby, the semiconductor device 9 functioning as a reverse conducting IGBT is configured.
Note that the IGBT element region J1 described in the first embodiment may be employed as the IGBT element region J11, and the diode element region J2 described in the first embodiment may be employed as the diode element region J12. The isolation region J4 described in the first embodiment may be formed between the IGBT element region J11 and the diode element region J12.

In the peripheral region J3, a plurality of p-type withstand voltage securing regions 2G for securing a withstand voltage are formed in the upper layer portion 2U of the semiconductor substrate 2. The withstand voltage securing region 2G goes around the inside of the outer periphery of the semiconductor substrate 2 along the outer periphery. In the lower layer portion 2L, a p ⁺ -type collector extension region 84 is formed in a range facing the entire back surface 2b of the peripheral region J3. The collector extension region 84 is continuous with the collector region 82 of the IGBT element region J11. An n-type field stop region 74 is not formed on the collector extension region 84. Collector extension region 84 is in contact with drift layer 62.

The operation when the IGBT element region J11 of the semiconductor device 9 is in the steady state of the on state will be described with reference to FIG.
The gate voltage applied to the trench gate electrode TG in a state where the back electrode of the semiconductor device 9 is connected to the positive side and the front electrode is grounded (a positive voltage is applied as the collector voltage _VCE ). By turning on / off, the current flowing between the emitter and collector (between the n ⁺ -type region 21 and the collector region 82) of the IGBT element region J11 is turned on / off.
When a gate voltage equal to or higher than the threshold value is applied to the trench gate electrode TG, an n-type channel (typically indicated by crosses in FIG. 22) is formed in the p ⁻ -type layer 32 in a range where the gate electrode 16 faces through the insulating film 17. Is formed). Electrons flowing out of the n ⁺ -type region 21 are injected into the drift layer 62 through the channel. Further, when electrons are injected into the drift layer 62, holes are injected from the collector region 82 toward the drift layer 62. Electrons and holes are injected into the drift layer 62 to cause a conductivity modulation phenomenon, and the IGBT element region J11 of the semiconductor device 9 is turned on with a low on-voltage.
When the gate voltage applied to the trench gate electrode TG becomes less than the threshold value, the n-type channel formed in the p ⁻ -type layer 32 disappears. Electrons flowing out from the n ⁺ -type region 21 are not injected into the drift layer 62, and the IGBT element region J11 of the semiconductor device 9 is turned off.
On the other hand, when the front electrode of the semiconductor device 9 is connected to the positive side and the back electrode is grounded, current flows between the anode and the cathode (between the p ⁺ type region 23 and the cathode region 72) of the diode element region J12. It flows and becomes a conduction state.

FIG. 19 is a graph showing the relationship between the collector voltage V _CE and the collector current I _C when the IGBT element region J11 statically shifts from the off state to the above-described on state. In FIG. 19, a plurality of graphs are shown using the width of the collector extension region 84 from the tip end F (see also FIG. 22) as a parameter. Note that the n-type field stop region 74 is not formed on the collector extension region 84 regardless of the width of the collector extension region 84. In addition, the snapback tends to increase at lower temperatures. FIG. 19 is a graph showing the relationship between the collector voltage V _CE and the collector current I _C at 70 degrees below zero.
Graph W1 is a case where the width | variety from the chip | tip edge part F of the collector extending | stretching area | region 84 is 90 micrometers. The graph W2 is when the width is 144 μm. Graph W3 is the case where the width is 180 μm. The graph W4 is a case where the width is 216 μm. A graph W5 is the case of the semiconductor device 9 of the present embodiment, and the width is 270 μm.
In graph W4 from the graph W1, in the initial stage of gradually increasing the collector voltage V _CE, but snapback occurs, it does not occur in the graph W5. When the width of the collector extension region 84 from the chip end F is 270 μm as in the semiconductor device 9 of this embodiment, snapback does not occur.
If the width of the collector extension region 84 is 270 μm, both the IGBT element region J11 and the diode element region J12 can be freely laid out on the chip. The collector extension region 84 may be formed by implanting p-type impurities from the back surface 2b at the same time when the collector region 82 of the IGBT element region J11 is formed. The collector extension region 84 can be easily formed without adding a special process.
When the chip size is large, the width of the collector extension region 84 may be extended beyond 270 μm.

Next, the detailed operation when the IGBT element region J11 of the semiconductor device 9 is statically turned on will be described in three stages with reference to FIGS.
(First stage: period S1 of graph W5 in FIG. 19)
The collector voltage _VCE is raised while a gate voltage higher than the threshold is applied to the trench gate electrode TG. As shown in FIG. 20, an n-type channel (schematically indicated by a cross in FIG. 20) is formed in the p ⁻ -type layer 32 in a range where the gate electrode 16 is opposed to the insulating film 17. The Electrons flowing out of the n ⁺ -type region 21 are injected into the drift layer 62 through the channel. However, in the first stage shown in FIG. 20, the potential difference between the collector region 82 of the IGBT element region J11 and the field stop region 74 does not reach the potential difference at which the pn junction D11 becomes conductive. Further, the potential difference between the collector extension region 84 and the drift layer 62 in the peripheral region J3 does not reach the potential difference at which the pn junction D3 becomes conductive. Most of the electrons injected into the drift layer 62 through the channel flow to the back electrode through the cathode region 72 of the diode element region J12. Therefore, in the period S1 of the graph W5 in FIG. 19, when the value of the collector voltage V _CE is increased, the value of the collector current I _C (current flowing between the collector region 82 and the n ⁺ -type region 21) becomes gentle. It is rising. In the first stage, the semiconductor device 9 operates like a vertical MOSFET.

(Second stage: period S2 of graph W5 in FIG. 19)
From the first stage, the collector voltage _VCE is further increased. In the second stage shown in FIG. 21, the potential difference between the collector extension region 84 and the drift region 62 in the peripheral region J3 reaches a potential difference at which the pn junction D3 becomes conductive. Since the field stop region 74 is not formed on the collector extension region 84, the pn junction D3 is more likely to be in a conductive state than the pn junction D11 in the IGBT element region J11. In the second stage, the pn junction D11 in the IGBT element region J11 is not yet conductive. A small amount of holes starts to be injected into the drift region 62 from the collector extension region 84 in the peripheral region J3 by the pn junction D3. Electrons injected into the drift layer 62 through the channel are guided to holes in the peripheral region J3 and injected into the peripheral region J3. As a result, the conductivity modulation phenomenon starts in the peripheral region J3. For this reason, in the period S2, the slope of the graph W5 in FIG. 19 is steep, and the increasing rate of the collector current I _C is increasing.

(Third stage: Period S3 of graph W5 in FIG. 19)
From the second stage, the collector voltage _VCE is further increased. In the third stage shown in FIG. 22, the potential difference between the collector region 82 and the drift region 62 reaches a potential difference at which the pn junction D11 becomes conductive. Holes are injected from the collector region 82 of the IGBT element region J11 into the drift layer 62 by the pn junction D11. The conductivity modulation phenomenon also starts in the drift layer 62 of the IGBT element region J11. When this state is reached, the conductivity modulation phenomenon of the drift layer 62 becomes more active than in the second stage, and the collector current I _C increases dramatically as the collector voltage V _CE increases. The IGBT element region J11 has a larger area occupied by the back surface 2b than the peripheral region J3. That is, the collector area 82 occupies a larger area on the back surface 2 b than the collector extension area 84. Further, the collector region 82 has a shorter distance to the n ⁺ -type region 21 from which electrons flow out than the collector extension region 84. For this reason, in the third stage, conductivity modulation of the drift layer 62 is maintained by holes injected from the collector region 82 into the drift layer 62. In this way, the IGBT element region J11 shifts to the above-described steady state of the on state.

In the semiconductor device 9 of this embodiment, the second stage shown in FIG. 20 exists, and first, conductivity modulation starts in the drift layer 62 in the peripheral region J3. When a current flows through the peripheral region J3 in the second stage, the potential difference between the collector region 82 and the drift region 62 of the IGBT element region J11 easily reaches a potential difference at which the pn junction D11 becomes conductive. Snapback characteristics can be improved.
In the peripheral region J3 of the semiconductor device 9, the field stop region 74 is not formed on the collector extension region 84. In the IGBT element region J11, a field stop region 74 is formed on the collector region 82. For this reason, the snapback characteristics of the IGBT element region J11 can be improved without increasing the tail current of the IGBT element region J11.
In the semiconductor device 9, the collector extension region 84 is formed on the back surface 2b of the peripheral region J3 that hardly contributes to the conductivity modulation phenomenon when a large current from the third stage is flowing. Thereby, the snapback characteristic is improved. Since it is not necessary to increase the occupied area of the collector region 82 in order to improve the snapback characteristics, the occupied area of the diode element region J12 can be sufficiently secured. The snapback characteristics of the IGBT element region J11 can be improved without degrading the characteristics of the diode element region J12.
Further, since the p-type collector extension region 84 is formed in the peripheral region J3 of the semiconductor device 9, even if a large amount of current after the third stage described above is flowing, the collector is small in amount. Holes are injected from the stretched region 84 into the drift layer 62. For this reason, as shown in FIG. 19, the ON voltage after the IGBT element region J11 is in the steady state in the ON state is the lowest in the graph W5.

  In the present embodiment, as shown in FIG. 18, the diode element region J12 is surrounded by the IGBT element region J11, and the IGBT element region J11 is surrounded by the peripheral region J3. The configuration of the semiconductor device 9 as viewed from above is not limited to the above configuration. The p-type collector extension region 84 formed on the back surface 2b of the peripheral region J3 only needs to be continuous with at least a part of the p-type collector region 82 of the IGBT element region J11.

  Specific examples of the present invention have been described in detail above, but these are merely examples and do not limit the scope of the claims. The technical elements described in this specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the technology illustrated in the present specification or the drawings can achieve a plurality of purposes at the same time, and has technical utility by achieving one of the purposes.

It is principal part sectional drawing of reverse conduction type semiconductor device B1. A state is shown in which current is supplied to the motor M by the power feeding device K, which is configured by using the reverse conducting semiconductor devices A1, A2, B1, and B2. A state is shown in which current is supplied to the motor M by the power feeding device K, which is configured by using the reverse conducting semiconductor devices A1, A2, B1, and B2. A state is shown in which current is supplied to the motor M by the power feeding device K, which is configured by using the reverse conducting semiconductor devices A1, A2, B1, and B2. A state is shown in which current is supplied to the motor M by the power feeding device K, which is configured by using the reverse conducting semiconductor devices A1, A2, B1, and B2. A state is shown in which current is supplied to the motor M by the power feeding device K, which is configured by using the reverse conducting semiconductor devices A1, A2, B1, and B2. A state is shown in which current is supplied to the motor M by the power feeding device K, which is configured by using the reverse conducting semiconductor devices A1, A2, B1, and B2. It is a timing chart figure of the gate voltage applied to gate GA1, GA2, GB1, GB2 of semiconductor device A1, A2, B1, B2 of reverse conduction type. It is a figure explaining the ON state of IGBT element area | region J1 of semiconductor device B1. It is a figure explaining the conduction | electrical_connection state of the diode element area | region J2 of semiconductor device B2. It is a figure explaining the state when a negative voltage is applied to the gate electrode 12 when the diode element area | region J2 of semiconductor device B2 is a conduction | electrical_connection state. It is a figure explaining a state when applying a negative voltage to the gate electrode 12 is interrupted when the diode element area | region J2 of semiconductor device B2 is a conduction | electrical_connection state. The recovery operation of the diode element region J2 of the semiconductor device B2 is shown. 3 is a cross-sectional view of a main part of a reverse conducting semiconductor device 4. FIG. 3 is a cross-sectional view of a main part of a reverse conducting semiconductor device 5. FIG. 3 is a cross-sectional view of a main part of a reverse conducting semiconductor device 6. FIG. 3 is a cross-sectional view of a main part of a reverse conducting semiconductor device 7. FIG. It is the figure which looked at the semiconductor device 9 from the top. It is a graph explaining the relationship between the collector voltage V _CE and the collector current I _C in which the width from the tip end F of the collector extension region is described as a parameter. It is a figure explaining the 1st step at the time of IGBT element field J11 of semiconductor device 9 shifting to an ON state. It is a figure explaining the 2nd step at the time of IGBT element field J11 of semiconductor device 9 shifting to an ON state. It is a figure explaining the 3rd step at the time of IGBT element field J11 of semiconductor device 9 shifting to an ON state. It is a figure explaining the snapback phenomenon at the time of IGBT element area | region J101 of the conventional reverse conduction type semiconductor device 100 shifting to an ON state.

Explanation of symbols

1: front surface electrode 2: semiconductor substrate 2G: withstand voltage securing region 2L: lower layer portion 2U: upper layer portion 2a: front surface 2b: back surface 3: back surface electrodes 4, 5, 6, 7, 9: semiconductor devices 10, 14, 15, 17 : Insulating film 11: bottom surface 12, 13, 16: gate electrode 18: side surface 19: edge portion 20: emitter region 21: n ⁺ type region 22: body contact region 23: p ⁺ type region 30: body layer 32: p ⁻ Type layer 40: Anode region 50, 52: Anode layer 60, 62: Drift layer 70, 72: Cathode region 74: Field stop region 80, 82: Collector region 84: Collector extension region 90: P-type diffusion region 100: Semiconductor device 102b: Back surface 120: Emitter region 162: Drift layer 172: Cathode region 174: Field stop region 182: Collector region A, B: Series circuits A1, A2, 1, B2: Semiconductor device c, d: Terminals CA1, CA2, CB1, CB2: Collector D101: D11: D3: pn junctions EA1, EA2, EB1, EB2: Emitter F: Ends GA1, GA2, GB1, GB2 Gate H1 : Concentration range
I _C : Collector current I _S : Current J1, J101, J11: IGBT Element region J2, 102, J12: Diode element region J3: Peripheral region J4: Isolation region K: Feeder M: Motor S: Power supply TG, TG1, TG2 : Trench gate electrode
_VGA1 , _VGA2 , _VGB1 , _VGB2 : Gate voltage x, y: Intermediate potential point ZT: Insulation trench

Claims (7)

It is a semiconductor device in which the IGBT element region and the diode element region are mixed on the same semiconductor substrate,
In the IGBT element region, a p-type collector layer, an n-type drift layer, and a p-type body layer are sequentially stacked, extending from the surface of the semiconductor substrate through the body layer and projecting into the drift layer. A first trench gate electrode is formed, an n-type emitter region is formed in a range in contact with the first trench gate electrode and facing the surface, and the emitter region is formed by the body layer. Separated from the drift layer,
In the diode element region, an n-type cathode layer, the drift layer, and a p-type anode layer are sequentially stacked, and a second trench extending from the surface through the anode layer and projecting into the drift layer. A gate electrode is formed, a p-type anode region is formed in a range facing the surface, and the anode region is separated from the drift layer by the anode layer,
The length of the second trench gate electrode protruding from the anode layer is longer than the length of the first trench gate electrode protruding from the body layer.   The semiconductor device according to claim 1, wherein the second trench gate electrode extends deeper than the first trench gate electrode.   The semiconductor device according to claim 1, wherein the anode layer is shallower than the body layer.   A p-type diffusion region is formed between the IGBT element region and the diode element region, and the p-type diffusion region is formed to be equal to or deeper than the second trench gate electrode, The p-type diffusion region covers an edge where the bottom surface of the adjacent second trench gate electrode and the side surface of the second trench gate electrode on the diffusion region side intersect with each other. The semiconductor device according to item. A driving method of a power feeding device configured by combining a plurality of semiconductor devices according to any one of claims 1 to 4,
When supplying power by switching the IGBT element region to an ON state, a positive voltage is applied to the first trench gate electrode of the semiconductor device including the IGBT element region,
When a return current flows through the diode element region of another semiconductor device by switching the IGBT element region to an off state, a negative voltage is applied to the second trench gate electrode of the semiconductor device through which the return current flows. A method for driving a power feeding device.   6. The application of a negative voltage to the second trench gate electrode of the other semiconductor device is interrupted prior to switching the IGBT element region from the off state to the on state again. 6. A method for driving the power supply apparatus. A driving method of a power feeding device configured by combining a plurality of semiconductor devices according to any one of claims 1 to 4,
When supplying power by switching at least two IGBT element regions to the on state, a positive voltage is applied to each first trench gate electrode of each semiconductor device including each IGBT element region to be switched to the on state. And
By switching at least one IGBT element region from among the IGBT element regions previously switched to the on state to the off state and maintaining at least one other IGBT element region in the on state, another semiconductor device A reflux current is passed through the diode element region,
A negative voltage is applied to the second trench gate electrode of the another semiconductor device in which the reflux current is passed after the IGBT element region that has been switched from the on state to the off state is switched to the on state again. To drive the power feeding apparatus.

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