JP2009163864A - Near field light generation element, near field light recording apparatus, and near field light microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enhance performance of a near field light recording apparatus and a near field light microscope each using a near field light generation element by enhancing optical efficiency of the near field light generation element. <P>SOLUTION: The near field light generation element has an optically transparent triangular pyramid 402 and a light shielding film 403 covering the triangular pyramid 402, wherein a pyramid exposure part 404 is formed by removing the light shielding film 403 placing on part of a slope including a vertex of the triangular pyramid 402 and a metal film 405 is formed from above the exposure part 404 thereby the triangular pyramid 402 and the metal film 405 are brought into contact with each other via the pyramid exposure part 404. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

The present invention relates to an element that generates near-field light, a head for a high-density information recording apparatus using near-field light, and a probe for a high-resolution microscope.

The near-field light generating element is used in an optical head in an optical recording apparatus that performs high-density information recording / reproduction, an optical probe in a near-field light microscope that performs observation at high resolution, and the like.

Development of high-density optical recording devices has been actively promoted with the explosive increase in the amount of information such as images and moving images in recent years. It is known that an optical disc represented by a CD (compact disc) or a DVD (digital versatile disc) has a recording density limit due to a diffraction limit of light. In order to exceed this limit, a method using light having a shorter wavelength and a method using near-field light have been proposed. An optical recording device that uses near-field light is light that is incident on an optical microscopic aperture that is smaller than the wavelength, and the near-field light that has spread slightly from the aperture interacts with the surface of the recording medium to transmit or reflect the scattered light. In this method, a minute data mark is read by detecting light. Since the minimum mark size that can be recorded / reproduced is limited not by the wavelength of the incident light but by the aperture size, the recording density can be improved by producing a minute aperture.

In an optical recording apparatus using near-field light, the aperture needs to be close to the surface of the recording medium. In order to realize a high data transfer rate, it is necessary to scan the surface of the recording medium at a high speed. In order to satisfy these conditions, a flying head method typically used in conventional magnetic recording has been proposed (for example, see Non-Patent Document 1). The structure of the head is such that a floating slider and a minute opening are formed on a flat substrate by a semiconductor process. For example, a silicon dioxide layer is laminated on a silicon substrate, a tip resist pattern is formed by lithography, and the silicon dioxide layer is etched to produce a conical tip made of silicon dioxide. After aluminum was vacuum-deposited to about 200 nm, FIB (
By cutting the tip end with a focused ion beam device, a tip having an optical opening at the tip is produced.

In addition, optical probes used in near-field optical microscopes heat, extend, and
After cutting and vapor-depositing an aluminum light-shielding film, the tip is cut to form an optical opening.

In the near-field light generating element as described above, efforts have been made to improve the near-field light intensity (herein referred to as the light efficiency of the probe) generated from the aperture with respect to the incident light intensity. If the probe's light efficiency is low, sufficient contrast cannot be obtained, and in the case of a near-field optical microscope, the accuracy of the output image, and in the case of a near-field optical recording device, the data transfer speed and recording density are insufficient. It is.

In order to improve the light efficiency, a device has been devised such as flattening the tip by applying a beam from the side of the probe when the tip of the probe is cut with FIB (see, for example, Non-Patent Document 2). In addition, an attempt to improve resolution by forming minute protrusions in the opening surface (see, for example, Non-Patent Document 3) or an attempt to improve resolution by forming an edge of a light-shielding film at the base of the probe ( For example, see Non-Patent Document 4.)

In addition, the optical efficiency is improved by making the contour shape of the optical aperture a triangle and making the polarization direction of incident light and one side of the triangle perpendicular to each other (for example, Patent Document 1).
reference. ).

JP 2001-118543 A

Issiki, F.M. et al, Applied Physics Letters, 76 (7), 804 (2000).

Veerman, J.M. A. et al, Applied Physics Letters, 72 (24), 3115 (1998).

Ohtsu, M .; , J .; Lightwave Tech. , 13 (7), 1200 (1995)

Yatsui, T .; et al, Applied Physics Letters, 71 (13), 1756 (1997).

However, in the methods shown in Non-Patent Document 2 or 3 and Patent Document 1, since the size of the optical aperture is less than or equal to the wavelength of light, the incident light contributes to the propagation of light as it approaches the optical aperture. When the diameter of the area to be reduced becomes smaller and the diameter is almost equal to or less than the wavelength of light, the propagating light is rapidly attenuated (cut-off area). For this reason, even if the size and shape of the optical aperture are changed, the light that has reached the optical aperture is already greatly attenuated,
The effect was limited.

In the technique shown in Non-Patent Document 4, the above problem is addressed, but the distance between the edge of the light-shielding film and the probe tip where near-field light is generated is large, and it cannot be said that a sufficient effect is obtained. .

The present invention is based on several attempts as described above, in order to further improve the resolution of the near-field light microscope, or the data transfer speed and recording density of the near-field optical recording apparatus, and the light of the near-field light generating element. It improves efficiency.

In order to solve the above-described problem, in the present invention, a near-field light generating element having an optically transparent cone and a light-shielding film covering the cone, each of the cone and the light-shielding film. A metal film covering part or all of the film, the cone exposed part on the part of the slope including the apex of the cone, the cone exposed part removed, and the cone and the metal film via the cone exposed part A near-field light generating element having contact with each other.

As a result, it is possible to avoid the propagation of light in the cutoff region in the cone and to propagate the energy to the tip of the near-field light generating element through the metal film. Field light can be generated.

In the near-field light generating element, the length of the cone exposed portion in the cone slope direction is from several tens of nm to the wavelength of light.

Thereby, in a necessary and sufficient area for the size of the cut-off area,
It is possible to avoid the propagation of light and propagate it as energy on the metal film.

In the near-field light generating element, the cone exposed portion has a notch shape of the cone including the apex of the cone.

Thereby, propagating light can be efficiently converted into energy on the metal film, and high-efficiency near-field light can be generated.

Further, in the near-field light generating element, an optical aperture having a size equal to or less than a wavelength of light, the cone not being covered with the light shielding film and the metal film, is provided near the apex of the cone. And

Thereby, near-field light can be efficiently generated at the tip of the near-field light generating element.

  The near-field light generating element is used in a near-field optical recording apparatus.

This makes it possible to increase the data transfer speed and the recording density of the near-field optical recording apparatus.

  The near-field light generating element is used in a near-field light microscope.

  This makes it possible to increase the accuracy of the output image of the near-field light microscope.

In the present invention, the structure having the cone exposed portion and the metal film in contact with the cone can avoid the propagation of light in the cutoff region and can propagate the energy to the optical aperture through the metal film. Compared with the structure, near-field light can be generated with higher efficiency.

Further, the structure in which the metal film covers only the cone-exposed portion and the light-shielding film on the side of the cone-exposed portion can localize the metal film and cope with high recording density.

In addition, by using a substantially conical near-field light generating element, it is easy to form the cone exposed portion using the FIB apparatus.

Further, according to the present invention, the plasmon of the metal film is more strongly excited by the above structure having the edge in addition to the cone exposed portion and the metal film, so that it is possible to generate near-field light with higher efficiency.

In the present invention, near-field light is generated not from the optical aperture but from the apex, so that the near-field light generating element and the recording medium can interact in a very small area. Therefore, it is possible to cope with a high recording density.

In addition, since the entire light-shielding film is covered with a metal film, even when a material that easily oxidizes, such as silver, is used for the light-shielding film, the light-shielding film is prevented from being oxidized and the performance of the near-field light generating element is deteriorated. Can be prevented.

Further, according to the present invention, in the scanning near-field light microscope having a configuration using the near-field light generating element, the effect of the near-field light generating element as described above also appears in the near-field light microscope, Accuracy can be improved.

  Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1)
FIG. 1 is a diagram illustrating the configuration of the information recording / reproducing apparatus according to the first embodiment.
The information reproducing apparatus according to the present embodiment is similar in basic configuration to the conventional magnetic disk apparatus. Near-field optical head 104 having a minute aperture (not shown) for generating near-field light.
The recording medium 105 is rotated at a high speed in the direction indicated by the arrow 112 in the drawing while being close to the surface of the recording medium 105 up to several tens of nm. A flexure 108 is formed at the tip of the suspension arm 107 so that the near-field optical head 104 always floats with a fixed relative arrangement with respect to the recording medium 105. Suspension arm 10
7 is movable in the radial direction of the recording medium 105 by a voice coil motor (not shown). The near-field optical head 104 is arranged so that a minute opening faces the recording medium 105. In order to guide the light beam from the laser 101 to the near-field optical head 104, a lens 102 and an optical waveguide 103 composed of a core and a clad fixed to a suspension arm 107 are used. As the optical waveguide 103, a polarization-preserving waveguide having a rectangular core cross-sectional shape was used so as to preserve the polarization direction of the light flux from the laser. If necessary, the laser 101 can be intensity-modulated by the circuit system 110. A light receiving head 106 for reading information recorded on the recording medium 105 is attached to a suspension arm 109, and the suspension arm 109 is the same voice coil motor (not shown) as the suspension arm 107.
Is attached.

FIG. 2 is a diagram for explaining the waveguide and the near-field optical head of the information recording / reproducing apparatus according to the first embodiment. The head structure as shown in FIG. 2 is, for example, (Kato, Ke.
tal, International Symposium On Opti
It is similar to the structure proposed in cal Memory 2000).
In order to realize the lens function for the head on the substrate 111, for example, a microlens 205 is formed on a transparent glass substrate, and an air bearing surface 204 is provided on the recording medium surface side so that the air bearing surface 204 always floats in a certain relative arrangement. Is formed. A near-field light generating element 206 is formed on the bottom surface of the substrate 111. Micro lens 2
05 condenses the light flux from the optical waveguide 103 on the near-field light generating element 206.

On top of the aperture substrate 111, a mirror substrate 210 having a mirror surface 203 on which aluminum (not shown) having a thickness of 200 nm is deposited, a core 201, and a cladding 20
An optical waveguide 103 composed of 2 is fixed. Here, a glass substrate that transmits light at the wavelength of the laser to be used is used as the aperture substrate 111. However, a silicon substrate or the like is used, and only the portion that transmits the microlens 205 and the light beam transmits light at the wavelength used. You may make with material. The microlens 205 can be a normal spherical or aspherical lens, a gradient index lens, a Fresnel lens, or the like. In particular, when a Fresnel lens, which is a planar lens, is used, it is possible to reduce the thickness of the near-field optical head even if a lens having a large diameter is formed. Fresnel lenses can be mass-produced using photolithography technology.

The present invention is characterized by the near-field light generating element 206 and the incident light polarization in the head structure shown in FIG. FIG. 3 is a view showing the vicinity of the near-field light generating element 206 on the bottom of the optical head of the information recording / reproducing apparatus according to the first embodiment. The near-field light generating element 206 having a substantially triangular pyramid shape has an optical aperture 301 at the tip. 4A is a cross-sectional view of the vicinity of the near-field light generating element 206 on the plane AA ′ shown in FIG. FIG.
FIG. 6B is a top view in the vicinity of the optical aperture 301.

On the substrate 111 (bottom surface), a triangular pyramid 402 made of silicon dioxide and having a height of about several μm to 10 μm is formed. Triangular pyramid 402 and substrate 111 near triangular pyramid 402
Is covered with a light shielding film 403 made of aluminum. The thickness of the light shielding film 403 is 2
It is about 00 to 300 nm. The light shielding film 403 is removed on one side surface of the triangular pyramid 402 from the apex of the triangular pyramid 402 to the lower side by about several hundred nm to several μm. The surface from which the light shielding film 403 has been removed forms a cone-exposed portion 404. An FIB (focused ion beam) apparatus may be used for removing the light shielding film 403. The light shielding film 403 and the cone exposed portion 404 are the optical aperture 3 positioned at the apex of the triangular pyramid 402.
The metal film 405 is covered except for 01. The thickness of the metal film 405 is about several tens of nm, and gold can be used as a material.

In FIG. 4A, light incident from below propagates toward the apex of the triangular pyramid 402. This light has a polarization direction parallel to a line extending from the central axis of the triangular pyramid 402 perpendicular to the surface of the cone exposed portion 404 and a plane extending from the central axis of the triangular pyramid 402. Triangular pyramid 402
The light that has reached the cone exposed portion 404 near the apex excites the plasmon of the metal film 405 and propagates toward the optical aperture 301 via the metal film 405. Here, near-field light is generated from the optical aperture 301.

When the cone exposed portion 404 and the metal film 405 in contact therewith are not provided, the triangular pyramid 402 other than the optical aperture is covered only with the light shielding film. Incident light propagates through the triangular pyramid 402, but as it approaches the optical aperture, the diameter of the region contributing to propagation decreases,
When the diameter is almost equal to or less than the wavelength of light, the propagating light attenuates rapidly (cutoff region).
. For this reason, light efficiency falls. In the present embodiment, the structure having the cone exposed portion 404 and the metal film 405 in contact with the cone can avoid the propagation of light in the cut-off region and propagate the energy through the metal film to the optical aperture. Because you can
Compared with the conventional structure, near-field light can be generated more efficiently.

Although the near-field light generating element 206 having a substantially triangular pyramid shape has been described so far, similar effects can be obtained by using other cones. FIG. 5 is a top view of the vicinity of the optical aperture of the near-field light generating element 206 having a substantially conical shape. Similar to FIG. 4B, the optical opening 301 is surrounded by the light shielding film 403 except for the cone exposed portion 404, and is in contact with the metal film 405 through the cone exposed portion 404. In the near-field light generating element having a substantially triangular pyramid shape, the light shielding film 40 is parallel to the side plane of the triangular pyramid 402 during processing by FIB.
3 is required to be processed, but in the case of a near-conical light generating element having a substantially conical shape, it is obvious that this is not necessary, and thus the fabrication thereof is facilitated.

FIG. 6 is a variation of FIG. The structure is almost the same, but the metal film 405
Is different in that it covers only the light shielding film 403 on the side of the cone exposed portion 404 and the cone exposed portion. Compared to the structure of FIG. 4, the metal film 405 can be localized,
It is possible to cope with a high recording density.

(Embodiment 2)
FIG. 7 is a cross-sectional view of the vicinity of a near-field light generating element according to Embodiment 2 of the present invention.
The configuration other than the vicinity of the near-field light generating element is the same as that in the first embodiment, and FIG. 7 corresponds to FIG. 4A in the first embodiment.

On the substrate 111 (bottom surface), a triangular pyramid 402 made of silicon dioxide and having a height of about several μm to 10 μm is formed. Triangular pyramid 402 and substrate 11 near triangular pyramid 402
1 is covered with a light shielding film 403 made of aluminum. The thickness of the light shielding film 403 is about 200 to 300 nm. The light shielding film 403 is formed on one side surface of the triangular pyramid 402 from the apex of the triangular pyramid 402 to the lower side by about several hundred nm to several μm.
Has been removed. A portion of the triangular pyramid 402 from which the light shielding film 403 has been removed is a number n.
Etching is performed at a depth of about m to several tens of nm. The etched surface forms a cone-exposed portion 404 composed of two planes. A line where the two planes intersect is called an edge 701. The light shielding film 403 and the cone exposed portion 404 are covered with a metal film 405 except for the optical opening 301 located at the apex of the triangular pyramid 402. Metal film 40
The thickness of 5 is about several tens of nm, and gold can be used as the material.

The principle that near-field light is generated from the optical aperture 301 is substantially the same as the principle described in Embodiment Mode 1 of the present invention, but the plasmon of the metal film 405 is more strongly excited due to the edge 701.

With the above structure having the cone exposed portion 404, the metal film 405, and the edge 701, it is possible to generate near-field light with higher efficiency than the conventional structure.

FIG. 8 is a variation of FIG. The structure is almost the same, but the metal film 405
Is different in that it covers only the light shielding film 403 on the side of the cone exposed portion 404 and the cone exposed portion. Compared to the structure of FIG. 7, the metal film 405 can be localized,
It is possible to cope with a high recording density.

Although the near-triangle-pyramidal near-field light generating element has been described so far, similar effects can be obtained even when other cones are used as in the first embodiment.

(Embodiment 3)
FIG. 9 is a cross-sectional view near the near-field light generating element according to Embodiment 3 of the present invention.
FIG. 9 corresponds to FIG. 7 in the second embodiment.

The configuration other than the vicinity of the near-field light generating element is the same as that of the second embodiment, except that it does not have an optical aperture. The triangular pyramid 402 is covered with the light shielding film 403 except for the cone exposed portion 404, and the entire cone exposed portion 404 and the light shielding film 403 remain covered with the metal film 405. Therefore, the vertex 901 of the near-field light generating element having a substantially triangular pyramid shape.
Is covered with a metal film 405.

In FIG. 9, light incident from below propagates toward the apex of the triangular pyramid 402. This light has a polarization direction parallel to a line extending from the central axis of the triangular pyramid 402 perpendicular to the surface of the cone exposed portion 404 and a plane extending from the central axis of the triangular pyramid 402. The light that has reached the cone exposed portion 404 near the apex of the triangular pyramid 402 excites the plasmon of the metal film 405 and propagates toward the apex 901 through the metal film 405. Here, vertex 901
Near-field light is generated.

In this embodiment mode, near-field light is generated not from the optical aperture but from the apex 901, so that the near-field light generating element and the recording medium 105 can interact with each other in a very small area. Therefore, it is possible to cope with a high recording density.

Further, since the entire light shielding film 403 is covered with the metal film 405, even when a material that is easily oxidized such as silver is used for the light shielding film 403, the light shielding film 403 is prevented from being oxidized,
The performance deterioration of the near-field light generating element can be prevented.

(Embodiment 4)
FIG. 10 is a configuration diagram showing a scanning near-field optical microscope according to the fourth embodiment of the present invention. This scanning near-field optical microscope includes a near-field optical probe 1000, a light source 1001 for measuring optical information, a lens 1002 disposed in front of the light source 1001, and light collected by the lens 1002 up to the near-field optical probe 1000. Propagating optical fiber 1
003, a prism 1011 disposed below the sample 1010, and the prism 10
11 includes a lens 1014 that condenses the propagation light reflected by the light source 11 and a light detection unit 1009 that receives the collected propagation light.

The near-field optical probe 1000 has a cantilever 1015, and the cantilever 101
5 is provided with a near-field light generating element 206. The structure of the near-field light 206 is the same as that shown in the first to third embodiments of the present invention. A light shielding film 1016 is formed on the side surface of the cantilever 1015 on the side provided with the near-field light generating element 206.

The optical fiber 1003 is a polarization preserving fiber that preserves the polarization direction of incident light. Above the near-field optical probe 1000, a laser oscillator 1004 that outputs laser light, a mirror 1005 that reflects laser light reflected at the interface between the cantilever 1015 and the light shielding film 1016, and the reflected laser light are received. And then photoelectrically convert 2
And a divided photoelectric conversion unit 1006. Further, a coarse movement mechanism 1013 and a fine movement mechanism 1 for controlling movement of the sample 1010 and the prism 1011 in the XYZ directions.
012, a servo mechanism 1007 that drives the coarse movement mechanism 1013 and the fine movement mechanism 1012, and a computer 1008 that controls the entire apparatus.

Next, the operation of this scanning near-field optical microscope will be described. Laser oscillator 1
The laser light emitted from 004 is reflected at the interface between the cantilever 1015 and the light shielding film 1016. The cantilever 1015 of the near-field optical probe 1000 is a near-field light generating element 20.
6 and the surface of the sample 1010 approach each other, it bends due to attraction or repulsion between the sample 1010. For this reason, since the optical path of the reflected laser light changes, this is detected by the photoelectric conversion unit 1006.

A signal detected by the photoelectric conversion unit 1006 is sent to the servo mechanism 1007.
The servo mechanism 1007 is based on the signal detected by the photoelectric conversion unit 1006 and the sample 1
When approaching the near-field optical probe 1000 to 010 or observing the surface,
The coarse movement mechanism 1013 and the fine movement mechanism 1012 are controlled so that the deflection of the near-field optical probe 1000 is constant. The computer 1008 includes a servo mechanism 1007
The surface shape information is received from the control signal. In addition, light emitted from the light source 1001 is collected by the lens 1002 and reaches the optical fiber 1003. The light propagating through the optical fiber 1003 is a near-field optical probe 1000 while maintaining the polarization.
The near-field light generating element 206 is irradiated onto the sample 1010. On the other hand, the prism 10
The optical information of the sample 1010 reflected by 11 is collected by the lens 1014 and introduced into the light detection unit 1009. The signal of the light detection unit 1009 is acquired via the analog input interface of the computer 1008, and the computer 100
8 is detected as optical information. The light incident method to the near-field light generating element 206 is not using the optical fiber 1003 but condenses the light emitted from the light source 1001 directly onto the near-field light generating element 206 by a lens and introduces the incident light. The method to do is also good.

Furthermore, although the transmission mode for detecting the light transmitted through the sample 1010 has been described so far, the near-field optical probe 1000 can be used in the reflection mode for detecting the light reflected by the sample 1010. Further, the cantilever 1015 is vibrated by vibrating the near-field optical probe 1000 with a bimorph or the like, and the cantilever 1015 generated by repulsive force or attractive force acting between the near-field light generating element 206 and the sample 1010. The near-field optical probe 1000 can also be used in a dynamic force mode in which the distance between the near-field light generating element 206 and the sample 1010 is controlled so as to keep the change in amplitude and the change in the frequency of vibration of the cantilever 1015 constant.

In the scanning near-field light microscope having the configuration using the near-field light generating element 206 capable of generating near-field light with high efficiency as described above, the effects described in the first to third embodiments can be achieved in the near-field light microscope. And the accuracy of the observed image can be improved.

It is the figure explaining the structure of the information recording / reproducing apparatus which concerns on Embodiment 1 of this invention. It is a figure explaining the waveguide and the near-field optical head of the information recording / reproducing apparatus concerning Embodiment 1 of this invention. In the optical head of the information recording / reproducing apparatus according to Embodiment 1 of the present invention, it is a diagram showing the vicinity of the near-field light generating element on the bottom surface. FIG. 2 is a cross-sectional view showing the vicinity of a near-field light generating element and a top view showing the vicinity of an optical aperture in the optical head of the information recording / reproducing apparatus according to Embodiment 1 of the present invention. FIG. 3 is a top view showing the vicinity of an optical aperture in the optical head of the information recording / reproducing apparatus according to Embodiment 1 of the present invention. FIG. 3 is a cross-sectional view showing the vicinity of a near-field light generating element in the optical head of the information recording / reproducing apparatus according to Embodiment 1 of the present invention. FIG. 6 is a cross-sectional view showing the vicinity of a near-field light generating element in an optical head of an information recording / reproducing apparatus according to Embodiment 2 of the present invention. FIG. 6 is a cross-sectional view showing the vicinity of a near-field light generating element in an optical head of an information recording / reproducing apparatus according to Embodiment 2 of the present invention. It is sectional drawing which showed the near-field light generation element vicinity in the optical head of the information recording / reproducing apparatus which concerns on Embodiment 3 of this invention. It is a figure explaining the structure of the microscope which concerns on Embodiment 4 of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 101 Laser 102 Lens 103 Optical waveguide 104 Near-field optical head 105 Recording medium 106 Light receiving head 107 Suspension arm 108 Flexure 109 Suspension arm 110 Circuit system 111 Substrate 201 Core 202 Clad 203 Mirror surface 204 Air bearing surface 205 Microlens 206 Minute aperture 210 Mirror Substrate 301 Optical aperture 402 Triangular pyramid 403 Light-shielding film 404 Cone exposed portion 405 Metal film 701 Edge 901 Vertex 1001 Light source 1002 Lens 1003 Optical fiber 1004 Laser oscillator 1005 Mirror 1006 Photoelectric conversion unit 1007 Servo mechanism 1008 Computer 1009 Photodetection unit 1010 Sample 1011 Prism 1012 Fine movement mechanism 1013 Coarse movement mechanism 1014 Lens 1 15 cantilever 1016 shielding film

Claims (6)

An optically transparent cone located on the substrate;
A near-field light generating element that has a light-shielding film covering the cone and generates near-field light,
A metal film covering part or all of the cone and the light shielding film, and
In a cross section of the cone parallel to the substrate, the cone exposed portion from which the light shielding film placed on a part of the slope including the tip of the cone is removed,
The near-field light generating element, wherein the cone and the metal film are in contact with each other by providing the metal film on the cone exposed portion. The near-field light generating element according to claim 1, wherein a length of the cone exposed portion in the cone slope direction is approximately several tens of nm to a wavelength of light. The near-field light generating element according to claim 1, wherein the cone exposed portion has a cutout shape of the cone including the apex of the cone. The optical opening which becomes the magnitude | size below the wavelength of light in which the said cone is not covered with the said light shielding film and the said metal film in the vertex vicinity of the said cone is provided.
4. The near-field light generating element according to 4. A near-field optical recording apparatus using the near-field light generating element according to claim 1. A near-field light microscope using the near-field light generating element according to claim 1.

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