JP2009153842A - Anti-smoke hanging wall - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mobile anti-smoke hanging wall capable of suppressing the prevention of a down flow in a clean room. <P>SOLUTION: The anti-smoke hanging wall 3 is extended in a direction crossing the rail 4 of ceiling transportation equipment for transporting an object 6 to be transported by a track 5 moving on the rail 4 inside the clean room where the down flow is formed. The anti-smoke hanging wall 3 includes: a fixing part 310 arranged in the upper part of the rail 4; and a mobile part 320 attached to the fixing part 310 so as to be slidably movable downward to the fixing part 310. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a smoke-proof hanging wall, and more particularly to a smoke-proof hanging wall provided on a ceiling of a clean room.

  As a configuration for performing the smoke-proof section defined by the Building Standard Law, a smoke-proof wall that hangs a predetermined amount (for example, 500 mm or more) from the ceiling is used.

As such a smoke-proof hanging wall, a fixed type and a movable type are conventionally used. For example, Japanese Patent Laid-Open No. 10-127799 (Patent Document 1) describes a smoke-proof hanging wall that can be held on the same plane as the ceiling when not in use, as a movable smoke-proof hanging wall. Japanese Patent Application Laid-Open No. 8-84781 (Patent Document 2) discloses a smoke-proof hanging wall that wraps a smoke-proof hanging wall in a winding device provided on the ceiling when not in use and hangs it down when in use. Are listed.
Japanese Patent Laid-Open No. 10-127799 JP-A-8-84781

  Even in a clean room used for manufacturing semiconductors or the like, it is necessary to provide a smoke-proof hanging wall. In the clean room, since the ceiling transport facility is used, from the viewpoint of securing an effective space from the floor surface, it is preferable to use a movable smoke-proof hanging wall that is stored when not in use.

  On the other hand, in the clean room, a downflow is formed downward from the ceiling. It is preferable not to inhibit this downflow by using a movable smoke-proof hanging wall.

  In the smoke-proof hanging wall described in Patent Document 1, the downflow is blocked by the smoke-proof hanging wall stored on the same surface as the ceiling when not in use. In addition, in the smoke-proof hanging wall described in Patent Document 2, since it is necessary to provide a winding device for winding the smoke-proof hanging wall when not in use in the ceiling, the area of the opening for forming the downflow is eroded. The In any case, the downflow in the clean room is hindered.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a movable smoke-proof hanging wall in which downflow in a clean room is suppressed. .

  The smoke-proof hanging wall according to the embodiment of the present invention extends in a direction intersecting with a rail of a ceiling transport facility that transports an object to be transported by a carriage moving on the rail in a clean room where a downflow is formed. It is a smoke barrier. The smoke-proof hanging wall includes a fixed portion provided above the rail and a movable portion attached to the fixed portion so as to be slidable downward with respect to the fixed portion.

  According to this embodiment, while suppressing the influence on the downflow in the clean room, the effective space can be expanded by increasing the rail installation height in the clean room.

  Embodiments of the present invention will be described below. Note that the same or corresponding parts are denoted by the same reference numerals, and the description thereof may not be repeated.

  Note that in the embodiments described below, when referring to the number, amount, and the like, the scope of the present invention is not necessarily limited to the number, amount, and the like unless otherwise specified. In the following embodiments, each component is not necessarily essential for the present invention unless otherwise specified. In addition, when there are a plurality of embodiments below, it is planned from the beginning to appropriately combine the configurations of the embodiments unless otherwise specified.

  FIG. 1 is a side view of a smoke-proof hanging wall according to one embodiment of the present invention. Referring to FIG. 1, the smoke-proof hanging wall according to the present embodiment is provided so as to hang down from the ceiling of the clean room. The smoke-proof hanging wall is provided in order to perform a smoke-proof section defined by the Building Standard Law in the event of a fire.

  As shown in FIG. 1, the ceiling of the clean room includes a filter 1 and a frame 2. The frame 2 is arranged in a lattice pattern in the ceiling surface. A filter 1 is installed on a frame 2 arranged in a lattice pattern. An air flow is formed toward the filter 1. The filter 1 allows an air flow to pass through. As a result, as indicated by the arrows in FIG. 1, an air flow (down flow) is formed in the clean room from the ceiling downward. The smoke-proof hanging wall 3 is provided directly below the frame 2 so as to hang down from the frame 2. The thickness (T) of the smoke-proof hanging wall 3 is the same as the width (D) of the frame 2 or smaller than the width (D).

  FIG. 2 is a perspective view showing the ceiling conveying facility passing through the smoke-proof hanging wall 3 and the lower part of the smoke-proof hanging wall. FIG. 3 is a view showing a state in which the smoke-proof hanging wall 3 and the ceiling transport facility shown in FIG. 2 are viewed from the direction of the rail 4.

  2 and 3, a ceiling transport facility is provided near the ceiling of the clean room. The ceiling transport facility includes a rail 4 that extends in a direction intersecting with the extending direction of the smoke-proof hanging wall 3 and a carriage 5 that moves on the rail 4. A transported object 6 is mounted on the carriage 5. Thereby, the conveyed product 6 moves along the rail 4 in the clean room. The transported object 6 is a case in which, for example, a cassette holding a semiconductor wafer is stored.

  As shown in FIGS. 2 and 3, the smoke-proof hanging wall 3 includes a fixed portion 310, a movable portion 320, and a guide portion 330. The fixed portion 310 is provided above the rail 4 so as to intersect the rail 4. A lower portion of the fixed portion 310 is formed so as to be partially recessed, and the rail 4 is passed through the lower portion of the recess. By providing the recesses as described above, the rail 4 can be brought close to the smoke-proof hanging wall 3 while ensuring the space through which the carriage 5 and the transported object 6 pass, so that the effective space in the clean room can be expanded. it can.

  The total height of the smoke-proof hanging wall 3 is, for example, 500 mm, and the depth of the recess is, for example, 250 mm. Moreover, the width | variety of the said dent is about 300-400 mm, for example.

  On the other hand, the smoke-proof hanging wall 3 needs to ensure a predetermined height in the event of a fire. Therefore, in the present embodiment, a movable part 320 is provided for closing the dent in the event of a fire. The movable part 320 is attached to the fixed part 310. The movable portion 320 is slidable in the vertical direction (arrow DR1 direction) with respect to the fixed portion 310 along the guide portion 330. As shown in FIG. 2A and FIG. 3A, in a normal state, the movable part 320 is locked to the fixed part 310 so as to overlap the fixed part 310, and the conveyed object 6 mounted on the carriage 5 is It passes through a recess provided in the fixed portion 310. On the other hand, in the event of a fire, as shown in FIGS. 2B and 3B, the movable part 320 slides downward with respect to the fixed part 310 so as to close the recess provided in the fixed part 310. Moving. In addition, since a ceiling conveyance installation is stopped at the time of a fire, it is not necessary to ensure the space which allows the to-be-conveyed object 6 to pass between the rail 4 and the smoke-proof hanging wall 3. FIG. That is, the rail 4 has a range in which the movable portion 320 does not contact the rail 4 and the carriage 5 even when the movable portion 320 falls and closes the dent (that is, the sliding movement of the movable portion 320 downward is not possible). It is preferable to provide the upper side as much as possible within a range that is not obstructed.

  Next, a modified example of the smoke-proof hanging wall will be described with reference to FIG. That is, in the example of FIG. 4C, the movable part 320 includes a first part 320A attached to the fixed part 310 and a second part 320B attached to the first part 320A. In this way, the height of the fixed portion 310 can be further reduced while securing the height of the hanging wall during operation (during a fire), so that the rail 4 can be installed further upward. . That is, as shown in the example of FIG. 4B, when the movable part 320 is constituted by a single panel, the rail 4 is compared with the conventional smoke-proof hanging wall (FIG. 4A) having only the fixed part 310. Can be provided on the upper side by L1, but when the movable part 320 is constituted by two panels as in the example of FIG. 4C, the conventional smoke-proof hanging wall (FIG. 4C). ) Can be provided on the upper side by L2 (> L1).

  Next, an example of the operation mechanism of the smoke-proof hanging wall will be described with reference to FIG. As shown in FIG. 5, the operation mechanism of the smoke proof hanging wall 3 includes a fire detector 7, a smoke proof hanging wall actuating device 8, a fire detector control panel 9, a ceiling transport equipment control panel 10, and smoke prevention. And a hanging wall device control panel 11.

  The fire detector 7 may be smoke sensitive or heat sensitive. In any case, the fire detector 7 detects the occurrence of a fire in the clean room. Then, a “fire signal” is transmitted from the fire detector control panel 9 to the smoke proof wall device control panel 11. Based on the “fire signal” from the fire detector control panel 9, the smoke proof hanging wall device control panel 11 transmits a “stop signal” to the ceiling transport equipment control panel 10. The ceiling transport equipment control panel 10 that has received the “stop signal” stops the operation of the carriage 5 on the rail 4. Thereafter, the smoke proof hanging wall device control panel 11 transmits an “operation signal” to the smoke proof hanging wall device 8. The smoke-proof hanging wall actuating device 8 that has received the “actuation signal” slides the movable part 320 downward relative to the fixed part 310 to close the recess of the fixed part 310. Thereby, the smoke-proof section in the clean room is performed.

  Next, the locking structure 340 with respect to the fixed part 310 of the movable part 320 in the smoke-proof hanging wall will be described with reference to FIGS. 7 and 8 are a VII-VII sectional view and a VIII-VIII sectional view in FIG. 6, respectively.

  With reference to FIGS. 6 to 8, the locking structure 340 of the movable part 320 includes an L-shaped member 341 fixed to the fixed part 310 so as to straddle the movable part 320 and overlap the movable part 320, Actuator 342 and manual lever 343 fixed to L-shaped member 341, coil spring 344 wound around the outer periphery of manual lever 343, bush 345, plate 346 fixed to bush 345 and actuator 342, and plate 346 And a rod-shaped pin 347 fixed to the movable portion 320 and a ring-shaped latch 348 fixed to the movable portion 320.

  By inserting the pin 347 (second engaging portion) into the latch 348 (first engaging portion), the movable portion 320 is locked to the fixed portion 310 in a lifted state. That is, the pin 347 is fixed to the fixed portion 310 via the L-shaped member 341 so as to overlap the movable portion 320, and is fixed in a state where the movable portion 320 is lifted by engaging with the latch 348.

  The electric actuator 342 can move the pin 347 in the axial direction through the plate 346 to release the engagement of the pin 347 with respect to the latch 348 or to re-engage the pin 347 with respect to the latch 348. The electric actuator 342 normally locks the plate 346 so as not to move in the direction of the arrow DR342. Thereby, the engagement between the pin 347 and the latch 348 is ensured, and the movable portion 320 is locked to the fixed portion 310 in a lifted state.

  The manual lever 343 (engagement operation unit) is provided coaxially with the pin 347. By rotating the manual lever 343, the pin 347 can be moved in the axial direction to release the engagement of the pin 347 with respect to the latch 348, or the pin 347 can be re-engaged with respect to the latch 348. Therefore, when the panel of the movable part 320 once dropped is re-lifted and fixed (hereinafter referred to as “resetting the movable part 320”), one operator lifts the movable part 320 with one hand. By operating the manual lever 343 with the other hand and engaging the pin 347 with the latch 348, the movable part 320 can be fixed in the lifted state. At this time, the actuator 342 is unlocked. The above work is necessary every time the smoke-proof hanging wall 3 is inspected. As described above, the pin 347 and the latch 348 can be engaged / disengaged by operating the manual lever 343 fixed at a position close to the movable portion 320, so that one operator can perform the engagement / disengagement. The movable part 320 can be reset. From the viewpoint of installing and resetting the movable part 320 by one operator, the weight of the movable part 320 is preferably 10 kg or less. From the viewpoint of reducing the weight of the movable part 320, it is preferable that the smoke-proof hanging wall 3 is made of a lightweight metal such as aluminum.

  A coil spring 344 wound around the outer periphery of the manual lever 343 biases the pin 347 toward the latch 348 via the bush 345 and the plate 346. That is, the coil spring 344 is a biasing portion that biases the pin 347 in a direction to engage with the latch 348. For example, even when the actuator 342 is unlocked when not intended, the coil spring 344 biases the pin 347 in a direction to engage with the latch 348, so that the movable portion 320 slides downward. This can be suppressed.

  Next, a structure for fixing the smoke proof hanging wall to the frame 2 will be described with reference to FIG. Referring to FIG. 9, the fixing structure 12 for fixing the smoke-proof hanging wall 3 includes a first member 12A and a second member 12B. The first member 12 </ b> A has a U-shaped cross-sectional shape and is bolted to the frame 2 so as to sandwich the frame 2. The second member 12B is fixed to the first member 12A by welding or the like. The second member 12 </ b> B is bolted to the fixed portion 310 of the smoke-proof hanging wall 3. With the fixing structure shown in FIG. 9, the smoke-proof hanging wall 3 is supported by the frame 2.

  Next, another modified example of the smoke-proof hanging wall will be described with reference to FIG. Referring to FIG. 10, the smoke-proof hanging wall 3 has a stopper portion 350 that receives the movable portion 320 when the movable portion 320 falls. That is, the stopper part 350 abuts on the movable part 320 to stop the downward movement of the movable part 320 with respect to the fixed part 310 at a predetermined position. On the stopper part 350, a cushion material 351 (impact absorbing part) is provided. By providing the cushion material 351, the collision sound when the movable part 320 is received is reduced. That is, the cushion material 351 is a noise suppressing member that suppresses the collision sound between the movable portion 320 and the stopper portion 350.

  11 is a cross-sectional view taken along line XI-XI in FIG. Referring to FIG. 11, the movable portion 320 has an engaging portion 321 that engages with the guide portion 330. The movable portion 320 that slides relative to the fixed portion 310 can be guided by the guide portion 330 and the engaging portion 321. The panel end of the movable portion 320 is bent so as to protrude in the direction toward the fixed portion 310. The bent portion (cover portion) covers the guide portion 330 from the outside. By doing in this way, since the clearance gap between the fixed part 310 and the movable part 320 can be block | closed, the smoke-proof division by a smoke-proof hanging wall can be performed reliably.

  Although the embodiments of the present invention have been described above, the embodiments disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  The present invention can be applied particularly advantageously to a smoke-proof hanging wall provided in a clean room.

It is a side view of the smoke-proof hanging wall which concerns on one embodiment of this invention. It is a perspective view which shows the smoke-proof hanging wall which concerns on one embodiment of this invention, and the ceiling conveyance installation in a clean room. It is a figure which shows the state which looked at the smoke-proof hanging wall shown in FIG. 2 and the ceiling conveyance equipment in a clean room from the direction of the rail. It is a figure explaining the modification of the smoke-proof hanging wall which concerns on one embodiment of this invention. It is a figure explaining an example of the operation mechanism of the smoke-proof hanging wall which concerns on one embodiment of this invention. It is a figure explaining the latching structure of the movable part in the smoke-proof hanging wall which concerns on one embodiment of this invention. It is VII-VII sectional drawing in FIG. It is VIII-VIII sectional drawing in FIG. It is a figure which shows the fixation structure with respect to the flame | frame of the ceiling of the smoke-proof hanging wall which concerns on one embodiment of this invention. It is a figure explaining the other modification of the smoke-proof hanging wall which concerns on one embodiment of this invention. It is XI-XI sectional drawing in FIG.

Explanation of symbols

  1 filter, 2 frame, 3 smoke-proof hanging wall, 4 rail, 5 cart, 6 transported object, 7 fire detector, 8 smoke-proof hanging wall operating device, 9 fire detector control panel, 10 ceiling transport equipment control panel, DESCRIPTION OF SYMBOLS 11 Smoke prevention wall apparatus control panel, 12 fixed structure, 12A 1st member, 12B 2nd member, 310 fixed part, 320 movable part, 320A 1st member, 320B 2nd member, 321 engaging part, 330 guide part, 340 Locking structure, 341 L-shaped member, 342 Actuator, 343 Manual lever, 344 Coil spring, 345 Bush, 346 Plate, 347 Pin, 348 Latch, 350 Stopper, 351 Cushion material.

Claims (8)

In a clean room where a downflow is formed, a smoke-proof hanging wall extending in a direction intersecting with the rail of the ceiling conveyance facility that conveys the object to be conveyed by the carriage moving on the rail,
A fixed portion provided above the rail;
A smoke-proof hanging wall comprising a movable part attached to the fixed part so as to be slidable downward with respect to the fixed part. The ceiling of the clean room includes a filter that allows the downflow to pass through, and a frame that supports the filter.
The smoke-proof hanging wall according to claim 1, wherein the smoke-proof hanging wall is provided immediately below the frame, and the thickness of the smoke-proof hanging wall is smaller than the width of the frame.   The movable part includes a first part that is slidable downward relative to the fixed part and a second part that is slidable downward relative to the first part. The smoke-proof hanging wall according to 2.   The smoke-proof hanging wall according to any one of claims 1 to 3, wherein the movable part is slid downward with respect to the fixed part based on detection of a fire in the clean room. A first engagement portion fixed to the movable part;
A second engagement portion that is fixed to the fixed portion so as to overlap the movable portion, and is fixed in a state where the movable portion is lifted by engaging with the first engagement portion;
5. The apparatus according to claim 1, further comprising an engagement operation unit capable of manually engaging and releasing the second engagement portion with respect to the first engagement portion. Smoke-proof wall as described in A first engagement portion fixed to the movable part;
A second engagement portion that is fixed to the fixed portion so as to overlap the movable portion, and is fixed in a state where the movable portion is lifted by engaging with the first engagement portion;
An actuator that electrically moves the second engagement portion forward and backward to engage and release the first engagement portion;
6. The apparatus according to claim 1, further comprising a biasing portion that is provided coaxially with the second engagement portion and biases the second engagement portion toward the first engagement portion. Smoke-proof wall as described in Crab. A stopper that stops the movement of the movable part in a downward direction relative to the fixed part at a predetermined position by contacting the movable part;
The smoke-proof hanging wall according to any one of claims 1 to 6, further comprising an impact absorbing portion provided on the stopper portion. A guide portion that is provided between the fixed portion and the movable portion, and that guides the movable portion that slides relative to the fixed portion;
The smoke-proof according to any one of claims 1 to 7, wherein the movable portion includes a cover portion that is formed by bending an end portion of the movable portion and covers the guide portion from the outside in the width direction of the movable portion. Hanging wall.

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