JP2009148878A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2009148878A5 JP2009148878A5 JP2008289672A JP2008289672A JP2009148878A5 JP 2009148878 A5 JP2009148878 A5 JP 2009148878A5 JP 2008289672 A JP2008289672 A JP 2008289672A JP 2008289672 A JP2008289672 A JP 2008289672A JP 2009148878 A5 JP2009148878 A5 JP 2009148878A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode layer
- lower electrode
- dielectric layer
- insulating material
- microelectromechanical device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011810 insulating material Substances 0.000 claims 12
- 238000004519 manufacturing process Methods 0.000 claims 7
- 238000000034 method Methods 0.000 claims 6
- 229920001400 block copolymer Polymers 0.000 claims 5
- 238000005530 etching Methods 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 4
- 229920001971 elastomer Polymers 0.000 claims 2
- 239000000806 elastomer Substances 0.000 claims 2
- 229920002725 thermoplastic elastomer Polymers 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008289672A JP5317635B2 (ja) | 2007-11-30 | 2008-11-12 | 微小電気機械式装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007309621 | 2007-11-30 | ||
| JP2007309621 | 2007-11-30 | ||
| JP2008289672A JP5317635B2 (ja) | 2007-11-30 | 2008-11-12 | 微小電気機械式装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009148878A JP2009148878A (ja) | 2009-07-09 |
| JP2009148878A5 true JP2009148878A5 (enExample) | 2011-11-24 |
| JP5317635B2 JP5317635B2 (ja) | 2013-10-16 |
Family
ID=40918661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008289672A Expired - Fee Related JP5317635B2 (ja) | 2007-11-30 | 2008-11-12 | 微小電気機械式装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5317635B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112010003192T5 (de) * | 2009-08-06 | 2012-07-12 | Ulvac, Inc. | Verfahren zur Herstellung eines piezoelektrischen Elements |
| US20130020573A1 (en) * | 2010-03-29 | 2013-01-24 | Keiichi Fukuyama | Pressure detecting device and method for manufacturing the same, display device and method for manufacturing the same, and tft substrate with pressure detecting device |
| EP3202708B1 (fr) * | 2016-02-03 | 2023-05-03 | Rolex Sa | Procédé de fabrication d'un composant horloger hybride |
| CN105621344B (zh) * | 2016-03-04 | 2018-06-26 | 华天科技（昆山）电子有限公司 | Mems气密性封装结构及封装方法 |
| CN106927418A (zh) * | 2017-03-29 | 2017-07-07 | 广东工业大学 | 一种微纳米发动机及其制备方法 |
| CN109425266B (zh) * | 2017-08-30 | 2021-07-06 | 南京理工大学 | 基于Al/MxOy含能薄膜的叉指结构换能元 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0278925A (ja) * | 1988-09-16 | 1990-03-19 | Yokohama Syst Kenkyusho:Kk | 静電容量型圧力センサ |
| JP2002170470A (ja) * | 2000-11-28 | 2002-06-14 | Matsushita Electric Works Ltd | 半導体マイクロリレー及びその製造方法 |
| JP2007276089A (ja) * | 2006-04-11 | 2007-10-25 | Sony Corp | 電気機械素子とその製造方法、並びに共振器とその製造方法 |
| JP5352975B2 (ja) * | 2007-08-31 | 2013-11-27 | オムロン株式会社 | 素子集合体及びその製造方法 |
-
2008
- 2008-11-12 JP JP2008289672A patent/JP5317635B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2009131951A5 (enExample) | ||
| JP2009148878A5 (enExample) | ||
| JP5396335B2 (ja) | タッチパネル | |
| WO2008156977A3 (en) | Methods of fabricating nanostructures by use of thin films of self-assembling of diblock copolymers, and devices resulting from those methods | |
| JP2005349558A5 (enExample) | ||
| JP2010507261A5 (enExample) | ||
| JP2008525987A5 (enExample) | ||
| JP2015042402A5 (enExample) | ||
| EP1998212A3 (en) | Methods of fabricating interferometric modulators having black masks and devices formed by same | |
| TW200744940A (en) | Non-planar surface structures and process for microelectromechanical systems | |
| JP2012247372A5 (enExample) | ||
| JP2009197239A5 (enExample) | ||
| JP2016213468A5 (enExample) | ||
| WO2007004119A3 (en) | A method of manufacturing a mems element | |
| JP2012008542A5 (enExample) | ||
| JP2008244460A5 (enExample) | ||
| KR101544325B1 (ko) | 형상기억폴리머를 이용한 자가 회복 에너지 발전 소자 | |
| KR101695932B1 (ko) | 접촉 대전 발전기 및 그 제조 방법 | |
| JP2017199834A5 (enExample) | ||
| JP2010541246A5 (enExample) | ||
| KR101349817B1 (ko) | 패턴 그래핀을 이용한 그래핀 터치패널 및 그 제작 방법 | |
| MY171435A (en) | Flexible pressure-sensing device and process for its fabrication | |
| Hartmann et al. | Scalable microfabrication of folded parylene‐based conductors for stretchable electronics | |
| JP2017199823A5 (enExample) | ||
| KR20170126302A (ko) | 압력 센서 소자 및 압력 센서 소자 제조 방법 |