JP2009145095A5 - - Google Patents

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Publication number
JP2009145095A5
JP2009145095A5 JP2007320466A JP2007320466A JP2009145095A5 JP 2009145095 A5 JP2009145095 A5 JP 2009145095A5 JP 2007320466 A JP2007320466 A JP 2007320466A JP 2007320466 A JP2007320466 A JP 2007320466A JP 2009145095 A5 JP2009145095 A5 JP 2009145095A5
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JP
Japan
Prior art keywords
probe
scanning
measured
dimensional shape
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007320466A
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English (en)
Japanese (ja)
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JP5025444B2 (ja
JP2009145095A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007320466A priority Critical patent/JP5025444B2/ja
Priority claimed from JP2007320466A external-priority patent/JP5025444B2/ja
Publication of JP2009145095A publication Critical patent/JP2009145095A/ja
Publication of JP2009145095A5 publication Critical patent/JP2009145095A5/ja
Application granted granted Critical
Publication of JP5025444B2 publication Critical patent/JP5025444B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007320466A 2007-12-12 2007-12-12 三次元形状測定装置 Expired - Fee Related JP5025444B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007320466A JP5025444B2 (ja) 2007-12-12 2007-12-12 三次元形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007320466A JP5025444B2 (ja) 2007-12-12 2007-12-12 三次元形状測定装置

Publications (3)

Publication Number Publication Date
JP2009145095A JP2009145095A (ja) 2009-07-02
JP2009145095A5 true JP2009145095A5 (enExample) 2010-05-27
JP5025444B2 JP5025444B2 (ja) 2012-09-12

Family

ID=40915866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007320466A Expired - Fee Related JP5025444B2 (ja) 2007-12-12 2007-12-12 三次元形状測定装置

Country Status (1)

Country Link
JP (1) JP5025444B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012237686A (ja) * 2011-05-12 2012-12-06 Canon Inc 測定装置
JP2013213802A (ja) 2012-03-09 2013-10-17 Canon Inc 計測装置
JP6185701B2 (ja) * 2012-10-15 2017-08-23 株式会社ミツトヨ 形状測定装置
JP2016099221A (ja) * 2014-11-21 2016-05-30 株式会社小野測器 プローブ装置、レーザ計測装置及びレーザ計測システム

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347606A (ja) * 1986-08-13 1988-02-29 Asahi Optical Co Ltd 非球面形状測定装置
JPH0746050B2 (ja) * 1987-09-17 1995-05-17 株式会社日立製作所 三次元計測装置
JP4663378B2 (ja) * 2005-04-01 2011-04-06 パナソニック株式会社 形状測定装置及び方法
JP4500736B2 (ja) * 2005-06-10 2010-07-14 キヤノン株式会社 形状測定装置
JP2006349547A (ja) * 2005-06-17 2006-12-28 Kanto Auto Works Ltd 非接触式三次元形状計測方法及び計測機

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