JP2009144735A5 - - Google Patents

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Publication number
JP2009144735A5
JP2009144735A5 JP2007319476A JP2007319476A JP2009144735A5 JP 2009144735 A5 JP2009144735 A5 JP 2009144735A5 JP 2007319476 A JP2007319476 A JP 2007319476A JP 2007319476 A JP2007319476 A JP 2007319476A JP 2009144735 A5 JP2009144735 A5 JP 2009144735A5
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JP
Japan
Prior art keywords
groove
mounting groove
seal mounting
spacer
shoulder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007319476A
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Japanese (ja)
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JP4985973B2 (en
JP2009144735A (en
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Publication date
Application filed filed Critical
Priority to JP2007319476A priority Critical patent/JP4985973B2/en
Priority claimed from JP2007319476A external-priority patent/JP4985973B2/en
Publication of JP2009144735A publication Critical patent/JP2009144735A/en
Publication of JP2009144735A5 publication Critical patent/JP2009144735A5/ja
Application granted granted Critical
Publication of JP4985973B2 publication Critical patent/JP4985973B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (6)

互いに対向する二部材のうち一方に形成された蟻溝状のシール装着溝と、側面膨出部がこのシール装着溝内に保持されると共にシール装着溝から突出した頭部が前記二部材のうち他方と密接可能なゴム状弾性材料からなるシールリングと、前記シール装着溝に前記シールリングの密封対象空間側に位置して保持され前記シールリングより剛性の大きい材料からなるスペーサとを備え、前記スペーサが、前記シール装着溝の密封対象空間側の溝肩上に支持される鍔部と、前記シール装着溝の密封対象空間側の内側面に嵌合されると共に前記シールリングの側面膨出部を反密封対象空間側の内側面へ押し付ける溝内挿入部と、前記鍔部と溝内挿入部の間の肩部からなり、前記鍔部の肉厚が、非圧縮時における前記シールリングの前記シール装着溝からの突出高さよりも小さいことを特徴とする密封構造。   A dovetail-shaped seal mounting groove formed on one of the two members facing each other, a side bulging portion is held in the seal mounting groove, and a head projecting from the seal mounting groove is a portion of the two members. A seal ring made of a rubber-like elastic material that can be in close contact with the other, and a spacer made of a material that is held in the seal mounting groove on the sealing target space side of the seal ring and has a rigidity higher than that of the seal ring, A spacer is supported on the groove shoulder on the sealing target space side of the seal mounting groove, and is fitted to the inner side surface of the seal mounting groove on the sealing target space side, and the side bulge portion of the seal ring In the groove that presses against the inner surface of the space to be anti-sealed, and a shoulder between the flange and the groove insert, and the wall thickness of the flange is the non-compressed thickness of the seal ring Seal mounting groove Sealing structures being smaller than the projecting height of al. シール装着溝の溝肩間の幅がシールリングの側面膨出部間の幅より大きく、前記シール装着溝に保持されたスペーサの肩部とこれに対向する溝肩の間の幅が前記側面膨出部間の幅より小さいことを特徴とする請求項１に記載の密封構造。   The width between the groove shoulders of the seal mounting groove is larger than the width between the side bulging portions of the seal ring, and the width between the shoulder portion of the spacer held in the seal mounting groove and the groove shoulder facing the spacer shoulder groove is the side bulge. The sealing structure according to claim 1, wherein the sealing structure is smaller than a width between the protruding portions. スペーサの溝内挿入部におけるシールリング側を向いた内側面が肩部側ほど大きくシール装着溝内へ張り出すように傾斜していることを特徴とする請求項１又は２に記載の密封構造。 The sealing structure according to claim 1 or 2 , wherein an inner surface of the spacer in the groove insertion portion facing the seal ring side is inclined so as to protrude into the seal mounting groove as the shoulder portion side increases. シール装着溝とスペーサの溝内挿入部との嵌合面が、二部材の互いの対向面に対して略垂直に立ち上がっていることを特徴とする請求項１〜３のいずれかに記載の密封構造。 The sealing surface according to any one of claims 1 to 3, wherein a fitting surface between the seal mounting groove and the in-groove insertion portion of the spacer rises substantially perpendicular to the opposing surfaces of the two members. Construction. シール装着溝の密封対象空間側の溝肩が、反密封対象空間側の溝肩よりも低く、スペーサの鍔部の肉厚が、前記両溝肩の高さの差よりも大きいことを特徴とする請求項１〜４のいずれかに記載の密封構造。 The groove shoulder on the sealing target space side of the seal mounting groove is lower than the groove shoulder on the anti-sealing target space side, and the thickness of the collar portion of the spacer is larger than the difference in height between the both shoulders. The sealing structure according to any one of claims 1 to 4 . スペーサがＰＴＦＥからなることを特徴とする請求項１〜５のいずれかに記載の密封構造。
The sealing structure according to claim 1, wherein the spacer is made of PTFE.
JP2007319476A 2007-12-11 2007-12-11 Sealing structure Expired - Fee Related JP4985973B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007319476A JP4985973B2 (en) 2007-12-11 2007-12-11 Sealing structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007319476A JP4985973B2 (en) 2007-12-11 2007-12-11 Sealing structure

Publications (3)

Publication Number Publication Date
JP2009144735A JP2009144735A (en) 2009-07-02
JP2009144735A5 true JP2009144735A5 (en) 2010-12-09
JP4985973B2 JP4985973B2 (en) 2012-07-25

Family

ID=40915571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007319476A Expired - Fee Related JP4985973B2 (en) 2007-12-11 2007-12-11 Sealing structure

Country Status (1)

Country Link
JP (1) JP4985973B2 (en)

Families Citing this family (13)

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US9869392B2 (en) 2011-10-20 2018-01-16 Lam Research Corporation Edge seal for lower electrode assembly
US9859142B2 (en) 2011-10-20 2018-01-02 Lam Research Corporation Edge seal for lower electrode assembly
US10090211B2 (en) * 2013-12-26 2018-10-02 Lam Research Corporation Edge seal for lower electrode assembly
JP2016153115A (en) * 2015-02-20 2016-08-25 三菱化学株式会社 Separation membrane module and tubular separation membrane connection structure
JP6254981B2 (en) 2015-08-12 2017-12-27 ファナック株式会社 Laser oscillator vacuum vessel
WO2017187630A1 (en) * 2016-04-28 2017-11-02 ギガフォトン株式会社 Tank, target generation device, and extreme-uv-light generation device
WO2018105094A1 (en) 2016-12-08 2018-06-14 株式会社ハーモニック・ドライブ・システムズ Seal structure using o-ring
JP6809917B2 (en) 2017-01-31 2021-01-06 株式会社バルカー Composite sealing material
KR102002341B1 (en) * 2019-02-25 2019-10-01 주식회사 테시스 Apparatus for supplying air
KR102178594B1 (en) * 2019-02-26 2020-11-18 무진전자 주식회사 Substrate drying chamber
JP7205722B2 (en) 2019-03-20 2023-01-17 株式会社オンダ製作所 pipe joint
CN113645794B (en) * 2021-07-15 2023-01-06 北京遥测技术研究所 Double-layer convolution type sealing structure and method based on height difference
CN114396476A (en) * 2022-01-19 2022-04-26 深圳市矩阵多元科技有限公司 O-shaped ring vacuum sealing structure and vacuum equipment

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01193463A (en) * 1988-01-29 1989-08-03 Matsushita Electric Ind Co Ltd Vacuum seal structure of vacuum working device
JPH0438781A (en) * 1990-06-01 1992-02-07 Canon Inc Picture filing system
JP3323928B2 (en) * 1997-09-08 2002-09-09 東京エレクトロン株式会社 Plasma processing equipment
JP4689221B2 (en) * 2003-11-10 2011-05-25 日本バルカー工業株式会社 Composite sealing material
JP4711046B2 (en) * 2004-11-30 2011-06-29 Ｎｏｋ株式会社 Sealing structure
JP4625746B2 (en) * 2005-10-06 2011-02-02 三菱電線工業株式会社 Sealing material
JP2007173420A (en) * 2005-12-21 2007-07-05 Kayaba Ind Co Ltd Flat surface sealing mechanism, and plasma shielding seal
JP4936730B2 (en) * 2006-01-16 2012-05-23 東京エレクトロン株式会社 Vacuum container and vacuum processing apparatus

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