JP2009139614A - Substrate, method of arranging area to be ejected on substrate, mother panel, and method of arranging panel area on mother panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate, a method of arranging area to be ejected on substrate, a mother panel, and a method of arranging panel area on mother panel, wherein an increase in time required for an ejection operation is suppressed by performing ejections, separately with ejection resolutions corresponding to the drawing resolutions of the respective areas to be ejected, toward the respective areas to be ejected having drawing resolutions different from each other across a boundary. <P>SOLUTION: The substrate where liquid bodies ejected from ejection nozzles are arranged while a plurality of ejection nozzles are relatively moved in the main scanning direction with respect to a plurality of ejection nozzle groups arranged in the sub scanning direction, each nozzle group having the plurality of ejection nozzles driven based on the same timing signal, includes a first area to be ejected and a second area to be ejected where the appropriate periods of timing signals are different from each other, wherein respective areas to be ejected are arranged at positions where both of the first area to be ejected and the second area to be ejected are simultaneously opposed to the same nozzle group. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a base material on which a liquid material is to be placed using a droplet discharge device having a discharge nozzle that discharges the liquid material, a method for arranging a region to be discharged on the base material, and a liquid material using the droplet discharge device It is related with the mother panel which is the object which forms a plurality of panels by arranging, and the panel area arrangement method in the mother panel.

  Conventionally, an ejection head having an ejection nozzle for ejecting a liquid material is provided, and the liquid material is disposed at an arbitrary position on the drawing object by ejecting the liquid material and applying the liquid material to an arbitrary position on the drawing object. A droplet discharge device is known. In particular, a functional film such as a color filter film of a color liquid crystal device can be obtained by using a droplet discharge device that discharges a liquid as droplets to land the discharged droplet on an arbitrary position on a drawing target. It is possible to accurately apply a liquid material containing the above material to an arbitrary position by an arbitrary amount. A functional film having an arbitrary thickness and shape can be formed by drying the applied liquid.

  In order to efficiently arrange the liquid material in a large area, a large number of discharge nozzles are arranged in the sub-scanning direction, and the liquid is discharged from the discharge nozzles while relatively moving the discharge nozzles and the drawing object in the main scanning direction intersecting the sub-scanning direction. Exhale the body. As an ejection head having a large number of ejection nozzles, as disclosed in Patent Document 1, a configuration in which a large number of ejection heads are connected in the sub-scanning direction is known.

As the minimum value of the distance between droplet landing positions (hereinafter referred to as “drawing resolution”) is smaller, finer drawing becomes possible.
The ink jet line head described in Patent Document 1 increases the density of discharge nozzles in the sub-scanning direction by arranging the discharge heads side by side in the main scanning direction. That is, a line head having a high drawing resolution in the sub-scanning direction is realized by reducing the interval between the discharge nozzles in the sub-scanning direction and the interval between the discharged liquid materials.
The drawing resolution in the main scanning direction is a discharge interval determined by the relative moving speed between the discharge nozzle in the main scanning direction and the drawing object and the discharge frequency at which the liquid is discharged (hereinafter referred to as “discharge resolution”). It depends on. Patent Document 2 discloses a droplet discharge method that can realize an appropriate drawing resolution for a drawing region of a drawing object by adjusting the discharge resolution. In the droplet discharge method disclosed in Patent Document 2, the discharge resolution of the discharge head is adjusted by collectively adjusting the discharge resolution of the discharge nozzles of the discharge head as compared with the method of adjusting each discharge nozzle individually. The load of the control device for controlling the power is reduced.

JP-A-10-166574 JP 2006-130469 A

However, there is a drawing object whose appropriate drawing resolution is not necessarily uniform in each drawing area of the drawing object. For example, when a plurality of substrates are formed on the mother substrate, different substrates are formed on the same mother substrate in order to efficiently use the mother substrate. In such a drawing object, it is necessary to change the ejection resolution for each drawing area in accordance with the appropriate drawing resolution of the drawing area.
In the sub-scanning direction, the ejection resolution in the main scanning direction can be individually set for each ejection head. However, since the boundary between the ejection heads in the sub-scanning direction and the boundary between the drawing regions having different appropriate rendering resolutions do not necessarily match, one ejection head having ejection nozzles that eject at the same ejection resolution There is a case where the portions of both drawing regions are opposed across the boundary of drawing regions having different appropriate drawing resolutions. In such a case, since the discharge resolution of the discharge nozzle of the discharge head is the same, the discharge resolution that can realize an appropriate drawing resolution for drawing in each discharge target region in parallel with both discharge target regions. There was a problem that the liquid material could not be discharged. When discharge is individually performed with a discharge resolution corresponding to each discharge target region toward each discharge target region across the boundary, there is a problem that the time required for the discharge operation increases.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  [Application Example 1] The base material according to this application example includes a plurality of discharge nozzles that are driven based on the same timing signal that defines the timing at which each nozzle group discharges a liquid material. The plurality of nozzle groups in which the discharge nozzles are arranged in the sub-scanning direction are relatively moved in the main scanning direction intersecting with the sub-scanning direction, and the liquid material is discharged from each of the discharge nozzles. A substrate on which a liquid material is disposed, wherein the liquid material can be appropriately disposed by the discharge nozzle, and a first discharge region in which a cycle of the timing signal is a first cycle; and the discharge nozzle A second discharge area in which a cycle of the timing signal capable of appropriately disposing the liquid material is a second cycle different from the first cycle, and a relative shift in the main scanning direction. In the same group of nozzles, the first discharged region and the second discharged region are not simultaneously opposed to the first discharged region and the second discharged region. The second discharge area is arranged.

  According to this base material, both the first discharged region portion and the second discharged region portion having different appropriate periods of the timing signal in the discharge nozzle for arranging the liquid material are simply set. One nozzle group does not face each other at the same time. For this reason, when the liquid material is discharged toward the base material in order to arrange the liquid material, there is no nozzle group that needs to be discharged based on timing signals of two different types of cycles. As a result, a nozzle group that needs to discharge based on timing signals of two different periods is compared with a case where scanning that performs discharge based on timing signals of different periods is performed for each period. The time required for the discharge operation can be suppressed.

  Application Example 2 In the base material according to the application example, the first discharge area and the second discharge area that are adjacent in the sub-scanning direction are the nozzle group in the sub-scanning direction. It is preferable that the plurality of discharge nozzles are arranged with an interval larger than the distance between the centers of the discharge nozzles located at both ends in the sub-scanning direction.

  According to this base material, the distance between the first discharge area and the second discharge area where the appropriate periods of the timing signals are different from each other is longer than the length of the nozzle group in the sub-scanning direction. As a result, the nozzle group at the position facing the boundary between the first discharge area or the second discharge area is not in the state facing one part of the first discharge area or the second discharge area. Can be prevented from facing each other.

  Application Example 3 In the base material according to the application example, the first discharge area and the second discharge area that are adjacent in the sub-scanning direction are the nozzle group in the sub-scanning direction. A plurality of discharge nozzles having a center-to-center distance between the discharge nozzles located at both ends in the sub-scanning direction among the plurality of effective nozzles used for discharging the liquid material toward the substrate; It is preferred that they are arranged at larger intervals.

  According to this base material, the distance between the first discharge area and the second discharge area where the appropriate periods of the timing signals are different from each other is longer than the length in which the plurality of effective nozzles are arranged in the sub-scanning direction. ing. Thereby, at least one of the effective nozzles of the nozzle group at the position facing the boundary between the first discharge area or the second discharge area is the first discharge area or the second discharge area. In a state of facing one part, it can be prevented from facing the other.

  Application Example 4 In the base material according to the application example described above, the lengths of the nozzle groups in the plurality of nozzle groups in the sub-scanning direction are constant, and the first discharge targets are adjacent in the sub-scanning direction. The region and the second discharged region extend from the end of the first discharged region that extends in the main scanning direction on the side opposite to the second discharged region in the sub-scanning direction. The distance to the end of the second discharge region on the first discharge region side is a length that is an integral multiple of the length of the nozzle group in the sub-scanning direction, and the distance of the first discharge region It is preferable that they are arranged at positions separated from the minimum length among the lengths longer than the width in the sub-scanning direction.

  According to this base material, the second discharge region side of the nozzle group that arranges the liquid material toward the region including the boundary on the second discharge region side in the first discharge region with respect to the base material This end is located at the position of the minimum length among the lengths longer than the width of the first discharge region in the sub-scanning direction. Accordingly, the nozzle group can be substantially prevented from facing the boundary of the second discharge region on the first discharge region side.

  Application Example 5 In the base material according to the application example, the first discharge area and the second discharge area are arranged at positions that are not adjacent to each other in the sub-scanning direction. Is preferred.

  According to this base material, there is no state in which the first discharge region and the second discharge region are adjacent in the sub-scanning direction. For this reason, since the nozzle group extending in the sub-scanning direction does not face the first discharge area and the second discharge area at the same time, a single nozzle group has an appropriate cycle of the timing signal. It is possible to realize a base material that does not simultaneously face different regions.

  [Application Example 6] In the method for arranging the discharge area of the base material according to this application example, each nozzle group includes a plurality of discharge nozzles that are driven based on the same timing signal that defines the timing at which the liquid material is discharged. And a plurality of nozzle groups in which the plurality of discharge nozzles are arranged in the sub-scanning direction are relatively moved in the main scanning direction intersecting the sub-scanning direction, and the liquid material is discharged from each of the discharge nozzles. The liquid material is disposed at an arbitrary position by being ejected, and the liquid material can be appropriately disposed by the ejection nozzle, and a first ejection region in which the period of the timing signal is the first period A second discharge region in which a period of the timing signal at which the liquid material can be appropriately arranged by the discharge nozzle is a second period different from the first period. In the discharged area arrangement method, the same nozzle group, the position of the first discharged area and the position of the second discharged area do not face each other at the same time. The first discharge area and the second discharge area are arranged.

  According to the method for arranging the discharge area of the base material, the first discharge area portion and the second discharge area portion in which the appropriate period of the timing signal in the discharge nozzle for arranging the liquid material is different from each other. And a single nozzle group does not face each other at the same time. For this reason, when the liquid material is discharged toward the base material in order to arrange the liquid material, there is no nozzle group that needs to be discharged based on timing signals of two different types of cycles. As a result, a nozzle group that needs to discharge based on timing signals of two different periods is compared with a case where scanning that performs discharge based on timing signals of different periods is performed for each period. The time required for the discharge operation can be suppressed.

  Application Example 7 In the method for arranging the discharge target area of the base material according to the application example, the first discharge target area and the second discharge target area that are adjacent in the sub-scanning direction are set in the sub-scanning direction. In the above, it is preferable that the plurality of discharge nozzles included in the nozzle group are arranged with an interval larger than the distance between the centers of the discharge nozzles located at both ends in the sub-scanning direction.

  According to the method for arranging the discharge area of the base material, the distance between the first discharge area and the second discharge area where the appropriate period of the timing signal is different from each other is longer than the length of the nozzle group in the sub-scanning direction. Yes. As a result, the nozzle group at the position facing the boundary between the first discharge area or the second discharge area is not in the state facing one part of the first discharge area or the second discharge area. Can be prevented from facing each other.

  Application Example 8 In the substrate discharge region arrangement method according to the application example described above, the first discharge region and the second discharge region that are adjacent in the sub-scanning direction are set in the sub-scanning direction. In the plurality of discharge nozzles of the nozzle group, the nozzles located at both ends in the sub-scanning direction among the plurality of effective nozzles used for discharging the liquid material toward the substrate. It is preferable to arrange the discharge nozzles at an interval larger than the distance between the centers of the discharge nozzles.

  According to the method for arranging the discharge area of the base material, a plurality of effective nozzles are arranged in the sub-scanning direction between the first discharge area and the second discharge area where the appropriate periods of the timing signals are different from each other. The distance is longer than it is. Thereby, at least one of the effective nozzles of the nozzle group at the position facing the boundary between the first discharge area or the second discharge area is the first discharge area or the second discharge area. In a state of facing one part, it can be prevented from facing the other.

  [Application Example 9] In the substrate discharge area arranging method according to the application example, the first discharge area and the second discharge area are not adjacent to each other in the sub-scanning direction. It is preferable to arrange in.

  According to this substrate discharge region arrangement method, there is no state in which the first discharge region and the second discharge region are adjacent in the sub-scanning direction. For this reason, since the nozzle group extending in the sub-scanning direction does not face the first discharge area and the second discharge area at the same time, a single nozzle group has an appropriate cycle of the timing signal. It is possible to realize a base material that does not simultaneously face different regions.

  Application Example 10 In the mother panel according to this application example, each nozzle group includes a plurality of discharge nozzles that are driven based on the same timing signal that defines the timing at which the liquid material is discharged. A plurality of nozzle groups in which the discharge nozzles are arranged in the sub-scanning direction are relatively moved in the main scanning direction intersecting with the sub-scanning direction, and the liquid material is discharged from each of the discharge nozzles. A mother panel in which the liquid material is disposed, wherein the liquid material can be appropriately disposed by the discharge nozzle, and a first panel region in which the period of the timing signal is a first period, and the discharge nozzle A second panel region in which a cycle of the timing signal capable of appropriately arranging the liquid material is a second cycle different from the first cycle, The first panel region and the second panel region at positions where both the first panel region part and the second panel region part do not simultaneously face the nozzle group. Is arranged.

  According to this mother panel, both the first panel region portion and the second panel region portion having different appropriate periods of the timing signal in the discharge nozzle for disposing the liquid material are single-ended. Nozzle groups do not face each other simultaneously. For this reason, when the liquid material is discharged toward the mother panel in order to dispose the liquid material, there is no nozzle group that needs to discharge based on each of two different types of imming signals. As a result, a nozzle group that needs to discharge based on timing signals of two different periods is compared with a case where scanning that performs discharge based on timing signals of different periods is performed for each period. The time required for the discharge operation can be suppressed.

  Application Example 11 In the mother panel according to the application example described above, the plurality of nozzle groups that the first panel region and the second panel region adjacent in the sub-scanning direction have in the sub-scanning direction. It is preferable that the discharge nozzles are arranged at a distance greater than the distance between the centers of the discharge nozzles located at both ends in the sub-scanning direction.

  According to this mother panel, the first panel region and the second panel region having different appropriate periods of the timing signal are separated from the length of the nozzle group in the sub-scanning direction. Thereby, the nozzle group located at the position facing the boundary of the first panel region or the second panel region is opposed to the other in a state of facing one part of the first panel region or the second panel region. There can be no.

  Application Example 12 In the mother panel according to the application example described above, the plurality of nozzle groups that the first panel region and the second panel region adjacent to each other in the sub-scanning direction have the nozzle group in the sub-scanning direction. A plurality of effective nozzles that are used for discharging the liquid material toward the mother panel, and are larger than the distance between the centers of the discharge nozzles located at both ends in the sub-scanning direction. It is preferable that it arrange | positions at intervals.

  According to this mother panel, the first panel region and the second panel region having different appropriate periods of the timing signal are separated from each other by a length in which the plurality of effective nozzles are arranged in the sub-scanning direction. . Thereby, at least one of the effective nozzles of the nozzle group at the position facing the boundary between the first discharge area or the second discharge area is one of the first panel area and the second panel area. In a state of facing the part, it can be prevented from facing the other.

  [Application Example 13] In the mother panel panel area arranging method according to this application example, each nozzle group has a plurality of discharge nozzles driven based on the same timing signal that defines the timing of discharging the liquid material. The plurality of nozzle groups in which the plurality of discharge nozzles are arranged in the sub-scanning direction are relatively moved in the main scanning direction intersecting with the sub-scanning direction, and the liquid material is discharged from each of the discharge nozzles. The liquid material is disposed by the discharge nozzle, and the liquid material can be appropriately disposed by the discharge nozzle. The first panel region in which the cycle of the timing signal is the first cycle; and the liquid material by the discharge nozzle And a second panel region in which a period of the timing signal that can be appropriately arranged is a second period different from the first period. In the panel region arranging method, the first nozzle region and the second panel region are not simultaneously opposed to the same nozzle group at the first and second panel regions. The panel region and the second panel region are arranged.

  According to the panel area arranging method of the mother panel of the base material, the first panel area part and the second panel area part having different appropriate periods of the timing signal in the discharge nozzle for arranging the liquid material And a single nozzle group does not face each other at the same time. For this reason, when the liquid material is discharged toward the mother panel in order to arrange the liquid material, there is no nozzle group that needs to discharge based on each of two different types of timing signals. As a result, a nozzle group that needs to discharge based on timing signals of two different periods is compared with a case where scanning that performs discharge based on timing signals of different periods is performed for each period. The time required for the discharge operation can be suppressed.

  Application Example 14 In the mother panel panel area arranging method according to the application example, the first panel area and the second panel area that are adjacent in the sub-scanning direction are It is preferable that the plurality of discharge nozzles included in the nozzle group are arranged with an interval larger than the distance between the centers of the discharge nozzles located at both ends in the sub-scanning direction.

  According to the panel area arrangement method of the mother panel, the first panel area and the second panel area having different appropriate periods of the timing signal are separated from each other by the length of the nozzle group in the sub-scanning direction. Thereby, the nozzle group located at the position facing the boundary of the first panel region or the second panel region is opposed to the other in a state of facing one part of the first panel region or the second panel region. There can be no.

  Hereinafter, an embodiment of a base material, a discharge area arrangement method of the base material, a mother panel, and a panel area arrangement method of the mother panel will be described with reference to the drawings. The embodiment will be described by taking as an example a process of manufacturing a functional film or the like constituting an electro-optical device using an ink jet type droplet discharge device which is an example of a droplet discharge device.

(First embodiment)
In this embodiment, a process of manufacturing a color filter, which is an example of a functional film, of a liquid crystal device, which is an example of an electro-optical device, using a droplet discharge device will be described as an example. The droplet discharge device according to this embodiment is incorporated in a liquid crystal device production line, and includes a droplet discharge head that discharges a liquid material as droplets. The droplet discharge device forms a filter film of a color filter of a liquid crystal device by introducing a functional liquid containing a resin material into the droplet discharge head and disposing the functional liquid on a drawing target. It is.

<Droplet ejection method>
First, a droplet discharge method used for forming a functional film such as a filter film will be described. Examples of the discharge technique of the droplet discharge method include a charge control method, a pressure vibration method, an electromechanical conversion method, an electrothermal conversion method, and an electrostatic suction method. In the charge control method, a charge is applied to a material with a charging electrode, and the flight direction of the material is controlled with a deflection electrode to be discharged from a discharge nozzle. In addition, the pressure vibration method is a method in which an ultra-high pressure of about 30 kg / cm ² is applied to the material and the material is discharged to the tip side of the discharge nozzle. When a control voltage is applied, electrostatic repulsion occurs between the materials, and the materials are scattered and are not discharged from the discharge nozzle. The electromechanical conversion method utilizes the property that a piezoelectric element (piezoelectric element) is deformed by receiving a pulse-like electric signal. The piezoelectric element is deformed through a flexible substance in a space where material is stored. Pressure is applied, and the material is extruded from this space and discharged from the discharge nozzle.

  In the electrothermal conversion method, a material is rapidly vaporized by a heater provided in a space in which the material is stored to generate bubbles, and the material in the space is discharged by the pressure of the bubbles. In the electrostatic attraction method, a minute pressure is applied to a space in which a material is stored, a meniscus of material is formed on the discharge nozzle, and an electrostatic attractive force is applied in this state before the material is drawn out. In addition to this, techniques such as a system that uses a change in the viscosity of a fluid due to an electric field and a system that uses a discharge spark are also applicable. The droplet discharge method has an advantage that the use of the material is less wasteful and a desired amount of the material can be accurately disposed at a desired position. Among these, the piezo method does not apply heat to the liquid material, so it does not affect the composition of the material, and the size of the droplet can be adjusted easily by adjusting the drive voltage. Have In this embodiment, since the composition of the material is not affected, the degree of freedom in selecting the liquid material is high, and the size of the droplet can be easily adjusted, so the controllability of the droplet is good. The above piezo method is used.

<Droplet ejection device>
Next, the overall configuration of the droplet discharge device 1 will be described with reference to FIGS. 1 and 2. FIG. 1 is a plan view showing a schematic configuration of a droplet discharge device. FIG. 2 is a side view showing a schematic configuration of the droplet discharge device.

  As shown in FIG. 1, the droplet discharge device 1 includes a discharge unit 2 having a droplet discharge head 17 (see FIG. 3), a work unit 3, a liquid supply unit 60 (see FIG. 6), and an inspection unit 4. And a maintenance unit 5 and a discharge device controller 6 (see FIG. 6).

  The discharge unit 2 includes 120 liquid droplet discharge heads 17 that discharge the functional liquid, which is a liquid, as liquid droplets. The liquid droplet discharge heads 17 are moved in the Y-axis direction and are held at the moved positions. Y-axis table 12 is provided. The work unit 3 includes a work mounting table 21 on which a work W that is a discharge target of liquid droplets discharged from the liquid droplet discharge head 17 is mounted. The liquid supply unit 60 includes a storage tank (not shown) that stores the functional liquid, and supplies the functional liquid to the droplet discharge head 17. The inspection unit 4 includes a discharge inspection unit 18 and a weight measurement unit 19 for inspecting a discharge state from the droplet discharge head 17, and the weight measurement unit 19 is provided with a flushing unit 14. The maintenance unit 5 includes a suction unit 15 and a wiping unit 16 that maintain the droplet discharge head 17. The discharge device control unit 6 comprehensively controls these units and the like. For the weight measurement process, drawing process, discharge inspection process, and maintenance process performed using the weight measurement unit 19, the discharge unit 2, the discharge inspection unit 18, the maintenance unit 5, etc., the discharge device control unit 6 performs each unit. It is carried out by controlling the above.

  The droplet discharge device 1 includes an X-axis support base 1A supported on a stone surface plate, and each unit is disposed on the X-axis support base 1A. The X-axis table 11 extends in the X-axis direction, which is the main scanning direction, and is disposed on the X-axis support base 1A, and moves the work table 21 in the X-axis direction (main scanning direction). .

The Y-axis table 12 of the discharge unit 2 is disposed on a pair of Y-axis support bases 7 and 7 spanned across the X-axis table 11 via a plurality of support columns 7A. Extending in the Y-axis direction. The discharge unit 2 includes ten carriage units 51 each having twelve droplet discharge heads 17. Ten carriage units 51 are suspended from each of the ten bridge plates 52. The bridge plate 52 is supported by the Y-axis table 12 via a Y-axis slider (not shown) so as to be slidable in the Y-axis direction. The Y-axis table 12 moves the bridge plate 52 (carriage unit 51) in the Y-axis direction (sub-scanning direction).
In synchronism with the driving of the X-axis table 11 and the Y-axis table 12, the droplet discharge head 17 of the discharge unit 2 is driven to discharge, thereby discharging functional droplets and placing them on the workpiece mounting table 21. An arbitrary drawing pattern is drawn on the workpiece W.

  The discharge inspection unit 18 includes an inspection drawing unit 161 and an imaging unit 162 (see FIG. 2). The inspection drawing unit 161 is fixed to the X-axis second slider 23 and is configured to move integrally with the weight measuring unit 19 and the flushing unit 14 that are also fixed to the X-axis second slider 23. A block in which the inspection drawing unit 161, the weight measuring unit 19, and the flushing unit 14 are integrally provided is referred to as a discharge inspection block 4a. The imaging unit 162 includes two inspection cameras 163 (see FIG. 2) and a camera moving mechanism 164 (see FIG. 2) that supports the inspection camera 163 so as to be slidable in the Y-axis direction. The camera moving mechanism 164 is fixed to the Y-axis support base 7. The two inspection cameras 163 are independently moved in the Y-axis direction by a camera moving motor (not shown).

  The suction unit 15 and the wiping unit 16 included in the maintenance unit 5 are disposed on the gantry 8 disposed at a position where the carriage unit 51 can be moved by the Y-axis table 12 while being detached from the X-axis table 11. Yes. The suction unit 15 includes a plurality of divided suction units 141, sucks the droplet discharge head 17, and forcibly discharges the functional liquid from the discharge nozzle 78 (see FIG. 3) of the droplet discharge head 17. The wiping unit 16 has a wiping sheet 151 sprayed with a cleaning liquid, and wipes (performs wiping) a nozzle forming surface 76a (see FIG. 3) of the droplet discharge head 17 after suction. In this way, the suction unit 15 and the wiping unit 16 perform maintenance work for maintaining or recovering the function of the droplet discharge head 17 of the discharge unit 2.

  As shown in FIG. 1 or FIG. 2, the X-axis table 11 includes an X-axis first slider 22, an X-axis second slider 23, a pair of left and right X-axis linear motors 26 and 26, and a pair of X-axis common. And support bases 24, 24.

  A workpiece mounting table 21 is attached to the X-axis first slider 22. The X-axis first slider 22 is supported by an X-axis common support base 24 extending in the X-axis direction so as to be slidable in the X-axis direction. A discharge inspection block 4 a in which an inspection drawing unit 161, a weight measurement unit 19, and a flushing unit 14 are integrally provided is attached to the X-axis second slider 23. The X-axis second slider 23 is supported by an X-axis common support base 24 extending in the X-axis direction so as to be slidable in the X-axis direction. The X-axis linear motor 26 is arranged in parallel with the X-axis common support base 24, and moves the X-axis first slider 22 or the X-axis second slider 23 along the X-axis common support base 24. The mounting table 21 (work W mounted on the workpiece mounting table 21) or the discharge inspection block 4a is moved in the X-axis direction. The X-axis first slider 22 and the X-axis second slider 23 can be individually driven by an X-axis linear motor 26. The X-axis direction corresponds to the main scanning direction, and the Y-axis direction corresponds to the sub-scanning direction.

  The work mounting table 21 includes a suction table 31 for sucking and setting the work W, a θ table 32 for supporting the suction table 31 and correcting the position of the work W set on the suction table 31 in the θ-axis direction. is doing. The position of the workpiece mounting table 21 in FIG. 1 and FIG. 2 is a feeding / unloading material position for feeding and unloading the workpiece W, and when an unprocessed workpiece W is introduced (feeding) into the suction table 31 Or, when the processed workpiece W is collected (material removal), the suction table 31 is moved to this position. The workpiece W is carried in and out (replaced) with respect to the suction table 31 by a robot arm (not shown) at the supply / discharge material position. Further, the suction table 31 incorporates a mechanism (not shown) for pre-aligning the supplied workpiece W so as to draw it in the X-axis direction and the Y-axis direction. The alignment of the unprocessed workpiece W supplied to the suction table 31 is performed at the supply / discharge material position using the θ table 32. A pair of pre-drawing flushing boxes 121 and 121 of the pre-drawing flushing unit 111 are attached to a pair of sides parallel to the Y-axis direction of the workpiece mounting table 21.

  The image recognition unit 80 has two alignment cameras 81 and a camera moving mechanism 82. The camera moving mechanism 82 is disposed on the X-axis support base 1 </ b> A so as to extend in the Y-axis direction and straddle the X-axis table 11. The alignment camera 81 is supported by a camera moving mechanism 82 via a camera holder (not shown) so as to be slidable in the Y-axis direction. The alignment camera 81 supported by the camera moving mechanism 82 faces the X-axis table 11 from above, and each reference mark (alignment mark) of the workpiece W placed on the workpiece placement table 21 on the X-axis table 11 (illustrated). (Omitted) can be recognized. The two alignment cameras 81 are independently moved in the Y-axis direction by a camera movement motor (not shown).

  Each alignment camera 81 cooperates with the movement of the workpiece mounting table 21 in the X-axis direction and moves the alignment marks of the various workpieces W supplied by the robot arm while moving in the Y-axis direction by the camera moving mechanism 82. Images are taken and position recognition of various workpieces W is performed. Based on the imaging result of the alignment camera 81, θ correction of the workpiece W by the θ table 32 is performed.

  The Y axis table 12 includes 10 sets of Y axis sliders (not shown) and a pair of Y axis linear motors (not shown). The pair of Y-axis linear motors are respectively installed on the pair of Y-axis support bases 7 and 7 and extend in the Y-axis direction. Twenty (10 sets) Y-axis sliders are slidably supported on each of the pair of Y-axis support bases 7, 7. A pair of Y-axis sliders, each composed of a single Y-axis slider supported on each of the pair of Y-axis support bases 7, 7, has both bridge plates 52 to which the carriage unit 51 constituting the discharge unit 2 is fixed. Hold and support. The ten bridge plates 52 to which the ten carriage units 51 constituting the discharge unit 2 are fixed are respectively connected to a pair of Y-axis sliders via ten sets of Y-axis sliders that support the ten bridge plates 52 in both ends. It is installed on the shaft support bases 7 and 7.

  When the pair of Y-axis linear motors are driven (synchronously), each Y-axis slider translates in the Y-axis direction simultaneously with the pair of Y-axis support bases 7 and 7 as a guide. As a result, the bridge plate 52 moves in the Y-axis direction, and the carriage unit 51 suspended from the bridge plate 52 moves in the Y-axis direction. In this case, by controlling the drive of the Y-axis linear motor, the carriage unit 51 can be moved independently and individually, or the ten carriage units 51 can be moved together. is there.

  The carriage unit 51 includes a head unit 54 (see FIG. 4) having twelve droplet ejection heads 17 and a sub-carriage 53 that supports the twelve droplet ejection heads 17 in two groups. I have. Further, the carriage unit 51 includes a θ rotation mechanism 61 that supports the head unit 54 so as to be capable of θ correction (θ rotation), and a suspension member 62 that supports the head unit 54 on the bridge plate 52 via the θ rotation mechanism 61. It is equipped with.

<Configuration of droplet discharge head>
Next, the droplet discharge head 17 will be described with reference to FIG. FIG. 3 is an external perspective view showing an outline of the droplet discharge head.

  As shown in FIG. 3, the liquid droplet ejection head 17 is a so-called two-unit type, a liquid introduction part 71 having two connection needles 72, 72, and a rectangular head body 74 that is continuous with the liquid introduction part 71. And a head substrate 73 protruding laterally from between the liquid introducing portion 71 and the head main body 74. The head main body 74 includes a pump part 75 that is continuous with the liquid introduction part 71 and a nozzle forming plate 76 that is continuous with the pump part 75. In the nozzle forming plate 76, a discharge nozzle 78 that opens to the nozzle forming surface 76a is formed. In the droplet discharge head 17, two rows of nozzle rows 78b each including 181 discharge nozzles 78 are formed. The pump unit 75 is provided with a piezoelectric element, and the functional liquid supplied from the liquid introduction unit 71 is discharged from the discharge nozzle 78 by driving the piezoelectric element. One piezoelectric element is provided corresponding to one discharge nozzle 78, and the functional liquid can be discharged independently for each discharge nozzle 78. The head substrate 73 is provided with a pair of connectors 77 and 77. The connector 77 is connected to the relay substrate connected to the ejection device control unit 6 by an FFC cable or the like, so that the droplet ejection head 17 is connected to the ejection device control unit 6.

In a state where the droplet discharge head 17 is attached to the droplet discharge device 1, the nozzle row 78b extends in the Y-axis direction. The discharge nozzles 78 constituting the two nozzle rows 78b are displaced from each other by a half nozzle pitch in the Y-axis direction. One nozzle pitch is 140 μm, for example. At the same position in the X-axis direction, the droplets discharged from the discharge nozzles 78 constituting each nozzle row 78b land on a straight line at equal intervals in the Y-axis direction by design. When the nozzle pitch of the discharge nozzles 78 is 141 μm, the distance between centers of the landing positions of the droplets discharged from the droplet discharge heads 17 of the two nozzle rows 78 b in the Y-axis direction is 70.5 μm by design. is there.
The timing at which droplets are ejected from the ejection nozzle 78 is defined by a latch signal. The same latch signal is applied to the ejection nozzles 78 constituting one nozzle row 78b, and droplets are ejected at the same timing. Each of the two nozzle rows 78b included in one droplet discharge head 17 includes a distance in the X-axis direction between the two nozzle rows 78b and an X-axis direction between the droplet discharge head 17 and the drawing object. A latch signal is applied with a time difference that can be calculated from the relative movement speed of the. Thereby, the droplets discharged from the droplet discharge heads 17 of the two nozzle rows 78b can be landed in a straight line extending in the Y-axis direction. A discharge nozzle 78 included in one droplet discharge head 17 corresponds to a nozzle group.
In the discharge nozzle 78 of one droplet discharge head 17 shown by L in FIG. 3, the center distance in the Y-axis direction of the discharge nozzles 78 located at both ends in the Y-axis direction is expressed as a nozzle group length L. . The droplet discharge head 17 includes two nozzle rows 78b in which 180 discharge nozzles 78 are arranged at a nozzle pitch of 141 μm, and the discharge nozzles 78 constituting the two nozzle rows 78b are mutually in the Y-axis direction. In this case, the nozzle group length L is 25309.5 μm.

<Head unit>
Next, a schematic configuration of the head unit 54 of the discharge unit 2 will be described with reference to FIG. FIG. 4 is a plan view showing a schematic configuration of the head unit. The X axis and the Y axis shown in FIG. 4 coincide with the X axis and the Y axis shown in FIG. 1 when the head unit 54 is attached to the droplet discharge device 1.

  As shown in FIG. 4, the head unit 54 has a sub-carriage 53 and twelve droplet discharge heads 17 mounted on the sub-carriage 53. The droplet discharge head 17 is fixed to the sub-carriage 53, and the head main body 74 is loosely fitted in a hole (not shown) formed in the sub-carriage 53, so that the nozzle forming surface 76 a is formed from the surface of the sub-carriage 53. It protrudes. FIG. 4 is a view as seen from the nozzle forming surface 76a side. The twelve droplet discharge heads 17 are divided in the Y-axis direction to form two groups of head sets 55 each having six droplet discharge heads 17. The nozzle row 78b of each droplet discharge head 17 extends in the Y-axis direction.

  The six droplet discharge heads 17 included in one head set 55 are already in the Y-axis direction with respect to the discharge nozzles 78 at the ends of one of the droplet discharge heads 17 adjacent to each other. The discharge nozzle 78 at the end of one droplet discharge head 17 is positioned so as to be shifted by a half nozzle pitch. If the position of all the discharge nozzles 78 in the X-axis direction is the same in the six droplet discharge heads 17 included in the head set 55, the discharge nozzles 78 are arranged at equal intervals of a half nozzle pitch in the Y-axis direction. . In other words, at the same position in the X-axis direction, the droplets discharged from the discharge nozzles 78 constituting the respective nozzle rows 78b included in the respective droplet discharge heads 17 are arranged at equal intervals in the Y-axis direction by design. To land on a straight line. This straight line is referred to as a nozzle group line. Since the droplet discharge heads 17 overlap each other in the Y-axis direction, the head set 55 is configured in a stepwise manner in the X-axis direction.

  The two head sets 55 included in the head unit 54 are arranged at an interval corresponding to the length of one head set 55 in the Y-axis direction in the Y-axis direction. That is, when one droplet is discharged from the discharge nozzle 78 of one head unit 54 and landed so that the X-axis direction is at the same position, two nozzle groups are separated by an interval of two lengths. Nozzle group lines are formed. By moving the head unit 54 in the Y-axis direction by a distance corresponding to the length of one head set 55 in the Y-axis direction, two nozzle group lines are formed in the same manner, so that four nozzle group lines are formed. A continuous straight line is formed. In the design, the number of points 48 times as many as the number of discharge nozzles 78 constituting the nozzle row 78b is connected at intervals of half the nozzle pitch of the discharge nozzles 78 constituting the nozzle row 78b. In the case of the head unit 54 having the droplet discharge head 17 in which 180 discharge nozzles 78 per nozzle row are formed at a nozzle pitch of 141 μm, a straight line connecting 8640 points at a pitch interval of 70.5 μm is formed. It is formed.

  Adjacent head units 54 can also be positioned such that the respective head sets 55 are arranged at an interval of one head set 55 in the Y-axis direction. Therefore, each of the discharge nozzles 78 of the discharge unit 2 discharges the functional liquid one by one across the movement in the Y-axis direction corresponding to the length of the nozzle group line, thereby forming a straight line extending in the Y-axis direction. Can be formed. The length of the line on which all the 120 droplet discharge heads 17 of the discharge unit 2 can draw by two discharges corresponds to the width of the maximum size workpiece W that can be mounted on the workpiece mounting table 21. Yes. The liquid droplets that land on each point spread more greatly than the substantial nozzle pitch (70.5 μm), thereby forming a liquid film continuous in a strip shape.

  When some of the discharge nozzles 78 at the end of the nozzle row 78b are not used, the droplet discharge head 17 is arranged such that the discharge nozzles 78 that are not used overlap the discharge nozzles 78 that are used in the Y-axis direction. Place. The discharge nozzle 78 used in this case corresponds to an effective nozzle. In the droplet discharge head 17 in which the discharge nozzles 78 that are not used are set, among the discharge nozzles 78 that are used, the distance between the centers of the discharge nozzles 78 positioned at both ends in the Y-axis direction is the nozzle group length. Corresponds to L.

  Next, an arrangement example of the droplet discharge heads 17 for discharging each functional liquid in the head unit 54 when a plurality of types of functional liquids are handled in parallel will be described with reference to FIG. FIG. 5 is a schematic diagram illustrating an arrangement example of a droplet discharge head that discharges each functional liquid in the head unit when a three-color filter is formed.

As shown in FIG. 5, the droplet discharge heads 17 of one head set 55 in the head unit 54 are expressed as droplet discharge heads 17a, 17b, 17c, 17d, 17e, and 17f in order from one end. The droplet discharge heads 17 of the other head set 55 in the head unit 54 are arranged in the same order as the droplet discharge heads 17a, 17b, 17c, 17d, 17e, and 17f in the same order as the droplet discharge heads 17g, 17h, 17j, 17k, Indicated as 17m, 17n.
The functional liquid 252 for forming the red filter film 205R, the green filter film 205G, and the blue filter film 205B of the filter film 205 (see FIG. 7 or 9) of the three-color filter is a red functional liquid 252R and a green functional liquid 252G. And blue functional liquid 252B (see FIG. 12). The droplet discharge heads 17 to which the red functional liquid 252R, the green functional liquid 252G, or the blue functional liquid 252B are supplied are referred to as a red discharge head 17R, a green discharge head 17G, and a blue discharge head 17B, respectively.
In the head unit 54 of this embodiment, the droplet discharge heads 17a, 17d, 17g, and 17k are red discharge heads 17R, and the droplet discharge heads 17b, 17e, 17h, and 17m are green discharge heads 17G. The droplet discharge heads 17c, 17f, 17j, and 17n are blue discharge heads 17B.

  By performing the scan in the X-axis direction for discharging the red functional liquid 252R from the two red discharge heads 17R, three times with the movement in the Y-axis direction for one droplet discharge head 17 being sandwiched twice, A nozzle group line composed of droplets of the red functional liquid 252R that has landed can be formed. Substantially in parallel, the green functional liquid 252G or the blue functional liquid 252B is ejected from the green ejection head 17G and the blue ejection head 17B, and a nozzle group line composed of droplets of the green functional liquid 252G or the blue functional liquid 252B can be formed. The discharge that forms the nozzle group line is performed twice by using all the droplet discharge heads 17 of the discharge unit 2, thereby corresponding to the width of the workpiece W of the maximum size that can be mounted on the workpiece mounting table 21 described above. One nozzle group line composed of droplets of the red functional liquid 252R, the green functional liquid 252G, or the blue functional liquid 252B can be formed.

<Electrical configuration of droplet discharge device>
Next, an electrical configuration for driving the droplet discharge device 1 having the above-described configuration will be described with reference to FIG. FIG. 6 is an electrical configuration block diagram showing an electrical configuration of the droplet discharge device. The droplet discharge device 1 is controlled by inputting data and control commands such as operation start and stop via the control device 65 shown in FIG. The control device 65 includes a host computer 66 that performs arithmetic processing, and an input / output device 68 that inputs and outputs information that is input to and output from the droplet discharge device 1, and is connected via an interface (I / F) 67. It is connected to the discharge device controller 6. The input / output device 68 includes a keyboard capable of inputting information, an external input / output device that inputs / outputs information via a recording medium, a recording unit that stores information input via the external input / output device, a monitor device, and the like It is.

  The ejection device controller 6 of the droplet ejection device 1 includes an interface (I / F) 47, a CPU (Central Processing Unit) 44, a ROM (Read Only Memory) 45, a RAM (Random Access Memory) 46, And a hard disk 48. The head driver 2d, the drive mechanism driver 40d, the liquid supply driver 60d, the maintenance driver 5d, the inspection driver 4d, and the detection unit interface (I / F) 43 are provided. These are electrically connected to each other via a data bus 49.

  The interface 47 exchanges data with the control device 65, and the CPU 44 performs various arithmetic processes based on commands from the control device 65, and outputs control signals that control the operation of each part of the droplet discharge device 1. . The RAM 46 temporarily stores control commands and print data received from the control device 65 in accordance with instructions from the CPU 44. The ROM 45 stores routines for the CPU 44 to perform various arithmetic processes. The hard disk 48 stores control commands and print data received from the control device 65, and stores routines for the CPU 44 to perform various arithmetic processes.

  A droplet discharge head 17 constituting the discharge unit 2 is connected to the head driver 2d. The head driver 2 d drives the droplet discharge head 17 in accordance with a control signal from the CPU 44 and discharges droplets of the functional liquid.

  The drive mechanism driver 40d is connected to a head moving motor of the Y-axis table 12, an X-axis linear motor 26 of the X-axis table 11, and a drive mechanism 41 including various drive mechanisms having various drive sources. The various drive mechanisms are the above-described camera movement motor for moving the alignment camera 81, the drive motor for the θ rotation mechanism 61, the drive motor for the θ table 32, and the like. The drive mechanism driver 40d drives the motor or the like in accordance with a control signal from the CPU 44 to move the droplet discharge head 17 and the workpiece W relative to each other so that an arbitrary position of the workpiece W and the droplet discharge head 17 are opposed to each other. In cooperation with the head driver 2d, the droplet of the functional liquid is landed at an arbitrary position on the workpiece W.

  A suction unit 15, a wiping unit 16, and a flushing unit 14 of the maintenance unit 5 are connected to the maintenance driver 5d. The maintenance driver 5 d drives the suction unit 15, the wiping unit 16, or the flushing unit 14 in accordance with a control signal from the CPU 44 to perform maintenance work on the droplet discharge head 17.

  A discharge inspection unit 18 of the inspection unit 4 and a weight measurement unit 19 are connected to the inspection driver 4d. The inspection driver 4d drives the discharge inspection unit 18 or the weight measurement unit 19 in accordance with a control signal from the CPU 44, and inspects the discharge state of the droplet discharge head 17 such as discharge weight, discharge availability, and landing position accuracy. To implement.

  A liquid supply unit 60 is connected to the liquid supply driver 60d. The liquid supply driver 60 d drives the liquid supply unit 60 in accordance with a control signal from the CPU 44 and supplies the functional liquid to the droplet discharge head 17. A detection unit 42 including various sensors is connected to the detection unit interface 43. Detection information detected by each sensor of the detection unit 42 is transmitted to the CPU 44 via the detection unit interface 43.

<Configuration of LCD panel>
Next, a liquid crystal display panel as a liquid crystal device which is an example of an electro-optical device will be described.
First, the configuration of the liquid crystal display panel 200 will be described with reference to FIG. FIG. 7 is an exploded perspective view showing a schematic configuration of the liquid crystal display panel. The liquid crystal display panel 200 is an active matrix type liquid crystal device using a thin film transistor (TFT) element as a drive element, and is a transmissive liquid crystal device using a backlight (not shown).

  As shown in FIG. 7, the liquid crystal display panel 200 includes an element substrate 210 having a TFT element 215, a counter substrate 220 having a counter electrode 207, and an element substrate 210 and a counter substrate 220 bonded by a sealant (not shown). And a liquid crystal 230 (see FIG. 13K) filled in the gap. A polarizing plate 231 and a polarizing plate 232 are disposed on the element substrate 210 and the counter substrate 220 which are bonded to each other on the surface opposite to the bonded surface.

  In the element substrate 210, the TFT element 215, the pixel electrode 217, the scanning line 212, and the signal line 214 are formed on the insulating layer 216 on the surface of the glass substrate 211 facing the counter substrate 220. The scanning lines 212 and the signal lines 214 are formed so as to intersect with each other while being insulated from each other. A pixel electrode 217 is formed in a region surrounded by the scanning lines 212 and the signal lines 214. The pixel electrode 217 has a shape in which some corners of the rectangular shape are lacking in the rectangular shape. A TFT element 215 including a source electrode, a drain electrode, a semiconductor portion, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 217, the scanning line 212, and the signal line 214. By applying a signal to the scanning line 212 and the signal line 214, the TFT element 215 is turned on / off to control energization to the pixel electrode 217.

  An alignment film 218 is provided on the surface of the element substrate 210 in contact with the liquid crystal 230 so as to cover the entire region where the scanning lines 212, the signal lines 214, and the pixel electrodes 217 are formed.

  In the counter substrate 220, a color filter (hereinafter referred to as “CF”) layer 208 is formed on the surface of the glass substrate 201 facing the element substrate 210. The CF layer 208 includes a partition wall 204, a red filter film 205R, a green filter film 205G, and a blue filter film 205B. On the glass substrate 201, the black matrix 202 which comprises the partition 204 in a grid | lattice form is formed, and the bank 203 is formed on the black matrix 202. FIG. A square filter film region 225 is formed by a partition wall 204 composed of the black matrix 202 and the bank 203. In the filter film region 225, a red filter film 205R, a green filter film 205G, or a blue filter film 205B is formed. The red filter film 205 </ b> R, the green filter film 205 </ b> G, and the blue filter film 205 </ b> B are formed at positions and shapes that face the pixel electrodes 217, respectively.

  A planarizing film 206 is provided on the CF layer 208 (on the element substrate 210 side). On the planarizing film 206, a counter electrode 207 made of a transparent conductive material such as ITO is provided. By providing the planarization film 206, the surface on which the counter electrode 207 is formed is made substantially flat. The counter electrode 207 is a continuous film having a size covering the entire region where the pixel electrode 217 is formed. The counter electrode 207 is connected to a wiring formed on the element substrate 210 through a conduction portion (not shown).

  An alignment film 228 that covers the entire surface of the pixel electrode 217 is provided on the surface of the counter substrate 220 in contact with the liquid crystal 230. The liquid crystal 230 is a sealing material that bonds the alignment film 228 of the counter substrate 220, the alignment film 218 of the element substrate 210, and the counter substrate 220 and the element substrate 210 in a state where the element substrate 210 and the counter substrate 220 are bonded to each other. The space surrounded by is filled.

  Although the liquid crystal display panel 200 has a transmissive configuration, a reflective layer or a transflective liquid crystal device may be provided by providing a reflective layer or a transflective layer.

<Mother counter substrate>
Next, the mother counter substrate 201A will be described with reference to FIG. The counter substrate 220 is formed by forming the above-described CF layer 208 and the like on the mother counter substrate 201A to be divided into the glass substrate 201, and then dividing the mother counter substrate 201A into individual counter substrates 220 (glass substrates 201). Is done. FIG. 8A is a diagram schematically illustrating the planar structure of the counter substrate, and FIG. 8B is a diagram schematically illustrating the planar structure of the mother counter substrate.

  The counter substrate 220 is formed using a glass substrate 201 made of transparent quartz glass having a thickness of approximately 1.0 mm. As shown in FIG. 8A, the counter substrate 220 has a CF layer 208 formed in a portion excluding a slight frame region around the glass substrate 201. The CF layer 208 is formed by forming a plurality of filter film regions 225 in the form of a dot pattern, in the present embodiment in the form of a dot matrix, on the surface of a rectangular glass substrate 201, and forming the filter film 205 in the filter film region 225. Is formed by. An alignment mark (not shown) is formed at a position that does not cover the region where the CF layer 208 is formed on the glass substrate 201. The alignment mark is used as a reference mark for positioning when the glass substrate 201 is attached to a manufacturing apparatus in order to execute various processes for forming the CF layer 208 and the like.

  As shown in FIG. 8B, the mother counter substrate 201 </ b> A is formed with a CF layer 208 of the counter substrate 220 and a CF layer 408 constituting the counter substrate 420 in a portion that becomes the glass substrate 401. The counter substrate 420 has substantially the same structure as the counter substrate 220 and is a counter substrate that constitutes a liquid crystal display panel having a display area smaller than that of the liquid crystal display panel 200. When the glass substrate 201 is appropriately disposed on the mother counter substrate 201A, a portion that cannot be used in terms of area is generated. Therefore, by forming the CF layer 408 of the glass substrate 401 smaller than the glass substrate 201 and effectively using the portion as the glass substrate 401, the mother counter substrate 201A is used without waste. The mother counter substrate 201A corresponds to a base material or a mother panel. In FIG. 8, the interval between the regions where the CF layer 208 and the CF layer 408 are formed is increased for easy understanding of the drawing. However, in order to efficiently use the mother counter substrate 201A, The interval is preferably as small as possible. In other words, by finding an arrangement method for efficiently arranging glass substrates of different sizes, the size setting of the mother counter substrate 201A itself becomes clear, and the efficiency of taking out the mother counter substrate 201A from the raw material can be improved. It becomes.

<Color filter>
Next, the arrangement of the filter layers 205 (the red filter film 205R, the green filter film 205G, and the blue filter film 205B) in the CF layer 208 and the CF layer 208 formed on the counter substrate 220 will be described with reference to FIG. To do. FIG. 9 is a schematic plan view showing an example of the arrangement of filter films of a three-color filter.

  As shown in FIG. 9, the filter film 205 includes a plurality of, for example, rectangular filter film regions that are partitioned by partition walls 204 formed in a lattice pattern by a resin material that does not transmit light and are arranged in a dot matrix. It is formed by filling 225 with a color material. For example, a film-like filter that fills the filter film region 225 by filling the filter film region 225 with a functional liquid containing a color material constituting the filter film 205 and evaporating the solvent of the functional liquid to dry the functional liquid. A film 205 is formed.

  As an arrangement of the red filter film 205R, the green filter film 205G, and the blue filter film 205B in the three-color filter, for example, a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like are known. As shown in FIG. 9A, the stripe arrangement is an arrangement in which all the columns of the matrix become the same color red filter film 205R, green filter film 205G, or blue filter film 205B. As shown in FIG. 9B, the mosaic arrangement is an arrangement in which the color is shifted by one filter film 205 for each row in the horizontal direction. In the case of a three-color filter, the mosaic arrangement is arbitrarily arranged on a vertical and horizontal straight line. The three filter films 205 are arranged in three colors. As shown in FIG. 9C, the delta arrangement is a color scheme in which the arrangement of the filter films 205 is different, and in the case of a three-color filter, any three adjacent filter films 205 have different colors.

  In the three-color filters shown in FIGS. 9A, 9B, and 9C, each of the filter films 205 is one of R (red), G (green), and B (blue). It is formed with the coloring material. A set of filter films 205 each including a red filter film 205R, a green filter film 205G, and a blue filter film 205B that are formed adjacent to each other. A pixel filter 254 "). Full color display is performed by selectively allowing light to pass through one or a combination of the red filter film 205R, the green filter film 205G, and the blue filter film 205B in one pixel filter 254.

<Discharge resolution>
Next, the relationship between the ejection resolution and the shape to be drawn will be described with reference to FIG. A functional liquid is discharged from the discharge nozzle 78 by applying a drive signal (drive waveform) latched by a latch signal to the discharge nozzle 78. The minimum distance between the discharge positions from the discharge nozzle 78 with respect to the drawing target determined from the frequency of the latch signal and the relative movement speed of the discharge nozzle 78 and the drawing target in the main scanning direction is the discharge resolution. The minimum distance between the positions where the ejected functional liquid has landed on the drawing target is the drawing resolution. The appropriate drawing resolution of the drawing target is determined by the drawing shape of each drawing target. The discharge resolution to be realized by the discharge nozzle 78 is determined by an appropriate drawing resolution of a drawing target on which the droplet discharge device 1 performs drawing discharge.

FIG. 10 is an explanatory diagram showing the relationship between the shape of the filter film region and the discharge resolution. FIG. 10A shows the landing point 263 of the preferred functional liquid 252 (see FIG. 12) and the timing at which the functional liquid 252 is landed on the landing point 263 in the filter film region 225 forming the filter film 205 of the CF layer 208. A latch signal 262 for discharging from the droplet discharge head 17 is shown.
In order to form one filter film 205, the plurality of discharge nozzles 78 are driven simultaneously, and the functional liquid 252 is landed on the filter film region 225 where the filter film 205 is to be formed. An appropriate filter film 205 is formed from one discharge nozzle 78 by, for example, landing droplets of the functional liquid 252 at the positions of the four landing points 263 shown in FIG.

  In general, the signal is shown corresponding to the time axis, but the relative movement speed between the discharge nozzle 78 and the filter film region 225 (mother counter substrate 201A) is constant, so that the latch shown in FIG. A signal 262 indicates a latch signal that is applied when the discharge nozzle 78 that moves relatively in the direction of the arrow a, which is the main scanning direction, is at that position. The discharge nozzle 78 moves relatively in the direction of the arrow a in FIG. 10A, and at the rise of the latch signal 262, that is, at the position where the rise portion of the latch signal 262 is described in FIG. The functional liquid 252 is discharged. The discharged functional liquid 252 lands at the position of the landing point 263 within a range of error in landing position accuracy. The functional liquid 252 discharged from the discharge nozzle 78 moves in the relative movement direction during the flight time from discharge until landing, but the amount of movement is substantially constant, so the figure can be understood. For the sake of simplicity, the movement amount is omitted in FIG.

In the discharge nozzle 78 of the red discharge head 17R, the red functional liquid 252R is discharged only at the time of discharging toward the landing point 263R of the filter film region 225R where the red filter film 205R is to be formed. The discharge nozzle 78 included in the red discharge head 17R does not perform discharge at the discharge point when landing on the landing point 263G or the landing point 263B. Similarly, in the discharge nozzle 78 of the green discharge head 17G or the blue discharge head 17B, the landing point 263G or the landing point 263B of the filter film region 225G or the filter film region 225B where the green filter film 205G or the blue filter film 205B is to be formed. The green functional liquid 252G or the blue functional liquid 252B is discharged only at the time of discharging toward the water.
By appropriately applying the drive signal latched by the latch signal 262 to the arrangement of the filter film region 225 in the main scanning direction, it is possible to discharge the functional liquid 252 at an appropriate discharge position. In the filter film region 225, the functional liquid 252 can be landed at substantially the same position. When a plurality of functional liquids 252 are continuously discharged in the main scanning direction, the minimum discharge interval is the discharge resolution. That is, the functional liquid 252 can be arranged in units of discharge resolution. The arrangement of the functional liquid 252 in the main scanning direction is appropriately determined depending on the size of the region partitioned by the partition wall 204 and the film thickness setting of the filter film 205.

FIG. 10B shows a preferred landing point 273 of the functional liquid 252 and a functional liquid 252 landing on the landing point 273 in the filter film region 425 forming the filter film 405 (405R, 405G, 405B) of the CF layer 408. A latch signal 272 for discharging from the droplet discharge head 17 is shown.
An appropriate filter film 405 is formed from one discharge nozzle 78 by, for example, landing droplets of the functional liquid 252 at the positions of two landing points 273 shown in FIG. 10B.
The relationship between the latch signal 272 and the filter film region 425 in FIG. 10B is the same as the relationship between the latch signal 262 and the filter film region 225 in FIG.

In the discharge nozzle 78 of the red discharge head 17R, the red functional liquid 252R is discharged only at the time of discharge toward the landing point 273R of the filter film region 425R where the red filter film 405R is to be formed. The discharge nozzle 78 included in the red discharge head 17R does not perform discharge at the discharge point when landing on the landing point 273G, the landing point 273B, and the landing point 273K applied to the partition wall 204. Similarly, in the discharge nozzle 78 of the green discharge head 17G or the blue discharge head 17B, the landing point 273G or the landing point 273B of the filter film region 425G or the filter film region 425B where the green filter film 405G or the blue filter film 405B is to be formed. The green functional liquid 252G or the blue functional liquid 252B is discharged only at the time of discharging toward the water.
By appropriately applying a drive signal latched by the latch signal 272 to the arrangement of the filter film region 425 in the main scanning direction, it is possible to discharge the functional liquid 252 at an appropriate discharge position. In the filter film region 425, the functional liquid 252 can be landed at substantially the same position.

<Formation of liquid crystal display panel>
Next, a process for forming the liquid crystal display panel 200 will be described with reference to FIGS. 11, 12, and 13. FIG. 11 is a flowchart showing a process of forming a liquid crystal display panel. 12 is a cross-sectional view showing a process of forming a filter film in the process of forming a liquid crystal display panel, and FIG. 13 is a cross-sectional view showing a process of forming an alignment film in the process of forming a liquid crystal display panel. is there. The liquid crystal display panel 200 is formed by bonding together an element substrate 210 and a counter substrate 220 that are separately formed.

The counter substrate 220 is formed by executing steps S1 to S5 shown in FIG.
In step S <b> 1 of FIG. 11, a partition wall for partitioning the filter film region 225 is formed on the glass substrate 201. The partition walls are formed by forming the black matrix 202 in a lattice shape, forming the bank 203 thereon, and disposing the partition walls 204 composed of the black matrix 202 and the bank 203 in the lattice shape. Thereby, as shown in FIG. 12A, a square filter film region 225 partitioned by the partition walls 204 is formed on the surface of the glass substrate 201.

  Next, in step S2 of FIG. 11, the filter film region 225 is filled with the material constituting the red filter film 205R, the green filter film 205G, or the blue filter film 205B, respectively, and the red filter film 205R and the green filter film 205G are filled. And the blue filter film 205B are formed, and the CF layer 208 is formed.

  More specifically, as shown in FIG. 12B, the red discharge head 17R is opposed to the surface of the glass substrate 201 on which the filter film region 225 partitioned by the partition 204 is formed. The red functional liquid 252R is disposed in the filter film region 225R by discharging the red functional liquid 252R from the discharge nozzle 78 of the red discharge head 17R toward the filter film region 225R where the red filter film 205R is to be formed. . At the same time, the red functional liquid 252R is disposed in all the filter film regions 225R formed on the glass substrate 201 by moving the red discharge head 17R relative to the glass substrate 201 as indicated by the arrow a. By drying the arranged red functional liquid 252R, a red filter film 205R is formed in the filter film region 225R as shown in FIG.

  Similarly, in the filter film region 225G or the filter film region 225B where the green filter film 205G or the blue filter film 205B shown in FIG. 12B is to be formed, as shown in FIG. 252G or blue functional liquid 252B is disposed. By drying the green functional liquid 252G and the blue functional liquid 252B, the green filter film 205G or the blue filter film 205B is formed in the filter film region 225G and the filter film region 225B as shown in FIG. A three-color filter composed of a red filter film 205R, a green filter film 205G, and a blue filter film 205B is formed together with the red filter film 205R.

Next, in step S3 of FIG. 11, a planarization layer is formed. As shown in FIG. 12E, a planarizing film 206 as a planarizing layer is formed on the red filter film 205R, the green filter film 205G, the blue filter film 205B, and the partition wall 204 that constitute the CF layer 208. . The planarizing film 206 is formed in a region that covers at least the entire surface of the CF layer 208. By providing the planarization film 206, the surface on which the counter electrode 207 is formed is made substantially flat.
Next, in step S4 of FIG. 11, the counter electrode 207 is formed. As shown in FIG. 12F, a thin film is formed using a transparent conductive material in a region covering the entire surface of the region where the filter film 205 of the CF layer 208 is formed on the planarizing film 206. . This thin film is the counter electrode 207 described above.

Next, in step S <b> 5 of FIG. 11, the alignment film 228 of the counter substrate 220 is formed on the counter electrode 207. The alignment film 228 is formed in a region covering at least the entire surface of the CF layer 208.
As shown in FIG. 13G, the liquid droplet ejection head 17 is opposed to the surface of the glass substrate 201 on which the counter electrode 207 is formed, and the alignment film liquid is directed from the liquid droplet ejection head 17 toward the surface of the glass substrate 201. 242 is discharged. At the same time, by moving the droplet discharge head 17 relative to the glass substrate 201 as indicated by the arrow a, the alignment film liquid 242 is disposed on the entire surface of the glass substrate 201 where the alignment film 228 is to be formed. By drying the alignment film liquid 242 disposed, an alignment film 228 is formed as shown in FIG. Step S5 is performed, and the counter substrate 220 is formed.

The element substrate 210 is formed by executing steps S6 to S8 shown in FIG.
In step S6 of FIG. 11, by forming a conductive layer, an insulating layer, or a semiconductor layer on the glass substrate 211, an element such as the TFT element 215, the scanning line 212, the signal line 214, the insulating layer 216, or the like is formed. Form. The scanning line 212 and the signal line 214 are formed at a position facing the partition wall 204, that is, a position around the pixel, in a state where the element substrate 210 and the counter substrate 220 are bonded to each other. The TFT element 215 is formed so as to be positioned at the end of the pixel, and at least one TFT element 215 is formed in one pixel.

  Next, in step S7, the pixel electrode 217 is formed. The pixel electrode 217 is formed at a position facing the red filter film 205R, the green filter film 205G, or the blue filter film 205B in a state where the element substrate 210 and the counter substrate 220 are bonded to each other. The pixel electrode 217 is electrically connected to the drain electrode of the TFT element 215.

Next, in step S8, an alignment film 218 of the element substrate 210 is formed on the pixel electrode 217 or the like. The alignment film 218 is formed in a region covering the entire surface of at least all the pixel electrodes 217.
As shown in FIG. 13 (i), the droplet discharge head 17 is opposed to the surface of the glass substrate 211 on which the pixel electrode 217 is formed, and the alignment film liquid is directed from the droplet discharge head 17 toward the surface of the glass substrate 211. 242 is discharged. At the same time, the liquid droplet ejection head 17 is moved relative to the glass substrate 211 as indicated by an arrow a, thereby arranging the alignment film liquid 242 on the entire surface of the glass substrate 211 where the alignment film 218 is to be formed. By drying the alignment film liquid 242 arranged, an alignment film 218 is formed as shown in FIG. Step S8 is performed, and the element substrate 210 is formed.

  Next, in step S9, the counter substrate 220 and the element substrate 210 thus formed are bonded together, and the liquid crystal 230 is filled therebetween as shown in FIG. Further, the liquid crystal display panel 200 is assembled by attaching the polarizing plate 231 and the polarizing plate 232 or the like. When a plurality of counter substrates 220 and element substrates 210 are formed on a mother substrate composed of a plurality of glass substrates 201 and glass substrates 211, the mother substrate on which the plurality of liquid crystal display panels 200 are formed is used as the individual liquid crystal display panel 200. Divide into Alternatively, step S9 is performed after the step of dividing the mother counter substrate and the mother element substrate into the counter substrate 220 and the element substrate 210 is performed. Step S9 is performed and the process of forming the liquid crystal display panel 200 is completed.

<Disposition of CF layer on mother counter substrate>
Next, the arrangement of the CF layer 208 and the CF layer 408 in the mother counter substrate 201A described above will be described with reference to FIG. FIG. 14 is a schematic diagram showing a positional relationship between a droplet discharge head of the discharge unit and a region where a CF layer is formed on the mother counter substrate.
FIG. 14A shows the positional relationship between the area where the CF layer is formed on the mother counter substrate set on the workpiece mounting table and the ejection unit. FIG. 14B shows the arrangement pitch of the filter elements relative to each other. FIG. 6 is a partial enlarged view of a periphery of a portion where different CF layers are adjacent to each other, and shows a relationship between a position where a CF layer is formed on a mother counter substrate and a nozzle group length of a droplet discharge head. The X axis direction and the Y axis direction shown in FIG. 14 coincide with the X axis direction and the Y axis direction shown in FIG.

  As shown in FIG. 14 (a), the ejection unit 2 is moved in the sub-scanning direction indicated by the arrow b with respect to the mother counter substrate 201A set and aligned on the workpiece mounting table 21, thereby moving the sub-scanning direction. In step S1, the discharge nozzle 78 of the discharge unit 2 is positioned. The mother counter substrate 201A is scanned in the main scanning direction indicated by the arrow a, and when the appropriate portion of the mother counter substrate 201A faces the discharge nozzle 78, the functional liquid 252 is discharged from the discharge nozzle 78, whereby the mother The functional liquid 252 is disposed at a predetermined position on the counter substrate 201A. As described with reference to FIG. 10, the CF layer 208 and the CF layer 408 have different ejection timings in the main scanning direction for disposing the functional liquid 252 from each other. A region where the CF layer 208 or the CF layer 408 is formed corresponds to a first discharged region or a second discharged region, and corresponds to a first panel region or a second panel region.

As shown in FIG. 14B, the CF layer 208 and the CF layer 408 are formed at a distance D in the sub-scanning direction. The distance D is set to be larger than the nozzle group length L of the droplet discharge head 17 indicated by a two-dot chain line in FIG.
In the example shown in FIG. 14B, the droplet discharge head 17f is in a position facing the region including the boundary of the region where the CF layer 208 is formed, and the boundary of the region where the droplet discharge head 17e forms the CF layer 408. It is in a position facing the area including Since the boundary of the CF layer 208 and the boundary of the CF layer 408 are separated from each other by a distance D that is larger than the nozzle group length L, the droplet discharge head 17f is in a region where the CF layer 408 is formed or the droplet discharge head 17e is It does not face the region where the CF layer 208 is formed. In other words, no matter how the plurality of droplet discharge heads 17 (discharge units 2) are arranged in the sub-scanning direction with respect to the mother counter substrate 201A, the same droplet discharge head 17 requires different discharge timings. The CF layer 208 and the CF layer 408 are not disposed. An appropriate discharge timing when the discharge nozzle 78 of the droplet discharge head 17f or the droplet discharge head 17e performs drawing discharge is uniform in each of the droplet discharge head 17f and the droplet discharge head 17e. Accordingly, the latch signal 262 described with reference to FIG. 10 is applied to the droplet discharge head 17f to discharge the functional liquid 252, and the latch signal described with reference to FIG. 10 is applied to the droplet discharge head 17e. By applying 272 and discharging the functional liquid 252, it is possible to perform discharge at an appropriate discharge timing.

<Other arrangement examples of the CF layer on the mother counter substrate>
Next, as another arrangement example of the CF layer in the mother counter substrate, the arrangement of the CF layer 208 and the CF layer 408 in the mother counter substrate 401A will be described with reference to FIG. Similar to the mother counter substrate 201A, a CF layer 208 and a CF layer 408 are formed on the mother counter substrate 401A in a different arrangement from the mother counter substrate 201A. FIG. 15 is a schematic diagram showing a positional relationship between a droplet discharge head of the discharge unit and a region where a CF layer is formed on the mother counter substrate.
FIG. 15A shows the positional relationship between the region where the CF layer is formed on the mother counter substrate set on the workpiece mounting table and the discharge unit, and FIG. 15B shows the arrangement pitch of the filter elements relative to each other. FIG. 6 is a partial enlarged view of a periphery of a portion where different CF layers are adjacent to each other, and shows a relationship between a position where a CF layer is formed on a mother counter substrate and a nozzle group length of a droplet discharge head. The X-axis direction and the Y-axis direction shown in FIG. 15 coincide with the X-axis direction and the Y-axis direction shown in FIG.

  As shown in FIG. 15 (a), the ejection unit 2 is moved in the sub-scanning direction indicated by the arrow b with respect to the mother counter substrate 401A set and aligned on the workpiece mounting table 21, so as to move in the sub-scanning direction. In step S1, the discharge nozzle 78 of the discharge unit 2 is positioned. When positioning the ejection nozzles 78 in the sub-scanning direction, the boundary of the region where the CF layer 408 is formed opposite to the CF layer 208 (the lower side in FIG. 15) is used as the reference position. The mother counter substrate 401A is scanned in the main scanning direction indicated by the arrow a, and when the appropriate portion of the mother counter substrate 401A faces the discharge nozzle 78, the functional liquid 252 is discharged from the discharge nozzle 78, whereby the mother The functional liquid 252 is disposed at a predetermined position on the counter substrate 401A. As described with reference to FIG. 10, the CF layer 208 and the CF layer 408 have different ejection timings in the main scanning direction for disposing the functional liquid 252 from each other. The mother counter substrate 401A corresponds to a base material or a mother panel. In FIG. 15, the space between the regions where the CF layer 208 and the CF layer 408 are formed is increased for easy understanding of the drawing, but the plate-like material for forming the mother counter substrate 401A is made more efficient. In order to use it well, it is preferable that the interval be small as long as the counter substrate 220 and the counter substrate 420 can be formed.

As shown in FIGS. 15A and 15B, the distance D1 from the boundary of the CF layer 408 opposite to the CF layer 208 to the boundary of the CF layer 208 on the CF layer 408 side is the nozzle group. It is larger than the length nL which is an integral multiple of the length L. n is an integer in which (n−1) L is smaller than the width of the CF layer 408 in the sub-scanning direction and nL is larger than the width of the CF layer 408 in the sub-scanning direction.
In the example shown in FIG. 15B, the droplet discharge head 17b is at a position facing the region including the boundary of the region where the CF layer 408 is formed. The droplet discharge head 17b is a droplet discharge head 17 in which the functional liquid 252 is disposed at the boundary side end serving as the reference position in the region where the CF layer 408 is formed (in the example shown in FIG. 15B, the liquid discharge head 17b This is the nth droplet discharge head 17 counted from the droplet discharge head 17g). Since the distance D1 is greater than the length nL, the droplet discharge head 17b does not face the region where the CF layer 208 is formed.
Further, the droplet discharge head 17c is at a position facing the region including the boundary of the region where the CF layer 208 is formed. The liquid droplet ejection head 17c is the (n + 1) th liquid droplet ejection head 17 counted from the liquid droplet ejection head 17g in which the functional liquid 252 is disposed at the boundary side end serving as the reference position in the region where the CF layer 408 is formed. . Accordingly, the droplet discharge head 17c faces a region where the distance from the end on the boundary side as the reference position of the region where the CF layer 408 is formed is between nL and (n + 1) L. Since the width of the CF layer 408 in the sub-scanning direction is smaller than the length nL, the droplet discharge head 17c does not face the region where the CF layer 408 is formed.
Accordingly, an appropriate ejection timing when the ejection nozzle 78 of the droplet ejection head 17b or the droplet ejection head 17c performs drawing ejection is uniform in each of the droplet ejection head 17b and the droplet ejection head 17c. The latch signal 262 described with reference to FIG. 10 is applied to the droplet discharge head 17c to discharge the functional liquid 252, and the latch signal 272 described with reference to FIG. 10 is applied to the droplet discharge head 17b. By applying and discharging the functional liquid 252, it is possible to perform discharge at an appropriate discharge timing.

<Other arrangement examples of the CF layer on the mother counter substrate>
Next, as another example of the arrangement of the CF layer in the mother counter substrate, the arrangement of the CF layer 308 and the CF layer 328 in the mother counter substrate 301A will be described with reference to FIG. FIG. 16 is a schematic view showing a positional relationship between a droplet discharge head of the discharge unit and a region where a CF layer is formed on the mother counter substrate. The X-axis direction and the Y-axis direction shown in FIG. 16 coincide with the X-axis direction and the Y-axis direction shown in FIG.

  The CF layer 308 is a CF layer constituting the counter substrate 301, and the filter film of the CF layer 308 is formed by disposing the functional liquid 252 in the filter film region 325. The CF layer 328 is a CF layer constituting the counter substrate 321, and the filter film of the CF layer 328 is formed by disposing the functional liquid 252 in the filter film region 335. The CF layer 308 and the CF layer 328 have basically the same configuration as the CF layer 208 and are different in size from the CF layer 208. The CF layer 308 and the CF layer 328 have different sizes. Since the sizes are different, the CF layer 308 and the CF layer 328 are different from each other in appropriate discharge timing at the discharge nozzle 78 when the functional liquid 252 is disposed. The mother counter substrate 301A corresponds to a base material or a mother panel. A region where the CF layer 308 or the CF layer 328 is formed corresponds to a first discharged region or a second discharged region, and corresponds to a first panel region or a second panel region. In FIG. 16, the interval between the regions where the CF layer 308 and the CF layer 328 are formed is increased for easy understanding of the drawing. However, in order to efficiently use the mother counter substrate 301A, It is preferable that the interval be small as long as the counter substrate 301 and the counter substrate 321 can be formed.

  As shown in FIG. 16, the ejection unit 2 is moved in the sub-scanning direction indicated by the arrow b with respect to the mother counter substrate 301 </ b> A set and aligned on the workpiece mounting table 21, and the ejection unit in the sub-scanning direction. Two discharge nozzles 78 are positioned. The mother counter substrate 301A is scanned in the main scanning direction indicated by the arrow a, and when the appropriate portion of the mother counter substrate 301A faces the discharge nozzle 78, the functional liquid 252 is discharged from the discharge nozzle 78, whereby the mother The functional liquid 252 is disposed at a predetermined position on the counter substrate 301A.

In the mother counter substrate 301A, the CF layer 308 and the CF layer 328 are adjacent to each other in the main scanning direction, and in the sub scanning direction, the CF layers 308 or the CF layers 328 are arranged side by side. And the CF layer 328 are not adjacent to each other in the sub-scanning direction. Accordingly, the droplet discharge heads 17 of the discharge unit 2 do not simultaneously face regions having different appropriate discharge timings.
The latch signal applied to the droplet discharge head 17 of the discharge unit 2 can be switched during main scanning, and is switched between a region where the CF layer 308 is formed and a region where the CF layer 328 is formed. When the droplet discharge head 17 discharges the functional liquid 252 toward the region where the CF layer 308 is formed, discharge is performed at an appropriate discharge timing in the region, and toward the region where the CF layer 328 is formed. When the functional liquid 252 is discharged, discharge is performed at an appropriate discharge timing in the region.

According to the first embodiment, the following effects can be obtained.
(1) In the mother counter substrate 201A, the boundary of the CF layer 208 and the boundary of the CF layer 408 are separated by a distance D greater than the nozzle group length L. For this reason, the single droplet discharge head 17 is not located at a position facing both the CF layer 208 and the CF layer 408 simultaneously. The appropriate discharge resolution when the droplet discharge head 17 of the discharge unit 2 that discharges the functional liquid toward the mother counter substrate 201A performs the drawing discharge is uniform in each of the droplet discharge heads 17. By applying the latch signal 262 or the latch signal 272 to the droplet discharge head 17 to cause the functional liquid 252 to be discharged, it is possible to perform discharge at an appropriate discharge timing.
Thereby, compared with the case where the discharge to the CF layer 208 and the discharge to the CF layer 408 are performed in separate main scans, the counter substrate 220 of the liquid crystal display panel 200 and the counter substrate 420 of the liquid crystal display panel are formed. The time required for this can be suppressed.

(2) In the mother counter substrate 401A, the distance D1 from the boundary of the CF layer 408 opposite to the CF layer 208 to the boundary of the CF layer 208 on the CF layer 408 side is an integral multiple of the nozzle group length L. It is larger than nL. For this reason, the discharge nozzle 78 of the droplet discharge head 17 at a position where the functional liquid 252 is disposed in the region where the CF layer 408 of the mother counter substrate 401A is formed is positioned at a position facing the region where the CF layer 208 is formed. There is nothing. The appropriate discharge resolution when the droplet discharge head 17 of the discharge unit 2 that discharges the functional liquid toward the mother counter substrate 401A performs the drawing discharge is uniform in each of the droplet discharge heads 17. By applying the latch signal 262 or the latch signal 272 to the droplet discharge head 17 to discharge the functional liquid 252, it is possible to perform discharge at an appropriate discharge timing.
Thereby, compared with the case where the discharge to the CF layer 208 and the discharge to the CF layer 408 are performed in separate main scans, the counter substrate 220 of the liquid crystal display panel 200 and the counter substrate 420 of the liquid crystal display panel are formed. The time required for this can be suppressed.

(3) In the mother counter substrate 301A, the CF layer 308 and the CF layer 328 are not adjacent to each other in the sub-scanning direction. For this reason, the droplet discharge heads 17 of the discharge unit 2 that discharges the functional liquid toward the mother counter substrate 301A do not simultaneously face regions having different filter element arrangement pitches. By switching the applied latch signal between the region where the CF layer 308 is formed and the region where the CF layer 328 is formed, the droplet discharge head 17 discharges the functional liquid 252 toward the region where the CF layer 308 is formed. When discharging, and when discharging toward the region where the CF layer 328 is formed, the discharge can be performed at an appropriate discharge timing in each region.
As a result, there is a droplet discharge head 17 that does not have a single appropriate discharge timing when performing drawing discharge, and the droplet discharge head 17 performs discharge at each discharge timing in separate main scans. Compared to the case, the time required for forming the counter substrate 301 and the counter substrate 321 of the liquid crystal display panel can be suppressed.

(Second embodiment)
Next, a second embodiment of a base material, a discharge area arrangement method for the base material, a mother panel, and a panel area arrangement method for the mother panel will be described with reference to the drawings. In this embodiment, a light emitting layer, a hole transport layer, or the like, which is an example of a functional film, is formed in a process of manufacturing an organic EL display device, which is an example of an electro-optical device, using an ink jet type droplet discharge device. The process will be described as an example. Since the droplet discharge device of the present embodiment is substantially the same as the droplet discharge device described in the first embodiment, the description of the droplet discharge device is omitted.

<Configuration of organic EL (electroluminescence) display device>
First, the configuration of the organic EL display device will be described with reference to FIGS. 17 and 18. FIG. 17 is a schematic front view showing an organic EL display device. FIG. 17A is a schematic front view showing the entire organic EL display device, and FIG. 17B is a partially enlarged view showing an arrangement example of color light emitting elements. As shown in FIG. 17A, the organic EL display device 500 of this embodiment includes an element substrate 501 having a plurality of organic EL elements 507 that are light emitting elements, and a sealing substrate 509. The organic EL element 507 is a so-called color light emitting element, and the organic EL display device 500 includes a three-color organic EL element 507 of a red element 507R (red), a green element 507G (green), and a blue element 507B (blue). have. The organic EL element 507 is disposed in the display area 506, and an image is displayed in the display area 506.

  For example, as shown in FIG. 17B, the three-color organic EL elements 507 on the element substrate 501 are arranged in the same color, and the three-color color light-emitting elements are arbitrarily adjacent to each other. The three organic EL elements 507 are arranged so as to have different colors. The planar shape of each organic EL element 507 is substantially circular. The arrangement density of the organic EL elements 507 is increased by shifting the organic EL elements 507 arranged in the vertical direction in the figure in the horizontal direction in the figure.

The element substrate 501 includes a plurality of switching elements 512 (see FIG. 18) as drive elements at positions corresponding to the respective organic EL elements 507. The switching element 512 is, for example, a TFT (Thin Film Transistor) element. In addition, two scanning line driving circuit portions 503 and 503 for driving the switching element 512 and one data line driving circuit portion 504 are provided in a portion that is slightly larger than the sealing substrate 509 and extends in a frame shape. Yes. A flexible relay substrate 508 for connecting the scanning line driver circuit portion 503 or the data line driver circuit portion 504 and an external driver circuit is mounted on the terminal portion 502 of the element substrate 501. The scanning line driving circuit unit 503 and the data line driving circuit unit 504 are configured by, for example, forming a low-temperature polysilicon semiconductor layer on the surface of the element substrate 501 in advance.
Note that in FIG. 17, in order to easily show the scanning line driver circuit portion 503 and the like, the surrounding area is shown larger than the display area 506.

  FIG. 18 is a cross-sectional view of a main part including an organic EL element of an organic EL display device. The element substrate 501 includes a glass substrate 510, a plurality of switching elements 512, an insulating layer 511, a plurality of pixel electrodes 514, and a bank 515. The plurality of switching elements 512 are formed on one surface of the glass substrate 510. The insulating layer 511 is formed so as to cover the switching element 512. Each of the plurality of pixel electrodes 514 is formed on the insulating layer 511 and is electrically connected to one of the three electrode terminals of the switching element 512 via the conductive layer 514a. The bank 515 is formed between the plurality of pixel electrodes 514 so as to partition the space where the pixel electrode 514 faces for each pixel electrode 514.

  Further, a hole transport layer 516 formed on the pixel electrode 514 in a region partitioned by the bank 515 (hereinafter referred to as “pixel region 521”) and a layer stacked on the hole transport layer 516 are formed. A light emitting layer 517 and a counter electrode 518 provided to cover the light emitting layer 517 and the bank 515. In the organic EL display device 500, a sealing substrate 509 is disposed facing the counter electrode 518 of the element substrate 501, and an inert gas 520 is sealed between the counter electrode 518 and the sealing substrate 509. The pixel electrode 514, the hole transport layer 516 formed on the pixel electrode 514 in the region partitioned by the bank 515, the light emitting layer 517, and the counter electrode 518 correspond to the organic EL element 507.

  A red light emitting layer 517R (red), a green light emitting layer 517G (green), and a blue light emitting layer 517B (blue) are formed in the pixel region 521, which are light emitting layers 517 that respectively emit red, green, and blue light. Thus, a red element 507R, a green element 507G, and a blue element 507B are formed. A set of organic EL elements 507 each including one red element 507R, one green element 507G, and one blue element 507B forms a picture element, which is the minimum unit constituting an image. Full color display is performed by selectively emitting any one of the red element 507R, the green element 507G, and the blue element 507B in one picture element or a combination thereof.

<Formation of organic EL element>
Next, a process of forming the hole transport layer 516, the light emitting layer 517, and the counter electrode 518 constituting the organic EL element 507 in the element substrate 501 of the organic EL display device 500 will be described with reference to FIGS. To do. FIG. 19 is a flowchart showing a process for forming a hole transport layer, a light emitting layer, and a counter electrode of an element substrate. FIGS. 20A to 20E are a hole transport layer, a light emitting layer, and a counter electrode of the element substrate. It is a schematic cross section which shows the formation process.

  In step S41 of FIG. 19, as shown in FIG. 20A, the bank 515 is formed on the surface of the glass substrate 510 on which the switching element 512, the insulating layer 511, the conductive layer 514a, and the pixel electrode 514 are formed. Then, a partition wall is formed. The bank 515 is formed by, for example, applying a liquid material containing the material of the bank 515 to the surface of the glass substrate 510 and drying it to form a bank film, and removing portions such as the pixel region 521 by photoetching or the like. . Next, in step S42, the glass substrate 510 on which the bank 515 is formed is cleaned.

  Next, in step S43, the glass substrate 510 on which the bank 515 has been formed and cleaned is subjected to a surface treatment so that the functional liquid 560 including the material of the hole transport layer 516 is easily filled. The bottom of the pixel region 521 surrounded by the bank 515 and the side surface of the bank 515 are processed so as to be lyophilic with respect to the functional liquid 560, and the top of the bank 515 is liquid repellent with respect to the functional liquid 560. Process so that By this processing, the functional liquid 560 arranged to be filled in the pixel region 521 can easily become familiar with the pixel region 521 and hardly overflow from the pixel region 521.

  Next, in step S44, a hole transport layer material liquid is applied. As shown in FIG. 20B, the functional liquid 560 containing the material of the hole transport layer 516 is ejected from the liquid droplet ejection head 17 as the liquid droplets 560a in each of the plurality of pixel regions 521 formed by the bank 515. The functional liquid 560 is filled in the pixel region 521.

Next, in step S45, the hole transport layer 516 is formed by drying the functional liquid 560. The functional liquid 560 is dried to form a hole transport layer 516 as shown in FIG.
This step may be performed in a reduced pressure environment in order to control the dry state and form a more uniform hole transport layer 516. The glass substrate 510 in which the pixel region 521 is filled with the functional liquid 560 is put into a reduced pressure environment, and the functional liquid 560 is dried to form the hole transport layer 516. Strictly speaking, the functional liquid 560 starts drying from the moment it is ejected from the liquid droplet ejection head 17 as a liquid droplet 560a. However, by adjusting the boiling point of the solvent of the functional liquid 560 and the like, the functional liquid 560 is almost normal pressure. It can be made to dry in a pressure-reduced state without drying. In order to perform almost all drying in the drying process in a reduced pressure environment, it is preferable that the functional liquid 560 has a high ratio of a high-boiling solvent whose drying progresses slowly.

Next, in step S46, a light emitting layer material liquid is applied. As shown in FIG. 20C, the functional liquid 570 containing the material of the light emitting layer 517 is discharged as droplets from the droplet discharge head 17 to each of the plurality of pixel regions 521 where the hole transport layer 516 is formed. The functional liquid 570 is filled in the pixel region 521.
As described above, the organic EL display device 500 includes the three-color light emitting layer 517 of the red light emitting layer 517R (red), the green light emitting layer 517G (green), and the blue light emitting layer 517B (blue). Color display is performed by the three color light emitting layers.
The functional liquid 570 including the material of the red light emitting layer 517R, the green light emitting layer 517G, or the blue light emitting layer 517B is referred to as a red functional liquid 570R, a green functional liquid 570G, or a blue functional liquid 570B, respectively. The droplet discharge heads 17 filled with the red functional liquid 570R, the green functional liquid 570G, or the blue functional liquid 570B are referred to as a red discharge head 17R, a green discharge head 17G, or a blue discharge head 17B, respectively.

  As shown in FIG. 20C, the red functional liquid 570R is ejected as droplets 570Ra from the red ejection head 17R toward the pixel region 521 where the red light emitting layer 517R is formed. Similarly, the green functional liquid 570G or the blue functional liquid 570B is supplied from the green ejection head 17G or the blue ejection head 17B toward the respective pixel regions 521 where the green light emission layer 517G or the blue light emission layer 517B is formed. It is discharged as a droplet 570Ga or a droplet 570Ba.

  If the surface treatment executed in step S43 is not effective for the functional liquid 570 so that the functional liquid 560 becomes easy to become familiar with the pixel area 521 and does not easily overflow from the pixel area 521, before executing step S46. Further, the same surface treatment as that executed in step S43 is executed. Of course, the processing executed in this case is a surface treatment that makes it easy for the functional liquid 570 to become familiar with the pixel region 521 and not to overflow from the pixel region 521.

Next, in step S47, the red functional liquid 570R, the green functional liquid 570G, and the blue functional liquid 570B are dried to form the red light emitting layer 517R, the green light emitting layer 517G, and the blue light emitting layer 517B. The red functional liquid 570R, the green functional liquid 570G, and the blue functional liquid 570B are dried to form a red light emitting layer 517R, a green light emitting layer 517G, and a blue light emitting layer 517B as shown in FIG.
Similarly to the above-described drying step of the functional liquid 560, this step is also performed under a reduced pressure environment in order to form a more uniform red light emitting layer 517R, green light emitting layer 517G, and blue light emitting layer 517B by controlling the drying state. May be implemented. When performing drying in a reduced pressure environment, the red functional liquid 570R, the green functional liquid 570G, and the blue functional liquid 570B are dried in order to perform almost all drying in the drying process in the reduced pressure environment. It is preferable to increase the ratio of the high-boiling solvent that progresses slowly.

  Next, in step S48, a counter electrode material liquid is applied. The counter electrode material liquid is the red light emitting layer 517R, the green light emitting layer 517G, the blue light emitting layer 517B, and the entire bank 515 of the glass substrate 510 on which the red light emitting layer 517R, the green light emitting layer 517G, and the blue light emitting layer 517B are formed. Apply to cover. The droplet discharge device 1 can also be used for application of the counter electrode material liquid.

Next, in step S49, the counter electrode 518 is formed by drying the counter electrode material liquid. Note that the counter electrode 518 may be formed by vacuum deposition. When the counter electrode 518 is formed by vacuum deposition, a drying process is not necessary.
As shown in FIG. 20E, the process of forming the counter electrode 518 and forming the hole transport layer 516, the light emitting layer 517, and the counter electrode 518 is completed.
Furthermore, the sealing substrate 509 is attached to the element substrate 501 formed by executing the formation process of the hole transport layer 516, the light emitting layer 517, and the counter electrode 518, and the above-described relay substrate 508 and the like are mounted. A display device 500 is formed.

  When a plurality of element substrates 501 and a sealing substrate 509 are formed on a mother substrate composed of a plurality of glass substrates 510 and a sealing substrate 509, the mother substrate on which the plurality of organic EL display devices 500 are formed is separated from the organic substrate. The EL display device 500 is divided. Alternatively, step S49 is performed after the step of dividing the mother counter substrate and the mother sealing substrate into the element substrate 501 and the sealing substrate 509 is performed.

<Disposition of CF layer on mother counter substrate>
Next, the arrangement of the display region 506 in the mother element substrate 501A that partitions and forms a plurality of element substrates 501 will be described with reference to FIG. FIG. 21 is a schematic diagram showing a positional relationship between a droplet discharge head of the discharge unit and a region forming a display region on the mother element substrate.
FIG. 21A shows the positional relationship between the mother element substrate set on the workpiece mounting table and the discharge unit, and FIG. 21B shows that display areas with different appropriate discharge conditions are adjacent to each other. FIG. 5 is a partial enlarged view of the periphery of the portion, showing a relationship between a position where a display area is formed on the mother counter substrate and the nozzle group length of the droplet discharge head. The X-axis direction and the Y-axis direction shown in FIG. 21 coincide with the X-axis direction and the Y-axis direction shown in FIG. 1 or 5 of the first embodiment.

  As shown in FIG. 21 (a), the ejection unit 2 is moved in the sub-scanning direction indicated by the arrow b with respect to the mother element substrate 501A set and aligned on the workpiece mounting table 21, thereby moving the sub-scanning direction. In step S1, the discharge nozzle 78 of the discharge unit 2 is positioned. The mother element substrate 501A is scanned in the main scanning direction indicated by the arrow a, and the functional liquid 560 or the functional liquid 570 is discharged from the discharge nozzle 78 when an appropriate portion of the mother element substrate 501A faces the discharge nozzle 78. Thus, the functional liquid 560 or the functional liquid 570 is disposed at a predetermined position on the mother element substrate 501A.

  A plurality of display areas 506 (element substrates 501) are formed on the mother element substrate 501A. Here, the horizontal direction (horizontal direction in FIG. 17A) of the organic EL display device 500 shown in FIG. 17A is the main scanning direction (the direction of arrow a in FIG. 21A). The arrangement direction of the display region 506 (element substrate 501) in the mother element substrate 501A is expressed as a horizontal arrangement, and the arrangement direction rotated approximately 90 degrees from the horizontal arrangement is expressed as a vertical arrangement. A plurality of display regions 506 (element substrates 501) are provided on the plate-like material for forming the mother element substrate 501A in order to dispose the part for forming the element substrate 501 so that the useless part is reduced. Some are formed in a horizontal arrangement in 501A, and some are formed in a vertical arrangement.

As described with reference to FIG. 17B, in the organic EL element 507, the interval between the elements is different in the vertical direction and the horizontal direction in FIG. Therefore, the horizontal display area 506 and the vertical display area 506 are suitable for disposing the functional liquid 560 that is the hole transport layer material liquid and the functional liquid 570 that is the light emitting layer material liquid in the pixel area 521. Different drawing resolutions are different. That is, appropriate ejection timings in the main scanning direction for disposing the functional liquid 560 and the functional liquid 570 are different from each other.
Hereinafter, the horizontally arranged display area 506 is referred to as a display area 506H, and the vertically arranged display area 506 is referred to as a display area 506V. The mother element substrate 501A corresponds to a base material or a mother panel. A region where the display region 506H or the display region 506V is formed corresponds to the first discharge region or the second discharge region, and corresponds to the first panel region or the second panel region. In FIG. 21, the space between the regions where the display region 506H and the display region 506V are formed is increased in order to make the drawing easier to understand. However, the plate-like material for forming the mother element substrate 501A is made more efficient. In order to use it well, it is preferable that the interval be as small as possible so that the element substrate 501 can be formed.

As shown in FIG. 21B, the display area 506H and the display area 506V are formed with a distance D2 therebetween in the sub-scanning direction. The distance D2 is set to be larger than the nozzle group length L of the droplet discharge head 17 indicated by a two-dot chain line in FIG.
In the example shown in FIG. 21B, the droplet discharge head 17f is in a position facing the region including the boundary of the region where the display region 506H is formed, and the boundary of the region where the droplet discharge head 17e forms the display region 506V. It is in a position facing the area including Since the boundary of the display area 506H and the boundary of the display area 506V are separated from each other by a distance D2 that is larger than the nozzle group length L, the liquid droplet ejection head 17f forms the display area 506V or the liquid droplet ejection head 17e It does not face the area where the display area 506H is formed. An appropriate discharge resolution when the discharge nozzle 78 of the droplet discharge head 17f or the droplet discharge head 17e performs drawing discharge is uniform in each of the droplet discharge head 17f and the droplet discharge head 17e. The droplet discharge head 17f can perform discharge at an appropriate discharge timing in the display region 506H, and the droplet discharge head 17e can perform discharge at an appropriate discharge timing in the display region 506V.

According to 2nd embodiment, in addition to the effect acquired by 1st embodiment, the effect described below is acquired.
(1) In the mother element substrate 501A, the boundary of the display area 506H and the boundary of the display area 506V are separated by a distance D2 that is larger than the nozzle group length L. For this reason, the single droplet discharge head 17 is not located at a position that simultaneously faces both the display area 506H and the display area 506V. Appropriate discharge resolution when the droplet discharge head 17 of the discharge unit 2 that discharges the functional liquid toward the mother element substrate 501A performs drawing discharge is uniform in each of the droplet discharge heads 17. By applying an appropriate latch signal for disposing droplets in the display area 506H or the display area 506V to the droplet discharge head 17 to cause the functional liquid 252 to be discharged, discharge at an appropriate discharge timing can be performed. Can be implemented.
As a result, there is a droplet discharge head 17 that does not have a single appropriate discharge resolution when performing drawing discharge, and the droplet discharge head 17 performs discharge at each discharge resolution in separate main scans. Compared to the case, the time required for forming the element substrate 501 of the organic EL display device 500 can be suppressed.

  As mentioned above, although preferred embodiment was described referring an accompanying drawing, suitable embodiment is not restricted to the said embodiment. It goes without saying that various changes can be made without departing from the scope of the invention, and the following can also be implemented.

  (Modification 1) In the embodiment, in the mother counter substrate 401A, from the boundary of the CF layer 408 opposite to the CF layer 208 as a reference, the boundary from the boundary of the CF layer 208 to the CF layer 408 side. The distance D1 is larger than the length nL which is an integral multiple of the nozzle group length L. However, the reference boundary is not limited to the boundary of the CF layer 408. The distance from the boundary of the CF layer 208 farthest from the CF layer 408 to the boundary of the CF layer 408 on the side opposite to the CF layer 408 is the nozzle group length. It may be a mother substrate in which the CF layer 408 and the CF layer 208 are arranged at a position larger than a length that is an integral multiple of L.

(Modification 2) In the above-described embodiment, drawing ejection when forming the filter film 205 of the liquid crystal display panel 200 which is an example of the electro-optical device, and the hole transport layer 516 and the light emitting layer 517 of the organic EL display device 500. However, the film to be formed is not limited to the filter film, the hole transport layer, and the light emitting layer. The film to be formed may be an overcoat film provided to protect a pixel electrode film, an alignment film, a counter electrode film, a color filter, or the like of a liquid crystal display device. It may be a positive electrode film or a cathode electrode film of an organic EL display device, a film for forming a pattern by photoetching, a photoresist film such as photoetching, or the like.
An apparatus having a film to be formed or an apparatus that needs to form a film in the formation process is not limited to a liquid crystal display device or an organic EL display device. Any device may be used as long as it is a device having a film as described above, or a device that needs to form a film as described above in the formation process.

  (Modification 3) In the above-described embodiment, the CF layer 208 included in the liquid crystal display panel 200 is a three-color filter having three color filter films: a red filter film 205R, a green filter film 205G, and a blue filter film 205B. However, the color filter may be a multicolor color filter having more types of filter films. As the multicolor filter, for example, six colors including organic EL elements of cyan (blue green), magenta (purple red), and yellow (yellow) which are complementary colors of red, green and blue in addition to red, green and blue. Examples include a color filter and a four-color filter in which green is added to three colors of cyan (blue green), magenta (purple red), and yellow (yellow).

  (Modification 4) In the above embodiment, the organic EL display device 500 is an organic EL display device that performs color display by including three colors of organic EL elements, but the organic EL display device includes a color filter. In addition, an organic EL display device that performs color display using the color filter may be used. In an organic EL display device including a color filter, an organic EL element and a color filter can be formed using a droplet discharge device.

  (Modification 5) In the embodiment, the organic EL element 507 is a top emission type organic EL element that emits light from the sealing substrate side, but the organic EL element is not limited to the top emission type. It may be a bottom emission type organic EL element that emits light from the substrate side. In the bottom emission type organic EL element, at least the substrate-side electrode is formed of a transparent material.

  (Modification 6) In the embodiment described above, the organic EL element 507 includes the three-color light emitting layers of the red light emitting layer 517R, the green light emitting layer 517G, and the blue light emitting layer 517B as the light emitting layer. It is not essential for the device to include the light emitting layers of the three colors. The light emitting layer included in the organic EL element may be a light emitting layer that emits light of other colors.

  (Modification 7) In the above-described embodiment, the organic EL element 507 includes the red light emitting layer 517R, the green light emitting layer 517G, or the blue light emitting layer 517B. However, the light emitting layer included in one organic EL element is provided. It is not essential to have a single layer. For example, a single organic EL device may have a structure in which three layers of light emitting layers of a red light emitting layer, a blue light emitting layer, and a green light emitting layer are provided as light emitting layers.

  (Modification 8) In the above-described embodiment, the organic EL element 507 provided in the organic EL display device 500 includes the red element 507R, the green element 507G, and the blue element 507B. However, the organic EL display apparatus includes the organic EL element 507. The type of organic EL element is not limited to three. The organic EL display device may be a multicolor organic EL display device including many types of organic EL elements. As a multicolor organic EL display device, for example, in addition to red, green, and blue, red, green, and blue complementary colors of cyan (blue green), magenta (purple red), and yellow (yellow) organic EL elements are included. Examples include a six-color organic EL display device and a four-color organic EL display device in which green is added to three colors of cyan (blue green), magenta (purple red), and yellow (yellow).

  (Modification 9) In the above embodiment, the organic EL element 507 has the hole transport layer 516 and the light emitting layer 517 formed between the pixel electrode 514 and the counter electrode 518. It is not essential to have a simple configuration. Organic EL elements have a configuration in which only the light emitting layer is sandwiched between the pixel electrode and the counter electrode, a configuration in which the hole transport layer, the light emitting layer, and the electron transport layer are sandwiched, a hole injection layer, A structure in which a hole transport layer, a light emitting layer, and an electron transport layer are sandwiched, or a structure in which a hole transport layer, a light emitting layer, an electron transport layer, a hole injection layer, and an electron injection layer are sandwiched It has been known. The organic EL element may be an organic EL element having any configuration such as these configurations.

1 is a plan view showing a schematic configuration of a droplet discharge device according to a first embodiment. The side view which shows schematic structure of a droplet discharge apparatus. FIG. 2 is an external perspective view showing an outline of a droplet discharge head. FIG. 2 is a plan view showing a schematic configuration of a head unit. FIG. 5 is a schematic diagram illustrating an arrangement example of a droplet discharge head that discharges each functional liquid in a head unit when a three-color filter is formed. FIG. 3 is an electrical configuration block diagram showing an electrical configuration of the droplet discharge device. The disassembled perspective view which shows schematic structure of a liquid crystal display panel. (A) The figure which shows the planar structure of a counter substrate typically. (B) The figure which shows the planar structure of a mother opposing substrate typically. The schematic plan view which shows the example of an arrangement | sequence of the filter film | membrane of a 3 color filter. Explanatory drawing which shows the relationship between the shape of a filter film area | region, and discharge resolution. The flowchart which shows the process in which a liquid crystal display panel is formed. Sectional drawing which shows the process etc. which form the filter film in the process of forming a liquid crystal display panel. Sectional drawing which shows the process etc. which form the alignment film in the process of forming a liquid crystal display panel. (A) The schematic diagram which shows the positional relationship of the area | region which forms CF layer in the mother opposing substrate set to the workpiece mounting base, and a discharge unit. (B) The elements on larger scale of the periphery of the part where the CF layer from which suitable discharge conditions differ mutually is adjacent. (A) The schematic diagram which shows the positional relationship of the area | region which forms CF layer in the mother opposing substrate set to the workpiece mounting base, and a discharge unit. (B) The elements on larger scale of the periphery of the part where the CF layer from which suitable discharge conditions differ mutually is adjacent. FIG. 4 is a schematic diagram showing a positional relationship between a droplet discharge head of a discharge unit and a region where a CF layer is formed on a mother counter substrate. (A) The schematic front view which shows the whole organic EL display apparatus in 2nd embodiment. (B) The elements on larger scale which show the example of an arrangement | sequence of a color element. Sectional drawing of the principal part containing the organic EL element of an organic EL display apparatus. The flowchart which shows the formation process of the positive hole transport layer, light emitting layer, and counter electrode of an element substrate. The schematic cross section which shows the formation process of the positive hole transport layer of a device substrate, a light emitting layer, and a counter electrode. (A) The schematic diagram which shows the positional relationship of the mother element board | substrate set to the workpiece mounting base, and the discharge unit. (B) The elements on larger scale of the periphery of the part where the display area where appropriate discharge conditions differ mutually is adjacent.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge apparatus, 2 ... Discharge unit, 6 ... Discharge apparatus control part, 17 ... Droplet discharge head, 78 ... Discharge nozzle, 78b ... Nozzle row, 200 ... Liquid crystal display panel, 201 ... Glass substrate, 201A ... Mother Counter substrate, 205 ... filter film, 208,408 ... CF layer, 210 ... element substrate, 211 ... glass substrate, 220 ... counter substrate, 225,225B, 225G, 225R ... filter film region, 252 ... functional liquid, 262,272 ... Latch signal, 263, 263B, 263G, 263R, 273, 273B, 273G, 273K, 273R ... Landing point, 301, 321 ... Counter substrate, 301A ... Mother counter substrate, 308, 328 ... CF layer, 325, 335 ... Filter Membrane region 401 ... Glass substrate 401A ... Mother counter substrate 405 ... Filter membrane 405B ... Blue Ruta film, 405G ... green filter film, 405R ... red filter film, 420 ... counter substrate, 425, 425B, 425G, 425R ... filter film region, 500 ... organic EL display device, 501 ... element substrate, 501A ... mother element substrate, 506, 506H, 506V ... display region, 507 ... organic EL element, 510 ... glass substrate, 516 ... hole transport layer, 517 ... light emitting layer, 517B ... blue light emitting layer, 517G ... green light emitting layer, 517R ... red light emitting layer, 560, 570 ... functional fluid.

Claims (14)

Each nozzle group has a plurality of discharge nozzles driven based on the same timing signal that defines the timing of discharging the liquid material, and the plurality of discharge nozzles are arranged in a plurality of nozzle groups arranged in the sub-scanning direction. On the other hand, the substrate is relatively moved in the main scanning direction intersecting the sub-scanning direction, and the liquid material is disposed by being discharged from each of the discharge nozzles,
The liquid material can be appropriately arranged by the discharge nozzle, and a first discharge region in which a cycle of the timing signal is a first cycle;
A period of the timing signal at which the liquid material can be appropriately arranged by the discharge nozzle includes a second discharge region having a second period different from the first period,
In the relative movement in the main scanning direction, the same nozzle group is positioned at a position where both the first discharged region portion and the second discharged region portion do not simultaneously face each other. A base material in which a first discharged region and the second discharged region are arranged.   The first discharged region and the second discharged region adjacent in the sub-scanning direction are in the sub-scanning direction among the plurality of discharge nozzles of the nozzle group in the sub-scanning direction. The base material according to claim 1, wherein the base material is disposed at a distance larger than a distance between centers of the discharge nozzles located at both ends.   The first discharge area and the second discharge area that are adjacent in the sub-scanning direction are a plurality of the discharge nozzles of the nozzle group in the sub-scanning direction, and are formed on the substrate. Among the plurality of effective nozzles used for discharging the liquid material toward the end, the nozzles are arranged at an interval larger than the distance between the centers of the discharge nozzles located at both ends in the sub-scanning direction. The base material according to claim 1. The length of the nozzle group in the sub-scanning direction in the plurality of nozzle groups is constant,
The first discharged region and the second discharged region adjacent in the sub-scanning direction extend in the main scanning direction on the side opposite to the second discharged region in the sub-scanning direction. The distance from the end of the first discharge area to the end of the second discharge area on the first discharge area side is an integral multiple of the length of the nozzle group in the sub-scanning direction. 2. The apparatus according to claim 1, wherein the first discharge area is disposed at a position that is longer than a minimum length in a length longer than a width in the sub-scanning direction of the first discharge region. Base material.   2. The substrate according to claim 1, wherein the first discharge region and the second discharge region are arranged at positions that are not adjacent to each other in the sub-scanning direction. Each nozzle group has a plurality of discharge nozzles driven based on the same timing signal that defines the timing of discharging the liquid material, and the plurality of discharge nozzles are arranged in a plurality of nozzle groups arranged in the sub-scanning direction. On the other hand, the liquid material is relatively moved in the main scanning direction intersecting the sub-scanning direction, and the liquid material is discharged from each of the discharge nozzles, whereby the liquid material is disposed at an arbitrary position, and the discharge nozzle The liquid material can be appropriately arranged by the first discharge region in which the period of the timing signal is the first period, and the period of the timing signal in which the liquid substance can be appropriately arranged by the discharge nozzles. A second discharged region that is a second cycle different from the first cycle, and a discharged region arrangement method for a substrate,
In the same nozzle group, the first discharged area and the second discharged area are not simultaneously opposed to the first discharged area and the second discharged area. A method for arranging a region to be ejected on a base material, comprising arranging a second region to be ejected.   The first discharge area and the second discharge area that are adjacent in the sub-scanning direction are divided in the sub-scanning direction among the plurality of discharge nozzles of the nozzle group in the sub-scanning direction. The method according to claim 6, further comprising disposing the substrate at an interval larger than the distance between the centers of the discharge nozzles located at both ends.   A plurality of the discharge nozzles of the nozzle group in the sub-scanning direction, wherein the first discharge region and the second discharge region that are adjacent in the sub-scanning direction are arranged on the substrate. The plurality of effective nozzles that are used to discharge the liquid material toward each other are arranged at an interval that is larger than the distance between the centers of the discharge nozzles located at both ends in the sub-scanning direction. Item 7. A method for arranging a discharge area of a substrate according to Item 6.   The substrate discharged region according to claim 6, wherein the first discharged region and the second discharged region are arranged at positions that are not adjacent to each other in the sub-scanning direction. Placement method. Each nozzle group has a plurality of discharge nozzles driven based on the same timing signal that defines the timing of discharging the liquid material, and the plurality of discharge nozzles are arranged in a plurality of nozzle groups arranged in the sub-scanning direction. On the other hand, a mother panel in which the liquid material is arranged by being relatively moved in the main scanning direction intersecting with the sub-scanning direction and discharging the liquid material from each of the discharge nozzles,
A first panel region in which the liquid material can be appropriately arranged by the discharge nozzle, and the cycle of the timing signal is a first cycle;
A second panel region having a second period different from the first period, wherein the period of the timing signal at which the liquid material can be appropriately arranged by the discharge nozzle,
In the same nozzle group, the first panel region and the second panel are positioned so that both the first panel region part and the second panel region part do not face each other at the same time. A mother panel characterized in that an area is arranged.   The first panel region and the second panel region adjacent in the sub-scanning direction are arranged at both ends in the sub-scanning direction among the plurality of ejection nozzles of the nozzle group in the sub-scanning direction. The mother panel according to claim 10, wherein the mother panel is disposed at a distance larger than a distance between centers of the discharge nozzles positioned.   The first panel region and the second panel region that are adjacent in the sub-scanning direction are a plurality of the discharge nozzles of the nozzle group in the sub-scanning direction, and are directed toward the mother panel. The plurality of effective nozzles used for discharging the liquid material are arranged at an interval larger than a distance between centers of the discharge nozzles located at both ends in the sub-scanning direction. Item 11. The mother panel according to Item 10. Each nozzle group has a plurality of discharge nozzles driven based on the same timing signal that defines the timing of discharging the liquid material, and the plurality of discharge nozzles are arranged in a plurality of nozzle groups arranged in the sub-scanning direction. On the other hand, the liquid material is relatively moved in the main scanning direction intersecting with the sub-scanning direction, and the liquid material is disposed by being discharged from each of the discharge nozzles, and the liquid material is appropriately disposed by the discharge nozzle. The period of the timing signal that can be arranged in the first panel region in which the period of the timing signal is the first period, and the period of the timing signal in which the liquid material can be appropriately arranged by the discharge nozzle is the first period. A panel region arrangement method for a mother panel comprising: a second panel region having a different second period;
In the same nozzle group, the first panel region and the second panel are positioned so that both the first panel region part and the second panel region part do not face each other at the same time. A method for arranging a panel area of a mother panel, wherein the area is arranged.   The first panel region and the second panel region adjacent in the sub-scanning direction are arranged at both ends in the sub-scanning direction among the plurality of ejection nozzles of the nozzle group in the sub-scanning direction. The method for arranging a panel area of a mother panel according to claim 13, wherein the arrangement is performed with an interval larger than the distance between the centers of the discharge nozzles positioned.

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